Resistance testing device capable of improving testing precision and stability

Abstract

The invention relates to the technical field of semiconductor testing, and provides a resistance testing device for improving testing precision stability, which comprises a detection arm, a base rotationally connected to the detection arm, a plurality of probes arranged around the axis of the base at intervals, and a driving assembly for driving the base to rotate around the axis of the base; one end, in the length direction, of the detection arm extends to the position above the detection table, the base comprises a first section rotationally connected with the detection arm and a second section arranged in a conical shape, the second section is arranged close to the detection table, a bus of the second section is parallel to the table top of the detection table, a plurality of probes are arranged on the probe, and the probes are arranged on the base. The axes of the probes are perpendicular to the table top of the detection table, the probe types of the probes are different, the probes protrude out of the conical surface of the second section, the driving assembly is electrically connected to a controller, and the controller is electrically connected to an upper computer. The method has the beneficial effect of improving the stability of the test precision.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor testing, and in particular to a resistance testing device capable of improving the stability of testing accuracy. Background Art

[0002] Four-probe resistance measuring instruments are used in the field of semiconductor processes to measure the sheet resistance or resistivity of thin films such as implantation, diffusion, epitaxy, and metal coating. Different types of probes are required for wafers prepared by different processes, such as ion-implanted wafers and metal-coated wafers. When measuring, the probes of the resistance measuring instrument need to be replaced according to the needs, which is relatively troublesome and time-consuming.

[0003] However, during the replacement process, it is necessary to verify whether the probe is installed in place, and the frequent replacement of the probe is cumbersome, and the installation accuracy is difficult to guarantee, which can easily affect the final measurement accuracy. In addition, during the installation process, there is a risk that the probe will come into contact or collide with the surrounding environment, which can easily cause the probe to be damaged and fail, and finally affect the stability of the test accuracy, so further improvement is needed. Summary of the invention

[0004] In order to solve the above problems, the present application provides a resistance testing device that improves the stability of test accuracy.

[0005] The present application provides a resistance testing device for improving the stability of test accuracy, which adopts the following technical solution: A resistance testing device for improving the stability of test accuracy comprises a detection arm, a base rotatably connected to the detection arm, a plurality of probes arranged at intervals around the axis of the base, and a driving assembly driving the base to rotate around its own axis; one end of the detection arm along the length direction extends to the top of a detection table, the base comprises a first section rotatably connected to the detection arm and a second section arranged in a cone, the second section is arranged close to the detection table, a busbar of the second section is parallel to the table surface of the detection table, a plurality of probes are arranged on the probe, the axis of the probe is perpendicular to the table surface of the detection table, each probe has a different probe type, and the probe protrudes from the conical surface of the second section, the driving assembly is electrically connected to a controller, and the controller is electrically connected to a host computer.

[0006] By adopting the above technical solution, in which the second section is arranged in a cone shape and the busbar is parallel to the surface of the detection table, a plurality of probes of different types are arranged so that the base can be driven to rotate by a driving assembly to select a suitable probe, thereby reducing the time spent on frequent replacement of probes, saving time and improving efficiency; and reducing the steps of verifying whether the probe is installed in place, ensuring the installation accuracy, thereby improving the final measurement accuracy; reducing the risk of the probe contacting or colliding with the surrounding environment during the installation process, reducing the damage and failure of the probe, and improving the stability of the test accuracy.

[0007] Preferably, the driving assembly includes a first driving motor disposed on the detection arm and a transmission rod fixedly connected to the output shaft of the first driving motor. The transmission rod rotatably passes through the detection arm and is fixedly connected to the upper surface of the base.

[0008] By adopting the above technical solution, the transmission rod is driven to rotate by the first driving motor, and then the base is driven to rotate around its own axis, so as to realize the switching of different types of probes, reduce the time spent on frequent disassembly and installation of the probes, and the influence of inaccurate probe installation and difficult-to-guarantee installation accuracy on the measurement accuracy. At the same time, the risk of damage and failure caused by the probe contacting or colliding with the surrounding environment during the installation process is reduced, and the stability of the test accuracy is improved.

[0009] Preferably, the base further includes a third section disposed between the first section and the second section. The third section is in the shape of a frustum of a cone. The generatrix of the second section intersects with the generatrix of the third section. Probes also protrude from the side surface of the third section. An adjusting assembly for driving the generatrix of the second section or the generatrix of the third section to be parallel to the tabletop of the detection table is provided on the detection arm.

[0010] By adopting the above technical solution, a third section is added, and probes also protrude from the side surface of the third section. Cooperating with the adjusting assembly on the detection arm that can drive the generatrix of the second section or the generatrix of the third section to be parallel to the tabletop of the detection table, the types of probes that can be used are increased, further meeting more diverse measurement requirements, reducing the operation of replacing the probe, and improving the stability of the test accuracy.

[0011] Preferably, the detection arm sequentially includes a first arm and a second arm in the direction away from the detection table. The adjusting assembly includes a rotating rod disposed on the first arm and a driving member for driving the first arm to rotate. The first arm is rotatably connected to the second arm through the rotating rod.

[0012] Preferably, a stabilizing mechanism for stabilizing the edge of the base is provided on the detection arm.

[0013] By adopting the above technical solution, the driving assembly drives the base to rotate, so that the probes of different types are switched to the measurement position to improve the measurement efficiency and reduce the influence on the measurement accuracy. Since the generatrix of the second section in the base is parallel to the detection table, the axis of the base is inclined. Affected by gravity, the transmission rod or the output shaft of the driving motor for connecting the base and the detection arm will deflect, thus affecting the accuracy of the generatrix of the second section or the generatrix of the third section in the base being parallel to the detection table, and further affecting the subsequent measurement accuracy. In this regard, by providing a stabilizing mechanism on the detection arm, the edge of the base can be stabilized, and the stability of the base during rotation and stopping can be enhanced, thereby improving the stability of the test accuracy.

[0014] Preferably, the stabilizing mechanism includes a rotating ring for rotatably connecting the first section and a limiting component arranged on the rotating ring to limit the rotation of the first section. The rotating ring is connected to the detection arm.

[0015] By adopting the above technical solution, a rotating ring for rotatably connecting the first section of the base is provided, and the rotation of the first section is limited by the limiting component on the rotating ring, so as to stabilize the edge of the base, reduce the shaking of the base, and stabilize it during measurement, improve the stability of the probe position, thereby ensuring the accuracy of the probe measurement position, and further enhancing the stability of the test accuracy.

[0016] Preferably, the limiting component includes a first bolt penetrating through the rotating ring. A plurality of the first bolts are arranged at intervals around the axis of the rotating ring. Threaded holes for threaded connection of the first bolts are formed in the side wall of the first section. A plurality of the threaded holes are arranged at intervals around the axis of the first section.

[0017] By adopting the above technical solution, the rotation of the first section is limited by the threaded connection of a plurality of first bolts arranged at intervals around the axis of the rotating ring and a plurality of threaded holes arranged at intervals around the axis of the first section, reducing unnecessary rotation of the base during the test, improving the stability of the probe position, and thus enhancing the stability of the test accuracy.

[0018] Preferably, a limiting ring is wound around the outer peripheral wall of the first section. The cross-section of the limiting ring is arranged in an isosceles triangle shape. There are two rotating rings. Slopes are formed on the surfaces of the two rotating rings close to each other. The side surface of the limiting ring is close to the slope. A rotating space is left between the slope and the limiting ring. The included angle formed between the side edge and the bottom edge of the limiting ring is greater than the included angle formed between the side surface and the bottom edge of the limiting ring. A limiting surface communicating with the slope is formed on the inner wall of the rotating ring; the limiting component further includes a ball arranged in the rotating space, a rubber pad arranged on the slope and the side surface of the limiting ring, a first elastic member arranged on the limiting surface, and a second driving member for driving the two rotating rings to move towards or away from each other. The ball abuts against the limiting ring. The first elastic member is used to push the ball to move away from the limiting surface. A chute is arranged on the slope along its own inclined direction. The ball is slidably connected to the chute.

[0019] By adopting the above technical solution, for the stability of the base edge, the second driving member can also be activated to drive the two rotating rings to approach or move away from the limiting ring. When approaching, since the angle formed between the side and the bottom of the limiting ring is greater than the angle formed between the side and the bottom of the limiting ring, the rotating space gradually increases in the direction approaching the limiting surface. After being squeezed, the balls will move in the direction approaching the limiting surface. As they approach and when they abut against the rubber pad, the frictional force generated by the balls squeezing the rubber pad can limit the rotation of the base, reduce the shaking and deviation during rotation, and further improve the stability of the test accuracy.

[0020] When it is necessary to rotate the base to switch the probe, the second driving member drives the two rotating rings to move away from each other. At this time, the balls are pushed by the elastic force of the first elastic member to move away from the limiting surface, playing a certain reset role, and also facilitating the rotation of the base within the rotating ring under the drive of the drive assembly.

[0021] Preferably, the limiting assembly includes a scissors arm connected to the rotating ring. The second driving member includes two connecting plates respectively hinged to both ends of the scissors arm on the side far from the rotating ring, a guide rod and a screw rod passing through the two connecting plates, a fixing plate for connecting the lower end of the guide rod, a second spring coaxially sleeved on the guide rod, and nuts threadedly connected to the screw rod; there are two second springs, which are respectively arranged on the sides of the two connecting plates away from each other. The ends of the two second springs away from each other are respectively connected to the detection arm and the fixing plate. The second spring forces the two ends of the scissors arm on one side to move away from each other. There are two nuts, which respectively abut against the sides of the two connecting plates away from each other.

[0022] By adopting the above technical solution, the connecting plates are hinged to both ends of the scissors arm on the side far from the rotating ring, so that the movement of the scissors arm can be transmitted to the connecting plates. The guide rod and the screw rod pass through the two connecting plates, ensuring the stability of the movement of the connecting plates. At the same time, the guide rod can also play a guiding role. The fixing plate is connected to the lower end of the guide rod, providing a stable support basis for the whole structure. The second spring is coaxially sleeved on the guide rod and is respectively arranged on the sides of the two connecting plates away from each other. Its two ends are respectively connected to the detection arm and the fixing plate, forcing the two ends of the scissors arm on one side to move away from each other. In this way, the elastic adjustment of the position of the rotating ring can be realized, increasing the flexibility and buffering performance of the device. The nuts are threadedly connected to the screw rod and respectively abut against the sides of the two connecting plates away from each other. By rotating the nuts, the position of the connecting plates can be accurately controlled, and then the distance between the rotating rings can be adjusted, so as to more accurately stabilize the base and improve the test accuracy stability of the resistance test device.

[0023] Preferably, the screw rod is a bidirectional threaded rod, and the screw rod is threadedly passed through the connecting plate.

[0024] By adopting the above technical solution, the screw rod is set as a bidirectional threaded rod and its threads are passed through the connecting plate. When the screw rod is rotated, due to the characteristics of the bidirectional threaded rod, the two connecting plates can be synchronously moved in opposite directions. This structure enables the scissor arms connected to the connecting plates to stably drive the two rotating rings to move precisely in the direction of approaching or moving away from each other, thereby enabling more precise control of the limiting operation on the base and effectively enhancing the stability of the overall operation of the device.

[0025] In summary, the present application has the following beneficial effects: By providing a plurality of probes of different probe types arranged at intervals around the axis of the base and using the driving assembly to drive the base to rotate to switch the probes, the operation of frequently replacing the probes is reduced, saving time and labor costs, as well as measurement errors caused by insufficient installation accuracy, and improving the final measurement accuracy; the risk of the probe coming into contact or colliding with the surrounding environment during the installation process can also be reduced, improving the stability of the test accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is the overall structural schematic diagram of Embodiment 1 of the present application; Figure 2 is the structural schematic diagram of the second section of the base in Embodiment 1 of the present application where the generatrix is parallel to the tabletop of the detection table; Figure 3 is the structural schematic diagram of the stabilizing mechanism in Embodiment 1 of the present application; Figure 4 is the structural schematic diagram of the adjusting assembly in Embodiment 1 of the present application; Figure 5 is the structural schematic diagram of the third section of the base in Embodiment 1 of the present application where the generatrix is parallel to the tabletop of the detection table; Figure 6 is the structural schematic diagram of the stabilizing mechanism in Embodiment 2 of the present application; Figure 7 is the sectional structural schematic diagram of the stabilizing mechanism in Embodiment 2 of the present application; Figure 8 is Figure 7 the partial enlarged schematic diagram of part A in Figure 9 is the structural schematic diagram of the ball in Embodiment 2 of the present application; Figure 10 is the structural schematic diagram of Embodiment 3 of the present application; Figure 11 is Figure 10 the partial enlarged schematic diagram of part B in Figure 12 is the structural schematic diagram of Embodiment 4 of the present application.

[0027] Description of reference numerals: 1. Detection arm; 11. First arm; 12. Second arm; 2. Base; 21. First section; 22. Second section; 23. Third section; 24. Limit ring; 241. Rotation space; 3. Probe; 31. Probe; 4. Driving assembly; 41. First driving motor; 42. Transmission rod; 5. Detection table; 6. Adjusting assembly; 61. Rotating rod; 62. Driving member; 621. Driven gear; 622. Driving gear; 623. Second driving motor; 7. Stabilizing mechanism; 8. Rotating ring; 81. Inclined surface; 811. Chute; 82. Limiting surface; 821. Mounting hole; 9. Limiting assembly; 91. First bolt; 92. Ball; 93. Rubber pad; 94. First elastic member; 95. Second driving member; 951. Connecting plate; 952. Guide rod; 953. Screw rod; 954. Fixed plate; 955. Second spring; 956. Nut; 96. Scissor arm. Detailed implementation mode

[0028] The following will Figure 1 - attached Figure 12 be further described in detail with reference to the attached drawings for this application.

[0029] The embodiment of this application discloses a resistance testing device for improving the accuracy and stability of testing. Embodiment 1:

[0030] A resistance testing device for improving the accuracy and stability of testing, referring to Figure 1 , includes a detection arm 1, a base 2 rotatably connected to the detection arm 1, a plurality of probes 3 arranged at intervals around the axis of the base 2, and a driving assembly 4 for driving the base 2 to rotate around its own axis.

[0031] Among them, one end of the detection arm 1 in the length direction extends above the detection table 5, and the detection table 5 is used to carry the wafer to be measured. Specifically, the detection arm 1 plays a role in supporting and connecting other components. It successively includes a first arm 11 and a second arm 12 in the direction away from the detection table 5. Its structure can be a rod-shaped structure made of metal material, with certain strength and rigidity. The first arm 11 is close to the detection table 5, and its end extends above the detection table 5, which is convenient for the probe 3 to measure the wafer on the detection table 5 and provides an installation position for the driving assembly 4.

[0032] Referring to Figure 2 , Figure 3, wherein, the base 2 specifically includes a first section 21 connected to the first arm 11, a second section 22 near the detection table 5 and arranged in a conical shape, and a third section 23 arranged between the first section 21 and the second section 22. Under normal conditions, the generatrix of the second section 22 is parallel to the tabletop of the detection table 5. Among them, a plurality of probes 31 are arranged on the probe head 3, specifically on the lower surface of the probe head 3. The probes 31 protrude from the conical surface of the second section 22, and the axis of the probe 31 is perpendicular to the generatrix of the second section 22, so as to be arranged perpendicular to the tabletop of the detection table 5. It should be noted that the types of probes 31 of each probe head 3 are different, and different types of probes 31 are suitable for wafers prepared by different processes. When the base 2 rotates, different types of probe heads 3 rotate to the upper part of the detection table 5 in turn, and the corresponding probes 31 can measure the resistance of the wafer.

[0033] In this embodiment, the third section 23 is arranged in a frustum shape, the generatrix of the second section 22 intersects with the generatrix of the third section 23, and a plurality of probe heads 3 are also arranged at intervals around the third section 23 along its own axis. At this time, the probes 31 on the probe head 3 also protrude from the side surface of the third section 23, and the axis of the probe 31 is perpendicular to the generatrix of the third section 23.

[0034] Among them, the driving component 4 is electrically connected to a controller (not shown in the figure), and the controller is electrically connected to a host computer (not shown in the figure). Since the controller and the host computer are prior arts, no more details are described here. The driving component 4 is used to drive the base 2 to rotate around its own axis, and specifically includes a first driving motor 41 arranged on the first arm 11 and a transmission rod 42 fixedly connected to the output shaft of the first driving motor 41. The transmission rod 42 rotates through the first arm 11 and is fixedly connected to the upper surface of the base 2. The first driving motor 41 can be a stepping motor, and receives instructions from the host computer through the controller to accurately control the rotation angle and speed. The driving component 4 can also adopt a servo motor to obtain higher control accuracy and stability.

[0035] For the selection of the probes 31 arranged on the second section 22 or the third section 23, in this embodiment, an adjusting component 6 for driving the generatrix of the second section 22 or the third section 23 to be parallel to the tabletop of the detection table 5 is arranged on the detection arm 1.

[0036] Refer to Figure 4 、 Figure 5 , the adjusting component 6 can adjust the posture of the base 2 according to actual measurement requirements, so that the generatrix of the second section 22 or the third section 23 is parallel to the tabletop of the detection table 5, so that the probes 31 at different positions can accurately contact the wafer. The adjusting component 6 specifically includes a rotating rod 61 arranged on the first arm 11 and a driving member 62 for driving the first arm 11 to rotate. The first arm 11 is rotatably connected to the second arm 12 through the rotating rod 61.

[0037] The driving member 62 may be an electric push rod or other device, which drives the first arm 11 to rotate around the rotating rod 61 through telescopic action, thereby adjusting the angle of the base 2. The driving member 62 may also be a hydraulic cylinder to provide a greater driving force. Figure 4 As shown, a mounting groove for installing a driving member 62 is opened on the second arm 12, and the rotating rod extends into the mounting groove. The driving member 62 specifically includes a driven gear 621 coaxially fixedly connected to the outside of the rotating rod 61, a driving gear 622 meshed with the driven gear 621, and a second driving motor 623 driving the driving gear 622 to rotate, and the second driving motor 623 is built into the mounting groove.

[0038] Reference Figure 2 , Figure 3 Furthermore, a stabilizing mechanism 7 for stabilizing the edge of the base 2 is provided on the detection arm 1. In this embodiment, the stabilizing mechanism 7 specifically includes a rotating ring 8 for rotationally connecting the first section 21 and a limiting assembly 9 provided on the rotating ring 8 to limit the rotation of the first section 21, and the rotating ring 8 is connected to the detection arm 1. The limiting assembly 9 specifically includes a first bolt 91 that is passed through the rotating ring 8, and a plurality of first bolts 91 are arranged at intervals around the axis of the rotating ring 8. The side wall of the first section 21 is provided with a threaded hole for threaded connection of the first bolt 91, and a plurality of threaded holes are arranged at intervals around the axis of the first section 21. When the base 2 needs to be fixed, the first bolt 91 is tightened to cooperate with the threaded hole to limit the rotation of the base 2.

[0039] The implementation principle of a resistance testing device for improving the stability of test accuracy in an embodiment of the present application is as follows: the resistance testing device drives the base 2 to rotate through the driving component 4 to achieve the switching of different types of probes 3, reducing the cumbersome operation and installation accuracy problems caused by replacing the probes 3, and improving the stability of the test accuracy. The adjustment component 6 can adjust the posture of the base 2 so that the probes 31 at different positions can accurately contact the wafer, further improving the accuracy of the measurement. The stabilizing mechanism 7 ensures the stability of the base 2 during the rotation and measurement process, reducing the influence of the shaking of the base 2 on the measurement results. Through the synergistic effect of these structures, the device effectively improves the accuracy and stability of the resistance test. Embodiment 2:

[0040] Reference Figure 6 , Figure 7, different from Embodiment 1, in this embodiment, a limiting ring 24 is wound around the outer peripheral wall of the first section 21. The cross-section of the limiting ring 24 is arranged in an isosceles triangle. There are two rotating rings 8. The surfaces of the two rotating rings 8 close to each other are provided with inclined surfaces 81. The inner wall of the rotating ring 8 is provided with a limiting surface 82 communicating with the inclined surface 81. The side surface of the limiting ring 24 is arranged close to the inclined surface 81. There is a rotating space 241 between the inclined surface 81 and the limiting ring 24. The included angle formed between the side edge and the bottom edge of the limiting ring 24 is greater than the included angle formed between the side surface and the bottom edge of the limiting ring 24, so that the rotating space 241 gradually increases in the direction close to the limiting surface 82.

[0041] Refer to Figure 7 , Figure 8 , in this embodiment, the limiting component 9 further includes a ball 92 arranged in the rotating space 241, a rubber pad 93 arranged on the inclined surface 81 and the side surface of the limiting ring 24, a first elastic member 94 arranged on the limiting surface 82, and a second driving member 95 for driving the two rotating rings 8 to move in the direction close to or away from the limiting ring 24.

[0042] Refer to Figure 8 , Figure 9 , wherein, a sliding groove 811 is arranged along the inclined direction of the inclined surface 81. The ball 92 is slidably connected to the sliding groove 811. The ball 92 is used to abut against the limiting ring 24. The first elastic member 94 is used to push the ball 92 to move in the direction away from the limiting surface 82. The first elastic member 94 is specifically a first spring. The limiting surface 82 is provided with an installation hole 821 for installing the first spring. The first spring is partially exposed outside the installation hole 821.

[0043] Wherein, the second driving member 95 specifically includes two connecting plates 951 respectively connected to the two rotating rings 8, a guide rod 952 and a screw rod 953 slidably penetrating through the two connecting plates 951, a fixing plate 954 for fixedly connecting the lower end of the guide rod 952, a second spring 955 coaxially sleeved on the guide rod 952, and a nut 956 threadedly connected to the screw rod 953. Among them, two second springs 955 are arranged and are respectively arranged on the sides of the two connecting plates 951 away from each other. The ends of the two second springs 955 away from each other are respectively connected to the first arm 11 and the fixing plate 954. The second spring 955 forces the two connecting plates 951 to move in the direction away from each other. There are two nuts 956, and they respectively abut against the sides of the two connecting plates 951 away from each other.

[0044] By rotating the nut 956, the position of the connecting plate 951 can be accurately controlled, and then the distance between the rotating rings 8 can be adjusted, so as to more accurately perform the stabilizing operation on the base 2, and improve the test precision stability of the resistance testing device. Embodiment 3:

[0045] Refer toFigure 10 , Figure 11 , which is different from Embodiment 2 in that the stabilizing mechanism 7 further includes a scissors arm 96 arranged in a hinged manner. The scissors arm 96 is arranged between the connecting plate 951 and the rotating ring 8. One end of the scissors arm 96 is fixedly connected to the rotating ring 8, and the other end of the scissors arm 96 is hinged to the connecting plate 951 to improve the clamping effect. Embodiment 4:

[0046] Referring to Figure 12 , which is different from Embodiment 2 or 3 in that in this embodiment, the screw rod 953 is a bidirectional threaded rod. The screw rod 953 is threadedly inserted through the connecting plate 951. When the nut 956 is rotated, since the screw rod 953 is a bidirectional threaded rod, the two connecting plates 951 will move towards or away from each other, realizing the approach or separation of the rotating ring 8.

[0047] The above are all the preferred embodiments of this application. The protection scope of this application is not limited thereby. Therefore, all equivalent changes made according to the structure, shape, and principle of this application shall be covered within the protection scope of this application.

Claims

1. A resistance testing device for improving the stability of test accuracy, characterized in that: It includes a detection arm (1), a base (2) rotatably connected to the detection arm (1), several probes (3) arranged at intervals around the axis of the base (2), and a driving component (4) for driving the base (2) to rotate around its own axis; one end of the detection arm (1) in the length direction extends above the detection table (5), the base (2) includes a first section (21) rotatably connected to the detection arm (1) and a second section (22) arranged in a conical shape, the second section (22) is arranged close to the detection table (5), the generatrix of the second section (22) is parallel to the tabletop of the detection table (5), several probes (31) are arranged on the probe (3), the axis of the probe (31) is perpendicular to the tabletop of the detection table (5), the types of the probes (31) of each probe (3) are different, the probe (31) protrudes from the conical surface of the second section (22), the driving component (4) is electrically connected to a controller, and the controller is electrically connected to a host computer.

2. The resistance testing device for improving the stability of testing accuracy according to claim 1, wherein: The driving component (4) includes a first driving motor (41) arranged on the detection arm (1) and a transmission rod (42) fixedly connected to the output shaft of the first driving motor (41), and the transmission rod (42) rotatably penetrates through the detection arm (1) and is fixedly connected to the upper surface of the base (2).

3. The resistor testing device for improving the stability of test accuracy according to claim 1, characterized in that: The base (2) further includes a third section (23) arranged between the first section (21) and the second section (22), the third section (23) is arranged in a frustum shape, the generatrix of the second section (22) intersects with the generatrix of the third section (23), probes (31) also protrude from the side surface of the third section (23), and an adjusting component (6) for driving the generatrix of the second section (22) or the generatrix of the third section (23) to be parallel to the tabletop of the detection table (5) is arranged on the detection arm (1).

4. A resistance testing device for improving the stability of test accuracy according to claim 3, characterized in that: The detection arm (1) sequentially includes a first arm (11) and a second arm (12) in the direction away from the detection table (5), the adjusting component (6) includes a rotating rod (61) arranged on the first arm (11) and a driving member (62) for driving the first arm (11) to rotate, and the first arm (11) is rotatably connected to the second arm (12) through the rotating rod (61).

5. A resistance testing device for improving the stability of test accuracy according to claim 1 or 3, characterized in that: A stabilizing mechanism (7) for stabilizing the edge of the base (2) is arranged on the detection arm (1).

6. The resistance testing device for improving the stability of test accuracy according to claim 5, wherein: The stabilizing mechanism (7) includes a rotating ring (8) for the first section (21) to be rotatably connected and a limiting component (9) arranged on the rotating ring (8) to limit the rotation of the first section (21), and the rotating ring (8) is connected to the detection arm (1).

7. A resistance testing device for improving the stability of test accuracy according to claim 6, characterized in that: The limiting component (9) includes a first bolt (91) penetrating through the rotating ring (8), several first bolts (91) are arranged at intervals around the axis of the rotating ring (8), threaded holes for the first bolts (91) to be threadedly connected are formed on the side wall of the first section (21), and several threaded holes are arranged at intervals around the axis of the first section (21).

8. The resistance testing device for improving the stability of testing accuracy according to claim 6, characterized in that: A limiting ring (24) is wound around the outer peripheral wall of the first section (21). The cross-section of the limiting ring (24) is arranged in an isosceles triangle. There are two rotating rings (8). Slopes (81) are provided on the surfaces of the two rotating rings (8) close to each other. The side surface of the limiting ring (24) is arranged close to the slope (81). A rotating space (241) is left between the slope (81) and the limiting ring (24). The included angle formed between the side edge and the bottom edge of the limiting ring (24) is greater than the included angle formed between the side surface and the bottom edge of the limiting ring (24). A limiting surface (82) communicating with the slope (81) is provided on the inner wall of the rotating ring (8); The limiting component (9) further includes a ball (92) arranged in the rotating space (241), a rubber pad (93) arranged on the slope (81) and the side surface of the limiting ring (24), a first elastic member (94) arranged on the limiting surface (82), and a second driving member (95) for driving the two rotating rings (8) to move towards or away from each other. The ball (92) abuts against the limiting ring (24). The first elastic member (94) is used to push the ball (92) to move away from the limiting surface (82). A chute (811) is provided on the slope (81) along its own inclination direction. The ball (92) is slidably connected to the chute (811).

9. A resistance testing device for improving the stability of test accuracy according to claim 8, characterized in that: The limiting component (9) includes a shear fork arm (96) connected to the rotating ring (8). The second driving member (95) includes two connecting plates (951) respectively hinged to both ends of the shear fork arm (96) on the side far from the rotating ring (8), a guide rod (952) and a screw rod (953) passing through the two connecting plates (951), a fixing plate (954) for connecting the lower end of the guide rod (952), a second spring (955) coaxially sleeved on the guide rod (952), and a nut (956) threadedly connected to the screw rod (953); There are two second springs (955) and they are respectively arranged on the sides of the two connecting plates (951) far from each other. The ends of the two second springs (955) far from each other are respectively connected to the detection arm (1) and the fixing plate (954). The second spring (955) forces the two ends of the shear fork arm (96) on one side to move away from each other. There are two nuts (956) and they respectively abut against the sides of the two connecting plates (951) far from each other.

10. A resistance testing device for improving the stability of test accuracy according to claim 9, characterized in that: The screw rod (953) is a bidirectional threaded rod. The screw rod (953) is threadedly passed through the connecting plate (951).

Images