Exhaust regulating device of plasma equipment and plasma equipment

Abstract

The present disclosure discloses an exhaust regulating device for a plasma device and a plasma device, which relate to the field of plasma devices. The plasma device includes a reaction chamber, a supporting portion located in the reaction chamber and for supporting wafers, an exhaust port located on one side of the supporting portion, and an exhaust member that is sleeved on the outside of the supporting portion and has multiple exhaust holes evenly distributed along the circumference. The exhaust regulating device includes a first air baffle and a second air baffle. The first air baffle is provided on the outlet side of the exhaust member to supply and return gas, and is located on the opposite side of the supporting portion as the exhaust port. The second air baffle is provided on the outlet side of the exhaust member to supply and return gas, and is located on the same side of the supporting portion as the exhaust port. The second air baffle formed by the second air baffle for the exhaust air flow is larger than the first air baffle area for the exhaust air flow formed by the first air baffle, so as to balance the air flow speed on the same side and the opposite side. The present disclosure helps to reduce the difference in the exhaust air flow speed in the area on the opposite side of the exhaust port and the area on the same side, and balances the air flow speed in the space on the opposite side of the exhaust port and the space on the same side of the exhaust port.

Description

Technical Field

[0001] The present disclosure relates to the technical field of plasma equipment, and in particular to an exhaust regulating device of a plasma equipment and the plasma equipment. Background Art

[0002] The plasma equipment's reaction chamber is equipped with a carrier for wafers. After the process gas enters the reaction chamber and reacts with the wafer, the reaction byproducts and process waste gas need to be discharged in a timely manner to ensure that the subsequent process gas can be evenly distributed in the reaction area, ensuring the uniformity of the reaction between the subsequent process gas and the wafer and the stability of the reaction process. In related technologies, the exhaust port connected to the reaction chamber is usually set on one side of the carrier. As a result, the exhaust speed of the process waste gas in the space on the same side of the carrier as the exhaust port is fast, while the exhaust speed of the process waste gas in the space on the opposite side of the carrier as the exhaust port is slow. This leads to large differences in the exhaust speed of each exhaust area, which in turn leads to uneven distribution of process gas and air pressure in the reaction chamber, affecting the uniformity of the reaction in each area of ​​the wafer. Summary of the Invention

[0003] In view of the shortcomings of the prior art described above, the purpose of the present disclosure is to provide an exhaust adjustment device for a plasma device and a plasma device, which helps to reduce the difference in air flow velocity between the exhaust in the area on the opposite side of the exhaust port and the area on the same side of the exhaust port, and balance the air flow velocity in the space on the opposite side of the exhaust port and the space on the same side of the exhaust port.

[0004] The present disclosure provides an exhaust regulating device for a plasma device, which includes a reaction chamber, a supporting part located in the reaction chamber and for supporting wafers, an exhaust port located on one side of the supporting part, and an exhaust member that is sleeved on the outside of the supporting part and has multiple exhaust holes evenly distributed along the circumference; the exhaust regulating device includes: a first air baffle, which is arranged on the air outlet side of the exhaust member for returning gas and is located on the opposite side of the supporting part as the exhaust port; and a second air baffle, which is arranged on the air outlet side of the exhaust member for returning gas and is located on the same side of the supporting part as the exhaust port; and the second air baffle formed by the second air baffle for the exhaust air flow is larger than the first air baffle formed by the first air baffle for the exhaust air flow, so as to balance the air flow speeds on the same side and the opposite side.

[0005] According to some embodiments of the present disclosure, the first air stopper extends along the circumference of the reaction chamber to form a minor arc shape; the second air stopper extends along the circumference of the reaction chamber to form a major arc shape, and the arc width is greater than that of the first air stopper.

[0006] According to some embodiments of the present disclosure, the distance between the first air blocking member and the exhaust member and / or the first air blocking area of ​​the first air blocking member are adjustably set to adjust the air flow speed on the opposite side;

[0007] The distance between the second air baffle and the exhaust member and / or the second air baffle area of ​​the second air baffle can be adjusted to adjust the air flow speed on the same side.

[0008] According to some embodiments of the present disclosure, it also includes: a first flow rate monitoring component, which is arranged in the reaction chamber and on the air outlet side of the exhaust component on the opposite side of the exhaust port, and is used to monitor the first air flow velocity on the opposite side; a second flow rate monitoring component, which is arranged in the reaction chamber and on the air outlet side of the exhaust component on the same side as the exhaust port, and is used to monitor the second air flow velocity on the same side; and a control unit, which is connected to the first flow rate monitoring component, the second flow rate monitoring component, the first air baffle and the second air baffle, and is used to control the change in the air blocking area and / or the change in the distance between at least one of the first air baffle and the second air baffle and the exhaust component according to the speed difference between the second air flow velocity and the first air flow velocity being greater than a preset threshold, until the speed difference is within the preset threshold.

[0009] According to some embodiments of the present disclosure, the first air blocking member is movably provided in a direction close to or far from the exhaust member, and is used to adjust the distance between the first air blocking member and the exhaust member to adjust the air flow speed on the opposite side;

[0010] The second air blocking member is movably arranged in a direction close to or far from the exhaust member, and is used to adjust the distance between the second air blocking member and the exhaust member, so as to adjust the air flow speed on the same side.

[0011] According to some embodiments of the present disclosure, the first air blocking member is swingably or retractably arranged relative to the exhaust member, and is used to adjust the first air blocking area to adjust the airflow speed on the opposite side;

[0012] The second air blocking member is swingably or retractably arranged relative to the exhaust member, and is used to adjust the second air blocking area to adjust the air flow speed on the same side.

[0013] According to some embodiments of the present disclosure, the first air blocking member is relatively swingable and retractable relative to the exhaust member, and is used to dually adjust the first air blocking area to adjust the air flow speed on the opposite side;

[0014] The second air blocking member is arranged to be relatively swingable and retractable relative to the exhaust member, and is used for doubly adjusting the second air blocking area to adjust the air flow speed on the same side.

[0015] According to some embodiments of the present disclosure, the first air blocking member and the second air blocking member are configured to be retractable to adjust the first air blocking area and the second air blocking area;

[0016] Among them, the first air blocking member includes a first blocking member, a first expanding member and a first driving member, the first expanding member is arranged to be able to expand / contract relative to the first blocking member, and the first driving member is used to drive the first expanding member to move; the second air blocking member includes a second blocking member, a second expanding member and a second driving member, the second expanding member is arranged to be able to expand / contract relative to the second blocking member, and the second driving member is used to drive the second expanding member to move.

[0017] According to some embodiments of the present disclosure, the relative motion includes relative sliding or relative swinging.

[0018] The present disclosure also provides a plasma device, including: an equipment main body, provided with a reaction chamber, a supporting part located in the reaction chamber and for supporting wafers, and an exhaust port located on one side of the supporting part; an exhaust component, which is mounted on the outside of the supporting part and has multiple exhaust holes evenly distributed along the circumference; and the exhaust adjustment device as described above.

[0019] Beneficial effects:

[0020] (1) The exhaust regulating device of the plasma equipment and the plasma equipment disclosed herein help to reduce the difference in airflow velocity between the exhaust in the area on the opposite side of the exhaust port and the area on the same side of the exhaust port, and balance the airflow velocity in the space on the opposite side of the exhaust port and the space on the same side of the exhaust port.

[0021] (2) In the exhaust regulating device of the plasma equipment and the plasma equipment disclosed herein, the distances between the first air baffle and the second air baffle and the exhaust member are adjustable, which is conducive to separately regulating the air flow speed in the space on the opposite side of the exhaust port and the space on the same side of the exhaust port.

[0022] (3) In the exhaust regulating device of the plasma equipment and the plasma equipment disclosed herein, the air blocking areas of the first air blocking member and the second air blocking member are adjustable, which is conducive to respectively adjusting the air flow speed in the space on the opposite side of the exhaust port and the space on the same side of the exhaust port.

[0023] (4) The exhaust regulating device and plasma equipment of the plasma equipment disclosed in the present invention, the control unit can control the change of the air blocking area of ​​at least one of the first air blocking member and the second air blocking member and / or the change of the distance between the first air blocking member and the second air blocking member based on the monitoring results of the air flow velocity in the space on the opposite side of the exhaust port and the space on the same side of the exhaust port by the first flow velocity monitoring member and the second flow velocity monitoring member, thereby adjusting the difference in air flow velocity in the space on the opposite side of the exhaust port and the space on the same side of the exhaust port, which is conducive to ensuring the consistency of the air flow velocity in the space on the opposite side of the exhaust port and the space on the same side of the exhaust port. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 Schematic diagram of the arrangement of a plasma device according to an embodiment of the present disclosure.

[0025] Figure 2 1 is a schematic top view of the plasma device after opening according to an embodiment of the present disclosure.

[0026] Figure 3 Schematic diagram of the arrangement of a plasma device according to another embodiment of the present disclosure.

[0027] Figure 4 It is a structural schematic diagram of a first example of adjusting the air blocking area by the first air blocking member and the second air blocking member disclosed in the present invention.

[0028] Figure 5 It is a structural schematic diagram of a second example of adjusting the air blocking area by the first air blocking member and the second air blocking member disclosed in the present invention.

[0029] Figure 6 1 is a top view schematically showing a second example of adjusting the air blocking area by the first air blocking member and the second air blocking member of the present disclosure.

[0030] Figure 7 1 is a schematic structural diagram of a third example of adjusting the air blocking area by the first air blocking member and the second air blocking member disclosed in the present invention.

[0031] Figure 8 1 is a schematic top view of a third example of adjusting the air blocking area by the first air blocking member and the second air blocking member of the present disclosure.

[0032] Figure 9 It is a structural schematic diagram of a fourth example of adjusting the air blocking area by the first air blocking member and the second air blocking member disclosed in the present invention.

[0033] Figure 10 It is a structural schematic diagram of a fifth example of adjusting the air blocking area by the first air blocking member and the second air blocking member disclosed in the present invention.

[0034] Figure 11 It is a connection diagram of the electronic components of the exhaust control device according to the embodiment of the present disclosure.

[0035] Reference numerals:

[0036] 11. First air-blocking member; 111. First surface; 112. First blocking member; 113. First retracting and extending member; 114. First driving member; 115. First bearing member; 1151. First axis; 116. First adapter member;

[0037] 12. Second air blocking member; 121. Second surface; 122. Second blocking member; 123. Second retracting and extending member; 124. Second driving member; 125. Second bearing member; 1251. Second axis; 126. Second adapter;

[0038] 13. First belt shifter;

[0039] 14. Second belt shifter;

[0040] 15. The first belt of ornaments;

[0041] 16. The second belt of ornaments;

[0042] 17. First flow rate monitoring component;

[0043] 18. Second flow rate monitoring component;

[0044] 19. Control unit;

[0045] 900, device body; 91, reaction chamber; 92, carrying part; 93, exhaust port; 94, exhaust component; 941, exhaust hole. DETAILED DESCRIPTION

[0046] The following describes the embodiments of the present disclosure through specific examples. Those skilled in the art can easily understand the other advantages and effects of the present disclosure from the information disclosed in this disclosure. The present disclosure can also be implemented or applied through different specific embodiments. The details of the present disclosure can also be modified or changed according to different viewpoints and application modules without departing from the spirit of the present disclosure. It should be noted that the embodiments and features in the embodiments of the present disclosure can be combined with each other unless there is a conflict.

[0047] The following is a detailed description of the embodiments of the present disclosure with reference to the accompanying drawings so that those skilled in the art can easily implement the present disclosure. The present disclosure can be embodied in many different forms and is not limited to the embodiments described herein.

[0048] Throughout the present disclosure, reference to terms such as "one embodiment," "some embodiments," "examples," "specific examples," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present disclosure. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or a group of embodiments or examples. Furthermore, those skilled in the art may combine and integrate different embodiments or examples, and features of different embodiments or examples, as described in the present disclosure, without conflicting requirements.

[0049] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the context of this disclosure, "a group" means two or more, unless otherwise specifically defined.

[0050] In order to clearly describe the present disclosure, components not related to the description are omitted, and the same or similar components throughout the specification are denoted by the same reference numerals.

[0051] Throughout this specification, when a device is said to be "connected" to another device, this includes not only "direct connection" but also "indirect connection" with other elements interposed therebetween. Furthermore, when a device is said to "include" a certain component, unless otherwise stated, this does not exclude the inclusion of other components but rather implies that the device may include other components.

[0052] Although the terms first, second, etc. are used in this document to represent various elements in some examples, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, the first interface and the second interface, etc. are represented. Furthermore, as used in this document, the singular forms "one," "an," and "the" are intended to also include the plural forms, unless there is a contrary indication in the context. It should be further understood that the terms "comprise" and "include" indicate the presence of the described features, steps, operations, elements, modules, projects, types, and / or groups, but do not exclude the presence, occurrence, or addition of one or a group of other features, steps, operations, elements, modules, projects, types, and / or groups. The terms "or" and "and / or" used herein are interpreted as inclusive, or mean any one or any combination. Therefore, "A, B, or C" or "A, B, and / or C" means "any of the following: A; B; C; A and B; A and C; B and C; A, B, and C." Exceptions to this definition only occur when the combination of elements, functions, steps, or operations is inherently mutually exclusive in some way.

[0053] The technical terms used herein are intended only to refer to specific embodiments and are not intended to limit the present disclosure. The singular form used herein also includes the plural form unless the statement explicitly indicates otherwise. The term "comprising" as used in this specification is intended to specify specific features, regions, integers, steps, operations, elements, and / or components and does not exclude the presence or addition of other features, regions, integers, steps, operations, elements, and / or components.

[0054] Although not defined differently, all terms used herein, including technical and scientific terms, have the same meanings as those generally understood by those skilled in the art to which this disclosure belongs. Terms defined in commonly used dictionaries are additionally interpreted as having meanings consistent with relevant technical literature and the current message. Unless otherwise defined, they should not be overly interpreted as ideal or highly formalized meanings.

[0055] Figure 1 Schematic diagram of the arrangement of a plasma device according to an embodiment of the present disclosure. Figure 1 The arrows in the diagram indicate the direction of gas flow into the plasma system. Figure 1 The plasma equipment of the embodiment of the present disclosure includes a reaction chamber 91, a carrier portion 92 located in the reaction chamber 91 and for carrying wafers, an exhaust port 93 located on one side of the carrier portion 92, and an exhaust member 94 that is mounted outside the carrier portion 92 and has a plurality of exhaust holes 941 uniformly distributed along the circumference. As a result, after the process gas in the reaction chamber 91 reacts, it will flow through the exhaust holes 941 on the exhaust member 94, then flow from the exhaust holes 941 to the exhaust port 93 and be discharged from the exhaust port 93. In this embodiment, the exhaust port 93 can be connected to a gas extraction device, for example, the exhaust port 93 is connected to a gas extraction pump, so that the gas is exhausted under the extraction of the gas extraction device. Of course, the exhaust port 93 of the present disclosure may not be provided with the gas extraction device.

[0056] Alternatively, the exhaust member 94 may be in the form of a flat plate, and the plurality of exhaust holes 941 on the exhaust member 94 may be spaced apart along the circumference of the reaction chamber 91 to form a circle of exhaust holes 941 surrounding the outside of the supporting portion 92. Furthermore, the exhaust member 94 may be provided with multiple circles of exhaust holes 941 spaced apart along the radial direction of the reaction chamber 91, thereby enabling the exhaust member 94 to exhaust more evenly. It is understood that the exhaust member 94 of the embodiment of the present disclosure includes but is not limited to this and can be adaptively adjusted.

[0057] See Figure 1 The exhaust regulating device of the embodiment of the present disclosure includes a first air baffle 11 and a second air baffle 12 .

[0058] The first air stopper 11 is provided on the outlet side of the exhaust member 94 for blocking back gas, and the first air stopper 11 and the exhaust port 93 are located on different sides of the support portion 92. In this embodiment, the first air stopper 11 and the exhaust port 93 can be located on different sides of the support portion 92. For example, the first air stopper 11 and the exhaust port 93 are respectively located on adjacent sides or spaced apart sides of the support portion 92. Alternatively, the first air stopper 11 and the exhaust port 93 can be located on opposite sides of the support portion 92.

[0059] The second air baffle 12 is provided on the air outlet side of the exhaust member 94 for back-blocking gas, and the second air baffle 12 and the exhaust port 93 are located on the same side of the bearing portion 92. The second air baffle area for the exhaust air flow formed by the second air baffle 12 is larger than the first air baffle area for the exhaust air flow formed by the first air baffle 11. It should be noted that the first air baffle area can be the orthographic projection area formed by the first air baffle 11 projected on a vertical plane of the exhaust air flow streamline on that side. For example, when the exhaust air flow streamline extends in the up-down direction / axial direction, the first air baffle area can be understood as the orthographic projection area formed by the first air baffle 11 projected on the horizontal plane / radial plane on that side. Correspondingly, the second air baffle area can be the orthographic projection area formed by the second air baffle 12 on a vertical plane of the exhaust air flow streamline on that side. For example, when the exhaust air flow streamline extends in the up-down direction / axial direction, the second air baffle area can be the orthographic projection area formed by the second air baffle 12 on the horizontal plane / radial plane on that side.

[0060] In this embodiment, the first air baffle 11 and the second air baffle 12 can be arranged parallel to the exhaust member 94, and the area of ​​the second surface 121 of the second air baffle 12 facing the exhaust member 94 is larger than the area of ​​the first surface 111 of the first air baffle 11 facing the exhaust member 94, thereby the second air baffle area can be larger than the first air baffle area. Alternatively, the first air baffle 11 and the second air baffle 12 can be arranged obliquely to the exhaust member 94, and the area of ​​the second surface 121 of the second air baffle 12 facing the exhaust member 94 is larger than or equal to the area of ​​the first surface 111 of the first air baffle 11 facing the exhaust member 94, and the second inclination angle of the second air baffle 12 relative to the exhaust member 94 is smaller than the first inclination angle of the first air baffle 11 relative to the exhaust member 94, thereby the second air baffle area can also be larger than the first air baffle area.

[0061] Figure 2 Schematic diagram of the top view of the plasma device after opening according to the embodiment of the present disclosure. Figure 1 and Figure 2 The first air blocker 11 and the second air blocker 12 are both extended along the circumference of the reaction chamber 91 to form an arc-shaped member. Thus, along the circumference of the exhaust member 94, the first air blocker 11 and the second air blocker 12 can evenly block the gas discharged from the plurality of exhaust holes 941.

[0062] Optionally, the first air blocker 11 extends along the circumference of the reaction chamber 91 to form a minor arc shape. The second air blocker 12 extends along the circumference of the reaction chamber 91 to form a major arc shape, and its arc width is greater than that of the first air blocker 11. Therefore, since the arc length and arc width of the second air blocker 12 are both greater than those of the first air blocker 11, the difference in air blocking area between the second air blocker 12 and the first air blocker 11 is greater, and the difference in the degree of gas obstruction is greater, which can further reduce the difference in air flow velocity between the same side and the opposite side, so that the air flow velocity on the same side is closer to the air flow velocity on the opposite side.

[0063] Optionally, one or more first bearing members 115, such as one or more first bearing columns, are provided below the first air blocker 11 to stably support the first air blocker 11. One or more second bearing members 125, such as multiple second bearing columns, are provided below the second air blocker 12 to stably support the second air blocker 12.

[0064] In the above embodiment, since the air blocking area formed by the first air blocking member 11 in the space on the opposite side of the exhaust port 93 is small, the flow area for the exhaust air flow formed in the area where the first air blocking member 11 is located, between the first air blocking member 11 and the cavity wall of the reaction chamber 91, and between the first air blocking member 11 and the peripheral wall of the supporting portion 92 is large, and the degree of obstruction to the exhaust air flow is small, so that the degree of reduction in the air flow velocity in the space on the opposite side of the exhaust port 93 is small. The air blocking area formed by the second air baffle 12 in the space on the same side of the exhaust port 93 is large, so that the flow area for the exhaust air flow formed in the area where the second air baffle 12 is located, between the second air baffle 12 and the cavity wall of the reaction chamber 91, and between the second air baffle 12 and the peripheral wall of the supporting part 92 is small, and the degree of blocking the exhaust air flow is large, so that the degree of reduction of the air flow speed in the space on the same side of the exhaust port 93 is large. Therefore, the above-mentioned setting of the present invention can reduce the speed difference between the faster air flow speed in the space on the same side and the slower air flow speed in the space on the opposite side, and balance the air flow speeds on the same side and the opposite side.

[0065] Optionally, the spacing between the first air baffle 11 and the exhaust member 94 and / or the first air baffle area of ​​the first air baffle 11 are adjustable to adjust the airflow speed on the opposite side. The spacing between the second air baffle 12 and the exhaust member 94 and / or the second air baffle area of ​​the second air baffle 12 are adjustable to adjust the airflow speed on the same side. Thus, the present disclosure can further adjust the airflow speeds on the opposite side and the same side, which helps ensure that the airflow speeds on the opposite side and the same side tend to be consistent / close after adjustment.

[0066] Figure 3It is a schematic diagram of the layout of the plasma equipment of another embodiment of the present disclosure. The distance between the first air baffle 11 and the exhaust member 94 is adjustable to adjust the air flow speed on the opposite side. Specifically, the first air baffle 11 is close to the exhaust member 94 so that the gas flow rate decreases when the distance is reduced, and is away from the exhaust member 94 so that the gas flow rate increases when the distance is expanded. The distance between the second air baffle 12, the exhaust member 94 and the exhaust port 93 is adjustably set to adjust the air flow speed on the same side. Specifically, the gas flow rate decreases when the second air baffle 12 is close to the exhaust member 94, and increases when it is away from the exhaust member 94. The gas flow rate reaches a maximum when it is located at a position between the exhaust port 93 and the exhaust member 94. Thereafter, the closer the second air baffle 12 is to the exhaust port 93, the lower the gas flow rate. Therefore, the change in the distance between the first air baffle 11 or the second air baffle 12 and the exhaust member 94 will cause the air flow speed on the opposite side or the same side to change, thereby enabling the present invention to adjust the air flow speed on the opposite side and the same side by adjusting the distance between the first air baffle 11 and the exhaust member 94 and the distance between the second air baffle 12 and the exhaust member 94, which is conducive to ensuring that the air flow speeds on the opposite side and the same side tend to be consistent / close.

[0067] Optionally, the first air stopper 11 is movably disposed in a direction of proximity to the exhaust member 94, whereby when the first air stopper 11 moves closer to the exhaust member 94, the distance between the first air stopper 11 and the exhaust member 94 decreases, and when the first air stopper 11 moves away from the exhaust member 94, the distance between the first air stopper 11 and the exhaust member 94 increases, thereby adjusting the distance between the first air stopper 11 and the exhaust member 94. The second air stopper 12 is movably disposed in a direction of proximity to the exhaust member 94, whereby when the second air stopper 12 moves closer to the exhaust member 94, the distance between the second air stopper 12 and the exhaust member 94 decreases, and when the second air stopper 12 moves away from the exhaust member 94, the distance between the second air stopper 12 and the exhaust member 94 increases, thereby adjusting the distance between the second air stopper 12 and the exhaust member 94.

[0068] Optionally, the exhaust adjustment device further includes a first belt shifter 13 and a second belt shifter 14. The first belt shifter 13 is connected to the first air blocking member 11 and is configured to drive the first air blocking member 11 to move toward or away from the exhaust member 94. The second belt shifter 14 is connected to the second air blocking member 12 and is configured to drive the second air blocking member 12 to move toward or away from the exhaust member 94.

[0069] Specifically, the first air-blocking member 11 and the second air-blocking member 12 are fixedly mounted on the first support member 115 and the second support member 125, respectively. The first belt-moving member 13 (e.g., a pneumatic cylinder or an electric cylinder) is connected to the first support member 115 and is used to drive the first support member 115 to move the first air-blocking member 11. The second belt-moving member 14 (e.g., a pneumatic cylinder or an electric cylinder) is connected to the second support member 125 and is used to drive the second support member 125 to move the second air-blocking member 12.

[0070] Optionally, the first air blocking area of ​​the first air blocking member 11 is adjustably set to adjust the air flow speed on the opposite side. Specifically, when the first air blocking area increases, the air flow speed on the opposite side decreases, and when the first air blocking area decreases, the air flow speed on the opposite side increases. The second air blocking area of ​​the second air blocking member 12 is adjustably set to adjust the air flow speed on the same side. Specifically, when the second air blocking area increases, the air flow speed on the same side decreases, and when the second air blocking area decreases, the air flow speed on the same side increases. Therefore, the present disclosure can adjust the air flow speeds on the opposite side and the same side by adjusting the air blocking areas of the first air blocking member 11 and the second air blocking member 12, which is also conducive to ensuring that the air flow speeds on the opposite side and the same side tend to be consistent.

[0071] Optionally, the first air blocking member 11 can be swingably or retractably arranged relative to the exhaust member 94 to adjust the first air blocking area. The second air blocking member 12 can be swingably or retractably arranged relative to the exhaust member 94 to adjust the second air blocking area.

[0072] Figure 4 1 is a structural diagram of a first example of adjusting the air blocking area of ​​the first air blocking member 11 and the second air blocking member 12 of the present disclosure. Figure 4, the first air baffle 11 is arranged to swing relative to the exhaust member 94 to adjust the first air baffle area. The second air baffle 12 is arranged to swing relative to the exhaust member 94 to adjust the second air baffle area. Thus, when the first air baffle 11 and the second air baffle 12 swing relative to the exhaust member 94, the tilt angle between the first air baffle 11 or the second air baffle 12 and the exhaust member 94 will change, and when the first air baffle 11 or the second air baffle 12 swings in a direction parallel to the exhaust member 94, so that the angle between the first air baffle 11 and the second air baffle 12 and the exhaust member 94 becomes smaller, the first air baffle area and the second air baffle area will increase accordingly. When the first air baffle 11 and the second air baffle 12 swing in a direction perpendicular to the exhaust member 94, so that the angle between the first air baffle 11 and the second air baffle 12 and the exhaust member 94 becomes larger, the first air baffle area and the second air baffle area will decrease accordingly. Therefore, the present disclosure can adjust the tilt angles between the first air blocking member 11 and the exhaust member 94 and between the second air blocking member 12 and the exhaust member 94 by swinging, thereby achieving adjustment of the first air blocking area and the second air blocking area.

[0073] Optionally, the exhaust adjustment device further includes a first belt swing member 15 and a second belt swing member 16. The first air barrier 11 is swingably provided on the first carrier 115 around a first axis 1151, and the first belt swing member 15 is used to drive the first air barrier 11 to swing. The second air barrier 12 is swingably provided on the second carrier 125 around a second axis 1251, and the second belt swing member 16 is used to drive the second air barrier 12 to swing. Specifically, the first belt swing member 15 can be an obliquely arranged cylinder or electric cylinder, and is rotatably connected to the first air barrier 11 and the first carrier 115, respectively, for driving the first air barrier 11 to perform a swing operation during extension and retraction. The second belt swing member 16 can be an obliquely arranged cylinder or electric cylinder, and is rotatably connected to the second air barrier 12 and the second carrier 125, respectively, for driving the second air barrier 12 to perform a swing operation during extension and retraction.

[0074] Figure 5 1 is a schematic structural diagram of a second example of adjusting the air blocking area by the first air blocking member 11 and the second air blocking member 12 in the present disclosure. Figure 6 1 is a top view schematically showing a second example of adjusting the air blocking area by the first air blocking member 11 and the second air blocking member 12 according to the present disclosure. Figure 5 and Figure 6, the first air baffle 11 can be arranged to be retracted and expanded to adjust the first air baffle area. The second air baffle 12 can be arranged to be retracted and expanded to adjust the second air baffle area. Thus, when the first air baffle 11 and the second air baffle 12 are in a retracted state, the first air baffle area and the second air baffle area are correspondingly reduced. When the first air baffle 11 and the second air baffle 12 are in an expanded state, the first air baffle area and the second air baffle area are correspondingly increased. Thus, the present disclosure can achieve the adjustment of the first air baffle area and the second air baffle area by making the first air baffle 11 and the second air baffle 12 fold and expand.

[0075] Optionally, the first air blocking member 11 and the second air blocking member 12 are slidably or swingably arranged to be retractable.

[0076] For example, see Figure 5 and Figure 6 The first gas blocking member 11 includes a first blocking member 112, a first retractable member 113, and a first driving member 114. The first retractable member 113 is slidably arranged on the first blocking member 112 to expand or retract. The first driving member 114 is used to drive the first retractable member 113 to slide, so that the first retractable member 113 is expanded or retracted on the first blocking member 112. The second gas blocking member 12 includes a second blocking member 122, a second retractable member 123, and a second driving member 124. The second retractable member 123 is slidably arranged on the second blocking member 122 to expand or retract. The second driving member 124 is used to drive the second retractable member 123 to slide, so that the second retractable member 123 is expanded or retracted on the second blocking member 122. Specifically, the first driving member 114 and the second driving member 124 can be two horizontally arranged cylinders for respectively driving the first retractable member 113 and the second retractable member 123 to slide horizontally. Thus, the first air stopper 11 and the second air stopper 12 can be slidably folded and unfolded.

[0077] Figure 7 1 is a schematic structural diagram of a third example of adjusting the air blocking area by the first air blocking member 11 and the second air blocking member 12 according to the present disclosure. Figure 8 FIG. 1 is a top view schematically showing a third example of adjusting the air blocking area by the first air blocking member 11 and the second air blocking member 12 according to the present disclosure. Figure 7 and Figure 8The first gas blocking member 11 includes a first blocking member 112, a first retractable member 113, and a first driving member 114. The first retractable member 113 is swingably arranged on the first blocking member 112 to be expanded / retracted. The first driving member 114 is used to drive the first retractable member 113 to swing, so that the first retractable member 113 is expanded / retracted on the first blocking member 112. The second gas blocking member 12 includes a second blocking member 122, a second retractable member 123, and a second driving member 124. The second retractable member 123 is swingably arranged on the second blocking member 122 to be expanded / retracted. The second driving member 124 is used to drive the second retractable member 123 to swing, so that the second retractable member 123 is expanded / retracted on the second blocking member 122. Specifically, the first retractable and extendable member 113 and the first blocking member 112 can be connected to each other for relative swinging via a first adapter 116 (first hinge), and the second retractable and extendable member 123 and the second blocking member 122 can be connected to each other for relative swinging via a second adapter 126 (second hinge). The first and second drive members 114, 124 can be two inclined cylinders, respectively configured to drive the first and second retractable and extendable members 113, 123 to swing. This allows the first and second air-blocking members 11, 12 to swing and retract.

[0078] Optionally, the first air blocking member 11 is arranged to swing relative to the exhaust member 94 and to be retractable and extendable, for dual adjustment of the first air blocking area. The second air blocking member 12 is arranged to swing relative to the exhaust member 94 and to be retractable and extendable, for dual adjustment of the second air blocking area. Thus, when adjusting the first air blocking area and the second air blocking area, the first air blocking area and the second air blocking area can be adjusted flexibly by swinging adjustment, retracting and extending adjustment, or swinging adjustment plus retracting and extending adjustment according to actual conditions. The flexible adjustment method is conducive to fully adjusting the first air blocking area and the second air blocking area, thereby fully ensuring that the airflow speeds on the same side and the opposite side tend to be consistent.

[0079] Figure 9 1 is a structural diagram of a fourth example of adjusting the air blocking area of ​​the first air blocking member 11 and the second air blocking member 12 in the present disclosure. Figure 9When the first retractable member 113 is slidably disposed on the first blocking member 112 so as to be expanded / retracted, and the second retractable member 123 is slidably disposed on the second blocking member 122 so as to be expanded / retracted, the first blocking member 112 is swingably disposed on the first carrier 115 about a first axis 1151, driving the first retractable member 113 to swing synchronously, thereby enabling the entire first gas blocking member 11 to swing relatively. The second blocking member 122 is swingably disposed on the second carrier 125 about a second axis 1251, driving the second retractable member 123 to swing synchronously, thereby enabling the entire second gas blocking member 12 to swing relatively. In this case, the present disclosure can adjust the first air blocking area and the second air blocking area in a double and overlapping manner. For example, when the first air blocking member 11 or the second air blocking member 12 swings in a direction perpendicular to the exhaust member 94, thereby increasing the angle between the first air blocking member 11 or the second air blocking member 12 and the exhaust member 94, the first air blocking member 11 or the second air blocking member 12 retracts itself, thereby further reducing the first air blocking area or the second air blocking area. Alternatively, when the first air blocking member 11 or the second air blocking member 12 swings in a direction parallel to the exhaust member 94, thereby decreasing the angle between the first air blocking member 11 or the second air blocking member 12 and the exhaust member 94, the first air blocking member 11 or the second air blocking member 12 expands itself, thereby further increasing the first air blocking area or the second air blocking area. As a result, the present disclosure has a wide adjustment range for the first air blocking area and the second air blocking area, and can fully adjust the first air blocking area and the second air blocking area, fully ensuring that the airflow speeds on the same side and the opposite side tend to be consistent.

[0080] Figure 10 1 is a structural diagram of a fifth example of adjusting the air blocking area of ​​the first air blocking member 11 and the second air blocking member 12 in the present disclosure. Figure 10When the first retractable member 113 is swingably arranged on the first blocking member 112 to expand / contract, and the second retractable member 123 is swingably arranged on the second blocking member 122 to expand / contract, the first blocking member 112 is swingably arranged on the first supporting member 115 around the first axis 1151, and is used to drive the first retractable member 113 to swing synchronously, so that the first gas blocking member 11 as a whole can swing relatively. The first driving member 114 is used to extend and retract accordingly when the first blocking member 112 and the first retractable member 113 swing synchronously, so that the relative position between the first blocking member 112 and the first retractable member 113 remains unchanged when the first gas blocking member 11 as a whole swings. The second blocking member 122 is swingably arranged on the second supporting member 125 around the second axis 1251, and is used to drive the second retractable member 123 to swing synchronously, so that the second gas blocking member 12 as a whole can swing relatively. The second driving member 124 is used to extend and retract accordingly when the second blocking member 122 and the second retracting and extending member 123 swing synchronously, so that the relative positions of the second blocking member 122 and the second retracting and extending member 123 remain unchanged when the second air blocking member 12 swings as a whole.

[0081] Figure 11 Schematic diagram of the connection of electronic components of the exhaust control device according to the embodiment of the present disclosure. Figure 3 and Figure 11 The exhaust regulating device further includes a first flow rate monitoring component 17, a second flow rate monitoring component 18, and a control unit 19. The first flow rate monitoring component 17 is disposed in the reaction chamber 91, and is disposed on the outlet side of the exhaust component 94 on the opposite side from the exhaust port 93, for monitoring the first air flow velocity on the opposite side to determine the exhaust velocity on the opposite side. The second flow rate monitoring component 18 is disposed in the reaction chamber 91, and is disposed on the outlet side of the exhaust component 94 on the same side as the exhaust port 93 to monitor the second air flow velocity on the same side to determine the exhaust velocity on the same side. The control unit 19 is connected to the first flow rate monitoring component 17, the second flow rate monitoring component 18, the first air baffle 11 and the second air baffle 12, and is used to control the change in the air baffle area and / or the change in the distance between at least one of the first air baffle 11 and the second air baffle 12 and the exhaust component 94 according to the speed difference between the second air flow speed and the first air flow speed being greater than a preset threshold, until the speed difference is within the preset threshold, which is conducive to ensuring the consistency of the air flow speed on the same side and the opposite side.

[0082] For example, when the second air flow speed is greater than the first air flow speed and the speed difference is greater than a preset threshold, the control unit 19 controls the first air blocking area of ​​the first air blocking member 11 to decrease and / or controls the second air blocking area of ​​the second air blocking member 12 to increase, so that the second air flow speed can be correspondingly decreased and the first air flow speed can be correspondingly increased, thereby further reducing the air flow speed difference on the same side and the opposite side, until the speed difference between the first air flow speed and the second air flow speed is reduced to within the preset threshold, thereby fully ensuring the consistency of the air flow speed on the same side and the opposite side.

[0083] Specifically, the first flow rate monitoring component 17 and the second flow rate monitoring component 18 can be a first airflow sensor and a second airflow sensor, respectively, to monitor the airflow speed on the opposite side and the same side, respectively. When the first air baffle 11 and the second air baffle 12 are swingably arranged relative to the exhaust component 94, the control unit 19 is connected to the first belt swing member 15 and the second belt swing member 16, respectively, to control the swing angle change of the first air baffle 11 and the second air baffle 12 by controlling the first belt swing member 15 and the second belt swing member 16, thereby controlling the tilt angle change of the first air baffle 11 and the second air baffle 12, and further controlling the air blocking area change of the first air baffle 11 and the second air baffle 12. When the first air barrier 11 and the second air barrier 12 are arranged to be foldable and unfoldable, the control unit 19 is connected to the first driving member 114 and the second driving member 124, respectively, and is used to control the first driving member 114 and the second driving member 124 to drive the first air barrier 11 and the second air barrier 12 to swing or slide, thereby controlling the degree of expansion of the first air barrier 11 and the second air barrier 12, and further controlling the air blocking area of ​​the first air barrier 11 and the second air barrier 12. At the same time, the control unit 19 is also connected to the first belt moving member 13 and the second belt moving member 14, respectively, and is used to control the movement stroke of the first belt moving member 13 and the second belt moving member 14 to drive the first air barrier 11 and the second air barrier 12 to move, thereby controlling the distance between the first belt moving member 13 and the second belt moving member 14 and the exhaust member 94.

[0084] See Figure 1The present disclosure also provides a plasma device, comprising a device body 900, an exhaust member 94, and an exhaust adjustment device as described in the above embodiment. The device body 900 includes a reaction chamber 91, a carrier portion 92 located within the reaction chamber 91 and configured to carry wafers, and an exhaust port 93 located on one side of the carrier portion 92. The exhaust member 94 is mounted on the outside of the carrier portion 92 and has a plurality of exhaust holes 941 uniformly distributed along the circumference. The plasma device of the present disclosure can balance the airflow velocity in the space on the opposite side of the exhaust port 93 within the reaction chamber 91 with the space on the same side of the exhaust port 93, thereby reducing the difference in airflow velocity between the opposite and same sides and balancing the airflow velocity between the opposite and same sides. This ensures that the post-reaction gas within each reaction zone of the reaction chamber 91 is uniformly discharged, thereby ensuring reaction uniformity on the wafer within the reaction chamber 91. For example, if the process occurring within the reaction chamber 91 is an etching process, the above arrangement is beneficial for ensuring etching uniformity on the wafer surface and ensuring etching quality of the wafer.

[0085] The above embodiments are merely illustrative of the principles and effects of this disclosure and are not intended to limit this disclosure. Anyone skilled in the art may modify or alter the above embodiments without departing from the spirit and scope of this disclosure. Therefore, any equivalent modifications or alterations made by a person skilled in the art without departing from the spirit and technical concepts disclosed herein shall be encompassed by the scope of protection of this disclosure.

Claims

1. An exhaust regulating device for a plasma device, characterized in that: The plasma equipment includes a reaction chamber, a carrier portion located in the reaction chamber and for carrying wafers, an exhaust port located on one side of the carrier portion, and an exhaust member sleeved outside the carrier portion and having a plurality of exhaust holes uniformly distributed along the circumference; The exhaust gas regulating device comprises: a first air blocking member, provided on the air outlet side of the exhaust member for blocking back the air, and located on the opposite side of the bearing portion from the exhaust port; and A second air baffle is provided on the air outlet side of the exhaust member for returning air, and is located on the same side of the bearing portion as the exhaust port; and a second air baffle area for the exhaust air flow formed by the second air baffle is larger than the first air baffle area for the exhaust air flow formed by the first air baffle, so as to balance the air flow speeds on the same side and on the opposite side; wherein the distance between the first air baffle and the exhaust member and / or the first air baffle area of ​​the first air baffle are adjustable to adjust the air flow speed on the opposite side; and the distance between the second air baffle and the exhaust member and / or the second air baffle area of ​​the second air baffle are adjustable to adjust the air flow speed on the same side; a first flow rate monitoring component, disposed in the reaction chamber and on an outlet side of the exhaust component on an opposite side from the exhaust port, for monitoring a first air flow velocity on the opposite side; a second flow rate monitoring component, disposed in the reaction chamber and on the gas outlet side of the exhaust component on the same side as the exhaust port, for monitoring a second gas flow velocity on the same side; and A control unit is connected to the first flow rate monitoring component, the second flow rate monitoring component, the first air baffle and the second air baffle, and is used to control the change of the air baffle area and / or the change of the distance between the first air baffle and the second air baffle and the exhaust component according to the speed difference between the second air flow speed and the first air flow speed being greater than a preset threshold, until the speed difference is within the preset threshold.

2. The exhaust gas regulating device according to claim 1, characterized in that: The first air blocking member extends along the circumference of the reaction chamber to form a minor arc shape; The second air blocking member extends along the circumference of the reaction chamber to form an arc shape, and the arc width is greater than that of the first air blocking member.

3. The exhaust gas regulating device according to claim 1, characterized in that: The first air blocking member is movably arranged in a direction close to or far from the exhaust member, and is used to adjust the distance between the first air blocking member and the exhaust member to adjust the air flow speed on the opposite side; The second air blocking member is movably arranged in a direction close to or far from the exhaust member, and is used to adjust the distance between the second air blocking member and the exhaust member, so as to adjust the air flow speed on the same side.

4. The exhaust gas regulating device according to claim 1, characterized in that: The first air blocking member is swingably or retractably arranged relative to the exhaust member, and is used to adjust the first air blocking area to adjust the air flow speed on the opposite side; The second air blocking member is swingably or retractably arranged relative to the exhaust member, and is used to adjust the second air blocking area to adjust the air flow speed on the same side.

5. The exhaust gas regulating device according to claim 1, characterized in that: The first air blocking member is arranged to swing relative to the exhaust member and to be retractable and extendable, and is used to dually adjust the first air blocking area to adjust the air flow speed on the opposite side; The second air blocking member is arranged to be relatively swingable and retractable relative to the exhaust member, and is used for doubly adjusting the second air blocking area to adjust the air flow speed on the same side.

6. The exhaust gas regulating device according to claim 1, characterized in that: The first air blocking member and the second air blocking member are arranged to be retractable to adjust the first air blocking area and the second air blocking area; Among them, the first air blocking member includes a first blocking member, a first expanding member and a first driving member, the first expanding member is arranged to be able to expand / contract relative to the first blocking member, and the first driving member is used to drive the first expanding member to move; the second air blocking member includes a second blocking member, a second expanding member and a second driving member, the second expanding member is arranged to be able to expand / contract relative to the second blocking member, and the second driving member is used to drive the second expanding member to move.

7. The exhaust gas regulating device according to claim 6, characterized in that: The relative motion includes relative sliding or relative swinging.

8. A plasma device, characterized in that: include: The device body is provided with a reaction chamber, a carrying portion located in the reaction chamber and for carrying wafers, and an exhaust port located on one side of the carrying portion; an exhaust member, which is sleeved outside the bearing portion and has a plurality of exhaust holes uniformly distributed along the circumference; and The exhaust gas regulating device according to any one of claims 1 to 7.

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