Spraying device and semiconductor growth equipment

Abstract

The invention discloses a spraying device and semiconductor growth equipment. The spraying device comprises a cover body provided with at least one air inlet part, and a spraying piece arranged on the cover body so as to form a diffusion cavity between the cover body and the spraying piece. At least one isolation part is detachably arranged in the diffusion cavity, the diffusion cavity is divided into at least two air chambers, namely, different numbers of isolation parts can be flexibly arranged according to the requirements for the air chambers, each isolation part comprises a plurality of inserting units, and the spraying area of the air chambers can be flexibly changed by sequentially and detachably connecting the inserting units end to end. Therefore, the spraying area of each air chamber can be adjusted according to different process requirements.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor devices, and particularly to a spraying device and a semiconductor growth device. Background Art

[0002] In the manufacturing equipment of semiconductor devices, the spraying device is a key device, which provides a reaction source gas capable of forming a compound semiconductor to a substrate, and the reaction source gas grows on the substrate, for example, epitaxial growth to form a compound semiconductor thin film. The structure of the spraying device largely determines the flow and distribution state of the reaction source gas. It is necessary to be able to match the chamber pressure and gas flow rate through structural designs such as the size and arrangement of spraying holes, and achieve precise gas transport and fluid dynamics design, so as to grow a thin film with good quality on the substrate. In some cases, it is also necessary to set a structure in the spraying device that can prevent the reaction source gases from mixing in the spraying device according to process requirements and the characteristics of different reaction source gases, or adjust the air flow through the partition coupling of the spraying device to improve the uniformity of thin film growth and film formation quality.

[0003] In the prior art, the partition plate for partitioning in the spraying device is a fixed and non-detachable structure, which makes the partitions of each gas chamber fixed, the air flow adjustment is not flexible, and the universality of the spraying device is also limited.

[0004] Therefore, it is necessary to provide a spraying device and a semiconductor growth device to solve the above problems existing in the prior art. Summary of the Invention

[0005] The purpose of the present invention is to provide a spraying device and a semiconductor growth device including the spraying device, which can flexibly adjust the spraying area of each partition in the spraying device according to the change of process requirements.

[0006] To achieve the above purpose, the technical solution of the present invention is as follows: A spraying device, comprising: A cover body provided with at least one air inlet part; A spraying member arranged on the cover body to form a diffusion chamber between the spraying member and the cover body, the diffusion chamber communicates with each air inlet part, and communicates with the outside through the spraying member; At least one isolation part detachably arranged between the cover body and the spraying member, dividing the diffusion chamber into at least two gas chambers; The isolation part includes a plurality of plug-in units, and the plurality of plug-in units are detachably connected end to end in sequence to form a closed structure.

[0007] A semiconductor growth device, comprising a spraying device, and a base arranged opposite to the spraying device and used for carrying a substrate.

[0008] By adopting the above technical solution, at least one isolation part is detachably arranged in the diffusion cavity, and the diffusion cavity is divided into at least two air chambers. That is, the number of isolation parts can be flexibly set according to the requirements for the air chambers. The isolation part includes a plurality of plug-in units, and the spraying area of the air chamber can be flexibly changed by sequentially connecting the plug-in units to each other end to end. In this way, the spraying areas of the air chambers can be adjusted according to different process requirements.

[0009] Optionally, at least part of the plug-in units are detachably arranged on the spraying part and / or the cover body.

[0010] Optionally, the plug-in units are detachably arranged on the spraying part, and the coefficient of thermal expansion of the plug-in units is less than or equal to the coefficient of thermal expansion of the spraying part.

[0011] Optionally, the composition material of any one of the spraying part and the isolation part is a heat-resistant material, and / or the surface of any one of the spraying part and the isolation part is covered with a heat-resistant coating. The heat-resistant material includes graphite or a metal with a melting point or softening point not lower than 2000 degrees Celsius, and the heat-resistant coating includes silicon carbide or tantalum carbide.

[0012] Optionally, the number of the isolation parts is at least 2, and the isolation parts are sequentially sleeved from the inside to the outside.

[0013] Optionally, the spraying part includes a plurality of spraying holes, and the plurality of spraying holes form a plurality of spraying rings that sequentially surround from the inside to the outside on the spraying part. The isolation part is located between adjacent spraying rings.

[0014] Optionally, a clamping groove is formed between adjacent spraying rings to detachably fit at least one of the plug-in units of the isolation part.

[0015] Optionally, the clamping groove is in a circular closed structure around the center of the spraying part; The isolation part is detachably arranged in the clamping groove, and the plug-in units are connected end to end in the clamping groove to form a ring.

[0016] Optionally, at least one clamping groove is formed in the circumferential direction in the area between adjacent spraying rings, and there is a gap between adjacent clamping grooves; Part of the plug-in units are detachably adapted to the corresponding clamping grooves.

[0017] Optionally, the spraying part includes a plurality of spraying holes, and the plurality of spraying holes form a plurality of spraying rings that sequentially surround from the inside to the outside on the spraying part; part of the plug-in units of the isolation part are positioning plug-in parts detachably corresponding to the spraying holes, and the other plug-in units are extending plug-in parts sequentially detachably arranged between adjacent positioning plug-in parts. The extending plug-in parts are located between adjacent spraying rings.

[0018] Optionally, a positioning post is provided on one side of the positioning insertion part facing the spraying part. The positioning post is detachably arranged corresponding to the spraying hole and its bottom is received in the spraying hole.

[0019] Optionally, the exposed surface of the positioning insertion part facing the spraying part except the positioning post, and the surface of the extending insertion part facing the spraying part are both fitted with the area between the adjacent spraying rings of the spraying part.

[0020] Optionally, the positioning insertion part is of a folded structure, and the folded structure includes at least one of a U-shaped structure, a V-shaped structure, a corrugated structure or an arc-shaped structure.

[0021] Optionally, among adjacent plug-in units, a convex structure is provided on the side wall of one plug-in unit, and a concave structure adapted to the convex structure to achieve detachable concave-convex fit is provided on the side wall of the other plug-in unit, so that the side walls of the adjacent plug-in units are mutually fitted; Define the first direction as the direction from the side wall of one plug-in unit to the side wall of the adjacent plug-in unit; The size of the convex structure in the second direction increases and then decreases along the first direction, and the second direction is perpendicular to the first direction.

[0022] Optionally, the gap between adjacent two plug-in units is 0.01-0.05 mm. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a cross-sectional view of the internal structure of a spraying device according to an embodiment of the present invention; Figure 2 is a schematic assembly structure diagram of a spraying part and a separation part according to an embodiment of the present invention; Figure 3 is another schematic assembly structure diagram of a spraying part and a separation part according to an embodiment of the present invention; Figure 4 is Figure 3 a schematic assembly structure diagram of the shown clamping groove and the separation part; Figure 5 is Figure 3 another schematic assembly structure diagram of the shown clamping groove and the separation part; Figure 6 is a schematic assembly structure diagram when two adjacent extending insertion parts are connected according to an embodiment of the present invention; Figure 7 is a schematic assembly structure diagram when the positioning insertion part and the adjacent extending insertion part are connected according to an embodiment of the present invention; Figure 8Schematic structural diagram of a positioning plug-in member with positioning columns provided at the bottom according to an embodiment of the present invention.

[0024] Reference numerals: 100, cover body; 200, spraying member; 210, spraying holes; 220, clamping grooves; 230, spraying ring; 300, diffusion chamber; 310, central gas chamber; 320, middle gas chamber; 330, edge gas chamber; 400, isolation part; 410, plug-in unit; 411, convex structure; 412, concave structure; 420, positioning plug-in member; 421, positioning column; 430, extended plug-in member. Detailed implementation manners

[0025] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without making creative efforts shall fall within the protection scope of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings as understood by those of ordinary skill in the art in the field to which the present invention belongs. The words such as "including" used herein are intended to mean that the elements or items appearing before this word cover the elements or items listed after this word and their equivalents, without excluding other elements or items.

[0026] The following will be combined with the attached Figure 1-8 , and a further detailed description will be given to the specific implementation manners of the present invention.

[0027] The embodiment of the present invention provides a spraying device, and the spraying device is used for semiconductor growth equipment. The semiconductor growth equipment includes, but is not limited to, chemical vapor deposition (Chemical Vapor Deposition, CVD) equipment, and may also be physical vapor deposition (Physical Vapor Deposition, PVD) equipment. The chemical vapor deposition device among them may be a plasma-enhanced chemical vapor deposition (Plasma-Enhanced Chemical Vapor Deposition, PECVD) equipment, a metal-organic chemical vapor deposition (Metal-organic Chemical Vapor Deposition, MOCVD) equipment, etc. This embodiment is described by taking an MOCVD equipment as an example. It should be understood that this equipment is only exemplary, and the present invention is not limited to this kind of equipment.

[0028] Referring to Figure 1 The spraying device shown in The cover body 100 is provided with at least one air inlet part (not marked in the figure) to introduce gas into each air chamber; The spraying part 200 is arranged on the cover body 100 to form a diffusion chamber 300 between the spraying part 200 and the cover body 100. The diffusion chamber 300 communicates with each air inlet part and is communicated with the outside through the spraying part 200; At least one isolation part 400 is detachably arranged between the cover body 100 and the spraying part 200 to divide the diffusion chamber 300 into at least two air chambers, and adjacent air chambers are isolated from each other; At least one isolation part 400 includes a plurality of plugging units 410, and the plurality of plugging units 410 are detachably connected end to end in sequence to form a closed structure.

[0029] In some embodiments, the cover body 100 is provided with a plurality of air inlet parts, and the air inlet parts are evenly distributed on the cover body 100. At the same time, the air inlet parts are connected to an external gas supply device, and the gas supply device provides process gas. The process gas enters different positions of the diffusion chamber 300 through different air inlet parts. In order to evenly diffuse the process gas, a spraying part 200 is further arranged on the cover body 100. The spraying part 200 is plate-shaped, and a plurality of spraying holes 210 are formed in the spraying part 200. The spraying holes 210 penetrate through the spraying part 200 along the thickness direction of the spraying part 200. There is a gap between the end face of the spraying part 200 and the cover body 100, so that a diffusion chamber 300 is formed between the spraying part 200 and the cover body 100. The spraying holes 210 communicate with the diffusion chamber 300. The process gas of the air inlet part enters the diffusion chamber 300, and then enters the process chamber after flowing through the spraying holes 210.

[0030] In the prior art, in order to avoid significant thermal expansion and plastic deformation of the spraying part 200 under the influence of long-term high temperature (for example, above 800 degrees Celsius), additional water cooling needs to be set, and the maintenance cost is high. To solve this problem, in some embodiments, the composition material of either the spraying part 200 or the isolation part 400 is a heat-resistant material. In some embodiments, the surface of either the spraying part 200 or the isolation part 400 is covered with a heat-resistant coating. The heat-resistant coating includes silicon carbide or tantalum carbide.

[0031] In some embodiments, the heat-resistant material includes graphite, or a metal with a melting point or softening point not lower than 2000 degrees Celsius.

[0032] In some specific embodiments, the plugging unit 410 is made of graphite material, or a coating is applied on the plugging unit 410, such as graphite plated with silicon carbide or graphite plated with tantalum carbide. In some embodiments, the material of the plugging unit 410 can also be other high-temperature-resistant metal materials, as long as the melting point or softening point ≥ 2000 °C is satisfied, such as molybdenum metal.

[0033] In some embodiments, refer to Figure 1 and Figure 2, at least one isolation part 400 is provided, and the isolation part 400 is placed in the diffusion chamber 300, that is, the isolation part 400 is placed between the cover body 100 and the spraying part 200, and the diffusion chamber 300 can be at least divided into two gas chambers. Specifically, when one isolation part 400 is provided, the diffusion chamber 300 is divided into two gas chambers; when two isolation parts 400 are provided, the two isolation parts 400 are sleeved from the inside to the outside so that the isolation part 400 divides the diffusion chamber 300 into three gas chambers. More specifically, N isolation parts 400 are provided, N is a positive integer, and the N isolation parts 400 are sequentially sleeved from the inside to the outside, and the diffusion chamber 300 is separated into N + 1 gas chambers.

[0034] In some specific embodiments, the number of the isolation parts 400 is at least two. When two or more isolation parts 400 are provided, the isolation parts 400 are sequentially sleeved from the inside to the outside.

[0035] In some more specific embodiments, referring to Figure 1 and Figure 2 , two isolation parts 400 are provided, and the two isolation parts 400 are sequentially sleeved from the inside to the outside, and together they separate the diffusion chamber 300 into three gas chambers, namely a central gas chamber 310, a middle gas chamber 320, and an edge gas chamber 330. In some more specific embodiments, the inner diameter of the central gas chamber 310 is 8 to 16 cm, and a 4- to 6-inch substrate can be placed correspondingly below it; the middle diameter surrounded by the middle gas chamber 320 is 12 to 21 cm, and an 8-inch substrate can be placed correspondingly below it; the outer diameter surrounded by the edge gas chamber 330 is 18 to 31 cm, and a 12-inch substrate can be placed correspondingly below it. The substrate described in this embodiment can be a silicon substrate, a silicon carbide substrate, etc. On the basis of the spraying device corresponding to the epitaxial growth of large-size substrates, by setting the detachable isolation part 400, it is easy to obtain the spraying range required for the epitaxial growth of small-size substrates, realize the epitaxial growth of multiple substrates with different sizes, and improve the compatibility of the semiconductor growth equipment including this spraying device. For the epitaxial wafer growth of small-size substrates, the middle gas chamber 320 is used to introduce reaction gases, and an inert purge gas is introduced into the space between the middle gas chamber 320 and the edge gas chamber 330, which can confine the reaction gases, isolate the reaction gases from the inner side wall of the equipment, and prevent the problem of consuming reaction gases due to the growth of the material layer on the inner side wall.

[0036] In some embodiments, the flexibility of zonal coupling adjustment can be improved by detachably arranging the isolation part 400. For example, if the isolation part 400 is not provided, there is only 1 spraying space in the diffusion chamber 300, and zonal coupling control cannot be achieved. If 2 isolation parts 400 are provided, the diffusion chamber 300 is divided into three spraying spaces: a central gas chamber 310, a middle gas chamber 320, and an edge gas chamber 330. By controlling at least one of the flow rate, type, and molecular weight of the gas introduced into the three spraying spaces, zonal coupling is achieved to adjust the epitaxial uniformity. More specifically, a reaction gas with a first flow rate, component, or molecular weight is introduced into the central gas chamber 310; a reaction gas with a second flow rate, component, or molecular weight is introduced into the middle gas chamber 320; and a reaction gas with a third flow rate, component, or molecular weight or a purge gas is introduced into the edge gas chamber 330 to prevent the problem of the reaction gas being consumed due to the growth of a material layer on the inner sidewall of the device.

[0037] In some embodiments, at least a part of the plugging unit 410 is detachably arranged on the spraying member 200 and / or the cover body 100. Specifically, at least a part of the plugging unit 410 is detachably arranged on the spraying member 200, so that the isolation part 400 is detachably arranged on the spraying member 200; at least a part of the plugging unit 410 is detachably arranged on the cover body 100, so that the isolation part 400 is detachably arranged on the cover body 100.

[0038] Considering the complexity of various structures (such as a temperature measuring device and a cooling device) including the air inlet part arranged on the cover body 100 of some process chambers, in some specific embodiments, the plugging unit 410 is preferably selected to be detachably arranged on the spraying member 200 to avoid mutual interference and influence on various other structures arranged on the cover body 100. Moreover, when arranged on the spraying member 200, when it is necessary to adjust the gas chamber area, the cover body 100 can be opened for adjustment, which is convenient for operation.

[0039] When the plugging unit 410 is detachably arranged on the spraying member 200, the thermal expansion coefficient of the plugging unit 410 is less than or equal to the thermal expansion coefficient of the spraying member 200.

[0040] In some embodiments, especially when the process temperature is high, resulting in a significant thermal expansion effect of the spraying member 200 and the plugging unit 410, since the material with a high thermal expansion coefficient has a greater thermal deformation amount at the same temperature, due to the high thermal expansion coefficient of the spraying member 200, the deformation degree of the spraying member 200 under the thermal expansion effect is higher than that of the plugging unit 410, avoiding the expansion stress on the spraying holes 210 caused by the thermal expansion deformation of the plugging unit 410. If the thermal expansion coefficient of the plugging unit 410 is greater than the thermal expansion coefficient of the spraying member 200, then the deformation degree of the spraying plate of the spraying member 200 under the thermal expansion effect is lower than that of the plugging unit 410, and plastic deformation will occur at the connection between the plugging unit 410 and the spraying member 200, and even the spraying member 200 or the plugging unit 410 may be damaged.

[0041] In some specific embodiments, the temperature-resistant material includes graphite or metal, and the melting point or softening point of the metal is ≥2000 °C.

[0042] In order to facilitate the effective control of the gas flow rate ejected from each gas chamber and maximize the utilization of the inherent spray holes 210 of the spray member 200, it is further designed such that the insertion units 410 in the isolation part 400 will not interfere with the process of gas passing through the spray holes 210 as much as possible and can maximize the utilization rate of the spray holes 210.

[0043] The spray member 200 includes a plurality of spray holes 210. A plurality of spray holes 210 form a plurality of spray rings 230 that sequentially surround from the inside to the outside on the spray member 200. The isolation part 400 is located between adjacent spray rings 230. In some embodiments, referring to Figure 2 , the isolation part 400 is located between adjacent spray rings 230, that is, each insertion unit 410 in the isolation part 400 is arranged between adjacent spray rings 230. Specifically, the insertion unit 410 is detachably arranged between adjacent spray rings 230, so that the connection between the insertion unit 410 and the spray member 200 will not block the spray holes 210, and thus will not interfere with the process of gas passing through the spray holes 210.

[0044] In order to facilitate the insertion unit 410 to be detachably arranged between adjacent spray rings 230 on the spray member 200, a clamping groove 220 is provided between adjacent spray rings 230 to detachably fit at least one insertion unit 410 of the isolation part 400.

[0045] In some embodiments, referring to Figure 3 , Figure 4 and Figure 5 , a clamping groove 220 for detachably arranging the insertion unit 410 is provided on the spray member 200. The clamping groove 220 is a closed structure that is annular around the middle of the spray member 200; the isolation part 400 is detachably arranged in the clamping groove 220, and each insertion unit is connected end to end in the clamping groove 220 to form a ring.

[0046] In some specific embodiments, the clamping groove 220 is circular or polygonal annular, which is not limited herein, as long as the clamping groove 220 can separate adjacent spray rings 230.

[0047] In some specific embodiments, referring to Figure 4 , the clamping groove 220 is a semi-through groove, that is, the clamping groove 220 does not penetrate the spray member 200. At the same time, each insertion unit 410 is arranged in the clamping groove 220 and is clamped in the clamping groove 220.

[0048] In some embodiments, referring to Figure 5, at least one clamping groove 220 is circumferentially formed in the area between adjacent spray rings 230, that is, a plurality of clamping grooves 220 are formed on the spray member 200, and there is an interval between adjacent clamping grooves 220. Each clamping groove 220 is sequentially formed in the area between adjacent spray rings 230 in the circumferential direction; in some specific embodiments, each clamping groove 220 is sequentially formed in the area between adjacent spray rings 230 at circumferential intervals. Part of the insertion units 410 and each corresponding clamping groove 220 are detachably arranged in the clamping groove 220. The adjacent insertion units 410 among these insertion units 410 are sequentially detachably connected to other insertion units 410, and these other insertion units 410 are attached to the area between adjacent spray rings 230 of the spray member 200 to ensure airtightness and minimize the possibility of shielding the spray holes 210 and affecting the spray effect. This design makes the adjustment of the area surrounded by each air chamber more flexible, and different-shaped insertion units 410 can be sequentially and detachably arranged between adjacent clamping grooves 220.

[0049] In some specific embodiments, the clamping groove 220 is a semi-through groove, that is, the clamping groove 220 does not penetrate the spray member 200. At the same time, each clamping groove 220 corresponds to an insertion unit 410. During the process of connecting the isolation part 400 and the spray member 200, the insertion unit 410 corresponding to the clamping groove 220 is detachably arranged in the clamping groove 220, and the other insertion units 410 are attached to the spray member 200. At the same time, the other insertion units 410 are also placed between adjacent spray rings 230.

[0050] In some more specific embodiments, the clamping groove 220 is arc-shaped or straight-plate-shaped, which is not limited herein, as long as the insertion unit 410 can be arranged in the clamping groove 220, so that the isolation part 400 and the spray member 200 can be detachably arranged.

[0051] In some embodiments, there is airtightness between the air chambers separated by the isolation part 400. The detachable connection method between the clamping groove 220 and the insertion unit 410, the detachable assembly relationship between adjacent insertion units 410, and the attachment of each insertion unit 410 to the cover body 100 are all necessary to ensure the airtightness between the air chambers. The specific implementation methods are conventional technical means in the art.

[0052] In some embodiments, the shape of the insertion unit 410 can be arc-shaped, straight-plate-shaped, U-shaped, V-shaped, waveform, etc., which is not limited herein.

[0053] In some specific embodiments, referring to Figure 4 , the clamping groove 220 and the spray hole 210 are not communicated, so as to reduce the possibility of affecting the spray range of some spray holes 210 after the insertion unit 410 is arranged in the clamping groove 220.

[0054] The spraying member 200 includes a plurality of spraying holes 210, and the plurality of spraying holes 210 form a plurality of spraying rings 230 that are sequentially surrounded from the inside to the outside on the spraying member 200; in the isolation part 400, some of the insertion units 410 are positioning insertion members 420 that are detachably disposed corresponding to the spraying holes 210, and the other insertion units 410 are extension insertion members 430 that are detachably disposed between adjacent positioning insertion members 420, and the extension insertion members 430 are located between adjacent spraying rings 230.

[0055] In some embodiments, referring to Figure 2 , the insertion unit 410 includes a positioning insertion member 420 and an extension insertion member 430. The positioning insertion member 420 is detachably disposed on the spraying member 200. At the same time, the extension insertion member 430 is disposed on the spraying member 200 and is placed between two adjacent positioning insertion members 420, that is, one or more extension insertion members 430 are provided between two adjacent positioning insertion members 420, so that a plurality of insertion units 410 are sequentially connected end to end to form a ring.

[0056] In some embodiments, referring to Figure 1 and Figure 8 , the positioning insertion member 420 is detachably disposed in the corresponding spraying hole 210 to block the corresponding spraying hole 210; at the same time, the extension insertion member 430 is located between adjacent spraying rings 230, that is, the extension insertion member 430 does not interfere with the process of air flow passing through the spraying hole 210; that is to say, when the process gas passes through the spraying hole 210, only the spraying hole 210 at the position of the positioning insertion member 420 is blocked, and it will not affect the effective spraying area of the spraying ring 230; thus, the problem that the effective spraying area of the spraying ring 230 is affected due to the extension insertion member 430 blocking the spraying hole 210 or some spraying holes 210 is improved.

[0057] In some specific embodiments, the extension insertion member 430 is in contact with the spraying member 200. That is, the positioning insertion member 420 is detachably disposed on the spraying member 200, and the extension insertion member 430 is detachably disposed on the positioning insertion member 420 or adjacent extension insertion members 430, so that the extension insertion member 430 is detachably disposed on the spraying member 200, making the best use of the original structure of the spraying member 200 and avoiding grooving or other secondary processing on the spraying member 200. At the same time, the connection points between the isolation part 400 and the spraying member 200 are reduced, thereby reducing the stress generated by thermal expansion between the two.

[0058] The positioning insertion member 420 includes two connected corner parts, and there is an angle between the two corner parts. One or more extension insertion members 430 are provided between two adjacent positioning insertion members 420, so that the isolation part 400 forms a polygonal ring.

[0059] In some embodiments, referring to Figure 2 andFigure 7 When the isolation part 400 forms a polygonal ring, there is an angle between the two corner parts. For example, when the isolation part 400 forms a regular hexagon, the included angle between the two corner parts is 120°. In actual use, the angle between the two corner parts can be set according to requirements, and at the same time, by adjusting the number of extension plug connectors 430 between two adjacent positioning plug connectors 420, it can be adapted to regular polygons of different shapes.

[0060] In some embodiments, both of the two corner parts are straight plate-shaped, and the shapes of the two corner parts are the same, and they have a first side wall and a second side wall. The first side walls of the two corner parts are connected to each other and have a certain angle.

[0061] In some specific embodiments, the number of extension plug connectors 430 between two adjacent positioning plug connectors 420 is the same, so that the isolation part 400 forms a circular ring or a regular polygonal ring.

[0062] In some specific embodiments, when the positioning plug connectors 420 and the extension plug connectors 430 form a polygonal ring, the number of extension plug connectors 430 between two adjacent positioning plug connectors 420 is different, so as to form an irregular polygonal ring.

[0063] In some specific embodiments, both of the two isolation parts 400 are circular rings.

[0064] In some specific embodiments, both of the two isolation parts 400 are polygonal rings.

[0065] In some specific embodiments, one of the two isolation parts 400 is a circular ring and the other is a polygonal ring.

[0066] In some embodiments, the positioning plug connector 420 is a folded structure, and the folded structure includes at least one of a U-shaped structure, a V-shaped structure, a waveform structure, or an arc-shaped structure.

[0067] In some specific embodiments, the positioning plug connector 420 can also be of other shapes, which are not limited herein, as long as it can achieve positioning connection. The shape of the extension plug connector 430 is not limited, as long as it can separate the two air chambers, that is, the shape of the air chamber can be irregular. Such a setting can play a role in further finely adjusting the air flow in the air chamber according to process requirements. During use, the shape of the isolation part 400 can be adjusted according to process requirements.

[0068] In some embodiments, the constituent materials of both the positioning plug connector 420 and the extension plug connector 430 are graphite.

[0069] In some embodiments, the constituent materials of both the positioning plug connector 420 and the extension plug connector 430 are temperature-resistant metals.

[0070] In some embodiments, the constituent material of one of the positioning plug-in member 420 and the extension plug-in member 430 is a heat-resistant metal material, and the other is a graphite material.

[0071] For the convenience of connection between adjacent plug-in units 410, refer to Figure 6 and Figure 7 , in adjacent plug-in units 410, a convex structure 411 is provided on the side wall of one plug-in unit 410, and a concave structure 412 adapted to the convex structure 411 to achieve concave-convex fit is provided on the side wall of the other plug-in unit 410; Define the direction in which the convex structure 411 is provided on the plug-in unit 410 (that is, the direction in which the side wall of one plug-in unit 410 points to the direction in which the convex structure 411 is provided on another adjacent plug-in unit 410, more specifically, the direction in which the convex structure 411 extends from the side wall of its own plug-in unit 410 towards the adjacent detachable and adaptable plug-in unit 410) as the first direction, and the direction perpendicular to the first direction as the second direction; the size of the convex structure 411 in the second direction (specifically, the cross-sectional size in the second direction) increases and then decreases along the first direction. When a large flow of gas is introduced into the air chamber, the isolation part 400 will generate a tensile force under the impact of the large airflow, making it easy for two adjacent plug-in units 410 to be pulled apart and losing the isolation function. By setting the size of the convex structure 411 in the second direction to increase and then decrease along the first direction, after two adjacent extension plug-in members 430 are connected, when pulling the two adjacent extension plug-in members 430 in opposite directions, it is difficult for the convex structure 411 to easily disengage from the concave structure 412, so that the two adjacent extension plug-in members 430 can still maintain the assembly stability of the isolation part 400 under the tensile force generated by the impact of the large airflow.

[0072] In some embodiments, the plug-in unit 410 is in a plate shape, the concave structure 412 penetrates the plug-in unit 410 along the height direction of the plug-in unit 410, and at the same time, the side wall of the concave structure 412 communicates with the outside of the plug-in unit 410. The convex structure 411 is fixedly provided on the other side of the plug-in unit 410, and its fixing method can be bolt fixing or integral molding, etc., which is not limited here, as long as there is no relative movement between the convex structure 411 and the plug-in unit 410. The convex structure 411 is adapted to the concave structure 412 in a concave-convex fit manner, so as to detachably connect two adjacent plug-in units 410.

[0073] In some specific embodiments, a convex structure 411 is provided on one side of the positioning plug-in member 420, and a concave structure 412 is provided on the other side; a convex structure 411 is provided on one side of the extension plug-in member 430, and a concave structure 412 is provided on the other side; so that adjacent extension plug-in members 430 can be detachably connected, and adjacent extension plug-in members 430 and the positioning plug-in member 420 can be detachably connected.

[0074] In some embodiments, the cross-sectional shape of the concave structure 412 is the same as the cross-sectional shape of the convex structure 411.

[0075] In some embodiments, the cross-sectional shape of the convex structure 411 in the second direction is circular, and the convex structure 411 is a spherical convex.

[0076] In some specific embodiments, the shape of the cross-section is circular. More specifically, the side wall of the convex structure 411 is arc-shaped, so that the cross-section of the convex structure 411 forms a circular structure; the size of the circular structure in the second direction first increases and then decreases along the first direction. The length of the part where the convex structure 411 is connected to the plug-in unit 410 is less than the diameter of the circular structure formed by the convex structure 411, so that the size in the second direction first increases and then decreases along the first direction. So that when adjacent two extended plug-in members 430 are subjected to tensile force under the impact of the atmospheric flow, they will not separate, so as to increase the stability of the isolation part 400.

[0077] In some embodiments, the gap between adjacent two plug-in units 410 is 0.01 - 0.05 mm; the gap between adjacent convex structure 411 and concave structure 412 is 0.01 - 0.05 mm. Considering the thermal expansion of the plug-in unit 410 at high temperature, the gap is set to ensure the airtightness between adjacent plug-in units 410 after thermal expansion. If the gap is too large, this kind of airtightness cannot be ensured. If the gap is too small, plastic deformation is likely to occur between adjacent plug-in units 410 after thermal expansion.

[0078] In some embodiments, the convex structure 411 is connected to the concave structure 412, and the gap between adjacent convex structure 411 and concave structure 412 is 0.01 - 0.05 mm, so that adjacent two plug-in units 410 are connected, and thus the gap between adjacent two plug-in units 410 is 0.01 - 0.05 mm.

[0079] To facilitate the positioning of the fixing of the plug-in member 420, a positioning post 421 is provided at the bottom of the positioning plug-in member 420. The positioning post 421 is used for detachably arranging in the spray hole 210, so as to detachably arrange the positioning plug-in member 420 on the spray member 200.

[0080] In some embodiments, the positioning post 421 is disposed at the bottom of the positioning socket 420. After the positioning post 421 is detachably disposed in the spray hole 210, the exposed surface of the positioning socket 420 facing the spray member 200 except the positioning post 421 fits with the area between the adjacent spray rings 230 of the spray member 200 to ensure airtightness. The detachable setting method between the positioning post 421 and the spray hole 210 needs to ensure the airtightness between the positioning post 421 and the spray hole 210. For example, the outer diameter of the positioning post 421 is adapted to the aperture of the spray hole 210.

[0081] In some specific embodiments, the positioning post 421 is detachably disposed in the corresponding spray hole 210 and the bottom is received in the spray hole 210, that is, the positioning post 421 does not extend into the process chamber to reduce the interference with the airflow passing through the spray hole 210.

[0082] In some embodiments, the constituent material of the spray member 200 includes graphite or heat-resistant metal; the melting point or softening point of the heat-resistant metal is ≥ 2000 °C. Further, the surface of the spray member 200 is covered with a heat-resistant coating.

[0083] In some embodiments, most of the existing spray devices use stainless steel and cannot withstand high temperatures for a long time (for example, above 800 degrees Celsius), and an additional water-cooling component needs to be provided. The spray member 200 of the present invention uses a graphite material or a heat-resistant metal material, or a heat-resistant coating is formed by plating on the spray member 200, such as graphite plating silicon carbide or graphite plating tantalum carbide. No additional water-cooling is required, the spray member 200 can be replaced separately, the replacement cost is low, and the maintenance period is long.

[0084] In some specific embodiments, the number of the isolation parts 400 can be set according to requirements. Here, taking the example of setting two isolation parts 400 to divide the diffusion chamber 300 into a central gas chamber 310, a middle gas chamber 320 and an edge gas chamber 330.

[0085] In some specific embodiments, no isolation part 400 is provided on the spray member 200, so that the diffusion chamber 300 becomes an integral gas chamber.

[0086] In some specific embodiments, only one isolation part 400 is provided on the spray member 200; at this time, the middle gas chamber 320 and the edge gas chamber 330 form a gas chamber, and the central gas chamber 310 is a gas chamber, that is, the diffusion chamber 300 is divided into two gas chambers. Or at this time, the middle gas chamber 320 and the central gas chamber 310 form a gas chamber, and the edge gas chamber 330 is a gas chamber, that is, the diffusion chamber 300 is divided into two gas chambers.

[0087] In some specific embodiments, two isolation portions 400 are provided on the spraying member 200; the diffusion chamber 300 is partitioned into a central gas chamber 310, a middle gas chamber 320, and an edge gas chamber 330, that is, the diffusion chamber 300 is partitioned into three gas chambers.

[0088] The embodiments of the present application also disclose a semiconductor growth device, which includes the above-mentioned spraying device and a pedestal that is disposed opposite to the spraying device and is used to carry a substrate. In some embodiments, the cover 100 is connected to the process chamber of the semiconductor growth device, the pedestal is disposed in the process chamber, and after the cover 100 is connected to the process chamber, the spraying device is disposed opposite to the pedestal to facilitate the processing of the wafer.

[0089] The implementation principle of a spraying device and a semiconductor growth device according to the embodiments of the present application is that a plurality of isolation portions 400 are provided on the spraying member 200 according to requirements, a plurality of plug-in units 410 are provided in the isolation portions 400, and the plurality of plug-in units 410 are sequentially connected end to end to form a ring, partitioning the diffusion chamber 300 into gas chambers of different numbers. By increasing or decreasing the plug-in units 410, the volume of the space enclosed by the isolation portions 400 is changed, and the spraying area can be flexibly adjusted within the spraying device, so that the spraying area can be flexibly adjusted according to different process requirements to cooperate with the growth of the wafer, such as epitaxial growth.

[0090] Although the embodiments of the present invention have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are all within the scope and spirit of the present invention described in the claims. Moreover, the present invention described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A spraying device, characterized in that, Comprising: A cover body (100) provided with at least one air inlet part; A spraying member (200) is arranged on the cover body (100) to form a diffusion cavity (300) therebetween. The diffusion cavity (300) communicates with each of the air inlet parts and is communicated with the outside through the spraying member (200); At least one isolation part (400) is detachably arranged between the cover body (100) and the spraying member (200) to divide the diffusion cavity (300) into at least two air chambers; The isolation part (400) includes a plurality of plugging units (410), and the plurality of plugging units (410) are detachably connected end to end in sequence to form a closed structure.

2. The spray device according to claim 1, characterized in that, At least part of the plugging units (410) are detachably arranged on the spraying member (200) and / or the cover body (100).

3. The spray device according to claim 2, characterized in that, The plugging unit (410) is detachably arranged on the spraying member (200), and the coefficient of thermal expansion of the plugging unit (410) is less than or equal to the coefficient of thermal expansion of the spraying member (200).

4. The spray device according to claim 1, characterized in that The constituent material of either the spraying member (200) or the isolation part (400) is a heat-resistant material, and / or the surface of either the spraying member (200) or the isolation part (400) is covered with a heat-resistant coating. The heat-resistant material includes graphite or a metal with a melting point or softening point not lower than 2000 degrees Celsius, and the heat-resistant coating includes silicon carbide or tantalum carbide.

5. The spraying device according to claim 1, wherein The number of the isolation parts (400) is at least 2, and the isolation parts (400) are sleeved in sequence from inside to outside.

6. The spray device according to claim 1, characterized in that The spraying member (200) includes a plurality of spraying holes (210), and the plurality of spraying holes (210) form a plurality of spraying rings (230) that surround each other in sequence from inside to outside on the spraying member (200). The isolation part (400) is located between adjacent spraying rings (230).

7. The spray device according to claim 6, characterized in that, A clamping groove (220) is formed between adjacent spraying rings (230) to detachably fit at least one of the plugging units (410) of the isolation part (400).

8. The spray device according to claim 7, characterized in that, The clamping groove (220) is in a circular closed structure around the center of the spraying member (200); The isolation part is detachably arranged in the clamping groove (220), and each of the plugging units (410) is connected end to end in the clamping groove (220) to form a ring.

9. The spray device according to claim 7, characterized in that, At least one clamping groove (220) is formed in the circumferential direction in the area between adjacent spraying rings (230), and there is a gap between adjacent clamping grooves (220); Part of the plugging units (410) are detachably adapted to the corresponding clamping grooves (220).

10. The spray device according to claim 1, characterized in that, The spray member (200) includes a plurality of spray holes (210), and a plurality of the spray holes (210) form a plurality of spray rings (230) that are sequentially surrounded from the inside to the outside on the spray member (200); a part of the insertion units (410) of the isolation part (400) are positioning insertion members (420) detachably corresponding to the spray holes (210), and the other insertion units (410) are extension insertion members (430) detachably arranged in sequence between adjacent positioning insertion members (420), and the extension insertion members (430) are located between adjacent spray rings (230).

11. The spray device according to claim 10, characterized in that, A positioning post (421) is provided on one side of the positioning insertion member (420) facing the spray member (200), and the positioning post (421) is detachably arranged corresponding to the spray hole (210) and the bottom is received in the spray hole (210).

12. The spray device according to claim 11, characterized in that, The exposed surface of the positioning insertion member (420) facing the spray member (200) except the positioning post (421), and one surface of the extension insertion member (430) facing the spray member (200) are both fitted to the area between adjacent spray rings (230) of the spray member (200).

13. The spray device according to claim 10, characterized in that, The positioning insertion member (420) is of a folded structure, and the folded structure includes at least one of a U-shaped structure, a V-shaped structure, a corrugated structure or an arc-shaped structure.

14. The spray device according to claim 1, characterized in that, Among adjacent insertion units (410), a convex structure (411) is provided on the side wall of one insertion unit (410), and a concave structure (412) adapted to the convex structure (411) to achieve detachable concave-convex fit is provided on the side wall of the other insertion unit (410), so that the side walls of adjacent insertion units (410) are mutually fitted. Define the first direction as the direction from the side wall of one insertion unit (410) to the side wall of the adjacent insertion unit (410). The size of the convex structure (411) in the second direction increases and then decreases along the first direction, and the second direction is perpendicular to the first direction.

15. The spray device according to claim 1, characterized in that The gap between adjacent two insertion units (410) is 0.01 - 0.05 mm.

16. A semiconductor growth device, characterized in that, It includes the spray device according to any one of claims 1 - 15, and a base arranged opposite to the spray device and used for carrying a substrate.

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