Segmented flushing method for chemical conveying pipeline

Abstract

The invention relates to a segmented flushing method for a chemical delivery pipeline, which is characterized in that a traditional chemical delivery pipeline is divided into three pipeline sections by arranging six valves to alternately flush the chemical delivery pipeline, and the three pipeline sections are respectively 1) an exhaust pipeline section (Vent pipeline section), 2) a circulating pipeline section (Circulation pipeline section) between a rubber pump I and a rubber pump II, and 3) a circulating pipeline section (Circulation pipeline section) between a rubber pump I and a rubber pump II. And 3) an outlet pipeline section (Outlet pipeline section). And the alternate flushing means that flushing fluid is used for alternately and repeatedly flushing in the three pipeline sections. Compared with a traditional chemical conveying pipeline flushing method, the method can effectively reduce and control pollution particles in the liquid chemical conveying pipeline, is short in flushing time and quick in effect taking, and is gradually and widely used at present.

Description

Technical Field

[0001] The present invention relates to the technical field of lithography processes in the integrated circuit manufacturing industry, and particularly to the flushing of the chemical delivery pipeline conveying system equipment required in the wafer manufacturing process. Background Art

[0002] During the entire process of wafer manufacturing, the wafer surface comes into contact with liquid chemicals multiple times in process flows such as spin coating, developing, and etching. Since semiconductor devices are vulnerable to contamination, and the critical dimensions of the devices are getting smaller and smaller with the improvement of lithography technology, therefore, the pollution control of the liquid chemicals contacted by the wafer becomes very important. For the pollution control of liquid chemicals, in addition to the control of the pollution particles in the chemicals themselves, the control of the pollution particles in the delivery pipeline system of the liquid chemicals in the equipment is also another important control aspect. The reasons include but are not limited to the following points: 1. Pollution particles will cause uneven distribution of liquid chemicals on the wafer, affecting subsequent process manufacturing; 2. Pollution particles will cause defects such as pits or protrusions that affect device performance; 3. Large-sized pollution particles will cause problems such as adhesion between patterns and missing patterns; 4. Pollution particles will also lead to a decrease in the yield rate of device processes, changes in device performance, and failures in device reliability, etc.

[0003] The traditional method for flushing chemical delivery pipelines is to flush the integral pipeline directly from the glue bottle to the glue nozzle. This method can reduce the pollution particles in the liquid chemical delivery pipeline to a certain extent, but there are still some problems:

[0004] 1) The glue pump cannot operate with internal circulation, which may cause the air bubbles existing in the glue pump not to be quickly discharged in a short time;

[0005] 2) There are some pipelines that are not flushed thoroughly, and the phenomenon of repeated particle detection results may occur;

[0006] 3) The pipeline flushing time is prolonged, and the consumption of flushing liquid increases.

[0007] The purpose of the present invention is to provide a method for flushing a segmented chemical delivery pipeline. This method divides the entire chemical delivery pipeline into three pipe sections: the Vent pipe section, the Circulate pipe section, and the Outlet pipe section. The three pipe sections are arranged and combined for alternating flushing, which can effectively reduce and control the pollution particles in the liquid chemical delivery pipeline, and the flushing time is short and the effect is quick. It has gradually been widely used at present. Summary of the Invention

[0008] To address the deficiencies in the prior art, the objective of the present invention is to provide a method for segmental flushing of a chemical delivery pipeline. This method divides the traditional chemical delivery pipeline into three pipe segments by setting six valves and conducts alternating flushing on the chemical delivery pipeline. The alternating flushing means that the flushing liquid takes turns and repeats flushing in the above three pipe segments. This method can effectively reduce and control the pollution particles in the liquid chemical delivery pipeline, with short flushing time and quick results.

[0009] To achieve the above objective, the present invention adopts the following technical solutions:

[0010] A method for segmental flushing of a chemical delivery pipeline, wherein the flushing method divides the chemical delivery pipeline into three pipe segments for alternating flushing.

[0011] The chemical delivery pipeline includes a chemical storage bottle, a buffer container, a second valve, a pump I, a third valve, a filter, a fourth valve, a pump II, a nozzle, a first valve, a fifth valve, and a sixth valve. The inlet of the buffer container is connected to the chemical storage bottle through a pipeline, and the outlet is connected to the inlet of the pump I through a pipeline via the second valve. The outlet of the pump I is connected to the inlet of the filter through a pipeline via the third valve; the outlet of the filter is connected to the inlet of the pump II through a pipeline via the fourth valve, and the outlet of the pump II is connected to the nozzle through a pipeline via the first valve; the outlet of the pump II is connected to the inlet of the pump I through a pipeline via the sixth valve, and the outlet of the filter is connected to the atmosphere through the fifth valve.

[0012] The three pipe segments are respectively: 1) an exhaust pipe segment (Vent pipe segment), 2) a circulation pipe segment (Circulate pipe segment) between the pump I and the pump II, and 3) an outlet pipe segment (Outlet pipe segment).

[0013] 1) The exhaust pipe segment (Vent pipe segment) is the section where the flushing liquid is discharged from the pipeline through the connecting pipeline via the chemical storage bottle, the buffer container, the second valve, the pump I, the third valve, the filter, and the fifth valve.

[0014] 2) The circulation pipe segment (Circulate pipe segment) between the pump I and the pump II is a closed pipe segment where the flushing liquid circulates among the pump I, the filter, and the pump II through the pipeline.

[0015] 3) The outlet pipe segment (Outlet pipe segment) is the section where the flushing liquid reaches the nozzle and sprays out through the connecting pipeline successively via the chemical storage bottle, the buffer container, the second valve, the pump I, the third valve, the filter, the fourth valve, the pump II, and the first valve.

[0016] The alternating flushing means that the flushing liquid takes turns and repeats flushing in the above three pipe segments.

[0017] The time taken for the flushing liquid to flush once in turn between 1) the Vent pipe section, 2) the Circulate pipe section, and 3) the Outlet pipe section is as follows: 1) for the Vent pipe section, it is 10 - 1800 s (preferably 30 - 900 s, more preferably 60 - 600 s, most preferably 300 - 600 s); 2) for the Circulate pipe section, it is 10 - 3600 s (preferably 60 - 1800 s, more preferably 300 - 900 s, most preferably 300 - 600 s); 3) for the Outlet pipe section, it is 10 - 3600 s (preferably 300 - 1800 s, more preferably 300 - 900 s, most preferably 300 - 600 s).

[0018] During the flushing process, 1) the flow rate of the flushing liquid at the discharge port of the Vent pipe section is 50 - 500 ml / min (preferably 100 - 300 ml / min); 2) the flow rate of the flushing liquid in the Circulate pipe section is 50 - 500 ml / min (preferably 100 - 300 ml / min); 3) the flow rate of the flushing liquid at the nozzle of the Outlet pipe section is 50 - 500 ml / min (preferably 100 - 300 ml / min).

[0019] The alternating flushing sequence of the flushing liquid in the three pipe sections is as follows: Flush in turn in the order of first 1) and then 2), repeating 5 - 50 times (preferably 10 - 40 times, more preferably 20 - 30 times), and / or flush in turn in the order of 1), 2), 3), repeating 1 - 100 times (preferably 10 - 50 times, more preferably 30 - 50 times), and finally flush 3) alone 1 - 50 times (preferably 10 - 50 times, more preferably 10 - 30 times).

[0020] The flushing liquid includes a first type of organic solvent, a second type of organic solvent, and a third type of organic solvent. The first type of organic solvent is selected from one or more of N - methyl - 2 - pyrrolidone, epoxyhexane, N - methylpyrrolidone, 95% (v / v) ammonium pyrrolidinedithiocarbamate solution, etc.; the second type of organic solvent is selected from one or more of acetone, 50% (v / v) sodium stearate solution, brominated hydrocarbon, bromine, etc.; the third type of organic solvent is selected from one or more of propylene glycol methyl ether acetate, propylene glycol methyl ether, and isopropyl alcohol.

[0021] The specific process of the flushing liquid flushing the pipeline is as follows:

[0022] (1) Fill the entire chemical delivery pipeline with the first type of organic solvent through 3) the outlet pipe section; the organic solvent first flushes the 3) outlet pipe section for 1 - 24 h, and then flushes the pipeline according to the alternating flushing sequence of the three pipe sections and evacuates.

[0023] (2) Fill the entire chemical delivery pipeline with the second type of organic solvent through the 3) outlet pipe section; first, flush the 3) outlet pipe section with the organic solvent for 1 - 24 hours, and then flush the pipeline in the order of alternating flushing of the three pipe sections and empty it.

[0024] (3) Fill the entire chemical delivery pipeline with the third type of organic solvent through the 3) outlet pipe section; first, flush the 3) outlet pipe section with the organic solvent for 1 - 24 hours, and then flush the pipeline in the order of alternating flushing of the three pipe sections.

[0025] (4) After flushing, conduct a pipeline cleanliness test.

[0026] Further, after the organic solvent fills the entire chemical delivery pipeline through the 3) outlet pipe section in the above steps (1), (2), and (3), the glue pumps I and II perform the Priming cycle, and the number of Priming cycles is 1 - 5 times (preferably 1 - 3 times, more preferably 2 - 3 times). The Priming cycle is a fixed formula set by the glue pump manufacturer and is used for defoaming of the glue pump and reducing the number of particles.

[0027] Further, during the flushing of the 3) outlet pipe section with the organic solvent in the above steps (1), (2), and (3), the flow rate of the organic solvent at the nozzle is 2 - 30 ml / min.

[0028] Further, before replacing each type of organic solvent, use a clean and dry inert gas (such as nitrogen, helium, argon, etc.) to dry the pipeline to avoid liquid mixing.

[0029] Further, in step (4), the pipeline cleanliness test is to spray the third type of organic solvent in step (3) onto a clean wafer like coating photoresist, and then use a particle test device to detect particles on the wafer.

[0030] The pipeline in the chemical delivery pipeline uses pipe, pipe, pipe, one - quarter pipe or one - eighth pipe, and the material of the chemical delivery pipeline can be PET, PVC, PP, PU or PFA.

[0031] Further, the above - mentioned flushing method of the chemical delivery pipeline system can be used for equipment such as spin - coaters, chemical cleaning equipment, physical cleaning equipment, and stripping equipment that require a chemical delivery pipeline system.

[0032] The advantages and beneficial effects of the present invention are:

[0033] Compared with the traditional method for flushing a chemical delivery pipeline, the segmented flushing method for a chemical delivery pipeline can achieve a full and effective flushing of each part of the pipeline, resulting in stable particle detection results that are not easily repeated. Secondly, the segmented flushing method for a chemical delivery pipeline can achieve an internal circulation between two rubber pumps, and effectively discharge the air bubbles existing in the rubber pumps within a short period of time. Thirdly, the segmented flushing method for a chemical delivery pipeline can effectively shorten the pipeline flushing duration and reduce the consumption of the flushing liquid. Brief Description of the Drawings

[0034] Figure 1 It is a schematic structural diagram of a chemical delivery pipeline provided by the present invention.

[0035] Figure 2 It is a schematic diagram of the exhaust pipe section (Vent pipe section) in the chemical delivery pipeline provided by the present invention. Figure 3 It is a schematic diagram of the circulation pipe section (Circulate pipe section) between rubber pump I and rubber pump II in the chemical delivery pipeline provided by the present invention.

[0036] Figure 4 It is a schematic diagram of the outlet pipe section (Outlet pipe section) in the chemical delivery pipeline provided by the present invention.

[0037] Among them, 1 is a chemical storage bottle, 2 is a buffer container, 3 is rubber pump I, 4 is a filter, 5 is rubber pump II, 6 is a nozzle, 7 is a second valve, 8 is a third valve, 9 is a fourth valve, 10 is a fifth valve, 11 is a sixth valve, and 12 is a first valve. Detailed Embodiment

[0038] In order to make the objectives, technical solutions, and advantages of the present invention clearer, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0039] Such as Figure 1As shown in the figure, a chemical delivery pipeline used in an embodiment of the present invention includes a chemical storage bottle, a buffer container, a second valve, a glue pump I (Entegris / LV pump is used in this patent), a third valve, a filter (Entegris / CTFG0STPE 5nm is used in this patent), a fourth valve, a glue pump II (Entegris / LV pump is used in this patent), a nozzle (a photoresist nozzle - Glory Electronic Materials / 0.8mm - M6 is used in this patent), a first valve, a fifth valve, and a sixth valve. The inlet of the buffer container is connected to the chemical storage bottle through a connecting pipeline, and the outlet is connected to the inlet of the glue pump I through a connecting pipeline via the second valve. The outlet of the glue pump I is connected to the inlet of the filter through a connecting pipeline via the third valve; the outlet of the filter is connected to the inlet of the glue pump II through a connecting pipeline via the fourth valve, and the outlet of the glue pump II is connected to the nozzle through a connecting pipeline via the first valve; the outlet of the glue pump II is connected to the inlet of the glue pump I through a connecting pipeline via the sixth valve, and the outlet of the filter is connected to the atmosphere through the fifth valve;

[0040] The connecting pipeline in the chemical delivery pipeline uses a PVC pipe with a diameter of...

[0041] A method for segmental flushing of a chemical delivery pipeline provided by the present invention divides the above chemical delivery pipeline into three pipe segments, namely: 1) an exhaust pipe segment (Vent pipe segment), 2) a circulating pipe segment (Circulate pipe segment) between the glue pump I and the glue pump II, and 3) an outlet pipe segment (Outlet pipe segment);

[0042] 1) For the exhaust pipe segment (Vent pipe segment), open the second valve, the third valve, and the fifth valve, close other valves, and the flushing liquid is discharged from the pipeline through the connecting pipeline via the chemical storage bottle, the buffer container, the second valve, the glue pump I, the third valve, the filter, and the fifth valve (as Figure 2 shown);

[0043] 2) For the circulating pipe segment (Circulate pipe segment) between the glue pump I and the glue pump II, open the third valve, the fourth valve, and the sixth valve, close other valves, and the flushing liquid circulates among the glue pump I, the filter, and the glue pump II through the pipeline in a closed pipe segment (as Figure 3 shown);

[0044] 3) For the outlet pipe segment (Outlet pipe segment), open the second valve, the third valve, the fourth valve, and the first valve, close other valves, and the flushing liquid reaches the nozzle and sprays out through the connecting pipeline in sequence via the chemical storage bottle, the buffer container, the second valve, the glue pump I, the third valve, the filter, the fourth valve, the glue pump II, and the first valve (as Figure 4 shown);

[0045] The flushing process uses the above three pipe sections to perform alternating and repeated flushing.

[0046] Example 1 and Comparative Example 1

[0047] The above-mentioned chemical delivery pipeline system is applied to the photoresist delivery pipeline system in the coating and developing equipment for pipeline segmented flushing (Example 1). Under the condition of consuming the same volume of chemicals, the pipeline particle cleanliness is compared with the traditional pipeline flushing method (Comparative Example 1). The pipeline particle cleanliness standard is: 60nm particle size, continuous spraying of 25 12-inch wafers, and an average particle number of 50ea / wafer.

[0048] The rinse liquid used is: NMP (N-methyl-2-pyrrolidone), acetone and OK7030 liquid (a mixed solution of 30% propylene glycol methyl ether acetate and 70% propylene glycol methyl ether (v / v)) to rinse the photoresist delivery pipeline.

[0049] (Example 1) Pipeline segmented flushing method, the specific process is:

[0050] First, fill the pipeline with NMP liquid using the 3) Outlet pipeline section, which requires 800 ml. Perform 3 Priming cycles with Glue Pump I and Glue Pump II. Set the flow rate at the nozzle of the 3) Outlet pipeline section to 10 ml / min. After flushing for 5 hours, then use the method of alternating flushing of three pipeline sections to flush the pipeline. The 1) Vent pipeline section is flushed for 15 s each time, and the flow rate at the discharge port is 200 ml / min. The 2) Circulate pipeline section is flushed for 30 s each time, with a flow rate of 200 ml / min. The 3) Outlet pipeline section is flushed for 30 s each time, and the flow rate at the nozzle is 200 ml / min. Flushing sequence: Repeat the flushing 16 times in the order of first the 1) Vent pipeline section, then the 2) Circulate pipeline section, and then the 3) Outlet pipeline section. Finally, the 3) Outlet pipeline section is flushed 18 times. After flushing, empty the NMP liquid in the pipeline and dry it with nitrogen. Replace with acetone liquid. It requires 800 ml to fill the pipeline using the 3) Outlet pipeline section. Set the flow rate at the nozzle of the 3) Outlet pipeline section to 5 ml / min. After flushing for 10 hours, use the same method of alternating flushing of three pipeline sections as for NMP to flush. After flushing, empty the acetone liquid in the pipeline and dry it with nitrogen. Replace with OK7030 liquid (a mixed solution of 30% propylene glycol monomethyl ether acetate and 70% propylene glycol monomethyl ether (v / v)). It requires 800 ml to fill the pipeline. Set the flow rate at the nozzle of the 3) Outlet pipeline section to 6.7 ml / min. After flushing for 5 hours, use the method of alternating flushing of three pipeline sections: The 1) Vent pipeline section is flushed for 15 s each time, and the flow rate at the discharge port is 200 ml / min. The 2) Circulate pipeline section is flushed for 30 s each time, with a flow rate of 200 ml / min. The 3) Outlet pipeline section is flushed for 30 s each time, and the flow rate at the nozzle is 200 ml / min. Flushing sequence: First, alternate flushing 19 times in the order of 1) and 2). Then, repeat the flushing 15 times in the order of first 1), then 2), and then 3). Finally, flush 20 times for 3). After flushing, spray the OK7030 liquid discharged from the pipeline onto a clean wafer.

[0051] The traditional pipeline flushing method is that the chemical flows from the chemical storage bottle through the buffer container, Glue Pump I, filter, and Glue Pump II in sequence and then sprays out from the nozzle (as Figure 4 shown).

[0052] The traditional pipeline flushing process is as follows: Fill the pipeline with NMP liquid (800 ml is required), close the nozzle and let it stand for 12 hours. Then set the flow rate at the nozzle to 10 ml / min and keep flushing for 12 hours. After that, empty the NMP liquid in the pipeline. Replace it with acetone liquid and fill the pipeline with 800 ml. Close the nozzle and let it stand for 12 hours. Then set the flow rate at the nozzle to 5 ml / min and keep flushing for 24 hours. After that, empty the acetone liquid in the pipeline. Replace it with OK7030 liquid and fill the pipeline with 800 ml. Set the flow rate at the nozzle to 10 ml / min and keep flushing for 12 hours.

[0053] Through the above two pipeline flushing processes, when using the same volume of chemicals, namely NMP - 8L, acetone - 8L, and OK7030 - 8L, to flush the pipeline, the traditional flushing method took 72 hours, while the segmented pipeline flushing method took 21 hours and 41 minutes. For the comparison of pipeline particle cleanliness, use the KLA SP3 particle detection equipment to scan and detect the number of particles on the wafer surface, and compare the wafer particle detection results. For 25 experimental wafers, the results show that for the traditional pipeline flushing method, the average number of particles for 25 wafers is 80 ea, and for the segmented pipeline flushing method, the average number of particles for 25 wafers is 50 ea.

[0054] Example 2 and Comparative Example 2

[0055] Apply the above chemical pipeline system to the photoresist pipeline system in the coating and developing equipment for segmented pipeline flushing (Example 2). Under the condition of the same pipeline particle cleanliness standard, compare the chemical consumption and flushing duration with the traditional pipeline flushing method (Comparative Example 2). The pipeline particle cleanliness standard is: for a particle size of 60 nm, continuously spray 25 wafers, and the average number of particles is 50 ea / wafer.

[0056] The flushing liquids used are: NMP (N - methyl - 2 - pyrrolidone), acetone, and OK7030 liquid (a mixed solution of 30% propylene glycol methyl ether acetate and 70% propylene glycol methyl ether in a volume - to - volume ratio (v / v)) to flush the photoresist pipeline.

[0057] (Example 2) The pipeline segmented flushing method. The segmented pipeline flushing process is the same as that in Example 1. The chemical consumption is NMP - 8L, acetone - 8L, and OK7030 - 8L, and the time taken is 21 hours and 41 minutes.

[0058] Traditional pipeline flushing method (Comparative Example 2) To meet the required pipeline cleanliness standard, the flushing time was extended and the amount of flushing liquid was increased. The specific process was as follows: The pipeline was filled with NMP liquid (800 ml was required). The nozzle was closed and left standing for 12 hours. Then, the flow rate at the nozzle was set to 10 ml / min. After flushing for 18 hours, the NMP liquid in the pipeline was emptied. Acetone liquid was replaced and the pipeline was filled with 800 ml. The nozzle was closed and left standing for 12 hours. Then, the flow rate at the nozzle was set to 5 ml / min. After flushing for 36 hours, the acetone liquid in the pipeline was emptied. OK7030 liquid was replaced and the pipeline was filled with 800 ml. The flow rate at the nozzle was set to 10 ml / min and flushing was maintained for 18 hours. The consumption of chemicals in the traditional flushing method was NMP - 11.6 L, acetone - 11.6 L, and OK7030 - 11.6 L, and it took 96 hours.

[0059] Compared with Example 2, for the traditional pipeline flushing method in Comparative Example 2 to meet the same required pipeline particle cleanliness standard, the consumption of chemicals used in the experiment and the flushing time both had to be increased accordingly.

[0060] Verified by experiments, compared with the traditional pipeline flushing method, the pipeline segmented flushing method can quickly and effectively clean the pollution particles in the pipeline in a shorter time, enabling the pipeline particle detection to meet the standard quickly in a short time. Currently, both of these two liquid chemical delivery pipeline flushing methods are appropriately applied in the inspection process of chip manufacturing equipment.

Claims

1. A method for segmental flushing of a chemical delivery pipeline, the chemical delivery pipeline comprising a chemical storage bottle, a buffer container, a second valve, a rubber pump I, a third valve, a filter, a fourth valve, a rubber pump II, a nozzle, a first valve, a fifth valve and a sixth valve. The inlet of the buffer container is connected to the chemical storage bottle through a pipeline, and the outlet is connected to the inlet of the rubber pump I through a pipeline via the second valve. The outlet of the rubber pump I is connected to the inlet of the filter through a pipeline via the third valve; the outlet of the filter is connected to the inlet of the rubber pump II through a pipeline via the fourth valve, and the outlet of the rubber pump II is connected to the nozzle through a pipeline via the first valve; the outlet of the rubber pump II is connected to the inlet of the rubber pump I through a pipeline via the sixth valve, and the outlet of the filter is connected to the atmosphere through the fifth valve. It is characterized in that the flushing method divides the chemical delivery pipeline into three pipeline segments for alternate flushing, the three pipeline segments are respectively: 1) an exhaust pipeline segment (Vent pipeline segment), 2) a circulation pipeline segment (Circulate pipeline segment) between the rubber pump I and the rubber pump II, 3) an outlet pipeline segment (Outlet pipeline segment); 1) The exhaust pipeline segment (Vent pipeline segment) is the segment where the flushing liquid is discharged from the pipeline through the connecting pipeline via the chemical storage bottle, the buffer container, the second valve, the rubber pump I, the third valve, the filter and the fifth valve. 2) The circulation pipeline segment (Circulate pipeline segment) between the rubber pump I and the rubber pump II is a closed pipeline segment where the flushing liquid circulates among the rubber pump I, the filter and the rubber pump II through the pipeline. 3) The outlet pipeline segment (Outlet pipeline segment) is the segment where the flushing liquid reaches the nozzle and sprays out through the connecting pipeline successively via the chemical storage bottle, the buffer container, the second valve, the rubber pump I, the third valve, the filter, the fourth valve, the rubber pump II and the first valve. The alternate flushing means that the flushing liquid takes turns and repeats flushing in the above three pipeline segments.

2. According to the segmental flushing method described in claim 1, it is characterized in that the time taken for the flushing liquid to take turns flushing once between 1) the Vent pipeline segment, 2) the Circulate pipeline segment, and 3) the Outlet pipeline segment is respectively: 1) the Vent pipeline segment: 10 - 1800 s (preferably 30 - 900 s, more preferably 60 - 600 s, most preferably 300 - 600 s), 2) the Circulate pipeline segment: 10 - 3600 s (preferably 60 - 1800 s, more preferably 300 - 900 s, most preferably 300 - 600 s); 3) the Outlet pipeline segment: 10 - 3600 s (preferably 300 - 1800, more preferably 300 - 900 s, most preferably 300 - 600 s). The alternating flushing sequence of the flushing liquid in the three-section pipe section is as follows: alternately flush in the order of first (1) and then (2), repeating 5 - 50 times (preferably 10 - 40 times, more preferably 20 - 30 times), and / or alternately flush in the order of (1), (2), and (3), repeating 1 - 100 times (preferably 10 - 50 times, more preferably 30 - 50 times), and finally flush (3) alone 1 - 50 times (preferably 10 - 50 times, more preferably 10 - 30 times).

3. The segmented flushing method according to claim 1 or 2, characterized in that, During the flushing process, the flow rate of the flushing liquid at the discharge port of the (1) Vent pipe section is 50 - 500 ml / min (preferably 100 - 300 ml / min), the flow rate of the flushing liquid in the (2) Circulate pipe section is 50 - 500 ml / min (preferably 100 - 300 ml / min), and the flow rate of the flushing liquid at the nozzle of the (3) Outlet pipe section is 50 - 500 ml / min (preferably 100 - 300 ml / min).

4. The segmented flushing method according to claim 1 or 2 or 3, characterized in that The flushing liquid includes a first type of organic solvent, a second type of organic solvent, and a third type of organic solvent. The first type of organic solvent is selected from one or more of N-methyl-2-pyrrolidone, cyclohexene oxide, N-methylpyrrolidone, 95% (v / v) ammonium pyrrolidinedithiocarbamate solution, etc.; The second type of organic solvent is selected from one or more of acetone, 50% (v / v) sodium stearate solution, brominated hydrocarbon, bromine, etc.; The third type of organic solvent is selected from one or more of propylene glycol methyl ether acetate, propylene glycol methyl ether, and isopropyl alcohol.

5. The segmented flushing method according to claim 1, wherein The specific process of the flushing liquid flushing the pipeline is as follows: (1) Fill the entire chemical delivery pipeline with the first type of organic solvent through the (3) outlet pipe section; the organic solvent first flushes the (3) outlet pipe section for 1 - 24 h, and then flushes the pipeline according to the alternating flushing sequence of the three-section pipe section, and evacuates; (2) Fill the entire chemical delivery pipeline with the second type of organic solvent through the (3) outlet pipe section; the organic solvent first flushes the (3) outlet pipe section for 1 - 24 h, and then flushes the pipeline according to the alternating flushing sequence of the three-section pipe section, and evacuates; (3) Fill the entire chemical delivery pipeline with the third type of organic solvent through the (3) outlet pipe section; the organic solvent first flushes the (3) outlet pipe section for 1 - 24 h, and then flushes the pipeline according to the alternating flushing sequence of the three-section pipe section; (4) After flushing is completed, conduct a pipeline cleanliness test.

6. The segmented flushing method according to claim 5, wherein After the organic solvent fills the entire chemical delivery pipeline through the (3) outlet pipe section in steps (1), (2), and (3), the rubber pump I and the rubber pump II perform a Priming cycle, and the number of Priming cycles is 1 - 5 times (preferably 1 - 3 times, more preferably 2 - 3 times); During the 1 - 24h flushing of the 3) outlet pipe section by the organic solvent in steps (1), (2) and (3), the flow rate of the organic solvent at the nozzle is 1 - 30 ml / min (preferably 4 - 15 ml / min).

7. The segmented flushing method according to claim 5, wherein, Before replacing each type of organic solvent, use a clean and dry inert gas (such as nitrogen, helium, argon, etc.) to dry the pipeline to avoid liquid mixing.

8. The segmented flushing method according to claim 5, wherein In step (4), the pipeline cleanliness test is to spray the third type of organic solvent in step (3) on a clean wafer like coating photoresist, and then use a particle test device to detect particles on the wafer.

9. The flushing method according to claim 1, characterized in that, The pipeline in the chemical delivery pipeline is one of φ4 pipe, φ6 pipe, φ8 pipe, quarter pipe or eighth pipe, and the material of the chemical delivery pipeline can be PET, PVC, PP, PU or PFA.

10. The segmented flushing method according to claim 1, characterized in that This flushing method can be used for equipment such as spin coater / developer, chemical cleaning equipment, physical cleaning equipment, and de-gluing equipment that require a chemical delivery pipeline delivery system.

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