Flexible pipe and temperature control system

Abstract

The energy consumption of the temperature control system can be reduced. The flexible pipe (13) comprises a metal corrugated pipe (130) and an inner pipe (131). The inner tube (131) is disposed on the inside of the bellows (130), and the inside surface on which the fluid flows is smooth. The inside surface of the inner tube (131) over which the fluid flows may be smoother than the surface of the woven body. In addition, the inner tube (131) may be formed from, for example, an electrically conductive material. In addition, the inside of the inner tube (131) through which the fluid flows may be coated with a conductive coating film.

Description

[0001] This application is a divisional application of the patent application with the application date of January 28, 2019, application number 201910080273.4, and invention title "Flexible Pipe and Temperature Control System". Technical Field

[0002] Various aspects and embodiments of the present invention relate to a flexible pipe and a temperature control system. Background Art

[0003] A system is known that controls the temperature inside a processing device by circulating a fluid whose temperature is controlled from a temperature control unit outside the processing device that performs a prescribed process to the inside of the processing device. Regarding the processing device and the temperature control unit, in order to be effectively arranged in a restricted installation site such as a clean room, a method with a higher degree of freedom in arrangement is preferred. Therefore, for a part of the pipe for circulating the fluid between these two devices, a flexible pipe that is relatively easy to bend and stretch is used. The flexible pipe often uses a metal bellows.

[0004] However, inside the bellows, there are irregularities in the fluid flow direction, so there are cases where minute vibrations occur in the bellows due to the fluid flowing inside the bellows. Therefore, in the case of a device that requires precise processing or measurement, there are cases where the accuracy of the processing or measurement performed by the device decreases due to the vibrations generated from the bellows.

[0005] To avoid this situation, a flexible pipe with a vibration suppression structure is known that has a tubular braid arranged inside the bellows and is configured such that the fluid flows inside the braid (for example, refer to Patent Document 1 below).

[0006] Prior Art Documents

[0007] Patent Documents

[0008] Patent Document 1: Japanese Patent Application Laid-Open No. 2013-124748. Summary of the Invention

[0009] Technical Problem to be Solved by the Invention

[0010] However, when the friction between the pipe and the fluid flowing therein becomes large, the pressure loss of the fluid becomes large. Therefore, in order to circulate a sufficient flow rate of fluid inside the processing device, the pump of the temperature control unit needs to make the fluid flow at a discharge pressure that takes into account the pressure loss. Therefore, the energy consumption of the temperature control unit becomes large. Moreover, when the processing device and the temperature control unit are arranged at a distance from each other, or when the temperature control unit is arranged on a different floor from the floor where the processing device is arranged, the energy consumption becomes even larger.

[0011] Technical solution for solving technical problems

[0012] One side of the present invention is a flexible pipe, which includes a corrugated pipe made of metal and a flexible pipe. The flexible pipe is disposed inside the corrugated pipe, and the inner surface on which the fluid flows is smooth.

[0013] Advantages of the invention

[0014] According to various aspects and embodiments of the present invention, the energy consumption of the temperature control unit can be reduced. Description of the drawings

[0015] Figure 1 It is a diagram showing an example of the outline of the processing system.

[0016] Figure 2 It is a cross-sectional view showing an example of the flexible pipe of Embodiment 1.

[0017] Figure 3 It is a diagram showing an example of the surface of the braided body.

[0018] Figure 4 It is an enlarged cross-sectional view showing an example of the flexible pipe of Embodiment 2.

[0019] Figure 5 It is an enlarged cross-sectional view showing an example of the flexible pipe of Embodiment 3.

[0020] Figure 6 It is an enlarged cross-sectional view showing an example of the flexible pipe of Embodiment 4.

[0021] Figure 7 It is a diagram showing an example of the range of the coating on the outer peripheral surface of the inner pipe.

[0022] Description of reference numerals

[0023] W semiconductor wafer

[0024] 100 Processing system

[0025] 10 Processing chamber

[0026] 11 Carrier stage

[0027] 12 Rigid pipe

[0028] 13 Flexible pipe

[0029] 130 Corrugated pipe

[0030] 131 Inner pipe

[0031] 132 Surface

[0032] 133 Metal cover

[0033] 135 coating film

[0034] 136 wiring

[0035] 137 coating film

[0036] 138 wiring

[0037] 139 wiring

[0038] 14 pipe

[0039] 15 cooling unit

[0040] 16 temperature control system

[0041] 20 braid

[0042] 21 bare wire. Detailed implementation mode

[0043] Hereinafter, embodiments of the flexible tube and the temperature control system of the invention will be described in detail with reference to the accompanying drawings. In addition, the flexible pipe and the temperature control system of the present invention are not limited to the following embodiments.

[0044] [Embodiment 1]

[0045] [Configuration of processing system 100]

[0046] Figure 1 is a diagram showing an example of the outline of the processing system 100. The processing system 100 includes a hermetically configured processing chamber 10 and a temperature control system 16. The temperature control system 16 includes a mounting table 11, a pipe 14, and a cooling unit 15. The cooling unit 15 is an example of a temperature control unit.

[0047] The mounting table 11 is disposed in the internal space of the processing chamber 10 and is used to mount a semiconductor wafer W, which is an example of an object to be temperature-controlled. Inside the mounting table 11, a flow path for allowing a refrigerant, which is a fluid, to flow is formed. The refrigerant whose temperature has been controlled by the cooling unit 15 is circulated and supplied to the flow path inside the mounting table 11 via the pipe 14. Thus, the temperature of the semiconductor wafer W mounted on the mounting table 11 can be adjusted to a specified temperature. The mounting table 11 is an example of a heat exchange component. The cooling unit 15 is an example of a supply device that supplies a fluid whose temperature is controlled.

[0048] The pipe 14 includes a rigid pipe 12 and a flexible pipe 13. In Figure 1 the example, each pipe 14 includes 2 rigid pipes 12 and 1 flexible pipe 13. However, the number of the rigid pipes 12 and the flexible pipes 13 included in each pipe 14 is not limited.

[0049] The processing chamber 10 is connected to, for example, a gas supply device, an exhaust device, and a high-frequency power supply device (not shown). The gas supply device supplies a processing gas to the space inside the processing chamber 10, and the exhaust device adjusts the pressure in the space inside the processing chamber 10 to a specified pressure. Then, the high-frequency power supply device applies high-frequency power of a specified frequency and power to, for example, the stage 11. As a result, plasma of the processing gas is generated in the space inside the processing chamber 10, and a specified process such as etching is performed on the semiconductor wafer W placed on the stage 11 using the active species contained in the plasma and the like.

[0050] [Structure of the flexible pipe 13]

[0051] Figure 2 is a cross-sectional view showing an example of the flexible pipe 13 of Example 1. The flexible pipe 13 of the present embodiment is, for example, as Figure 2 shown, and includes a bellows 130, an inner pipe 131, and a metal cap 133.

[0052] The bellows 130 is formed of a metal such as stainless steel, and a fluid flows inside it. The fluid flowing inside the bellows 130 may also include an insulating fluid such as freon. At both ends of the bellows 130, metal caps 133 formed of a metal such as stainless steel and having a substantially cylindrical outer shape are fixed by, for example, welding. The bellows 130 is grounded through the metal cap 133. The inner diameter of the bellows 130 is defined as d0.

[0053] Inside the bellows 130, a cylindrical inner pipe 131 formed of a fluororesin such as PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer) or PTFE (polytetrafluoroethylene) is disposed. A fluid can flow inside the inner pipe 131. Since the inner pipe 131 is formed of a fluororesin, when the bellows 130 is bent, the inner pipe 131 bends along with the bellows 130. The inner pipe 131 is an example of a flexible pipe. The inner diameter of the inner pipe 131 is defined as d i .

[0054] In a cross-section in a direction crossing the flow direction of the fluid flowing inside the inner pipe 131 (i.e., the length direction of the inner pipe 131), the outer diameter of the inner pipe 131 is smaller than the inner diameter d0 of the bellows 130. Therefore, the inner pipe 131 can be inserted into the bellows 130. In addition, the length L i in the length direction of the inner pipe 131 is, for example, as Figure 2 shown, shorter than the length L0 in the length direction of the bellows 130. Therefore, there is a gap between the metal caps 133 connected to both ends of the bellows 130 and the inner pipe 131.

[0055] Moreover, when the fluid flows through the flexible pipe 13, a part of the fluid enters between the bellows 130 and the inner pipe 131 through the gap between the metal cover 133 and the inner pipe 131. Therefore, the difference between the pressure of the fluid acting on the inner side of the inner pipe 131 and the pressure of the fluid acting on the outer side of the inner pipe 131 is small. Therefore, the inner pipe 131 is not easily deformed by the pressure of the fluid, and the inner pipe 131 can be made of a material with relatively low mechanical strength. The airtightness and liquid tightness of the fluid flowing in the flexible pipe 13 are ensured by the bellows 130 and the metal cover 133.

[0056] The surface 132 on the inner side of the inner pipe 131 through which the fluid flows is smoother than the surface of the pipe formed by the braid 20. Specifically, the surface roughness Ra of the surface 132 on the inner side of the inner pipe 131 is 0.045 mm or less. Here, the braid 20 refers to a structure obtained by alternately braiding a plurality of bare wires 21 as shown, for example, Figure 3 As shown, it is a structure obtained by alternately braiding a plurality of bare wires 21. The bare wires 21 are made of, for example, carbon, metal, or alumina, and the diameter of the bare wires 21 is, for example, several hundred μm.

[0057] Here, the pressure loss ΔP of the fluid when the fluid flows through the pipe at a specified pressure can be expressed, for example, as shown in the following formula (1).

[0058] ΔP = λ·(L / d)·(ρ·v 2 ) / 2……(1)

[0059] In formula (1), λ represents the pipe friction coefficient between the fluid and the surface of the pipe in contact with the fluid, L represents the length of the pipe, d represents the inner diameter of the pipe, ρ represents the density of the fluid flowing in the pipe, and v represents the flow velocity of the fluid. Since the fluid needs to flow at a discharge pressure considering the pressure loss ΔP, when the pressure loss ΔP of the fluid increases, the energy consumption of the cooling unit 15 increases. In order to reduce the energy consumption of the cooling unit 15, it is necessary to reduce the pressure loss ΔP of the fluid.

[0060] When the pipe is provided, there is a limit to the maximum value of the inner diameter d of the pipe that can be used. In addition, in order to maintain the cooling capacity of the cooling unit 15, it is difficult to reduce the flow velocity v of the fluid. In addition, when the installation location of the processing chamber 10 and the installation location of the cooling unit 15 are determined, there is also a limit to shortening the length L of the pipe. Therefore, in reducing the pressure loss ΔP of the fluid, it is important to reduce the pipe friction coefficient λ between the fluid and the surface of the pipe in contact with the fluid.

[0061] In this embodiment, the surface 132 on the inner side of the inner tube 131 through which the fluid flows is smoother than the surface of the tube formed by the braid 20. Therefore, compared with the existing pipe in which the tube formed by the braid 20 is arranged inside the bellows 130, the flexible pipe 13 of this embodiment can reduce the pipe friction coefficient λ between the fluid and the surface 132 of the inner tube 131 in contact with the fluid. Thereby, the flexible pipe 13 of this embodiment can suppress the pressure loss ΔP caused by the fluid to a low level. Therefore, the energy consumption of the cooling unit 15 can be reduced.

[0062] In addition, in the above formula (1), the flow velocity v of the fluid can be expressed as shown in the following formula (2) using the flow rate U of the fluid and the cross-sectional area A of the pipe.

[0063] v = U / A = (4U) / (πd 2 )...(2)

[0064] In formula (2), d represents the diameter of the pipe.

[0065] If formula (2) is substituted into formula (1), the pressure loss ΔP of the fluid can be expressed, for example, as shown in the following formula (3).

[0066] ΔP = (8λL ρ U 2 ) / (π 2 d 5 )...(3)

[0067] According to formula (3), when the inner diameter d0 of the bellows 130, the pipe friction coefficient λ0 of the bellows 130, the inner diameter d i of the inner tube 131, and the pipe friction coefficient λ i of the inner tube 131 satisfy the relationship shown in the following formula (4), the pressure loss ΔP of the fluid can be reduced.

[0068] (λ0 / λ i ) > (d0 / d i ) 5 ...(4)

[0069] The inner tube 131 of this embodiment is formed with a smoothness with a surface roughness Ra of, for example, 0.045 mm or less on the surface 132 on the inner side. Therefore, the above formula (4) can be satisfied, and the pressure loss ΔP of the fluid can be reduced.

[0070] [Embodiment 2]

[0071] In Embodiment 1, the inner tube 131 is formed of an insulating material such as PFA or PTFE, and the fluid flowing inside the inner tube 131 is an insulating fluid such as Freon. Therefore, static electricity is generated in the inner tube 131 due to the friction between the fluid and the inner surface 132 of the inner tube 131. Thus, there is a situation where when the voltage of the static electricity generated in the inner tube 131 exceeds a certain value, discharge occurs and the inner tube 131 is damaged.

[0072] To avoid this situation, in the present embodiment, a material in which a conductive material is added to an insulating material such as PFA or PTFE is used to form the inner tube 131. The conductive material added to the insulating material such as PFA or PTFE is, for example, carbon or metal. Therefore, the inner tube 131 of the present embodiment has conductivity.

[0073] In addition, in the present embodiment, the outer diameter of the inner tube 131 is, for example, the same as that of the inner tube 131 of Embodiment 1 described in Figure 2 and is smaller than the inner diameter d0 of the bellows 130. In addition, the length L in the longitudinal direction of the inner tube 131 i is, for example, the same as that of the inner tube 131 of Embodiment 1 described in Figure 2 and is shorter than the length L0 in the longitudinal direction of the bellows 130. In addition, the inner tube 131 is not fixed to the bellows 130 and the metal cap 133. Therefore, the inner tube 131 can move in the longitudinal direction of the bellows 130 and in a direction intersecting the longitudinal direction inside the bellows 130.

[0074] Therefore, at least a part of the outer peripheral surface of the inner tube 131 is in contact with the bellows 130 and is electrically conductive, as shown in Figure 4 . Figure 4 FIG. is an enlarged cross-sectional view showing an example of the flexible pipe 13 of Embodiment 2. Thus, the static electricity generated due to the friction between the fluid and the inner surface 132 of the inner tube 131 flows in the inner tube 131 and flows from the outer peripheral surface of the inner tube 131 in contact with the bellows 130 to the bellows 130. Since the bellows 130 is grounded through the metal cap 133, the static electricity flowing from the inner tube 131 to the bellows 130 can flow to the ground.

[0075] Thus, the flexible pipe 13 of the present embodiment can suppress the voltage rise of the static electricity generated in the inner tube 131 and can suppress the damage of the inner tube 131 due to discharge.

[0076] [Embodiment 3]

[0077] In Embodiment 2, the entire inner tube 131 is formed of a conductive material, but in the present embodiment, it is different in that the inner side of the inner tube 131 on which the fluid flows is coated with a conductive material.

[0078] Figure 5 This is an enlarged cross-sectional view showing an example of the flexible pipe 13 of Embodiment 3. In this embodiment, for example, the inner side of the inner pipe 131 is coated with a coating film 135 made of a material containing conductivity as Figure 5 shown. The surface of the coating film 135 in contact with the fluid flowing in the inner pipe 131 is smoother than the surface of the pipe made of the braided body 20. Specifically, the surface roughness Ra of the surface of the coating film 135 in contact with the fluid flowing in the inner pipe 131 is 0.045 mm or less.

[0079] In addition, the coating film 135 coated on the inner side of the inner pipe 131 is connected to the corrugated pipe 130 through a wiring 136. Thus, the static electricity generated by the friction between the fluid and the coating film 135 flows in the coating film 135 and flows to the corrugated pipe 130 via the wiring 136. Since the corrugated pipe 130 is grounded through the metal cap 133, the static electricity flowing to the corrugated pipe 130 flows to the ground. In addition, the coating film 135 coated on the inner side of the inner pipe 131 may be connected to the metal cap 133 through a wiring 136.

[0080] Thus, the flexible pipe 13 of this embodiment can suppress the voltage rise of the static electricity generated in the inner pipe 131 due to the fluid flowing in the inner pipe 131, and can suppress the damage of the inner pipe 131 caused by discharge.

[0081] [Embodiment 4]

[0082] In Embodiment 3, the coating film 135 coated on the inner side of the inner pipe 131 is connected to the corrugated pipe 130 through a wiring 136. However, in this embodiment, for example, as Figure 6 shown, the coating film 135 coated on the inner side of the inner pipe 131 is connected to the coating film 137 coated on the outer side of the inner pipe 131 through a wiring 138. Figure 6 This is an enlarged cross-sectional view showing an example of the flexible pipe 13 of Embodiment 4. Moreover, the coating film 137 is in contact with the corrugated pipe 130, so as to be electrically connected to the corrugated pipe 130.

[0083] Thus, even when the inner pipe 131 moves within the corrugated pipe 130, since the wiring 138 moves within the corrugated pipe 130 integrally with the inner pipe 131, the wiring 138 is not easily broken. Therefore, the static electricity generated by the friction between the fluid and the coating film 135 can be more reliably released to the ground through the corrugated pipe 130.

[0084] In addition, the coating film 135 coated on the inner side of the inner pipe 131 and the coating film 137 coated on the outer side of the inner pipe 131 are connected together through a wiring 138 provided at the end face of the inner pipe 131. In addition, for example, as Figure 6As shown, they are connected together by the wiring 139 that penetrates the inner tube 131 in the thickness direction. Thus, even if the end face of the inner tube 131 scratches against the metal cap 133, the wiring connecting the connection coating film 135 and the coating film 137 will not be peeled off, and the connection between the coating film 135 and the coating film 137 can be made more reliably.

[0085] In addition, the coating film 137 can be provided on the entire outer peripheral surface of the inner tube 131, or can be provided, for example, as Figure 7 shown, on at least a part of the inner tube 131 in the length direction. In the Figure 7 example, the coating film 137 is provided on at least a part of the inner tube 131 in the length direction in such a manner as to coat the entire circumference of the outer peripheral surface of the inner tube 131. Thus, the amount of the coating film 137 provided on the outside of the inner tube 131 can be reduced. In addition, in the Figure 7 example, one wiring 138 connecting the connection coating film 135 and the coating film 137 is provided at the end face of the inner tube 131. As another example, a plurality of wirings 138 connecting the connection coating film 135 and the coating film 137 can also be provided at the end face of the inner tube 131.

[0086] As described above, the present invention has been described using the embodiments, but the technical scope of the present invention is not limited to the scope described in the above embodiments. Those skilled in the art clearly know that various changes or improvements can be added to the above embodiments. In addition, according to the scope of the claims, it is clearly understood that the ways in which such changes or improvements are added can also be included in the technical scope of the present invention.

Claims

1. A flexible pipe, characterized in that, Comprising: A corrugated pipe made of metal; And A flexible pipe disposed inside the corrugated pipe, and the inner surface on which the fluid flows is smooth, The inner diameter d0 of the corrugated pipe, the pipe friction coefficient λ0 of the corrugated pipe, the inner diameter d of the flexible pipe i , and the pipe friction coefficient λi of the flexible pipe satisfy the following relationship: (λ0 / λ i ) > (d0 / d i ) 5 。 2. The flexible pipe according to claim 1, wherein: The inner surface of the flexible pipe on which the fluid flows is smoother than the surface of the braided body.

3. The flexible pipe according to claim 1 or 2, wherein: The surface roughness Ra of the inner surface of the flexible pipe is 0.045 mm or less.

4. The flexible pipe according to claim 1 or 2, wherein: The flexible pipe is formed of tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer PFA or polytetrafluoroethylene PTFE.

5. The flexible pipe according to claim 1 or 2, wherein: A coating is formed on at least a part of the inner side of the flexible pipe from a conductive material, The inner coating of the flexible pipe is electrically connected to the corrugated pipe.

6. The flexible pipe according to claim 5, wherein: A coating is formed on at least a part of the outer side of the flexible pipe from a conductive material, The coating on the outer side of the flexible pipe is connected to the coating on the inner side of the flexible pipe, At least a part of the coating on the outer periphery of the flexible pipe is electrically connected to the corrugated pipe.

7. The flexible pipe according to claim 5, wherein: The conductive material is a coating film added with carbon or metal powder.

8. The flexible pipe according to claim 1 or 2, wherein: The flexible pipe is formed of a conductive material, At least a part of the outer periphery of the flexible pipe is electrically connected to the corrugated pipe.

9. The flexible pipe according to claim 8, wherein: The flexible pipe is formed of a material containing tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer PFA or polytetrafluoroethylene PTFE added with carbon or metal powder.

10. The flexible pipe according to claim 1 or 2, wherein: The outer diameter of the flexible pipe is smaller than the inner diameter of the corrugated pipe, The length in the length direction of the flexible pipe is shorter than the length in the length direction of the corrugated pipe.

11. A temperature control system, characterized in that, Comprising: A heat exchange component disposed inside the substrate processing apparatus, which performs heat exchange with a temperature control object inside the substrate processing apparatus; A supply device that supplies a fluid whose temperature has been controlled to the heat exchange component; And A flexible pipe that constitutes at least a part of the fluid flow path between the heat exchange component and the supply device; The flexible pipe includes: A corrugated pipe made of metal; And A flexible pipe disposed inside the corrugated pipe, and the inner surface on which the fluid flows is smooth, The inner diameter d0 of the corrugated pipe, the pipe friction coefficient λ0 of the corrugated pipe, the inner diameter d of the flexible pipe i , and the pipe friction coefficient λi of the flexible pipe satisfy the following relationship: (λ0 / λ i ) > (d0 / d i ) 5 .

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