Sintering furnace for single crystal production

Abstract

The invention relates to the technical field of single crystal production equipment, in particular to a sintering furnace for single crystal production, which comprises a furnace body and a crucible arranged in the furnace body, a top sealing cover is arranged on the furnace body, a locking mechanism is arranged in the top sealing cover, and the locking mechanism is used for fixing graphite pipes arranged between the crucible and the furnace body in a circumferential array; the locking mechanism comprises a locking piece which moves in the shaft diameter direction so as to be assembled with the graphite pipe in a plug-pin mode. The locking piece comprises a first air bag arranged on the outer side of the air nozzle, the first end of the first air bag is positioned, and the other end of the first air bag is slidably arranged. According to the sintering furnace for single crystal production, the locking piece is pushed to be matched with the graphite pipe plug pin, the graphite pipe can be rapidly installed and locked, and compared with an integrated graphite heater and a combined graphite pipe, the size is small, replacement is more convenient, and the maintenance cost is lower.

Description

Technical Field

[0001] The present invention relates to the technical field of single crystal production equipment, and particularly relates to a sintering furnace for single crystal production. Background Art

[0002] A sintering furnace is a sintering device used for preparing materials such as ceramics, powder metallurgy, magnetism, and single crystals. In the production of single crystals, the sintering furnace generally heats and melts a quartz crucible and the raw materials filled therein through a graphite heater and a graphite crucible.

[0003] The graphite heater for a Czochralski single crystal furnace disclosed in the patent with the publication number CN206015144U and the publication date of March 15, 2017, includes a heater body. The heater body has a central axis. The heater body includes a cylindrical side wall, and a plurality of second slots are provided on the side wall; the second slots axially extend upward from the bottom end of the heater body, and along the direction from the top end to the bottom end, the width of the second slots gradually increases.

[0004] In the prior art including the above patent, the graphite heater for the sintering furnace uses an integral straight cylindrical graphite heater. The integral graphite heater will be oxidized after long-term use and needs to be replaced and repaired in time to ensure the thermal field environment for single crystal preparation. When replacing the integral straight cylindrical graphite heater, due to its large volume and the need for whole replacement, the operation difficulty is large and the replacement cost is high. Summary of the Invention

[0005] The purpose of the present invention is to provide a sintering furnace for single crystal production, which is used to solve the problems of large volume, difficult replacement, and high replacement cost of the integral straight cylindrical graphite heater.

[0006] To achieve the above purpose, the present invention provides the following technical solution: A sintering furnace for single crystal production includes a furnace body and a crucible disposed therein. A capping cover is provided on the furnace body, and a locking mechanism is provided in the capping cover. The locking mechanism is used to fix a graphite tube arranged in a circumferential array between the crucible and the furnace body;

[0007] The locking mechanism includes a locking member that moves in the axial diameter direction to maintain a pin assembly with the graphite tube;

[0008] The locking member includes a first airbag disposed outside the air nozzle. Its first end is positioned, and the other end is slidably arranged.

[0009] Preferably, fixing plates are provided at both ends of the first airbag, and a second airbag connected to the first airbag is installed on the fixing plates. During the deformation process of the first airbag, gas is squeezed into the second airbag to make it in an interference fit with the locking groove.

[0010] Preferably, it further includes a barbed airbag, on the surface of which there are inflation feet arranged obliquely towards the first airbag;

[0011] The barbed airbag is arranged on a first baffle provided on one side of the first of the second airbags, and the two are in communication with each other.

[0012] Preferably, the barbed airbag is slidably arranged at one end of the first airbag.

[0013] Preferably, it further includes a sealing structure for controlling the opening and closing of the air nozzle, and the sealing structure includes a first arc portion and a second arc portion;

[0014] The first arc portion is located inside the air nozzle and penetrates through the first arc portion of another sealing structure, and an air passage is formed at the intersection of the two;

[0015] The second arc portion is in contact with the first airbag.

[0016] Preferably, the second arc portion is larger than the first arc portion.

[0017] Preferably, the locking mechanism includes a first connecting rod member that provides a moving direction for the locking member, and an L-shaped connecting rod that cooperates with it and drives the locking member to rotate. The L-shaped connecting rod has two strokes: a rotating stroke and a sliding stroke.

[0018] Preferably, it further includes a second connecting rod member that forms a cooperation with the L-shaped connecting rod through a hanging ring.

[0019] Preferably, it further includes a connecting rod force-saving structure, and the connecting rod force-saving structure includes a seventh connecting rod and an eighth connecting rod and cooperates with the second connecting rod member.

[0020] Preferably, a total control structure is provided on the capping cover, and the total control structure includes a rotating ring, and the first end of the eighth connecting rod is located in a groove formed on the rotating ring.

[0021] In the above technical solution, a sintering furnace for single crystal production provided by the present invention has the following beneficial effects: In the solution, the graphite tube is locked by the cooperation of the locking member driven to move and the graphite tube pin. When the graphite tube needs to be repaired or replaced, only the locking member needs to be pulled axially and radially to disengage the locking member from the graphite tube, then the graphite tube can be unlocked and taken out. After installing a new graphite tube, the locking member is pushed to cooperate with the graphite tube pin, and the graphite tube can be quickly installed and locked. Compared with the integral graphite heater, the combined graphite tube is smaller in volume, more convenient to replace, and lower in maintenance cost. In the solution, after the air nozzle is inserted into the locking groove and travels a predetermined distance and then rotates a predetermined angle, the inflation feet of the first airbag, the second airbag, and the barbed airbag are in interference fit with the locking groove to form a multi-stage sealing and damping effect, making the locking of the locking member on the graphite tube more firm. In the solution, the first airbag twists and contracts to squeeze the second arc portion, so that the distance between the inner arc tops of the two first arc portions is reduced, and the fitting surfaces of the two first arc portions will also separate during the movement of the first arc portion, thereby forming a so-called air passage, thus opening the air nozzle, and the air nozzle can be separately sealed before locking. In the solution, the L-shaped link is driven to rotate and slide by the second connecting rod member, so as to drive the first connecting rod member to drive the locking member to lock or unlock the graphite tube. By pushing the push rod provided on the outer wall of the rotating ring to drive the rotating ring to rotate, the groove wall of the groove can be driven to push the eighth link, and the locking and unlocking of all graphite tubes can be realized. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required in the embodiments. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those of ordinary skill in the art, other drawings can also be obtained according to these drawings.

[0023] Figure 1 It is a schematic structural diagram of the furnace body provided by the embodiment of the present invention;

[0024] Figure 2 It is a schematic structural diagram of the capping cover and the graphite tube assembly provided by the embodiment of the present invention;

[0025] Figure 3 It is a schematic structural diagram of the locking mechanism provided by the embodiment of the present invention;

[0026] Figure 4 It is a schematic plan view of the locking mechanism provided by the embodiment of the present invention;

[0027] Figure 5 It is a schematic cross-sectional structure diagram of the locking member provided by the embodiment of the present invention;

[0028] Figure 6 It is a schematic cross-sectional structure diagram of the furnace body provided by the embodiment of the present invention;

[0029] Figure 7 Structural schematic diagram of A provided by the embodiment of the present invention;

[0030] Figure 8 Structural schematic diagram of the initial state after the inflatable foot bulges provided by the embodiment of the present invention;

[0031] Figure 9 Structural schematic diagram of the inflatable foot after the included angle changes provided by the embodiment of the present invention;

[0032] Figure 10 Structural schematic diagram of the position of the L-shaped connecting rod in the locked state of the locking mechanism provided by the embodiment of the present invention;

[0033] Figure 11 Structural schematic diagram of the position of the L-shaped connecting rod in the unlocked state of the locking mechanism provided by the embodiment of the present invention;

[0034] Figure 12 Structural schematic diagram of the two first arc-shaped parts after being opened provided by the embodiment of the present invention;

[0035] Figure 13 Structural schematic diagram of the limiting mechanism provided by the embodiment of the present invention;

[0036] Figure 14 Structural schematic diagram of the graphite tube provided by the embodiment of the present invention.

[0037] Explanation of reference numerals:

[0038] 1. Furnace body; 2. Sealing cover; 3. Graphite sheet; 4. Locking mechanism; 41. Locking part; 411. Air nozzle; 412. Docking pipe; 413. Barbed airbag; 414. First airbag; 415. Second airbag; 416. Sealing structure; 4161. First arc part; 4162. Rubber sleeve; 4163. Second arc part; 4164. Air duct; 417. Fixed plate; 418. Rotating part; 419. Sliding part; 42. First connecting rod member; 421. Sliding sleeve; 422. Slide bar; 423. Second spring; 424. Housing; 425. First connecting rod; 426. Second connecting rod; 427. Third connecting rod; 428. Fourth connecting rod; 43. Second connecting rod member; 431. Unlocking rod; 432. Fifth connecting rod; 433. Limiting sleeve; 434. Sixth connecting rod; 44. Link force-saving structure; 441. Seventh connecting rod; 442. Third spring; 443. Moving part; 444. Eighth connecting rod; 445. Third chute; 45. Suspension ring; 46. L-shaped connecting rod; 5. Total control structure; 51. Rotating ring; 52. Groove; 53. Push rod; 54. First chute; 55. Limiting mechanism; 551. Arc-shaped stop block; 552. Pull rod; 553. First spring; 554. Second chute; 6. Graphite tube; 7. Annular air pipe; 8. Connecting hose; 9. Locking groove; 10. Air hole; 11. Crucible; 12. Installation groove. Detailed implementation mode

[0039] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further introduced in detail below with reference to the accompanying drawings.

[0040] As Figure 1-14 shown, a sintering furnace for single crystal production includes a furnace body 1 and a crucible 11 arranged therein. A sealing cover 2 is arranged on the furnace body 1, and a locking mechanism 4 is arranged in the sealing cover 2. The locking mechanism 4 is used to fix the graphite tube 6 arranged in a circumferential array between the crucible 11 and the furnace body 1;

[0041] The locking mechanism 4 includes a locking part 41 that moves along the axial diameter direction to maintain a plug-in assembly with the graphite tube 6;

[0042] The locking part 41 includes a first airbag 414 arranged outside the air nozzle 411, with its first end positioned and the other end slidably arranged.

[0043] Specifically, a graphite sheet 3 for heating the graphite tube 6 is arranged at the bottom inside the furnace body 1. By energizing the graphite electrode on the graphite sheet 3, the graphite sheet 3 heats the graphite tube 6. After the graphite tube 6 is heated, the temperature diffuses, causing the crucible 11 to heat up, thereby heating the quartz pot and the raw materials filled therein in the crucible 11 to melt the raw materials.

[0044] Furthermore, according to Figure 6It can be seen that a limiting block which is in plug-in fit with the limiting groove of the graphite sheet 3 is arranged at the second end of the graphite tube 6. The limiting block is of a polygonal structure to lock the graphite tube 6 and prevent the graphite tube 6 from rotating due to the thrust of the movement of the locking part 41 during the plugging process of the locking part 41 and the locking groove 9.

[0045] Furthermore, according to Figure 2 and Figure 7 It can be seen that the graphite tube 6 is located in the installation groove 12 opened on the capping cover 2. The locking part 41 is driven to move and inserted into the locking groove 9 opened on the graphite tube 6 to lock the graphite tube 6.

[0046] Secondly, the locking part 41 is assembled on the capping cover 2 through known structures such as a slide rail and a sliding shaft.

[0047] It should be noted that the driving mode of the locking part 41 in the above embodiment can be that a reciprocating groove is opened on the inner wall of the locking groove 9; or a connecting rod assembly with limit locking; or a driving mechanism well known to those skilled in the art can be used.

[0048] Furthermore, when the locking part 41 is inserted into the locking groove 9, one end of the first airbag 414 arranged in a sliding manner will approach the fixed end relative to the other end, thereby driving the first airbag 414 to deform, so that the locking part 41 and the locking groove 9 are in interference fit, so that a seal is formed between the air nozzle 411 and the graphite tube 6. Then, an inert gas is introduced into the annular air pipe 7, and is connected to the butt joint pipe 412 of the air nozzle 411 through the connecting hose 8. The inert gas can be introduced into the graphite tube 6 through the air nozzle 411, and the inert gas is discharged through the air holes 10 of the graphite tube 6. The inert gas can be nitrogen, helium, etc., which can protect the single crystal from oxidation. At the same time, the inert gas flowing along the wall of the graphite tube 6 can also protect the graphite tube 6 from oxidation.

[0049] It should be noted that the first airbag 414 in the above embodiment can be deformed by being compressed and contracted, or there is a rotational fit during the movement process, such as reciprocating groove assembly or thread groove assembly; or a driving mode well known to those skilled in the art can be used.

[0050] In the above technology, the graphite tube 6 is driven to move by the locking member 41 and is inserted and cooperated with the graphite tube 6 to lock the graphite tube 6. When the graphite tube 6 needs to be repaired or replaced, only need to pull the locking member 41 along the axial and radial directions to make the locking member 41 disengage from the graphite tube 6, then the graphite tube 6 can be unlocked and taken out, and then install a new graphite tube 6, push the locking member 41 to make it inserted and cooperated with the graphite tube 6, which can quickly install and lock the graphite tube 6. Compared with the integral graphite heater, the combined graphite tube 6 is smaller in volume, more convenient to replace, and lower in maintenance cost. After the locking member 41 is inserted into the graphite tube 6, one end of the first airbag 414 arranged in a sliding manner will approach the fixed end relative to the other end, thereby driving the first airbag 414 to deform and be in interference fit with the graphite tube 6, so that a seal is formed between the air nozzle 411 and the graphite tube 6, and thus an inert gas can be introduced into the graphite tube 6. The first airbag 414 is in interference fit with the graphite tube 6, so that the first airbag 414 contacts and rubs against the graphite tube 6 to generate damping and form a primary sealing effect, further enabling the locking member 41 to better lock the graphite tube 6.

[0051] As a further embodiment provided by the present invention, fixing plates 417 are arranged at both ends of the first airbag 414, and a second airbag 415 communicated with the first airbag 414 is installed on the fixing plates 417, and during the deformation process of the first airbag 414, gas is squeezed into the second airbag 415 to make it in interference fit with the locking groove 9.

[0052] Specifically, according to Figure 5 and Figure 7 it can be known that when the first airbag 414 deforms, gas is squeezed into the second airbags 415 on both sides through the first through holes arranged on the fixing plates 417, so that the second airbags 415 expand and form an interference fit with the locking groove 9. The second airbags 415 contact and rub against the locking groove 9 to generate damping and form a secondary sealing effect, thereby strengthening the locking of the graphite tube 6.

[0053] As a further embodiment provided by the present invention, it further includes a barbed airbag 413, and inflation feet 4131 inclined towards the first airbag 414 are arranged on its surface;

[0054] The barbed airbag 413 is arranged on a first baffle arranged on one side of the first second airbag 415, and the two are communicated with each other.

[0055] Specifically, according to Figure 5 and Figure 7 it can be known that during the process of deforming the first airbag 414 and squeezing gas into the second airbag 415, when the second airbag 415 expands to the limit, gas is introduced into the barbed airbag 413 through the second through holes opened on the first baffle, so that the barbed airbag 413 and the inflation feet 4131 on its surface bulge. The inflation feet 4131 bulge and are in interference fit with the locking groove 9 to play a sealing effect again.

[0056] As a further embodiment provided by the present invention, the barbed airbag 413 is slidably arranged at one end of the first airbag 414.

[0057] Specifically, according to Figure 5 and Figure 7 it can be known that when the locking member 41 slides into the locking groove 9, the inflated air foot 4131 in the inflated state abuts against the inner wall of the locking groove 9 at the end. As the sliding action progresses, the angle between the barbed airbag 413 and the air foot 4131 increases. Referring to the change of Figures 8-9 , a damping effect is further increased, and the damping effect of rotation is also increased. The damping is generated by the contact friction between the air foot 4131 and the locking groove 9, and at the same time, a three-stage sealing effect is formed, thereby strengthening the locking of the graphite tube 6.

[0058] As a further embodiment provided by the present invention, it further includes a sealing structure 416 for controlling the opening and closing of the air nozzle 411. The sealing structure 416 includes a first arc portion 4161 and a second arc portion 4163;

[0059] The first arc portion 4161 is located inside the air nozzle 411 and penetrates through the first arc portion 4161 of another sealing structure 416, and an air passage 4164 is formed at the intersection of the two;

[0060] The second arc portion 4163 is in contact with the first airbag 414.

[0061] Specifically, according to Figure 5 and Figure 7 it can be known that after the air nozzle 411 is inserted into the locking groove 9 and travels a predetermined distance, it rotates a predetermined angle. During the operation process, the following several cooperations will be achieved simultaneously:

[0062] The fixed end of the first airbag 414 rotates relative to the air nozzle 411. A rotating member 418 is arranged at the fixed end of the first airbag 414. The fixing plate 417 and the first baffle at the fixed end of the first airbag 414 are both fixedly arranged on the outer surface of the rotating member 418. The first baffle is in keyway fit with the locking groove 9, and the rotating convex ring arranged on the inner wall of the rotating member 418 is in rotational fit with the rotating groove on the surface of the air nozzle 411, so that the rotating member 418 rotates relative to the air nozzle 411, as shown in combination with Figure 7 . Therefore, when the air nozzle 411 rotates, it will drive the first airbag 414 to undergo a torsional deformation, and the deformation direction is: the distance between the two ends of the first airbag 414 decreases, and the surface is spiral;

[0063] Since the first airbag 414 twists and contracts to squeeze the second arc portion 4163, the distance between the inner arc tops of the two first arc portions 4161 is reduced, and the mating surfaces of the two first arc portions 4161 will also separate during the movement of the first arc portions 4161, thereby forming a so-called air passage 4164, thus opening the air nozzle 411, so that the inert gas enters the graphite tube 6 through the air passage 4164, combined with Figure 12 as shown. Since the first arc portion 4161 and the second arc portion 4163 are directly arranged on the air nozzle 411 and cannot move, a rubber sleeve 4162 is arranged on the air nozzle 411, and the first arc portion 4161 and the second arc portion 4163 are arranged on the rubber sleeve 4162 to enable the first arc portion 4161 and the second arc portion 4163 to move.

[0064] It should be noted that the driving method for the rotation of the air nozzle 411 in the above embodiment can be belt drive; or it can be driven by a connecting rod assembly to rotate; or any driving method well-known to those skilled in the art can be used.

[0065] In addition, since the distance between the two ends of the first airbag 414 is reduced when the first airbag 414 twists, a sliding member 419 is arranged at the sliding end of the first airbag 414 to rotate along with the air nozzle 411. A moving block fixedly arranged on the inner wall of the sliding member 419 is slidably arranged in the moving grooves on both sides of the air nozzle 411 to enable the sliding member 419 to rotate along with the air nozzle 411 and move towards the fixed end of the first airbag 414. The fixing plate 417, the first baffle, the barbed airbag 413 and the second baffle at the moving end of the first airbag 414 are all arranged on the outer surface of the sliding member 419. Therefore, when the air nozzle 411 is inserted into the locking groove 9 and rotates a predetermined angle after traveling a predetermined distance, the rotation of the air nozzle 411 drives the sliding member 419 to rotate, thereby causing the first airbag 414 to be distorted. The two sides of the first airbag 414 bulge and form an interference fit with the locking groove 9 to form a sealing effect, and the gas in the first airbag 414 is squeezed to both sides and enters the second airbag 415 and the barbed airbag 413. The second airbag 415 bulges and forms an interference fit with the locking groove 9 to form a sealing effect. The barbed airbag 413 bulges and rotates along with the sliding member 419 and moves towards the rotating member 418 at the same time. After the barbed airbag 413 bulges and rotates, the inflatable feet 4131 on the surface of the barbed airbag 413 will rub against the groove wall of the locking groove 9 to generate damping to prevent its rotation. And when the barbed airbag 413 moves towards the rotating member 418, the included angle of the inflatable feet 4131 increases and forms a sealing effect with the locking groove 9, and generates damping to prevent the barbed airbag 413 from moving towards the rotating member 418. By inserting the air nozzle 411 into the locking groove 9 and rotating a predetermined angle after traveling a predetermined distance, the inflatable feet 4131 of the first airbag 414, the second airbag 415 and the barbed airbag 413 form an interference fit with the locking groove 9 to form a multi-stage sealing and damping effect, making the locking of the locking member 41 to the graphite tube 6 more firm.

[0066] It should be noted that, with reference to Figure 7 the position shown as a reference, the fixed end of the first airbag 414 is on the right side, while the moving end is on the left side.

[0067] As a further embodiment provided by the present invention, the second arc portion 4163 is larger than the first arc portion 4161.

[0068] Specifically, the second arc portion 4163 and the first arc portion 4161 form a labor-saving structure. With reference to the figure, the second arc portion 4163 is the labor-saving arm, and the first arc portion 4161 is the labor-consuming arm. Gently squeeze the second arc portion 4163, so that the distance between the inner arc tops of the two first arc portions 4161 is reduced, and the fitting surfaces of the two first arc portions 4161 will also separate during the movement of the first arc portion 4161.

[0069] Since the first arc portion 4161 is a labor-consuming arm, a large force is required to move the two first arc portions 4161. Therefore, when the air pressure at the air inlet of the air nozzle 411 acts on the two first arc portions 4161, they will not be opened due to the air pressure.

[0070] As a further embodiment provided by the present invention, the locking mechanism 4 includes a first connecting rod member 42 that provides a moving direction for the locking member 41, and an L-shaped connecting rod 46 that cooperates with it and drives the locking member 41 to rotate. The L-shaped connecting rod 46 has two strokes: a rotating stroke and a sliding stroke.

[0071] Specifically, according to Figure 3 and Figure 4 it can be known that Figure 3 and Figure 4 are the positions of the L-shaped connecting rod 46 and the first connecting rod member 42 when the locking member 41 is inserted into the locking groove 9 and locks the graphite tube 6.

[0072] When unlocking, first rotate the L-shaped connecting rod 46 with the first connecting rod member 42 as the axis. When the L-shaped connecting rod 46 rotates to the housing 424 as Figure 11When in the shown position, the second spring 423 pulls the sliding sleeve 421 to slide on the sliding rod 422 towards the housing 424, thereby driving the second connecting rod 426 hinged to the sliding sleeve 421 to push one end of the L-shaped connecting rod 46 to move, so that the L-shaped connecting rod 46 pulls the hinged end of the fourth connecting rod 428 and the third connecting rod 427 to move downward, so that the fourth connecting rod 428 and the third connecting rod 427 are arranged at a certain angle, so that the fourth connecting rod 428 pulls the first connecting rod 425 to horizontally move in the housing 424 towards the third connecting rod 427, further pulling the locking member 41 out of the locking groove 9, thereby completing the unlocking of the graphite tube 6. The other end of the fourth connecting rod 428 is hinged to the first connecting rod 425, and the other end of the third connecting rod 427 is hinged to the inner wall of the housing 424. And because the third connecting rod 427 not only needs to be arranged at an angle with the fourth connecting rod 428 but also needs to cooperate with the L-shaped connecting rod 46 to rotate together, the third connecting rod 427 is provided with a fixing member hinged to the inner wall of the housing 424, and is also provided with a rotating member rotatably connected to the fixing member, and the rotating member is hinged to the fourth connecting rod 428.

[0073] Further, when locking the graphite tube 6, first pull the L-shaped connecting rod 46, so that the L-shaped connecting rod 46 pushes the hinged ends of the third connecting rod 427 and the fourth connecting rod 428 to move upward, so that the third connecting rod 427 and the fourth connecting rod 428 move to the position as shown in Figure 4 At this time, the third connecting rod 427 and the fourth connecting rod 428 are horizontal and on the same axis as the first connecting rod 425, so that the fourth connecting rod 428 drives the first connecting rod 425 to push the locking member 41 into the locking groove 9. At the same time, the second connecting rod 426 also pushes the sliding sleeve 421 to slide on the sliding rod 422 in the direction away from the housing 424, so that the second spring 423 is in a stretched state. Then rotate the L-shaped connecting rod 46 to the position as shown in Figure 10 to lock the position of the L-shaped connecting rod 46. As the L-shaped connecting rod 46 rotates, the third connecting rod 427, the fourth connecting rod 428 and the first connecting rod 425 also rotate accordingly, thereby driving the air nozzle 411 to rotate, so that the first airbag 414 is torsionally deformed, so that the gas in the first airbag 414 is squeezed into the second airbag 415 and the barbed airbag 413. At the same time, due to the torsion of the first airbag 414, the sliding member 419 slides, so that the barbed airbag 413 follows the movement of the sliding member 419, so that the inflation feet 4131 on the surface of the barbed airbag 413 contact and rub against the inner wall of the locking groove 9 to generate damping, so that the angle between the inflation feet 4131 and the barbed airbag 413 increases, and the inflation feet 4131 are in interference fit with the locking groove 9 to achieve a sealing effect.

[0074] Further, it further includes a second connecting rod member 43 formed in cooperation with the lifting ring 45 and the L-shaped connecting rod 46. By pulling or pushing the unlocking rod 431 of the second connecting rod member 43 to move the fifth connecting rod 432 within the limit sleeve 433, the sixth connecting rod 434 hinged to the fifth connecting rod 432 can be driven to drive the L-shaped connecting rod 46 to rotate about the first connecting rod member 42 as an axis. Since the sixth connecting rod 434 not only needs to drive the L-shaped connecting rod 46 to rotate but also needs to drive the L-shaped connecting rod 46 to slide, the sixth connecting rod 434 and the L-shaped connecting rod 46 are connected by the lifting ring 45 to provide a sliding space for the L-shaped connecting rod 46.

[0075] In the above technology, the L-shaped connecting rod 46 is driven to rotate and slide by the second connecting rod member 43, so as to drive the first connecting rod member 42 to drive the locking member 41 to lock or unlock the graphite tube 6.

[0076] As a further embodiment provided by the present invention, it further includes a connecting rod force-saving structure 44. The connecting rod force-saving structure 44 includes a seventh connecting rod 441 and an eighth connecting rod 444, and cooperates with the second connecting rod member 43.

[0077] Specifically, according to Figure 2 it can be known that by pushing the eighth connecting rod 444 to rotate around the first fixed axis, the U-shaped end of the eighth connecting rod 444 drives the moving member 443 to slide within the third sliding groove 445 of the seventh connecting rod 441 and compress the third spring 442, thereby driving the seventh connecting rod 441 to rotate around the second fixed axis, so that the other end of the seventh connecting rod 441 drives the fifth connecting rod 432 to move. When the seventh connecting rod 441 and the eighth connecting rod 444 rotate to a certain angle, due to the elastic force of the third spring 442, the angles of the seventh connecting rod 441 and the eighth connecting rod 444 quickly deflect, thereby quickly driving the fifth connecting rod 432 to move, and the locking and unlocking of the graphite tube 6 can be easily realized. The U-shaped end of the eighth connecting rod 444 is hinged to the moving member 443, and the seventh connecting rod 441 is hinged to the fifth connecting rod 432.

[0078] In the above technology, a force-saving structure is formed by the cooperation of the seventh connecting rod 441 and the eighth connecting rod 444 with the second connecting rod member 43, and the locking and unlocking of the graphite tube 6 can be easily realized.

[0079] As a further embodiment provided by the present invention, a total control structure 5 is provided on the capping cover 2. The total control structure 5 includes a rotating ring 51, and the first end of the eighth connecting rod 444 is located in the groove 52 opened on the rotating ring 51.

[0080] Specifically, according to Figure 2It can be seen that by pushing the push rod 53 provided on the outer wall of the rotating ring 51 to drive the rotation of the rotating ring 51, the groove wall of the groove 52 is driven to push the eighth connecting rod 444, thereby driving the seventh connecting rod 441 to drive the second connecting rod member 43 to move, thereby driving the L-shaped connecting rod 46 to drive the first connecting rod member 42 to drive the locking member 41 to unlock the graphite tube 6, so as to realize the unlocking of all the graphite tubes 6. Rotating the rotating ring 51 in the reverse direction can realize the locking of all the graphite tubes 6.

[0081] Furthermore, since the push rod 53 is provided outside the capping cover 2, accidental contact may occur, causing the rotating ring 51 to rotate and resulting in accidental unlocking. When locking, when the push rod 53 slides to the end of the first chute 54 in the first chute 54, the push rod 53 squeezes the arc-shaped stoppers 551 slidably provided on the upper and lower groove walls of the first chute 54 into the second chute 554. After passing through the arc-shaped stoppers 551, the arc-shaped stoppers 551 are pushed out of the second chute 554 by the first spring 553 provided in the second chute 554, thereby limiting the push rod 53. When unlocking, pull the pull rod 552 on the arc-shaped stopper 551 to pull the arc-shaped stopper 551 back into the second chute 554, and then push the push rod 53. As shown in combination with Figure 13 shown.

[0082] In the above technology, by pushing the push rod 53 provided on the outer wall of the rotating ring 51 to drive the rotation of the rotating ring 51, the groove wall of the groove 52 is driven to push the eighth connecting rod 444, and the locking and unlocking of all the graphite tubes 6 can be realized.

[0083] Working principle: By Figure 1-14 It can be seen that when replacing the graphite tube 6, first unlock the old graphite tube 6. First, rotate the L-shaped connecting rod 46 with the first connecting rod member 42 as the axis. When the L-shaped connecting rod 46 rotates to the position of the housing 424 as shown in Figure 11 shown, the second spring 423 pulls the sliding sleeve 421 to slide on the sliding rod 422 towards the housing 424, thereby driving the second connecting rod 426 hinged to the sliding sleeve 421 to push one end of the L-shaped connecting rod 46 to move, so that the L-shaped connecting rod 46 pulls the hinged end of the fourth connecting rod 428 and the third connecting rod 427 to move downward, so that the fourth connecting rod 428 and the third connecting rod 427 are arranged at a certain angle, so that the fourth connecting rod 428 pulls the first connecting rod 425 to horizontally move in the housing 424 towards the third connecting rod 427, further pulling the locking member 41 out of the locking groove 9, thus completing the unlocking of the graphite tube 6. Then replace the new graphite tube 6. First, pull the L-shaped connecting rod 46, so that the L-shaped connecting rod 46 pushes the hinged ends of the third connecting rod 427 and the fourth connecting rod 428 to move upward, so that the third connecting rod 427 and the fourth connecting rod 428 move to the position as shown in Figure 4At the position shown, at this time, the third link 427 and the fourth link 428 are horizontal and on the same axis as the first link 425, so that the fourth link 428 drives the first link 425 to push the lock 41 into the locking groove 9. At the same time, the second link 426 also pushes the sliding sleeve 421 to slide away from the housing 424 on the slide bar 422, so that the second spring 423 is in a stretched state. Then rotate the L-shaped link 46 to the housing 424 as Figure 10Lock the position of the L-shaped connecting rod 46 at the shown position. As the L-shaped connecting rod 46 rotates, the third connecting rod 427, the fourth connecting rod 428, and the first connecting rod 425 also rotate accordingly, thereby driving the gas nozzle 411 to rotate. The rotation of the gas nozzle 411 drives the sliding member 419 to rotate, so that the first airbag 414 is twisted and deformed. The two sides of the first airbag 414 bulge and form an interference fit with the locking groove 9 to form a sealing effect. And the gas in the first airbag 414 is squeezed to both sides and enters the second airbag 415 and the barbed airbag 413. The second airbag 415 bulges and forms an interference fit with the locking groove 9 to form a sealing effect. The barbed airbag 413 bulges and rotates following the sliding member 419 and moves towards the rotating member 418 at the same time. After the barbed airbag 413 bulges and rotates, the inflation feet 4131 on the surface of the barbed airbag 413 will rub against the groove wall of the locking groove 9 to generate damping to prevent its rotation. And during the movement of the barbed airbag 413 towards the rotating member 418, the included angle of the inflation feet 4131 increases and forms a sealing effect with the locking groove 9, and generates damping to prevent the barbed airbag 413 from moving towards the rotating member 418. And the first airbag 414 twists and contracts, thereby squeezing the second arc portion 4163, so that the distance between the inner arc tops of the two first arc portions 4161 is reduced. And the fitting surfaces of the two first arc portions 4161 will also separate during the movement of the first arc portions 4161, thereby forming a so-called air passage 4164, thus opening the gas nozzle 411. By introducing inert gas into the annular air pipe 7 and then connecting it to the docking pipe 412 of the gas nozzle 411 through the connecting hose 8, inert gas can be introduced into the graphite tube 6 through the gas nozzle 411. The inert gas is then discharged through the pores 10 of the graphite tube 6, which can protect the single crystal from oxidation. At the same time, the inert gas flowing along the wall of the graphite tube 6 can also protect the graphite tube 6 from oxidation. By pushing the push rod 53 provided on the outer wall of the rotating ring 51 to drive the rotating ring 51 to rotate, thereby driving the groove wall of the groove 52 to push the eighth connecting rod 444 to rotate around the first fixed axis, so that the U-shaped end of the eighth connecting rod 444 drives the moving member 443 to slide in the third sliding groove 445 of the seventh connecting rod 441 and squeeze the third spring 442, thereby driving the seventh connecting rod 441 to rotate around the second fixed axis, so that the other end of the seventh connecting rod 441 drives the fifth connecting rod 432 to move. When the seventh connecting rod 441 and the eighth connecting rod 444 rotate to a certain angle, due to the elastic force of the third spring 442, the angles of the seventh connecting rod 441 and the eighth connecting rod 444 will deflect quickly, so as to quickly drive the fifth connecting rod 432 to move, and the unlocking of all the graphite tubes 6 can be easily realized. Rotating the rotating ring 51 in the reverse direction can lock all the graphite tubes 6. Because the push rod 53 is provided outside the capping cover 2, accidental touch may cause the rotating ring 51 to rotate, resulting in accidental touch unlocking. When locking, when the push rod 53 slides to the end of the first sliding groove 54 in the first sliding groove 54, the push rod 53 squeezes the arc-shaped stoppers 551 slidably arranged on the upper and lower groove walls of the first sliding groove 54 into the second sliding groove 554. After passing through the arc-shaped stoppers 551,The arc-shaped stopper 551 is pushed out of the second chute 554 by the first spring 553 disposed in the second chute 554, thereby limiting the push rod 53. When unlocking, the pull rod 552 on the arc-shaped stopper 551 is pulled to pull the arc-shaped stopper 551 back into the second chute 554, and then the push rod 53 can be pushed.

[0084] Only some exemplary embodiments of the present invention have been described by way of illustration. Undoubtedly, for those of ordinary skill in the art, various different ways can be used to modify the described embodiments without departing from the spirit and scope of the present invention. Therefore, the above drawings and description are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A sintering furnace for single crystal production, comprising a furnace body (1) and a crucible (11) arranged therein, characterized in that: The furnace body (1) is provided with a capping cover (2), and a locking mechanism (4) is provided inside the capping cover (2), and the locking mechanism (4) is used to fix graphite tubes (6) arranged in a circular array between the crucible (11) and the furnace body (1); The locking mechanism (4) comprises a locking element (41) that moves along the axial direction to maintain the latch assembly with the graphite tube (6); The locking element (41) comprises a first air bag (414) arranged outside the air nozzle (411), a first end of which is arranged for positioning, and the other end of which is arranged for sliding.

2. A sintering furnace for single crystal production according to claim 1, characterized in that: Both ends of the first airbag (414) are provided with fixing plates (417), and a second airbag (415) connected to the first airbag (414) is installed on the fixing plate (417), and during the deformation process of the first airbag (414), gas is squeezed into the second airbag (415) to make it interference fit with the locking groove (9).

3. A sintering furnace for single crystal production according to claim 2, characterized in that: It also includes a barbed airbag (413), the surface of which is provided with an inflatable foot (4131) arranged obliquely toward the first airbag (414); The barbed airbag (413) is arranged on a first baffle plate arranged on one side of the first and second airbags (415), and the two are connected to each other.

4. A sintering furnace for single crystal production according to claim 3, characterized in that: The barbed airbag (413) is slidably arranged at one end of the first airbag (414).

5. The sintering furnace for single crystal production according to claim 1, characterized in that: It also includes a sealing structure (416) for controlling the opening and closing of the air nozzle (411), wherein the sealing structure (416) includes a first arc-shaped portion (4161) and a second arc-shaped portion (4163); The first arc-shaped portion (4161) is located inside the air nozzle (411) and penetrates the first arc-shaped portion (4161) of another sealing structure (416), and an air passage (4164) is formed at the intersection of the two. The second arc-shaped portion (4163) is in contact with the first airbag (414).

6. A sintering furnace for single crystal production according to claim 5, characterized in that: The second arc-shaped portion (4163) is larger than the first arc-shaped portion (4161).

7. A sintering furnace for single crystal production according to claim 1, characterized in that: The locking mechanism (4) comprises a first connecting rod (42) for providing a moving direction for the locking element (41), and an L-shaped connecting rod (46) cooperating with the first connecting rod and driving the locking element (41) to rotate. The L-shaped connecting rod (46) has two travels: a rotation travel and a sliding travel.

8. A sintering furnace for single crystal production according to claim 7, characterized in that: It also includes a second connecting rod (43) that cooperates with the L-shaped connecting rod (46) through a lifting ring (45).

9. A sintering furnace for single crystal production according to claim 8, characterized in that: It also includes a connecting rod labor-saving structure (44), which includes a seventh connecting rod (441) and an eighth connecting rod (444), and cooperates with the second connecting rod (43).

10. The sintering furnace for single crystal production according to claim 1, characterized in that: The capping cover (2) is provided with a master control structure (5), the master control structure (5) comprises a rotating ring (51), and the first end of the eighth connecting rod (444) is located in a groove (52) opened on the rotating ring (51).

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