Optical subsystem

Abstract

The invention provides an optical subsystem. The optical subsystem comprises a light-emitting assembly, and the light-emitting assembly comprises a lamp tube, a microwave cavity and a magnetron; the microwave cavity conducts microwaves emitted by the magnetron to the position where the lamp tube is located to generate resonance; the middle portion of the lamp tube is in a cake shape or a ball shape, and the center of the middle portion is aligned with the center of the wafer.

Description

Technical Field

[0001] The present invention relates to an optical system, and particularly to a customizable optical subsystem. Background Art

[0002] An optical subsystem generally includes a light-emitting component and a reflector part. An important component in the light-emitting component is a UV lamp. In the process using a UV lamp, optical uniformity is a decisive factor affecting the process result. However, some customers have special requirements for the process result, such as a low center film thickness value, a high film thickness value for a certain circle, a thick film at a certain position, a thin film at certain positions, and so on. Therefore, customizing the optical subsystem according to the needs of different customers is a topic of concern in the industry currently.

[0003] In addition, in the prior art, the principle of a UV lamp is to excite mercury molecules in a mercury lamp to emit light through magnetron microwaves. Generally, the UV lamp tube is a strip-shaped lamp tube. The UV lamp tube needs to rotate to generate a concentric circular light distribution. For example, a lamp head has two 6KW lamp tubes that perform a 270-degree reciprocating motion, and the light reaching the wafer surface in this structure is in a concentric circular distribution. However, the above structure is prone to the problem of asymmetry in the single-chamber process result. Summary of the Invention

[0004] To solve the defects in the prior art, the present invention provides an optical subsystem.

[0005] The optical subsystem includes a light-emitting component, and the light-emitting component includes a lamp tube, a microwave cavity, and a magnetron. The microwave cavity conducts the microwave emitted by the magnetron to the position where the lamp tube is located to resonate. The middle part of the lamp tube is in a cake shape or a spherical shape, and the center of the middle part is aligned with the center of the wafer. This structure of the optical subsystem realizes the process effect by directly irradiating the wafer surface with the lamp tube, rather than compensating for the inconsistent light intensity by the cooperation of the rotation of the lamp box and the reflector.

[0006] The advantages of the optical subsystem of the present invention are as follows:

[0007] First, reduce the optical system components. The optical subsystem of the present invention cancels the design of the reflector, reduces the number of optical components, and fundamentally reduces the occurrence probability of inconsistent process results.

[0008] Second, cancel the rotation of the lamp box and cancel the dynamic seal of the lamp box assembly. By changing the design of the lamp tube shape, the output light source is made into parallel light, rather than performing optical compensation by rotating the lamp box. This structure can cancel the dynamic seal design, fundamentally control the oxygen content in the system, reduce the amount of ozone formed after ultraviolet rays irradiate oxygen, and thus reduce the absorption of ultraviolet light intensity by ozone and improve the optical utilization rate.

[0009] In one embodiment, the position of the lamp tube is fixed and does not rotate.

[0010] In one embodiment, the lamp tube directly generates light intensity with a concentric circle distribution onto the wafer.

[0011] In one embodiment, when the middle part of the lamp tube is spherical, the maximum cross-sectional area of the middle part is the same as the size of the wafer.

[0012] In one embodiment, when the middle part of the lamp tube is disc-shaped, the disc-shaped surface is in the direction facing the wafer, and the size of the disc-shaped surface is the same as the size of the wafer.

[0013] In one embodiment, the optical subsystem further includes a light propagation device that propagates the light source emitted by the light-emitting component onto the wafer.

[0014] In one embodiment, the light propagation device includes an ultraviolet light-transmitting window.

[0015] In one embodiment, the optical subsystem further includes a power controller that provides power to the light-emitting component, and displays and adjusts the light intensity in real time.

[0016] The lamp tube of the present invention is disc-shaped or spherical, so that the lamp tube can directly generate light intensity with a concentric circle distribution without rotation. Compared with the strip-shaped lamp tube in the prior art, the lamp tube of the present invention does not require a rotation mechanism, which simplifies the structure of the optical subsystem and can fundamentally solve the problem of asymmetry in the single-chamber process result. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above-described invention content of the present invention and the following specific embodiments will be better understood when read in conjunction with the accompanying drawings. It should be noted that the drawings are only examples of the claimed invention. In the drawings, the same reference numerals represent the same or similar elements.

[0018] Figure 1 A partial schematic diagram showing the optical subsystem;

[0019] Figure 2 Showing the shape of the lamp tube in the prior art;

[0020] Figure 3 Showing the shape of the lamp tube according to an embodiment of the present invention;

[0021] Figure 4 Showing the shape of the lamp tube according to another embodiment of the present invention.

[0022] Figure 5 Showing a schematic diagram of the light-transmitting window according to an embodiment of the present invention.

[0023] DESCRIPTION OF THE REFERENCE NUMERALS

[0024] 101 lamp tube

[0025] 102 microwave cavity

[0026] 103 magnetron

[0027] 106 light-transmitting window

[0028] 107 wafer

[0029] 501 upper layer

[0030] 502 lower layer Detailed implementation manners

[0031] The detailed features and advantages of the present invention will be described in detail in the following detailed implementation manners. The content is sufficient for any person skilled in the art to understand the technical content of the present invention and implement it accordingly. And according to the specification, claims and drawings disclosed in this specification, those skilled in the art can easily understand the related purposes and advantages of the present invention. Although the description of the present invention will be introduced in combination with preferred embodiments, this does not mean that the features of this invention are limited to this implementation manner. On the contrary, the purpose of introducing the invention in combination with the implementation manner is to cover other alternatives or modifications that may be extended based on the claims of the present invention. In order to provide a deep understanding of the present invention, many specific details will be included in the following description. The present invention can also be implemented without using these details. In addition, in order to avoid confusing or obscuring the key points of the present invention, some specific details will be omitted in the description.

[0032] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0033] In addition, the "upper", "lower", "left", "right", "top", "bottom", "horizontal", and "vertical" used in the following description should be understood as the orientations shown in this section and the related drawings. This relative term is only for convenience of description and does not represent that the device described needs to be manufactured or operated in a specific orientation. Therefore, it should not be construed as a limitation to the present invention.

[0034] It is understood that although terms such as "first", "second", "third", etc. may be used herein to describe various components, channels, components, regions, layers, and / or parts, these components, channels, components, regions, layers, and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, channels, components, regions, layers, and / or parts. In addition, the terms "first", "second", "third" are only used for descriptive purposes and should not be construed as indicating or implying relative importance.

[0035] As shown in this application and the claims, unless the context clearly indicates an exception, words such as "a", "an", "one", and / or "the" are not specifically singular and may also include the plural. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list, and the method or device may also include other steps or elements.

[0036] In some embodiments, numbers describing the composition and property quantities are used. It should be understood that such numbers used in the description of the embodiments are modified by the modifiers "about", "approximate", or "substantially" in some examples. Unless otherwise specified, "about", "approximate", or "substantially" indicate that the said numbers allow a variation of ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, and these approximate values can change according to the characteristics required by individual embodiments. In some embodiments, the numerical parameters should consider the specified significant digits and adopt the method of retaining the general number of digits. Although the numerical ranges and parameters used in some embodiments of this application to confirm the breadth of their scope are approximate values, in specific embodiments, such numerical settings are as precise as possible within the feasible range.

[0037] At the same time, this application uses specific words to describe the embodiments of this application. Such as "one embodiment", "an embodiment", and / or "some embodiments" mean a certain feature, structure, or characteristic related to at least one embodiment of this application. Therefore, it should be emphasized and noted that the "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more at different positions in this specification does not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of this application can be appropriately combined.

[0038] In the prior art, the principle of the UV lamp is to excite the mercury molecules in the mercury lamp to emit light through the magnetron microwave. Usually, the UV lamp tube is a strip-shaped lamp tube. The strip-shaped lamp tube generates parallel light. The UV lamp tube needs to be rotated to generate a concentric light distribution. For example, a lamp head has two 6KW lamp tubes that perform a 270-degree reciprocating motion, and the light reaching the wafer surface in this structure is distributed in concentric circles. However, the above structure is prone to the problem of asymmetry in the single-chamber process results.

[0039] The present invention adopts customized lamp tubes for different processes to fundamentally solve the problem of asymmetric results in the single-chamber process.

[0040] Figure 1 A partial schematic diagram of the optical subsystem is shown. The optical subsystem generally includes a power controller (not shown), a light-emitting component, and a light propagation device.

[0041] The power controller provides power for the light-emitting component (the optical probe is also powered by the power controller), displays and monitors in real time the light intensity value obtained by the light detection board, and when the light intensity value is lower than the preset value, it self-feedback adjusts the output power of the power supply to adjust the light intensity of the light-emitting component.

[0042] The light-emitting component includes, but is not limited to, a lamp tube 101, a microwave cavity 102, and a magnetron 103.

[0043] The lamp tube 101 is used to provide a light source.

[0044] The light source includes visible light, infrared light, and / or ultraviolet light, etc.

[0045] In one embodiment, the lamp tube 101 emits ultraviolet light.

[0046] The microwave cavity 102 is a sheet metal structure that can conduct microwaves, and conducts the microwaves emitted by the magnetron 103 to the position where the lamp tube 101 is located to resonate.

[0047] The light propagation device includes an ultraviolet light-transmitting window 106.

[0048] The light-transmitting window 106 (ultraviolet light-transmitting window) is an optical component made of a special material. With its high transmittance for a specific ultraviolet wavelength band, good physical and chemical stability, and optical uniformity, it ensures that the UV lamp stably and accurately provides ultraviolet light to the wafer 107 in processes such as lithography, which is crucial for the pattern transfer accuracy and product quality of chip manufacturing.

[0049] Figure 2 The shape of the lamp tube in the prior art is shown. Figure 2 For Figure 1 The side view of the lamp tube 101.

[0050] From Figure 2 it can be seen that the appearance of the lamp tube 101 is long and strip-shaped. Since the long and strip-shaped lamp tube generates parallel light, the lamp tube 101 needs to be rotated to generate a concentric circular light distribution.

[0051] Figure 3 The shape of the lamp tube according to an embodiment of the present invention is shown. Figure 3 The shown view of the lamp tube is Figure 1 The top view of the lamp tube 101 in

[0052] As shown Figure 3 in the figure, the middle part of the lamp tube 101 is spherical.

[0053] The lamp tube 101 is fixed without rotation, and the ultraviolet light generated by the lamp tube 101 directly irradiates the wafer, and the light intensity is distributed in concentric circles.

[0054] In one embodiment, the maximum cross-sectional area of the spherical shape is the same as the size of the wafer and they are concentric.

[0055] Figure 4 Shows the shape of the lamp tube according to another embodiment of the present invention. Figure 4 The shown lamp tube view is Figure 1 the top view of the lamp tube 101 in

[0056] As shown Figure 4 in the figure, the middle part of the lamp tube 101 is in a cake shape. The cake-shaped surface is in the direction facing the wafer.

[0057] The lamp tube 101 is fixed without rotation, and the ultraviolet light generated by the lamp tube 101 directly irradiates the wafer, and the light intensity is distributed in concentric circles.

[0058] In one embodiment, the size of the cake-shaped surface is the same as the size of the wafer and they are concentric.

[0059] The lamp tube of the present invention is in a cake shape or a spherical shape, so that the lamp tube can directly generate light intensity distributed in concentric circles without rotation. Compared with the strip-shaped lamp tube of the prior art, the lamp tube of the present invention does not require a rotation mechanism, which simplifies the structure of the optical subsystem and can fundamentally solve the problem of asymmetry in the single-chamber process result.

[0060] Figure 5 Shows a schematic diagram of a light-transmitting window according to an embodiment of the present invention.

[0061] As shown Figure 5 in the figure, the light-transmitting window of the present invention includes two layers: an upper layer 501 and a lower layer 502. The upper layer includes a plurality of circles with increasing radii. The plurality of circles are a detachable concentric circle structure. The plurality of circles are combined to form a complete circle. The lower layer is a single circular light-transmitting window. The upper layer and the lower layer completely overlap.

[0062] In one embodiment, the light-transmitting window of the present invention can be an ultraviolet light-transmitting window.

[0063] It should be noted that each circle of the upper layer can be replaced separately.

[0064] The reason for this design is that in the UV process, the light intensity distribution is concentric circular. Such an optical distribution will cause the light intensity received by the ultraviolet light-transmitting window at some positions to be strong, and the light intensity received by the light at some positions to be weak. Long-term strong ultraviolet irradiation will cause the light transmittance of the ultraviolet light-transmitting window to decay, and the decay degree caused by different light intensities is also different. Therefore, after a long time, the entire ultraviolet light-transmitting window needs to be replaced; while in the present invention, since a detachable multi-layer structure is adopted, only the layer where the loss occurs needs to be replaced.

[0065] Furthermore, in addition to transmitting light, the outer light-transmitting window also has the function of ensuring the sealing of the cavity, and it is easily damaged during use. Since the light-transmitting window of the present invention adopts a detachable multi-layer structure, only the outermost layer of the upper layer or the lower layer needs to be replaced, and there is no need to replace the entire light-transmitting window.

[0066] Furthermore, in order to ensure the function of sealing the cavity of the light-transmitting window, the lower layer is designed as a single circular light-transmitting window and is not suitable for being designed as a multi-layer structure similar to the upper layer.

[0067] Further, in order to reduce the problem that the light-transmitting window is easily damaged, the lower layer can adopt high-strength materials.

[0068] In one embodiment, the material of the lower layer is high-transmittance ultraviolet sapphire.

[0069] Due to the customized requirements of customers or according to the process results, each light-transmitting window of each layer can be independently designed. For example, materials with different light transmittances can be used for each layer to adjust the process results. Another example is that an antireflection film can be added to the layer corresponding to the position where the light intensity is weak. Another example is that each layer adopts a customized shape design to adjust the process results.

[0070] The terms and expressions used above are only for description, and the present invention should not be limited to these terms and expressions. Using these terms and expressions does not mean excluding any equivalent features of the illustration and description (or parts thereof), and it should be recognized that various modifications that may exist should also be included within the scope of the claims. Other modifications, changes and substitutions may also exist. Correspondingly, the claims should be regarded as covering all these equivalents.

[0071] Similarly, it should be noted that in order to simplify the description of the present application disclosure and thus help the understanding of one or more embodiments of the invention, in the foregoing description of the embodiments of the present application, sometimes multiple features are merged into one embodiment, drawing or the description thereof. However, this disclosure method does not mean that the features required by the object of the present application are more than those mentioned in the claims.

[0072] Similarly, it should be noted that although the present invention has been described with reference to the current specific embodiments, those of ordinary skill in the art should recognize that the above embodiments are only used to illustrate the present invention, and various equivalent changes or substitutions can be made without departing from the spirit of the present invention. Therefore, as long as the changes and modifications to the above embodiments are within the scope of the spirit of the present invention, they will fall within the scope of the claims of this application.

Claims

1. An optical subsystem, characterized in that: The optical subsystem comprises: A light-emitting component, the light-emitting component comprising a lamp tube, a microwave cavity and a magnetron; The microwave cavity conducts the microwaves emitted by the magnetron to the location of the lamp tube to cause resonance; The middle part of the lamp tube is in a pancake shape or a spherical shape, and the center of the middle part is aligned with the center of the wafer.

2. The optical subsystem according to claim 1, wherein: The position of the lamp tube is fixed and does not rotate.

3. The optical subsystem according to claim 2, characterized in that The lamp tube directly generates light intensity distributed in concentric circles to the wafer.

4. The optical subsystem according to claim 1, wherein: When the middle portion of the lamp tube is spherical, the maximum cross-sectional area of ​​the middle portion is consistent with the size of the wafer.

5. The optical subsystem according to claim 1, wherein: When the middle portion of the lamp tube is in a pancake shape, the pancake surface is aligned with the direction of the wafer, and the size of the pancake surface is consistent with the size of the wafer.

6. The optical subsystem of claim 1, wherein: The optical subsystem also includes a light propagation device for propagating the light source emitted by the light emitting component onto the wafer.

7. The optical subsystem of claim 6, wherein: The light propagation device comprises an ultraviolet light-transmitting window.

8. The optical subsystem of claim 1, wherein: The optical subsystem also includes a power controller for providing power to the light-emitting component and for displaying and adjusting light intensity in real time.

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