XY-axis fine adjustment table
By introducing the position detection system and cross roller guides with the photoelectric principle, the XY axis fine-tuning table accuracy and structural occupation problems are solved, and a high-precision and low-cost fine-tuning table design is realized, suitable for high-precision applications.
Patent Information
- Application Number
- CN202510716584.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-30
- Publication Date
- 2025-07-04
AI Technical Summary
The existing XY axis fine-tuning table has poor accuracy and a large structure occupies more location, which is costly.
Using a position detection system based on the principle of photoelectricity, a number of optocouples and light shielding sheets are arranged in the fixed seat to realize intermittent shading to monitor the displacement state of the X and Y axes. Combined with the cross roller guide rail and vertical motor arrangement, the accuracy and response speed are improved.
It realizes high-precision position perception and response speed, has a simple structure and low cost, and is suitable for high-precision application scenarios.
Smart Images
Figure CN120244889A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of fine adjustment tables, and more specifically, to an XY-axis fine adjustment table. Background Art
[0002] A fine adjustment table is a mechanical device used to achieve precise displacement adjustment and is commonly used in high-precision fields such as optical experiments, precision measurements, and laser processing. It achieves translation at the sub-millimeter or even micron level through methods such as screw propulsion, gear transmission, or electric control. The following problems exist in the current market: The current XY-axis fine adjustment tables have poor accuracy, occupy a relatively large position in terms of structure, and are not low in cost. Therefore, there is an urgent need to improve them. The technical problem to be solved by the present invention is to provide an XY-axis fine adjustment table with higher accuracy. Summary of the Invention
[0003] The technical problem to be solved by the present invention is to provide an XY-axis fine adjustment table with higher accuracy; to achieve high-precision position feedback and closed-loop control, a position detection system based on the optoelectronic principle is introduced into this fine adjustment table. A number of first optocouplers are arranged at intervals inside the fixed base, and a first light-shielding sheet and a second light-shielding sheet are installed inside the X-axis slide. Among them, the first light-shielding sheet intermittently shields the first optocouplers during the movement of the slide, thereby generating clear occlusion signals during the movement of the X-axis; similarly, the second light-shielding sheet intermittently occludes a number of second optocouplers inside the Y-axis slide to monitor the displacement state of the Y-axis; compared with traditional limit switches, it not only has a more concise structure, but also can achieve high-precision position perception at a lower cost, with good sensitivity and response speed.
[0004] An XY-axis fine adjustment table includes a fixed base; an X-axis slide is provided on the fixed base and is slidably matched with it; a Y-axis slide is provided on the X-axis slide and is slidably matched with it; a number of first optocouplers are arranged at intervals inside the fixed base; a first light-shielding sheet and a second light-shielding sheet are provided inside the X-axis slide; a number of second optocouplers are arranged at intervals inside the Y-axis slide; the first light-shielding sheet intermittently shields the first optocouplers; the second light-shielding sheet intermittently shields the second optocouplers; an X-axis driving motor is fixedly provided on one side of the fixed base; a first lead screw is connected to the rotating shaft of the X-axis driving motor; the first lead screw is threadedly connected to the X-axis slide; and the X-axis slide is made to perform a linear reciprocating motion by the X-axis driving motor; a Y-axis driving motor is fixedly provided on one side of the Y-axis slide; a second lead screw is connected to the rotating shaft of the Y-axis driving motor; the second lead screw is threadedly connected to the Y-axis slide; and the Y-axis slide is made to perform a linear reciprocating motion by the Y-axis driving motor.
[0005] Preferably, the installation direction of the X-axis driving motor is perpendicular to the installation direction of the Y-axis driving motor.
[0006] Preferably, two first slide rails are provided at intervals on the top of the fixed seat; both ends of the first slide rail are respectively connected to the fixed seat and the X-axis slide seat; two second slide rails are provided at intervals on the top of the X-axis slide seat; both ends of the second slide rail are respectively connected to the X-axis slide seat and the Y-axis slide seat; and both the first slide rail and the second slide rail adopt crossed roller guides.
[0007] Preferably, the cross-sections of the first light-shielding sheet and the second light-shielding sheet are both in the shape of rake teeth; the number of rake teeth of the first light-shielding sheet corresponds to the number of the first optocouplers; the number of rake teeth of the second light-shielding sheet corresponds to the number of the second optocouplers.
[0008] Preferably, a cable connected to the first optocoupler and the second optocoupler is also provided; and the cable is in the shape of a spring line.
[0009] Preferably, the length and width of the X-axis slide seat are both less than 80 millimeters; the length and width of the Y-axis slide seat are both less than 80 millimeters.
[0010] Compared with the prior art, the beneficial effects of the present invention are as follows: for the XY-axis fine adjustment stage of the present invention to achieve high-precision position feedback and closed-loop control, a position detection system based on the optoelectronic principle is introduced into the fine adjustment stage. A number of first optocouplers are arranged at intervals inside the fixed seat, and a first light-shielding sheet and a second light-shielding sheet are installed inside the X-axis slide seat. Among them, the first light-shielding sheet intermittently shields the first optocouplers during the movement of the slide seat, thereby generating clear occlusion signals during the movement of the X axis; similarly, the second light-shielding sheet intermittently occludes a number of second optocouplers inside the Y-axis slide seat to monitor the displacement state of the Y axis; compared with the traditional limit switch, it not only has a simpler structure, but also can achieve high-precision position perception at a lower cost, and has good sensitivity and response speed.
[0011] Additional aspects and advantages of the present invention will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.
[0013] Figure 1 is a schematic diagram of the overall structure of the present invention.
[0014] Figure 2 is the present invention Figure 1 is a schematic diagram of the structure from another angle.
[0015] Figure 3 is the schematic diagram of the decomposition structure of the present invention Figure 1
[0016] Figure 4 is the present invention Figure 3 The enlarged schematic diagram of part A of the present invention
[0017] Figure 5 is the present invention Figure 2 The schematic diagram of the decomposition structure of the present invention
[0018] Figure 6 is the present invention Figure 5 The enlarged schematic diagram of part B of the present invention
[0019] In the figure: 1, fixed seat; 2, X-axis slide; 3, Y-axis slide; 4, first opto-coupler; 5, first light-shielding sheet; 6, second light-shielding sheet; 7, second opto-coupler; 8, X-axis driving motor; 9, first lead screw; 10, Y-axis driving motor; 11, second lead screw; 12, first slide rail; 13, second slide rail; 14, cable Specific embodiments
[0020] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention
[0021] It should be noted that the terms "first", "second", etc. in the present invention are used to distinguish similar objects and do not have to be used to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so that the embodiments of the present disclosure described herein can be implemented in an order different from those illustrated or described herein. The embodiments described in the following exemplary embodiments do not represent all the embodiments consistent with the present disclosure
[0022] Please refer to Figures 1 to 6 , in the embodiments of the present invention, an XY-axis fine adjustment stage includes a fixed base 1; an X-axis slide 2 is provided on the fixed base 1 and is slidably engaged therewith; and a Y-axis slide 3 is provided on the X-axis slide 2 and is slidably engaged therewith; and a plurality of first optical couplers 4 are spaced inside the fixed base 1; and a first light-shielding sheet 5 and a second light-shielding sheet 6 are provided inside the X-axis slide 2; and a plurality of second optical couplers 7 are spaced inside the Y-axis slide 3; and the first light-shielding sheet 5 intermittently shields the first optical couplers 4; and the second light-shielding sheet 6 intermittently shields the second optical couplers 7; and an X-axis driving motor 8 is fixedly provided on one side of the fixed base 1; and the rotating shaft of the X-axis driving motor 8 is connected to a first lead screw 9; and the first lead screw 9 is threadedly connected to the X-axis slide 2; and the X-axis slide 2 is caused to perform a linear reciprocating motion by the X-axis driving motor 8; and a Y-axis driving motor 10 is fixedly provided on one side of the Y-axis slide 3; and the rotating shaft of the Y-axis driving motor 10 is connected to a second lead screw 11; and the second lead screw 11 is threadedly connected to the Y-axis slide 3; and the Y-axis slide 3 is caused to perform a linear reciprocating motion by the Y-axis driving motor 10.
[0023] Specifically, it is composed of a fixed base 1, an X-axis slide 2 and a Y-axis slide 3. The three are stacked layer by layer through sliding cooperation, thus constructing a composite platform that can achieve micro-displacement adjustment on the XY plane. This device makes full use of the screw-nut transmission principle in terms of structure: an X-axis driving motor 8 is installed on one side of the fixed base 1, and its rotating shaft is connected to a first lead screw 9. The first lead screw 9 is threadedly connected to the X-axis slide 2, converting the rotational motion of the motor into the reciprocating linear motion of the X-axis slide 2 along the horizontal direction; on one side of the Y-axis slide 3, a Y-axis driving motor 10 is installed, and it is threadedly connected to the Y-axis slide 3 through the second lead screw 11 to achieve its precise movement in the vertical direction; ensuring that the two axes do not interfere with each other and can be independently regulated, suitable for application scenarios that require delicate position adjustment, such as micro imaging, laser alignment, precision machining, etc.; at the same time, to achieve high-precision position feedback and closed-loop control, this fine adjustment stage introduces a position detection system based on the optoelectronic principle. A plurality of first optical couplers 4 are spaced inside the fixed base 1, and a first light-shielding sheet 5 and a second light-shielding sheet 6 are installed inside the X-axis slide 2. Among them, the first light-shielding sheet 5 intermittently shields the first optical couplers 4 during the movement of the slide, thus generating clear occlusion signals during the movement of the X-axis; similarly, the second light-shielding sheet 6 intermittently occludes a plurality of second optical couplers 7 inside the Y-axis slide 3 to monitor the displacement state of the Y-axis. This intermittent light-shielding cooperation with the detection method of multiple optical couplers is not only simpler in structure compared to traditional limit switches, but also can achieve high-precision position perception at a lower cost, with good sensitivity and response speed.
[0024] Furthermore, the installation direction of the X-axis driving motor 8 is perpendicular to the installation direction of the Y-axis driving motor 10.
[0025] Specifically, the XY-axis fine adjustment stage has a reasonable spatial optimization design in its structural layout. The installation direction of the X-axis drive motor 8 is perpendicular to that of the Y-axis drive motor 10. This arrangement not only reflects the compactness of the mechanical structure but also significantly improves the stability and maintainability of the entire stage during actual use. Specifically, the X-axis drive motor 8 is usually installed horizontally, and its rotating shaft is coaxially connected to the first lead screw 9. The linear reciprocating motion of the X-axis slide 2 is achieved through screw drive. The Y-axis drive motor 10 is installed vertically, and its rotating shaft is connected to the second lead screw 11, forming a screw fit with the Y-axis slide 3, thereby driving the Y-axis slide 3 to move in the vertical direction. This vertically crossed motor arrangement not only meets the requirement of the orthogonality of the X and Y biaxial movement directions but also effectively avoids direct interference in space between the two motors, reduces the overall size of the equipment, and facilitates the integrated installation of the fine adjustment stage. In addition, the vertical installation design also helps to improve the heat dissipation efficiency of the system and the rationality of cable routing. The motors do not block each other, and there is more sufficient routing space, reducing the risk of system performance degradation caused by heat accumulation or cable interference. More importantly, in high-precision application scenarios, the orthogonality of the motor installation directions can reduce the dynamic response differences caused by structural asymmetry, thereby improving the synchronization accuracy and response consistency of the entire stage during biaxial linkage. The X-axis drive motor and the Y-axis drive motor cooperate with encoders to form position feedback.
[0026] Furthermore, two first slide rails 12 are provided at intervals on the top of the fixed base 1; both ends of the first slide rail 12 are respectively connected to the fixed base 1 and the X-axis slide 2; two second slide rails 13 are provided at intervals on the top of the X-axis slide 2; both ends of the second slide rail 13 are respectively connected to the X-axis slide 2 and the Y-axis slide 3; and both the first slide rail 12 and the second slide rail 13 adopt crossed roller guides.
[0027] Specifically, in order to improve the motion accuracy and structural stability of the fine adjustment stage, the XY-axis fine adjustment stage adopts a high-precision crossed roller guide system in the sliding structure part, specifically manifested as: two first slide rails 12 are provided at intervals on the top of the fixed base 1, and two second slide rails 13 are provided at intervals on the top of the X-axis slide 2, and both the above-mentioned first slide rail 12 and the second slide rail 13 adopt the form of crossed roller guides. This significantly enhances the guiding accuracy and load-bearing capacity of each slide during the sliding process.
[0028] Cross roller guide is a structure widely used in high-precision linear motion platforms. Its internal rollers are arranged at 90° crosswise. Compared with traditional linear guides or sliding guides, it has lower friction coefficient, stronger torsional rigidity, higher positioning accuracy, and excellent performance when subjected to multi-directional loads. This guide is set on the top of the fixed seat 1 and the X-axis slide 2 respectively, which not only ensures high-precision linear motion between the X-axis slide 2 relative to the fixed seat 1 and the Y-axis slide 3 relative to the X-axis slide 2, but also effectively suppresses tiny jitters and structural deflections during operation, thereby improving the working stability of the overall platform under micron-level precision requirements.
[0029] Furthermore, the cross-sections of the first shading sheet 5 and the second shading sheet 6 are both rake-shaped; and the number of rake teeth of the first shading sheet 5 corresponds to the number of the first optical couplers 4 ; the number of rake teeth of the second shading sheet 6 corresponds to the number of the second optical couplers 7 .
[0030] Specifically, in order to achieve high-resolution detection and precise feedback of the slide displacement, the XY axis fine adjustment stage adopts a rake-tooth-shaped shading sheet design in the photoelectric detection structure, which is specifically manifested as follows: the cross-sections of the first shading sheet 5 and the second shading sheet 6 are both rake-tooth-shaped structures, and the number of rake teeth of the first shading sheet 5 corresponds to the number of the first optical couplers 4, and the number of rake teeth of the second shading sheet 6 corresponds to the number of the second optical couplers 7. This not only improves the resolution accuracy of the shading process, but also provides a solid foundation for the system to achieve more delicate displacement signal acquisition and motion feedback.
[0031] The rake-toothed shading sheet is usually composed of several tooth-like protrusions and gaps arranged at equal intervals. During the movement of the slide, when the shading sheet moves, the teeth and gaps alternately block or pass through the corresponding optical coupling sensors, thereby generating a series of feedback signals; encoders are provided behind the X-axis drive motor and the Y-axis drive motor to provide real-time feedback; when the shading sheet is blocked, no signal is received; when the shading sheet is not blocked, a signal can be received; when the shading sheet is blocked, the signal is fed back to the control host, and the control host knows which position the movement is to; When the fine-tuning table is started, it will automatically return to zero; after starting, the motor will rotate clockwise by default, and the lead screw will be pushed forward. When it is pushed forward, the slider will also be pushed forward; then the rake teeth at the end of the upper shading sheet will cover the optocoupler at the farthest end, and the control host will know that it has moved to the farthest end, and then execute the return program; the rake teeth moving to the middle will cover the optocoupler in the middle, and the control host will know that it has moved to the middle, that is, it has been aligned in the middle, thus achieving zero return.
[0032] In addition, compared with planar or single-piece light-shielding sheets, the rake-tooth structure has better repeat response performance and anti-interference ability. During the sliding process, even if there are slight mechanical errors or vibrations, the alternately changing light-shielding signals can still maintain good detection regularity, which helps the system achieve more stable displacement recognition.
[0033] Furthermore, there is also a cable 14 connected to the first optocoupler 4 and the second optocoupler 7; and the cable 14 is in the shape of a spring wire.
[0034] Specifically, in order to ensure the stable transmission of optoelectronic signals and the flexible cooperation of the cable 14 during the movement of the slide, the XY-axis fine adjustment stage is also provided with a cable 14 connected to the first optocoupler 4 and the second optocoupler 7, and the cable 14 adopts a spring wire structure; the spring wire cable, also known as a spiral cable, is essentially a stretchable and resilient spiral structure cable, with good ductility and anti-bending performance. In the application scenario where the cable 14 is connected to the first optocoupler 4 and the second optocoupler 7, as the X-axis slide 2 and the Y-axis slide 3 reciprocate, the cable 14 will also undergo periodic stretching and contraction. Traditional straight cables are prone to fatigue, entanglement, and even breakage due to repeated pulling, while the spring wire cable can automatically adapt to the movement stroke of the slide while maintaining a stable connection, avoiding interference with the mechanical movement path of the cable 14 or forming cable 14 accumulation. The spring wire-shaped cable 14 effectively disperses the bending fatigue concentration points of the original dynamic and static cables 14; increases the service life of the cable 14 to reach millions of bending cycles without breaking; in addition, the spiral structure can also effectively improve the anti-interference ability of the system. Its cable 14 distribution is more compact and the mechanical resilience is stronger, which physically enhances the anti-mechanical damage ability.
[0035] Furthermore, the length and width of the X-axis slide 2 are both less than 80 millimeters; the length and width of the Y-axis slide 3 are both less than 80 millimeters.
[0036] Specifically, in order to meet the precise displacement adjustment requirements in a compact space, the XY-axis fine adjustment stage has a highly intensive design in terms of structural dimensions, where the length and width of the X-axis slide 2 and the Y-axis slide 3 are both less than 80 millimeters, making the entire platform have the advantages of miniaturization and lightweight, and facilitating integration into high-precision application scenarios with limited volume. This compact size design not only improves the versatility and flexibility of the equipment, but also is more suitable for modular integration with various high-precision sensors, microscope stages, precision optical systems, automated detection mechanisms, etc. On the premise of maintaining the complete functional structure of the fine adjustment platform (such as drive, guide rail, feedback, etc.), by controlling the slide size within 80 millimeters, the overall occupied space of the platform can be effectively reduced, enabling it to have good embedded adaptability.
[0037] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above-described exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be embraced within the present invention.
Claims
1. An XY-axis fine adjustment stage, comprising a fixed base (1); characterized in that, The fixed seat (1) is provided with an X-axis slide seat (2) which is slidably matched with the fixed seat (1); and the X-axis slide seat (2) is provided with a Y-axis slide seat (3) which is slidably matched with the fixed seat (1); and a plurality of first optical couplers (4) are arranged at intervals inside the fixed seat (1); and a first light shielding sheet (5) and a second light shielding sheet (6) are arranged inside the X-axis slide seat (2); and a plurality of second optical couplers (7) are arranged at intervals inside the Y-axis slide seat (3); and the first light shielding sheet (5) performs intermittent light shielding on the first optical coupler (4); and the second light shielding sheet (6) performs intermittent light shielding on the second optical coupler (7); and a fixed portion on one side of the fixed seat (1) is provided with a plurality of first optical couplers (4); and a first light shielding sheet (5) and a second light shielding sheet (6) are provided on the second optical coupler (7). An X-axis drive motor (8) is fixedly provided; and the rotating shaft of the X-axis drive motor (8) is connected to a first screw rod (9); and the first screw rod (9) is threadedly connected to the X-axis slide seat (2); and the X-axis drive motor (8) enables the X-axis slide seat (2) to achieve linear reciprocating motion; and a Y-axis drive motor (10) is fixedly provided on one side of the Y-axis slide seat (3); and the rotating shaft of the Y-axis drive motor (10) is connected to a second screw rod (11); and the second screw rod (11) is threadedly connected to the X-axis slide seat (2); and the Y-axis drive motor (10) enables the Y-axis slide seat (3) to achieve linear reciprocating motion.
2. The XY-axis fine adjustment stage according to claim 1, wherein The installation direction of the X-axis driving motor (8) is perpendicular to the installation direction of the Y-axis driving motor (10).
3. The XY-axis fine adjustment stage according to claim 1, characterized in that, Two first slide rails (12) are arranged at intervals on the top of the fixed seat (1); and the two ends of the first slide rail (12) are respectively connected to the fixed seat (1) and the X-axis slide seat (2); and two second slide rails (13) are arranged at intervals on the top of the X-axis slide seat (2); and the two ends of the second slide rail (13) are respectively connected to the X-axis slide seat (2) and the Y-axis slide seat (3); and the first slide rail (12) and the second slide rail (13) both adopt cross roller guide rails.
4. The XY-axis fine adjustment stage according to claim 1, characterized in that, The cross sections of the first shading sheet (5) and the second shading sheet (6) are both in the shape of rake teeth; the number of rake teeth of the first shading sheet (5) corresponds to the number of the first optical couplers (4); and the number of rake teeth of the second shading sheet (6) corresponds to the number of the second optical couplers (7).
5. The XY-axis fine adjustment stage according to claim 1, characterized in that, A cable (14) connected to the first optical coupler (4) and the second optical coupler (7) is also provided; and the cable (14) is in the shape of a spring line.
6. The XY-axis fine adjustment stage according to claim 1, wherein, The length and width of the X-axis slide (2) are both less than 80 millimeters; the length and width of the Y-axis slide (3) are both less than 80 millimeters.