Method and device for measuring micropore inner surface and transition surface profile

Abstract

The present invention provides a method and device for measuring the contour of the inner surface and transition surface of a microhole, which belongs to the field of optical measurement technology. The device includes: three independent optical paths, a spectrometer and a processing unit. The three optical paths all adopt an optical fiber-reflection prism-dispersion superlens structure. By adjusting the position of the probe, light can be irradiated on the inner surface of the microhole and the contour of the transition surface, thereby realizing the scanning of each scanning point on the surface. The spectrometer analyzes the reflection spectrum received by each optical fiber in real time, extracts the peak wavelength and light intensity data of the scanning point; the processing unit calculates the displacement value of each scanning point based on the wavelength-displacement mapping relationship, reconstructs the position information, and obtains the surface contour through data fitting. The present invention breaks through the volume limitation of traditional spectral confocal sensors, utilizes multi-angle optical paths to achieve full coverage detection of complex surfaces, and effectively solves the problem of measuring the contour of the inner surface and transition surface of microholes in the prior art.

Description

Technical Field

[0001] The present invention relates to the field of optical measurement technology, and in particular to a method and device for measuring the profile of a micropore inner surface and a transitional curved surface. Background Art

[0002] Measuring the inner surface and transitional profile of microholes with stepped diameters has long been an industry challenge. Existing non-contact measurement methods, including laser confocal, line laser, and structured light, suffer from one or more drawbacks, such as large size, difficulty measuring highly reflective surfaces, and inability to measure transitional features with high curvature. These limitations hinder the measurement of microhole inner surface and curved profiles. However, spectral confocal sensing technology, with its significant advantages such as high measurement accuracy and axial tomography capabilities, has found widespread application in electronics manufacturing, aerospace, laser fusion, automotive, biology, and IC manufacturing.

[0003] However, due to limitations in lens material and structure, traditional lens-based spectral confocal displacement sensors have limited minimum volume and insufficient tolerance angle, making them inapplicable to micro-hole inner surface and curved surface profile measurement. Therefore, the development of spectral confocal high-precision non-contact displacement sensors capable of measuring micro-size and curved surface profiles is of great significance. Summary of the Invention

[0004] The present invention provides a method and device for measuring the profile of the inner surface of a micropore and a transitional curved surface, which is used to overcome the defects of traditional lens-type spectral confocal displacement sensors, such as limited minimum volume and insufficient tolerance angle, which cannot be applied to the measurement of the inner surface of a micropore and the profile of a transitional curved surface due to the limitations of lens materials and structures.

[0005] In a first aspect, the present invention provides a device for measuring the profile of a micropore inner surface and a transitional surface, comprising: at least three optical paths, a spectrometer, and a processing unit;

[0006] At least three optical paths, including: a first optical path, a second optical path, and a third optical path;

[0007] The first optical path includes a first optical fiber, a first reflecting prism, and a first dispersive superlens. The divergent light emitted by the first optical fiber is reflected by the first reflecting prism to the first dispersive superlens, and is focused on the surface of the object to be measured through the first dispersive superlens.

[0008] The second optical path includes a second optical fiber, a second reflecting prism, and a second dispersive superlens. The divergent light emitted by the second optical fiber is reflected by the second reflecting prism to the second dispersive superlens, and is focused on the surface of the object to be measured through the second dispersive superlens.

[0009] The third optical path includes a third optical fiber, a third reflecting prism, and a third dispersive superlens. The divergent light emitted by the third optical fiber is reflected by the third reflecting prism to the third dispersive superlens, and is focused on the surface of the object to be measured through the third dispersive superlens.

[0010] a spectrometer for analyzing the reflected light from the surface of the measured object returned along the original optical path and received by the first optical fiber, the second optical fiber, and the third optical fiber, respectively, and outputting spectral wavelength sequence data and corresponding light intensity sequence data of the scanning points corresponding to each optical path;

[0011] Processing unit, configured as:

[0012] Obtain the peak wavelength of each scanning point based on the spectral wavelength sequence data and the corresponding light intensity sequence data of each scanning point, and determine the displacement value corresponding to each scanning point based on the peak wavelength of each scanning point;

[0013] Determine the spatial position information of each scanning point according to the displacement value corresponding to each scanning point;

[0014] Fitting the spatial position information of all scanning points to determine the surface profile of the object being measured; the surface profile of the object being measured includes the inner hole surface and the transition surface profile;

[0015] Wherein, the inner hole surface is determined by using the scanning points corresponding to the first optical path;

[0016] The transition surface profile is determined using the scanning points corresponding to all optical paths.

[0017] According to the device for measuring the profile of the inner surface of a microhole and a transition surface provided by the present invention, the optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged according to preset inclination angles, respectively corresponding to areas of the surface of the measured object in different inclination angle ranges.

[0018] The device for measuring the micropore inner surface and transition surface profile provided by the present invention further includes: a probe housing; and the at least three optical paths are arranged in the probe housing.

[0019] According to the device for measuring the microhole inner surface and transition curved surface profile provided by the present invention, the divergent light emitted by the optical fiber is broad-spectrum divergent light.

[0020] According to the micropore inner surface and transition surface profile measuring device provided by the present invention, the displacement value corresponding to each scanning point is determined according to the peak wavelength of each scanning point, including: using a predetermined mapping function to convert the peak wavelength into a displacement value.

[0021] According to the device for measuring the micropore inner surface and transition surface profile provided by the present invention, the mapping function is a polynomial.

[0022] In a second aspect, the present invention further provides a method for measuring the profile of a micropore inner surface and a transition surface, comprising:

[0023] The optical signal is projected onto the surface of the object to be measured through at least three optical paths, wherein:

[0024] The first optical path reflects the divergent light emitted by the first optical fiber through the first reflecting prism and focuses it onto the surface of the object to be measured through the first dispersive superlens;

[0025] The second optical path reflects the divergent light emitted by the second optical fiber through the second reflecting prism and focuses it onto the surface of the object to be measured through the second dispersive superlens;

[0026] The third optical path reflects the divergent light emitted by the third optical fiber through the third reflecting prism and focuses it onto the surface of the object to be measured through the third dispersive superlens;

[0027] Reflected light from the surface of the object being measured, which is returned along the original optical path, is received by the first optical fiber, the second optical fiber, and the third optical fiber, respectively. The reflected light is analyzed by a spectrometer to output spectral wavelength sequence data and light intensity sequence data of corresponding scanning points of each optical path.

[0028] Obtain the peak wavelength of each scanning point based on the spectral wavelength sequence data and the corresponding light intensity sequence data of each scanning point, and determine the displacement value corresponding to each scanning point based on the peak wavelength of each scanning point;

[0029] Determine the spatial position information of each scanning point according to the displacement value corresponding to each scanning point;

[0030] Fitting the spatial position information of all scanning points to determine the surface profile of the object being measured; the surface profile of the object being measured includes the inner hole surface and the transition surface profile;

[0031] Wherein, the inner hole surface is determined by using the scanning points corresponding to the first optical path;

[0032] The transition surface profile is determined using the scanning points corresponding to all optical paths.

[0033] According to the method for measuring the profile of the inner surface and transition surface of a microhole provided by the present invention, the optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged according to preset inclination angles, respectively corresponding to areas of the surface of the object to be measured in different inclination angle ranges.

[0034] According to the method for measuring the contours of the inner surface and transitional curved surface of a microhole provided by the present invention, the divergent light in each optical path is broad-spectrum divergent light.

[0035] According to the micropore inner surface and transition surface profile measurement method provided by the present invention, the displacement value corresponding to each scanning point is determined according to the peak wavelength of each scanning point, including: using a predetermined mapping function to convert the peak wavelength into a displacement value.

[0036] The present invention effectively breaks through the limitations of large volume and small tolerance angle of traditional spectral confocal sensors by adopting a multi-optical path integrated dispersive superlens structural design, and realizes high-precision non-contact measurement of the inner surface of micropores and transition surface contours. By utilizing three sets of dispersive superlens optical paths for collaborative measurement, not only is the sensor volume compressed to adapt to the narrow space, but the detection capability of complex surfaces (including high curvature transition features) is also improved through multi-angle optical path coverage. Combined with the axial tomography advantages of spectral confocal technology, it can accurately extract the displacement value corresponding to the peak wavelength of each scanning point, and reconstruct the surface morphology through three-dimensional spatial data fitting. This solves the industry pain point in the fields of electronics manufacturing, aerospace, etc. that traditional measurement technology is difficult to take into account small apertures, complex surfaces, etc. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction is given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0038] Figure 1 This is one of the optical path schematic diagrams of the measuring device provided by the present invention;

[0039] Figure 2 This is the second optical path schematic diagram of the measuring device provided by the present invention;

[0040] Figure 3 Schematic diagram of the dispersion metalens measurement process of the device provided by the present invention;

[0041] Figure 4 Schematic diagram of the measurement ranges corresponding to different dispersion metalenses provided by the present invention;

[0042] Figure 5 It is a schematic flow chart of the method for measuring the micropore inner surface and transition surface profile provided by the present invention;

[0043] Wherein, the accompanying drawings are marked as follows:

[0044] 1: first reflecting prism; 2: second reflecting prism; 3: third reflecting prism;

[0045] 4: first optical fiber; 5: second optical fiber; 6: third optical fiber; 7: first dispersive superlens;

[0046] 8: Second dispersion metalens; 9: Third dispersion metalens; 10: Probe housing;

[0047] 11: measured object; 12: spectrometer; 13: surface of the measured object; 14: light source. DETAILED DESCRIPTION

[0048] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0049] It should be noted that, in the description of the embodiments of the present invention, the terms "include," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus comprising a series of elements includes not only those elements but also other elements not explicitly listed, or also includes elements inherent to such process, method, article, or apparatus. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0050] The terms "first," "second," and the like in this application are used to distinguish similar objects, and are not used to describe a particular order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of this application can be implemented in an order other than that illustrated or described herein. Furthermore, the objects distinguished by "first," "second," and the like generally refer to a class of objects and do not limit the number of objects. For example, the first object may be one or more.

[0051] Figure 1 This is one of the optical path diagrams of the measuring device provided by the present invention. Figure 2 This is the second optical path schematic diagram of the measuring device provided by the present invention. Figure 3 This is a schematic diagram of the dispersion metalens measurement process of the device provided by the present invention, and the following reference is made to Figures 1 to 3 The aspects of the present invention will be described.

[0052] The device for measuring the micropore inner surface and transition surface profile provided by the present invention comprises: at least three optical paths, a spectrometer 12 and a processing unit;

[0053] The at least three optical paths include: a first optical path, a second optical path, and a third optical path; optionally, the at least three optical paths are arranged in the probe housing 10 .

[0054] The first optical path includes a first optical fiber 4, a first reflecting prism 1, and a first dispersive superlens 7. The divergent light emitted by the first optical fiber 4 is reflected by the first reflecting prism 1 to the first dispersive superlens 7, and is focused on the surface 13 of the object to be measured through the first dispersive superlens 7.

[0055] The second optical path includes a second optical fiber 5, a second reflecting prism 2, and a second dispersive superlens 8. The divergent light emitted by the second optical fiber 5 is reflected by the second reflecting prism 2 to the second dispersive superlens 8, and is focused on the surface 13 of the object to be measured through the second dispersive superlens 8.

[0056] The third optical path includes a third optical fiber 6, a third reflecting prism 3 and a third dispersive superlens 9. The divergent light emitted by the third optical fiber 6 is reflected by the third reflecting prism 3 to the third dispersive superlens 9, and is focused on the surface 13 of the object to be measured through the third dispersive superlens 9.

[0057] The spectrometer 12 is used to analyze the reflected light from the surface 13 of the measured object received by the first optical fiber 4, the second optical fiber 5 and the third optical fiber 6 respectively and returned along the original optical path, and output the spectrum wavelength sequence data and the corresponding light intensity sequence data of the scanning point corresponding to each optical path;

[0058] Processing unit, configured as:

[0059] Obtain the peak wavelength of each scanning point based on the spectral wavelength sequence data and the corresponding light intensity sequence data of each scanning point, and determine the displacement value corresponding to each scanning point based on the peak wavelength of each scanning point;

[0060] Determine the spatial position information of each scanning point according to the displacement value corresponding to each scanning point;

[0061] Fitting the spatial position information of all scanning points to determine the surface profile of the object 11 to be measured; the surface profile of the object 11 to be measured includes the inner hole surface and the transition surface profile;

[0062] The inner hole surface (which can be understood as the horizontal surface of the inner hole) is determined by using the scanning points corresponding to the first optical path; the transition surface profile is determined by using the scanning points corresponding to all optical paths.

[0063] Optionally, the divergent light emitted by the optical fiber is a broad-spectrum divergent light; wherein, Figure 1 The optical path for measuring the inner hole surface of the present invention is shown. Figure 2 The optical path for measuring the transition surface profile of the present invention is demonstrated.

[0064] The core structure of the device of the present invention is described below:

[0065] (1) Description of components in the first, second, and third optical paths

[0066] Optical fiber: used to receive light from the light source and emit divergent light;

[0067] Reflecting prism: Adjusts the direction of the optical path so that the divergent light is incident on the dispersive metalens at a specific angle.

[0068] Dispersive metalens: Utilizes the linear relationship between wavelength and focal length to focus light of different wavelengths to different depths of the surface profile of the object being measured.

[0069] (2) Arrangement of dispersive superlens

[0070] Figure 4 Schematic diagram of the measurement range of different dispersion metalenses provided by the present invention, such as Figure 4 As shown, the optical axes of the first, second, and third dispersive metalens are arranged at preset tilt angles, corresponding to regions of the surface of the measured object within different tilt angle ranges. The tilt angle refers to the angle offset from the normal.

[0071] Specifically, when measuring the curved surface profile, due to the tolerance angle of the single first dispersion super lens 7 θ When the surface of the object to be measured is tilted too much, the light emitted by the first dispersive superlens 7 cannot return to the first dispersive superlens 7. Therefore, the second dispersive superlens 8 and the third dispersive superlens 9 are configured to correspond to the surfaces of the object to be measured with different tilt angle ranges. For example, the first dispersive superlens 7 corresponds to a tilt angle range of 0-20°, the second dispersive superlens 8 corresponds to a tilt angle range of 20-40°, and the third dispersive superlens 9 corresponds to a tilt angle range of 40-60°.

[0072] (3) Determining the displacement value corresponding to each scanning point according to the peak wavelength of each scanning point, including: using a predetermined mapping function to convert the peak wavelength into the displacement value. The mapping function may be a polynomial.

[0073] Taking the first dispersive metalens 7 as an example, the measurement process of a single dispersive metalens is described (the measurement methods of other optical paths are basically the same except for the differences in the optical paths, and will not be described in detail):

[0074] like Figure 3As shown, light source 14 generates polychromatic light, which is then emitted as divergent light through first optical fiber 4. After passing through first dispersive metalens 7, the different wavelengths of light within the polychromatic light are focused at different locations. The focus of long-wavelength light is closer to first dispersive metalens 7, while the focus of short-wavelength light is farther away, forming a measurement range S. At this point, when the surface 13 of the object under test is within measurement range S, light reflected from surface 13 passes through first dispersive metalens 7 and returns to first optical fiber 4. The reflected light then passes through first optical fiber 4 and reaches spectrometer 12, which generates a measurement signal. As the surface 13 of the object under test changes within measurement range S, the single-peak signal shifts accordingly.

[0075] Define a wavelength sequence:

[0076]

[0077] in, It is the spectral wavelength sequence data output by the spectrometer.

[0078] When the object is within the measurement range S, the spectral light intensity data can be obtained through the spectrometer, such as Figure 3 As shown, the spectral intensity sequence data is defined as:

[0079]

[0080] in, It is the light intensity sequence data corresponding to the spectral wavelength value output by the spectrometer.

[0081] According to the spectral wavelength sequence data and the corresponding light intensity sequence data of each scanning point, the peak wavelength of each scanning point is obtained, including:

[0082] According to the wavelength sequence data and the light intensity sequence data, the light intensity value corresponding to the value of each wavelength is obtained;

[0083] Multiply the value of each wavelength by its corresponding light intensity value to obtain a set of products; add all the products to obtain the total;

[0084] Divide the sum of the products by the sum of all light intensity values to obtain the peak wavelength.

[0085] The expression is as follows:

[0086]

[0087] in, is the peak wavelength obtained by calculation; The displacement value is calculated as follows:

[0088]

[0089] in, is the calculated displacement value, and are the polynomial coefficients, express of j Power.

[0090] (4) Convert the displacement value corresponding to each scanning point into spatial position information

[0091] The present invention can adjust the specific measured area of the measured object, such as the inner hole surface or the transition curved surface contour, by moving the position of the measuring head.

[0092] like Figure 1 As shown, when measuring the inner hole surface, the first dispersive superlens 7, the first reflecting prism 1 and the first optical fiber 4 are adjusted sideways so that the measured surface is within the measuring range S, and the inner hole surface is scanned to obtain the scanning points. The present invention can directly use the displacement value corresponding to the scanning point as the spatial position information for subsequent fitting of the inner hole surface.

[0093] like Figure 2 As shown, when measuring the transition surface profile, the present invention can determine the spatial position information corresponding to the displacement value based on the displacement value corresponding to each scanning point and the relative position relationship of the dispersive super lens.

[0094] The transition surface profile is scanned by moving the probe to obtain the displacement values of the scanning points obtained by three optical path measurements. Combined with the relative position relationship of the three dispersive superlenses (i.e., the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens) obtained from the design parameters, such as the relative inclination angle between the optical axes of each dispersive superlens, the relative spatial distance between the center of each dispersive superlens, the distance from the scanning point to the center of each dispersive superlens, and other parameters, the relative spatial position data between the three scanning points are obtained according to spatial geometry calculation.

[0095] (5) Fit the spatial position information of the scanning points on the inner hole surface and the transition surface contour respectively to determine the surface contour of the object being measured.

[0096] The present invention can adopt a numerical fitting method to fit the surface profile of the measured object.

[0097] On the other hand, the present invention also provides a method for measuring the profile of the inner surface and transition curve of a micropore. Figure 5 Schematic diagram of the process of measuring the micropore inner surface and transition surface profile provided by the present invention. Figure 5 As shown, the steps include:

[0098] Step 501: Projecting a light signal onto the surface of the object to be measured through at least three light paths, wherein:

[0099] The first optical path reflects the divergent light emitted by the first optical fiber through the first reflecting prism and focuses it onto the surface of the object to be measured through the first dispersive superlens;

[0100] The second optical path reflects the divergent light emitted by the second optical fiber through the second reflecting prism and focuses it onto the surface of the object to be measured through the second dispersive superlens;

[0101] The third optical path reflects the divergent light emitted by the third optical fiber through the third reflecting prism and focuses the divergent light onto the surface of the object to be measured through the third dispersive superlens.

[0102] Optionally, the optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged according to preset tilt angles, respectively corresponding to areas of the surface of the object to be measured within different tilt angle ranges.

[0103] Optionally, the divergent light in each optical path is broad-spectrum divergent light (divergent light with a wavelength within a preset range), such as light with a wavelength range of 360 nm to 1100 nm preset according to requirements.

[0104] Step 502: Reflected light from the surface of the object being measured, which is returned along the original optical path, is received by the first optical fiber, the second optical fiber, and the third optical fiber, respectively. The reflected light is analyzed by a spectrometer to output spectral wavelength sequence data and light intensity sequence data corresponding to the scanning points of each optical path.

[0105] Step 503: Obtain the peak wavelength of each scanning point based on the spectral wavelength sequence data and the corresponding light intensity sequence data of each scanning point, and determine the displacement value corresponding to each scanning point based on the peak wavelength of each scanning point;

[0106] Step 504: Determine the spatial position information of each scanning point based on the displacement value corresponding to each scanning point;

[0107] For the measurement of the inner hole surface, that is, the scanning point corresponding to the first optical path, the present invention can directly use the displacement value as the spatial position information.

[0108] For the measurement of the transition surface profile, that is, the scanning points corresponding to the second optical path and the third optical path, the present invention can determine the spatial position information corresponding to the displacement value based on the displacement value corresponding to each scanning point combined with the relative position relationship of the dispersive super lens.

[0109] Step 505: Fitting the spatial position information of all scanning points to determine the surface profile of the object under test; the surface profile of the object under test includes the inner hole surface and the transition surface profile;

[0110] The inner hole surface is determined by using the scanning points corresponding to the first optical path; and the transition surface contour is determined by using the scanning points corresponding to all optical paths.

[0111] In summary, the present invention effectively breaks through the limitations of large volume and small tolerance angle of traditional spectral confocal sensors by adopting the structural design of multi-optical path integrated dispersive superlens, and realizes high-precision non-contact measurement of the inner surface of micropores and transition surface contours. By utilizing three sets of dispersive superlens optical paths for collaborative measurement, not only the sensor volume is compressed to adapt to the narrow space, but also the detection capability of complex surfaces (including high curvature transition features) is improved through multi-angle optical path coverage. Combined with the axial tomography advantages of spectral confocal technology, the displacement value corresponding to the peak wavelength of each scanning point can be accurately extracted, and the surface morphology can be reconstructed by fitting three-dimensional spatial data. In the fields of electronics manufacturing, aerospace, etc., it solves the industry pain points that traditional measurement technology is difficult to take into account small apertures, complex surfaces, etc.

[0112] The above is only an exemplary embodiment of the present disclosure and cannot be used to limit the scope of the present disclosure. That is, any equivalent changes and modifications made according to the teachings of the present disclosure are still within the scope of the present disclosure. After considering the specification and practicing the disclosure herein, those skilled in the art will easily think of the implementation scheme of the present disclosure. This application is intended to cover any variation, use or adaptation of the present disclosure, which follows the general principles of the present disclosure and includes common knowledge or customary technical means in the art that are not recorded in the present disclosure. The description and examples are to be regarded as exemplary only, and the scope and spirit of the present disclosure are defined by the claims.

[0113] The technical features of the above embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0114] It will be easily understood by those skilled in the art that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A device for measuring the profile of micropore inner surface and transition surface, characterized in that: include: At least three optical paths, spectrometers, and processing units; The at least three optical paths include: a first optical path, a second optical path, and a third optical path; The first optical path includes a first optical fiber, a first reflecting prism, and a first dispersive superlens. The divergent light emitted by the first optical fiber is reflected by the first reflecting prism to the first dispersive superlens, and is focused on the surface of the object to be measured through the first dispersive superlens. The second optical path includes a second optical fiber, a second reflecting prism, and a second dispersive superlens. The divergent light emitted by the second optical fiber is reflected by the second reflecting prism to the second dispersive superlens, and is focused on the surface of the object to be measured through the second dispersive superlens. The third optical path includes a third optical fiber, a third reflecting prism, and a third dispersive superlens. The divergent light emitted by the third optical fiber is reflected by the third reflecting prism to the third dispersive superlens, and is focused on the surface of the object to be measured through the third dispersive superlens. The spectrometer is used to analyze the reflected light from the surface of the measured object returned along the original optical path and received by the first optical fiber, the second optical fiber, and the third optical fiber, and output the spectrum wavelength sequence data and the corresponding light intensity sequence data of the scanning point corresponding to each optical path; The processing unit is configured as follows: Obtain the peak wavelength of each scanning point based on the spectral wavelength sequence data and the corresponding light intensity sequence data of each scanning point, and determine the displacement value corresponding to each scanning point based on the peak wavelength of each scanning point; Determine the spatial position information of each scanning point according to the displacement value corresponding to each scanning point; Fitting the spatial position information of all scanning points to determine the surface profile of the object being measured; the surface profile of the object being measured includes the inner hole surface and the transition surface profile; Wherein, the inner hole surface is determined by using the scanning points corresponding to the first optical path; The transition surface profile is determined using the scanning points corresponding to all optical paths.

2. The micropore inner surface and transition surface profile measuring device according to claim 1, characterized in that: The optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged according to preset tilt angles, respectively corresponding to areas on the surface of the measured object with different tilt angle ranges.

3. The micropore inner surface and transition surface profile measuring device according to claim 1, characterized in that: Also includes: Probe housing; The at least three optical paths are arranged in the probe housing.

4. The micropore inner surface and transition surface profile measuring device according to claim 1, characterized in that: The divergent light emitted by the optical fiber is a broad spectrum divergent light.

5. The device for measuring the micropore inner surface and transition surface profile according to claim 1, wherein: The displacement value corresponding to each scanning point is determined according to the peak wavelength of each scanning point, including: The peak wavelength is converted into a displacement value using a predetermined mapping function.

6. The device for measuring the micropore inner surface and transition surface profile according to claim 5, characterized in that: The mapping function is a polynomial.

7. A method for measuring the profile of micropore inner surface and transition surface, characterized in that: include: The optical signal is projected onto the surface of the object to be measured through at least three optical paths, wherein: The first optical path reflects the divergent light emitted by the first optical fiber through the first reflecting prism and focuses it onto the surface of the object to be measured through the first dispersive superlens; The second optical path reflects the divergent light emitted by the second optical fiber through the second reflecting prism and focuses it onto the surface of the object to be measured through the second dispersive superlens; The third optical path reflects the divergent light emitted by the third optical fiber through the third reflecting prism and focuses it onto the surface of the object to be measured through the third dispersive superlens; Reflected light from the surface of the object being measured, which is returned along the original optical path, is received by the first optical fiber, the second optical fiber, and the third optical fiber, respectively. The reflected light is analyzed by a spectrometer to output spectral wavelength sequence data and light intensity sequence data of corresponding scanning points of each optical path. Obtain the peak wavelength of each scanning point based on the spectral wavelength sequence data and the corresponding light intensity sequence data of each scanning point, and determine the displacement value corresponding to each scanning point based on the peak wavelength of each scanning point; Determine the spatial position information of each scanning point according to the displacement value corresponding to each scanning point; Fitting the spatial position information of all scanning points to determine the surface profile of the object being measured; the surface profile of the object being measured includes the inner hole surface and the transition surface profile; Wherein, the inner hole surface is determined by using the scanning points corresponding to the first optical path; The transition surface profile is determined using the scanning points corresponding to all optical paths.

8. The method for measuring the micropore inner surface and transition surface profile according to claim 7, characterized in that: The optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged according to preset tilt angles, respectively corresponding to areas on the surface of the measured object with different tilt angle ranges.

9. The method for measuring the micropore inner surface and transition surface profile according to claim 7, characterized in that: The divergent light in each optical path is broad spectrum divergent light.

10. The method for measuring the micropore inner surface and transition surface profile according to claim 7, characterized in that: The displacement value corresponding to each scanning point is determined according to the peak wavelength of each scanning point, including: The peak wavelength is converted into a displacement value using a predetermined mapping function.

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