Full-automatic tray upper packaging chip detection equipment

Abstract

The invention provides full-automatic detection equipment for packaged chips on a tray. The full-automatic detection equipment comprises a feeding module, a clamping jaw drawing module, a tray belt transmission module and a detection carrier module, the feeding module is configured to be used for conveying a tray loaded with a chip; one end of the detection platform deck module is provided with a tray belt transmission module; the tray belt conveying module is connected with the feeding module in the feeding direction and connected with the detection carrying table module in the discharging direction. The clamping jaw drawing module is arranged below the tray belt conveying module, and the tray belt conveying module and the clamping jaw drawing module are matched to achieve conveying of the trays from the feeding module to the detection carrying table module. The feeding module drives a port to move through a Z-axis feeding unit and an X-axis feeding unit, so that the position of the tray is flexibly adjusted, and the tray is accurately conveyed to the tra-y belt conveying module.

Description

Technical Field

[0001] This application relates to the technical field of automated equipment, and in particular, to a fully automatic chip detection device for encapsulation on a tray. Background Art

[0002] A tray, also known as a material tray, is a container for holding materials. The traditional method of loading and unloading trays uses manual feeding or picking operations, which are inefficient and time-consuming. With the acceleration of the automation process in the manufacturing industry, the requirements for efficiency in deeper automation development are also getting higher and higher. There have emerged methods for automated tray loading and unloading. However, the existing automated tray loading and unloading technologies require the tray to be loaded or unloaded to be placed on the working platform first, and then the materials are placed on the tray or removed from the tray on the working platform. After the loading or unloading is completed, the tray on the working platform is removed, and then the next tray to be loaded or unloaded is placed on the working platform for loading or unloading. Actions need to be performed sequentially, and the waiting time at the standby station is relatively long, which slows down the production rhythm and results in low work efficiency.

[0003] Currently, there are the following difficulties in the detection of encapsulated chips on trays:

[0004] (1) The degree of automation is insufficient, and some actions need to be completed manually, resulting in a reduction in detection efficiency;

[0005] (2) The process for loading and unloading trays and transporting them to the detection stage is not yet mature, unlike the handling of wafers, where there are mature manipulators for operation;

[0006] (3) In the existing tray handling, suction cups are used for handling, which is not safe enough and there is a risk of dropping. Summary of the Invention

[0007] To achieve the above object, this application proposes a fully automatic chip detection device for encapsulation on a tray, including: a loading module, a jaw pulling module, a tray belt transmission module, and a detection stage module; the loading module is configured to transport trays carrying chips; one end of the detection stage module is provided with a tray belt transmission module; the feeding direction of the tray belt transmission module is connected to the loading module, and the discharging direction is connected to the detection stage module; the jaw pulling module is arranged below the tray belt transmission module, and the tray belt transmission module and the jaw pulling module cooperate to realize the transmission of the tray from the loading module to the detection stage module.

[0008] Through the above technical solutions, the automation of the transfer of the tray carrying the chip from the loading module to the detection stage module is achieved, realizing the initial automation of the encapsulated chip detection process. The automation transfer greatly improves the detection efficiency, reduces manual intervention, lowers the labor cost and the possibility of human error, and can also effectively improve the stability and accuracy of the entire detection process.

[0009] Specifically, the tray belt transfer module includes: a mapping sensor, a belt transmission shaft, a pull-rail tensioning shaft, a transfer rail, and a position sensor; the position sensor is arranged at one end of the transfer rail, and the mapping sensor is arranged at the other end; the belt transmission shafts are respectively arranged on both sides of the transfer rail, and the pull-rail tensioning shaft is arranged below the transfer rail.

[0010] Through the above technical solutions, each component in the tray belt transfer module works together to achieve the stable transfer of the tray on the transfer rail. The mapping sensor can accurately locate the position of the tray and the distribution of the chips, the position sensor can ensure that the tray accurately reaches the specified position, the belt transmission shaft provides the transmission power, and the pull-rail tensioning shaft ensures the tension of the transfer rail.

[0011] Specifically, the loading module includes: a Z-axis loading unit, an X-axis loading unit, and a port; the port is configured to store the tray; the X-axis loading unit is configured to drive the port to move along the X-axis; the Z-axis loading unit is configured to drive the port to move along the Z-axis.

[0012] Through the above technical solutions, the flexible position adjustment ability makes the loading process more efficient and accurate, can adapt to the loading of trays with different specifications and position requirements, and improves the versatility and applicability of the equipment.

[0013] Specifically, the gripper pull-out module includes: a Y-axis pull-out unit, a gripper lifting cylinder, and a gripper cylinder; the gripper cylinder is configured to grip the tray; the gripper lifting cylinder is configured to control the vertical lifting of the tray; the Y-axis pull-out unit is configured to drive the tray to move along the Y-axis.

[0014] Through the above technical solutions, the precise movement control can ensure the stability and accuracy of the tray during the transfer process, avoid the tray from shaking or shifting during the transfer process, and thus ensure the safety of the chip and the accuracy of the detection.

[0015] Specifically, the detection stage module includes: a marble base; a detection rail is arranged in the middle of the marble base along the Y-axis direction; a detection stage is arranged on the detection rail, and the detection stage moves along the detection rail; air-floating feet are arranged on both sides of the detection rail, and a receiving ejector pin is arranged at one end of the detection rail.

[0016] Through the above technical solution, a stable support platform and a design for reducing interference can improve the accuracy and stability of detection. The setting of the pick-up thimble ensures the accurate docking of the tray and the detection stage, further improving the accuracy and efficiency of detection.

[0017] Specifically, it further includes: a detection mirror module; the detection mirror module is arranged above the marble base; the detection mirror module includes a detection mirror unit and a detection mirror driving unit; the detection mirror unit is arranged on the detection mirror driving unit and is driven by the detection mirror driving unit to move the detection mirror unit above the detection stage.

[0018] Specifically, it further includes a housing; a loading module, a jaw pulling module, a tray belt transmission module and a detection stage module are arranged inside the housing; a visible window is opened on the housing.

[0019] Specifically, it further includes an alarm device; the alarm device is arranged above the housing.

[0020] Specifically, it further includes: a cooling and ventilation device; the cooling and ventilation device is arranged above the housing.

[0021] Specifically, it further includes: a control module; the control module includes a display screen, a mouse and a keyboard for controlling the operation of the fully automatic tray-mounted chip detection device.

[0022] Compared with the prior art, the beneficial effects of the present application are as follows:

[0023] A detection device for fully automatic tray-mounted packaged chips is designed, which simplifies the overall handling of the tray, improves production efficiency, and optimizes costs on the device. Compared with ordinary wafer detection, it can save parts such as robotic edge finders, save equipment costs, and optimize the production process.

[0024] The detection of individual packaged chips after cutting can also be directly completed in the trays in customer circulation without replacing the carrying fixtures, saving manpower. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The drawings are included to provide a further understanding of the embodiments and are incorporated into and constitute a part of this specification. The drawings illustrate the embodiments and, together with the description, are used to explain the principles of the present application. Other embodiments and many of the expected advantages of the embodiments will be readily apparent as they become better understood by reference to the following detailed description. The elements of the drawings are not necessarily to scale with each other. Like reference numerals refer to corresponding like parts.

[0026] Figure 1 is a schematic structural diagram of a fully automatic tray-mounted chip detection device according to an embodiment of the present application;

[0027] Figure 2 It is a schematic structural diagram of a tray belt transmission module of a fully automatic chip detection device on a tray according to an embodiment of the present application;

[0028] Figure 3 It is a schematic structural diagram of a loading module of a fully automatic chip detection device on a tray according to an embodiment of the present application;

[0029] Figure 4 It is a schematic structural diagram of a jaw pulling module of a fully automatic chip detection device on a tray according to an embodiment of the present application;

[0030] Figure 5 It is a schematic structural diagram of a detection stage module of a fully automatic chip detection device on a tray according to an embodiment of the present application;

[0031] Figure 6 It is a schematic structural diagram of a detection mirror module of a fully automatic chip detection device on a tray according to an embodiment of the present application;

[0032] Figure 7 It is a schematic structural diagram of a housing of a fully automatic chip detection device on a tray according to an embodiment of the present application.

[0033] The meanings of the numbers in the figure: 1, tray belt transmission module; 1a, mapping sensor; 1b, tensioning shaft of the pulling track; 1c, belt transmission shaft; 1d, transmission track; 1e, in-place sensor; 2, detection mirror unit; 3, detection stage module; 3a, receiving ejector pin; 3b, air-floating floor feet; 3c, marble base; 3d, detection track; 3e, detection stage; 4, detection mirror drive unit; 5, loading module; 5a, Z-axis loading unit; 5b, X-axis loading unit; 5c, port; 6, jaw pulling module; 6a, jaw cylinder; 6b, jaw lifting cylinder; 6c, Y-axis pulling unit; 7, housing; 8, alarm device; 9, cooling and ventilation device; 10, control module. Detailed implementation manners

[0034] In the following detailed description, reference is made to the accompanying drawings which form a part of the detailed description and in which are shown illustrative specific embodiments by which the present application may be practiced. In this regard, directional terms, such as "top", "bottom", "left", "right", "up", "down", etc., are used with reference to the orientation of the described figures. Since the components of the embodiments may be positioned in several different orientations, the directional terms are used for purposes of illustration and are in no way limiting. It should be understood that other embodiments may be utilized or logical changes may be made without departing from the scope of the present application. Accordingly, the following detailed description should not be taken in a limiting sense, and the scope of the present application is defined by the appended claims.

[0035] As Figures 1 to 7 shown, a fully automatic chip detection device for encapsulation on a tray includes: a loading module 5, a gripper pulling module 6, a tray belt transmission module 1, and a detection stage module 3; the loading module 5 is configured to transport a tray carrying chips; one end of the detection stage module 3 is provided with the tray belt transmission module 1; the feeding direction of the tray belt transmission module 1 is connected to the loading module 5, and the discharging direction is connected to the detection stage module 3; the gripper pulling module 6 is arranged below the tray belt transmission module 1, and the tray belt transmission module 1 and the gripper pulling module 6 cooperate to realize the transmission of the tray from the loading module 5 to the detection stage module 3.

[0036] Compared with the wafer detection device in this application, the edge finder, manipulator and other stations are reduced; with fewer stations, the corresponding hardware costs will definitely decrease; and there is no need for the manipulator to repeatedly move back and forth between several stations, which saves the time of the manipulator handling process and makes the overall process simpler.

[0037] Specifically, the tray belt transmission module 1 includes: a mapping sensor 1a, a belt transmission shaft 1c, a pulling track tensioning shaft 1b, a transmission track 1d, and a position sensor 1e; a position sensor 1e is arranged at one end of the transmission track 1d, and a mapping sensor 1a is arranged at the other end; belt transmission shafts 1c are respectively arranged on both sides of the transmission track 1d, and a pulling track tensioning shaft 1b is arranged below the transmission track 1d.

[0038] Since this application uses a heavier tray, and the robotic arm is not suitable for this kind of product with a tray. This product itself is relatively heavy, which is a problem for the joint load of the manipulator. And the handling process of the manipulator will be relatively complex. After picking up the chip, actions such as rotation are required, and the cycle time will be extended. Considering the cost, this kind of transmission module is also lower in cost compared with the manipulator.

[0039] Specifically, the loading module 5 includes: a Z-axis loading unit 5a, an X-axis loading unit 5b, and a port 5c; the port 5c is configured to store the tray; the X-axis loading unit 5b is configured to drive the port 5c to move along the X-axis; the Z-axis loading unit 5a is configured to drive the port 5c to move along the Z-axis.

[0040] Specifically, the gripper pulling module 6 includes: a Y-axis pulling unit 6c, a gripper lifting cylinder 6b, and a gripper cylinder 6a; the gripper cylinder 6a is configured to grip the tray; the gripper lifting cylinder 6b is configured to control the vertical lifting of the tray; the Y-axis pulling unit 6c is configured to drive the tray to move along the Y-axis.

[0041] Specifically, the detection stage module 3 includes: a marble base 3c; a detection track 3d is arranged in the middle of the marble base 3c along the Y-axis direction; a detection stage 3e is arranged on the detection track 3d, and the detection stage 3e moves along the detection track 3d; air-floating floor feet 3b are arranged on both sides of the detection track 3d, and a loading ejector pin 3a is arranged at one end of the detection track 3d.

[0042] Specifically, it further includes: a detection mirror module; the detection mirror module is arranged above the marble base 3c; the detection mirror module includes a detection mirror unit 2 and a detection mirror driving unit 4; the detection mirror unit 2 is arranged on the detection mirror driving unit 4 and is driven by the detection mirror driving unit 4 to move the detection mirror unit 2 above the detection stage 3e.

[0043] Specifically, it further includes a housing 7; the loading module 5, the jaw pulling module 6, the tray belt transmission module 1 and the detection stage module 3 are arranged inside the housing 7; a viewing window is opened on the housing 7.

[0044] In a specific embodiment, the working process of the device is as follows:

[0045] The tray loading and unloading module is composed of a loading Z-axis and an X-axis. The Z-axis lifts and lowers so that products can be picked up and placed on each layer. The X-axis provides two loading positions. When one product is being detected, the other port can perform loading and unloading, enabling multi-station operation. After the tray is loaded, the Z-axis lifts and lowers, and the mapping sensor 1a performs mapping to determine the product status in the cassette. Then, the pulling module uses the jaws to pick up the product. The jaws clamp the product and pull it to the conveyor belt. The belt rotates to transport the tray directly above the stage. There is a sensor at the front to determine the stop position of the transmission. Due to the weight of the tray itself and the product characteristics, it cannot be transported by a manipulator like a wafer. However, in the combination of this transmission module and the pulling module, it also functions like a manipulator, providing accurate positioning and transportation. Considering the linearity of the track during transportation, the conveyor belt also has an opening and closing function. It can open to a certain extent during handover to absorb the error during absorption and handover, and close to a smaller range during normal movement to prevent the tray from tilting.

[0046] After the tray arrives, the loading ejector pin 3a of the stage rises to lift the product. After the belt opens, the cylinder descends to hand over the product to the detection stage 3e. After the tray is vacuum adsorbed, subsequent detection actions are carried out. The detection axis is designed with air-floating floor feet 3b, making the movement accuracy of the stage higher and smoother. Similarly, the camera lens group axis is also designed with a linear encoder and air-floating floor feet 3b, further ensuring high-precision detection.

[0047] After the detection is completed, it returns to the corresponding cassette in the same way, and then the detection of the next product is carried out.

[0048] Obviously, those skilled in the art can make various modifications and changes to the embodiments of the present application without departing from the spirit and scope of the present application. In this way, if these modifications and changes are within the scope of the claims of the present application and their equivalent forms, the present application also aims to cover these modifications and changes. The word "comprising" does not exclude the presence of other elements or steps not listed in the claims. The simple fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage. Any reference signs in the claims should not be construed as limiting the scope.

Claims

1. A fully automatic tray packaged chip detection device, characterized in that: include: Feeding module, gripper pulling module, tray belt transmission module and detection platform module; The loading module is configured to transfer a tray carrying chips; The tray belt transmission module is arranged at one end of the detection platform module; The tray belt transmission module is connected to the loading module in the feeding direction and to the detection platform module in the discharging direction; the clamping claw pulling module is arranged below the tray belt transmission module, and the tray belt transmission module and the clamping claw pulling module cooperate to realize the transmission of the tray from the loading module to the detection platform module.

2. The fully automatic tray packaged chip detection equipment according to claim 1 is characterized in that: The tray belt transmission module includes: a mapping sensor, a belt transmission shaft, a pull-out rail tensioning shaft, a transmission rail and an in-place sensor; the in-place sensor is arranged at one end of the transmission rail, and the mapping sensor is arranged at the other end; the belt transmission shafts are respectively arranged on both sides of the transmission rail, and a pull-out rail tensioning shaft is arranged under the transmission rail.

3. The fully automatic tray packaged chip detection equipment according to claim 2 is characterized in that: The loading module includes: a Z-axis loading unit, an X-axis loading unit and a port; the port is configured to store the tray; the X-axis loading unit is configured to drive the port to move along the X-axis; the Z-axis loading unit is configured to drive the port to move along the Z-axis.

4. The fully automatic tray packaged chip detection equipment according to claim 3 is characterized in that: The clamping jaw pulling module includes: a Y-axis pulling unit, a clamping jaw lifting cylinder and a clamping jaw cylinder; the clamping jaw cylinder is configured to clamp the pallet; the clamping jaw lifting cylinder is configured to control the vertical lifting of the pallet; the Y-axis pulling unit is configured to drive the pallet to move along the Y-axis.

5. The fully automatic tray packaged chip detection equipment according to claim 4, characterized in that: The detection platform module includes: a marble base; a detection track is arranged in the middle of the marble base along the Y-axis direction; a detection platform is arranged on the detection track, and the detection platform moves along the detection track; air-floating feet are arranged on both sides of the detection track, and a material receiving ejector pin is arranged at one end of the detection track.

6. The fully automatic tray packaged chip detection equipment according to claim 5, characterized in that: Also includes: A detection mirror module; the detection mirror module is arranged above the marble base; the detection mirror module includes a detection mirror unit and a detection mirror driving unit; the detection mirror unit is arranged on the detection mirror driving unit and is driven by the detection mirror driving unit to move the detection mirror unit above the detection carrier.

7. The fully automatic tray packaged chip detection equipment according to claim 1, characterized in that: It also includes a shell; the feeding module, the clamping claw pulling module, the tray belt transmission module and the detection platform module are arranged inside the shell; and a visual window is opened on the shell.

8. The fully automatic tray packaged chip detection equipment according to claim 7, characterized in that: It also includes an alarm device; the alarm device is arranged above the shell.

9. The fully automatic tray packaged chip detection equipment according to claim 7, characterized in that: Also includes: Cooling and ventilation device; the cooling and ventilation device is arranged above the shell.

10. The fully automatic tray packaged chip detection equipment according to claim 1, characterized in that: Also includes: Control module; the control module includes a display screen, a mouse and a keyboard for controlling the operation of the fully automatic tray packaged chip detection equipment.

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