Double-station alternating type silicon carbide wafer chamfering equipment

Abstract

The invention discloses double-station alternating type silicon carbide wafer chamfering equipment which comprises two bearing suction cups used for bearing a silicon carbide wafer, a rotating motor used for driving a chamfering wheel to rotate and two driving motors used for driving the rotating motor to do circumferential grinding motion around the axis of the silicon carbide wafer. The two bearing suction cups are both mounted on a mounting frame, two limiting rings fixedly connected with the mounting frame are arranged over the two bearing suction cups correspondingly, the opposite ends of the two limiting rings are each provided with a notch, and clamping circular plates are rotationally arranged in inner cavities of the two limiting rings correspondingly; clamping openings are formed in the opposite ends of the two clamping circular plates, and the axes of the two clamping circular plates are fixedly installed on output shafts of the corresponding driving motors. According to the chamfering equipment, double-station alternate operation is adopted, and the silicon carbide chamfering efficiency can be greatly improved.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon carbide wafer chamfering, and particularly relates to a double-station alternating silicon carbide wafer chamfering device. Background Art

[0002] The chamfer design of silicon carbide wafers is an important link in the processing of silicon carbide wafers. It involves the edge treatment of wafers and has a crucial impact on the performance and service life of wafers. The main purpose of chamfering silicon carbide wafers is to improve the edge quality of wafers, reduce the generation of chipping and cracks, thereby improving the mechanical strength and reliability of wafers. At the same time, chamfering can also improve the surface roughness of wafers, improve the surface quality of wafers, and is beneficial to subsequent processing and use.

[0003] When chamfering existing silicon carbide wafers, first use a manipulator to place a single silicon carbide wafer on a carrier chuck and adsorb and fix it. After fixing, control the chamfering wheel to rotate and perform a circumferential chamfering movement along the periphery of the silicon carbide wafer. After chamfering, the manipulator removes the silicon carbide wafer and replaces it with a new one for chamfering operation. This operation method has low work efficiency. Therefore, the present application provides a double-station alternating silicon carbide wafer chamfering device to meet the needs. Summary of the Invention

[0004] The purpose of the present application is to provide a double-station alternating silicon carbide wafer chamfering device to solve the technical problem of low work efficiency of existing silicon carbide wafer chamfering devices.

[0005] To achieve the above purpose, the present application provides the following technical solution: A double-station alternating silicon carbide wafer chamfering device, including two carrier chucks for carrying silicon carbide wafers, a rotating motor for driving the chamfering wheel to rotate, and two driving motors for driving the rotating motor to perform a circumferential grinding movement around the axis of the silicon carbide wafer; Both of the two carrier chucks are installed on a mounting frame. Two limiting rings fixedly connected to the mounting frame are respectively provided directly above the two carrier chucks. And a notch is provided at each opposite end of the two limiting rings. A clamping circular plate is rotatably arranged in the inner cavity of each of the two limiting rings. And a clamping opening is provided at each opposite end of the two clamping circular plates. The centers of the two clamping circular plates are fixedly installed on the output shafts of the corresponding driving motors; The two limiting rings and the two clamping circular plates are all arranged at the same height. A driving cylinder is provided at the upper end of each of the two clamping circular plates, and the two driving cylinders are arranged oppositely. Two L-shaped limiting plates are arranged at the same height between the two limiting rings, and the two L-shaped limiting plates are arranged oppositely; A limiting block adapted to the clamping opening is fixed on the rotating motor, and slide bars are arranged on both sides of the limiting block. The slide bars are adapted to the inner wall of the clamping opening and the sliding grooves arranged on the opposite end faces of the two L-shaped limiting plates. A rotating rod is fixedly installed on the output shaft of the rotating motor, and the chamfering wheel is installed on the rotating rod.

[0006] As a preferred implementation manner in this embodiment, two groups of chamfering wheels are arranged vertically, and an alternating chamfering unit is further included for controlling the two chamfering wheels to perform chamfering operations alternately.

[0007] As a preferred implementation manner in this embodiment, the alternating chamfering unit includes two bearing suction cups arranged at different heights. The height of the bearing suction cup at the lower position is adapted to the height of the lowermost chamfering wheel, and the height of the bearing suction cup at the upper position is adapted to the height of the uppermost chamfering wheel.

[0008] As a preferred implementation manner in this embodiment, an alternating cooling unit is further included, which is installed on the limiting block and is used for alternately controlling the watering and cooling treatment of the working chamfering wheels.

[0009] As a preferred implementation manner in this embodiment, the alternating cooling unit includes a water delivery pipe installed on the limiting block. Two water outlet pipes are respectively arranged vertically on the water delivery pipe, and the two water outlet pipes are respectively adapted to the corresponding chamfering wheels; An upper valve and a lower valve are also arranged vertically on the water delivery pipe, and a U-shaped pipe is installed on the water delivery pipe. The upper valve is located above the upper water outlet pipe, the lower valve is located between the two water outlet pipes, the upper end of the U-shaped pipe is located above the upper valve, the lower end of the U-shaped pipe is located between the lower valve and the upper water outlet pipe, and first gears are installed on the adjusting rods of the upper valve and the lower valve; An H-shaped frame is also installed on the upper valve and the lower valve. Two racks are slidably arranged left and right on the H-shaped frame, and the two racks are respectively engaged with the corresponding first gears. A second gear and a third gear are coaxially rotatably arranged on the H-shaped frame. The second gear is located between the two racks and is engaged with the two racks; A toothed plate is also installed under the L-shaped limiting plate.

[0010] As a preferred implementation manner in this embodiment, a stabilizing unit is further included for ensuring the stability of the chamfering wheel after the limiting block is inserted into the clamping opening.

[0011] As a preferred implementation manner in this embodiment, the stabilizing unit is a permanent magnet installed in the grooves at two opposite ends of the limiting block.

[0012] In summary, the technical effects and advantages of the present invention are as follows: The structure of the present invention is reasonable. The chamfering device adopts double-station alternating operation, which can greatly improve the chamfering efficiency of silicon carbide; In the present invention, two groups of chamfering wheels are provided, and the bearing suction cups are arranged at different heights. The two groups of chamfering wheels operate alternately, which can improve the service life and the chamfering quality; In the present invention, an alternating cooling unit is provided, which can automatically cool the chamfering part of the chamfering wheel in the working state. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those skilled in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0014] Figure 1 It is a three-dimensional structural schematic diagram of the present invention; Figure 2 It is Figure 1 the front view structural schematic diagram in; Figure 3 It is Figure 1 the structural schematic diagram of the transfer rod; Figure 4 It is Figure 3 the enlarged structural schematic diagram of the alternating cooling unit in; Figure 5 It is the schematic diagram of the installation position of the toothed plate.

[0015] In the figure: 1, mounting frame; 2, bearing suction cup; 3, limiting ring; 4, clamping circular plate; 5, driving motor; 6, silicon carbide wafer; 7, driving cylinder; 8, rotating motor; 9, clamping opening; 10, L-shaped limiting plate; 11, limiting block; 12, slide bar; 13, permanent magnet; 14, water delivery pipe; 15, chamfering wheel; 16, rotating rod; 17, water outlet pipe; 18, U-shaped pipe; 19, upper valve; 20, lower valve; 21, first gear; 22, H-shaped frame; 23, second gear; 24, third gear; 25, rack; 26, toothed plate. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0016] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0017] Embodiment: Refer to Figure 1 A double-station alternating silicon carbide wafer chamfering device as shown, which includes two carrier suction cups 2 for carrying silicon carbide wafers 6, a rotary motor 8 for driving a chamfering wheel 15 to rotate, and two drive motors 5 for driving the rotary motor 8 to perform a circular grinding motion around the axis of the silicon carbide wafer 6; Both of the two carrier suction cups 2 are installed on a mounting frame 1. Above the two carrier suction cups 2, there are respectively two limiting rings 3 fixedly connected to the mounting frame 1. And on the opposite ends of the two limiting rings 3, there is a notch respectively. In the inner cavities of the two limiting rings 3, there are rotatably arranged clamping circular plates 4. And on the opposite ends of the two clamping circular plates 4, there are clamping openings 9. The axles of the two clamping circular plates 4 are fixedly installed with the output shafts of the corresponding drive motors 5; The two limiting rings 3 and the two clamping circular plates 4 are arranged at the same height. On the upper ends of the two clamping circular plates 4, there is a driving cylinder 7 respectively. And the two driving cylinders 7 are arranged oppositely. Between the two limiting rings 3, there are two L-shaped limiting plates 10 arranged at the same height. And the two L-shaped limiting plates 10 are arranged oppositely; A limiting block 11 adapted to the clamping opening 9 is fixed on the rotary motor 8. And on both sides of the limiting block 11, there are sliding strips 12. The sliding strips 12 are adapted to the inner wall of the clamping opening 9 and the sliding grooves arranged on the opposite end faces of the two L-shaped limiting plates 10. A rotating rod 16 is fixedly installed on the output shaft of the rotary motor 8. The chamfering wheel 15 is installed on the rotating rod 16.

[0018] During use, the silicon carbide wafer is placed on the right carrier suction cup 2 by a manipulator. At this time, control the left driving cylinder 7 to work, push the rotary motor 8 to move to the right (at this time, the rotary motor 8 is in the working state and its chamfering wheel 15 is in a high-speed rotating state), and finally make the limiting block 11 be clamped in the clamping opening 9 arranged on the right (after pushing in place, the left driving cylinder 7 returns to its original position). At this time, control the right drive motor 5 to drive the right clamping circular plate 4 to rotate, driving the chamfering wheel 15 to perform a circular chamfering motion (during this process, the manipulator places a new silicon carbide wafer on the left carrier suction cup 2). When the chamfering wheel 15 returns to its original position, the chamfering is completed. The right drive motor 5 stops working. Control the right driving cylinder 7 to work, push the right rotary motor 8 to the left, and finally make the limiting block 11 move to the clamping opening 9 on the left (after pushing in place, the right driving cylinder 7 returns to its original position). At this time, the left drive motor 5 controls to drive the clamping circular plate 4 to rotate, thereby driving the chamfering wheel 15 to perform a circular grinding motion (during this process, the silicon carbide wafer that has been chamfered on the right has been replaced by the manipulator). The double-station alternating operation can greatly improve the silicon carbide chamfering efficiency.

[0019] As a preferred implementation mode in this embodiment, as Figure 2As shown, there are two sets of chamfering wheels 15 arranged vertically, and an alternating chamfering unit is further included, which is used to control the two chamfering wheels 15 to perform chamfering operations alternately.

[0020] During the chamfering process, continuous friction generates intense heat. Even with cooling water, continuous operation of a single set of chamfering wheels 15 will still cause local temperature fluctuations and thermal stress accumulation, accelerating material thermal fatigue; and long-term cutting by a single set of chamfering wheels 15 will cause deterioration of the microscopic morphology of the cutting edge (such as fracture and shedding of diamond particles). However, alternating use of the two sets of chamfering wheels 15 can make the wear areas of the two sets of chamfering wheels complementary, avoid excessive wear at a single site, and extend the overall service life. Therefore, two sets of chamfering wheels 15 are set to operate alternately.

[0021] As a preferred implementation manner in this embodiment, the alternating chamfering unit includes two carrying suction cups 2 arranged at different heights. The height of the carrying suction cup 2 at the lower position is adapted to the height of the lowermost chamfering wheel 15, and the height of the carrying suction cup 2 at the upper position is adapted to the height of the uppermost chamfering wheel 15.

[0022] When the rotating motor 8 is pushed to the rightmost side, the upper chamfering wheel 15 contacts the silicon carbide wafer on the right and performs chamfering operations. When the rotating motor 8 is pushed to the leftmost side, the lower chamfering wheel 15 will contact the silicon carbide wafer on the left and perform chamfering operations. The two sets of chamfering wheels 15 perform operations alternately, which can improve the service life and the chamfering quality.

[0023] As a preferred implementation manner in this embodiment, an alternating cooling unit is further included, which is installed on the limit block 11 and is used to alternately control watering and cooling of the working chamfering wheels 15.

[0024] Automatically and alternately cool the chamfering areas of the working chamfering wheels 15.

[0025] As a preferred implementation manner in this embodiment, as Figures 3 - 5 shown, the alternating cooling unit includes a water delivery pipe 14 installed on the limit block 11. Two water outlet pipes 17 are respectively arranged on the water delivery pipe 14 in the vertical direction, and the two water outlet pipes 17 are respectively adapted to the corresponding chamfering wheels 15. It further includes an upper valve 19 and a lower valve 20 arranged vertically on the water delivery pipe 14 and a U-shaped pipe 18 installed on the water delivery pipe 14. The upper valve 19 is located above the upper water outlet pipe 17, the lower valve 20 is located between the two water outlet pipes 17, the upper end of the U-shaped pipe 18 is located above the upper valve 19, the lower end of the U-shaped pipe 18 is located between the lower valve 20 and the upper water outlet pipe 17, and first gears 21 are installed on the adjusting rods of the upper valve 19 and the lower valve 20. It further includes an H-shaped frame 22 installed on the upper valve 19 and the lower valve 20. Two racks 25 are slidably arranged on the H-shaped frame 22 from left to right, and the two racks 25 are respectively engaged with the first gear 21. A second gear 23 and a third gear 24 are rotatably arranged coaxially on the H-shaped frame 22. The second gear 23 is located between the two racks 25 and is engaged with the two racks 25; It further includes a toothed plate 26 installed below the L-shaped limiting plate 10.

[0026] When the rotating motor 8 is pushed from the leftmost side to the rightmost side, during this process, the third gear 24 will be engaged with the toothed plate 26 and rotate. The two racks 25 are driven by the second gear 23 to move in opposite directions, and finally the lower valve 20 is closed and the upper valve 19 is opened (at this time, the cooling water can only be discharged from the water outlet pipe 17 arranged above); Similarly, when the rotating motor 8 is pushed from the rightmost side to the leftmost side, during this process, the third gear 24 will be engaged with the toothed plate 26 and rotate, and finally the upper valve 19 is closed and the lower valve 20 is opened (at this time, the cooling water can only be discharged from the water outlet pipe 17 arranged below); This alternating cooling unit can automatically cool the chamfering part of the chamfering wheel 15 in the working state.

[0027] As a preferred implementation manner in this embodiment, it further includes a stabilizing unit for ensuring the stability of the chamfering wheel 15 after the limiting block 11 is inserted into the clamping opening 9.

[0028] The purpose is to improve the stability of the limiting block 11 and finally improve the chamfering accuracy of the chamfering wheel 15 for the silicon carbide wafer.

[0029] As a preferred implementation manner in this embodiment, as Figure 3 shown, the stabilizing unit is a permanent magnet 13 installed in the grooves at two opposite ends of the limiting block 11.

[0030] Through the magnetic force action between the permanent magnet 13 and the clamping circular plate 4, the limiting block 11 and the clamping circular plate are stably fixed together, avoiding the displacement change of the limiting block 11 during the chamfering process of the chamfering wheel 15, which is beneficial to improving the chamfering accuracy.

[0031] It should be noted that when the driving cylinder 7 pushes the rotating motor 8 to move, the clamping circular plate 4 is separated from the permanent magnet 13.

[0032] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A double-station alternating silicon carbide wafer chamfering device, characterized in that: It includes two carrier suction cups (2) for carrying silicon carbide wafers (6), a rotary motor (8) for driving a chamfering wheel (15) to rotate, and two driving motors (5) for driving the rotary motor (8) to perform a circular grinding motion around the axis of the silicon carbide wafer (6); Both of the two carrier suction cups (2) are installed on a mounting frame (1). Above the two carrier suction cups (2), there are respectively two limit rings (3) fixedly connected to the mounting frame (1). A notch is provided at the opposite ends of the two limit rings (3). A clamping circular plate (4) is rotatably arranged in the inner cavity of each of the two limit rings (3). A clamping opening (9) is provided at the opposite ends of the two clamping circular plates (4). The centers of the two clamping circular plates (4) are fixedly installed with the output shafts of the corresponding driving motors (5); The two limit rings (3) and the two clamping circular plates (4) are arranged at the same height. A driving cylinder (7) is provided at the upper end of each of the two clamping circular plates (4), and the two driving cylinders (7) are arranged oppositely. Two L-shaped limit plates (10) are arranged at the same height between the two limit rings (3), and the two L-shaped limit plates (10) are arranged oppositely; A limit block (11) adapted to the clamping opening (9) is fixed on the rotary motor (8). Slide bars (12) are provided on both sides of the limit block (11). The slide bars (12) are adapted to the inner wall of the clamping opening (9) and the chutes provided on the opposite end faces of the two L-shaped limit plates (10). A rotating rod (16) is fixedly installed on the output shaft of the rotary motor (8). The chamfering wheel (15) is installed on the rotating rod (16).

2. The double-station alternating silicon carbide wafer chamfering device according to claim 1, characterized in that: There are two groups of the chamfering wheels (15) arranged vertically. It further includes an alternating chamfering unit for controlling the two chamfering wheels (15) to perform chamfering operations alternately.

3. A double-station alternating silicon carbide wafer chamfering device according to claim 2, characterized in that: The alternating chamfering unit includes the two carrier suction cups (2) arranged at different heights. The height of the carrier suction cup (2) at the lower position is adapted to the height of the lowermost chamfering wheel (15), and the height of the carrier suction cup (2) at the upper position is adapted to the height of the uppermost chamfering wheel (15).

4. A two-station alternating silicon carbide wafer chamfering device according to claim 3, characterized in that: It further includes an alternating cooling unit installed on the limit block (11) for alternately controlling watering and cooling the working chamfering wheel (15).

5. A double-station alternating silicon carbide wafer chamfering device according to claim 4, characterized in that: The alternating cooling unit includes a water delivery pipe (14) installed on the limit block (11). Two water outlet pipes (17) are respectively arranged at the upper and lower positions on the water delivery pipe (14). The two water outlet pipes (17) are respectively adapted to the corresponding chamfering wheels (15); It further includes an upper valve (19) and a lower valve (20) which are vertically arranged on the water delivery pipe (14), and a U-shaped pipe (18) installed on the water delivery pipe (14). The upper valve (19) is located above the upper water outlet pipe (17), the lower valve (20) is located between the two water outlet pipes (17), the upper end of the U-shaped pipe (18) is located above the upper valve (19), the lower end of the U-shaped pipe (18) is located between the lower valve (20) and the upper water outlet pipe (17), and first gears (21) are installed on the adjusting rods of the upper valve (19) and the lower valve (20); It further includes an H-shaped frame (22) installed on the upper valve (19) and the lower valve (20). Two racks (25) are slidably arranged left and right on the H-shaped frame (22), and the two racks (25) are respectively engaged with the first gears (21). A second gear (23) and a third gear (24) are coaxially rotatably arranged on the H-shaped frame (22). The second gear (23) is located between the two racks (25) and engaged with the two racks (25); It further includes a toothed plate (26) installed below the L-shaped limiting plate (10).

6. The double-station alternating silicon carbide wafer chamfering device according to claim 1, wherein: It further includes a stabilizing unit for ensuring the stability of the chamfering wheel (15) after the limiting block (11) is inserted into the clamping opening (9).

7. A double-station alternating silicon carbide wafer chamfering device according to claim 6, characterized in that: The stabilizing unit is a permanent magnet (13) installed in the grooves at two opposite ends of the limiting block (11).

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