Automatic execution EAP system and method for integrated circuit production and manufacturing

Abstract

The invention relates to the field of integrated circuit manufacturing, in particular to an automatic execution EAP system and method for integrated circuit production and manufacturing, and the system comprises a system information execution sub-module, a system plan task sub-module, an equipment data processing sub-module, a main communication sub-module, a flow processing sub-module, and an equipment information receiving and transmitting sub-module. Through specific division and cooperation of the six sub-modules, the whole EAP system realizes functional high decoupling and modular management, and the design not only improves the maintainability and expansibility of the system, but also enhances the stability and response speed of the system, and ensures that possible problems can be flexibly adjusted and dealt with in different production scenes; in addition, a process engine is introduced to effectively coordinate the working sequence and logic of each sub-module, so that the conditions of information islands and unclear responsibilities are avoided, the overall complexity of the system is reduced, and the system has higher adaptive capacity and expansion capacity when facing the change of service requirements.

Description

Technical Field

[0001] The present invention relates to the field of integrated circuit manufacturing, and particularly to an automatic execution EAP system and method for integrated circuit production and manufacturing. Background Art

[0002] With the development of integrated circuit manufacturing technology, manual management can no longer meet the requirements of precision production and manufacturing. For example, in the wafer manufacturing process, the number of external sensors connected to a production equipment exceeds 100, and at the same time, the machine has SECS and InterfaceA communication interfaces for communication. In order to better monitor and control the equipment, the Equipment Automation Programming (EAP) system came into being. Along with semiconductor production, the EAP system has been continuously developed and iterated, and a large number of personnel are involved in its development and operation and maintenance. The main functions realized by the EAP system include: real-time monitoring and control of equipment to ensure that the equipment is in the best operating state, reducing downtime caused by equipment failures, thereby improving the overall production efficiency; real-time collection and analysis of equipment data, timely discovery of potential problems and issuance of alarms, which helps to prevent quality problems during the production process; through integration with systems such as MES (Manufacturing Execution System), realizing the sharing and collaboration of production data, further optimizing the production process, and ensuring the consistency and stability of products.

[0003] Due to the increasing complexity of semiconductor-related equipment and the higher and higher process requirements, production control has become increasingly complex. For example, if a piece of equipment has one SECS (Semi Equipment Communication Standard) interface and more than 100 sensors, if traditional procedural programming is used, there will be a large number of "if-else", and at the same time, any logical modification requires a large amount of testing, and the human resources and code volume required will increase exponentially, and it is easy to make mistakes. If object-oriented programming is used, a new class needs to be created for each sensor to monitor the sensor status and send and receive messages from other systems at the same time. When these classes send or receive messages simultaneously, message jams will occur. At this time, developers need to use queues to implement first-in, first-out for messages; and multiple parallel messages require developers to use multi-threading technology, which will instead make the system more and more complex. Eventually, when trying to solve one problem, another problem will be brought about, and the problems will become more and more, and the system will become more and more difficult to maintain.

[0004] In summary, the EAP system needs to integrate numerous devices, which will lead to the following problems: The EAP system needs to be integrated with multiple other systems and device layers. Since the business attributes of each system are different, the interfaces are also different. Due to the complex code and highly customized system development, the maintenance and upgrade of the system require professional technical support, greatly increasing the management difficulty. The system development and maintenance are difficult, with a large demand for manpower. Moreover, due to the complexity of the system, it is very difficult to complete the coverage of the system during testing, the operation and maintenance are very difficult, and the system stability is poor. Summary of the Invention

[0005] The purpose of the present invention is to provide an integrated circuit production and manufacturing automatic execution EAP system and method, including a system information execution sub-module, a system planned task sub-module, a device data processing sub-module, a main communication sub-module, a process processing sub-module, and a device information sending and receiving sub-module. Through the specific division of labor and cooperation of the above six sub-modules, the entire EAP system realizes a high degree of decoupling and modular management in terms of functions. This design not only improves the maintainability and scalability of the system, but also enhances the stability and response speed of the system, ensuring that it can be flexibly adjusted and respond to possible problems in different production scenarios. In addition, a process engine is introduced to effectively coordinate the working sequence and logic of each sub-module, avoiding the situation of information islands and unclear responsibilities, not only reducing the overall complexity of the system, but also enabling the system to have stronger adaptability and expansion ability when facing changes in business requirements.

[0006] The present invention is realized through the following technical solutions:

[0007] An integrated circuit production and manufacturing automatic execution EAP system, including:

[0008] A system information execution sub-module, a system planned task sub-module, a device data processing sub-module, a main communication sub-module, a process processing sub-module, and a device information sending and receiving sub-module,

[0009] The system information execution sub-module is used to execute system-level tasks and instructions, receive instructions from the system planned task sub-module, and call the production equipment driver to execute actual operations;

[0010] The system planned task sub-module is used to define and schedule daily or periodic tasks of the local system, notify the tasks to be executed to the system information execution sub-module, and monitor the completion status of the tasks;

[0011] The device data processing sub-module is used to receive and process data from the production equipment driver, and transfer the processed data to the system planned task sub-module or the process processing sub-module;

[0012] The main communication sub-module is used to communicate with external systems, receive incoming instructions or data and transfer them to relevant sub-modules, and report the status information of the local system to external systems;

[0013] The process handling sub-module is responsible for the process management and coordination of the entire local system, and schedules relevant sub-modules to work together according to the received information and tasks;

[0014] The device information transceiver sub-module is responsible for communicating with production equipment, sending instructions to the production equipment and receiving the status information and data of the production equipment.

[0015] Optionally, the system information execution sub-module executes system-level tasks and instructions including: starting or stopping equipment, or adjusting production parameters;

[0016] The system information execution sub-module also serves as a message bus between sub-modules, used to listen to messages sent by any sub-module and automatically forward them to other sub-modules according to the type of the sent message.

[0017] Optionally, the system scheduled task sub-module defines and schedules daily or periodic tasks of the local system including: regularly checking the equipment status, or performing maintenance tasks;

[0018] The system scheduled task sub-module also regularly and automatically obtains machine data and uploads it to the Manufacturing Execution System (MES).

[0019] Optionally, the device data processing sub-module processes data from production equipment drivers including: analyzing or storing data from production equipment drivers;

[0020] The device data processing sub-module is also used for the processing of device-specific messages.

[0021] Optionally, the main communication sub-module communicates with external systems including: communicating with the Enterprise Resource Planning (ERP) system or the Supply Chain Management system;

[0022] The main communication sub-module communicates with external systems using the same format and communication mode.

[0023] Optionally, the process handling sub-module automatically loads the corresponding main process and sub-processes according to the configuration, automatically executes the main process and sub-processes, and automatically monitors the main process and sub-processes.

[0024] Optionally, the device information transceiver sub-module transfers the information fed back by production equipment to the upper-level system and sends control commands from other sub-modules downward.

[0025] Optionally, it further includes an initialization sub-module and a device sub-library sub-module;

[0026] The initialization sub-module is used to initialize the interfaces connected to the production equipment, so that the production equipment enters the unified management mode;

[0027] The device sub-library sub-module is used to convert information with a standard format into a message format recognizable by the production equipment.

[0028] An automatic execution EAP method for integrated circuit production and manufacturing includes the following steps:

[0029] Step S1, start the system;

[0030] Step S2, initialize the interfaces connected to the production equipment when starting the program;

[0031] Step S3, start the monitoring task to monitor the messages of all sub-modules; when a message is received, start the automatic forwarding engine to monitor the information of communication between sub-modules, and forward the message to the corresponding sub-module of the destination according to the message type and destination;

[0032] Step S4, regularly execute tasks and uniformly manage scheduled tasks through the system scheduled task engine of the system scheduled task sub-module; among them, regularly executing tasks and uniformly managing scheduled tasks include synchronizing the name of the main process during the process of automatically executing relevant processes, so as to trigger the execution of the main process; automatically creating scheduled tasks according to the configuration, synchronizing the name of the sub-process, so as to trigger the execution of the sub-process;

[0033] Step S5, define the standard format of information and the monitoring interface, use the monitoring interface to monitor the messages sent by the production equipment, and automatically store the messages in a queue, and start a thread to convert the messages in the queue into the standard format;

[0034] Step S6, call the automatic forwarding engine to forward the messages with the standard format to the device data processing sub-module;

[0035] Step S7, after the device data processing sub-module processes the messages with the standard format according to the actual business requirements, convert the message processing result into the standard format, and call the automatic forwarding engine to forward the message processing result with the standard format to the main communication sub-module;

[0036] Step S8, other main systems transmit the information of the current main system to the main communication sub-module of other main systems through the standard message middleware;

[0037] Step S9: After converting the information received by the main communication sub-module of other main systems into the standard format, call the automatic forwarding engine to forward the information with the standard format to other sub-modules; Step S10: Through the process execution engine of the process processing sub-module, automatically execute the class corresponding to the main process according to the name of the configured main process, so as to trigger the main process and the sub-processes to execute according to the pre-configured settings; if the sub-process is successfully executed, automatically execute the next sub-process; if the sub-process fails to execute, enter the sub-process that fails to execute, and monitor the sub-process that fails to execute, dynamically obtaining the execution status of the sub-process;

[0038] Step S11: After the main process is triggered, find the sub-processes according to the configuration, so as to automatically execute the sub-processes; when the sub-process is successfully executed, automatically execute the next sub-process according to the configuration; when the sub-process fails to execute, automatically execute another sub-process, and automatically execute all the configured sub-processes in this way until all the sub-processes are completely executed;

[0039] Step S12: During the execution of the sub-process, when there is information that needs to be uploaded to other main systems, convert the information into the standard format, and call the automatic forwarding engine to forward the information with the standard format to the main communication sub-module of other main systems;

[0040] Step S13: Develop sub-processes according to different device models and business requirements, convert the sub-processes into the standard format, and call the automatic forwarding engine to forward the sub-processes with the standard format to the device sub-library sub-module;

[0041] Step S14: Through the device sub-library sub-module, convert the sub-processes with the standard format into a message format recognizable by the production device, and then send the sub-processes to the production device.

[0042] Compared with the prior art, the present invention has the following beneficial effects:

[0043] An integrated circuit production and manufacturing automatic execution EAP system and method provided by the present application include a system information execution sub-module, a system planned task sub-module, a device data processing sub-module, a main communication sub-module, a process processing sub-module, and a device information sending and receiving sub-module; through the specific division of labor and cooperation of the above six sub-modules, the entire EAP system realizes a high degree of functional decoupling and modular management. This design not only improves the maintainability and scalability of the system, but also enhances the stability and response speed of the system, ensuring that it can be flexibly adjusted and respond to possible problems in different production scenarios; in addition, a process engine is introduced to effectively coordinate the working order and logic of each sub-module, avoiding the situation of information islands and unclear responsibilities, not only reducing the overall complexity of the system, but also enabling the system to have stronger adaptability and expansion ability when facing changes in business requirements. Brief Description of the Drawings

[0044] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings. Among them:

[0045] Figure 1 It is a schematic structural diagram of an automatic execution EAP system for integrated circuit production and manufacturing provided by the present invention.

[0046] Figure 2 It is a schematic flowchart of an automatic execution EAP method for integrated circuit production and manufacturing provided by the present invention. Detailed implementation manners

[0047] To make the above objects, features, and advantages of the present application more obvious and understandable, the following will make a detailed description of the specific implementation manners of the present application in conjunction with the drawings. It can be understood that the specific embodiments described herein are only used to explain the present application, rather than limiting the present application. Additionally, it should be noted that for the convenience of description, only the parts related to the present application rather than all the structures are shown in the drawings. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present application.

[0048] The terms "including" and "having" and any variations thereof in the present application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to these processes, methods, products, or devices.

[0049] Referring to the embodiments mentioned herein means that the specific features, structures, or characteristics described in conjunction with the embodiments can be included in at least one embodiment of the present application. The phrase appears at various positions in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0050] Please refer to Figure 1 As shown, an automatic execution EAP system for integrated circuit production and manufacturing provided by an embodiment of the present application. The automatic execution EAP system for integrated circuit production and manufacturing includes: a system information execution sub-module, a system planned task sub-module, a device data processing sub-module, a main communication sub-module, a process processing sub-module, and a device information sending and receiving sub-module;

[0051] The system information execution sub-module is used to execute system-level tasks and instructions, receive instructions from the system scheduled task sub-module, and call the production equipment driver to perform actual operations;

[0052] The system scheduled task sub-module is used to define and schedule daily or periodic tasks of the local system, notify the tasks to be executed to the system information execution sub-module, and monitor the completion status of the tasks;

[0053] The device data processing sub-module is used to receive and process data from the production equipment driver, and transfer the processed data to the system scheduled task sub-module or the process processing sub-module;

[0054] The main communication sub-module is used to communicate with external systems, receive incoming instructions or data and transfer them to relevant sub-modules, and report the status information of the local system to external systems;

[0055] The process processing sub-module is responsible for the process management and coordination of the entire local system. According to the received information and tasks, it schedules relevant sub-modules to work together; as the center, it uniformly manages the execution order and logic of each sub-module to ensure the smooth operation of the EAP system;

[0056] The device information sending and receiving sub-module is responsible for communicating with production equipment, sending instructions to production equipment and receiving the status information and data of production equipment.

[0057] Beneficial effects of the above embodiments. The purpose of the automatic execution EAP system for integrated circuit production and manufacturing is to provide an efficient and modular EAP system platform. It utilizes decoupled design, standardized development processes, rapid business expansion, and supports integration with external systems such as MES. The core advantage of adopting decoupled design lies in simplifying the system architecture design. Developers do not need to deeply understand the overall system architecture, reducing the entry threshold. Each sub-module is independent of each other, facilitating the maintenance and upgrade of specific parts without affecting the overall system. When new functions are added or existing functions are modified, only the relevant sub-modules need to be concerned, enhancing the scalability and adaptability of the system. Through standardized development modules, the function module structure and interfaces are predefined in advance to ensure the unity and standardization of development. Business functions can be quickly realized. For example, to capture machine data and upload it to the MES system, developers only need to write 3 - 4 C# classes according to the template and configure the timer to complete the task. Specifically, it can include steps such as requirement analysis, template application, class writing, and timer configuration. Among them, requirement analysis is to clarify the data types, frequencies, and interface requirements of the target MES system to be captured; template application is to select a standard function template suitable for data capture and transmission and make necessary customization adjustments; class writing is to write C# classes according to the template to implement data capture logic and interaction with the MES system; timer configuration is to set scheduled tasks, specify the execution frequency and time to ensure data is captured and transmitted on time.

[0058] The automatic execution EAP system for integrated circuit production and manufacturing of this application utilizes multi-sub-module design to reduce complexity and achieve system decoupling. Specifically, the system is divided into multiple subsystems with clear functions. The EAP system platform realizes a high degree of modularization and decoupled design. Each sub-module is responsible for a specific function module, such as data acquisition, process execution, message transmission, etc. This design enables developers to complete tasks by only focusing on the sub-modules within their original scope of responsibilities without having to understand the complex architecture of the entire system. The development process is as simple as building blocks. Developers develop according to established standard templates and specifications, greatly reducing the learning difficulty. The EAP platform introduces a standard format for system information and uniformly defines the standard format information transmission method between each sub-model. This standard format information transfer mechanism enables developers to focus on the implementation of business logic without having to deal with complex communication protocols and data format issues. In this way, development efficiency can be significantly improved, and at the same time, the consistency and reliability of data exchange between different sub-modules are ensured.

[0059] The automatic execution EAP system for integrated circuit production and manufacturing of the present application unifies the automatic execution entry of the process through the process execution sub-module, which is the core function of the EAP system platform, providing a unified mechanism to automatically execute business processes. Its greatest advantage lies in its flexibility and configurability; developers only need to write code according to the standard template and select the general process or custom special process suitable for the actual needs; this design can not only meet the needs of different models sharing the process, but also facilitate the rapid development of special customized processes.

[0060] The automatic execution EAP system for integrated circuit production and manufacturing of the present application supports asynchronous working mode and high-concurrency task processing. To improve the performance and scalability of the system, each sub-module at the bottom layer of the EAP system platform, such as device information receiving and sending, process processing, message execution, task module, etc., all adopt asynchronous working mode; among them, the device information receiving and sending sub-module supports the powerful ability to receive 100 messages per second. The process processing sub-module and the device information receiving and sending sub-module can efficiently process a large number of multi-tasks simultaneously through the parallel processing mechanism, adopt the multi-threaded development mode, and improve the parallel processing efficiency of tasks. Through the above asynchronous working mode, the EAP system platform not only improves the throughput of the system, but also greatly reduces the developers' attention to the complexity of multi-threaded programming, enabling developers to focus more on the implementation of business logic.

[0061] The operation and maintenance of the automatic execution EAP system for integrated circuit production and manufacturing of the present application is simple, the logic is clear, and problems can be quickly located. The multi-sub-module design of the EAP system platform makes the system logic clear and hierarchical. Operation and maintenance personnel can view the running status of each process through an intuitive interface, quickly locate and solve possible problems, and can also greatly improve the maintainability and stability of the system and reduce the operation and maintenance costs.

[0062] The automatic execution EAP system for integrated circuit production and manufacturing of the present application adopts a sub-module design. Each sub-module is independent, which is convenient for individual upgrade or replacement, reducing the overall maintenance complexity; due to the standardization of the system development process and the decoupling of sub-modules, the development and deployment speed of new functions is improved, supporting enterprises to quickly respond to market changes.

[0063] In another embodiment, the system information execution sub-module executes system-level tasks and instructions including: executing starting or stopping devices, or adjusting production parameters;

[0064] The system information execution sub-module also serves as a message bus between sub-modules, used to listen to the messages sent by any sub-module and automatically forward them to other sub-modules according to the type of the sent messages.

[0065] In another embodiment, the system scheduled task sub-module defines and schedules daily or periodic tasks of the local system including: regularly checking the device status, or performing maintenance tasks;

[0066] The system scheduled task sub-module also automatically obtains the machine data at regular intervals and uploads it to the Manufacturing Execution System (MES).

[0067] In another embodiment, the device data processing sub-module processes the data from the production device drivers, including analyzing or storing the data from the production device drivers;

[0068] The device data processing sub-module is also used for processing device-specific messages.

[0069] In another embodiment, the main communication sub-module is used for communicating with external systems, including communicating with the Enterprise Resource Planning (ERP) system or the Supply Chain Management (SCM) system;

[0070] The main communication sub-module communicates with external systems using the same format and communication mode.

[0071] In another embodiment, the process processing sub-module automatically loads the corresponding main process and sub-processes according to the configuration, automatically executes the main process and sub-processes, and automatically monitors the main process and sub-processes.

[0072] In another embodiment, the device information transceiver sub-module transmits the information feedback from the production device to the upper-level system, and sends the control commands from other sub-modules downward. It is responsible for receiving the machine data and sending data to the machine, and supports multiple communication methods such as SECS, PLC, TCP, and COM.

[0073] In another embodiment, an initialization sub-module and a device sub-library sub-module are further included; the initialization sub-module is used to initialize the interfaces connected to the production devices, so that the production devices enter a unified management mode;

[0074] The device sub-library sub-module is used to convert the information with a standard format into a message format recognizable by the production device.

[0075] The beneficial effects of the above embodiments are as follows. There are a large variety of production equipment suitable for integrated circuit manufacturing. The EAP system needs to connect to all production equipment. By setting up an initialization sub-module, initialization is performed when the EAP system starts, aiming to configure the basic parameters and operating environment of the EAP system according to business requirements. Specific business requirements involve the types of production equipment to be monitored, the setting of communication protocols, the setting of data acquisition frequencies, etc. All these need to be set during the initialization phase to ensure that the EAP system can operate according to the expected functions. In addition, to enhance the stability and development convenience of the EAP system, decoupled development is implemented for the EAP system, that is, the complex system is split into independent functional components (i.e., sub-libraries), and each functional component is responsible for a specific task. This can improve the maintainability of the system. If a sub-module fails, it will not affect the operation of the entire EAP system, facilitating individual debugging and updating; enhancing the expandability, when new functions need to be added, only new sub-modules need to be added without modifying the existing code; promoting collaborative development, different developers can focus on different sub-modules, improving the team cooperation efficiency.

[0076] Through the cooperation of eight sub-modules, namely the system information execution sub-module, the system scheduled task sub-module, the device data processing sub-module, the main communication sub-module, the process processing sub-module, the device information sending and receiving sub-module, the initialization sub-module, and the device sub-library sub-module, a complete automatic execution system is formed. And unify the internal transmission format of the sub-modules, establish a standardized information transfer mechanism to ensure efficient and consistent data exchange across systems; also, the process execution can be flexibly configured, providing a unified process automatic execution mechanism, supporting the selection of general processes or custom special processes to meet different models and business requirements; and it has a design friendly to operation and maintenance, making the logic clear and hierarchical. The operation and maintenance personnel can quickly understand the system operation status and locate problems according to the logs.

[0077] Please refer to Figure 2 As shown in the figure, an automatic execution EAP method for integrated circuit manufacturing provided by an embodiment of the present application. The automatic execution EAP method for integrated circuit manufacturing includes the following steps:

[0078] Step S1, start the system;

[0079] Step S2, when starting the program, connect to the interfaces of the production equipment through initialization; since each production equipment model or equipment capacity is different, each production equipment customizes its corresponding interfaces, and each model inherits these interfaces during development. When starting the program, connect to the interfaces of the production equipment through initialization to put all production equipment into a unified management mode; among them, the production equipment interfaces can include but are not limited to the message sending interface (EventBusInston), the equipment standard interface (Eqpconnector), and the scheduled task unified interface (Scheduler.JobManage);

[0080] Step S3, start the monitoring task to monitor the messages of all sub - modules; when a message is received, start the automatic forwarding engine to monitor the information of communication between sub - modules and forward the message to the corresponding sub - module according to the message type and destination. The main functions of the automatic forwarding engine include monitoring the information of communication between sub - modules and forwarding the message to the corresponding sub - module according to the message type and destination. To reduce the communication complexity between sub - modules, a standard format for information between sub - modules can be defined, such as a C# Class named Transaction, which has elements: errorCode: the information returned by the sub - module, 0 means OK, 1 means there is an error; errorText: detailed error information; sendTopic: the destination of the information; replyToppic: the destination of the information reply; TransactionType: the type of the information, 1 means the other party must reply, 2 means the other party does not need to reply. The above format is called the "standard format". The automatic forwarding engine can implement different processing methods according to the message type and destination and send them to the relevant sub - modules to achieve convenient transmission of messages between sub - modules.

[0081] Step S4, the system schedule task engine of the system schedule task sub - module executes tasks regularly and manages schedule tasks uniformly. Among them, regularly executing tasks and uniformly managing schedule tasks include synchronously configuring the name of the main process during the process of automatically executing relevant processes to trigger the execution of the main process; automatically creating schedule tasks according to the configuration and synchronously configuring the name of the sub - process to trigger the execution of the sub - process. The system schedule task engine supports multiple timing tasks, such as supporting automatic triggering every 3 minutes, or supporting automatic triggering at the 5th minute after the hour (such as at 1:05, 2:05, 3:05, etc.). Automatic triggering means that when the preset time arrives, the relevant process is automatically executed. Therefore, when configuring the process, the name of the main process needs to be synchronously configured. When the system runs, the system can automatically execute the class corresponding to the main process using the reflection technology of C# according to the name of the main process, thus triggering the execution of the main process. For example, the following detailed configuration can be adopted <Scenario name="HeartBeatToFMB"Interval="3min"><Step name="HeartBeatToFMB" / >). The system schedule task engine will also automatically call the schedule task unified interface Scheduler.JobManage according to the above - configured first step to generate a schedule task that executes once every 3 minutes. During the execution of the schedule task, it can automatically execute the class corresponding to the main process using the reflection technology of C# according to the name of the sub - process, thus realizing the process of executing the sub - process.

[0082] Step S5: Define the standard format of information and the listening interface. Use the listening interface to listen for messages sent by production equipment and automatically store the messages in a queue. Start a thread to convert the messages in the queue into the standard format. A listening interface can be defined to listen for the communication ports of production equipment (such as SECS or PLC, etc.). When the production equipment sends information (such as binary data: 00 01 81 0D 00 00 00 01), due to the fast communication speed, the above information is automatically stored in a queue, and a thread is started to automatically decode it into the SECS standard class (i.e., the standard format S1F13 of SECS II). If it is a PLC or other system that supports a unified communication format (such as MODBUS or PROFIBUS, etc.), since there are only parameter reads and writes, the standard class of the standard PLC will be redefined. A timer is defined to be once a minute, and the PCL communication mode is used (such as MODBUS: 0103 00 00 00 01 84 0A / PROFIBUS) to obtain data from the PLC and convert it into the standard class after result parsing;

[0083] Step S6: Call the automatic forwarding engine (EventBusInston.eventBus) to forward the messages with the standard format to the device data processing sub-module;

[0084] Step S7: After the device data processing sub-module processes the messages with the standard format according to the actual business requirements, convert the message processing results into the standard format, and call the automatic forwarding engine (EventBusInston.eventBus) to forward the message processing results with the standard format to the main communication sub-module;

[0085] Step S8: Other main systems use the standard message middleware (such as Rabbitmq, Kafka, or Mqtt) to transmit the information of the current main system to the main communication sub-module of other main systems;

[0086] Step S9: After converting the information received by the main communication sub-module of other main systems into the standard format, call the automatic forwarding engine (EventBusInston.eventBus) to forward the information with the standard format to other sub-modules;

[0087] Step S10: Through the process execution engine of the process processing sub-module, according to the name of the configured main process, use the reflection technology of C# to automatically execute the class corresponding to the main process, so as to trigger the main process and the sub-processes to execute according to the pre-configured settings. If the sub-process executes successfully, the next sub-process is automatically executed. If the sub-process executes fails, enter the failed sub-process and monitor the failed sub-process to dynamically obtain the execution status of the sub-process. For example, the above configuration can be achieved through the following process:

[0088] <Scenario name="RMSCheckRecipe">

[0089] <Step name="RMSCheckRecipePPID">

[0090] <ChildStep name="RMSCheckRecipeSVID" Criteria="0" / >

[0091] <ChildStep name="RMSShowMessageToEQP_S10F3" Criteria="Failed" / >

[0092]

[0093]

[0094] The process execution engine will automatically execute the above "RMSCheckRecipe" process according to the information;

[0095] Step S11, after the main process is triggered, find the sub-process according to the configuration, so as to realize the automatic execution of the sub-process; when the sub-process is executed successfully, the next sub-process will be automatically executed according to the configuration; when the sub-process is executed failed, another sub-process will be automatically executed, and all configured sub-processes will be automatically executed in this way until all sub-processes are executed completely; for example, after the main process is triggered, find the sub-process "RMSCheckRecipePPID" according to the configuration, and the process execution engine finds the "C# class" with the same name according to the name. Use the reflection technology of the C# class to automatically execute the class, so as to realize the automatic execution of the sub-process; when the sub-process is executed successfully, the process execution engine will automatically execute the next sub-process "RMSCheckRecipeSVID" according to the configuration. If the sub-process is executed failed, the process execution engine will automatically execute another sub-process "RMSShowMessageToEQP", and so on, the process execution engine will automatically execute all configured sub-processes until all sub-processes are executed completely;

[0096] Step S12, during the execution of the subprocess, when there is information that needs to be uploaded to other master systems, convert the information into a standard format (such as a C# Class named Transaction, which contains elements: errorCode: the information returned by the sub-module, 0 indicates OK, 1 indicates an error, errorText: detailed error information, sendTopic: the destination where the information is sent, replyToppic: the destination for information reply, TransactionType: information type, 1 means the other party must reply, 2 means the other party does not need to reply), and call the automatic forwarding engine (EventBusInston.eventBus) to forward the information in the standard format to the main communication sub-module of other master systems;

[0097] Step S13, develop subprocesses according to different device models and business requirements, convert the subprocesses into a standard format (such as a C# Class named Transaction, which contains elements: errorCode: the information returned by the sub-module, 0 indicates OK, 1 indicates an error, errorText: detailed error information, sendTopic: the destination where the information is sent, replyToppic: the destination for information reply, TransactionType: information type, 1 means the other party must reply, 2 means the other party does not need to reply), and call the automatic forwarding engine to forward the subprocesses in the standard format to the device sub-library sub-module;

[0098] Step S14, convert the subprocesses in the standard format into a message format recognizable by the production device (such as SECS or PLC, etc.) through the device sub-library sub-module, and then send the subprocesses to the production device; when the production device sends information (such as binary data: 00 01 81 0D 00 00 00 01), due to the fast communication speed, the above information is automatically saved to a queue, and a thread is started to automatically decode it into a SECS standard class (i.e., the standard format S1F13 of SECS II). At this time, the system needs to reply with S1F14.

[0099] Specifically, S1F14 can be as follows:

[0100] L[2]

[0101] <B[1]COMMACK 0x0> / / Establish communications acknowledge code

[0102] L[0],

[0103] The example is in the Secs II format. According to the SEMI E37 protocol, the above human-readable format is converted into binary that can be recognized by the device: 00 00 00 11 00 01 01 0E 00 00 00 00 80 02 01 02 21 01 00 01 00;

[0104] After the conversion is completed, Socket communication will be called to send this data to the device.

[0105] Generally speaking, through the specific division of labor and cooperation of the above six sub-modules, the integrated circuit manufacturing automatic execution EAP system and method achieve a high degree of functional decoupling and modular management in the entire EAP system. This design not only improves the maintainability and scalability of the system, but also enhances the stability and response speed of the system, ensuring that it can be flexibly adjusted and cope with possible problems in different production scenarios; in addition, a process engine is introduced to effectively coordinate the working sequence and logic of each sub-module, avoiding the situation of information islands and unclear responsibilities, not only reducing the overall complexity of the system, but also enabling the system to have stronger adaptability and expansion ability when facing changes in business requirements.

[0106] The above is only a specific implementation manner of the present invention. Any improvement made on the premise of the present invention's concept is regarded as the protection scope of the present invention.

Claims

1. An integrated circuit manufacturing automatic execution EAP system, comprising: The system information execution submodule, the system planning task submodule, the equipment data processing submodule, the main communication submodule, the process processing submodule, and the equipment information receiving and sending submodule are characterized in that: The system information execution submodule is used to execute system-level tasks and instructions, receive instructions from the system planning task submodule, and call the production equipment driver to perform actual operations; The system planning task submodule is used to define and schedule daily or periodic tasks of the local system, notify the system information execution submodule of the tasks to be executed, and monitor the completion of the tasks; The equipment data processing submodule is used to receive and process data from the production equipment driver, and transmit the processed data to the system planning task submodule or the process processing submodule; The main communication submodule is used to communicate with the external system, receive external instructions or data and transmit them to the relevant submodules, and report the status information of the local system to the external system; The process processing submodule is responsible for the process management and coordination of the entire local system, and schedules related submodules to work together according to the received information and tasks; The device information transceiver submodule is responsible for communicating with the production equipment, sending instructions to the production equipment and receiving status information and data of the production equipment.

2. The integrated circuit manufacturing automatic execution EAP system as claimed in claim 1, characterized in that: The system information execution submodule executes system-level tasks and instructions including: starting or stopping equipment, or adjusting production parameters; The system information execution submodule also serves as a message bus between submodules, for monitoring messages sent by any submodule, and automatically forwarding messages to other submodules according to the type of the sent message.

3. The integrated circuit manufacturing automatic execution EAP system as claimed in claim 1, characterized in that: The system planning task submodule defines and schedules daily or periodic tasks of the local system including: regularly checking the status of equipment, or performing maintenance tasks; The system planning task submodule also automatically obtains machine data at regular intervals and uploads it to the production execution system MES.

4. The integrated circuit manufacturing automatic execution EAP system as claimed in claim 1, characterized in that: The device data processing submodule processes the data from the production device driver including: analyzing or storing the data from the production device driver; The device data processing submodule is also used for processing device specific messages.

5. The integrated circuit manufacturing automatic execution EAP system as claimed in claim 1, characterized in that: The main communication submodule is used to communicate with external systems including: communicating with an enterprise resource planning system ERP or a supply chain management system; The main communication submodule communicates with the external system using the same format and communication mode.

6. The integrated circuit manufacturing automatic execution EAP system as claimed in claim 1, characterized in that: The process processing submodule automatically loads the corresponding main process and sub-process according to the configuration, automatically executes the main process and sub-process, and automatically monitors the main process and sub-process.

7. The integrated circuit manufacturing automatic execution EAP system as claimed in claim 1, characterized in that: The equipment information transceiver submodule transmits information fed back by production equipment to the upper system, and sends control commands from other submodules downward.

8. The integrated circuit manufacturing automatic execution EAP system as claimed in claim 1, characterized in that: It also includes an initialization submodule and a device sub-library submodule; The initialization submodule is used to initialize the interface connected to the production equipment, so that the production equipment enters a unified management mode; The equipment sub-library sub-module is used to convert information in a standard format into a message format recognizable by production equipment.

9. A control method for automatically executing an EAP system based on the above integrated circuit manufacturing, characterized in that: The steps include: Step S1, start the system; Step S2, when starting the program, by initializing the interface to which the production equipment is connected; Step S3, start the monitoring task to monitor the messages of all submodules; when receiving the message, start the automatic forwarding engine to monitor the communication information between submodules, and forward the message to the submodule corresponding to the destination according to the message type and destination; Step S4, executing tasks regularly and managing planned tasks uniformly through the system planned task engine of the system planned task submodule; wherein the scheduled execution of tasks and the unified management of planned tasks include synchronously configuring the name of the main process in the process of automatically executing related processes, thereby triggering the execution of the main process; automatically creating planned tasks according to the configuration, synchronously configuring the name of the sub-process, thereby triggering the execution of the sub-process; Step S5, defining a standard format and a monitoring interface for information, using the monitoring interface to monitor messages sent by production equipment, and automatically transferring the messages to a queue, and starting a thread to convert the messages in the queue into the standard format; Step S6, calling the automatic forwarding engine to forward the message in the standard format to the device data processing submodule; Step S7, after the device data processing submodule processes the message in the standard format according to the actual business requirements, it converts the message processing result into the standard format, and calls the automatic forwarding engine to forward the message processing result in the standard format to the main communication submodule; Step S8, other main systems transmit the information of the current main system to the main communication submodules of other main systems through standard message middleware; Step S9, after converting the information received by the main communication submodule of other main systems into the standard format, the automatic forwarding engine is called to forward the information in the standard format to other submodules; Step S10, the process execution engine of the process processing submodule automatically executes the class corresponding to the main process according to the name of the configured main process, thereby triggering the main process and the subprocess to execute according to the pre-configured execution; if the subprocess is executed successfully, the next subprocess is automatically executed; if the subprocess fails to execute, the subprocess that failed to execute is entered, and the subprocess that failed to execute is monitored to dynamically obtain the execution status of the subprocess; Step S11, after the main process is triggered, the sub-process is found according to the configuration, so as to realize automatic execution of the sub-process; when the sub-process is successfully executed, the next sub-process is automatically executed according to the configuration; when the sub-process fails to execute, another sub-process is automatically executed, so as to automatically execute all configured sub-processes until all sub-processes are executed; Step S12, during the execution of the sub-process, when there is information that needs to be uploaded to other main systems, the information is converted into the standard format, and the automatic forwarding engine is called to forward the information in the standard format to the main communication submodule of the other main system; Step S13, developing sub-processes according to different equipment models and business requirements, converting the sub-processes into the standard format, and calling the automatic forwarding engine to forward the sub-processes with the standard format to the equipment sub-library sub-module; Step S14, converting the sub-process in the standard format into a message format recognizable by the production equipment through the equipment sub-library sub-module, and then sending the sub-process to the production equipment.

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