Method and device for measuring contours of inner surface and transition curved surface of micropore

Abstract

The invention provides a micropore inner surface and transition curved surface contour measurement method and device, and belongs to the technical field of optical measurement, and the device comprises three independent light paths, a spectrometer and a processing unit. The three light paths all adopt optical fiber-reflecting prism-dispersion superlens structures, light can irradiate the inner surface of the micropore and the contour of the transition curved surface by adjusting the position of a measuring head, and scanning of all scanning points on the surface is achieved. The spectrograph analyzes the reflection spectrum received by each optical fiber in real time, and extracts peak wavelength and light intensity data of a scanning point; the processing unit calculates the displacement value of each scanning point based on the wavelength-displacement mapping relation, reconstructs position information, and obtains the surface contour through data fitting. According to the invention, the volume limitation of a traditional spectrum confocal sensor is broken through, full-coverage detection of a complex surface is realized through cooperation of multi-angle light paths, and the problem of contour measurement of a micropore inner surface and a transition curved surface in the prior art is effectively solved.

Description

Technical Field

[0001] The present invention relates to the technical field of optical measurement, and particularly to a method and device for measuring the inner surface and transitional surface profile of a micro-hole. Background Art

[0002] The measurement of the inner surface and transitional surface profile of a micro-hole with a stepped diameter has always been a difficult problem in the industry. Existing non-contact measurement methods, including laser confocal, line laser, structured light, etc., have defects in one or several aspects such as large volume, difficulty in measuring highly reflective surfaces, and inability to measure features with high-curvature transitions, and thus cannot measure the inner surface and surface profile of a micro-hole. The spectral confocal sensing technology has significant application advantages such as high measurement accuracy and axial tomography ability, and has been widely used in fields such as electronic manufacturing, aerospace, laser nuclear fusion, automobiles, biology, and IC manufacturing.

[0003] However, due to the limitations of the lens material and structure of traditional lens-type spectral confocal displacement sensors, the minimum volume is limited and the tolerance angle is insufficient, making them inapplicable to the measurement of the inner surface and surface profile of micro-holes. Therefore, it is of great significance to develop a spectral confocal high-precision non-contact displacement sensor with the ability to measure micro-sizes and surface profiles. Summary of the Invention

[0004] The present invention provides a method and device for measuring the inner surface and transitional surface profile of a micro-hole, so as to solve the defects that traditional lens-type spectral confocal displacement sensors are limited by the lens material and structure, with a limited minimum volume and insufficient tolerance angle, and are inapplicable to the measurement of the inner surface and surface profile of micro-holes.

[0005] In a first aspect, the present invention provides a device for measuring the inner surface and transitional surface profile of a micro-hole, including: at least three optical paths, a spectrometer, and a processing unit; The at least three optical paths include: a first optical path, a second optical path, and a third optical path; The first optical path includes a first optical fiber, a first reflection prism, and a first dispersion superlens. The divergent light emitted by the first optical fiber is reflected by the first reflection prism to the first dispersion superlens and focused on the surface of the object to be measured through the first dispersion superlens; The second optical path includes a second optical fiber, a second reflection prism, and a second dispersion superlens. The divergent light emitted by the second optical fiber is reflected by the second reflection prism to the second dispersion superlens and focused on the surface of the object to be measured through the second dispersion superlens; The third optical path includes a third optical fiber, a third reflection prism, and a third dispersion superlens. The divergent light emitted by the third optical fiber is reflected by the third reflection prism to the third dispersion superlens and focused on the surface of the object to be measured through the third dispersion superlens; A spectrometer is used to analyze the reflected light from the surface of the object to be measured that returns along the original optical path and is received by the first optical fiber, the second optical fiber, and the third optical fiber respectively, and outputs the spectral wavelength sequence data and the corresponding light intensity sequence data of the scanning points corresponding to each optical path. A processing unit is configured as follows: Based on the spectral wavelength sequence data and the corresponding light intensity sequence data of each scanning point, obtain the peak wavelength of each scanning point, and determine the displacement value corresponding to each scanning point according to the peak wavelength of each scanning point. Based on the displacement value corresponding to each scanning point, determine the spatial position information of each scanning point. Fit the spatial position information of all scanning points to determine the surface profile of the object to be measured; the surface profile of the object to be measured includes the inner hole surface and the transition surface profile. Among them, the inner hole surface is determined by the scanning points corresponding to the first optical path. The transition surface profile is determined by the scanning points corresponding to all optical paths.

[0006] According to the micro-hole inner surface and transition surface profile measuring device provided by the present invention, the optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged at a preset inclination angle, corresponding to the regions of the surface of the object to be measured in different inclination angle ranges respectively.

[0007] According to the micro-hole inner surface and transition surface profile measuring device provided by the present invention, it further includes: a probe housing; the at least three optical paths are arranged inside the probe housing.

[0008] According to the micro-hole inner surface and transition surface profile measuring device provided by the present invention, the divergent light emitted by the optical fiber is wide-spectrum divergent light.

[0009] According to the micro-hole inner surface and transition surface profile measuring device provided by the present invention, determining the displacement value corresponding to each scanning point according to the peak wavelength of each scanning point includes: using a pre-determined mapping function to convert the peak wavelength into a displacement value.

[0010] According to the micro-hole inner surface and transition surface profile measuring device provided by the present invention, the mapping function is a polynomial.

[0011] In a second aspect, the present invention further provides a method for measuring the inner surface of a micro-hole and the transition surface profile, including: Projecting optical signals onto the surface of the object to be measured through at least three optical paths, where: The first optical path reflects the divergent light emitted by the first optical fiber through the first reflecting prism and focuses it onto the surface of the object to be measured through the first dispersive superlens. The second optical path reflects the divergent light emitted by the second optical fiber through the second reflecting prism and focuses it onto the surface of the object to be measured through the second dispersive superlens; The third optical path reflects the divergent light emitted by the third optical fiber through the third reflecting prism and focuses it onto the surface of the object to be measured through the third dispersive superlens; The reflected light from the surface of the object to be measured returning along the original optical path is received through the first optical fiber, the second optical fiber, and the third optical fiber respectively, and the reflected light is analyzed by a spectrometer to output the spectral wavelength sequence data and the light intensity sequence data of the corresponding scanning points of each optical path; Based on the spectral wavelength sequence data and the corresponding light intensity sequence data of each scanning point, the peak wavelength of each scanning point is obtained, and the displacement value corresponding to each scanning point is determined according to the peak wavelength of each scanning point; Based on the displacement value corresponding to each scanning point, the spatial position information of each scanning point is determined; The spatial position information of all scanning points is fitted to determine the surface profile of the object to be measured; the surface profile of the object to be measured includes the inner hole surface and the transition surface profile; Among them, the inner hole surface is determined by the scanning points corresponding to the first optical path; The transition surface profile is determined by the scanning points corresponding to all optical paths.

[0012] According to the method for measuring the inner surface of a micro-hole and the transition surface profile provided by the present invention, the optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged at a preset inclination angle, corresponding to the regions of the surface of the object to be measured in different inclination angle ranges.

[0013] According to the method for measuring the inner surface of a micro-hole and the transition surface profile provided by the present invention, the divergent light in each optical path is wide-spectrum divergent light.

[0014] According to the method for measuring the inner surface of a micro-hole and the transition surface profile provided by the present invention, determining the displacement value corresponding to each scanning point according to the peak wavelength of each scanning point includes: converting the peak wavelength into a displacement value by using a pre-determined mapping function.

[0015] By adopting the structural design of a multi-optical-path integrated dispersion superlens, the present invention effectively breaks through the limitations of large volume and small tolerance angle of traditional spectral confocal sensors, and realizes high-precision non-contact measurement of the inner surface and transitional surface profile of microholes. By using three groups of dispersion superlens optical paths for collaborative measurement, not only the volume of the sensor is compressed to adapt to narrow spaces, but also the detection ability of complex surfaces (including high-curvature transitional features) is improved through multi-angle optical path coverage. Combining the axial tomography advantage of spectral confocal technology, it can accurately extract the displacement values corresponding to the peak wavelengths of each scanning point, and reconstruct the surface topography through three-dimensional space data fitting, solving the industry pain points that traditional measurement technologies are difficult to take into account small apertures, complex surfaces, etc. in the fields of electronic manufacturing, aerospace, etc. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0017] Figure 1 is one of the optical path schematic diagrams of the measuring device provided by the present invention; Figure 2 is the second optical path schematic diagram of the measuring device provided by the present invention; Figure 3 is the schematic diagram of the measuring process of the dispersion superlens of the device provided by the present invention; Figure 4 is the schematic diagram of the corresponding measurement ranges of different dispersion superlenses provided by the present invention; Figure 5 is the schematic flow diagram of the method for measuring the inner surface and transitional surface profile of microholes provided by the present invention; Among them, the reference numerals are: 1: First reflecting prism; 2: Second reflecting prism; 3: Third reflecting prism; 4: First optical fiber; 5: Second optical fiber; 6: Third optical fiber; 7: First dispersion superlens; 8: Second dispersion superlens; 9: Third dispersion superlens; 10: Probe housing; 11: Object to be measured; 12: Spectrometer; 13: Surface of the object to be measured; 14: Light source. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0018] To make the objectives, technical solutions and advantages of the present invention more clear, the following will clearly and completely describe the technical solutions in the present invention in conjunction with the accompanying drawings in the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the protection scope of the present invention.

[0019] It should be noted that in the description of the embodiments of the present invention, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or further includes elements inherent to such process, method, article or device. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0020] The terms "first", "second", etc. in this application are used to distinguish similar objects, rather than to describe a specific order or sequence. It should be understood that such terms can be interchanged under appropriate circumstances so that the embodiments of this application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are usually of the same type, and the number of objects is not limited. For example, the first object can be one or multiple.

[0021] Figure 1 is one of the optical path diagrams of the measuring device provided by the present invention, Figure 2 is the second optical path diagram of the measuring device provided by the present invention, Figure 3 is the schematic diagram of the measurement process of the dispersion superlens of the device provided by the present invention. The following refers to Figures 1 to 3 to illustrate the solution of the present invention.

[0022] The measuring device for the inner surface and transition surface profile of microholes provided by the present invention includes: at least three optical paths, a spectrometer 12, and a processing unit; At least three optical paths include: a first optical path, a second optical path, and a third optical path; optionally, the at least three optical paths are arranged in the probe housing 10.

[0023] The first optical path includes a first optical fiber 4, a first reflection prism 1, and a first dispersion superlens 7. The divergent light emitted by the first optical fiber 4 is reflected by the first reflection prism 1 to the first dispersion superlens 7 and focused on the surface 13 of the object to be measured through the first dispersion superlens 7; The second optical path includes a second optical fiber 5, a second reflecting prism 2, and a second dispersive superlens 8. The divergent light emitted by the second optical fiber 5 is reflected by the second reflecting prism 2 to the second dispersive superlens 8 and focused on the surface 13 of the object to be measured through the second dispersive superlens 8. The third optical path includes a third optical fiber 6, a third reflecting prism 3, and a third dispersive superlens 9. The divergent light emitted by the third optical fiber 6 is reflected by the third reflecting prism 3 to the third dispersive superlens 9 and focused on the surface 13 of the object to be measured through the third dispersive superlens 9. A spectrometer 12 for analyzing the reflected light of the surface 13 of the object to be measured returned along the original optical path respectively received by the first optical fiber 4, the second optical fiber 5, and the third optical fiber 6, and outputting spectral wavelength sequence data and corresponding light intensity sequence data of the scanning points corresponding to each optical path. A processing unit configured as: According to the spectral wavelength sequence data and the corresponding light intensity sequence data of each scanning point, obtaining the peak wavelength of each scanning point, and determining the displacement value corresponding to each scanning point according to the peak wavelength of each scanning point; According to the displacement value corresponding to each scanning point, determining the spatial position information of each scanning point; Fitting the spatial position information of all the scanning points to determine the surface profile of the object to be measured 11; the surface profile of the object to be measured 11 includes an inner hole surface and a transition surface profile; Among them, the inner hole surface (which can be understood as the horizontal surface of the inner hole) is determined by the scanning points corresponding to the first optical path; the transition surface profile is determined by the scanning points corresponding to all the optical paths.

[0024] Optionally, the divergent light emitted by the optical fiber is broadband divergent light; among them, Figure 1 shows the optical path for measuring the inner hole surface of the present invention, Figure 2 shows the optical path for measuring the transition surface profile of the present invention.

[0025] The core structure of the device of the present invention will be described below: (1) Description of each component in the first optical path, the second optical path, and the third optical path Optical fiber: used to receive the light emitted by the light source and emit divergent light; Reflecting prism: adjusts the optical path direction to make the divergent light incident on the dispersive superlens at a specific angle.

[0026] Dispersive superlens: utilizes its linear relationship between wavelength and focal length to focus lights of different wavelengths to different depth positions of the surface profile of the object to be measured.

[0027] (2) Arrangement of the dispersive superlens Figure 4Schematic diagram of the corresponding measurement ranges of different dispersion superlenses provided by the present invention, as Figure 4 shown, the optical axes of the first dispersion superlens, the second dispersion superlens, and the third dispersion superlens are arranged at a preset tilt angle, corresponding to the regions of the surface of the object to be measured within different tilt angle ranges. Among them, the tilt angle refers to the angle of deviation compared to the normal.

[0028] Specifically, when performing surface profile measurement, due to the limited tolerance angle θ of a single first dispersion superlens 7, when the surface of the object to be measured is tilted too much, the light emitted by the first dispersion superlens 7 cannot return to the first dispersion superlens 7. Therefore, the second dispersion superlens 8 and the third dispersion superlens 9 are configured to correspond to the surfaces of the object to be measured within different tilt angle ranges. For example, the tilt angle range corresponding to the first dispersion superlens 7 is 0 to 20°, the tilt angle range corresponding to the second dispersion superlens 8 is 20 to 40°, and the tilt angle range corresponding to the third dispersion superlens 9 is 40 to 60°.

[0029] (3) Determine the displacement value corresponding to each scan point according to the peak wavelength of each scan point, including: using a pre-determined mapping function to convert the peak wavelength into a displacement value. Among them, the mapping function can be a polynomial.

[0030] Taking the first dispersion superlens 7 as an example, the measurement process of a single dispersion superlens is described (the measurement methods of other optical paths are basically the same except for the differences in the optical paths and will not be elaborated one by one): As Figure 3 shown, the light source 14 generates polychromatic light, emits divergent light through the first optical fiber 4, and after passing through the first dispersion superlens 7, the light of different wavelengths in the polychromatic light is focused at different positions. The focusing position of the long-wavelength light is closer to the first dispersion superlens 7, and the focusing position of the short-wavelength light is farther from the first dispersion superlens 7, forming a measurement range S. At this time, when the surface 13 of the object to be measured is within the measurement range S, the light reflected by the surface 13 of the object to be measured passes through the first dispersion superlens 7 and returns to the first optical fiber 4. The reflected light passes through the first optical fiber 4 and reaches the spectrometer 12. The spectrometer 12 obtains a measurement signal. When the surface 13 of the object to be measured changes within the range S, the single-peak signal moves accordingly.

[0031] Define the wavelength sequence:

[0032] Among them, is the spectral wavelength sequence data output by the spectrometer.

[0033] When the object is within the measurement range S, spectral light intensity data can be obtained through the spectrometer. As Figure 3 shown, the spectral light intensity sequence data is defined as:

[0034] Among them, is the sequence data of light intensity corresponding to the spectral wavelength values output by the spectrometer.

[0035] According to the spectral wavelength sequence data and the corresponding light intensity sequence data of each scanning point, the peak wavelength of each scanning point is obtained, including: According to the wavelength sequence data and the light intensity sequence data, the light intensity value corresponding to the value of each wavelength is obtained; Multiply the value of each wavelength by its corresponding light intensity value to obtain a set of products; add up all the products to obtain the total sum; Divide the total sum of the products by the total sum of all light intensity values to obtain the peak wavelength.

[0036] The expression is as follows:

[0037] Among them, is the peak wavelength obtained through calculation; using the peak wavelength calculate the displacement value, and the expression is as follows:

[0038] Among them, is the displacement value obtained through calculation, and are polynomial coefficients, represents of j the

[0039] (4) Convert the displacement value corresponding to each scanning point into spatial position information The present invention can adjust the specific measured area of the object to be measured, namely the inner hole surface or the transitional surface contour, by moving the position of the probe head.

[0040] Such as Figure 1 shown, when measuring the inner hole surface, by adjusting the probe head, the first dispersion superlens 7, the first reflection prism 1 and the first optical fiber 4 are arranged such that the measured surface is within the range S, and the inner hole surface is scanned to obtain scanning points; the present invention can directly use the displacement value corresponding to the scanning point as the spatial position information for subsequent fitting of the inner hole surface.

[0041] Such as Figure 2 shown, when measuring the transitional surface contour, the present invention can determine the spatial position information corresponding to the displacement value according to the displacement value corresponding to each scanning point in combination with the relative position relationship of the dispersion superlens.

[0042] The transition surface profile is scanned by a moving probe to obtain the displacement values of the scanning points measured by three optical paths. Combining the relative position relationships of three dispersive superlenses (i.e., the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens) obtained from the design parameters, such as the relative inclination angles between the optical axes of each dispersive superlens, the relative spatial distances between the centers of each dispersive superlens, and the distances from the scanning points to the centers of each dispersive superlens, etc., the relative spatial position data between the three scanning points is calculated according to spatial geometry.

[0043] (5) Fit the spatial position information of the scanning points on the inner hole surface and the transition surface profile respectively to determine the surface profile of the object to be measured.

[0044] The present invention can adopt a numerical fitting method to fit the surface profile of the object to be measured.

[0045] On the other hand, the present invention also provides a method for measuring the inner surface of a micro-hole and the transition surface profile. Figure 5 is a schematic flow chart of the method for measuring the inner surface of a micro-hole and the transition surface profile provided by the present invention, as Figure 5 shown, the steps include: Step 501: Project light signals onto the surface of the object to be measured through at least three optical paths, where: The first optical path reflects the divergent light emitted by the first optical fiber through the first reflecting prism and focuses it onto the surface of the object to be measured through the first dispersive superlens; The second optical path reflects the divergent light emitted by the second optical fiber through the second reflecting prism and focuses it onto the surface of the object to be measured through the second dispersive superlens; The third optical path reflects the divergent light emitted by the third optical fiber through the third reflecting prism and focuses it onto the surface of the object to be measured through the third dispersive superlens.

[0046] Optionally, the optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged at a preset inclination angle, corresponding to the regions of the surface of the object to be measured in different inclination angle ranges respectively.

[0047] Optionally, the divergent light in each optical path is wide-spectrum divergent light (divergent light with a wavelength within a preset range), such as light with a preset wavelength range from 360 nm to 1100 nm according to requirements.

[0048] Step 502: Receive the reflected light from the surface of the object to be measured returning along the original optical paths through the first optical fiber, the second optical fiber, and the third optical fiber respectively, and analyze the reflected light by a spectrometer to output the spectral wavelength sequence data and the light intensity sequence data of the scanning points corresponding to each optical path; Step 503: Obtain the peak wavelength of each scanning point based on the spectral wavelength sequence data and the corresponding light intensity sequence data of each scanning point, and determine the displacement value corresponding to each scanning point according to the peak wavelength of each scanning point; Step 504: Determine the spatial position information of each scanning point according to the displacement value corresponding to each scanning point; For the measurement of the inner hole surface, that is, the scanning points corresponding to the first optical path, the present invention can directly use the displacement value as the spatial position information.

[0049] For the measurement of the transition surface profile, that is, the scanning points corresponding to the second optical path and the third optical path, the present invention can determine the spatial position information corresponding to the displacement value according to the displacement value corresponding to each scanning point in combination with the relative position relationship of the dispersion hyperlens.

[0050] Step 505: Fit the spatial position information of all scanning points to determine the surface profile of the object to be measured; the surface profile of the object to be measured includes the inner hole surface and the transition surface profile; Among them, the inner hole surface is determined by the scanning points corresponding to the first optical path; the transition surface profile is determined by the scanning points corresponding to all optical paths.

[0051] In summary, by adopting the structural design of a multi-optical-path integrated dispersion hyperlens, the present invention effectively breaks through the limitations of the large volume and small tolerance angle of traditional spectral confocal sensors, and realizes high-precision non-contact measurement of the inner surface of micro-holes and the transition surface profile. By using three groups of dispersion hyperlens optical paths for collaborative measurement, not only the volume of the sensor is compressed to adapt to narrow spaces, but also the detection ability of complex surfaces (including high-curvature transition features) is improved through multi-angle optical path coverage. Combining the axial tomography advantage of spectral confocal technology, it can accurately extract the displacement values corresponding to the peak wavelengths of each scanning point, and reconstruct the surface topography through three-dimensional spatial data fitting, solving the industry pain points of traditional measurement technologies that are difficult to take into account small apertures, complex surfaces, etc. in the fields of electronic manufacturing, aerospace, etc.

[0052] The above are only exemplary embodiments of the present disclosure, and the scope of the present disclosure cannot be limited thereby. That is, any equivalent changes and modifications made in accordance with the teachings of the present disclosure still fall within the scope covered by the present disclosure. Those skilled in the art will easily think of other embodiments of the present disclosure after considering the specification and practicing the present disclosure. This application aims to cover any variations, uses, or adaptations of the present disclosure that follow the general principles of the present disclosure and include the common general knowledge or conventional technical means in the technical field not recorded in the present disclosure. The specification and embodiments are only regarded as exemplary, and the scope and spirit of the present disclosure are defined by the claims.

[0053] The technical features of the above embodiments can be combined arbitrarily. For the sake of concise description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0054] It is easy for those skilled in the art to understand that the above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A measuring device for the inner surface of micropores and the contour of the transition surface, characterized in that Comprising: At least three optical paths, a spectrometer, and a processing unit; The at least three optical paths include: a first optical path, a second optical path, and a third optical path; The first optical path includes a first optical fiber, a first reflection prism, and a first dispersive superlens. The divergent light emitted by the first optical fiber is reflected by the first reflection prism to the first dispersive superlens and focused on the surface of the object to be measured through the first dispersive superlens; The second optical path includes a second optical fiber, a second reflection prism, and a second dispersive superlens. The divergent light emitted by the second optical fiber is reflected by the second reflection prism to the second dispersive superlens and focused on the surface of the object to be measured through the second dispersive superlens; The third optical path includes a third optical fiber, a third reflection prism, and a third dispersive superlens. The divergent light emitted by the third optical fiber is reflected by the third reflection prism to the third dispersive superlens and focused on the surface of the object to be measured through the third dispersive superlens; The spectrometer is configured to analyze the reflected light from the surface of the object to be measured that returns along the original optical path by the first optical fiber, the second optical fiber, and the third optical fiber respectively, and output the spectral wavelength sequence data and the corresponding light intensity sequence data of the scanning points corresponding to each optical path; The processing unit is configured as: According to the spectral wavelength sequence data and the corresponding light intensity sequence data of each scanning point, obtain the peak wavelength of each scanning point, and determine the displacement value corresponding to each scanning point according to the peak wavelength of each scanning point; According to the displacement value corresponding to each scanning point, determine the spatial position information of each scanning point; Fit the spatial position information of all scanning points to determine the surface profile of the object to be measured; the surface profile of the object to be measured includes an inner hole surface and a transition surface profile; Wherein, the inner hole surface is determined by the scanning points corresponding to the first optical path; The transition surface profile is determined by the scanning points corresponding to all optical paths.

2. The micro-hole inner surface and transitional surface profile measuring device according to claim 1, characterized in that The optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged at a preset inclination angle, corresponding to the regions of the surface of the object to be measured in different inclination angle ranges respectively.

3. The micro-hole inner surface and transition surface profile measuring device according to claim 1, characterized in that, Further comprising: A probe housing; The at least three optical paths are arranged inside the probe housing.

4. The micro-hole inner surface and transition surface profile measuring device according to claim 1, characterized in that The divergent light emitted by the optical fiber is broadband divergent light.

5. The micro-hole inner surface and transition surface profile measuring device according to claim 1, characterized in that Determining the displacement value corresponding to each scanning point according to the peak wavelength of each scanning point includes: Using a pre-determined mapping function to convert the peak wavelength into a displacement value.

6. The micro-hole inner surface and transition surface profile measuring device according to claim 5, characterized in that, The mapping function is a polynomial.

7. A method for measuring the inner surface of a micropore and the contour of a transition surface, characterized in that, Comprising: Projecting an optical signal to the surface of the object to be measured through at least three optical paths, wherein: The first optical path reflects the divergent light emitted by the first optical fiber through the first reflection prism and focuses it on the surface of the object to be measured through the first dispersive superlens; The second optical path reflects the divergent light emitted by the second optical fiber through the second reflection prism and focuses it on the surface of the object to be measured through the second dispersive superlens; The third optical path reflects the divergent light emitted by the third optical fiber through the third reflection prism and focuses it on the surface of the object to be measured through the third dispersive superlens; Receiving the reflected light from the surface of the object to be measured that returns along the original optical path through the first optical fiber, the second optical fiber, and the third optical fiber respectively, and analyzing the reflected light by the spectrometer to output the spectral wavelength sequence data and the light intensity sequence data of the scanning points corresponding to each optical path; Based on the spectral wavelength sequence data and the corresponding light intensity sequence data of each scanning point, obtain the peak wavelength of each scanning point, and determine the displacement value corresponding to each scanning point according to the peak wavelength of each scanning point; Determine the spatial position information of each scanning point according to the displacement value corresponding to each scanning point; Fit the spatial position information of all scanning points to determine the surface profile of the object under test; the surface profile of the object under test includes the inner hole surface and the transition surface profile; Among them, the inner hole surface is determined by the scanning points corresponding to the first optical path; The transition surface profile is determined by the scanning points corresponding to all optical paths.

8. The method for measuring the inner surface of the micro-pores and the profile of the transition surface according to claim 7, characterized in that The optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged at a preset tilt angle, corresponding to the regions of the surface of the object under test in different tilt angle ranges respectively.

9. The method for measuring the inner surface of the micro-hole and the transitional surface profile according to claim 7, characterized in that The divergent light in each optical path is wide-spectrum divergent light.

10. The method for measuring the inner surface of the micro-pores and the transitional surface profile according to claim 7, wherein Determining the displacement value corresponding to each scanning point according to the peak wavelength of each scanning point includes: Using a pre-determined mapping function to convert the peak wavelength into a displacement value.

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