Heating furnace and heat treatment equipment

Abstract

The invention relates to the technical field of semiconductors and photovoltaics, in particular to a heating furnace and heat treatment equipment, and solves the problem that the thickness of a perovskite film is not uniform due to poor temperature uniformity in related technologies. The heating furnace comprises a furnace body, the furnace body is provided with a containing cavity, the containing cavity is provided with a placing area, an air inlet and an air outlet which are communicated with the containing cavity are formed in the two sides of the furnace body in the vertical direction, and the air inlet is located below the air outlet; and the heating assembly is arranged on the furnace body, the heating assembly is configured to heat the containing cavity, and at least part of the heating assembly is located between the air inlet and the containing area. According to the heating furnace and the heat treatment equipment provided by the invention, the thickness uniformity of the perovskite thin film can be improved.

Description

Technical Field

[0001] The present disclosure relates to the fields of semiconductor and photovoltaic technologies, and particularly to a heating furnace and a heat treatment device. Background Art

[0002] A perovskite battery is a solar cell that uses a perovskite crystal as a photosensitive material to convert solar energy into electrical energy, and has advantages such as high efficiency and low cost. A crystallization annealing furnace is one of the key devices for producing perovskite batteries. The main function of this device is to promote the crystallization and growth of the perovskite solution coated on a substrate under high temperature conditions, so as to form a perovskite thin film on the surface of the substrate. Currently, commonly used annealing devices include baking ovens, heating platforms, tunnel furnaces, etc. When annealing is performed using these devices, it is found that the perovskite solution on the substrate located in the accommodation chamber is unevenly heated, resulting in poor thickness uniformity of the formed perovskite thin film. Summary of the Invention

[0003] In view of this, embodiments of the present disclosure provide a heating furnace and a heat treatment device to solve the problem of uneven thickness of the perovskite thin film due to poor temperature uniformity in related technologies.

[0004] In a first aspect, an embodiment of the present disclosure provides a heating furnace configured to perform heat treatment on a sheet. The sheet is carried on the upper surface of a carrier plate. The heating furnace includes: a furnace body having an accommodation chamber configured to accommodate the carrier plate carrying the sheet. The furnace body is provided with an air inlet and an air outlet communicating with the accommodation chamber on both sides in the vertical direction. The air inlet is located below the air outlet. The accommodation chamber is provided with a placement area configured to place the carrier plate; a heating assembly disposed on the furnace body and configured to heat the accommodation chamber, and at least part of the heating assembly is located between the air inlet and the placement area.

[0005] In some embodiments, the heating assembly includes: a first heating assembly arranged on at least one side wall of the accommodation chamber; a second heating assembly disposed in the accommodation chamber and arranged in the vertical direction near the air inlet; a third heating assembly disposed in the accommodation chamber and arranged in the vertical direction near the air outlet, and the third heating assembly is located above the second heating assembly. The first heating assembly, the second heating assembly, and the third heating assembly enclose an accommodation space, and the placement area is located in the accommodation space.

[0006] In some embodiments, the first heating assembly includes: a plurality of first heating elements respectively disposed on the side walls around the accommodating chamber; the second heating assembly includes: a first flow equalizing plate disposed in the accommodating chamber, the first flow equalizing plate being provided with a plurality of first air holes; a second heating element dispersedly arranged on the first flow equalizing plate, the orthographic projection of the second heating element on the first flow equalizing plate in the vertical direction having no overlap or partial overlap with the first air holes; the third heating assembly includes: a second flow equalizing plate disposed in the accommodating chamber, the second flow equalizing plate being provided with a plurality of second air holes; a third heating element dispersedly arranged on the second flow equalizing plate, the orthographic projection of the third heating element on the second flow equalizing plate in the vertical direction having no overlap or partial overlap with the second air holes.

[0007] In some embodiments, the side wall of the accommodating chamber corresponding to the first heating element, the first flow equalizing plate, and the second flow equalizing plate enclose an accommodating space, there is a gap between the edge of the placement area and the side wall of the accommodating chamber, the first air holes face the lower surface of the placement area, the second air holes face the upper surface of the placement area, and the gap is configured to allow gas to pass through and diffuse to the placement area.

[0008] In some embodiments, it further includes: a first flow equalizing member disposed between the air inlet and the first flow equalizing plate, the first flow equalizing member having a first flow equalizing chamber, the first flow equalizing member being provided with a first flow equalizing air inlet and a first flow equalizing air outlet communicating with the first flow equalizing chamber on both sides in the vertical direction, the first flow equalizing air inlet communicating with the air inlet, and the first flow equalizing air outlet facing the first flow equalizing plate; and / or, a second flow equalizing member disposed between the air outlet and the second flow equalizing plate, the second flow equalizing member having a second flow equalizing chamber, the second flow equalizing member being provided with a second flow equalizing air inlet and a second flow equalizing air outlet communicating with the second flow equalizing chamber on both sides in the vertical direction, the second flow equalizing air outlet communicating with the air outlet, and the second flow equalizing air inlet facing the second flow equalizing plate.

[0009] In some embodiments, when the heating furnace includes the first flow equalizing member, the number of the first flow equalizing air outlets includes a plurality, the plurality of first flow equalizing air outlets are dispersedly arranged on the first flow equalizing member, and in the orthographic projection of the first flow equalizing member on the first flow equalizing plate in the vertical direction, the first air holes and the first flow equalizing air outlets have no overlap or partial overlap; when the heating furnace includes the second flow equalizing member, the number of the second flow equalizing air inlets includes a plurality, the plurality of second flow equalizing air inlets are dispersedly arranged on the second flow equalizing member, and in the orthographic projection of the second flow equalizing member on the second flow equalizing plate in the vertical direction, the second air holes and the second flow equalizing air inlets have no overlap or partial overlap.

[0010] In some embodiments, it further includes: a lifting assembly disposed on the furnace body, at least a part of the lifting assembly being capable of extending into the accommodating chamber to connect the second heating assembly and / or the third heating assembly, the lifting assembly being configured to drive the second heating assembly and / or the third heating assembly to move in the vertical direction in the accommodating chamber.

[0011] In some embodiments, it further includes: an intake assembly disposed at the air inlet, configured to introduce gas from the air inlet into the accommodation chamber; an exhaust assembly disposed at the air outlet, configured to exhaust the gas diffused above the placement area from the air outlet.

[0012] In some embodiments, the intake assembly includes: an air inlet pipe having an air inlet duct, with both ends of the air inlet pipe connected to the air inlet and the air intake device communicating with the air inlet duct respectively; an auxiliary heating assembly disposed in the air inlet duct, configured to heat the gas before it enters the air inlet; an air inlet baffle movably connected to the air inlet duct, located between the auxiliary heating assembly and the air inlet; an air inlet adjusting member disposed on the air inlet pipe, connected to the air inlet baffle, and capable of driving the air inlet baffle to act in the air inlet duct to adjust the volume of the gas flowing to the accommodation chamber blocked by the air inlet baffle.

[0013] In some embodiments, it further includes: a temperature measuring assembly disposed on the furnace body, with at least a part of the temperature measuring assembly extending into the accommodation chamber. When the carrier plate is located in the accommodation chamber, the temperature measuring assembly is configured to detect the temperature of the placement area and generate a detection signal; a control assembly electrically connected to the temperature measuring assembly and the heating assembly respectively, configured to receive the detection signal and adjust the heating temperature of the heating assembly according to the detection signal, so as to maintain the temperature of the carrier plate carried on the placement area at a preset temperature.

[0014] In some embodiments, the furnace body is provided with a feeding port and a discharging port communicating with the accommodation chamber on both sides in a first direction, and the first direction is perpendicular to the vertical direction. The heating furnace further includes: a conveying assembly disposed on the furnace body, configured to carry the carrier plate and drive the carrier plate to enter the accommodation chamber from the feeding port or convey it out of the accommodation chamber from the discharging port.

[0015] In a second aspect, an embodiment of the present disclosure further provides a heat treatment device, including: the heating furnace described above, the accommodation chamber of the heating furnace being configured to accommodate the carrier plate to perform heat treatment on the sheet carried by the carrier plate; a loading and unloading assembly disposed on at least one side of the heating furnace, configured to load the carrier plate carrying the sheet into the heating furnace or unload it from the heating furnace.

[0016] When performing heat treatment on the sheet on the carrier plate, the heating furnace and the heat treatment device provided by the embodiments of the present disclosure utilize the air inlet below the carrier plate to enable the gas to carry heat and flow towards the carrier plate to heat the carrier plate, and then the carrier plate conducts the heat to the sheet, thereby promoting the crystallization and growth of the perovskite solution on the upper surface of the sheet. This way of heating the carrier plate and then conducting the heat to the sheet can improve the uniformity of the heat received by the sheet, thereby improving the uniformity of the crystallization and growth of the perovskite solution on the sheet, so as to improve the thickness uniformity of the formed perovskite thin film.

[0017] In addition, the air inlet and the air outlet are arranged on both sides of the accommodating chamber in the vertical direction, and the air inlet is arranged below the air outlet. This bottom-up air inlet and outlet method avoids the situation where hot air blows onto the perovskite solution and causes the solution to flow, thereby improving the uniformity of crystallization and growth of the perovskite solution on the sheet. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above and other objects, features, and advantages of the present disclosure will become more apparent by describing the embodiments of the present disclosure in more detail with reference to the accompanying drawings. The accompanying drawings are used to provide a further understanding of the embodiments of the present disclosure, and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the present disclosure, and do not constitute a limitation to the present disclosure. In the drawings, the same reference numerals generally represent the same components or steps.

[0019] Figure 1 The figure shows a schematic diagram of a heat treatment device provided by an embodiment of the present disclosure.

[0020] Figure 2 The figure shows a main sectional view of a heating furnace provided by an embodiment of the present disclosure.

[0021] Figure 3 As shown in Figure 2 A partial enlarged view of part M in the heating furnace shown in the figure.

[0022] Figure 4 The figure shows a schematic diagram of a heating furnace provided by an embodiment of the present disclosure.

[0023] Figure 5 As shown in Figure 4 A partial enlarged view of part N in the heating furnace shown in the figure.

[0024] Figure 6 The figure shows a schematic diagram of a second heating component provided by an embodiment of the present disclosure.

[0025] Figure 7 The figure shows a schematic diagram of a fourth flow equalizing plate provided by an embodiment of the present disclosure.

[0026] Figure 8 The figure shows a schematic diagram of an air inlet component provided by an embodiment of the present disclosure.

[0027] Figure 9 The figure shows a schematic diagram of an air inlet component provided by another embodiment of the present disclosure.

[0028] Figure 10 The figure shows a schematic diagram of an air extraction component provided by an embodiment of the present disclosure.

[0029] Reference Signs:

[0030] 100. Heat treatment equipment; 10. Heating furnace; 1. Furnace body; 1a. Air outlet; 1b. Air inlet; 11. Accommodation chamber; 11a. Placement area; 12. Accommodation space; 121. Gap; 13. Feed inlet; 2. Air extraction assembly; 21. Air extraction pipe; 22. Air outlet adjusting part; 2a. Air extraction equipment; 3. Air inlet assembly; 31. Air inlet pipe; 31a. Air inlet duct; 32. Auxiliary heating assembly; 33. Air inlet adjusting part; 34. Air inlet baffle; 4. Flap valve; 5. Conveyor assembly; 6. Heating assembly; 61. First heating assembly; 611. First heating element; 62. Second heating assembly; 621. First flow equalizing plate; 621a. First air hole; 621b. First area; 622. Second heating element; 63. Third heating assembly; 631. Second flow equalizing plate; 631a. Second air hole; 632. Third heating element; 7. First flow equalizing part; 7a. First flow equalizing air outlet hole; 7b. First flow equalizing air inlet hole; 71. Third flow equalizing plate; 71a. First flow equalizing chamber; 72. Fourth flow equalizing plate; 72a. Fourth air hole; 73. Fourth heating element; 8. Second flow equalizing part; 8a. Second flow equalizing air outlet hole; 8b. Second flow equalizing air inlet hole; 81. Fifth flow equalizing plate; 81a. Second flow equalizing chamber; 9. Lifting assembly; 91. Lifting driving part; 92. Connecting plate; 93. Mounting plate; 20. Support frame; 30. Carrier plate; 301. Temperature measuring assembly; 40. Sheet material; X. First direction; Y. Second direction; Z. Vertical direction. Detailed implementation manners

[0031] Next, the technical solutions in the embodiments of the present disclosure will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present disclosure.

[0032] An embodiment of the present disclosure provides a heating furnace, as Figures 1 to 4 . The heating furnace 10 is configured to perform heat treatment on the sheet material 40, and the sheet material 40 is carried on the upper surface of the carrier plate 30. The heating furnace 10 includes a furnace body 1 having an accommodation chamber 11 and a heating assembly 6 provided on the furnace body 1. The accommodation chamber 11 is configured to accommodate the carrier plate 30 carrying the sheet material 40, and the heating assembly 6 is configured to heat the accommodation chamber 11.

[0033] It should be emphasized that the direction indicated by the arrow X in the figure is the first direction, the direction indicated by the arrow Y is the second direction, and the direction indicated by the arrow Z is the vertical direction. The first direction X, the second direction Y, and the vertical direction Z are perpendicular to each other in pairs, and will not be emphasized separately hereinafter.

[0034] It can be understood that the sheet 40 can be a substrate coated with a perovskite solution on its upper surface. When the sheet 40 is placed in the accommodation chamber 11 for heat treatment, the perovskite solution crystallizes and grows under the action of high temperature, thereby forming a layer of perovskite film on the surface of the substrate to obtain a perovskite battery.

[0035] Optionally, the carrier plate 30 for carrying the sheet 40 can be a metal plate or a non-metal plate that is heat-resistant and has heat conduction ability. And the upper surface of the carrier plate 30 is a plane to ensure the stability of the sheet 40 placed on the carrier plate 30 and guarantee the uniformity of the perovskite solution coated on the substrate.

[0036] Specifically, the accommodation chamber 11 is provided with a placement area 11a, and the placement area 11a is configured to place the carrier plate 30. The furnace body 1 is provided with an air inlet 1b and an air outlet 1a communicating with the accommodation chamber 11 on both sides in the vertical direction Z. The air inlet 1b is located below the air outlet 1a, the air inlet 1b faces the lower surface of the placement area 11a, and the air outlet 1a faces the upper surface of the placement area 11a; a heating assembly 6 is arranged in the furnace body 1, and the heating assembly 6 is configured to heat the accommodation chamber 11. At least part of the heating assembly 6 is located between the air inlet 1b and the placement area 11a, and the gas entering from the air inlet 1b can carry the heat generated by the heating assembly 6 and flow to the placement area 11a and be discharged from the air outlet 1a.

[0037] It can be understood that the placement area 11a can be understood as the area enclosed by the space occupied when the empty carrier plate 30 or the carrier plate 30 carrying the sheet 40 is placed in the accommodation chamber 11. The position, size, and shape of the placement area 11a can be matched according to the position, size, and shape of the carrier plate 30 and / or the sheet 40 placed in the accommodation chamber 11, and no specific limitation is made.

[0038] In the heating furnace 10 provided by the embodiment of the present disclosure, when heat-treating the sheet 40 on the carrier plate 30, the air inlet 1b below the carrier plate 30 is used to enable the gas to carry heat and flow to the carrier plate 30 to heat the carrier plate 30, and then the carrier plate 30 conducts the heat to the sheet 40, thereby promoting the crystallization and growth of the perovskite solution on the upper surface of the sheet 40. This method of heating the carrier plate 30 and then conducting the heat to the sheet 40 can improve the uniformity of heat received by the sheet 40, thereby improving the uniformity of crystallization and growth of the perovskite solution on the sheet 40 to improve the thickness uniformity of the formed perovskite film.

[0039] In addition, the air inlet 1b and the air outlet 1a are arranged on both sides of the accommodation chamber 11 in the vertical direction Z, and the air inlet 1b is arranged below the air outlet 1a. This way of inlet and outlet air from bottom to top avoids the situation that hot air directly blows on the perovskite solution and causes the solution to flow, and thus can improve the uniformity of crystallization and growth of the perovskite solution on the sheet 40.

[0040] Optionally, the furnace body 1 is provided with a feed inlet 13 and a discharge outlet on two opposite side walls in the horizontal direction. The feed inlet 13 is used for the carrier plate 30 carrying the unprocessed sheet 40 to enter the accommodating chamber 11, and the discharge outlet is used for the carrier plate 30 carrying the processed sheet 40 in the accommodating chamber 11 to be exported. It can be understood that the feed inlet 13 and the discharge outlet can be arranged on two opposite side walls of the accommodating chamber 11 along the first direction X, and the feed inlet 13 and the discharge outlet can be respectively provided with flap valves 4. The driving mechanism can control the flap valves 4 to act to open or close the corresponding feed inlet 13 and discharge outlet, so that when the flap valves 4 close the feed inlet 13 and the discharge outlet, the accommodating chamber 11 can be in a closed state and can be evacuated. In the embodiments of the present disclosure, the specific structure of the flap valves 4 and how the driving mechanism drives the flap valves 4 to act to open and close the feed inlet 13 and the discharge outlet will not be described in detail.

[0041] It can be understood that the heating furnace 10 may further include a conveying assembly 5. The conveying assembly 5 is arranged on at least one side of the furnace body 1 in the second direction Y. The conveying assembly 5 is configured to carry the carrier plate 30 and drive the carrier plate 30 to move along the first direction X, so that the carrier plate 30 carrying the sheet 40 enters the accommodating chamber 11 from the feed inlet 13 or is conveyed out of the accommodating chamber 11 from the discharge outlet. The conveying assembly 5 may be, for example, a conveyor belt, a conveying roller, etc. for conveying the carrier plate 30 to move along the first direction X, which will not be described in detail.

[0042] In some embodiments, such as Figure 2 and Figure 3 , the heating assembly 6 includes a first heating assembly 61, a second heating assembly 62 and a third heating assembly 63. The first heating assembly 61 is arranged on at least one side wall of the accommodating chamber 11. The second heating assembly 62 is arranged in the accommodating chamber 11. The second heating assembly 62 is arranged in the vertical direction Z at a position close to the air inlet 1b. The third heating assembly 63 is arranged in the accommodating chamber 11. The third heating assembly 63 is arranged in the vertical direction Z at a position close to the air outlet 1a, and the third heating assembly 63 is located above the second heating assembly 62. The first heating assembly 61, the second heating assembly 62 and the third heating assembly 63 enclose an accommodating space 12. When the carrier plate 30 is located in the accommodating chamber 11, the placement area 11a is located in the accommodating space 12. Furthermore, the carrier plate 30 carrying the sheet 40 can be located in the accommodating space 12. Gas can enter the accommodating space 12 from the air inlet 1b, carry heat and flow towards the carrier plate 30, and be exported from the air outlet 1a after diffusing above the sheet 40.

[0043] It can be understood that the first heating component 61 is arranged on each side wall of the accommodating chamber 11, so that the carrier plate 30 in the placing area 11a is surrounded by the first heating component 61, the second heating component 62 and the third heating component 63. Through the arrangement of the first heating component 61, the second heating component 62 and the third heating component 63 around the circumferential side of the carrier plate 30, the temperature uniformity around the carrier plate 30 carrying the sheet 40 is higher, avoiding the situation that the temperature in a local area of the carrier plate 30 is higher while the temperature in other area ranges is lower when the heating component 6 is arranged only on one side or both sides of the carrier plate 30. Moreover, the carrier plate 30 carrying the sheet 40 is arranged in the accommodating space 12 enclosed by the first heating component 61, the second heating component 62 and the third heating component 63. Compared with the original need to raise the temperature of the entire accommodating chamber 11 to the temperature required for heat treatment and maintain a constant temperature state, the first heating component 61, the second heating component 62 and the third heating component 63 only need to raise the temperature of the accommodating space 12 to the temperature required for heat treatment and maintain a constant temperature state, improving the temperature rise rate.

[0044] Specifically, the first heating component 61 includes a plurality of first heating elements 611, and the plurality of first heating elements 611 are respectively arranged on the side walls around the accommodating chamber 11; the second heating component 62 includes a first flow equalizing plate 621 and a second heating element 622. The first flow equalizing plate 621 is arranged in the accommodating chamber 11. The first flow equalizing plate 621 is provided with a plurality of first air holes 621a. The second heating element 622 is dispersedly arranged on the first flow equalizing plate 621. The orthographic projection of the second heating element 622 on the first flow equalizing plate 621 in the vertical direction Z does not overlap or partially overlaps with the first air holes 621a; the third heating component 63 includes a second flow equalizing plate 631 and a third heating element 632. The second flow equalizing plate 631 is arranged in the accommodating chamber 11. The second flow equalizing plate 631 is provided with a plurality of second air holes 631a. The third heating element 632 is dispersedly arranged on the second flow equalizing plate 631. The orthographic projection of the third heating element 632 on the second flow equalizing plate 631 in the vertical direction Z does not overlap or partially overlaps with the second air holes 631a; wherein, the side wall of the accommodating chamber 11 corresponding to the first heating element 611, the first flow equalizing plate 621 and the second flow equalizing plate 631 enclose the accommodating space 12. There is a gap 121 between the edge of the placing area 11a and the side wall of the accommodating chamber 11. When the carrier plate 30 is located in the accommodating space 12, it can also be understood that there is a gap 121 between the edge of the carrier plate 30 and the side wall of the accommodating chamber 11 (as a gas flow path for the gas diffusing to above the sheet 40 after heat exchange with the carrier plate 30). The first air holes 621a face the lower surface of the placing area 11a (i.e., face the carrier plate 30), and the second air holes 631a face the upper surface of the placing area 11a (i.e., face the sheet 40). The gas entering from the air inlet 1b can flow from the first air holes 621a to the carrier plate 30 and diffuse to above the sheet 40 through the gap 121 and then be led out from the second air holes 631a through the air outlet 1a.

[0045] It can be understood that the gas entering from the air inlet 1b can be dispersed into the accommodation space 12 through a plurality of first air holes 621a and carry heat to flow towards the carrier plate 30, so that the carrier plate 30 is heated more evenly; the gas diffused above the sheet 40 can be led out from the air outlet 1a through a plurality of second air holes 631a, so that the hot gas above the sheet 40 is more evenly distributed, thereby further improving the uniformity of heating of the sheet 40 on the carrier plate 30, and enabling the hot gas to quickly and evenly fill the accommodation space 12, so that the accommodation space 12 can quickly reach the constant temperature state required for heat treatment.

[0046] Optionally, as Figure 4 and Figure 5 , a plurality of first air holes 621a are uniformly arranged on the first flow equalizing plate 621, and the sizes of the plurality of first air holes 621a, the density of arrangement on the first flow equalizing plate 621, etc. can be adaptively adjusted according to actual needs; a plurality of second air holes 631a are uniformly arranged on the second flow equalizing plate 631, and the sizes of the plurality of second air holes 631a, the density of arrangement on the second flow equalizing plate 631, etc. can be adaptively adjusted according to actual needs, and no specific limitations are made.

[0047] Optionally, the size of the first air hole 621a can be set to be the same as the size of the second air hole 631a; the density of arrangement of the plurality of first air holes 621a on the first flow equalizing plate 621 can be set to be the same as the density of arrangement of the plurality of second air holes 631a on the second flow equalizing plate 631; in the orthographic projection of the first flow equalizing plate 621 along the vertical direction Z onto the second flow equalizing plate 631, the first air hole 621a and the second air hole 631a can be arranged in a staggered manner, and can be adaptively adjusted according to actual needs, and no specific limitations are made.

[0048] In an alternative embodiment, the first heating element 611, the second heating element 622, and the third heating element 632 can be in the form of radiant heating such as heating wires and heating rods arranged at corresponding positions, and can be adaptively adjusted according to actual needs.

[0049] Optionally, for the first heating element 611, the heating wires are respectively arranged on the inner side walls around the accommodation chamber 11, and the heating wires on each side wall are arranged in a wavy shape. The heating wires arranged on the plurality of side walls have the same height in the accommodation chamber 11, and the heating wires on the plurality of side walls are connected to each other or disconnected from each other. When the carrier plate 30 is located in the accommodation chamber 11, the heating wires surround the periphery of the carrier plate 30. It should be emphasized that when the feed inlet 13 and the discharge outlet are arranged on opposite side walls of the furnace body 1 in the horizontal direction, in order to facilitate the entry and exit of the carrier plate 30, the heating wires need to be avoided when arranging the heating wires at the feed inlet 13 and the discharge outlet, and no detailed description is given.

[0050] Optionally, for the second heating element 622, a plurality of heating wires may be provided. The plurality of heating wires that are connected or disconnected from each other are dispersedly arranged on the surface of the first flow equalizing plate 621 facing away from the carrier plate 30. Specifically, the plurality of heating wires are connected end to end to be arranged in a wavy shape on the surface of the first flow equalizing plate 621, so that the heat generation efficiency of each part of the heating wire is the same. Or, some of the heating wires are connected end to end. For example, as Figure 6 , the first flow equalizing plate 621 is divided into a plurality of first regions 621b, and the same group of heating wires that are connected to each other are arranged at the corresponding positions of each first region 621b. The heating wires arranged in each region are independently controlled, so that the heat generation efficiency of the heating wires in each first region 621b can be the same or different, so that the heat generation efficiency of the heating wires in the first region 621b corresponding to the position where the actual temperature of the carrier plate 30 has not reached the constant temperature can be adjusted according to the actual temperature at different positions of the carrier plate 30, so that the carrier plate 30 is maintained in a constant temperature state.

[0051] Similarly, for the third heating element 632, a plurality of heating wires may be provided. The plurality of heating wires that are connected or disconnected from each other are dispersedly arranged on the surface of the second flow equalizing plate 631 facing away from the carrier plate 30. Specifically, the plurality of heating wires are connected end to end to be arranged in a wavy shape on the surface of the second flow equalizing plate 631, so that the heat generation efficiency of each part of the heating wire is the same. Or, some of the heating wires are connected end to end. For example, the second flow equalizing plate 631 is divided into a plurality of regions (not shown in the figure), and the same group of heating wires that are connected to each other are arranged at the corresponding positions of each region. The heating wires arranged in each region are independently controlled, so that the heat generation efficiency of the heating wires in each region can be the same or different, so that the heat generation efficiency of the heating wires in the region corresponding to the position where the actual temperature of the carrier plate 30 has not reached the constant temperature can be adjusted according to the actual temperature at different positions of the carrier plate 30, so that the carrier plate 30 is maintained in a constant temperature state.

[0052] It can be understood that the division method of the plurality of regions divided on the first flow equalizing plate 621 and the second flow equalizing plate 631 and the size of each divided region can be adaptively adjusted according to actual needs. The more the number of divided regions, the higher the temperature adjustment accuracy, and no specific limitation is made.

[0053] In an optional embodiment, the first flow equalizing plate 621 and the second flow equalizing plate 631 may be fixedly connected to the side wall of the accommodating chamber 11 by means of welding, clamping, etc., and no detailed description is made. At least one of the first flow equalizing plate 621 and the second flow equalizing plate 631 may also be movably connected to the side wall of the accommodating chamber 11, such as Figure 5 and Figure 6, taking the first flow equalizing plate 621 as an example, the edges around the first flow equalizing plate 621 are in clearance fit with the four - week gaps of the accommodating chamber 11. The furnace body 1 is provided with at least one lifting component 9. At least part of the lifting component 9 can extend into the accommodating chamber 11 to connect with the first flow equalizing plate 621. The lifting component 9 can drive the first flow equalizing plate 621 to move along the vertical direction Z, so that the second heating element 622 on the first flow equalizing plate 621 can be close to or far away from the carrier plate 30 according to the actual temperature of the carrier plate 30 in the accommodating space 12, enabling the carrier plate 30 to quickly reach a constant temperature state.

[0054] Optionally, the lifting component 9 includes a lifting driving member 91 and a connecting plate 92. The lifting driving member 91 is arranged on the furnace body 1. The ejector rod of the lifting driving member 91 can move along the vertical direction Z. The connecting plate 92 is connected to the ejector rod. At least part of the connecting plate 92 extends into the accommodating chamber 11 and is connected to the first flow equalizing plate 621. When the lifting driving member 91 drives the ejector rod to move along the vertical direction Z, it can drive the first flow equalizing plate 621 to be close to or far away from the carrier plate 30 along the vertical direction Z. The lifting driving member 91 can be, for example, a driving cylinder. In other examples, the lifting component 9 can also be realized in the form of the cooperation between a driving motor and a lead screw - nut pair to achieve the up - and - down movement of the first flow equalizing plate 621 in the vertical direction Z, which will not be elaborated in detail.

[0055] It can be understood that the side wall of the accommodating chamber 11 can also be provided with a chute extending along the vertical direction Z, and the edge of the first flow equalizing plate 621 is provided with a slider cooperating with the chute, so that the first flow equalizing plate 621 moves more smoothly and smoothly along the vertical direction Z.

[0056] Optionally, the furnace body 1 can be provided with a mounting plate 93. The lifting driving member 91 is fixedly connected to the furnace body 1 through the mounting plate 93, and the ejector rod can pass through the furnace body 1 to extend into the accommodating chamber 11.

[0057] It should be emphasized that the movable connection between the second flow equalizing plate 631 and the side wall of the accommodating chamber 11 can refer to the specific cooperation structure of the movable connection between the first flow equalizing plate 621 and the side wall of the accommodating chamber 11, and will not be elaborated here.

[0058] In an alternative embodiment, the first flow equalizing plate 621 has a first distance between the vertical direction Z and the bottom wall of the accommodating chamber 11, so that the first flow equalizing plate 621, the side wall and the bottom wall of the accommodating chamber 11 enclose a chamber. The gas entering from the air inlet 1b will first fill the chamber and then enter the accommodating space 12 through the first air holes 621a of the first flow equalizing plate 621, providing a buffer for the gas entering from the air inlet 1b, enabling the gas to enter the accommodating chamber 11 evenly from multiple first air holes 621a, and further enabling the gas to carry heat more evenly to the carrier plate 30 in the placement area 11a, which is beneficial for the carrier plate 30 to be heated more evenly and conduct heat evenly to the sheet 40. The second flow equalizing plate 631 has a second distance between the vertical direction Z and the top wall of the accommodating chamber 11, so that the second flow equalizing plate 631, the side wall and the top wall of the accommodating chamber 11 enclose another chamber. When an external suction force is provided to discharge the gas above the sheet 40 from the air outlet 1a, the gas diffused above the sheet 40 can be evenly discharged from multiple second air holes 631a, maintaining the uniformity of the gas around the sheet 40, and thus maintaining the uniformity of the hot gas around the sheet 40, which is beneficial for the sheet 40 to maintain a constant temperature state.

[0059] In some embodiments, such as Figure 1 , Figure 8 , Figure 9 and Figure 10 , the heating furnace 10 further includes an air inlet assembly 3 and an air extraction assembly 2. The air inlet assembly 3 is disposed outside the accommodating chamber 11 and communicates with the air inlet 1b. The air inlet assembly 3 is configured to introduce gas from the air inlet 1b into the accommodating chamber 11; the air extraction assembly 2 is disposed outside the accommodating chamber 11 and communicates with the air outlet 1a. The air extraction assembly 2 is configured to extract the gas diffused above the placement area 11a from the air outlet 1a. By providing the air inlet assembly 3 and the air extraction assembly 2, the gas in the accommodating chamber 11 can move from bottom to top during operation, so that the gas entering from the air inlet 1b carries the heat of the heating assembly 6, exchanges heat with the carrier plate 30, and is discharged from the air outlet 1a, thus completing a gas cycle. Multiple gas cycles enable the carrier plate 30 and its surroundings to quickly reach a constant temperature state and always maintain a constant temperature state, thereby improving the uniformity of the temperature of the sheet 40 and thus improving the uniformity of the crystallization and growth of the perovskite solution.

[0060] Specifically, the intake assembly 3 includes an air inlet pipe 31, an air inlet baffle 34, and an air inlet adjusting member 33. The air inlet pipe 31 has an air inlet duct 31a. The two ends of the air inlet pipe 31 are respectively connected to an air inlet 1b and an air intake device that communicate with the air inlet duct 31a. The air inlet baffle 34 is movably connected to the air inlet duct 31a. The air inlet adjusting member 33 is arranged on the air inlet pipe 31. The air inlet adjusting member 33 is connected to the air inlet baffle 34. The air inlet adjusting member 33 can drive the air inlet baffle 34 to act in the air inlet duct 31a to adjust the volume of the gas flowing into the accommodating chamber 11 after being blocked by the air inlet baffle 34. The air extraction assembly 2 includes an air extraction pipe 21, an air outlet baffle, and an air outlet adjusting member 22. The air extraction pipe 21 has an air extraction duct. The two ends of the air extraction pipe 21 are respectively connected to an air outlet 1a and an air extraction device 2a that communicate with the air extraction duct. The air outlet baffle is movably connected to the air extraction duct. The air outlet baffle is located between the air extraction device 2a and the air outlet 1a. The air outlet adjusting member 22 is arranged on the air extraction pipe 21. The air outlet adjusting member 22 is connected to the air outlet baffle. The air outlet adjusting member 22 can drive the air outlet baffle to act in the air extraction duct to adjust the volume of the gas extracted from the air outlet 1a after being blocked by the air outlet baffle.

[0061] Optionally, the specific cooperation structure of the intake assembly 3 and the air extraction assembly 2 and the specific magnitudes of the intake and exhaust air volumes can be adaptively adjusted according to actual requirements. Moreover, the air intake device and the air outlet device respectively communicated with the intake assembly 3 and the air extraction assembly 2 can be set as air pumps, blowers, etc., without specific limitation.

[0062] In an alternative embodiment, as Figure 8 , the heating furnace 10 may further include an auxiliary heating assembly 32. The auxiliary heating assembly 32 is arranged in the air inlet duct 31a. The auxiliary heating assembly 32 is configured to heat the gas entering the accommodating chamber 11 from the air inlet 1b. The air inlet baffle 34 is located between the auxiliary heating assembly 32 and the air inlet 1b, so that the gas is preheated before entering the accommodating chamber 11 from the air inlet 1b, and then carries the heat of the passing heating assembly to the carrier plate 30 after entering the accommodating chamber 11, improving the temperature rise rate of the carrier plate 30, and further enabling the sheet 40 to reach the required constant temperature state more quickly.

[0063] It can be understood that the auxiliary heating assembly 32 may be, for example, a heater arranged in the intake duct. The temperature of the gas heated by the heater is lower than the constant temperature required for the crystallization of the perovskite solution. The specific structure of the auxiliary heating assembly 32 and its cooperation structure with the intake assembly 3 will not be described in detail.

[0064] Optionally, the intake assembly 3 may further include a heat insulation layer. The heat insulation layer is coated on the air inlet pipe 31. The heat insulation layer is configured to insulate the gas in the air inlet duct 31a to prevent the heat of the gas heated by the auxiliary heating assembly 32 from being lost from the pipe wall of the air inlet pipe 31 before entering the accommodating chamber 11 from the air inlet 1b.

[0065] In some embodiments, such as Figure 1 , the heating furnace 10 further includes a temperature measuring component 301 and a control component. The temperature measuring component 301 is disposed on the furnace body 1, and at least a part of the temperature measuring component 301 extends into the accommodating chamber 11. The temperature measuring component 301 is configured to detect the temperature of the placing area 11a and generate a detection signal. The control component is electrically connected to the temperature measuring component 301 and the heating component 6 respectively. The control component is configured to receive the detection signal and adjust the heating temperature of the heating component 6 according to the detection signal, so as to maintain the temperature of the carrier plate 30 carried on the placing area 11a at a preset temperature.

[0066] It can be understood that the temperature measuring component 301 can be, for example, a temperature sensor disposed on the furnace body 1 and extending into the accommodating chamber 11 for detecting the temperature of the carrier plate 30, so as to be able to monitor the temperature of the carrier plate 30 in real time and be able to adjust the heating temperature of the heating component 6 correspondingly according to the actual temperature, so that the carrier plate 30 is maintained at a preset temperature (i.e., the temperature required for the crystallization and growth of the perovskite solution), ensuring the thickness uniformity of the perovskite thin film on the sheet 40 after heat treatment.

[0067] Optionally, the control component can also be electrically connected to the auxiliary heating component 32, the air inlet adjusting member 33, the air outlet adjusting member 22, etc., without specific limitation.

[0068] In some embodiments, such as Figures 2 to 5 , Figure 7 , the heating furnace 10 may include a first flow equalizing member 7, and the first flow equalizing member 7 is disposed between the air inlet 1b and the first flow equalizing plate 621. The first flow equalizing member 7 has a first flow equalizing chamber 71a. On both sides of the first flow equalizing member 7 in the vertical direction Z, a first flow equalizing air inlet hole 7b and a first flow equalizing air outlet hole 7a communicating with the first flow equalizing chamber 71a are respectively provided. The first flow equalizing air inlet hole 7b is communicated with the air inlet 1b, and the first flow equalizing air outlet hole 7a faces the first flow equalizing plate 621. By providing the first flow equalizing member 7, the gas entering from the air inlet 1b can first enter the first flow equalizing chamber 71a for buffering and then uniformly flow out from the plurality of first flow equalizing air outlet holes 7a, so that the gas can enter the accommodating space 12 more uniformly and stably from the first air hole 621a.

[0069] Optionally, the first uniform flow cavity 71a of the first uniform flow member 7 can be directly formed by the first uniform flow plate 621, the side walls around the accommodation chamber 11, and the bottom plate of the accommodation chamber 11. The first air holes 621a serve as the first uniform flow outlet holes 7a, and the air inlet 1b serves as the first uniform flow inlet hole 7b. In the embodiments of the present disclosure, the first uniform flow member 7 may include a third uniform flow plate 71. The third uniform flow plate 71 is disposed at an interval below the first uniform flow plate 621. The edge of the third uniform flow plate 71 is connected to the side wall of the accommodation chamber 11, and the third uniform flow plate 71, the side walls around the accommodation chamber 11, and the bottom wall of the accommodation chamber 11 enclose the first uniform flow cavity 71a. A plurality of the first uniform flow outlet holes 7a are provided on the third uniform flow plate 71. In the orthographic projection of the third uniform flow plate 71 along the vertical direction Z onto the first uniform flow plate 621, the first air holes 621a and the first uniform flow outlet holes 7a do not overlap or partially overlap, and the air inlet 1b serves as the first uniform flow inlet hole 7b.

[0070] It can be understood that on the basis that the first uniform flow member 7 includes the third uniform flow plate 71, the first uniform flow member 7 may further include a fourth uniform flow plate 72. The fourth uniform flow plate 72 is provided with a plurality of uniformly distributed fourth air holes 72a. The fourth uniform flow plate 72 is disposed in the first uniform flow cavity 71a and below the third uniform flow plate 71. In the orthographic projection of the fourth uniform flow plate 72 along the vertical direction Z onto the third uniform flow plate 71, the fourth air holes 72a and the first uniform flow outlet holes 7a do not overlap or partially overlap, so that the gas entering the first uniform flow cavity 71a from the air inlet 1b can pass through the fourth air holes 72a first and then be discharged through the first uniform flow outlet holes 7a, further improving the buffering effect on the gas entering from the air inlet 1b. It should be emphasized that the fourth uniform flow plate 72 provided in the first uniform flow member 7 can be provided as one or multiple. In the case of multiple, the multiple fourth uniform flow plates 72 are spaced apart in the vertical direction Z, and the fourth air holes 72a provided on each adjacent two fourth uniform flow plates 72 are arranged in a staggered manner, without specific limitation.

[0071] Optionally, the first uniform flow member 7 may further include a fourth heating member 73. The fourth heating member 73 may be specifically disposed on the fourth uniform flow plate 72, and the cooperation structure of the second heating member 622 disposed on the first uniform flow plate 621 may be specifically referred to, so that the gas entering from the air inlet 1b can be heated and raised in temperature during the uniform flow process, enabling the gas to reach the temperature required for the process processing in advance, which is beneficial to improving the temperature rise rate and temperature uniformity of the sheet 40 on the carrier 30.

[0072] It can be understood that in order to make the gas be heated faster while being uniformly flowed in the first uniform flow cavity 71a, a part of the first heating member 611 enclosing the accommodation space 12 may protrude to the side wall of the accommodation chamber 11 enclosing the first uniform flow cavity 71a. Alternatively, the fourth heating member 73 may also be provided on the third uniform flow plate 71, without specific limitation.

[0073] In an alternative embodiment, the heating furnace 10 may further include a second flow equalizing member 8 disposed at the air outlet 1a, and the second flow equalizing member 8 is disposed between the air outlet 1a and the second flow equalizing plate 631. The second flow equalizing member 8 has a second flow equalizing cavity 81a, and the second flow equalizing member 8 is respectively provided with a second flow equalizing air inlet hole 8b and a second flow equalizing air outlet hole 8a communicating with the second flow equalizing cavity 81a on both sides in the vertical direction Z. The second flow equalizing air outlet hole 8a communicates with the air outlet 1a, and the second flow equalizing air inlet hole 8b faces the second flow equalizing plate 631. By providing the second flow equalizing member 8, the gas above the sheet 40 can be evenly extracted from the air outlet 1a, ensuring the temperature uniformity above the sheet 40.

[0074] Optionally, the second flow equalizing cavity 81a of the second flow equalizing member 8 may be directly enclosed by the second flow equalizing plate 631, the side walls around the accommodating cavity 11, and the top wall of the accommodating cavity 11. The second air hole 631a serves as the second flow equalizing air inlet hole 8b, and the air outlet 1a serves as the second flow equalizing air outlet hole 8a. In the embodiment of the present disclosure, the second flow equalizing member 8 may include a fifth flow equalizing plate 81. The fifth flow equalizing plate 81 is disposed at intervals above the second flow equalizing plate 631. The edge of the fifth flow equalizing plate 81 is connected to the side wall of the accommodating cavity 11, and the fifth flow equalizing plate 81, the side walls around the accommodating cavity 11, and the top wall of the accommodating cavity 11 enclose the second flow equalizing cavity 81a. A plurality of second flow equalizing air inlet holes 8b are provided on the fifth flow equalizing plate 81. In the orthographic projection of the fifth flow equalizing plate 81 along the vertical direction Z onto the second flow equalizing plate 631, the second air hole 631a and the second flow equalizing air inlet holes 8b do not overlap or partially overlap, and the air outlet 1a serves as the second flow equalizing air outlet hole 8a to further improve the flow equalizing effect.

[0075] It can be understood that on the basis that the second flow equalizing member 8 includes the third flow equalizing plate 71, the second flow equalizing member 8 further includes a sixth flow equalizing plate. Specifically, reference may be made to the fourth flow equalizing plate 72 provided in the first flow equalizing member 7, which will not be elaborated herein.

[0076] In an alternative embodiment, along the direction from the air inlet 1b to the first flow equalizing plate 621, the cross-sectional area of the first flow equalizing cavity 71a gradually increases; along the direction from the air outlet 1a to the second flow equalizing plate 631, the cross-sectional area of the second flow equalizing cavity 81a gradually increases.

[0077] The embodiment of the present disclosure further provides a heat treatment device, such as Figure 1 and Figure 2 , the heat treatment device 100 includes a support frame 20 and a heating furnace 10. The heating furnace 10 is supported by the support frame 20. The heat treatment device 100 further includes a loading and unloading assembly (not shown in the figure), and the loading and unloading assembly is disposed on at least one side of the heating furnace 10. The loading and unloading assembly is configured to load the carrier plate 30 carrying the sheet 40 into the heating furnace 10 or unload it from the heating furnace 10.

[0078] Optionally, the specific structure of the heating furnace 10 may refer to the relevant descriptions of the above embodiments and will not be elaborated herein.

[0079] In the embodiments of the present disclosure, if not clearly defined, the connection form can be a detachable connection by means of bolts and nuts, screws, buckles, magnetic attraction, etc. In some connections, if there is no special requirement for the form of detachable cooperation, an inseparable connection can be made by means of welding, bonding, etc.

[0080] The basic principles of the present disclosure have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, benefits, effects, etc. mentioned in the present disclosure are only examples and not limitations, and it cannot be considered that these advantages, benefits, effects, etc. are essential for each embodiment of the present disclosure. In addition, the above-mentioned specific details of the disclosure are only for the purpose of illustration and easy understanding, rather than limitations, and the above details do not limit the present disclosure to necessarily adopt the above specific details to implement.

[0081] The block diagrams of the devices, apparatuses, equipment, and systems involved in the present disclosure are only illustrative examples and do not intend to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open-ended words, meaning "including but not limited to", and can be used interchangeably with each other. The words "or" and "and" used herein refer to the word "and / or" and can be used interchangeably with each other, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to" and can be used interchangeably with each other.

[0082] It should also be noted that in the devices, equipment, and methods of the present disclosure, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be regarded as equivalent solutions of the present disclosure.

[0083] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present disclosure. Therefore, the present disclosure is not intended to be limited to the aspects shown herein, but rather to the broadest scope consistent with the principles and novel features disclosed herein.

[0084] The above description has been given for purposes of illustration and description. In addition, this description is not intended to limit the embodiments of the present disclosure to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions, and sub-combinations thereof.

Claims

1. A heating furnace, characterized in that, configured to perform heat treatment on a sheet, the sheet being carried on the upper surface of a carrier plate, the heating furnace comprising: a furnace body having a containing chamber configured to contain the carrier plate carrying the sheet, the furnace body being provided with an air inlet and an air outlet communicating with the containing chamber on both sides in the vertical direction, the air inlet being located below the air outlet, the containing chamber being provided with a placement area configured to place the carrier plate; a heating assembly disposed in the furnace body, the heating assembly being configured to heat the containing chamber, and at least part of the heating assembly being located between the air inlet and the placement area.

2. The heating furnace according to claim 1, characterized in that, The heating assembly includes: a first heating assembly arranged on at least one side wall of the containing chamber; a second heating assembly disposed in the containing chamber, the second heating assembly being arranged in the vertical direction near the air inlet; a third heating assembly disposed in the containing chamber, the third heating assembly being arranged in the vertical direction near the air outlet, and the third heating assembly being located above the second heating assembly, the first heating assembly, the second heating assembly and the third heating assembly enclosing a containing space, and the placement area being located in the containing space.

3. The heating furnace according to claim 2, wherein the first heating assembly includes: a plurality of first heating elements respectively disposed on the side walls around the containing chamber; the second heating assembly includes: a first flow equalizing plate disposed in the containing chamber, the first flow equalizing plate being provided with a plurality of first air holes; a second heating element dispersedly arranged on the first flow equalizing plate, and a vertical projection of the second heating element on the first flow equalizing plate not overlapping or partially overlapping with the first air holes; the third heating assembly includes: a second flow equalizing plate disposed in the containing chamber, the second flow equalizing plate being provided with a plurality of second air holes; a third heating element dispersedly arranged on the second flow equalizing plate, and a vertical projection of the third heating element on the second flow equalizing plate not overlapping or partially overlapping with the second air holes.

4. The heating furnace according to claim 3, characterized in that, The side wall of the containing chamber corresponding to the first heating element, the first flow equalizing plate and the second flow equalizing plate enclose the containing space, there is a gap between the edge of the placement area and the side wall of the containing chamber, the first air holes face the lower surface of the placement area, the second air holes face the upper surface of the placement area, and the gap is configured to allow gas to pass through and diffuse to the placement area.

5. The heating furnace according to claim 3, characterized in that, It further includes: a first flow equalizing member disposed between the air inlet and the first flow equalizing plate, the first flow equalizing member having a first flow equalizing chamber, and the first flow equalizing member being respectively provided with a first flow equalizing air inlet and a first flow equalizing air outlet communicating with the first flow equalizing chamber on both sides in the vertical direction, the first flow equalizing air inlet communicating with the air inlet, and the first flow equalizing air outlet facing the first flow equalizing plate; and / or A second flow equalizing member is disposed between the air outlet and the second flow equalizing plate. The second flow equalizing member has a second flow equalizing cavity. On both sides of the second flow equalizing member in the vertical direction, a second flow equalizing air inlet hole and a second flow equalizing air outlet hole communicating with the second flow equalizing cavity are respectively provided. The second flow equalizing air outlet hole communicates with the air outlet, and the second flow equalizing air inlet hole faces the second flow equalizing plate.

6. The heating furnace according to claim 5, wherein when the heating furnace includes the first flow equalizing member, the number of the first flow equalizing air outlet holes includes a plurality, and the plurality of first flow equalizing air outlet holes are dispersedly arranged on the first flow equalizing member. In the orthographic projection of the first flow equalizing member along the vertical direction onto the first flow equalizing plate, the first air hole and the first flow equalizing air outlet hole do not overlap or partially overlap; when the heating furnace includes the second flow equalizing member, the number of the second flow equalizing air inlet holes includes a plurality, and the plurality of second flow equalizing air inlet holes are dispersedly arranged on the second flow equalizing member. In the orthographic projection of the second flow equalizing member along the vertical direction onto the second flow equalizing plate, the second air hole and the second flow equalizing air inlet hole do not overlap or partially overlap.

7. The heating furnace according to claim 3, characterized in that, Further comprising: a lifting assembly disposed on the furnace body, at least part of the lifting assembly can extend into the accommodating chamber to connect the second heating assembly and / or the third heating assembly, and the lifting assembly is configured to drive the second heating assembly and / or the third heating assembly to move in the accommodating chamber in the vertical direction.

8. The heating furnace according to any one of claims 1 to 7, characterized in that, Further comprising: an air inlet assembly disposed at the air inlet, and the air inlet assembly is configured to introduce gas from the air inlet into the accommodating chamber; an air extraction assembly disposed at the air outlet, and the air extraction assembly is configured to extract the gas diffused above the placement area from the air outlet.

9. The heating furnace according to claim 8, characterized in that, The air inlet assembly includes: an air inlet pipe having an air inlet duct, and two ends of the air inlet pipe are respectively connected to the air inlet and an air inlet device communicating with the air inlet duct; an auxiliary heating assembly disposed in the air inlet duct, and the auxiliary heating assembly is configured to heat the gas before entering the air inlet; an air inlet baffle movably connected to the air inlet duct, and the air inlet baffle is located between the auxiliary heating assembly and the air inlet; an air inlet adjusting member disposed on the air inlet pipe, the air inlet adjusting member is connected to the air inlet baffle, and the air inlet adjusting member can drive the air inlet baffle to act in the air inlet duct to adjust the volume of the gas flowing to the accommodating chamber blocked by the air inlet baffle.

10. The heating furnace according to any one of claims 1-7, characterized in that, Further comprising: a temperature measuring assembly disposed on the furnace body, at least part of the temperature measuring assembly extends into the accommodating chamber, and the temperature measuring assembly is configured to detect the temperature of the placement area and generate a detection signal; a control assembly electrically connected to the temperature measuring assembly and the heating assembly respectively, and the control assembly is configured to receive the detection signal and adjust the heating temperature of the heating assembly according to the detection signal so as to maintain the temperature of the carrier plate carried by the placement area at a preset temperature.

11. The heating furnace according to any one of claims 1-7, characterized in that, On both sides of the furnace body in the first direction, there are a feed inlet and a discharge outlet communicating with the accommodating chamber. The first direction is perpendicular to the vertical direction. The heating furnace further includes: A conveying assembly is disposed on the furnace body. The conveying assembly is configured to carry the carrier plate and drive the carrier plate to enter the accommodating chamber from the feed inlet or convey the carrier plate out of the accommodating chamber from the discharge outlet.

12. A heat treatment device, characterized in that, Comprising: The heating furnace according to any one of claims 1 to 11, wherein the accommodating chamber of the heating furnace is configured to accommodate a carrier plate for heat-treating a sheet carried by the carrier plate; A loading and unloading assembly is disposed on at least one side of the heating furnace. The loading and unloading assembly is configured to load the carrier plate carrying the sheet into the heating furnace or unload the carrier plate from the heating furnace.

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