Functional diamond single crystal preparation device capable of accurately regulating and controlling growth environment

Abstract

The invention relates to the field of functional diamond single crystal preparation, and discloses a functional diamond single crystal preparation device capable of accurately regulating and controlling the growth environment, the functional diamond single crystal preparation device comprises a preparation table, a plurality of grooves annularly distributed at equal intervals are formed in the top of the preparation table, and functional diamond single crystal preparation cylinders are fixedly mounted in the grooves; the tops of the functional diamond single crystal preparation barrels are of an opening structure, and sealing covers are installed on the tops of the multiple functional diamond single crystal preparation barrels in a threaded mode. The device has the following advantages and effects that various functional diamond single crystals can be produced and prepared at the same time, an operator can conveniently adjust and control parameters in time according to data, and the requirements for the temperature, the pressure, the methane concentration and the hydrogen concentration in the growth process of the various functional diamond single crystals are met; and it is ensured that various functional diamond single crystals respectively grow in the most suitable environment, and the growth quality and the production and preparation efficiency of the functional diamond single crystals are effectively improved.

Description

Technical Field

[0001] This application relates to the technical field of the preparation of functional diamond single crystals, and particularly relates to a device for preparing functional diamond single crystals that precisely regulates the growth environment. Background Art

[0002] As a material with excellent physical and chemical properties, diamond single crystals have a wide range of applications in many high-tech fields such as semiconductors, optics, and machining. Functional diamond single crystals have become a research hotspot in the scientific research and industrial communities due to their unique structures and properties. Currently, the method of preparing functional diamond single crystals by microwave plasma chemical vapor deposition is one of the more commonly used methods.

[0003] In related technologies, although traditional devices for preparing functional diamond single crystals can meet the basic requirements for the preparation of functional diamond single crystals, it has been found that there are at least the following deficiencies in actual use: only one type of functional diamond single crystal can be prepared each time. When it is necessary to prepare multiple different types of functional diamond single crystals, one way is to purchase and use multiple preparation devices, and the other way is to prepare different types of functional diamond single crystals one by one in sequence. However, the first way increases the economic cost, and the preparation efficiency of the second way is relatively low; moreover, there is a lack of precise regulation of the growth environment of functional diamond single crystals, and it is difficult to precisely regulate key parameters such as gas composition, temperature, and pressure in the growth environment, and it cannot ensure that functional diamond single crystals grow in the most suitable environment, which easily leads to a deterioration in the growth quality of functional diamond single crystals.

[0004] Therefore, we propose a device for preparing functional diamond single crystals that precisely regulates the growth environment to solve the above problems.

[0005] Through prior art searches, the following known technical solutions exist:

[0006] The patent with the authorization announcement number CN213447382U proposes a preparation device for functional large-grained diamond single crystals, including a main body and a microwave generator. The microwave generator is connected to the top of the main body through a waveguide. A rotation adjustment mechanism is arranged inside the main body. The rotation adjustment mechanism includes a reduction motor, which is arranged at the bottom of the main body. Above the reduction motor, there is a turntable. Above the turntable, there are a toothed ring and multiple vertical rods. The vertical rods are rotatably connected to the turntable through bearings. A gear is fixed to the lower part of the vertical rod, and a sample holder is arranged at the top end. The toothed ring is fixed to the lower part of the vertical rod corresponding to the gear through a bracket. A circle of teeth is arranged along the circumferential direction on the inner side of the toothed ring, and the teeth mesh with the gear. An air inlet pipe and an air outlet pipe are arranged at the upper part of the main body. An observation window and a control panel are arranged on the outer wall of the main body, and the control panel is located below the observation window. However, this prior art cannot produce and prepare multiple functional diamond single crystals simultaneously, is not convenient for operators to adjust control parameters in a timely manner according to data, and cannot ensure that the functional diamond single crystals grow in the most suitable environment. Summary of the Invention

[0007] The purpose of this application is to provide a preparation device for functional diamond single crystals with precise growth environment regulation, which has the effects of being able to produce and prepare multiple functional diamond single crystals simultaneously, being convenient for operators to adjust control parameters in a timely manner according to data, meeting the requirements of temperature, pressure, methane concentration, and hydrogen concentration during the growth of multiple functional diamond single crystals respectively, ensuring that multiple functional diamond single crystals grow in the most suitable environment respectively, and effectively improving the growth quality and production efficiency of functional diamond single crystals.

[0008] The above technical purpose of this application is achieved through the following technical solutions: A preparation device for functional diamond single crystals with precise growth environment regulation, including a preparation table. A plurality of grooves distributed in an equidistant annular shape are opened at the top of the preparation table. Functional diamond single crystal preparation cylinders are fixedly installed in the plurality of grooves. The top of the functional diamond single crystal preparation cylinder is of an open structure. Sealing covers are threadedly installed at the tops of the plurality of functional diamond single crystal preparation cylinders. Support columns are fixedly installed on the inner bottom walls of the plurality of functional diamond single crystal preparation cylinders. Electromagnetic heaters are fixedly installed at the tops of the plurality of support columns. Growth dishes are fixedly installed at the tops of the plurality of electromagnetic heaters. An installation groove is opened at the central part of the top of the preparation table. A vacuum pumping assembly is arranged in the installation groove, and the vacuum pumping assembly is used to perform vacuum pumping on the interiors of the plurality of functional diamond single crystal preparation cylinders. An installation cavity is opened inside the preparation table and is located below the grooves. A gas supply mechanism is arranged in the installation cavity. The gas supply mechanism includes a methane supply component and a hydrogen supply component. The methane supply component is used to transport methane into the interiors of the plurality of functional diamond single crystal preparation cylinders, and the hydrogen supply component is used to transport hydrogen into the interiors of the plurality of functional diamond single crystal preparation cylinders.

[0009] A further arrangement of the present application is that microwave generators are fixedly installed on one side of multiple grooves, waveguide probes are fixedly installed on one side of multiple functional diamond single crystal preparation cylinders, the output ends of the waveguide probes are located inside the functional diamond single crystal preparation cylinders, and multiple waveguide probes are electrically connected to the corresponding microwave generators respectively.

[0010] A further arrangement of the present application is that the vacuum pumping assembly includes a vacuum pump, a hollow air collecting disc, multiple first air extraction pipes and multiple first solenoid valves. The vacuum pump is fixedly installed on the bottom inner wall of the installation groove, the hollow air collecting disc is fixedly connected to the air extraction end of the vacuum pump, one ends of multiple first air extraction pipes are fixedly installed on the outer side wall of the hollow air collecting disc and are distributed in an equidistant annular shape, one ends of multiple first air extraction pipes are communicated with the inside of the hollow air collecting disc, the other ends of multiple first air extraction pipes respectively extend into the corresponding functional diamond single crystal preparation cylinders, and multiple first solenoid valves are respectively fixedly installed on the corresponding first air extraction pipes.

[0011] A further arrangement of the present application is that a temperature sensor and a pressure sensor are fixedly installed on one inner wall of the functional diamond single crystal preparation cylinder.

[0012] A further arrangement of the present application is that the methane supply assembly includes a hollow air distribution disc one, multiple methane delivery branch pipes, multiple gas flow control valves one, a methane delivery main pipe and a second solenoid valve. The hollow air distribution disc one is fixedly installed on the top inner wall of the installation cavity, one ends of multiple methane delivery branch pipes are fixedly installed on the outer side wall of the hollow air distribution disc one and are distributed in an equidistant annular shape, one ends of multiple methane delivery branch pipes are communicated with the inside of the hollow air distribution disc one, the other ends of multiple methane delivery branch pipes respectively extend into the corresponding functional diamond single crystal preparation cylinders, multiple gas flow control valves one are respectively fixedly installed on the corresponding methane delivery branch pipes, one end of the methane delivery main pipe is fixedly communicated with one side of the hollow air distribution disc one, the other end of the methane delivery main pipe extends outside the preparation table, and the second solenoid valve is fixedly installed on the methane delivery main pipe.

[0013] A further arrangement of the present application is that the hydrogen supply assembly includes a hollow air distribution disc two, multiple hydrogen delivery branch pipes, multiple gas flow control valves two, a hydrogen delivery main pipe and a third solenoid valve. The hollow air distribution disc two is fixedly installed on the bottom inner wall of the installation cavity, one ends of multiple hydrogen delivery branch pipes are fixedly installed on the outer side wall of the hollow air distribution disc two and are distributed in an equidistant annular shape, one ends of multiple hydrogen delivery branch pipes are communicated with the inside of the hollow air distribution disc two, the other ends of multiple hydrogen delivery branch pipes respectively extend into the corresponding functional diamond single crystal preparation cylinders, multiple gas flow control valves two are respectively fixedly installed on the corresponding hydrogen delivery branch pipes, one end of the hydrogen delivery main pipe is fixedly communicated with one side of the hollow air distribution disc two, the other end of the hydrogen delivery main pipe extends outside the preparation table, and the third solenoid valve is fixedly installed on the hydrogen delivery main pipe.

[0014] A further setting of the present application is that a methane sensor and a hydrogen sensor are fixedly installed on the inner wall of one side of the functional diamond single crystal preparation cylinder.

[0015] A further setting of the present application is that a gas discharge assembly is further provided in the installation cavity. The gas discharge assembly is used to extract methane and hydrogen inside a plurality of functional diamond single crystal preparation cylinders. The gas discharge assembly includes an annular pipe, an exhaust pump, a plurality of second suction pipes, a plurality of solenoid valves IV, a mixed gas input pipe and a mixed gas output pipe. The annular pipe and the exhaust pump are both fixedly installed on the bottom inner wall of the installation cavity. The bottom ends of the plurality of second suction pipes are fixedly communicated with the annular pipe. The top ends of the plurality of second suction pipes respectively extend into the corresponding functional diamond single crystal preparation cylinders. The plurality of solenoid valves IV are respectively fixedly installed on the corresponding second suction pipes. One end of the mixed gas input pipe is fixedly communicated with one side of the annular pipe. The other end of the mixed gas input pipe is fixedly connected to the suction end of the exhaust pump. One end of the mixed gas output pipe is fixedly connected to the discharge end of the exhaust pump. The other end of the mixed gas output pipe extends outside the preparation table.

[0016] A further setting of the present application is that a U-shaped handle is fixedly installed on the top of the sealing cover. A sealing ring is fixedly installed on the outer side wall of the sealing cover. The outer ring of the sealing ring is in sliding sealing contact with the inner side wall of the groove. A vacuum breaking pipe is fixedly installed on the top of the sealing cover. One end of the vacuum breaking pipe is communicated with the inside of the functional diamond single crystal preparation cylinder. A vacuum breaking valve is fixedly installed on the vacuum breaking pipe.

[0017] A further setting of the present application is that heat dissipation holes are formed in the outer side wall of the installation cavity. The number of the heat dissipation holes is not less than two and they are evenly distributed.

[0018] The present application includes at least one of the following beneficial technical effects:

[0019] 1. By designing a vacuum pumping assembly, the present application can simultaneously perform vacuum pumping treatment on the inside of a plurality of functional diamond single crystal preparation cylinders, creating an oxygen-free growth environment for the functional diamond single crystal, and effectively reducing the interference of impurities on the growth of the functional diamond single crystal.

[0020] 2. By designing multiple functional diamond single crystal preparation cylinders, the present application can simultaneously produce and prepare multiple functional diamond single crystals, improving the production and preparation efficiency. The gas supply mechanism composed of the methane supply component and the hydrogen supply component can inject specific proportions of methane and hydrogen into each of the multiple functional diamond single crystal preparation cylinders respectively. The microwave generator generates microwaves with a specific frequency, which are transmitted to the inside of the functional diamond single crystal preparation cylinder through the waveguide probe, and can excite the reaction gas to form plasma. The electromagnetic heater is used to heat the internal space of the functional diamond single crystal preparation cylinder. The temperature sensor, pressure sensor, methane sensor, and hydrogen sensor can respectively monitor the temperature, pressure, methane concentration, and hydrogen concentration inside the cylinder in real time, thereby facilitating the operator to adjust the control parameters in a timely manner according to the data, meeting the requirements for temperature, pressure, methane concentration, and hydrogen concentration during the growth of multiple functional diamond single crystals respectively, ensuring that multiple functional diamond single crystals grow in the most suitable environment respectively, and effectively improving the growth quality and production and preparation efficiency of functional diamond single crystals.

[0021] 3. By designing the gas discharge component, before taking out the functional diamond single crystal from the functional diamond single crystal preparation cylinder after its growth is completed, the excess methane and hydrogen in each functional diamond single crystal preparation cylinder can be timely extracted, preventing safety accidents caused by gas accumulation, and at the same time avoiding pollution caused by the discharge of unreacted gas into the environment, meeting the requirements of safe production and environmental protection. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0023] Figure 1 It is the front view three-dimensional structure schematic diagram of this embodiment.

[0024] Figure 2 It is the front view cross-sectional three-dimensional structure schematic diagram of this embodiment.

[0025] Figure 3 It is the three-dimensional structure schematic diagram of the functional diamond single crystal preparation cylinder.

[0026] Figure 4 It is the cross-sectional three-dimensional structure schematic diagram of the functional diamond single crystal preparation cylinder.

[0027] Figure 5 It is the three-dimensional structure schematic diagram of the vacuum pumping component.

[0028] Figure 6It is a schematic three-dimensional structure diagram of the methane supply component.

[0029] Figure 7 It is a schematic three-dimensional structure diagram of the hydrogen supply component.

[0030] Figure 8 It is a schematic three-dimensional structure diagram of the gas discharge component.

[0031] In the figure, 1 is a preparation table; 2 is a groove; 3 is a functional diamond single crystal preparation cylinder; 4 is a sealing cover; 5 is a support column; 6 is an electromagnetic heater; 7 is a growth dish; 8 is a mounting groove; 9 is a vacuum pumping component, 91 is a vacuum pump, 92 is a hollow gas collecting plate, 93 is a first suction pipe, 94 is a first solenoid valve; 10 is a mounting cavity; 11 is a methane supply component, 111 is a first hollow gas distribution plate, 112 is a methane delivery branch pipe, 113 is a first gas flow control valve, 114 is a methane delivery main pipe, 115 is a second solenoid valve; 12 is a hydrogen supply component, 121 is a second hollow gas distribution plate, 122 is a hydrogen delivery branch pipe, 123 is a second gas flow control valve, 124 is a hydrogen delivery main pipe, 125 is a third solenoid valve; 13 is a gas discharge component, 131 is an annular pipe, 132 is an exhaust pump, 133 is a second suction pipe, 134 is a fourth solenoid valve, 135 is a mixed gas input pipe, 136 is a mixed gas output pipe; 14 is a microwave generator; 15 is a waveguide probe; 16 is a temperature sensor; 17 is a pressure sensor; 18 is a methane sensor; 19 is a hydrogen sensor; 20 is a U-shaped handle; 21 is a sealing ring; 22 is a vacuum break pipe; 23 is a vacuum break valve; 24 is a heat dissipation hole. Detailed implementation manners

[0032] Next, the technical solutions of the present application will be clearly and completely described in conjunction with specific embodiments. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the scope of protection of the present application.

[0033] See Figures 1 - 8, this application provides a functional diamond single crystal preparation device for precisely controlling the growth environment, including a preparation table 1. A plurality of grooves 2 are formed at equal intervals in a circular distribution on the top of the preparation table 1. Functional diamond single crystal preparation cylinders 3 are fixedly installed in the plurality of grooves 2. The top of the functional diamond single crystal preparation cylinder 3 is an open structure. Sealing caps 4 are threadedly installed on the tops of the plurality of functional diamond single crystal preparation cylinders 3. It should be noted that an observation window (not shown in this text and is a mature technology in the art) is provided on each sealing cap 4 to facilitate observing the growth of functional diamond single crystals in the internal space of the functional diamond single crystal preparation cylinder 3. Support columns 5 are fixedly installed on the bottom inner walls of the plurality of functional diamond single crystal preparation cylinders 3. Electromagnetic heaters 6 are fixedly installed at the tops of the plurality of support columns 5. Growth dishes 7 are fixedly installed on the tops of the plurality of electromagnetic heaters 6. The electromagnetic heater 6 is used to heat the internal space of the functional diamond single crystal preparation cylinder 3, and the heating temperature is controlled between 800°C and 1200°C. The growth dish 7 is used to carry and place diamond seeds. An installation groove 8 is formed at the central part of the top of the preparation table 1. A vacuum pumping assembly 9 is arranged in the installation groove 8. The vacuum pumping assembly 9 is used to pump the internal space of the plurality of functional diamond single crystal preparation cylinders 3 into a vacuum. The vacuum pumping assembly 9 includes a vacuum pump 91, a hollow air collecting disc 92, a plurality of first air extraction pipes 93, and a plurality of electromagnetic valves 94. The vacuum pump 91 is fixedly installed on the bottom inner wall of the installation groove 8. The hollow air collecting disc 92 is fixedly connected to the air extraction end of the vacuum pump 91. One ends of the plurality of first air extraction pipes 93 are fixedly installed on the outer side wall of the hollow air collecting disc 92 and are arranged in a circular distribution at equal intervals. One ends of the plurality of first air extraction pipes 93 are communicated with the inside of the hollow air collecting disc 92. The other ends of the plurality of first air extraction pipes 93 respectively extend into the corresponding functional diamond single crystal preparation cylinders 3. The plurality of electromagnetic valves 94 are respectively fixedly installed on the corresponding first air extraction pipes 93. The vacuum pumping assembly composed of the vacuum pump 91, the hollow air collecting disc 92, the plurality of first air extraction pipes 93, and the plurality of electromagnetic valves 94 can simultaneously pump the internal spaces of the plurality of functional diamond single crystal preparation cylinders 3 into a vacuum, quickly create an oxygen-free growth environment, and effectively reduce the interference of impurities on the growth of functional diamond single crystals.

[0034] In this embodiment, an installation cavity 10 is formed in the preparation table 1 below the groove 2. A gas supply mechanism is arranged in the installation cavity 10. The gas supply mechanism includes a methane supply component 11 and a hydrogen supply component 12. The methane supply component 11 is used to transport methane into the internal spaces of the plurality of functional diamond single crystal preparation cylinders 3. The hydrogen supply component 12 is used to transport hydrogen into the internal spaces of the plurality of functional diamond single crystal preparation cylinders 3.

[0035] In this embodiment, the methane supply assembly 11 includes a hollow air distribution plate 111, a plurality of methane delivery branch pipes 112, a plurality of gas flow control valves 113, a methane delivery main pipe 114, and a solenoid valve 115. The hollow air distribution plate 111 is fixedly installed on the top inner wall of the installation cavity 10. One ends of the plurality of methane delivery branch pipes 112 are fixedly installed on the outer side wall of the hollow air distribution plate 111 and are distributed in an equidistant annular pattern. One ends of the plurality of methane delivery branch pipes 112 are connected to the inside of the hollow air distribution plate 111. The other ends of the plurality of methane delivery branch pipes 112 respectively extend into the corresponding functional diamond single crystal preparation cylinders 3. The plurality of gas flow control valves 113 are respectively fixedly installed on the corresponding methane delivery branch pipes 112. One end of the methane delivery main pipe 114 is fixedly connected to one side of the hollow air distribution plate 111. The other end of the methane delivery main pipe 114 extends outside the preparation table 1. The solenoid valve 115 is fixedly installed on the methane delivery main pipe 114. The methane supply assembly 11 composed of the hollow air distribution plate 111, the plurality of methane delivery branch pipes 112, the plurality of gas flow control valves 113, the methane delivery main pipe 114, and the solenoid valve 115 can accurately deliver methane into the plurality of functional diamond single crystal preparation cylinders 3 respectively, and precisely control the flow rate of methane through the gas flow control valves 113 to meet the proportional requirements of different gases for the growth of functional diamond single crystals. Methane is the main carbon source of functional diamond single crystals. Under the action of microwave plasma, methane molecules are excited and decomposed to generate carbon-containing active groups such as methyl and methylene. These active groups are deposited on the surface of the diamond seed crystal and gradually form the carbon-carbon covalent bond structure of diamond through chemical reactions, realizing the growth of functional diamond single crystals. Moreover, the concentration of methane has a significant impact on the growth rate and quality of functional diamond single crystals. By increasing the methane concentration, more carbon sources can be provided, and within a certain range, the growth rate of functional diamond single crystals can be accelerated. However, if the methane concentration is too high, the deposition of non-diamond carbon (such as graphite, amorphous carbon, etc.) will increase, reducing the quality and purity of functional diamond single crystals. It should be added that one end of the methane delivery main pipe 114 is connected to an external methane supply bottle.

[0036] In this embodiment, the hydrogen supply assembly 12 includes a hollow gas distribution disk II 121, a plurality of hydrogen delivery branch pipes 122, a plurality of gas flow control valves II 123, a hydrogen delivery main pipe 124, and a solenoid valve III 125. The hollow gas distribution disk II 121 is fixedly installed on the bottom inner wall of the installation cavity 10. One ends of the plurality of hydrogen delivery branch pipes 122 are fixedly installed on the outer side wall of the hollow gas distribution disk II 121 and are distributed in an equidistant annular manner. One ends of the plurality of hydrogen delivery branch pipes 122 are communicated with the inside of the hollow gas distribution disk II 121. The other ends of the plurality of hydrogen delivery branch pipes 122 respectively extend into the corresponding functional diamond single crystal preparation cylinders 3. The plurality of gas flow control valves II 123 are respectively fixedly installed on the corresponding hydrogen delivery branch pipes 122. One end of the hydrogen delivery main pipe 124 is fixedly communicated with one side of the hollow gas distribution disk II 121. The other end of the hydrogen delivery main pipe 124 extends outside the preparation table 1. The solenoid valve III 125 is fixedly installed on the hydrogen delivery main pipe 124. The hydrogen supply assembly composed of the hollow gas distribution disk II 121, the plurality of hydrogen delivery branch pipes 122, the plurality of gas flow control valves II 123, the hydrogen delivery main pipe 124, and the solenoid valve III 125 can accurately deliver hydrogen into the plurality of functional diamond single crystal preparation cylinders 3, and accurately control the flow rate of hydrogen through the gas flow control valves II 123 to meet the proportional requirements of different gases for the growth of functional diamond single crystals. Hydrogen is a good plasma working gas. Under the action of microwaves, hydrogen molecules are excited and ionized to form hydrogen plasma, providing the required energy and active environment for the decomposition of reaction gases such as methane. The hydrogen atoms generated by hydrogen in the plasma state have strong activity and can react with the surface of the diamond seed crystal and non-diamond carbon (such as graphite and amorphous carbon) in the plasma to etch it away, so as to ensure that only the diamond phase can grow on the diamond seed crystal, improving the purity and quality of the functional diamond single crystal. Moreover, hydrogen can change parameters such as the temperature, density, and chemical composition of the plasma by adjusting the gas flow rate and ratio, thereby affecting the growth rate, crystal structure, and surface quality of the functional diamond single crystal. For example, increasing the hydrogen flow rate can reduce the carbon concentration in the plasma and reduce the deposition of non-diamond carbon, which is beneficial to obtaining high-quality functional diamond single crystals. It should be added that one end of the hydrogen delivery main pipe 124 is connected to an external hydrogen supply bottle.

[0037] In this embodiment, a microwave generator 14 is fixedly installed on one side of each of the multiple grooves 2, and a waveguide probe 15 is fixedly installed on one side of each of the multiple functional diamond single crystal preparation cylinders 3. The output end of the waveguide probe 15 is located inside the functional diamond single crystal preparation cylinder 3. The multiple waveguide probes 15 are respectively electrically connected to the corresponding microwave generators 14. Microwaves of a specific frequency are generated by the microwave generators 14 and transmitted to the inside of the functional diamond single crystal preparation cylinder 3 through the waveguide probes 15, which can excite the reaction gas to form a plasma. Moreover, by adjusting the power of the microwave generator, the energy and density of the plasma can be precisely controlled, thereby ensuring the growth rate and quality of the functional diamond single crystal.

[0038] In this embodiment, a temperature sensor 16 and a pressure sensor 17 are fixedly installed on the inner wall of one side of the functional diamond single crystal preparation cylinder 3, and a methane sensor 18 and a hydrogen sensor 19 are fixedly installed on the inner wall of one side of the functional diamond single crystal preparation cylinder 3. By installing the temperature sensor 16, the pressure sensor 17, the methane sensor 18, and the hydrogen sensor 19 inside the functional diamond single crystal preparation cylinder 3, these sensors can respectively monitor the temperature, pressure, methane concentration, and hydrogen concentration inside the cylinder in real time, facilitating the operator to adjust the equipment parameters in a timely manner according to the data, ensuring the growth of the functional diamond single crystal in the most suitable environment, and effectively improving the growth quality and production efficiency of the functional diamond single crystal.

[0039] In this embodiment, a gas discharge assembly 13 is further provided in the installation cavity 10. The gas discharge assembly 13 is used to extract methane and hydrogen inside the plurality of functional diamond single crystal preparation cylinders 3. The gas discharge assembly 13 includes an annular pipe 131, an exhaust pump 132, a plurality of second extraction pipes 133, a plurality of solenoid valves four 134, a mixed gas input pipe 135, and a mixed gas output pipe 136. The annular pipe 131 and the exhaust pump 132 are both fixedly installed on the bottom inner wall of the installation cavity 10. The bottom ends of the plurality of second extraction pipes 133 are fixedly communicated with the annular pipe 131. The top ends of the plurality of second extraction pipes 133 respectively extend into the corresponding functional diamond single crystal preparation cylinders 3. The plurality of solenoid valves four 134 are respectively fixedly installed on the corresponding second extraction pipes 133. One end of the mixed gas input pipe 135 is fixedly communicated with one side of the annular pipe 131. The other end of the mixed gas input pipe 135 is fixedly connected to the suction end of the exhaust pump 132. One end of the mixed gas output pipe 136 is fixedly connected to the discharge end of the exhaust pump 132. The other end of the mixed gas output pipe 136 extends outside the preparation table 1. When the growth of the functional diamond single crystal is completed, before taking it out of the functional diamond single crystal preparation cylinder 3, the gas discharge assembly 13 composed of the annular pipe 131, the exhaust pump 132, the plurality of second extraction pipes 133, the plurality of solenoid valves four 134, the mixed gas input pipe 135, and the mixed gas output pipe 136 can timely extract the excess methane and hydrogen in each functional diamond single crystal preparation cylinder 3, prevent safety accidents caused by gas accumulation, and avoid polluting the environment by discharging unreacted gas, meeting the requirements of safe production and environmental protection. It should be added that one end of the mixed gas output pipe 136 is connected to the inlet end of an external gas separation device, and the gas separation device can be used to separate and process methane and hydrogen in the mixed gas for subsequent reuse.

[0040] In this embodiment, a U-shaped handle 20 is fixedly installed on the top of the sealing cover 4. A sealing ring 21 is fixedly installed on the outer side wall of the sealing cover 4. The outer ring of the sealing ring 21 is in sliding sealing contact with the inner side wall of the groove 2. A vacuum break pipe 22 is fixedly installed on the top of the sealing cover 4. One end of the vacuum break pipe 22 is communicated with the inside of the functional diamond single crystal preparation cylinder 3. A vacuum break valve 23 is fixedly installed on the vacuum break pipe 22. The design of the U-shaped handle 20 facilitates the operator to open and close the sealing cover 4. The design of the sealing ring 21 ensures the sealing effect inside the groove 2. The design of the vacuum break pipe 22 and the vacuum break valve 23 facilitates quickly balancing the air pressure inside and outside the functional diamond single crystal preparation cylinder 3 after the experiment is completed, making it easy to take out the sample.

[0041] In this embodiment, heat dissipation holes 24 are formed in the outer sidewall of the installation cavity 10. The number of the heat dissipation holes 24 is not less than two and they are evenly distributed. The design of the heat dissipation holes 24 can timely dissipate the heat generated during the operation of the device, avoid affecting the performance and service life of the device due to excessive temperature, and ensure the long-term stable operation of the device.

[0042] In this embodiment, it should be further noted that a controller is fixedly installed on the outer sidewall of the preparation table 1. A display screen and a plurality of control buttons are arranged on the controller. A plurality of electromagnetic heaters 6, a plurality of vacuum pumps 91, a first electromagnetic valve 94, a first gas flow control valve 113, a second electromagnetic valve 115, a second gas flow control valve 123, a third electromagnetic valve 125, an exhaust pump 132, a fourth electromagnetic valve 134, a microwave generator 14, a temperature sensor 16, a pressure sensor 17, a methane sensor 18, and a hydrogen sensor 19 are all electrically connected to the controller. The display screen is used to display the temperature, pressure, methane concentration, and hydrogen concentration values in each functional diamond single crystal preparation cylinder 3. The plurality of control buttons are used to respectively control the operation of the electromagnetic heaters 6, the vacuum pumps 91, the first electromagnetic valve 94, the first gas flow control valve 113, the second electromagnetic valve 115, the second gas flow control valve 123, the third electromagnetic valve 125, the exhaust pump 132, the fourth electromagnetic valve 134, the microwave generator 14, the temperature sensor 16, the pressure sensor 17, the methane sensor 18, and the hydrogen sensor 19.

[0043] With the above structure, when the functional diamond single crystal preparation device for precisely regulating the growth environment provided by the present application is in use, first, unscrew a plurality of sealing caps 4 in sequence, put a plurality of different diamond seeds into the plurality of growth dishes 7 in sequence, and then install the plurality of sealing caps 4 back onto the corresponding functional diamond single crystal preparation cylinders 3 in sequence; then, open the plurality of first electromagnetic valves 94 and start the vacuum pumps 91 to run, so that the air inside the plurality of functional diamond single crystal preparation cylinders 3 can be pumped out simultaneously, gradually creating a vacuum inside the plurality of functional diamond single crystal preparation cylinders 3, creating an oxygen-free environment, reducing impurity interference. By using the plurality of pressure sensors 17, the pressure values inside the plurality of functional diamond single crystal preparation cylinders 3 can be respectively monitored. After the inside of the plurality of functional diamond single crystal preparation cylinders 3 is evacuated, stop the operation of the vacuum pumps 91 and close the plurality of first electromagnetic valves 94;

[0044] Open the plurality of electromagnetic heaters 6, which can respectively heat the internal spaces of the corresponding functional diamond single crystal preparation cylinders 3. By using the plurality of temperature sensors 16, the temperature values inside the plurality of functional diamond single crystal preparation cylinders 3 can be respectively monitored, thereby ensuring that the temperature of the growth environment of each diamond seed is appropriate;

[0045] Meanwhile, solenoid valve two 115 and multiple gas flow control valves one 113 are opened. Methane flows into the first hollow air distribution plate 111 through the main methane delivery pipe 114, and then is injected into the corresponding functional diamond single crystal preparation cylinders 3 respectively through multiple methane delivery branch pipes 112. By using the gas flow control valves one 113, the methane inlet flow can be accurately controlled. Multiple methane sensors 18 can be used to respectively monitor the methane content inside the multiple functional diamond single crystal preparation cylinders 3 in real time. When specific proportions of methane are injected into the multiple functional diamond single crystal preparation cylinders 3 respectively; solenoid valve three 125 and multiple gas flow control valves two 123 are opened. Hydrogen flows into the second hollow air distribution plate 121 through the main hydrogen delivery pipe 124, and then is injected into the corresponding functional diamond single crystal preparation cylinders 3 respectively through multiple hydrogen delivery branch pipes 122. By using the gas flow control valves two 123, the hydrogen inlet flow can be accurately controlled. Multiple hydrogen sensors 19 can be used to respectively monitor the hydrogen content inside the multiple functional diamond single crystal preparation cylinders 3 in real time. When specific proportions of methane and hydrogen are injected into the multiple functional diamond single crystal preparation cylinders 3 respectively, solenoid valve two 115 and multiple gas flow control valves one 113 as well as solenoid valve three 125 and multiple gas flow control valves two 123 are closed, thus meeting the requirements of methane and hydrogen in the growth process of various functional diamond single crystals. During the growth process, operators can conveniently adjust the equipment parameters in a timely manner according to the data to ensure that the functional diamond single crystals grow in the most suitable environment, effectively improving the growth quality and production efficiency of the functional diamond single crystals;

[0046] By starting the operation of multiple microwave generators 14, the multiple microwave generators 14 respectively generate microwaves with specific frequencies and transmit them to the inside of the corresponding functional diamond single crystal preparation cylinders 3 through the corresponding waveguide probes 15, thereby being able to excite the reaction gas to form a plasma, and the energy and density of the plasma can be precisely controlled, thus ensuring the growth rate and quality of the functional diamond single crystals in each cylinder;

[0047] When the growth and preparation of the multifunctional diamond single crystals are completed, multiple electromagnetic heaters 6 and multiple microwave generators 14 are closed. Then, multiple solenoid valves four 134 are opened, and the exhaust pump 132 is controlled to operate, so that the remaining methane and hydrogen mixed gas in the multiple functional diamond single crystal preparation cylinders 3 can be pumped out. When the methane and hydrogen contents in the cylinders are respectively monitored by the methane sensors 18 and the hydrogen sensors 19 and reduced to the safe range until all are pumped out, multiple solenoid valves four 134 are closed, and the exhaust pump 132 stops operating. Finally, multiple sealing caps 4 can be unscrewed in sequence to take out the grown and prepared functional diamond single crystals.

[0048] The above has introduced in detail a functional diamond single crystal preparation device for precisely regulating the growth environment. Specific embodiments are used in this article to elaborate on the principle and implementation manner of this application. The description of the above embodiments is only used to help understand the method and its core idea of this application. It should be noted that for those of ordinary skill in the art, without departing from the principle of this application, several improvements and modifications can be made to this application, and these improvements and modifications also fall within the protection scope of the claims of this application.

Claims

1. A functional diamond single crystal preparation device for precisely regulating the growth environment, characterized in that It includes a preparation table (1). A plurality of grooves (2) are formed at the top of the preparation table (1) and are distributed in an equidistant annular pattern. Functional diamond single crystal preparation cylinders (3) are fixedly installed in the plurality of grooves (2). The top of the functional diamond single crystal preparation cylinder (3) is of an open structure. Sealing caps (4) are threadedly installed at the tops of the plurality of functional diamond single crystal preparation cylinders (3). Support columns (5) are fixedly installed on the inner walls of the bottoms of the plurality of functional diamond single crystal preparation cylinders (3). Electromagnetic heaters (6) are fixedly installed at the tops of the plurality of support columns (5). Growth dishes (7) are fixedly installed at the tops of the plurality of electromagnetic heaters (6). An installation groove (8) is formed at the central part of the top of the preparation table (1). A vacuum pumping assembly (9) is arranged in the installation groove (8). The vacuum pumping assembly (9) is used for performing vacuum pumping treatment on the interiors of the plurality of functional diamond single crystal preparation cylinders (3). An installation cavity (10) is formed in the preparation table (1) and is located below the grooves (2). A gas supply mechanism is arranged in the installation cavity (10). The gas supply mechanism includes a methane supply assembly (11) and a hydrogen supply assembly (12). The methane supply assembly (11) is used for conveying methane into the interiors of the plurality of functional diamond single crystal preparation cylinders (3). The hydrogen supply assembly (12) is used for conveying hydrogen into the interiors of the plurality of functional diamond single crystal preparation cylinders (3).

2. The functional diamond single crystal preparation device for precisely regulating the growth environment according to claim 1, wherein: Microwave generators (14) are fixedly installed on one side of the plurality of grooves (2). Waveguide probes (15) are fixedly installed on one side of the plurality of functional diamond single crystal preparation cylinders (3). The output end of the waveguide probe (15) is located inside the functional diamond single crystal preparation cylinder (3). The plurality of waveguide probes (15) are electrically connected to the corresponding microwave generators (14) respectively.

3. The functional diamond single crystal preparation device for precisely regulating the growth environment according to claim 1, wherein: The vacuum pumping assembly (9) includes a vacuum pump (91), a hollow air collecting disc (92), a plurality of first suction pipes (93) and a plurality of first solenoid valves (94). The vacuum pump (91) is fixedly installed on the bottom inner wall of the installation groove (8). The hollow air collecting disc (92) is fixedly connected to the suction end of the vacuum pump (91). One ends of the plurality of first suction pipes (93) are fixedly installed on the outer side wall of the hollow air collecting disc (92) and are distributed in an equidistant annular pattern. One ends of the plurality of first suction pipes (93) are communicated with the inside of the hollow air collecting disc (92). The other ends of the plurality of first suction pipes (93) extend into the corresponding functional diamond single crystal preparation cylinders (3) respectively. The plurality of first solenoid valves (94) are fixedly installed on the corresponding first suction pipes (93) respectively.

4. A functional diamond single crystal preparation device for precisely regulating the growth environment according to claim 1, characterized in that: A temperature sensor (16) and a pressure sensor (17) are fixedly installed on one inner wall of the functional diamond single crystal preparation cylinder (3).

5. The functional diamond single crystal preparation device for precisely regulating the growth environment according to claim 1, characterized in that: The methane supply component (11) includes a hollow air distribution disc one (111), a plurality of methane delivery branch pipes (112), a plurality of gas flow control valves one (113), a methane delivery main pipe (114), and a solenoid valve two (115). The hollow air distribution disc one (111) is fixedly installed on the top inner wall of the installation cavity (10). One ends of the plurality of methane delivery branch pipes (112) are fixedly installed on the outer side wall of the hollow air distribution disc one (111) and are distributed in an equidistant annular shape. One ends of the plurality of methane delivery branch pipes (112) are communicated with the inside of the hollow air distribution disc one (111). The other ends of the plurality of methane delivery branch pipes (112) respectively extend into the corresponding functional diamond single crystal preparation cylinders (3). The plurality of gas flow control valves one (113) are respectively fixedly installed on the corresponding methane delivery branch pipes (112). One end of the methane delivery main pipe (114) is fixedly communicated with one side of the hollow air distribution disc one (111). The other end of the methane delivery main pipe (114) extends outside the preparation table (1). The solenoid valve two (115) is fixedly installed on the methane delivery main pipe (114).

6. The functional diamond single crystal preparation device for precisely regulating the growth environment according to claim 1, characterized in that: The hydrogen supply component (12) includes a hollow air distribution disc two (121), a plurality of hydrogen delivery branch pipes (122), a plurality of gas flow control valves two (123), a hydrogen delivery main pipe (124), and a solenoid valve three (125). The hollow air distribution disc two (121) is fixedly installed on the bottom inner wall of the installation cavity (10). One ends of the plurality of hydrogen delivery branch pipes (122) are fixedly installed on the outer side wall of the hollow air distribution disc two (121) and are distributed in an equidistant annular shape. One ends of the plurality of hydrogen delivery branch pipes (122) are communicated with the inside of the hollow air distribution disc two (121). The other ends of the plurality of hydrogen delivery branch pipes (122) respectively extend into the corresponding functional diamond single crystal preparation cylinders (3). The plurality of gas flow control valves two (123) are respectively fixedly installed on the corresponding hydrogen delivery branch pipes (122). One end of the hydrogen delivery main pipe (124) is fixedly communicated with one side of the hollow air distribution disc two (121). The other end of the hydrogen delivery main pipe (124) extends outside the preparation table (1). The solenoid valve three (125) is fixedly installed on the hydrogen delivery main pipe (124).

7. A functional diamond single crystal preparation device for precisely regulating the growth environment according to claim 1, characterized in that: A methane sensor (18) and a hydrogen sensor (19) are fixedly installed on one inner wall of the functional diamond single crystal preparation cylinder (3).

8. A functional diamond single crystal preparation device for precisely regulating the growth environment according to claim 1, characterized in that: A gas discharge assembly (13) is further provided in the installation cavity (10). The gas discharge assembly (13) is used to extract methane and hydrogen inside the plurality of functional diamond single crystal preparation cylinders (3). The gas discharge assembly (13) includes an annular pipe (131), an exhaust pump (132), a plurality of second suction pipes (133), a plurality of solenoid valves four (134), a mixed gas input pipe (135) and a mixed gas output pipe (136). The annular pipe (131) and the exhaust pump (132) are both fixedly installed on the bottom inner wall of the installation cavity (10). The bottom ends of the plurality of second suction pipes (133) are fixedly communicated with the annular pipe (131). The top ends of the plurality of second suction pipes (133) respectively extend into the corresponding functional diamond single crystal preparation cylinders (3). The plurality of solenoid valves four (134) are respectively fixedly installed on the corresponding second suction pipes (133). One end of the mixed gas input pipe (135) is fixedly communicated with one side of the annular pipe (131). The other end of the mixed gas input pipe (135) is fixedly connected to the suction end of the exhaust pump (132). One end of the mixed gas output pipe (136) is fixedly connected to the discharge end of the exhaust pump (132). The other end of the mixed gas output pipe (136) extends outside the preparation table (1).

9. The functional diamond single crystal preparation device for precisely regulating the growth environment according to claim 1, wherein: A U-shaped handle (20) is fixedly installed on the top of the sealing cover (4). A sealing ring (21) is fixedly installed on the outer side wall of the sealing cover (4). The outer ring of the sealing ring (21) is in sliding sealing contact with the inner side wall of the groove (2). A vacuum breaking pipe (22) is fixedly installed on the top of the sealing cover (4). One end of the vacuum breaking pipe (22) is communicated with the inside of the functional diamond single crystal preparation cylinder (3). A vacuum breaking valve (23) is fixedly installed on the vacuum breaking pipe (22).

10. A functional diamond single crystal preparation device for precisely regulating the growth environment according to claim 1, characterized in that: Heat dissipation holes (24) are formed in the outer side wall of the installation cavity (10). The number of the heat dissipation holes (24) is not less than two and they are evenly distributed.

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