Liquid supply module, printing module and printing equipment

Abstract

The invention belongs to the technical field of liquid supply, and relates to a liquid supply module, a printing module and printing equipment. The liquid supply module comprises an ink supply device and at least one nozzle communicated with the ink supply device. The negative pressure filtering device is arranged in the ink supply device and is used for filtering gas in the ink supply device; and the control device is arranged on one side of the ink supply device and used for driving the ink supply device to convey the liquid to be supplied. The durability and the printing quality of the liquid supply module are improved, and the maintenance, replacement and production cost of the liquid supply module is reduced.

Description

Technical Field

[0001] The present application relates to liquid supply technology, and more specifically, to a liquid supply module, a printing module, and a printing device. Background Art

[0002] The liquid supply module is an important part of an inkjet printing device. In order to improve printing efficiency and yield, an inkjet device often integrates multiple print heads or integrates multiple nozzles in a print head to form a print head module, and completes the entire printing process through the ejection of the print head module. However, when using an inkjet device, the nozzles in the liquid supply module may fail to eject ink. Summary of the Invention

[0003] Based on this, embodiments of the present application provide a liquid supply module, a printing module, and a printing device.

[0004] In order to solve the above technical problems, embodiments of the present application provide a liquid supply module, adopting the following technical solutions:

[0005] A liquid supply module includes:

[0006] An ink supply device, at least one nozzle communicating with the ink supply device;

[0007] A negative pressure filtering device disposed in the ink supply device for filtering the gas in the ink supply device;

[0008] A control device connected to the ink supply device for driving the ink supply device to convey the liquid to be supplied.

[0009] Further, the negative pressure filtering device includes:

[0010] A support plate disposed in the ink supply device;

[0011] A filter membrane disposed on the support plate for filtering the gas in the ink supply device;

[0012] A negative pressure chamber is formed between the filter membrane and the inner wall of the ink supply device.

[0013] Further, the support plate is provided with a first through hole communicating with the nozzle; and / or

[0014] The filter membrane is provided with a second through hole communicating with the nozzle; and / or

[0015] The filter membrane has micropores; and / or

[0016] At least one negative pressure input port is provided on both sides of the ink supply device, and the negative pressure chamber communicates with the negative pressure input port.

[0017] Further, the support plate includes a plurality of first support portions and a plurality of second support portions; the first support portions have a length in a first direction and are arranged at intervals in a second direction; the plurality of second support portions are arranged at intervals in the second direction, and a gap between two adjacent second support portions forms a first air passage communicating with the negative pressure input port; the negative pressure input port is provided between every two adjacent first support portions.

[0018] Further, at least one negative pressure sub-chamber is formed between two adjacent first support portions, the filter membrane and the inner wall of the ink supply device.

[0019] Further, the thickness of the support plate is 10 - 200 um; and / or

[0020] the material of the support plate is selected from at least one of single crystal silicon, ceramics, and stainless steel; and / or

[0021] the thickness of the filter membrane is 5 - 50 um; and / or

[0022] the filter membrane is a microporous ultrafiltration membrane, and the material of the filter membrane is selected from at least one of polytetrafluoroethylene and polyvinylidene fluoride; and / or

[0023] the aperture of the micropores is 2 - 100 nm.

[0024] Further, the ink supply device includes: a substrate and a vibration plate, a ink storage chamber is formed between the substrate and the vibration plate; the nozzle is provided on the substrate and communicates with the ink storage chamber; the negative pressure filtration device is provided on the substrate and located in the ink storage chamber; the control device is connected to the vibration plate and is used for driving the vibration plate to deform.

[0025] Further, the ink storage chamber includes an ink input chamber, an ink jet pressure chamber and an ink output chamber which are sequentially communicated, the ink input chamber is provided with an ink inlet, the ink output chamber is provided with an ink outlet, the nozzle communicates with the ink jet pressure chamber, and the negative pressure filtration device is located in the ink jet pressure chamber.

[0026] Further, the ink supply device further includes at least one damper, and the damper is provided on the negative pressure filtration device or the vibration plate; the damper is provided between the ink input chamber and the ink jet pressure chamber, and / or, the damper is provided between the ink jet pressure chamber and the ink output chamber.

[0027] Further, the control device includes a piezoelectric actuator and an insulating layer, the insulating layer is provided on the ink supply device, and the piezoelectric actuator is provided on the insulating layer.

[0028] Further, the piezoelectric actuator includes a first conductive layer, a piezoelectric ceramic layer, and a second conductive layer which are stacked, and the first conductive layer is disposed close to the insulating layer; and / or

[0029] The material of the insulating layer is selected from one of organic insulating materials or inorganic insulating materials; the inorganic insulating materials are selected from at least one of silicon nitride, silicon oxide, silicon oxynitride, silicon carbonitride, aluminum oxide, and hafnium oxide; the organic insulating materials are selected from at least one of polyimide, phenolic resin, epoxy resin, and acrylic resin; and / or

[0030] The thickness of the insulating layer is 50 - 500 nm.

[0031] To solve the above technical problems, an embodiment of the present application further provides a printing module, which adopts the following technical solution:

[0032] A printing module includes the liquid supply module as described above.

[0033] Further, the number of the liquid supply modules is at least two, and an inner plate is provided between two adjacent liquid supply modules, and the inner plate is used to separate or communicate two adjacent liquid supply modules;

[0034] The inner plate has a second air passage to communicate two adjacent liquid supply modules; or, a negative pressure input port and at least two second air passages communicating with the negative pressure input port are provided on the inner plate, and the two second air passages are respectively arranged towards two adjacent liquid supply modules to separate two adjacent liquid supply modules.

[0035] To solve the above technical problems, an embodiment of the present application further provides a printing device, which adopts the following technical solution:

[0036] A printing device includes the liquid supply module as described above or the printing module as described above.

[0037] Compared with the prior art, the present application improves the durability and printing quality of the liquid supply module, and reduces the costs of maintenance, replacement, and production of the liquid supply module. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] To more clearly illustrate the solutions of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are some embodiments of the present application. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without creative efforts.

[0039] Figure 1It is a bottom view of an embodiment of a liquid supply module provided by this application;

[0040] Figure 2 It is Figure 1 a cross-sectional view taken along line A-A' in

[0041] Figure 3 It is Figure 1 a cross-sectional view taken along line B-B' in

[0042] Figure 4 It is a bottom view of an embodiment of a printing module provided by this application;

[0043] Figure 5 It is Figure 4 a cross-sectional view taken along line C-C' in

[0044] Figure 6 It is a bottom view of another embodiment of a printing module provided by this application;

[0045] Figure 7 It is a flowchart of a method for manufacturing a liquid supply module provided by this application;

[0046] Figure 8 It is Figure 7 a schematic diagram of the structural changes at each stage of steps S10 and S20 in

[0047] Figure 9 It is Figure 7 a schematic diagram of the structural changes at each stage of step S30 in

[0048] Figure 10 It is Figure 7 a schematic diagram of the structural change of step S40 in

[0049] Reference numerals: 1, ink supply device; 11, negative pressure input port; 12, substrate; 13, vibration plate; 131, lining plate; 132, side plate; 14, ink input chamber; 141, ink inlet; 15, inkjet pressure chamber; 16, ink output chamber; 161, ink outlet; 2, nozzle; 3, negative pressure filtering device; 31, support plate; 311, first through hole; 312, first support portion; 313, second support portion; 3131, first air passage; 32, negative pressure cavity; 33, filter membrane; 331, second through hole; 4, control device; 41, piezoelectric actuator; 411, first conductive layer; 412, piezoelectric ceramic layer; 413, second conductive layer; 42, insulating layer; 5, damper; 8, inner plate; 81, second air passage; 82, second support column. Detailed Description of the Invention

[0050] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this application belongs; the terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "comprising" and "having" and any variations thereof in the specification and claims of this application and the above drawings are intended to cover non-exclusive inclusion. The terms "first", "second", etc. in the specification and claims of this application or the above drawings are used to distinguish different objects and not to describe a specific order.

[0051] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in connection with the embodiments can be included in at least one embodiment of this application. The phrase does not necessarily refer to the same embodiment at each occurrence in the specification, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0052] In order to enable those skilled in the art to better understand the solution of this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings.

[0053] An embodiment of this application provides a liquid supply module, as Figures 1 to 3 shown, the liquid supply module includes: an ink supply device 1, at least one nozzle 2 communicating with the ink supply device 1; a negative pressure filtering device 3 disposed in the ink supply device 1 for filtering the gas in the ink supply device 1; a control device 4 connected to the ink supply device 1 for driving the ink supply device 1 to convey the liquid to be supplied.

[0054] In this embodiment, the ink supply device 1 stores liquid, and the negative pressure filtering device 3 is in contact with the liquid for filtering the gas in the ink supply device 1 to prevent bubbles formed by the gas in the liquid from adhering to the inside of the ink supply device 1 or near the nozzle 2; at the same time, the control device 4 drives the ink supply device 1 to deform, changing the size of the internal space of the ink supply device 1 to drive the liquid to be ejected from the nozzle 2, so that the ink supply device 1 conveys the liquid to be supplied; this application ensures that the liquid supply module can convey the liquid to be supplied, thereby improving the durability and printing quality of the liquid supply module and reducing the maintenance, replacement, and production costs of the liquid supply module.

[0055] In this embodiment, the liquid stored in the ink supply device 1 is ink.

[0056] Further, the negative pressure filtering device 3 includes: a support plate 31 disposed within the ink supply device 1; a filtering membrane 33 disposed on the support plate 31 for filtering the gas within the ink supply device 1; a negative pressure chamber 32 is formed between the filtering membrane 33 and the inner wall of the ink supply device 1.

[0057] In this embodiment, since a negative pressure chamber 32 is formed between the filtering membrane 33 and the inner wall of the ink supply device 1, the internal air pressure of the ink supply device 1 is greater than the air pressure within the negative pressure chamber 32, causing the air bubbles in the ink to flow towards the negative pressure chamber 32. As the air bubbles are affected by the negative pressure, they are sucked towards the direction of the filtering membrane 33, so that the gas bubbles carried in the ink can be filtered away by the filtering membrane 33.

[0058] In this embodiment, the negative pressure chamber 32 provides a negative pressure sealed environment for the filtering membrane 33. The negative pressure chamber 32 serves as a discharge space for the filtering membrane 33 to filter gas, enhancing the ability of the filtering membrane 33 to filter gas and greatly reducing the probability of inkjet abnormality caused by air bubbles within the liquid supply module.

[0059] As Figure 2 shown, further, the support plate 31 is provided with a first through hole 311 communicating with the nozzle 2.

[0060] Further, the filtering membrane 33 is provided with a second through hole 331 communicating with the nozzle 2.

[0061] Specifically, the nozzle 2, the first through hole 311, and the second through hole 331 are sequentially communicated.

[0062] In this embodiment, the control device 4 drives the ink supply device 1 to deform, changing the size of the internal space of the ink supply device 1, so as to drive the ink to be ejected from the second through hole 331, the first through hole 311, and the nozzle 2 in sequence, enabling the ink supply device 1 to supply ink.

[0063] Further, the filtering membrane 33 has micropores (not shown).

[0064] In this embodiment, the micropores are used to filter the gas within the ink supply device 1. When the air bubbles are affected by the negative pressure, the air bubbles are sucked into the micropores, so that the gas bubbles carried in the ink can be filtered away by the filtering membrane 33.

[0065] Further, the pore diameter of the micropores is 2 - 100 nm

[0066] In this embodiment, the pore diameter of the micropores is smaller than the liquid beads when the ink condenses due to surface tension, and the pore diameter of the micropores is larger than the gas molecules. Therefore, the filtering membrane 33 can filter only the gas without filtering the ink.

[0067] Optionally, the pore diameter of the micropores is selected from any one or any range formed by any two of 2 nm, 10 nm, 20 nm, 30 nm, 40 nm, 50 nm, 60 nm, 70 nm, 80 nm, 90 nm, and 100 nm.

[0068] Furthermore, the thickness of the filter membrane 33 is 5 - 50 μm.

[0069] Optionally, the thickness of the filter membrane 33 is selected from any one or any range formed by any two of 5 μm, 10 μm, 20 μm, 30 μm, 40 μm, and 50 μm.

[0070] Furthermore, the filter membrane 33 is a microporous ultrafiltration membrane, and the material of the filter membrane 33 is selected from at least one of polytetrafluoroethylene and polyvinylidene fluoride.

[0071] In this embodiment, the material of the filter membrane 33 is selected from at least one of polytetrafluoroethylene and polyvinylidene fluoride, making the filter membrane 33 have hydrophobic and oleophobic properties and playing a role in repelling ink.

[0072] Furthermore, the thickness of the support plate 31 is 10 - 200 μm.

[0073] Optionally, the thickness of the support plate 31 is selected from any one or any range formed by any two of 10 μm, 20 μm, 30 μm, 40 μm, 50 μm, 60 μm, 70 μm, 80 μm, 90 μm, 100 μm, 110 μm, 120 μm, 130 μm, 140 μm, 150 μm, 160 μm, 170 μm, 180 μm, 190 μm, and 200 μm.

[0074] Furthermore, the material of the support plate 31 is selected from at least one of single-crystalline silicon, ceramics, and stainless steel.

[0075] Preferably, the material of the support plate 31 is selected from stainless steel.

[0076] In this embodiment, stainless steel has high strength, low thermal expansion, and is easy to process. Therefore, the material of the support plate 31 is preferably stainless steel.

[0077] Furthermore, at least one negative pressure input port 11 is provided on both sides of the ink supply device 1, and the negative pressure chamber 32 is communicated with the negative pressure input port 11.

[0078] In this embodiment, the negative pressure input port 11 is used to connect to an air extraction device (not shown) that forms negative pressure to maintain the negative pressure state of the negative pressure chamber 32 of the support plate 31, and cooperate with the negative pressure chamber 32 through the filter membrane 33 to achieve the exhaust of ink.

[0079] As Figures 1 to 3As shown, further, the support plate 31 includes a plurality of first support portions 312 and a plurality of second support portions 313; the first support portions 312 have a length in a first direction and are arranged at intervals in a second direction; the plurality of second support portions 313 are arranged at intervals in the second direction, and a gap between two adjacent second support portions 313 forms a first air passage 3131 communicating with the negative pressure input port 11; the negative pressure input port 11 is arranged between every two adjacent first support portions 312.

[0080] In this embodiment, the second support portion 313 and the first support portion 312 maintain the negative pressure cavity 32 of the hollow structure of the support plate 31 from collapsing; and the negative pressure cavity 32 is communicated with the negative pressure input port 11 through the first air passage 3131.

[0081] Further, at least two of the second support portions 313 are respectively arranged on both sides of the first support portion 312; so that the second support portion 313 and the first support portion 312 are crisscrossed.

[0082] Further, at least one negative pressure sub-cavity (not shown) is formed between two adjacent first support portions 312, the filter membrane 33 and the inner wall of the ink supply device 1.

[0083] In this embodiment, the first support portion 312, the filter membrane 33 and the inner wall of the ink supply device 1 divide the negative pressure cavity 32 into negative pressure sub-cavities, and the negative pressure input port 11 is arranged between every two adjacent first support portions 312 to ensure that each negative pressure sub-cavity can maintain a negative pressure state.

[0084] Further, the second support portion 313 is a first support column. As Figure 2 As shown, further, the diameter of the nozzle 2 gradually decreases in a direction away from the control device 4; to improve the printing accuracy of the nozzle 2.

[0085] As Figures 1 to 3 As shown, further, the ink supply device 1 includes: a substrate 12 and a vibration plate 13, a storage ink cavity is formed between the substrate 12 and the vibration plate 13; the nozzle 2 is arranged on the substrate 12 and is communicated with the storage ink cavity; the negative pressure filtering device 3 is arranged on the substrate 12 and is located in the storage ink cavity; the control device 4 is connected to the vibration plate 13 and is used for driving the vibration plate 13 to deform.

[0086] In this embodiment, ink is stored in the storage ink cavity, and the control device 4 drives the vibration plate 13 to deform, so that the volume of the storage ink cavity changes, to drive the ink to be ejected from the nozzle 2.

[0087] Further, the vibration plate 13 includes a lining plate 131 and side plates 132 located on the sides of the lining plate 131.

[0088] In this embodiment, the lining plate 131 of the vibration plate 13 can be used as the growth substrate of the control device 4; an ink storage cavity is formed between the lining plate 131, the side plate 132 and the substrate 12.

[0089] Further, the material of the vibration plate 13 is selected from at least one of stainless steel and silicon material.

[0090] Further, the thickness of the vibration plate 13 is 5 - 15 um.

[0091] Optionally, the thickness of the vibration plate 13 is selected from any one or any range formed by any two of 5 um, 6 um, 7 um, 8 um, 9 um, 10 um, 11 um, 12 um, 13 um, 14 um, 15 um.

[0092] Further, the material of the substrate 12 is selected from at least one of stainless steel and silicon material.

[0093] Further, the thickness of the substrate 12 is 20 - 100 um.

[0094] Optionally, the thickness of the substrate 12 is selected from any one or any range formed by any two of 10 um, 20 um, 30 um, 40 um, 50 um, 60 um, 70 um, 80 um, 90 um, 100 um.

[0095] Further, a waterproof and hydrophobic film (not shown) is provided on one side of the substrate 12 away from the vibration plate 13.

[0096] In this embodiment, the waterproof and hydrophobic film can prevent ink from sticking to the nozzle 2 or the substrate 12, so as to improve the continuous inkjet performance of the liquid supply module.

[0097] As Figure 2 shown, further, the ink storage cavity includes an ink input chamber 14, an inkjet pressure chamber 15 and an ink output chamber 16 that are connected in sequence. The ink input chamber 14 is provided with an ink inlet 141, the ink output chamber 16 is provided with an ink outlet 161, the nozzle 2 is connected to the inkjet pressure chamber 15, and the negative pressure filtering device 3 is located in the inkjet pressure chamber 15.

[0098] In this embodiment, the ink flows through the ink inlet 141 and the ink outlet 161 in the ink input chamber 14, the inkjet pressure chamber 15 and the ink output chamber 16, which is beneficial to taking away the bubbles in the ink; and the negative pressure filtering device 3 is arranged in the inkjet pressure chamber 15 to filter the gas in the inkjet pressure chamber 15, so as to prevent the bubbles formed by the gas in the ink from adhering in the inkjet pressure chamber 15 or near the nozzle 2, thereby improving the durability and printing quality of the liquid supply module and reducing the maintenance, replacement and production costs of the liquid supply module.

[0099] In this embodiment, the number of the ink input chamber 14, the inkjet pressure chamber 15, and the ink output chamber 16 can all be one, or can correspond to the number of nozzles 2 respectively; the present application does not limit this here.

[0100] Preferably, the number of the ink input chamber 14, the inkjet pressure chamber 15, and the ink output chamber 16 can all be one, and multiple inkjets use the same ink input chamber 14, inkjet pressure chamber 15, and ink output chamber 16, making the flow of the ink more stable.

[0101] As Figure 2 shown, further, the ink supply device further includes at least one damper 5, and the damper 5 is arranged on the negative pressure filtering device 3 or the vibration plate 13; the damper 5 is arranged between the ink input chamber 14 and the inkjet pressure chamber 15, and / or the damper 5 is arranged between the inkjet pressure chamber 15 and the ink output chamber 16.

[0102] In this embodiment, the function of the damper 5 is to slow down the flow of the ink between the inkjet pressure chamber 15 and the ink input chamber 14 or the ink output chamber 16 after the control device 4 drives the vibration plate 13 to deform, so that the ink is more easily extruded from the inkjet pressure chamber 15 due to the deformation of the vibration plate 13.

[0103] Specifically, the number of the dampers 5 is two, and the dampers 5 are arranged on the negative pressure filtering device 3, one of the dampers 5 is located between the ink input chamber 14 and the inkjet pressure chamber 15, and the other damper 5 is located between the inkjet pressure chamber 15 and the ink output chamber 16.

[0104] Further, the material of the damper 5 is selected from stainless steel or silicon material.

[0105] As Figure 2 shown, further, the control device 4 includes a piezoelectric actuator 41 and an insulating layer 42, the insulating layer 42 is arranged on the ink supply device 1, and the piezoelectric actuator 41 is arranged on the insulating layer 42.

[0106] In this embodiment, the insulating layer 42 is used to isolate the electrical connection between the vibration plate 13 and the piezoelectric actuator 41, and at the same time prevent the metal ions of the vibration plate 13 from diffusing into the piezoelectric actuator 41 to affect the performance of the piezoelectric ceramic when the material of the vibration plate 13 is selected from stainless steel.

[0107] In this embodiment, the piezoelectric actuator 41 is used to drive the vibration plate 13 to deform.

[0108] Further, the material of the insulating layer 42 is selected from one of organic insulating materials or inorganic insulating materials; the inorganic insulating material is selected from at least one of silicon nitride, silicon oxide, silicon oxynitride, silicon carbonitride, aluminum oxide, and hafnium oxide; the organic insulating material is selected from at least one of polyimide, phenolic resin, epoxy resin, and acrylic resin.

[0109] Specifically, when the material of the diaphragm 13 is selected from silicon materials, the material of the insulating layer 42 is selected from silicon oxide, which can be obtained by thermal oxidation and is a material with relatively low cost.

[0110] Further, the thickness of the insulating layer 42 is 50 - 500 nm.

[0111] Optionally, the thickness of the insulating layer 42 is selected from any one or the range formed by any two of 50 μm, 100 μm, 150 μm, 200 μm, 250 μm, 300 μm, 350 μm, 400 μm, 450 μm, and 500 μm.

[0112] As Figure 2 shown, further, the piezoelectric actuator 41 includes a first conductive layer 411, a piezoelectric ceramic layer 412, and a second conductive layer 413 which are stacked, and the first conductive layer 411 is disposed close to the insulating layer 42.

[0113] In this embodiment, the first conductive layer 411 serves as the lower electrode of the piezoelectric actuator 41, the second conductive layer 413 serves as the upper electrode of the piezoelectric actuator 41, and the piezoelectric ceramic layer 412 controls the voltage drop between the first conductive layer 411 and the second conductive layer 413 to control the shape of the piezoelectric ceramic layer 412 itself in the vertical direction. Specifically, the amount of expansion and contraction of the piezoelectric ceramic layer 412 itself can be controlled, so as to achieve the effect of driving the deformation of the diaphragm 13.

[0114] Further, the thickness of the first conductive layer 411 is 50 - 500 nm.

[0115] Optionally, the thickness of the first conductive layer 411 is selected from any one or the range formed by any two of 50 μm, 100 μm, 150 μm, 200 μm, 250 μm, 300 μm, 350 μm, 400 μm, 450 μm, and 500 μm.

[0116] Further, the thickness of the second conductive layer 413 is 50 - 500 nm.

[0117] Optionally, the thickness of the second conductive layer 413 is selected from any one or the range formed by any two of 50um, 100um, 150um, 200um, 250um, 300um, 350um, 400um, 450um, 500um.

[0118] Further, the first conductive layer 411 and the second conductive layer 413 are each independently one of a rod-shaped electrode, a wire-shaped electrode, and a grid-shaped electrode.

[0119] Further, the materials of the first conductive layer 411 and the second conductive layer 413 are each independently selected from at least one of a metal material, a carbon material, and an organic conductive material; the metal material includes at least one of aluminum, copper, silver, titanium, chromium, platinum, gold, molybdenum, barium, calcium, ytterbium, and magnesium; the carbon material includes at least one of graphite, carbon nanotubes, graphene, and carbon fiber; the organic conductive material includes at least one of TFB, CuPc, PVK, Poly-TPD, PFB, DNTPD, TCATA, TCCA, CBP, TPD, NPB, NPD, PEDOT:PSS, TAPC, MCC, F4-TCNQ, HATCN, 4,4',4'-tris(N-3-methylphenyl-N-phenylamino)triphenylamine, polyaniline, transition metal oxides, transition metal sulfides, transition metal stannides, doped graphene, undoped graphene, and C60.

[0120] Further, the material of the piezoelectric ceramic layer 412 is selected from at least one of boron nitride, barium titanate, zinc oxide, and lead zirconate titanate.

[0121] The embodiment of the present application further provides a printing module, as Figure 4 and Figure 5 shown, the printing module includes the liquid supply module as described above.

[0122] In this embodiment, the ink supply device 1 stores liquid, and the negative pressure filtration device 3 is in contact with the liquid and is used to filter the gas in the ink supply device 1 to prevent bubbles formed by the gas in the liquid from adhering to the inside of the ink supply device 1 or near the nozzle 2; at the same time, the control device 4 drives the ink supply device 1 to deform, so that the internal space size of the ink supply device 1 changes, so as to drive the liquid to be ejected from the nozzle 2, and the ink supply device 1 conveys the liquid to be supplied; the present application ensures that the liquid supply module can convey the liquid to be supplied, thereby improving the durability and printing quality of the liquid supply module and reducing the maintenance, replacement, and production costs of the liquid supply module.

[0123] Further, the number of the liquid supply modules is at least two, and an inner plate 8 is provided between two adjacent liquid supply modules, and the inner plate 8 is used to separate or communicate two adjacent liquid supply modules.

[0124] As Figure 4 and Figure 5 shown, in one embodiment, the inner plate 8 has a second air passage 81 to communicate two adjacent liquid supply modules arranged adjacent to each other.

[0125] Specifically, the inner plate 8 is composed of a plurality of second support columns 82 arranged at intervals, and the gap between any two second support columns 82 forms the second air passage 81 to communicate two adjacent liquid supply modules arranged adjacent to each other.

[0126] In this embodiment, the negative pressure filtering devices 3 and the nozzles 2 of multiple liquid supply modules communicate with each other, so that multiple liquid supply modules form a printing unit.

[0127] As Figure 6 shown, in another embodiment, a negative pressure input port 11 and at least two second air passages 81 communicating with the negative pressure input port are provided on the inner plate 8, and the two second air passages 81 are respectively arranged towards two adjacent liquid supply modules arranged adjacent to each other, so as to separate two adjacent liquid supply modules arranged adjacent to each other.

[0128] In this embodiment, the nozzles 2 of multiple liquid supply modules are isolated from each other through the inner plate 8 to form multiple independent printing units, and each printing unit has an independent negative pressure chamber 32, and there is no longer gas flowing between them. The negative pressure input ports 11 of different printing units are controlled by different air extraction devices, so that the vacuum degrees of the negative pressure chambers 32 of different printing units are the same or different. When the control device 4 drives the ink supply device 1 to deform, due to the pressure difference on both sides of the filter membrane 33, during the inkjet process, the internal space size of the ink supply device 1 will also generate a slight deformation due to the deformation of the filter membrane 33. In this embodiment, by adjusting the vacuum degree of the negative pressure chamber 32 in different printing units, the effect of adjusting the internal space size of the ink supply device 1 is achieved, so as to compensate for the volume difference of the ink ejected between different nozzles 2, and make the volume, speed, angle, etc. of the ink ejected by different nozzles 2 in the liquid supply module have higher uniformity and consistency, and improve the inkjet quality.

[0129] In this embodiment, the thickness of the filter membrane 33 is 1 - 15 um; reducing the thickness of the filter membrane 33 makes the filter membrane 33 easy to deform.

[0130] Further, the inner plate 8 is arranged parallel to the second support portion 313.

[0131] The embodiment of the present application further provides a printing device, including the liquid supply module or the printing module as described above.

[0132] In this embodiment, the ink supply device 1 stores a liquid. The negative pressure filtration device 3 is in contact with the liquid and is used to filter the gas in the ink supply device 1 to prevent bubbles formed by the gas in the ink from adhering to the inside of the ink supply device 1 or near the nozzle 2. At the same time, the control device 4 drives the ink supply device 1 to deform, changing the size of the internal space of the ink supply device 1 to drive the liquid to be ejected from the nozzle 2, so that the ink supply device 1 conveys the liquid to be supplied. This application ensures that the liquid supply module can convey the liquid to be supplied, thereby improving the durability and printing quality of the liquid supply module and reducing the maintenance, replacement and production costs of the liquid supply module.

[0133] The embodiment of the present application also provides a method for preparing a liquid supply module. As Figure 7 shown, the method includes the following steps:

[0134] S10. Prepare a negative pressure filtration device;

[0135] S20. Set a first preform on the negative pressure filtration device;

[0136] S30. Obtain a second preform and set a control device on the second preform;

[0137] S40. Combine the first preform and the second preform to obtain an ink supply device.

[0138] In this embodiment, the ink supply device 1 stores a liquid. The negative pressure filtration device 3 is in contact with the liquid and is used to filter the gas in the ink supply device 1 to prevent bubbles formed by the gas in the liquid from adhering to the inside of the ink supply device 1 or near the nozzle 2. At the same time, the control device 4 drives the ink supply device 1 to deform, changing the size of the internal space of the ink supply device 1 to drive the liquid to be ejected from the nozzle 2, so that the ink supply device 1 conveys the liquid to be supplied. This application ensures that the liquid supply module can convey the liquid to be supplied, thereby improving the durability and printing quality of the liquid supply module and reducing the maintenance, replacement and production costs of the liquid supply module.

[0139] Further, the step S10 of preparing a negative pressure filtration device specifically includes:

[0140] S11. Provide a support plate;

[0141] S12. Make a filter membrane on the support plate.

[0142] As Figure 8 (a), use processes such as dip coating, spin coating, slot die coating, inkjet printing, etc. to form and pattern a filter membrane 33 on the support plate 31. Specifically, taking the inkjet printing method as an example, after spraying the liquid phase slurry of the filter membrane 33 on the support plate 31 to form a patterned liquid film, the liquid film is cured by high-temperature sintering to form a porous structure, thereby completing the deposition of the filter membrane 33.

[0143] Further, step S20, setting a first preform on the negative pressure filtration device, specifically includes:

[0144] S21, forming a damping processing layer on the negative pressure filtration device;

[0145] As shown in Figure 8 (b), forming a damping processing layer on the support plate 31 and the filter membrane 33, and the material of the damping processing layer is selected from stainless steel; a preferred method in this embodiment is to use an adhesive to bond the stainless steel plate to the part of the support plate 31 without the filter membrane 33.

[0146] S22, patterning the side of the support plate away from the filter membrane to form a negative pressure chamber and a first through hole;

[0147] As shown in Figure 8 (c), using a conventional steel lithography method to pattern the support plate 31 to form a negative pressure chamber 32 and a first through hole 311.

[0148] S23, forming a substrate on the side of the support plate away from the filter membrane;

[0149] As shown in Figure 8 (d), forming a substrate 12 under the patterned support plate 31. A preferred method in this embodiment is to use an adhesive to bond the upper surface of the substrate 12 to the support plate 31.

[0150] S24, patterning the damping processing layer to form a damper;

[0151] As shown in Figure 8 (e), performing photolithographic patterning on the damping processing layer formed in step S21 to obtain a damper 5.

[0152] S25, patterning the filter membrane to form a second through hole;

[0153] As shown in Figure 8 (f), using photolithography to pattern the filter membrane 33 to form a second through hole 331 of the nozzle 2.

[0154] S26, patterning the substrate to form a nozzle;

[0155] As shown in Figure 8 (g), using photolithography to pattern the substrate 12 to form a nozzle 2; specifically, performing photolithography processes respectively from the side of the substrate 12 away from the support plate 31 and the side close to the support plate 31 to achieve the effect of a finely patterned nozzle 2.

[0156] Further, the step S30 of obtaining a second preform and disposing a control device on the second preform specifically includes:

[0157] S31. Obtain a second preform and perform patterning to form a lining plate, an ink inlet, and an ink outlet;

[0158] As Figure 9 (a), use a silicon-on-insulator wafer as the second preform; perform photolithographic patterning on the silicon-on-insulator wafer 7 to form an ink inlet 141 and an ink outlet 161; the silicon-on-insulator wafer 7 is a substrate commonly used in the formation of semiconductor integrated circuits, having a first silicon layer 71, an intermediate oxide layer 72 formed on the first silicon layer, and a second silicon layer 73 connected to the intermediate oxide layer. The intermediate oxide layer 72 and the second silicon layer 73 are used as the lining plate 131 of the vibrating plate 13; in this step, photolithographic patterning is performed on the intermediate oxide layer 72 and the second silicon layer 73 to form an ink inlet 141 and an ink outlet 161.

[0159] S32. Form an insulating layer on the vibrating plate;

[0160] As Figure 9 (b), use methods such as physical vapor deposition, chemical vapor deposition, evaporation coating, atomic layer deposition, and ion beam deposition to form SiOx as the insulating layer 42 on the lining plate 131 of the vibrating plate 13, for insulating the electrical connection between the vibrating plate 13 and the piezoelectric actuator 41 or the diffusion of impurity ions.

[0161] S33. Form a patterned first conductive layer on the insulating layer;

[0162] As Figure 9 (c), use methods such as physical vapor deposition, chemical vapor deposition, evaporation coating, atomic layer deposition, and ion beam deposition to form a first conductive layer 411 on the insulating layer 42 and perform patterning using photolithography; the first conductive layer 411 can be set as the common electrode of the piezoelectric actuators 41 above the plurality of nozzles 2.

[0163] S34. Form a piezoelectric ceramic layer on the first conductive layer;

[0164] As Figure 9 (d), use methods such as metal-organic chemical vapor deposition, sol-gel method, and sputtering physical vapor deposition to form a piezoelectric ceramic layer 412 on the first conductive layer 411 and perform patterning using photolithography.

[0165] S35. Form a second conductive layer on the piezoelectric ceramic layer to obtain a piezoelectric actuator;

[0166] As Figure 9(e), using methods such as physical vapor deposition, chemical vapor deposition, evaporation coating, atomic layer deposition, ion beam deposition, etc., a second conductive layer 413 is formed on the piezoelectric ceramic layer 412 and patterned to form metal blocks that can individually control the voltage applied to the piezoelectric ceramic layer 412 above each nozzle 2 and wires connected to the drive circuit.

[0167] S36. Pattern the diaphragm to form side plates.

[0168] Such as Figure 9 (f), using photolithography to pattern the first silicon layer 150a of a silicon-on-insulator (SOI) wafer to form the side plates 132 of the diaphragm 13.

[0169] Further, the step S40 of combining the negative pressure filtering device with the second preform to obtain an ink supply device:

[0170] S41. Bond the diaphragm to the support plate.

[0171] Such as Figure 10 , using an adhesive to bond the side plates 132 of the diaphragm 13 to the support plate 31 to obtain the ink supply device 1 and form an ink storage chamber.

[0172] Further, the method for preparing the liquid supply module further includes:

[0173] S50. Apply electricity to the first conductive layer and the second conductive layer to activate the piezoelectric ceramic layer.

[0174] Apply a strong electric field between the first conductive layer 411 and the second conductive layer 413, generally 1 - 10 kV / cm, so that the dipoles with disordered original polarization directions in the piezoelectric ceramic layer 412 form a relatively unified polarization direction under the strong electric field. After removing the electric field, due to the characteristics of the piezoelectric ceramic layer 412, the dipoles have polarization ability, so that the piezoelectric ceramic layer 412 has the reverse piezoelectric effect.

[0175] Obviously, the embodiments described above are only a part of the embodiments of the present application, rather than all the embodiments. The drawings show the preferred embodiments of the present application, but do not limit the patent scope of the present application. The present application can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosed content of the present application more thorough and comprehensive. Although the present application has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing specific embodiments, or perform equivalent replacements for some of the technical features. Any equivalent structure directly or indirectly using the content of the specification and drawings of the present application in other related technical fields is equally within the scope of the patent protection of the present application.

Claims

1. A liquid supply module, characterized in that, Comprising: An ink supply device and at least one nozzle communicated with the ink supply device; A negative pressure filtration device disposed in the ink supply device for filtering the gas in the ink supply device; A control device connected to the ink supply device for driving the ink supply device to convey the liquid to be supplied.

2. The liquid supply module according to claim 1, wherein The negative pressure filtration device includes: A support plate disposed in the ink supply device; A filter membrane disposed on the support plate for filtering the gas in the ink supply device; A negative pressure chamber is formed between the filter membrane and the inner wall of the ink supply device.

3. The liquid supply module according to claim 2, wherein The support plate is provided with a first through hole communicated with the nozzle; and / or The filter membrane is provided with a second through hole which is communicated with the nozzle; and / or The filter membrane has micropores; and / or At least one negative pressure input port is provided on both sides of the ink supply device, and the negative pressure chamber is communicated with the negative pressure input port.

4. The liquid supply module according to claim 3, characterized in that, The support plate includes a plurality of first support portions and a plurality of second support portions; the first support portions have a length in a first direction and are arranged at intervals in a second direction; the plurality of second support portions are arranged at intervals in the second direction, and a gap between two adjacent second support portions forms a first air passage communicated with the negative pressure input port; the negative pressure input port is disposed between every two adjacent first support portions.

5. The liquid supply module according to claim 4, wherein At least one negative pressure sub-chamber is formed by two adjacent first support portions, the filter membrane and the inner wall of the ink supply device.

6. The liquid supply module according to any one of claims 2 to 5, wherein The thickness of the support plate is 10-200 um; and / or The material of the support plate is selected from at least one of single crystal silicon, ceramic, and stainless steel; and / or The thickness of the filter membrane is 5-50 um; and / or The filter membrane is a microporous ultrafiltration membrane, and the material of the filter membrane is selected from at least one of polytetrafluoroethylene and polyvinylidene fluoride; and / or The pore diameter of the micropores is 2-100 nm.

7. The liquid supply module according to any one of claims 1 to 5, characterized in that, The ink supply device includes a substrate and a vibration plate, and an ink storage chamber is formed between the substrate and the vibration plate; the nozzle is disposed on the substrate and communicated with the ink storage chamber; the negative pressure filtration device is disposed on the substrate and located in the ink storage chamber; the control device is connected to the vibration plate for driving the vibration plate to deform.

8. The liquid supply module according to claim 7, wherein The ink storage chamber includes an ink input chamber, an ink jet pressure chamber, and an ink output chamber that are sequentially communicated. The ink input chamber is provided with an ink inlet, the ink output chamber is provided with an ink outlet, the nozzle is communicated with the ink jet pressure chamber, and the negative pressure filtration device is located in the ink jet pressure chamber.

9. The liquid supply module according to claim 8, wherein, The ink supply device further includes at least one damper, and the damper is disposed on the negative pressure filtration device or the vibration plate; The damper is disposed between the ink input chamber and the ink jet pressure chamber, and / or, the damper is disposed between the ink jet pressure chamber and the ink output chamber.

10. The liquid supply module according to any one of claims 1 to 5, characterized in that, The control device includes a piezoelectric actuator and an insulating layer, the insulating layer is disposed on the ink supply device, and the piezoelectric actuator is disposed on the insulating layer.

11. The liquid supply module according to claim 10, characterized in that, The piezoelectric actuator includes a first conductive layer, a piezoelectric ceramic layer, and a second conductive layer that are stacked, and the first conductive layer is disposed close to the insulating layer; and / or The material of the insulating layer is selected from one of organic insulating materials or inorganic insulating materials; the inorganic insulating materials are selected from at least one of silicon nitride, silicon oxide, silicon oxynitride, silicon oxycarbide, aluminum oxide, and hafnium oxide; the organic insulating materials are selected from at least one of polyimide, phenolic resin, epoxy resin, and acrylic resin; and / or The thickness of the insulating layer is 50 to 500 nm.

12. A printing module, characterized in that, It includes the liquid supply module according to any one of claims 1 to 11.

13. The printing module according to claim 12, wherein The number of the liquid supply modules is at least two, and an inner plate is provided between two adjacent liquid supply modules, and the inner plate is used to separate or communicate two adjacent liquid supply modules; The inner plate has a second air passage to communicate two adjacent liquid supply modules; or, a negative pressure input port and at least two second air passages communicating with the negative pressure input port are provided on the inner plate, and the two second air passages are respectively arranged towards two adjacent liquid supply modules to separate two adjacent liquid supply modules.

14. A printing device, characterized in that, It includes the liquid supply module according to any one of claims 1 to 11 or the printing module according to any one of claims 12 to 13.

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