Radio frequency power supply impedance matching method, device, equipment and medium

Abstract

The invention relates to the technical field of radio-frequency power supplies, and discloses a radio-frequency power supply impedance matching method, which comprises the following steps that: impedance parameters of front-end equipment in a radio-frequency circuit are measured through a directional coupler, a system comprises the directional coupler, capacitor equipment, an MCU (Microprogrammed Control Unit) processor and a load, a series circuit and a parallel circuit are constructed by using the capacitor equipment, and the circuits are controlled by using the MCU processor; the method comprises the following steps: forming a series control circuit and a parallel control circuit, classifying other equipment between the series / parallel control circuit and a load in the circuit as comprehensive equipment, calculating the impedance of the equipment, calculating the impedance of the series control circuit and the impedance of the parallel control circuit, and calculating the total impedance of the circuit according to the impedance of the load, the impedance of the series control circuit and the impedance of the parallel control circuit. Impedance matching is carried out by adjusting capacitance values of the series capacitor and the parallel capacitor. The invention further provides a radio frequency power supply impedance matching device and equipment and a storage medium. The impedance matching speed can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of radio frequency power supplies, and particularly to a radio frequency power supply impedance matching method, device, equipment and medium. Background Art

[0002] When a radio frequency power supply is in use, it usually needs to be used together with a matcher. The role of the matcher is to adjust the system impedance matching, reduce the transmission power loss, so that the load can obtain the maximum power.

[0003] In actual use, since the environment of the load is constantly changing, it is necessary for the matcher to make quick and correct adjustments so that the system is always in the state of impedance matching. And in the existing matcher, due to the too slow matching speed, the system will be in the state of impedance mismatch for a long time, which has a great impact on the process.

[0004] The above defects are worthy of improvement. Summary of the Invention

[0005] The present invention provides a radio frequency power supply impedance matching method, device, equipment and medium, and its main purpose is to improve the speed of impedance matching.

[0006] To achieve the above object, a radio frequency power supply impedance matching method provided by the present invention includes:

[0007] Based on a preset parameter measurement instruction, use a directional coupler to measure the impedance parameters of the front-end device in the radio frequency circuit to obtain the front-end impedance parameters, where the radio frequency power supply system includes a directional coupler, a capacitive device, an MCU processor, and a load;

[0008] Use the capacitive device to construct a series circuit and a parallel circuit, and use the MCU processor to control the series circuit and the parallel circuit to construct a series control circuit and a parallel control circuit;

[0009] Query the remaining devices between the series control circuit and the parallel control circuit and the load, use the remaining devices as comprehensive devices, and calculate the device impedance of the comprehensive devices to obtain the comprehensive device impedance;

[0010] Calculate the impedance of the series control circuit and the parallel control circuit to obtain the series control circuit impedance and the parallel circuit control impedance;

[0011] Calculate the total circuit impedance of the radio frequency circuit according to the load impedance, the series control circuit impedance and the parallel control circuit impedance, and perform impedance matching by adjusting the capacitance values of the series circuit and the parallel circuit.

[0012] Optionally, based on a preset parameter measurement instruction, the impedance parameter of the front-end device in the RF circuit is measured by using a directional coupler to obtain the front-end impedance parameter, including:

[0013] Calibrate a preset vector analyzer to obtain a calibrated measurement device;

[0014] Based on the parameter measurement instruction, set the frequency range and power level of the calibrated measurement device to obtain a standard measurement device;

[0015] Use the standard measurement device to measure the impedance parameter of the front-end device to obtain a measurement signal, and during the measurement process, couple the measurement signal through the coupler to obtain a coupled measurement signal;

[0016] Use the software tool provided by the standard measurement device to analyze the coupled measurement signal and extract the impedance parameter to obtain the front-end impedance parameter.

[0017] Optionally, the using the capacitance device to construct a series circuit and a parallel circuit includes:

[0018] Select a capacitance device based on a preset circuit design requirement to obtain a screened capacitance device;

[0019] Connect the screened capacitance devices in series and calculate the equivalent capacitance according to the calculation formula of series capacitance to obtain the series circuit capacitance;

[0020] Obtain the voltage of the series circuit to get the series circuit voltage, and verify whether the performance of the series circuit meets the preset performance requirement according to the series circuit voltage and the series circuit capacitance. When it meets the requirement, obtain the series circuit;

[0021] Connect the screened capacitance devices in parallel and calculate the equivalent capacitance according to the calculation formula of parallel capacitance to obtain the parallel circuit capacitance;

[0022] Obtain the voltage of the parallel circuit to get the parallel circuit voltage, and verify whether the performance of the parallel circuit meets the preset performance requirement according to the parallel circuit voltage and the parallel circuit capacitance. When it meets the requirement, obtain the parallel circuit.

[0023] Optionally, the using the MCU processor to control the series circuit and the parallel circuit includes:

[0024] According to a preset circuit design requirement, set the control parameters of the MCU processor to obtain an adjusted MCU processor, where the control parameters include a sampling frequency and a control algorithm;

[0025] The MCU processor monitors the impedance changes of the series circuit and the parallel circuit in real time, and adjusts the capacitance values of the capacitive devices in the series circuit and the parallel circuit according to a preset control algorithm to perform impedance matching and obtain monitored impedance data.

[0026] Feed the monitored impedance data back to the MCU processor, and the MCU processor adjusts and optimizes according to the monitored impedance data to ensure that the circuit is always in the best matching state, and controls the series circuit and the parallel circuit.

[0027] Optionally, calculating the device impedance of the comprehensive device to obtain the comprehensive device impedance includes:

[0028] Obtain all the components included in the comprehensive device and the connection manner of the components to obtain device components and component connection manners, where the device components include resistors, inductors, and capacitors.

[0029] Collect the parameters of the device components to obtain component parameters, where the component parameters include resistance values, inductance values, and capacitance values.

[0030] Calculate the device impedance of the comprehensive device according to the component connection manner and component parameters to obtain the initial comprehensive device impedance.

[0031] Verify the initial comprehensive device impedance by measuring the input impedance of the actual circuit where the comprehensive device is located and comparing the input impedance with the initial comprehensive device impedance. When the verification passes, obtain the comprehensive device impedance.

[0032] Optionally, the impedance matching by adjusting the capacitance values of the series circuit and the parallel circuit includes:

[0033] Determine the target impedance to be matched according to the design requirements of the radio frequency circuit where the series circuit and the parallel circuit are located.

[0034] For the capacitor in the series circuit, change the capacitance value to adjust the total capacitance of the circuit, thereby changing the impedance and performing series impedance matching.

[0035] For the capacitor in the parallel circuit, change the capacitance value to adjust the admittance of the parallel branch, thereby changing the impedance and performing parallel impedance matching.

[0036] Measure the impedance of the adjusted circuit by an impedance analyzer or a network analyzer to verify the series impedance matching and the parallel impedance matching.

[0037] Optionally, calculating the total circuit impedance of the radio frequency circuit according to the load impedance, the series control circuit impedance, and the parallel control circuit impedance includes:

[0038] Obtain the values of the load impedance, the series control circuit impedance, and the parallel control circuit impedance to obtain the load impedance value, the series control circuit impedance value, and the parallel control circuit impedance value;

[0039] Query that there is a specific connection relationship between the series control circuit and the parallel control circuit and the load, and calculate the combined impedance of the series control circuit and the parallel control circuit and the load according to the connection method to obtain the series combined impedance and the parallel combined impedance, where the connection relationship includes series and parallel;

[0040] Comprehensively calculate the series combined impedance and the parallel combined impedance according to the actual connection method of the circuit to obtain the total circuit impedance of the radio frequency circuit.

[0041] To solve the above problems, the present invention also provides a radio frequency power impedance matching device, and the device includes:

[0042] A data measurement module, configured to measure the impedance parameters of the front-end device in the radio frequency circuit by using a directional coupler based on a preset parameter measurement instruction to obtain the front-end impedance parameters, where the radio frequency power supply system includes a directional coupler, a capacitive device, an MCU processor, and a load;

[0043] A circuit construction module, configured to construct a series circuit and a parallel circuit by using the capacitive device, and control the series circuit and the parallel circuit by using the MCU processor to construct a series control circuit and a parallel control circuit;

[0044] An impedance calculation module, configured to query the other devices between the series control circuit and the parallel control circuit and the load, regard the other devices as a comprehensive device, and calculate the device impedance of the comprehensive device to obtain the comprehensive device impedance;

[0045] Calculate the impedance of the series control circuit and the parallel control circuit to obtain the series control circuit impedance and the parallel circuit control impedance;

[0046] An impedance matching module, configured to calculate the total circuit impedance of the radio frequency circuit according to the load impedance, the series control circuit impedance, and the parallel control circuit impedance, and perform impedance matching by adjusting the capacitance values of the series circuit and the parallel circuit.

[0047] To solve the above problems, the present invention also provides an electronic device, and the electronic device includes:

[0048] At least one processor; and,

[0049] A memory communicatively connected to the at least one processor; wherein,

[0050] The memory stores a computer program executable by the at least one processor. When executed by the at least one processor, the computer program enables the at least one processor to execute the radio frequency power impedance matching method as described above.

[0051] To solve the above problems, the present invention also provides a computer-readable storage medium, including a storage data area and a storage program area. The storage data area stores created data, and the storage program area stores a computer program. When the computer program is executed by a processor, the radio frequency power impedance matching method as described above is implemented.

[0052] In an embodiment of the present invention, impedance parameters of a front-end device in a radio frequency circuit are measured by a directional coupler. The system includes a directional coupler, a capacitive device, an MCU processor, and a load. A series circuit and a parallel circuit are constructed using the capacitive device, and the MCU processor is used to control the circuit to form a series control circuit and a parallel control circuit. The remaining devices between the series / parallel control circuit in the circuit and the load are classified as a comprehensive device, and its device impedance is calculated. The impedances of the series control circuit and the parallel control circuit are calculated. According to the load impedance, the series control circuit impedance, and the parallel control circuit impedance, the total impedance of the circuit is calculated, and impedance matching is performed by adjusting the capacitance values of the series capacitor and the parallel capacitor. Therefore, the radio frequency power impedance matching method, device, electronic device, and computer-readable storage medium proposed by the present invention can improve the speed of impedance matching. BRIEF DESCRIPTION OF THE DRAWINGS

[0053] Figure 1 It is a schematic flowchart of a radio frequency power impedance matching method provided by an embodiment of the present invention;

[0054] Figure 2 It is a schematic module diagram of a radio frequency power impedance matching device provided by an embodiment of the present invention;

[0055] Figure 3 It is a schematic internal structure diagram of an electronic device for implementing the radio frequency power impedance matching method provided by an embodiment of the present invention.

[0056] The realization, functional characteristics, and advantages of the objectives of the present invention will be further described with reference to the embodiments and the accompanying drawings. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0057] It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0058] An embodiment of the present application provides a method for impedance matching of a radio frequency power supply. The execution subject of the radio frequency power supply impedance matching method includes, but is not limited to, at least one of electronic devices such as a server, a terminal, etc. that can be configured to execute the method provided by the embodiment of the present application. Among them, the server can be an independent server or a cloud server that provides basic cloud computing services such as cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communications, middleware services, domain name services, security services, Content Delivery Network (CDN), and big data and artificial intelligence platforms. In other words, the radio frequency power supply impedance matching method can be executed by software or hardware installed on a remote device or a server device, and the software can be a blockchain platform. The server includes, but is not limited to: a single server, a server cluster, a cloud server, or a cloud server cluster, etc.

[0059] Referring to Figure 1 As shown, it is a schematic flowchart of a method for impedance matching of a radio frequency power supply provided by an embodiment of the present invention. In this embodiment, the radio frequency power supply impedance matching method includes the following steps S1 - S6:

[0060] S1. Based on a preset parameter measurement instruction, use a directional coupler to measure the impedance parameters of the front - end device in the radio frequency circuit to obtain the front - end impedance parameters. Among them, the radio frequency power supply system includes a directional coupler, a capacitive device, an MCU processor, and a load.

[0061] Based on a preset parameter measurement instruction, use a directional coupler to measure the impedance parameters of the output end of the radio frequency power supply in the radio frequency circuit to obtain the front - end impedance parameters. Among them, the radio frequency power supply system includes a directional coupler, a capacitive device, an MCU processor, and a load.

[0062] It can be understood that according to the set measurement instruction, using a directional coupler to detect the impedance parameters of the front - end device of the radio frequency circuit and obtain the front - end impedance parameters ensures that the radio frequency circuit can make precise adjustments according to the actual impedance situation, which helps to realize the efficient and stable operation of the entire radio frequency system.

[0063] In the embodiment of the present invention, the parameter measurement instruction refers to a command or program preset in the radio frequency circuit system to obtain the impedance parameters of the front - end device. It is usually generated by the control unit inside the system and triggers measurement devices such as a directional coupler to perform impedance detection. The parameter measurement instruction defines the measured parameters (such as frequency range, measurement accuracy, etc.) and steps, ensuring that the system can accurately obtain the impedance characteristics of the front - end device and provide data support for subsequent impedance matching.

[0064] Further, based on a preset parameter measurement instruction, the impedance parameter of the front-end device in the RF circuit is measured by using a directional coupler to obtain the front-end impedance parameter, including:

[0065] Calibrate a preset vector analyzer to obtain a calibrated measurement device;

[0066] Based on the parameter measurement instruction, set the frequency range and power level of the calibrated measurement device to obtain a standard measurement device;

[0067] Use the standard measurement device to measure the impedance parameter of the front-end device to obtain a measurement signal, and during the measurement process, couple the measurement signal through the coupler to obtain a coupled measurement signal;

[0068] Use the software tool provided by the standard measurement device to analyze the coupled measurement signal and extract the impedance parameter to obtain the front-end impedance parameter.

[0069] In the embodiment of the present invention, the measurement signal is coupled through the coupler to obtain a coupled measurement signal for calculating the impedance parameter of the front-end device

[0070] Further, start the measurement device to measure the impedance parameter. During the measurement process, couple a part of the signal through the coupler for calculating the impedance parameter of the front-end device. This step is a key link for obtaining impedance data, and it is necessary to ensure the stability of the measurement environment and the normal operation of the measurement device.

[0071] Further, use the software tool provided by the measurement device to analyze the obtained data to obtain the impedance parameter of the front-end device. In the analysis process, tools such as Smith chart can be used to visually represent and process the impedance data.

[0072] Among them, using tools such as Smith to visually process the data can help engineers better understand and optimize the performance of the RF circuit.

[0073] Further, the front-end device refers to the "upstream" circuit connected to the coupler, that is, the part between the RF power output terminal and the directional coupler, which is composed of transmission lines, fixed elements, protection devices, etc. The fixed elements include resistors, inductors, capacitors, etc., and the protection devices include lightning arresters, limiters, etc.

[0074] S2. Use the capacitive device to construct a series circuit and a parallel circuit, and use the MCU processor to control the series circuit and the parallel circuit to construct a series control circuit and a parallel control circuit.

[0075] In the embodiment of the present invention, the MCU processor refers to a Microcontroller Unit, which is an integrated digital control circuit that includes components such as a processor, a memory, and input / output interfaces. It can receive and process sensor signals, execute preset control algorithms, and output control instructions to adjust the parameters of external devices (such as capacitors) to achieve precise matching and control of the impedance of the radio frequency circuit.

[0076] Further, the capacitor device is used for passive storage and release of charges, and specifically includes filter capacitors, coupling capacitors, bypass capacitors, tuning capacitors, etc.

[0077] In the embodiment of the present invention, by constructing a series control circuit and a parallel control circuit, the impedance of the circuit can be precisely controlled by adjusting the capacitance value of the capacitor, achieving the best match between the radio frequency circuit and the load, thereby reducing reflection loss, improving energy transmission efficiency, and ensuring the stable operation of the system.

[0078] In the embodiment of the present invention, selecting capacitor devices based on preset circuit design requirements to obtain screened capacitor devices includes:

[0079] Connecting the screened capacitor devices in series and calculating the equivalent capacitance according to the calculation formula of series capacitors to obtain the series circuit capacitance;

[0080] Obtaining the voltage of the series circuit to get the series circuit voltage, and verifying whether the performance of the series circuit meets the preset performance requirements according to the series circuit voltage and the series circuit capacitance. When it meets the requirements, the series circuit is obtained;

[0081] Connecting the screened capacitor devices in parallel and calculating the equivalent capacitance according to the calculation formula of parallel capacitors to obtain the parallel circuit capacitance;

[0082] Obtaining the voltage of the parallel circuit to get the parallel circuit voltage, and verifying whether the performance of the parallel circuit meets the preset performance requirements according to the parallel circuit voltage and the parallel circuit capacitance. When it meets the requirements, the parallel circuit is obtained.

[0083] Among them, the calculation formulas for the series circuit capacitance and the parallel circuit capacitance are as follows:

[0084]

[0085] Among them, ω is the angular frequency, X T is the impedance of the series control circuit, X L is the impedance of the parallel circuit control.

[0086] Further, selecting capacitor devices based on preset circuit design requirements to obtain screened capacitor devices can ensure that their withstand voltage values and capacitance values meet the circuit requirements.

[0087] In the embodiments of the present invention, parallel connection means that the positive electrode of the next capacitor is connected to the negative electrode of the previous capacitor, and finally the positive electrode of the first capacitor and the negative electrode of the last capacitor are connected.

[0088] Further, the use of the MCU processor to control the series circuit and the parallel circuit includes:

[0089] According to the preset circuit design requirements, set the control parameters of the MCU processor to obtain an adjusted MCU processor, where the control parameters include the sampling frequency and the control algorithm;

[0090] The MCU processor monitors the impedance changes of the series circuit and the parallel circuit in real time, and adjusts the capacitance values of the capacitive devices in the series circuit and the parallel circuit according to the preset control algorithm for impedance matching to obtain monitored impedance data;

[0091] Feed the monitored impedance data back to the MCU processor, and the MCU processor adjusts and optimizes according to the monitored impedance data to ensure that the circuit is always in the best matching state, and controls the series circuit and the parallel circuit.

[0092] In the embodiments of the present invention, setting the control parameters of the MCU processor according to the preset circuit design requirements can ensure that it can receive and process signals from capacitive devices.

[0093] S3. Query the remaining devices between the series control circuit and the parallel control circuit in the RF circuit and the load, regard the remaining devices as comprehensive devices, and calculate the device impedance of the comprehensive devices to obtain the comprehensive device impedance.

[0094] It can be understood that querying the remaining devices between the series control circuit and the parallel control circuit in the RF circuit and the load, regarding these devices as comprehensive devices and calculating their device impedance can comprehensively understand the impedance characteristics of the entire RF circuit, so as to achieve more accurate impedance matching and improve the transmission efficiency and performance of the RF circuit.

[0095] In the embodiments of the present invention, the remaining devices refer to some capacitors, resistors and inductors with fixed values between the series control circuit and the load.

[0096] Further, the remaining devices also include parasitic capacitance and parasitic inductance. Among them, parasitic capacitance and parasitic inductance are additional inductance and capacitance generated by electromagnetic induction, which exist in unexpected positions in the RF circuit, and can also be unwanted capacitance and inductance effects caused by physical structure, material characteristics and manufacturing process limitations.

[0097] Furthermore, although these parasitic parameters are generally not explicitly marked in the circuit schematic diagram, they will have a significant impact on the performance of the circuit, especially in the RF circuit of this embodiment.

[0098] In the embodiment of the present invention, calculating the device impedance of the integrated device to obtain the integrated device impedance includes:

[0099] Obtain all the components included in the integrated device and the connection manner of the components to obtain device components and component connection manners, where the device components include resistors, inductors, and capacitors;

[0100] Collect the parameters of the device components to obtain component parameters, where the component parameters include resistance values, inductance values, and capacitance values;

[0101] According to the component connection manner and component parameters, calculate the device impedance of the integrated device to obtain the initial integrated device impedance,

[0102] Verify the initial integrated device impedance by measuring the input impedance of the actual circuit where the integrated device is located and comparing the input impedance with the initial integrated device impedance. When the verification passes, obtain the integrated device impedance.

[0103] S4. Calculate the impedances of the series control circuit and the parallel control circuit to obtain the series control circuit impedance and the parallel circuit control impedance.

[0104] It can be understood that by calculating the impedances of the series control circuit and the parallel control circuit in the RF circuit, it helps to comprehensively understand the impedance distribution of the RF circuit, provides accurate data support for subsequent impedance matching, can improve the transmission efficiency of RF signals, reduce energy loss and reflection, and ensure the stable operation of the RF circuit.

[0105] Among them, the calculation formulas for the series control circuit impedance and the parallel circuit control impedance are as follows

[0106]

[0107] Among them, X T is the series control circuit impedance, X L is the parallel circuit control impedance, R load is the resistance at the load end, and X load is the reactance at the load end.

[0108] S5. Calculate the total circuit impedance of the RF circuit according to the load impedance, the series control circuit impedance, and the parallel control circuit impedance, and perform impedance matching by adjusting the capacitance values of the series circuit and the parallel circuit.

[0109] It is understandable that by calculating the impedances of the series control circuit and the parallel control circuit in the RF circuit, it helps to comprehensively understand the impedance distribution of the RF circuit, provides accurate data support for subsequent impedance matching, can improve the transmission efficiency of RF signals, reduce energy loss and reflection, and ensure the stable operation of the RF circuit.

[0110] It is understandable that by comprehensively considering the impedances of the load and the control circuit, the overall impedance characteristics of the RF circuit can be comprehensively grasped, providing key data for achieving precise impedance matching, thereby improving the transmission efficiency of RF signals, reducing energy loss and reflection, and ensuring the stable operation of the system.

[0111] In the embodiments of the present invention, the total circuit impedance refers to the total obstructive effect exhibited by the entire circuit in the RF circuit after comprehensively considering the load impedance, the series control circuit impedance, and the parallel control impedance. It is a key parameter for measuring the degree of obstruction of the circuit to the flow of current and includes the comprehensive influence of components such as resistance, inductance, and capacitance.

[0112] Furthermore, calculating the total circuit impedance of the RF circuit according to the load impedance, the series control circuit impedance, and the parallel control circuit impedance includes:

[0113] Obtain the values of the load impedance, the series control circuit impedance, and the parallel control circuit impedance to obtain the load impedance value, the series control circuit impedance value, and the parallel control circuit impedance value;

[0114] Query that there is a specific connection relationship between the series control circuit and the parallel control circuit and the load, and calculate the combined impedance of the series control circuit and the parallel control circuit and the load according to the connection method to obtain the series combined impedance and the parallel combined impedance, where the connection relationship includes series and parallel;

[0115] Comprehensively calculate the series combined impedance and the parallel combined impedance according to the actual connection method of the circuit to obtain the total circuit impedance of the RF circuit.

[0116] In the embodiments of the present invention, impedance matching by adjusting the capacitance values of the series circuit and the parallel circuit includes:

[0117] Determine the target impedance to be matched according to the design requirements of the RF circuit where the series circuit and the parallel circuit are located;

[0118] For the capacitor of the series circuit, adjust the total capacitance of the circuit by changing the capacitance value, thereby changing the impedance for series impedance matching;

[0119] For the capacitor of the parallel circuit, adjust the admittance of the parallel branch by changing the capacitance value, thereby changing the impedance for parallel impedance matching;

[0120] Measure the impedance of the adjusted circuit using an impedance analyzer or a network analyzer to verify the series impedance matching and parallel impedance matching.

[0121] In the embodiment of the present invention, the impedance parameters of the front-end device in the RF circuit are measured by a directional coupler. The system includes a directional coupler, a capacitive device, an MCU processor, and a load. A series circuit and a parallel circuit are constructed using the capacitive device, and the MCU processor is used to control the circuit to form a series control circuit and a parallel control circuit. The remaining devices between the series / parallel control circuit in the circuit and the load are classified as a comprehensive device, and its device impedance is calculated. The impedance of the series control circuit and the parallel control circuit is calculated. According to the load impedance, the series control circuit impedance, and the parallel control circuit impedance, the total impedance of the circuit is calculated, and impedance matching is performed by adjusting the capacitance values of the series capacitor and the parallel capacitor. Therefore, the present invention provides a method, device, electronic device, and computer-readable storage medium for impedance matching of an RF power supply, and the present invention can improve the protection ability of the RF power supply.

[0122] As Figure 2 shown, it is a module schematic diagram of the RF power supply impedance matching device of the present invention.

[0123] The RF power supply impedance matching device 100 of the present invention can be installed in an electronic device. According to the implemented functions, the RF power supply impedance matching device may include a data measurement module 101, a circuit construction module 102, an impedance calculation module 103, and an impedance matching module 104. The modules of the present invention can also be referred to as units, which refer to a series of computer program segments that can be executed by an electronic device processor and can complete fixed functions, and are stored in the memory of the electronic device.

[0124] In this embodiment, the functions of each module / unit are as follows:

[0125] The data measurement module 101 is used to measure the impedance parameters of the front-end device in the RF circuit based on a preset parameter measurement instruction using a directional coupler to obtain the front-end impedance parameters, where the RF power supply system includes a directional coupler, a capacitive device, an MCU processor, and a load;

[0126] The circuit construction module 102 is used to construct a series circuit and a parallel circuit using the capacitive device and control the series circuit and the parallel circuit using the MCU processor to construct a series control circuit and a parallel control circuit;

[0127] The impedance calculation module 103 is used to query the remaining devices between the series control circuit and the parallel control circuit and the load, regard the remaining devices as a comprehensive device, and calculate the device impedance of the comprehensive device to obtain the comprehensive device impedance;

[0128] Calculate the impedances of the series control circuit and the parallel control circuit to obtain the series control circuit impedance and the parallel control circuit impedance;

[0129] An impedance matching module 104 is configured to calculate the total circuit impedance of the radio frequency circuit according to the load impedance, the series control circuit impedance, and the parallel control circuit impedance, and perform impedance matching by adjusting the capacitance values of the series circuit and the parallel circuit.

[0130] Specifically, each module in the radio frequency power supply impedance matching device 100 in the embodiments of the present invention adopts the same technical means as those in the above Figure 1 The radio frequency power supply impedance matching method described, and can produce the same technical effects, which will not be elaborated here.

[0131] As Figure 3 shown, it is a schematic structural diagram of an electronic device for implementing the radio frequency power supply impedance matching method of the present invention.

[0132] The electronic device may include a processor 10, a memory 11, a communication bus 12, and a communication interface 13, and may further include a computer program stored in the memory 11 and executable on the processor 10, such as a radio frequency power supply impedance matching program.

[0133] Among them, the processor 10 may be composed of integrated circuits in some embodiments. For example, it may be composed of a single packaged integrated circuit, or may be composed of multiple integrated circuits with the same or different functions, including a combination of one or more central processing units (CPUs), microprocessors, digital processing chips, graphics processors, and various control chips. The processor 10 is the control core (Control Unit) of the electronic device, connecting various components of the entire electronic device through various interfaces and lines, and by running or executing programs or modules stored in the memory 11 (such as executing the radio frequency power supply impedance matching program, etc.), and calling data stored in the memory 11, to execute various functions of the electronic device and process data.

[0134] The memory 11 at least includes one type of readable storage medium, and the readable storage medium includes flash memory, mobile hard disk, multimedia card, card-type memory (such as SD or DX memory, etc.), magnetic memory, magnetic disk, optical disk, etc. The memory 11 can be an internal storage unit of the electronic device in some embodiments, such as the mobile hard disk of the electronic device. The memory 11 can also be an external storage device of the electronic device in other embodiments, such as a plug-in mobile hard disk, a Smart Media Card (SMC), a Secure Digital (SD) card, a Flash Card, etc. equipped on the electronic device. Further, the memory 11 can also include both the internal storage unit and the external storage device of the electronic device. The memory 11 can be used not only to store application software installed on the electronic device and various types of data, such as the code of the radio frequency power impedance matching program, etc., but also to temporarily store the data that has been output or will be output.

[0135] The communication bus 12 can be a Peripheral Component Interconnect (PCI) bus or an Extended Industry Standard Architecture (EISA) bus, etc. This bus can be divided into an address bus, a data bus, a control bus, etc. The bus is set to implement the connection and communication between the memory 11 and at least one processor 10, etc.

[0136] The communication interface 13 is used for the communication between the above-mentioned electronic device and other devices, including a network interface and a user interface. Optionally, the network interface can include a wired interface and / or a wireless interface (such as a WI-FI interface, a Bluetooth interface, etc.), and is usually used to establish a communication connection between this electronic device and other electronic devices. The user interface can be a display, an input unit (such as a keyboard), and optionally, the user interface can also be a standard wired interface, a wireless interface. Optionally, in some embodiments, the display can be an LED display, a liquid crystal display, a touch liquid crystal display, and an OLED (Organic Light-Emitting Diode) toucher, etc. Among them, the display can also be appropriately referred to as a display screen or a display unit, and is used to display the information processed in the electronic device and to display the visual user interface.

[0137] Figure 3 Only the electronic device with components is shown, and those skilled in the art can understand that Figure 3The structures shown do not constitute a limitation on the electronic device, and it may include fewer or more components than those shown, or combine certain components, or have a different component arrangement.

[0138] For example, although not shown, the electronic device may further include a power source (such as a battery) for powering each component. Preferably, the power source can be logically connected to the at least one processor 10 through a power management device, so as to implement functions such as charging management, discharging management, and power consumption management through the power management device. The power source may also include any components such as one or more DC or AC power sources, a recharge device, a power failure detection circuit, a power converter or inverter, a power status indicator, etc. The electronic device may also include various sensors, a Bluetooth module, a Wi-Fi module, etc., which will not be elaborated here.

[0139] It should be understood that the embodiments are for illustrative purposes only and are not limited by this structure in the scope of the patent application.

[0140] The radio frequency power impedance matching program stored in the memory 11 in the electronic device is a combination of multiple computer programs. When running in the processor 10, it can implement:

[0141] Based on a preset parameter measurement instruction, use a directional coupler to measure the impedance parameters of the front-end device in the radio frequency circuit to obtain the front-end impedance parameters, where the radio frequency power system includes a directional coupler, a capacitive device, an MCU processor, and a load;

[0142] Use the capacitive device to construct a series circuit and a parallel circuit, and use the MCU processor to control the series circuit and the parallel circuit to construct a series control circuit and a parallel control circuit;

[0143] Query the remaining devices between the series control circuit and the parallel control circuit and the load, regard the remaining devices as a comprehensive device, and calculate the device impedance of the comprehensive device to obtain the comprehensive device impedance;

[0144] Calculate the impedance of the series control circuit and the parallel control circuit to obtain the series control circuit impedance and the parallel circuit control impedance;

[0145] Calculate the total circuit impedance of the radio frequency circuit according to the load impedance, the series control circuit impedance, and the parallel control circuit impedance, and perform impedance matching by adjusting the capacitance values of the series circuit and the parallel circuit.

[0146] Specifically, for the specific implementation method of the above computer program by the processor 10, reference can be made to Figure 1 the description of the relevant steps in the corresponding embodiments, which will not be elaborated here.

[0147] Furthermore, if the modules / units integrated in the electronic device are implemented in the form of software functional units and sold or used as independent products, they can be stored in a non-volatile computer-readable storage medium. The computer-readable storage medium can be volatile or non-volatile. For example, the computer-readable medium can include: any entity or device capable of carrying the computer program code, a recording medium, a USB flash drive, a mobile hard disk, a magnetic disk, an optical disk, a computer memory, a read-only memory (ROM, Read-Only Memory).

[0148] The present invention also provides a computer-readable storage medium, which stores a computer program. When the computer program is executed by a processor of an electronic device, it can implement:

[0149] Based on a preset parameter measurement instruction, use a directional coupler to measure the impedance parameter of the front-end device in the RF circuit to obtain the front-end impedance parameter, where the RF power supply system includes a directional coupler, a capacitive device, an MCU processor, and a load;

[0150] Use the capacitive device to construct a series circuit and a parallel circuit, and use the MCU processor to control the series circuit and the parallel circuit to construct a series control circuit and a parallel control circuit;

[0151] Query the remaining devices between the series control circuit and the parallel control circuit and the load, regard the remaining devices as a comprehensive device, and calculate the device impedance of the comprehensive device to obtain the comprehensive device impedance;

[0152] Calculate the impedance of the series control circuit and the parallel control circuit to obtain the series control circuit impedance and the parallel circuit control impedance;

[0153] Calculate the total circuit impedance of the RF circuit according to the load impedance, the series control circuit impedance, and the parallel control circuit impedance, and perform impedance matching by adjusting the capacitance values of the series circuit and the parallel circuit.

[0154] In several embodiments provided by the present invention, it should be understood that the disclosed devices, apparatuses, and methods can be implemented in other ways. For example, the device embodiments described above are only illustrative. For example, the division of the modules is only a logical function division, and there can be other division methods in actual implementation.

[0155] The module described as a separation component may or may not be physically separated. The component shown as a module may or may not be a physical unit, that is, it may be located in one place or distributed to multiple network units. Some or all of the modules can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0156] In addition, in each embodiment of the present invention, each functional module can be integrated in a processing unit, or each unit can exist physically alone, or two or more units can be integrated in one unit. The above integrated unit can be implemented in the form of hardware or in the form of a combination of hardware and software functional modules.

[0157] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and without departing from the spirit or basic characteristics of the present invention, the present invention can be implemented in other specific forms.

[0158] Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present invention. Any associated drawing marks in the claims should not be regarded as limiting the claimed rights.

[0159] The blockchain referred to in the present invention is a new application mode of computer technologies such as distributed data storage, peer-to-peer transmission, consensus mechanism, and encryption algorithms. Blockchain, essentially a decentralized database, is a series of data blocks generated by using cryptographic methods. Each data block contains information about a batch of network transactions, which is used to verify the validity of the information (anti-counterfeiting) and generate the next block. The blockchain can include a blockchain underlying platform, a platform product service layer, an application service layer, etc.

[0160] The embodiments of this application can acquire and process relevant data based on artificial intelligence technology. Among them, Artificial Intelligence (AI) is to use a digital computer or a machine controlled by a digital computer to simulate, extend, and expand human intelligence, perceive the environment, acquire knowledge, and use knowledge to obtain the best results of theory, methods, technologies, and application systems.

[0161] In addition, obviously, the word "including" does not exclude other units or steps, and the singular does not exclude the plural. The multiple units or devices stated in the system claims can also be implemented by one unit or device through software or hardware. Words such as second are used to represent names and do not represent any specific order.

[0162] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present invention.

Claims

1. A radio frequency power supply impedance matching method, characterized in that: The method comprises: Based on a preset parameter measurement instruction, the impedance parameter of the front-end device in the radio frequency circuit is measured by using a directional coupler to obtain the front-end impedance parameter, wherein the radio frequency power supply system includes a directional coupler, a capacitor device, an MCU processor, and a load; Using the capacitor device to construct a series circuit and a parallel circuit, and using the MCU processor to control the series circuit and the parallel circuit to construct a series control circuit and a parallel control circuit; Querying other devices between the series control circuit and the parallel control circuit and the load, taking the other devices as comprehensive devices, and calculating the device impedance of the comprehensive device to obtain the comprehensive device impedance; Calculating the impedance of the series control circuit and the parallel control circuit to obtain the series control circuit impedance and the parallel circuit control impedance; The total circuit impedance of the radio frequency circuit is calculated according to the load impedance, the series control circuit impedance and the parallel control circuit impedance, and impedance matching is performed by adjusting the capacitance of the series circuit and the parallel circuit.

2. The RF power supply impedance matching method according to claim 1, characterized in that: The method of measuring the impedance parameters of the front-end device in the radio frequency circuit by using a directional coupler based on the preset parameter measurement instruction to obtain the front-end impedance parameters includes: Calibrate a preset vector analyzer to obtain a calibrated measurement device; Based on the parameter measurement instruction, setting the frequency range and power level of the calibration measurement device to obtain a standard measurement device; Using the standard measuring device to measure the impedance parameters of the front-end device to obtain a measurement signal, and during the measurement process, coupling the measurement signal through the coupler to obtain a coupled measurement signal; The coupled measurement signal is analyzed using a software tool provided by the standard measurement device, and impedance parameters are extracted to obtain front-end impedance parameters.

3. The RF power supply impedance matching method according to claim 1, characterized in that: The method of using the capacitor device to construct a series circuit and a parallel circuit includes: Selecting a capacitor device based on a preset circuit design requirement to obtain a screened capacitor device; Connecting the capacitor screening devices in series, and calculating the equivalent capacitance according to the calculation formula of the series capacitance to obtain the series circuit capacitance; Acquiring the voltage of the series circuit to obtain the series circuit voltage, and verifying whether the performance of the series circuit meets the preset performance requirements according to the series circuit voltage and the series circuit capacitance, and obtaining the series circuit when the performance meets the preset performance requirements; The capacitor screening devices are connected in parallel, and the equivalent capacitance is calculated according to the calculation formula of the parallel capacitance to obtain the parallel circuit capacitance; The voltage of the parallel circuit is obtained to obtain the parallel circuit voltage, and the performance of the parallel circuit is verified to be in accordance with the parallel circuit voltage and the parallel circuit capacitance to determine whether it meets the preset performance requirement. If it meets the requirement, the parallel circuit is obtained.

4. The RF power supply impedance matching method according to claim 1, characterized in that: The controlling the series circuit and the parallel circuit by using the MCU processor includes: According to the preset circuit design requirements, the control parameters of the MCU processor are set to adjust the MCU processor, wherein the control parameters include a sampling frequency and a control algorithm; The impedance changes of the series circuit and the parallel circuit are monitored in real time by the MCU processor, and the capacitance values ​​of the capacitor devices in the series circuit and the parallel circuit are adjusted according to a preset control algorithm to perform impedance matching and obtain monitoring impedance data; The monitored impedance data is fed back to the MCU processor, and the MCU processor performs adjustments and optimizations according to the monitored impedance data to ensure that the circuit is always in the best matching state, and controls the series circuit and the parallel circuit.

5. The RF power supply impedance matching method according to claim 1, characterized in that: The calculating the device impedance of the comprehensive device to obtain the comprehensive device impedance includes: Acquire all components contained in the comprehensive device and the connection mode of the components to obtain device components and the connection mode of the components, wherein the device components include resistors, inductors, and capacitors; Collecting parameters of the device components to obtain component parameters, wherein the component parameters include resistance value, inductance value, and capacitance value; According to the component connection mode and component parameters, the device impedance of the comprehensive device is calculated to obtain an initial comprehensive device impedance. The initial integrated device impedance is verified by measuring the input impedance of the actual circuit where the integrated device is located and comparing the input impedance with the initial integrated device impedance. When the verification passes, the integrated device impedance is obtained.

6. The radio frequency power supply impedance matching method according to claim 1, characterized in that: The impedance matching is performed by adjusting the capacitance of the series circuit and the parallel circuit, including: Determine the target impedance to be matched according to the design requirements of the radio frequency circuit where the series circuit and the parallel circuit are located; For the capacitors in the series circuit, the total capacitance of the circuit is adjusted by changing the capacitance value, thereby changing the impedance and performing series impedance matching. For the capacitors in parallel circuits, the admittance of the parallel branches is adjusted by changing the capacitance, thereby changing the impedance and performing parallel impedance matching. The adjusted circuit impedance is measured by an impedance analyzer or a network analyzer to verify the series impedance matching and the parallel impedance matching.

7. The radio frequency power supply impedance matching method according to any one of claims 1 to 6, characterized in that: The calculating the total circuit impedance of the radio frequency circuit according to the load impedance, the series control circuit impedance and the parallel control circuit impedance comprises: Obtaining values ​​of load impedance, series control circuit impedance and parallel control circuit impedance to obtain load impedance value, series control circuit impedance value and parallel control circuit impedance value; Query whether there is a specific connection relationship between the series control circuit, the parallel control circuit and the load, and calculate the combined impedance of the series control circuit, the parallel control circuit and the load according to the connection mode to obtain a series combined impedance and a parallel combined impedance, wherein the connection relationship includes series and parallel; The series combined impedance and the parallel combined impedance are comprehensively calculated according to the actual connection mode of the circuit to obtain the total circuit impedance of the radio frequency circuit.

8. A radio frequency power supply impedance matching device, characterized in that: The device comprises: A data measurement module is used to measure the impedance parameters of the front-end device in the radio frequency circuit using a directional coupler based on a preset parameter measurement instruction to obtain the front-end impedance parameters, wherein the radio frequency power supply system includes a directional coupler, a capacitor device, an MCU processor, and a load; A circuit construction module, used to construct a series circuit and a parallel circuit using the capacitor device, and to control the series circuit and the parallel circuit using the MCU processor to construct a series control circuit and a parallel control circuit; an impedance calculation module, used for querying the remaining devices between the series control circuit and the parallel control circuit and the load, taking the remaining devices as comprehensive devices, and calculating the device impedance of the comprehensive device to obtain the comprehensive device impedance; Calculating the impedance of the series control circuit and the parallel control circuit to obtain the series control circuit impedance and the parallel circuit control impedance; The impedance matching module is used to calculate the total circuit impedance of the radio frequency circuit according to the load impedance, the series control circuit impedance and the parallel control circuit impedance, and to perform impedance matching by adjusting the capacitance of the series circuit and the parallel circuit.

9. An electronic device, characterized in that: The electronic device comprises: at least one processor; and, a memory communicatively connected to the at least one processor; wherein, The memory stores a computer program executable by the at least one processor, and the computer program is executed by the at least one processor so that the at least one processor can perform the radio frequency power supply impedance matching method according to any one of claims 1 to 7.

10. A computer-readable storage medium, comprising a data storage area and a program storage area, wherein the data storage area stores created data and the program storage area stores a computer program; wherein: When the computer program is executed by a processor, the radio frequency power supply impedance matching method according to any one of claims 1 to 7 is implemented.

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