Full-automatic chip appearance defect and flatness detection device

Abstract

The invention discloses a full-automatic chip appearance defect and flatness detection device, and relates to the technical field of chip appearance and chip module detection.The full-automatic chip appearance defect and flatness detection device is characterized in that a first line laser scanner, a first CCD camera, a second line laser scanner, a second CCD camera and a third CCD camera are arranged on a conveying path of a second conveying mechanism; according to the invention, a plurality of detection devices are integrated on the same machine table, the labor cost and the total occupied space of the machine table are reduced, chips are detected in cooperation with an assembly line type operation mode, the chips do not need to be frequently transferred among the devices, secondary defects in the transfer process are reduced, the chips are stably conveyed in the detection process, and meanwhile, the detection efficiency is improved. By connecting the transverse and straight first conveying mechanism to the feeding and discharging position of the second conveying mechanism, empty Tray discs can be quickly reused, a large number of Tray discs are not prone to being idle, the operation management cost can be reduced, and the detection efficiency can be improved to a certain degree.

Description

Technical Field

[0001] The present invention relates to the technical field of chip appearance and chip module detection, and particularly to a full-automatic chip appearance defect and flatness detection device. Background Art

[0002] In the existing chip manufacturing field, in order to ensure the quality of the produced chips and avoid appearance and flatness defects in the produced chips, therefore, it is crucial to use a detection device to detect the appearance defects and flatness of the chips.

[0003] Under the conventional operation mode, items such as chip appearance defect detection and flatness detection are carried out separately on their respective corresponding detection devices. This results in the need for the chips to be transferred back and forth between different machines during a series of detection processes. This not only leads to a significant increase in labor and management costs, but also easily causes secondary defects to the chips. Moreover, the transportation between various detections is chaotic, prone to situations such as material mixing and QR code information confusion, affecting the detection efficiency and effect. And since the various detection operations for each chip need to be completed one by one, the Tray tray at the feeding position of each detection device is in an empty state after the chip is taken. It is difficult to quickly transfer the empty Tray tray to the corresponding discharging position to hold the qualified chips, resulting in a large number of empty Tray trays being stacked at the feeding position and the discharging position, causing a large number of Tray trays to be idle during the detection process. This not only causes resource waste, but also occupies limited working space, increasing the difficulty of equipment maintenance and management. Furthermore, due to the inefficient circulation of the Tray trays, the detection equipment needs to frequently wait for new Tray trays to be in place, resulting in a significant reduction in detection efficiency and seriously affecting the production progress and cost control.

[0004] Therefore, a full-automatic chip appearance defect and flatness detection device is proposed to solve some of the problems existing in the above-mentioned prior art. Summary of the Invention

[0005] The purpose of the present invention is to solve the problems existing in the prior art that during the chip production detection process, the chips need to be transferred back and forth between various independent detection devices, resulting in an increase in labor and management costs, and being prone to secondary damage. Also, during the feeding and discharging processes of each detection device, a large number of Tray trays will be idle, causing resource waste and affecting the detection efficiency. Thus, a full-automatic chip appearance defect and flatness detection device is proposed.

[0006] In order to solve the problems existing in the prior art, the present invention adopts the following technical solutions: A fully automatic chip appearance defect and flatness detection device comprises a machine platform, a first conveying mechanism arranged horizontally and vertically is installed on the top of the machine platform, and a second conveying mechanism arranged in a "冂"-shaped structure is connected to the rear of the first conveying mechanism, two columns arranged on the conveying path of the second conveying mechanism are vertically fixed on the machine platform, first CCD cameras located on the front and rear sides of the top of the columns are symmetrically fixed on the machine platform, a dividing plate located on the conveying path of the second conveying mechanism is rotatably installed on the machine platform, and four evenly distributed first trays are fixed on the dividing plate, and the four first trays are distributed in a "cross"-shaped structure, a second servo motor for driving the dividing plate to rotate is fixed on the machine platform, a second line laser scanner and a second CCD camera are fixed on the machine platform, the second line laser scanner is located directly above the first tray at the rear, the second CCD camera is located directly above the first tray away from the columns, a third CCD camera located on the conveying path of the second conveying mechanism is fixed on the machine platform, a support plate is arranged at the end of the second conveying mechanism, and a flatness NG receiving tray and an appearance NG receiving tray are placed on the support plate.

[0007] Preferably, the first conveying mechanism includes conveying frames connected in the same straight line, the left conveying frame is provided with a feeding area located on the left side, and a grabbing area arranged on the right side of the feeding area, the right conveying frame is provided with a discharging area located on the right side, and a good product receiving area arranged on the left side of the discharging area, an empty tray pre-storage area between the grabbing area and the good product receiving area is provided at the connecting position of the left and right conveying frames, and tray stacking mechanisms are installed in both the feeding area and the discharging area.

[0008] Preferably, conveying rollers are rotatably mounted on both left and right ends of the conveying frame, a conveying belt is transmission-sleeved between the corresponding ends of the two conveying rollers, and a first servo motor for driving the conveying rollers to rotate is fixed on the conveying frame.

[0009] Preferably, the tray stacking mechanism includes a box body fixedly mounted on the conveyor frame, and a first electric push rod arranged laterally is fixed on the left and right end walls of the box body, the telescopic end of the first electric push rod points to the center position of the box body and is fixed with a clamping block, and a second electric push rod is vertically fixed on the machine platform and is located directly below the box body, and a top plate located between the front and rear conveyor belts is fixed on the telescopic end of the second electric push rod.

[0010] Preferably, the lengths of the feeding area, grabbing area, discharging area, good product receiving area and empty tray pre-storage area are equal, and a third electric push rod is fixed on the conveying frame on the left and right sides of the feeding area, discharging area and empty tray pre-storage area, and a baffle located between the front and rear conveyor belts is fixed on the telescopic end above the third electric push rod.

[0011] Preferably, a glass table located behind the grabbing area is fixed on the machine platform, and a first-line laser scanner is fixed below the glass table. The glass table is located on the left side of the column platform, and the dividing plate is located on the right side of the column platform.

[0012] Preferably, the second conveying mechanism includes a first transverse and longitudinal electric slide fixed on the machine platform and covering the grabbing area and the top of the glass table, a first electric slide longitudinally arranged behind the glass table is fixed on the machine platform, and a second tray is fixed on the sliding end of the first electric slide, a second electric slide arranged on the left side of the glass table and the first electric slide is fixed on the machine platform, a third electric slide located on the column platform, the first tray on the left side and the rear of the first electric slide is fixed on the machine platform, a second transverse and longitudinal electric slide covering the good product receiving area, the first tray in front and the support plate is fixed on the machine platform, and suction cup assemblies are fixed on the sliding ends of the first transverse and longitudinal electric slides, the second electric slides, the third electric slides and the second transverse and longitudinal electric slides.

[0013] Preferably, the distance between the left and right column bases, the horizontal and vertical distances between the left column base and the first electric slide rail, and the distance between the right column base and the left first tray are equal, three equally spaced suction cup assemblies are installed on the sliding end of the third electric slide rail, the distance between two adjacent suction cup assemblies on the sliding end of the third electric slide rail is equal to the distance between the two column bases, and a rotating structure is arranged inside the suction cup assembly.

[0014] Preferably, the suction cup assembly includes a supporting plate fixedly connected to the sliding end, and a sliding table that can be lifted up and down is slidably connected to the supporting plate, a third servo motor arranged vertically is fixed to the sliding table, and a suction cup body is fixedly installed on the driving shaft below the third servo motor, an adapter is rotatably connected to the driving shaft above the third servo motor, the driving shaft of the third servo motor is arranged to be a vertical through-type structure, rollers symmetrically arranged up and down are rotatably installed on the supporting plate, a ring belt fixedly connected to the sliding table is connected to a transmission sleeve between the two rollers, and a fourth servo motor for driving the rollers to rotate is fixedly installed on the supporting plate.

[0015] Preferably, a fourth electric slide rail disposed transversely is fixed on the machine platform, and the support plate is fixedly mounted on the sliding end of the fourth electric slide rail.

[0016] Compared with the prior art, the present invention has the following beneficial effects: 1. In the present invention, the second conveying mechanism is set as a "冂"-shaped structure for conveying chips one by one, and the first line laser scanner, the first CCD camera, the second line laser scanner, the second CCD camera and the third CCD camera are set on the conveying path of the second conveying mechanism for detecting the appearance defects and flatness of the chip. A plurality of detection devices are integrated on the same machine, which is beneficial to reducing the labor cost and the total occupied space of the machine. The chip is detected in accordance with the assembly line operation mode, so that the chip does not need to be frequently transferred between various devices, which is beneficial to reducing the secondary defects in the transfer process and making the conveying stable during the chip detection process. At the same time, by connecting the horizontal and vertical first conveying mechanism to the inlet and outlet position of the second conveying mechanism, the detection device can convey the Tray plate horizontally and vertically between the inlet and outlet positions of the chip detection path. The empty Tray plate taken during the detection of the feed can be quickly conveyed to the discharge position for placing qualified chips, so that the transfer of the Tray plate at the inlet and outlet positions is more reasonable and efficient, and it is not easy to cause a large number of Tray plates to be idle, which is beneficial to avoid waste of resources and reduce the cost of operation and management. With mutual cooperation, the detection efficiency can be improved to a certain extent; 2. In the present invention, the horizontal and vertical distances between the first electric slide rail and the left column base, the distance between the left and right column bases, and the distance between the right column base and the first tray on the left are set to be equal, and the three suction cup assemblies are equidistantly fixed on the sliding end of the third electric slide rail. When the sliding end of the third electric slide rail is on the left, the three suction cup assemblies installed thereon correspond to the second tray and the two column bases respectively. When the sliding end of the third electric slide rail moves to the right, the three suction cup assemblies installed thereon correspond to the two column bases and the first tray on the left respectively. The operation mode of equidistant module transportation is adopted, so that the four sides of the chip can be detected simultaneously, which is beneficial to improve the efficiency of detecting the four sides of the chip to a certain extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings: Figure 1 A perspective view of the present invention; Figure 2 A top view of the present invention; Figure 3 It is a schematic diagram of the present invention from the perspective of directly above; Figure 4 It is a schematic diagram of the present invention from the rear upper perspective; Figure 5 is a three-dimensional diagram of the first conveying mechanism of the present invention; Figure 6 It is a three-dimensional diagram of the glass table and the first horizontal and vertical electric slide rail of the present invention; Figure 7 This is a perspective view of the column base, the first CCD camera, the second tray, and the third electric slide rail of the present invention; Figure 8 This is a perspective view of the indexing plate, the first tray, the second line laser scanner, and the second CCD camera of the present invention; Figure 9 This is a perspective view of the second horizontal and vertical electric slide rail, the flatness NG receiving tray, and the appearance NG receiving tray of the present invention; Figure 10 This is a perspective view of the suction cup assembly of the present invention.

[0018] Reference numerals in the figure: 1. Machine table; 2. Conveyor rack; 201. Conveyor roller; 202. Conveyor belt; 203. First servo motor; 204. Inlet area; 205. Gripping area; 206. Outlet area; 207. Good product receiving area; 208. Empty tray pre-storage area; 3. Box body; 301. First electric push rod; 302. Clamping block; 303. Second electric push rod; 304. Top plate; 4. Third electric push rod; 401. Baffle; 5. Glass table; 501. First line laser scanner; 502. Column base; 503. First CCD camera; 504. Indexing plate; 505. First tray; 506. Second servo motor; 507. Second line laser scanner; 508. Second CCD camera; 509. Third CCD camera; 6. First horizontal and vertical electric slide rail; 601. First electric slide rail; 602. Second tray; 603. Second electric slide rail; 604. Third electric slide rail; 605. Second horizontal and vertical electric slide rail; 7. Suction cup assembly; 701. Carrier plate; 702. Slide table; 703. Third servo motor; 704. Suction cup body; 705. Adapter; 706. Roller; 707. Ring belt; 708. Fourth servo motor; 8. Fourth electric slide rail; 801. Support plate; 802. Flatness NG receiving tray; 803. Appearance NG receiving tray. Detailed implementation manners

[0019] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments.

[0020] Embodiment: This embodiment provides a full-automatic chip appearance defect and flatness detection device. Refer to Figure 1 - Figure 10Specifically, it includes a machine 1, a first conveying mechanism arranged horizontally and vertically is installed on the top of the machine 1, and a second conveying mechanism arranged in a "冂"-shaped structure is connected to the rear of the first conveying mechanism, two columns 502 arranged on the conveying path of the second conveying mechanism are vertically fixed on the machine 1, and first CCD cameras 503 located on the front and rear sides of the top of the columns 502 are symmetrically fixed on the machine 1, a dividing plate 504 located on the conveying path of the second conveying mechanism is rotatably installed on the machine 1, and four evenly distributed first trays 505 are fixed on the dividing plate 504, and the four first trays 505 are distributed in a "cross"-shaped structure, and a rotary actuator for driving the dividing plate 504 to rotate is fixed on the machine 1. A second servo motor 506, a second line laser scanner 507 and a second CCD camera 508 are fixed on the machine 1, the second line laser scanner 507 is located directly above the first tray 505 at the rear, the second CCD camera 508 is located directly above the first tray 505 away from the column 502, a third CCD camera 509 located on the conveying path of the second conveying mechanism is fixed on the machine 1, a support plate 801 is provided at the end of the second conveying mechanism, and a flatness NG receiving tray 802 and an appearance NG receiving tray 803 are placed on the support plate 801, a transversely arranged fourth electric slide rail 8 is fixed on the machine 1, and the support plate 801 is fixedly mounted on the sliding end of the fourth electric slide rail 8.

[0021] The first conveying mechanism includes a conveying frame 2 connected on the same straight line, the left conveying frame 2 is provided with a feeding area 204 located on the left side, and a grabbing area 205 arranged on the right side of the feeding area 204, the right conveying frame 2 is provided with a discharging area 206 located on the right side, and a good product receiving area 207 arranged on the left side of the discharging area 206, an empty tray pre-storage area 208 located between the grabbing area 205 and the good product receiving area 207 is provided at the connecting position of the left and right conveying frames 2, and a tray stacking mechanism is installed in the feeding area 204 and the discharging area 206, conveying rollers 201 are rotatably installed at both ends of the conveying frame 2, a conveyor belt 202 is transmission-connected between the corresponding ends of the two conveying rollers 201, and a first servo motor 203 for driving the conveying rollers 201 to rotate is fixed on the conveying frame 2.

[0022] During the operation of the device, the tray is mounted on the front and rear conveyor belts 202, and then the first servo motor 203 is powered on and started, driving the conveyor roller 201 to drive the conveyor belt 202 to rotate continuously, so that the first conveying mechanism completes the operation of conveying the tray from left to right. The tray is loaded with a large number of evenly distributed chips. Since the second conveying mechanism is connected to the rear of the first conveying mechanism in a "冂"-shaped structure, there are two intersections between the first conveying mechanism and the second conveying mechanism. The first intersection is set at the gripping At the grabbing area 205, the second handover position is set at the good product receiving area 207. When the Tray loaded with chips is transported to the grabbing area 205, the numerous chips placed on the Tray will be transported one by one to the second conveying mechanism. Under the transportation of the second conveying mechanism, the chips move in an orderly manner in a "冂"-shaped trajectory. In the initial state, an empty Tray will be pre-placed in the good product receiving area 207. Finally, the chips transported by the second conveying mechanism will be loaded one by one onto the empty Tray in the good product receiving area 207.

[0023] During this process, the chips are placed one by one on the top of the two pillars 502, and the first CCD cameras 503 on the front and back sides of each pillar 502 take side photos. After processing and analysis, the appearance defects of the four sides of the chip are detected. When the chip is placed on the first tray 505, the second servo motor 506 is powered on to start and control the indexing plate 504 to rotate. Each rotation angle is 90°, which realizes the replacement of the positions of the four first trays 505 on the indexing plate 504. With the help of the rotation of the indexing plate 504, the position of the chip placed on the first tray 505 is transferred. The chip is rotated When it moves to directly below the second line laser scanner 507, the laser beam emitted by the second line laser scanner 507 irradiates the A surface of the chip below, and the chip will be subjected to a shield cover depression detection operation. When the chip is transferred to directly below the second CCD camera 508, the second CCD camera 508 will take a photo of the A surface, and after processing and analysis, the chip A surface appearance defect detection operation is realized. When the chip passes over the third CCD camera 509 during movement, the third CCD camera 509 will take a photo of the B surface, and after processing and analysis, the chip B surface appearance defect detection operation is realized.

[0024] The above operations are continuously carried out. Chips with appearance defects and flatness depressions detected during the detection process will be marked and classified onto the corresponding flatness NG receiving tray 802 or appearance NG receiving tray 803 according to the actual situation during the conveying process. Qualified chips will be orderly placed on the Tray tray at the good product receiving area 207. When the flatness NG receiving tray 802 and the appearance NG receiving tray 803 are full, the fourth electric slide rail 8 is powered on and started, driving the support plate 801 to drive the flatness NG receiving tray 802 and the appearance NG receiving tray 803 to move out, facilitating the staff to replace the new flatness NG receiving tray 802 and appearance NG receiving tray 803. When the Tray tray at the good product receiving area 207 is full, it will be conveyed to the discharging area 206 to the right, and the empty Tray tray at the grasping area 205 will be synchronously transferred to the good product receiving area 207 for placing the next round of qualified chips. Eventually, during the detection process, the conveying of the Tray tray and the chips is independent and orderly, interconnected, without interfering with each other, and without causing a large number of Tray trays to be in a vacant state. With the collection and detection of the first CCD camera 503, the second line laser scanner 507, and the second CCD camera 508, it can not only effectively improve the chip detection efficiency but also reduce the detection cost to a certain extent.

[0025] Scanning probes are installed in both areas where the second conveying mechanism is connected to the first conveying mechanism, which are used to scan the QR code on the chip for information recognition. The information obtained from the above detection is bound to the corresponding chip QR code in the database of the server. By scanning the QR code, the actual situation of the chip detection can be known. This device can not only perform multiple detections on the chip simultaneously but also perform individual item detections on the chip specifically, and automatically collect GRR data during the detection process, facilitating the verification of the operation status of this device and ensuring the detection accuracy.

[0026] This device can perform a total of four different operation modes: ① Single flatness detection mode: After the chip is automatically loaded and scanned for identification, during the process of being transported one by one by the second conveying mechanism, it does not stop at the corresponding position of the CCD camera and directly completes the flatness detection of the chip through the line laser scanner. The relevant data is recorded in the database according to the QR code, and then it is unloaded and stacked on the Tray tray. ② Single appearance detection mode: After the chip is automatically loaded and scanned for identification, during the process of being transported one by one by the second conveying mechanism, it does not stop at the corresponding position of the line laser scanner and directly completes the appearance detection of the chip through the CCD camera. The relevant data is recorded in the database according to the QR code, and then it is unloaded and stacked on the Tray tray. ③ Appearance and flatness detection mode: After the chip is automatically loaded, it is scanned and recognized by the barcode scanner. Then, during the sequential conveying process by the second conveying mechanism, it passes through the positions corresponding to the CCD camera and the line laser scanner in an orderly manner to complete the appearance and flatness detection operations respectively. The relevant data is recorded in the database according to the QR code, and then it is unloaded and stacked on the Tray. ④ Automatic GRR mode: After the chip is automatically loaded, it is scanned and recognized by the barcode scanner. Then, during the lower flatness detection process, each chip is continuously subjected to 10 rapid detections. Then, the flatness data is automatically filled into the GRR form. After the test is completed, the chip is unloaded and stacked on the Tray. The staff can select a suitable operation mode according to actual needs, which can effectively improve the flexibility of the device during actual use.

[0027] During the specific implementation process, such as Figure 1 - Figure 5 As shown in the figure, the tray stacking mechanism includes a box body 3 fixedly installed on the conveying frame 2. Transversely arranged first electric push rods 301 are fixedly installed on the left and right end walls of the box body 3. The telescopic ends of the first electric push rods 301 point to the center position of the box body 3 and are fixed with clamping blocks 302. A second electric push rod 303 is vertically fixed on the machine table 1 and is located directly below the box body 3. A top plate 304 located between the front and rear conveyor belts 202 is fixed on the telescopic end of the second electric push rod 303. During the operation of the device, through the tray stacking mechanism, the placement and sorting operations of the Tray can be realized. The tray stacking mechanism arranged in the feeding area 204 can place the stacked Trays on the conveyor belt 202 one by one, and the tray stacking mechanism arranged in the discharging area 206 can stack and sort the Trays conveyed on the conveyor belt 202 in an orderly manner, and cooperate with the first conveying mechanism to complete the orderly loading and unloading operations of the Trays.

[0028] Under normal circumstances, the telescopic end of the first electric push rod 301 drives the clamping block 302 to move towards the middle position of the corresponding box body 3. Under the restriction of the clamping blocks 302 on both the left and right sides, numerous stacked Tray trays are lifted above the clamping blocks 302 in the box body 3. When the tray stacking mechanism in the feeding area 204 needs to place the Tray tray on the conveyor belt 202, the second electric push rod 303 is powered on and starts to drive the top plate 304 to move up to the bottom of the lowermost Tray tray. Then, the first electric push rod 301 drives the clamping block 302 to move away from the middle position of the box body 3, temporarily releasing the downward movement restriction on the Tray trays in the box body 3. The second electric push rod 303 controls the top plate 304 to drive the stacked Tray trays to move down one layer. The first electric push rod 301 starts to reset, enabling the clamping block 302 to re-restrict the second-lowermost Tray tray. Then, the second electric push rod 303 controls the top plate 304 to continue moving down to the initial position, so that the lowermost Tray tray is placed on the conveyor belt 202, and the Tray tray is conveyed through the conveyor belt 202.

[0029] When the tray stacking mechanism in the discharging area 206 needs to stack and tidy up the Tray trays on the conveyor belt 202 into the box body 3, the Tray trays enter the lower position inside the box body 3 under the conveyance of the conveyor belt 202. The second electric push rod 303 is powered on and starts to control the top plate 304 to move up to lift the Tray trays placed on the conveyor belt 202 inside the lower part of the box body 3. Synchronously, the first electric push rod 301 starts to drive the clamping block 302 away from the box body 3 to release the restriction on the Tray trays. Under the drive of the second electric push rod 303, the top plate 304 lifts the Tray trays up above the clamping block 302. Then, the first electric push rod 301 controls the clamping block 302 to move reversely and reset to re-restrict the lowermost Tray tray. The above operations are carried out repeatedly to accurately and stably achieve the placement and tidying up operations of the Tray trays.

[0030] In the specific implementation process, such as Figure 1 - Figure 3 and Figure 5As shown, the lengths of the feeding area 204, the grasping area 205, the discharging area 206, the good product receiving area 207, and the empty tray pre-storage area 208 are equal. The third electric push rod 4 is fixed on the conveying rack 2 on the left and right sides of the feeding area 204, the discharging area 206, and the empty tray pre-storage area 208. And a baffle 401 located between the front and rear conveyor belts 202 is fixed on the telescopic end above the third electric push rod 4. During the operation of the device, after the third electric push rod 4 is powered on and started, it will drive the baffle 401 to move up and down. Under normal circumstances, the baffle 401 is in the lower position between the tops of the front and rear conveyor belts 202 and will not block the Tray trays conveyed on the conveyor belt 202. When it is necessary to restrict the Tray trays, the third electric push rod 4 controls the baffle 401 to rise, so that the baffle 401 is vertically inserted into the upper position between the tops of the front and rear conveyor belts 202. In this state, even if the conveyor belt 202 rotates and conveys, due to being blocked by the corresponding baffle 401, the Tray trays cannot cross the baffle 401 and be conveyed by the conveyor belt 202. Through the up and down movement of the baffle 401, the Tray trays can accurately and stably stay in the feeding area 204, the grasping area 205, the discharging area 206, the good product receiving area 207, or the empty tray pre-storage area 208 according to the actual situation, which can improve the operation stability of the device to a certain extent.

[0031] In the specific implementation process, as Figure 2 and Figure 6 shown, a glass table 5 is fixed on the machine table 1 behind the grasping area 205, and a first-line laser scanner 501 is fixed below the glass table 5. The glass table 5 is located on the left side of the column table 502, and the indexing plate 504 is located on the right side of the column table 502. During the operation of the device, when the chip is conveyed on the second conveying mechanism, it will be placed on the glass table 5. In this state, the B surface of the chip will be subjected to laser line scan detection by the first-line laser scanner 501. During the operation of the first-line laser scanner 501, the laser is diffused into line laser by the cylindrical objective lens and projected onto the surface of the target object to form diffuse reflection. After the emitted light is imaged on the CMOS, the displacement and shape are measured by detecting the changes in position and shape, so as to realize the laser line scan detection operation of the B surface of the chip. The working principle of the second-line laser scanner 507 is the same as that of the first-line laser scanner 501.

[0032] In the specific implementation process, as Figure 2 and Figure 6 - Figure 9As shown, the second conveying mechanism includes a first horizontal and vertical electric slide rail 6 fixed on the machine 1 and covering the grabbing area 205 and the glass table 5, a first electric slide rail 601 longitudinally arranged behind the glass table 5 is fixed on the machine 1, and a second tray 602 is fixed on the sliding end of the first electric slide rail 601, a second electric slide rail 603 arranged on the left side of the glass table 5 and the first electric slide rail 601 is fixed on the machine 1, a first tray 505 on the left side of the column 502 and the first electric slide rail 601 and a third electric slide rail 604 behind the first electric slide rail 601 are fixed on the machine 1, a second horizontal and vertical electric slide rail 605 covering the good product receiving area 207, the first tray 505 in front and the support plate 801 is fixed on the machine 1, and a suction cup assembly 7 is fixed on the sliding end of the first horizontal and vertical electric slide rail 6, the second electric slide rail 603, the third electric slide rail 604 and the second horizontal and vertical electric slide rail 605.

[0033] During the operation of the device, a transverse electric slide rail is provided in both the first transverse and longitudinal electric slide rail 6 and the second transverse and longitudinal electric slide rail 605, and a longitudinal electric slide rail is fixedly installed on the sliding end of the transverse electric slide rail. The suction cup assembly 7 in the first transverse and longitudinal electric slide rail 6 and the second transverse and longitudinal electric slide rail 605 is installed on the sliding end of the longitudinal electric slide rail. Through the arrangement of the transverse and longitudinal electric slide rails and the cooperation of the suction cup assembly 7, the first transverse and longitudinal electric slide rail 6 and the second transverse and longitudinal electric slide rail 605 can grab chips in a wide range. When the second conveying mechanism is used to convey the chip in a "冂" shape, the first horizontal and vertical electric slide rail 6 is powered on and started, and the chip loaded on the tray in the grasping area 205 is grasped and placed on the glass table 5 through the suction cup assembly 7 installed on it, and then the third servo motor 703 is powered on and started, and the chip placed on the glass table 5 is grasped and conveyed to the second tray 602 through the suction cup assembly 7 installed on its sliding end. After the first electric slide rail 601 is powered on and started, the second tray 602 is controlled to drive the chip to move backward. The third electric slide rail 604 is powered on and started, and the chips on the second tray 602 are grabbed and transported to the column 502 through the suction cup assembly 7 installed on its sliding end, and the chips on the column 502 are grabbed and transferred to the first tray 505 on the left, and then the indexing plate 504 is rotated 270° clockwise to transfer the chips on the first tray 505 on the left to the front position, and finally the chips on the first tray 505 on the left are mounted on the second horizontal and vertical electric slide rail 605. After the suction cup assembly 7 grabs the chip placed on the first tray 505 in front, it is classified and placed on the flatness NG receiving tray 802, the appearance NG receiving tray 803, or the tray in the good product receiving area 207 according to the actual situation, so as to realize stable and orderly "冂"-shaped transportation of the chips. The sliding ends of the longitudinal electric slides in the first horizontal and vertical electric slide rails 6 and the second horizontal and vertical electric slide rails 605 are equipped with visual cameras for visual identification of the chips, so as to realize the precise grabbing and placement operations of the chips.

[0034] Both the first horizontal and vertical electric slide rails 6 and the second horizontal and vertical electric slide rails 605 are equipped with code scanning probes. The code scanning probes are arranged in parallel with the corresponding suction cup assemblies 7. When the first horizontal and vertical electric slide rail 6 controls the suction cup assembly 7 thereon to grab the chips on the Tray tray in the grabbing area 205, the corresponding code scanning probe will scan the two-dimensional code on the chip, identify the information of the chip, complete the automatic code scanning and passing station and binding operations. When the second horizontal and vertical electric slide rail 605 controls the suction cup after the detection is completed by the suction cup assembly 7 thereon to be placed at the corresponding position, the corresponding code scanning probe will also perform a secondary scan on the two-dimensional code on the chip to verify the placement position, which can effectively avoid the situation of conveying disorder and material mixing.

[0035] In the specific implementation process, such as Figure 2 and Figure 7 shown, the distance between the left and right column platforms 502, the horizontal and vertical distance between the left column platform 502 and the first electric slide rail 601, and the distance between the right column platform 502 and the left first tray 505 are equal. Three equally spaced suction cup assemblies 7 are installed on the sliding end of the third electric slide rail 604. The distance between two adjacent suction cup assemblies 7 on the sliding end of the third electric slide rail 604 is equal to the distance between the two column platforms 502. A rotating structure is provided inside the suction cup assembly 7.

[0036] During the operation of the device, due to the horizontal and vertical distance between the first electric slide rail 601 and the left column platform 502, the distance between the left and right column platforms 502, and the distance between the right column platform 502 and the left first tray 505 being equal, when the sliding end of the third electric slide rail 604 is on the left side, the three suction cup assemblies 7 installed thereon correspond to the second tray 602 and the two column platforms 502 respectively. When the sliding end of the third electric slide rail 604 moves to the right side, the three suction cup assemblies 7 installed thereon correspond to the two column platforms 502 and the left first tray 505 respectively. Adopting the operation mode of modular equidistant handling enables the four sides of the chip to be detected simultaneously. The rhythm of the third electric slide rail 604 cooperating with the suction cup assembly 7 thereon is as follows: the suction cup assembly 7 moves down to suck the material, then lifts, taking 1.5S. The third electric slide rail 604 drives the suction cup assembly 7 to move to the right, taking 0.5S. The suction cup assembly 7 moves down to place the material, taking 1.5S, and then returns to the origin, taking 0.5S. The total time consumption is 4S in total, which can more efficiently realize the detection operation of the four surrounding sides of the chip.

[0037] In the specific implementation process, such as Figure 6 - Figure 7 and Figure 9 - Figure 10As shown, the suction cup assembly 7 includes a supporting plate 701 fixedly connected to the sliding end, and a slide 702 that can be lifted up and down is slidably connected to the supporting plate 701, a third servo motor 703 that is vertically arranged is fixed on the slide 702, and a suction cup body 704 is fixedly installed on the driving shaft below the third servo motor 703, an adapter 705 is rotatably connected to the driving shaft above the third servo motor 703, the driving shaft of the third servo motor 703 is set as an up and down through-type structure, rollers 706 that are symmetrically arranged up and down are rotatably installed on the supporting plate 701, a ring belt 707 that is fixedly connected to the slide 702 is transmission-sleeved between the two rollers 706, and a fourth servo motor 708 for driving the roller 706 to rotate is fixedly installed on the supporting plate 701.

[0038] During the operation of the device, the upper end of the adapter 705 is connected to the air pump through the air pipe to evacuate the suction cup body 704. By evacuating air, a negative pressure suction force is formed at the lower end of the suction cup body 704. After the lower end of the suction cup body 704 contacts the top of the chip, the chip can be adsorbed and grasped. After the suction cup body 704 grasps the chip, the third servo motor 703 can be controlled to power on and start, driving the suction cup body 704 to rotate, driving the chip grasped by the lower end of the suction cup body 704 to rotate, thereby realizing the adjustment of the chip posture, which is convenient for the device to detect the four sides of the chip. During the operation of the suction cup assembly 7, the fourth servo When the servo motor 708 is powered on and started, the roller 706 can be driven to drive the ring belt 707 to rotate. By controlling the rotation direction of the driving shaft of the fourth servo motor 708, the rotation direction of the ring belt 707 can be controlled, thereby realizing the adjustment of the up and down movement of the suction cup body 704. The operation is convenient and efficient. For the three suction cup assemblies 7 installed on the sliding end of the third electric slide rail 604, if it is necessary to ensure that the suction cup bodies 704 in the three suction cup assemblies 7 are lifted and lowered in unison, the rollers 706 in the three suction cup assemblies 7 can be connected by transmission, so as to more conveniently realize the consistent stability of the up and down control of the suction cup bodies 704 in the three suction cup assemblies 7 erected side by side.

[0039] Specifically, the working principle and operation method of the present invention are as follows: The Tray trays filled with chips to be tested are orderly stacked in the tray stacking mechanism in the feeding area 204. Through the cooperation of the first electric push rod 301 and the second electric push rod 303 in the tray stacking mechanism, the bottommost Tray tray is accurately and stably lowered onto the conveyor belt 202. Then, through the rotation and conveyance of the conveyor belt 202, the full-load Tray tray is conveyed into the grasping area 205. Through the first horizontal and vertical electric slide rail 6 and the suction cup assembly 7 installed thereon, the chips loaded on the Tray tray in the grasping area 205 are transferred to the glass table 5 one by one. At this time, the first line laser scanner 501 below can perform laser line scanning detection on the B side of the chip. Then, through the second electric slide rail 603 and the suction cup assembly 7 installed thereon, the chips on the glass table 5 are transferred to the second tray 602. The first electric slide rail 601 drives the second tray 602 to move backward to a position in the same straight line as the column table 502. Then, the third electric slide rail 604 and the three suction cup assemblies 7 installed thereon transfer the chips placed on the second tray 602 to the column table 502 on the left, and transfer the chips on the column table 502 on the right to the first tray 505 on the left. During the chip transfer process, the third CCD camera 509 arranged below performs shooting detection on the B side of the chip. Then, the second servo motor 506 drives the indexing plate 504 to drive the first tray 505 on the left to rotate clockwise by three 90°, successively passing below the second line laser scanner 507 and the second CCD camera 508, and finally transferred to the frontmost position. The second line laser scanner 507 and the second CCD camera 508 respectively perform laser line scanning detection and shooting detection on the A side of the chip. The chips with abnormalities during the detection process are marked. Finally, through the second horizontal and vertical electric slide rail 605 and the suction cup assembly 7 installed thereon, they are respectively classified onto the flatness NG receiving tray 802, the appearance NG receiving tray 803, and the Tray trays in the good product receiving area 207. When the Tray trays in the good product receiving area 207 are full, they will be erected at the bottom of the box body 3 in the discharging area 206. Under the cooperation of the first electric push rod 301 and the second electric push rod 303 in the tray stacking mechanism in the discharging area 206, they are stably stacked upward in the box body 3 in the discharging area 206.

[0040] The above is only the preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, makes equivalent substitutions or changes, and should be covered by the protection scope of the present invention.

Claims

1. A fully automatic chip appearance defect and flatness detection device, comprising a machine (1), characterized in that: A first conveying mechanism arranged horizontally and vertically is installed on the top of the machine table (1), and a second conveying mechanism with a "冂"-shaped structure is connected behind the first conveying mechanism. Two column platforms (502) are vertically fixed on the machine table (1) and are located on the conveying path of the second conveying mechanism. First CCD cameras (503) are symmetrically fixed on the machine table (1) on the front and rear sides of the tops of the column platforms (502). An indexing plate (504) is rotatably installed on the machine table (1) and is located on the conveying path of the second conveying mechanism. Four first trays (505) are fixed on the indexing plate (504) and are evenly distributed. The four first trays (505) are distributed in a "十"-shaped structure. A second servo motor (506) for driving the indexing plate (504) to rotate is fixed on the machine table (1). A second line laser scanner (507) and a second CCD camera (508) are fixed on the machine table (1). The second line laser scanner (507) is directly above the rear first tray (505). The second CCD camera (508) is directly above the first tray (505) far from the column platform (502). A third CCD camera (509) is fixed on the machine table (1) and is located on the conveying path of the second conveying mechanism. A support plate (801) is arranged at the end of the second conveying mechanism, and a flatness NG receiving tray (802) and an appearance NG receiving tray (803) are placed on the support plate (801).

2. The fully automatic chip appearance defect and flatness detection device according to claim 1 is characterized in that: The first conveying mechanism includes a conveying frame (2) connected in a straight line. An inlet area (204) is arranged on the left side of the left conveying frame (2), and a grasping area (205) is arranged on the right side of the inlet area (204). An outlet area (206) is arranged on the right side of the right conveying frame (2), and a good product receiving area (207) is arranged on the left side of the outlet area (206). An empty tray pre-storage area (208) is arranged at the connection position of the left and right conveying frames (2) between the grasping area (205) and the good product receiving area (207). Tray stacking mechanisms are installed in both the inlet area (204) and the outlet area (206).

3. The fully automatic chip appearance defect and flatness detection device according to claim 2 is characterized in that: Conveying rollers (201) are rotatably installed at both the left and right ends of the conveying frame (2). A conveyor belt (202) is sleeved between the corresponding ends of the two conveying rollers (201). A first servo motor (203) for driving the conveying rollers (201) to rotate is fixed on the conveying frame (2).

4. The fully automatic chip appearance defect and flatness detection device according to claim 3 is characterized in that: The tray stacking mechanism includes a box body (3) fixedly installed on the conveying frame (2). Transversely arranged first electric push rods (301) are fixed on the left and right end walls of the box body (3). The telescopic ends of the first electric push rods (301) point to the center position of the box body (3) and are fixed with clamping blocks (302). A second electric push rod (303) is vertically fixed on the machine table (1) directly below the box body (3), and a top plate (304) located between the front and rear conveyor belts (202) is fixed on the telescopic end of the second electric push rod (303).

5. The fully automatic chip appearance defect and flatness detection device according to claim 3 is characterized in that: The feeding area (204), the grabbing area (205), the discharging area (206), the good product receiving area (207) and the empty tray pre-storage area (208) are of equal length, and the conveying frame (2) is fixed with a third electric push rod (4) located on the left and right sides of the feeding area (204), the discharging area (206) and the empty tray pre-storage area (208), and a baffle (401) located between the front and rear conveyor belts (202) is fixed on the telescopic end above the third electric push rod (4).

6. The fully automatic chip appearance defect and flatness detection device according to claim 2 is characterized in that: A glass table (5) located behind the gripping area (205) is fixed on the machine platform (1), and a first line laser scanner (501) is fixed below the glass table (5); the glass table (5) is located on the left side of the column platform (502), and the indexing plate (504) is located on the right side of the column platform (502).

7. The fully automatic chip appearance defect and flatness detection device according to claim 6 is characterized in that: The second conveying mechanism comprises a first transverse and longitudinal electric slide rail (6) fixed on the machine platform (1) and covering the gripping area (205) and the glass table (5); the machine platform (1) is fixed with a first electric slide rail (601) arranged longitudinally behind the glass table (5), and a second tray (602) is fixed on the sliding end of the first electric slide rail (601); the machine platform (1) is fixed with a second electric slide rail (603) arranged on the left side of the glass table (5) and the first electric slide rail (601); There are a third electric slide rail (604) located on the column platform (502), the first tray (505) on the left side and the rear of the first electric slide rail (601); a second horizontal and vertical electric slide rail (605) covering the good product receiving area (207), the first tray (505) in front and the support plate (801) is fixed on the machine platform (1); and suction cup assemblies (7) are fixed on the sliding ends of the first horizontal and vertical electric slide rail (6), the second electric slide rail (603), the third electric slide rail (604) and the second horizontal and vertical electric slide rail (605).

8. The fully automatic chip appearance defect and flatness detection device according to claim 7 is characterized in that: The distance between the two left and right column platforms (502), the horizontal and vertical distances between the left column platform (502) and the first electric slide rail (601), and the distance between the right column platform (502) and the left first tray (505) are equal; three equally spaced suction cup assemblies (7) are installed on the sliding end of the third electric slide rail (604); the distance between two adjacent suction cup assemblies (7) on the sliding end of the third electric slide rail (604) is equal to the distance between the two column platforms (502); and a rotating structure is arranged inside the suction cup assembly (7).

9. The fully automatic chip appearance defect and flatness detection device according to claim 8, characterized in that: The suction cup assembly (7) comprises a bearing plate (701) fixedly connected to the sliding end, and a sliding table (702) that can be lifted up and down is slidably connected to the bearing plate (701), a third servo motor (703) arranged vertically is fixedly arranged on the sliding table (702), a suction cup body (704) is fixedly installed on the driving shaft below the third servo motor (703), an adapter (705) is rotatably connected to the driving shaft above the third servo motor (703), the driving shaft of the third servo motor (703) is arranged as an up and down through-type structure, rollers (706) that are symmetrically arranged up and down are rotatably installed on the bearing plate (701), an annular belt (707) that is fixedly connected to the sliding table (702) is transmission-sleeved between two of the rollers (706), and a fourth servo motor (708) for driving the rollers (706) to rotate is fixedly installed on the bearing plate (701).

10. The fully automatic chip appearance defect and flatness detection device according to claim 1, characterized in that: A fourth electric slide rail (8) arranged transversely is fixed on the machine platform (1), and the support plate (801) is fixedly mounted on the sliding end of the fourth electric slide rail (8).

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