Fluidized bed-rotary kiln continuous coating device

Abstract

According to the fluidized bed-rotary kiln continuous coating device, a plurality of reactors are connected in series for precursor reaction coating, a rotary kiln structure, a telescopic mechanism and an air cylinder structure are combined to enable the device to react and discharge at different stations, intermediate products do not need to be taken out in the midway, and continuous operation is achieved; the loss and the maintenance cost of equipment are reduced, the service life of the equipment is prolonged, the transfer efficiency of high-temperature materials is improved, and the production time and the production cost are reduced.

Description

Technical Field

[0001] The invention belongs to the technical field of high-temperature fluidized transfer, and particularly relates to a fluidized bed-rotary kiln continuous coating device. Background Art

[0002] Both the fluidized bed and the horizontal rotary kiln furnace belong to the main types of heat treatment equipment, and are currently applied to atomic layer deposition coating and chemical vapor deposition coating. When preparing the silicon-carbon composite anode material at present, it is necessary to form silicon nanowires on the base material through atomic layer deposition, and then coat a conductive carbon layer outside the silicon nanowires through chemical vapor deposition, which requires the use of atomic layer deposition equipment and chemical vapor deposition equipment respectively. When transferring the coated material from the atomic layer deposition equipment to the chemical vapor deposition equipment, it is necessary to wait for the powder material to cool to room temperature and then introduce it into the horizontal rotary kiln furnace. Before removing the coated powder from the horizontal rotary kiln furnace, to prevent high-temperature soot from burning the operator, it is also necessary to wait for the powder to cool to room temperature and then open the furnace lid of the horizontal rotary kiln furnace to pour out the powder. Therefore, the overall preparation time is prolonged. Continuous processing cannot be achieved during the transfer of high-temperature materials, resulting in problems such as low work efficiency and poor safety. Summary of the Invention

[0003] The purpose of the invention is to provide a fluidized bed-rotary kiln continuous coating device, which performs step-by-step coating of reaction materials through two reactors in series, and combines the reactor structure, cylinder and driving device to control the transfer of high-temperature materials after each reaction, so that the high-temperature materials can be transferred in time after the reaction, with high work efficiency and reduced production time and cost.

[0004] To achieve the above purpose, the technical solution of the invention is: a fluidized bed-rotary kiln continuous coating device, including a feeding tank, a fluidized bed reactor, a rotary cylinder and a discharging tank; the rotary cylinder is arranged in a heating jacket, the left / right ends of the rotary cylinder are connected with reduced-diameter pipes and are rotatably connected to both ends of the heating jacket, the reduced-diameter pipes are respectively detachably connected to the rotating pipes of the first / second rotary joints through connecting pipes, the fixed pipe of the first rotary joint is communicated with the discharging valve at the bottom of the fluidized bed reactor through a material conveying pipe provided with a control valve, the fixed pipe of the second rotary joint is communicated with the discharging tank, the feeding tank is communicated with the fluidized bed reactor through a material conveying pipe provided with a control valve; the heating jacket and the discharging tank are fixed on the bottom plate, and the bottom surface of the part of the bottom plate close to the second rotary joint is connected to the base through a hinge, and the bottom plate is also connected to a first telescopic mechanism, and the first telescopic mechanism can be used to drive the bottom plate to rotate relative to the hinge;

[0005] One side inside the blanking tank is fixed to the fixed end of the second telescopic mechanism. The movable end of the second telescopic mechanism can extend towards the rotary cylinder and can seal the fixed pipe of the second rotary joint when it abuts against the inner wall of the blanking tank. One end of the inlet pipe passes through the movable end of the second telescopic mechanism in the middle inside the blanking tank and extends towards the rotary cylinder. The other end of the inlet pipe is connected to the precursor gas pipeline outside the blanking tank through a hose.

[0006] The bottom plate is equipped with a driving device for driving the rotary cylinder to rotate.

[0007] The fixed pipe of the first rotary joint is connected to the bottom of the fluidized bed reactor through a material conveying pipe provided with a three-way valve. The three-way valve is also connected to the vacuum exhaust pipe at the top of the fluidized bed reactor.

[0008] The fluidized bed reactor includes a heating jacket I and a reaction chamber arranged on a bracket. The heating jacket I is sleeved on the outer side of the lower part of the reaction chamber. The upper part of the reaction chamber is connected to the lower part of the feeding tank through a material conveying pipe provided with a control valve. A feeding valve for controlling the introduction of the first / second reaction gas or high-pressure gas is also provided at the bottom of the reaction chamber.

[0009] The joint pipe includes a corrugated pipe, a hoop, and an annular gasket. The annular gasket is clamped between the two ends of the corrugated pipe and the reduced-diameter pipe and the rotating pipe respectively. The hoop is used to surround and apply pressure towards the annular gasket to the corrugated pipe, the reduced-diameter pipe, and the rotating pipe.

[0010] Each rotary joint includes a fixed pipe and a rotating pipe. One end of the fixed pipe is provided with an inwardly concave pipe cavity. A grease shield, a bearing, and a retaining ring are sleeved on the outer periphery of the end of the rotating pipe extending into the pipe cavity. The grease shield, the bearing, and the retaining ring are arranged in sequence from the inside to the outside in the pipe cavity. The rotating pipe is rotatably connected to the fixed pipe through the bearing. The retaining ring is fixedly connected to the pipe cavity and has a clearance fit with the rotating pipe. An annular floating seal ring is arranged between the inner end of the pipe cavity and the rotating pipe. A spring is arranged between the floating seal ring and the pipe cavity of the fixed pipe.

[0011] When the movable end of the second telescopic mechanism abuts against the inner wall of the blanking tank, the inlet pipe extends into the rotary cylinder; an exhaust valve is provided at the upper part of the blanking tank, and a discharging valve is provided at the lower part.

[0012] One end of the first telescopic mechanism is connected to the lower part of the base, and the other end is connected to the part of the bottom plate close to the fluidized bed reactor. The bottom surface of the side of the bottom plate close to the second rotary joint is hinged to the upper part of the base.

[0013] The beneficial effects produced by the present invention are:

[0014] 1. Connector pipes are provided at both ends of the rotary drum and are rotatably connected to the rotary joints of the blanking tank and the material conveying pipeline respectively. The other end of the material conveying pipeline is connected to the fluidized reactor. After the substrate is coated by atomic layer deposition or chemical vapor deposition in the fluidized reactor, it can be directly conveyed to the rotary drum through fluidized transportation without cooling treatment. After the conveying is completed, the rotary drum can rotate and reactant precursors can be introduced for chemical vapor deposition coating.

[0015] 2. By providing a telescopic mechanism II and an air inlet pipe driven by the telescopic mechanism II in the blanking tank, the rotary drum can be sealed during CVD coating according to the reaction process and opened after the CVD coating is completed.

[0016] 3. The connector pipe of the rotary drum is rotatably connected to the rotary joint of the blanking tank, and the fixed pipe of the rotary joint is sealed by the movable end of the telescopic mechanism II in the blanking tank. It ingeniously realizes static sealing through the static fixed pipe and the movable end of the telescopic mechanism II, and dynamic sealing through the spring, floating sealing ring, oil retaining ring, bearing, and retaining ring between the rotating pipe and the fixed pipe.

[0017] 4. By providing a flip - up bottom plate under the rotary drum, the substrate after CVD coating can be poured into the blanking tank.

[0018] 5. The blanking tank isolates the external environment from the high - temperature environment inside the tank. After CVD coating, the high - temperature coated substrate can be poured into the blanking tank for temporary storage without cooling.

[0019] 6. The connector pipe is convenient to disassemble, which speeds up the unloading speed after CVD coating.

[0020] 7. The three - way valve on the material conveying pipe connected to the bottom of the fluidized reactor is also connected to the vacuum exhaust pipe, which is used to discharge the reaction gas after reaction and the residual gas during purging.

[0021] 8. The fluidized reactor and the rotary drum can simultaneously perform atomic layer deposition coating and chemical vapor deposition coating operations respectively, or perform different chemical vapor deposition coating operations without interference, saving the overall process processing time.

[0022] The present invention can carry out different reactant precursor reactions respectively. By combining the reactor structure, cylinder, and driving device, it effectively improves the transfer efficiency of high - temperature materials after each reaction, reduces production time and costs, lowers equipment loss and maintenance costs, improves the safety of the production process, reduces the safety risks brought by manual operation, and has strong adaptability. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is the structural schematic diagram of the present invention;

[0024] Figure 2For Figure 1 An enlarged schematic view of the components within the middle circular frame;

[0025] Figure 3 A schematic structural view of the blanking tank of the present invention;

[0026] Figure 4 For Figure 3 An enlarged schematic view of the components within the middle dashed frame. Detailed implementation manners

[0027] In order to make the objectives, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present disclosure. Apparently, the described embodiments are some, but not all, of the embodiments of the present disclosure. All other embodiments obtained by those of ordinary skill in the art based on the described embodiments of the present disclosure without creative efforts shall fall within the scope of protection of the present disclosure.

[0028] As Figures 1-4 shown, a fluidized bed - rotary kiln continuous coating device includes a feeding tank 1, a fluidized bed reactor 2, a rotary kiln 3 and a blanking tank 4 that are sequentially connected through a material conveying pipe 5.

[0029] The top of the feeding tank 1 is provided with a feeding port and a feeding valve 6d. The feeding port is detachably connected to a sealing cover plate, and can be sealed by the sealing cover plate after the reaction material enters. The bottom of the feeding tank 1 is provided with a discharging valve 7a, which can control the output of the reaction material.

[0030] The fluidized bed reactor 2 includes a heating jacket 9 and a reaction chamber 10 arranged on a bracket 8. The heating jacket 9 is sleeved on the outer side of the lower part of the reaction chamber 10. The upper part of the reaction chamber 10 is connected to a vacuum pump through a vacuum exhaust pipe 11. A filtering device 12 is provided at the inlet of the vacuum exhaust pipe 11. The filtering device 12 is used to prevent powder from flowing out of the reaction chamber 10 along with the tail gas. A feeding valve 6a and a discharging valve 7b of the reaction chamber 10 are provided at the material inlet on the side of the reaction chamber 10 and the material outlet below the reaction chamber. The feeding valve 6a and the discharging valve 7b of the reaction chamber 10 include butterfly valves, ball valves or gate valves. A material conveying pipe 5a is connected between the feeding valve 6a of the reaction chamber 10 and the discharging valve 7a of the feeding tank; An air inlet valve 6c is further provided at the bottom of the reaction chamber 10, and a reaction precursor and high-pressure gas can be introduced into the air inlet valve 6c.

[0031] The rotary kiln 3 includes a second heating jacket 14 and a reactor disposed on the bottom plate 13. Bearing supports 15 are provided at both the left and right ends of the heating jacket 14. The reactor includes a rotary cylinder 16, a left reduced-diameter pipe 17a, and a right reduced-diameter pipe 17b. Among them, the rotary cylinder 16 is disposed inside the second heating jacket 14, and when sleeved, there is a clearance fit between the two. Both the left and right ends of the rotary cylinder 16 are connected to the reduced-diameter pipes 17. The two reduced-diameter pipes 17 respectively pass through both ends of the second heating jacket 14 and are rotatably connected to the bearing supports 15.

[0032] A flange cover 18 is sealed at the left end where the left reduced-diameter pipe 17a extends out of the second heating jacket 14. A gas guide pipe 19 is centrally provided on the flange cover 18. The gas guide pipe 19 of the rotary cylinder 3 is detachably connected to the rotary pipe 20 of the rotary joint through a joint pipe. The fixed pipe 21 of the rotary joint is communicated with the discharge valve 7b through a material conveying pipe 5b, as Figure 2 , the joint pipe includes a corrugated pipe 36, a hoop 37, and an annular gasket 35. The annular gasket 35 is clamped between both ends of the corrugated pipe 36 and is respectively between the gas guide pipe 19 and the rotary pipe 20. The hoop 37 is used to surround and apply a pressure towards the annular gasket 35 to the corrugated pipe 36, the gas guide pipe 19, and the rotary pipe 20. Each rotary joint includes a fixed pipe 21 and a rotary pipe 20. One end of the fixed pipe 21 is provided with an inwardly concave pipe cavity. An oil baffle ring 32, a bearing 31, and a retaining ring 34 are sleeved on the outer periphery of the end of the rotary pipe 20 that extends into the pipe cavity. The oil baffle ring 32, the bearing 31, and the retaining ring 34 are arranged in sequence from the inside to the outside in the pipe cavity. The rotary pipe 20 is rotatably connected to the fixed pipe 21 through the bearing 21. The retaining ring 34 is fixedly connected to the pipe cavity and has a clearance fit with the rotary pipe 20. An annular floating sealing ring 33 is provided between the inner end of the pipe cavity and the rotary pipe 20. A spring 38 is provided between the floating sealing ring 33 and the pipe cavity of the fixed pipe 21. The hoop 37 is detachably provided to facilitate disconnecting the connection between the corrugated pipe 36, the rotary pipe 20, and the gas guide pipe 19.

[0033] A three-way valve 6b is provided on the fixed pipe 21. A material conveying pipe 5b is connected between the discharge valve 7b of the fluidized bed reactor 2 and the gas guide pipe 19 of the rotary kiln. The fluidizing gas output from the reaction chamber 10 and the coated substrate carried by it can be introduced into the rotary cylinder 16 through the fixed pipe 21. The three-way valve 6b is also communicated with a vacuum exhaust pipe 11. The gas in the rotary cylinder 16 and the residual gas after reaction in the rotary cylinder 16 can be discharged through the vacuum exhaust pipe 11.

[0034] The left end of the rotary cylinder 16 close to the corrugated pipe 36 is configured as a tapered cavity that gradually expands from the reduced-diameter pipe 17a to the rotary cylinder. The cross-sectional area of the middle section of the rotary cylinder 16 is equal at different distances relative to the corrugated pipe 36. The reduced-diameter pipe 17a is a columnar body with an equal diameter along the axial direction. A spiral blade is provided inside the rotary cylinder 16, which can drive the material to move.

[0035] As Figure 4 For Figure 3The enlarged view of the dashed box part in [description]. The right reduced-diameter pipe 17b extending out of the right end of the second heating jacket 14 is also sealed with a flange cover 18. A gas guide pipe 19 is centrally arranged on the flange cover 18. The gas guide pipe 19 is detachably connected to the rotating pipe 20 of the rotary joint through a connecting pipe. The fixed pipe 21 of the rotary joint is communicated with the blanking tank 4. The fixed end of the cylinder 23 is fixed inside the blanking tank 4 away from the side of the rotary drum 16. The movable end of the cylinder 23 is fixed with an air inlet pipe 27. The end of the air inlet pipe 27 away from the cylinder 23 extends into the reaction chamber 10 through the rotary joint and the right reduced-diameter pipe 17b. The end of the air inlet pipe 27 close to the cylinder passes through the movable end of the cylinder centrally and is also communicated with the precursor gas pipeline outside the blanking tank 4 through a hose. The end face of the movable end of the cylinder 23 (also called the piston) facing the fixed pipe 21 is adapted to the edge of the fixed pipe 21. When the movable end of the cylinder 23 extends and approaches the fixed pipe 21, the movable end of the cylinder 23 seals the end face of the fixed pipe 21, forming a sealed environment inside the rotary kiln 3. A discharge valve 7c is arranged at the bottom of the blanking tank 4 to control the output of materials. The connecting pipe and Figure 2 is the same as that in

[0036] The second heating jacket 14 and the blanking tank 4 are installed on the bottom plate 13. A driving device is installed on the bottom plate 13 for driving the rotary drum 16 to rotate. One side of the bottom plate 13 close to the fluidized bed reactor 3 is connected to the bottom of the base 25 through a first telescopic mechanism 24. The bottom surface of the part of the bottom plate 13 close to the right rotary joint is connected to the upper part of the base 25 through a hinge 26. The first telescopic mechanism 24 can be used to drive the bottom plate 13 to rotate relative to the hinge 26.

[0037] Further, the process of using the fluidized bed - rotary kiln continuous coating device includes: inputting the reaction substrate from the feed port of the feeding tank 1, covering the sealing cover plate after input, inputting high - pressure gas through the feed valve 6d, and opening the discharge valve 7a of the feeding tank 1 and the feed valve 6a of the fluidized bed reactor 2. After the substrate enters the fluidized bed reactor 2 with the high - pressure gas, close the feed valve 6a of the fluidized bed reactor 2. Heat up the reaction chamber 10. After the temperature reaches the reaction temperature, open the intake valve 6c at the bottom of the reaction chamber 10 and alternately introduce fluidizing gases carrying the first reaction precursor and the second reaction precursor to carry out atomic layer deposition coating in the reaction chamber 10, or introduce one precursor to carry out chemical vapor deposition. After the coating is completed, operate the cylinder 23 so that the right end of the rotary drum 16 is no longer sealed by the movable end of the cylinder 23. Open the discharge valve 7b of the fluidized bed reactor and the three - way valve 6b, and reversely input high - pressure nitrogen through the vacuum discharge pipe 11. Under the pressure of the high - pressure nitrogen, the coated high - temperature substrate is transferred into the rotary drum 16. Then operate the cylinder 23 to seal the right end of the rotary drum 16, introduce nitrogen for purging through the inlet pipe 27, and discharge from the three - way valve 6b. Then close the three - way valve 6b, and the rotary drum 16 starts to heat up and react. Introduce the third reaction precursor and nitrogen through the inlet pipe 27. After the reaction is completed, open the three - way valve 6b to discharge the residual gas. Disconnect the bellows 36 at the left end of the rotary drum 16 from the rotating pipe 20 and the gas guide pipe 19. Operate the first telescopic mechanism 24 to make the bottom plate 13 rotate around the hinge 26 until the central axis of the rotary drum 16 is perpendicular to the horizontal plane. The movable end of the cylinder 23 contracts away from the rotary drum 16. The spiral blades in the rotary drum 16 drive the coated substrate to fall into the discharging tank 4. Then operate the telescopic mechanism 24 to make the central axis of the rotary drum 16 perpendicular to the horizontal plane. The movable end of the cylinder 23 extends and tightly connects with the fixed pipe 21 at the right end of the rotary drum 16, reconnect the bellows 36 at the left end of the rotary drum 16 with the rotating pipe 20 and the gas guide pipe 19. The rotary drum 16 waits for the secondary reaction. At this time, open the discharge valve 7c at the bottom of the discharging tank 4 to complete the discharging.

[0038] The fluidized bed reactor and the rotary drum can simultaneously carry out atomic layer deposition coating and chemical vapor deposition coating operations respectively, or carry out different chemical vapor deposition coating operations without interfering with each other, saving the overall process treatment time. For example, pyrolyzing silane to deposit silicon on the substrate in the fluidized bed, and then pyrolyzing acetylene to coat carbon in the rotary kiln.

[0039] The above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A fluidized bed - rotary kiln continuous coating device, characterized in that, It includes a feeding tank (1), a fluidized bed reactor (2), a rotary drum (16) and a discharging tank (4); the rotary drum (16) is arranged inside a heating jacket (14), the left / right ends of the rotary drum (16) are connected to reducing pipes (17a, 17b) and are rotatably connected to the two ends of the heating jacket (14), and the reducing pipes (17a, 17b) are respectively detachably connected to the rotary pipes (20) of the first / second rotary joints through connecting pipes. The fixed pipe (21) of the first rotary joint is communicated with the discharging valve (7) at the bottom of the fluidized bed reactor (2) through a material conveying pipe (5) provided with a control valve. The fixed pipe (21) of the second rotary joint is communicated with the discharging tank (4). The feeding tank (1) is communicated with the fluidized bed reactor (2) through a material conveying pipe (5) provided with a control valve; the heating jacket (14) and the discharging tank (4) are fixed on a bottom plate (13), and the part of the bottom plate (13) close to the second rotary joint is connected to a base (25) through a hinge (26). The bottom plate (13) is further connected to a first telescopic mechanism (24), and the first telescopic mechanism (24) can be used to drive the bottom plate (13) to rotate relative to the hinge (26). One side inside the discharging tank (4) is fixed to the fixed end of a second telescopic mechanism (23). The movable end of the second telescopic mechanism (23) can extend towards the rotary drum (16) and can seal the fixed pipe (21) of the second rotary joint when it abuts against the inner wall of the discharging tank (4). One end of an air inlet pipe (27) passes through the movable end of the second telescopic mechanism (23) in the middle of the discharging tank (4) and extends towards the rotary drum (16). The other end of the air inlet pipe (27) is communicated with a precursor gas pipeline outside the discharging tank (4) through a hose.

2. The fluidized bed - rotary kiln continuous coating device according to claim 1, characterized in that, The bottom plate (13) is equipped with a driving device for driving the rotary drum (16) to rotate.

3. The fluidized bed - rotary kiln continuous coating device according to claim 1, characterized in that, The fixed pipe (21) of the first rotary joint is communicated with the bottom of the fluidized bed reactor (2) through a material conveying pipe (5) provided with a three-way valve (6b), and the three-way valve (6b) is also communicated with a vacuum exhaust pipe (11) at the top of the fluidized bed reactor (2).

4. The fluidized bed - rotary kiln continuous coating device according to claim 1, characterized in that, The fluidized bed reactor (2) includes a first heating jacket (9) and a reaction chamber (10) arranged on a bracket (8). The first heating jacket (9) is sleeved on the outer side of the lower part of the reaction chamber (10). The upper part of the reaction chamber (10) is connected to the lower part of the feeding tank (1) through a material conveying pipe (5) provided with a control valve. A feeding valve (6c) for controlling the introduction of the first / second reaction gas or high-pressure gas is further arranged at the bottom of the reaction chamber (10).

5. The fluidized bed - rotary kiln continuous coating device according to claim 1, characterized in that, The connecting pipe includes a corrugated pipe (36), a hoop (37), and an annular gasket (35). The annular gasket (35) is clamped between the two ends of the corrugated pipe (36) and between the reducing pipe and the rotary pipe (20) respectively. The hoop (37) is used to surround and apply pressure towards the annular gasket (35) to the corrugated pipe (36), the reducing pipe and the rotary pipe (20).

6. The fluidized bed - rotary kiln continuous coating device according to claim 1, characterized in that, Each of the rotary joints includes a fixed pipe (21) and a rotary pipe (20). One end of the fixed pipe (21) is provided with an inwardly concave lumen. An oil baffle ring (32), a bearing (31), and a retaining ring (34) are sleeved on the outer periphery of the end of the rotary pipe (20) extending into the lumen. The oil baffle ring (32), the bearing (31), and the retaining ring (34) are arranged in sequence from the inside to the outside in the lumen. The rotary pipe (20) is rotatably connected to the fixed pipe (21) through the bearing (21). The retaining ring (34) is fixedly connected to the lumen and has a clearance fit with the rotary pipe (20). An annular floating sealing ring (33) is provided between the inner end of the lumen and the rotary pipe (20). A spring (38) is provided between the floating sealing ring (33) and the lumen of the fixed pipe (21).

7. The fluidized bed - rotary kiln continuous coating device according to claim 1, characterized in that, When the movable end of the second telescopic mechanism (23) abuts against the inner wall of the blanking tank (4), the air inlet pipe (27) extends into the rotary cylinder (16); an exhaust valve is provided at the upper part of the blanking tank (4), and a discharge valve is provided at the lower part of the blanking tank (4).

8. The fluidized bed - rotary kiln continuous coating device according to claim 1, characterized in that, One end of the first telescopic mechanism (24) is connected to the lower part of the base (25), and the other end is connected to the part of the bottom plate (25) close to the fluidized bed reactor (2). The part of the bottom plate (25) close to the second rotary joint is connected to the upper part of the base (25) through a hinge (26).

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