Temperature control method and online vacuum sintering furnace
By independently controlling the preheating zone, welding zone and cooling zone of the online vacuum sintering furnace, and using heating pipe baffles and inert gas protection, the temperature uniformity and accuracy problems are solved and the welding quality is improved.
Patent Information
- Application Number
- CN202510477845.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-16
- Publication Date
- 2025-07-11
AI Technical Summary
In the prior art, the temperature uniformity of the heating plate of the online vacuum sintering furnace is low and the temperature control accuracy is insufficient, resulting in poor welding quality.
The preheating zone, welding zone and cooling zone of the online vacuum sintering furnace are divided into independent control areas, and the temperature adjustment is carried out through independent temperature controllers and heating pipe baffles, combining inert gas protection to avoid oxidation and thermal interference.
The temperature uniformity and temperature control accuracy of the heating plate are improved, the welding quality is improved, and the stress and oxidation risks caused by sharp temperature changes are reduced.
Smart Images
Figure CN120292882A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of semiconductor chip processing equipment, and in particular to a temperature control method and an on-line vacuum sintering furnace. Background Art
[0002] When semiconductor chips are packaged, it needs to be carried out in a vacuum environment, which can generally be realized in the form of a vacuum furnace. The vacuum furnace in the prior art is provided with multiple preheating zones, a vacuum zone and multiple cooling zones. Among them, the preheating zones use nitrogen protection and are not completely low-oxygen environments; the welding zone is a vacuum environment. After the chips are welded, the door connecting the welding zone and the cooling zone is opened, and the chips enter the cooling zone from the welding zone. At the same time, the door connecting the welding zone and the preheating zone is opened, and the preheated chips are sent into the welding zone for welding. In this way, during the completion of one welding process and the start of the next welding process, the front and rear doors of the welding zone need to be opened simultaneously, and the cooling zone and the preheating zone will damage the maintenance of the vacuum environment in the welding zone; the temperature uniformity of the heating plate of the on-line vacuum sintering furnace with infrared heating tubes in the prior art is low, so the temperature control accuracy of the on-line vacuum sintering furnace is low. Summary of the Invention
[0003] The present invention provides a temperature control method to solve the problems of low temperature uniformity of the heating plate of the on-line vacuum sintering furnace and low temperature control accuracy of the on-line vacuum sintering furnace in the prior art.
[0004] A temperature control method includes: S00. Split the control areas of the first preheating zone, the second preheating zone, and the welding zone of the on-line vacuum sintering furnace; S10. Open the first gate valve. After the first workpiece enters the first preheating zone, close the first gate valve, and the first workpiece performs a normal temperature preheating step; S20. Open the second gate valve. After the first workpiece enters the second preheating zone, close the second gate valve. When the first preheating zone cools down to normal temperature, open the first gate valve, transfer the second workpiece to the first preheating zone, the second workpiece performs a normal temperature preheating step, and the first workpiece performs a preheating step; S30. Open the third gate valve and the second gate valve. After the first workpiece enters the welding zone and the second workpiece enters the second preheating zone, close the third gate valve and the second gate valve. When the first preheating zone cools down to normal temperature, open the first gate valve, transfer the third workpiece to the first preheating zone, the third workpiece performs a normal temperature preheating step, the second workpiece performs a preheating step, and the third workpiece performs a welding step; S40. Open the second, third, and fourth flap valves. After the first workpiece enters the cooling zone and the second workpiece enters the welding zone, and then the third workpiece enters the second preheating zone, close the second, third, and fourth flap valves. After the first preheating zone cools down to room temperature, open the first flap valve, transfer the fourth workpiece to the first preheating zone, the fourth workpiece performs the room-temperature preheating step, the third workpiece performs the preheating step, the second workpiece performs the welding step, and the first workpiece performs the cooling step; S50. Open the fifth flap valve. After the first workpiece exits the cooling zone, close the fifth flap valve, open the second, third, and fourth flap valves. After the second workpiece enters the cooling zone and the third workpiece enters the second preheating zone, close the second, third, and fourth flap valves. After the first preheating zone cools down to room temperature, open the first flap valve, transfer the third workpiece to the first preheating zone, the third workpiece performs the room-temperature preheating step, the second workpiece performs the preheating step, and the first workpiece performs the cooling step; wherein, for the room-temperature preheating step, preheating step, and welding step, the heating is controlled by the heating plate temperature control step.
[0005] According to the temperature control method of the present invention, the specific steps of the room-temperature preheating step are as follows: S101. After evacuating the first preheating zone, start heating from room temperature and heat to the first preheating temperature at the first heating rate; S102. After reaching the first preheating temperature, keep the temperature constant for time T1, and then heat to the second preheating temperature at the second heating rate; wherein, the first heating rate is less than the second heating rate.
[0006] According to the temperature control method of the present invention, the first preheating temperature is 125°C - 145°C.
[0007] According to the temperature control method of the present invention, the second preheating temperature is 165°C - 185°C.
[0008] According to the temperature control method of the present invention, the specific steps of the preheating step are as follows: Evacuate the second preheating zone and fill it with a reducing or inert gas, heat to the third preheating temperature, and keep the temperature constant for time T2; the third preheating temperature is higher than the second preheating temperature.
[0009] According to the temperature control method of the present invention, the specific steps of the welding step are as follows: Evacuate the welding zone and fill it with a reducing or inert gas, heat to the welding temperature and keep the temperature constant for time T3; The specific steps of the cooling step are as follows: Evacuate the cooling zone and fill it with a reducing or inert gas, and cool down to the cooling temperature.
[0010] According to the temperature control method of the present invention, the specific splitting of the control areas of the first preheating zone, second preheating zone, and welding zone of the on-line vacuum sintering furnace is as follows: S01. Divide the number M of lower heating tubes in the first preheating zone, the second preheating zone and the welding zone of the online vacuum sintering furnace into N independent control zones. If N divides M evenly, then distribute M / N evenly. If not, the number of heating tubes in the middle zone is less than that in the two side zones and the number of heating tubes in the two side zones is equal; S02. Set heating tube baffles at the edges of the independent control zones. The number of heating tube baffles is N - 1, and the height of the heating tube baffles is greater than the height of the lower heating tubes; S03. Correspondingly set heating plate independent control zones on the heating plates that match the independent control zones of the lower heating tubes. A plurality of temperature measuring sensors are evenly arranged in the heating plate independent control zones to collect temperature data in real time, and an independent temperature controller is set in the heating plate independent control zones.
[0011] According to the temperature control method of the present invention, the specific steps for controlling the temperature of the heating plate are as follows: S510. In the initial stage of heating, the upper heating tubes and the lower heating tubes are heated at full power; S520. In the temperature rising stage, when approaching the set temperature, the independent temperature controller dynamically adjusts the power of the upper heating tubes and the lower heating tubes according to the difference between the real-time temperature and the set temperature in the first preheating zone or the second preheating zone or the welding zone; S530. In the heat preservation stage, the independent temperature controller makes fine adjustments to the upper heating tubes and the lower heating tubes according to the fluctuation of the real-time temperature.
[0012] An online vacuum sintering furnace based on the above method, the online vacuum sintering furnace includes a first gate valve, a second gate valve, a third gate valve, a fourth gate valve, a fifth gate valve, a first preheating zone, a second preheating zone, a welding zone and a cooling zone. The first preheating zone, the second preheating zone, the welding zone and the cooling zone are arranged according to the working process. The first gate valve is arranged at the inlet end of the first preheating zone, the second gate valve is arranged at the outlet end of the first preheating zone, the second gate valve is arranged at the inlet end of the second preheating zone, the third gate valve is arranged at the outlet end of the second preheating zone, the third gate valve is arranged at the outlet end of the welding zone, the fourth gate valve is arranged at the outlet end of the welding zone, the fourth gate valve is arranged at the inlet end of the cooling zone, the fifth gate valve is arranged at the outlet end of the cooling zone. Lower heating tubes are arranged inside the lower cavities of the first preheating zone, the second preheating zone and the welding zone, and upper heating tubes are arranged inside the upper covers of the first preheating zone, the second preheating zone and the welding zone.
[0013] According to the online vacuum sintering furnace of the present invention, it further includes a plurality of heating tube baffles, and the heating tube baffles are arranged for the lower heating tubes.
[0014] The present invention has the following advantages: 1. The power of the lower heating tubes in each independent control area is controlled separately, enabling precise temperature regulation, improving the temperature uniformity of the heating plate, thereby enhancing the temperature control accuracy of the on-line vacuum sintering furnace and improving the welding quality.
[0015] 2. Heating tube baffles are arranged between independent control areas, which can effectively block direct heat radiation and heat convection, reducing direct heat interference between adjacent areas, thereby improving the temperature uniformity of the heating plate surface.
[0016] 3. The normal temperature preheating step avoids stress caused by sudden temperature changes and prevents the workpiece from being oxidized, improving the welding quality. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.
[0018] Figure 1 It is a schematic flow diagram of the temperature control method; Figure 2 It is a schematic flow diagram of the normal temperature preheating step; Figure 3 It is a schematic flow diagram of the control area splitting; Figure 4 It is a schematic front view structure diagram of the on-line vacuum sintering furnace; Figure 5 It is a schematic structure diagram of the lower cavity of the heating area of the on-line vacuum sintering furnace. Reference numerals: 1. First gate valve; 2. Second gate valve; 3. Third gate valve; 4. Fourth gate valve; 5. Fifth gate valve; 6. First preheating area; 7. Second preheating area; 8. Welding area; 9. Cooling area; 10. Lower heating tubes; 11. Heating tube baffle. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0019] The following will further describe in detail the embodiments of the present invention in conjunction with the drawings and embodiments. The following embodiments are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.
[0020] In the description of the embodiments of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the embodiments of the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the embodiments of the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.
[0021] In the description of the embodiments of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.
[0022] In the embodiments of the present invention, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature can be that the first feature is directly above or obliquely above the second feature, or simply means that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature can be that the first feature is directly below or obliquely below the second feature, or simply means that the first feature has a lower horizontal height than the second feature.
[0023] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present invention. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or at least one embodiment or example. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.
[0024] The following is combined with Figures 1-3 Describing an embodiment of the present invention, a temperature control method includes: S00. Split the control areas of the first preheating zone, the second preheating zone, and the welding zone of the online vacuum sintering furnace; S10. Open the first gate valve. After the first workpiece enters the first preheating zone, close the first gate valve, and the first workpiece performs the normal temperature preheating step; S20. Open the second gate valve. After the first workpiece enters the second preheating zone, close the second gate valve. After the first preheating zone cools down to normal temperature, open the first gate valve, transfer the second workpiece to the first preheating zone, the second workpiece performs the normal temperature preheating step, and the first workpiece performs the preheating step; S30. Open the third gate valve and the second gate valve. After the first workpiece enters the welding zone and the second workpiece enters the second preheating zone, close the third gate valve and the second gate valve. After the first preheating zone cools down to normal temperature, open the first gate valve, transfer the third workpiece to the first preheating zone, the third workpiece performs the normal temperature preheating step, the second workpiece performs the preheating step, and the third workpiece performs the welding step; S40. Open the second gate valve, the third gate valve, and the fourth gate valve. After the first workpiece enters the cooling zone, the second workpiece enters the welding zone, and the third workpiece enters the second preheating zone, close the second gate valve, the third gate valve, and the fourth gate valve. After the first preheating zone cools down to normal temperature, open the first gate valve, transfer the fourth workpiece to the first preheating zone, the fourth workpiece performs the normal temperature preheating step, the third workpiece performs the preheating step, the second workpiece performs the welding step, and the first workpiece performs the cooling step; S50. Open the fifth gate valve. After the first workpiece exits the cooling zone, close the fifth gate valve. Open the second gate valve, the third gate valve, and the fourth gate valve. After the second workpiece enters the cooling zone and the third workpiece enters the second preheating zone, close the second gate valve, the third gate valve, and the fourth gate valve. After the first preheating zone cools down to normal temperature, open the first gate valve, transfer the third workpiece to the first preheating zone, the third workpiece performs the normal temperature preheating step, the second workpiece performs the preheating step, and the first workpiece performs the cooling step; wherein, for the normal temperature preheating step, the preheating step, and the welding step, the heating is controlled by the heating plate temperature control step.
[0025] In some embodiments, the normal temperature preheating step is specifically: S101. Evacuate the first preheating zone and then fill it with inert gas to atmospheric pressure. Start heating from normal temperature and heat to the first preheating temperature at the first heating rate; this is for preliminary preheating to avoid stress caused by rapid temperature changes and to prevent oxidation of the workpiece. The first preheating temperature is 125°C - 145°C.
[0026] S102. After reaching the first preheating temperature, keep it at a constant temperature for time T1, and then heat to the second preheating temperature at the second heating rate; wherein, the first heating rate is less than the second heating rate. The second preheating temperature is 165°C - 185°C.
[0027] In some embodiments, the preheating step is specifically: The second preheating zone is evacuated and filled with a reducing or inert gas, heated to the third preheating temperature, and held at a constant temperature for a time T2; the third preheating temperature is greater than the second preheating temperature. The heating time and thermal stress in the welding zone are reduced. The constant temperature time T2 is 5 - 8 minutes.
[0028] According to the temperature control method of the present invention, the welding step is specifically as follows: The welding zone is evacuated and filled with a reducing or inert gas, heated to the welding temperature and held at a constant temperature for a time T3; the welding temperature is 260°C - 400°C.
[0029] The cooling step is specifically as follows: The cooling zone is evacuated and filled with a reducing or inert gas, cooled to the cooling temperature. The cooling temperature is 50 - 60°C.
[0030] In some embodiments, the splitting of the control regions of the first preheating zone, the second preheating zone, and the welding zone of the on-line vacuum sintering furnace is specifically as follows: S01. Divide the number M of the lower heating tubes in the first preheating zone, the second preheating zone, and the welding zone of the on-line vacuum sintering furnace into N independent control zones. If N divides M evenly, then divide M / N equally. If not, the number of heating tubes in the middle zone is less than that in the two side zones and the number of heating tubes in the two side zones is equal; for example, if the number of lower heating tubes is 12 and divided into 3 zones, each zone has 4. If the number of lower heating tubes is 11 and divided into 3 zones, then the middle zone has 3 and the two side zones each have 4. The number of lower heating tubes is M. Independently control the power of the lower heating tubes in each zone to achieve precise temperature adjustment, improve the temperature uniformity of the heating plate, thereby improving the temperature control accuracy of the on-line vacuum sintering furnace and improving the welding quality.
[0031] S02. Set heating tube baffles at the edges of the independent control zones. The number of heating tube baffles is N - 1, and the height of the heating tube baffles is greater than the height of the lower heating tubes; the heating tube baffles are made of materials with low thermal conductivity and high temperature resistance, such as ceramic fiber and high-silica glass fiber materials. Setting heating tube baffles between independent control zones can effectively block direct heat radiation and heat convection, reduce direct thermal interference between adjacent regions, and thus improve the temperature uniformity of the heating plate surface.
[0032] S03. Correspondingly set heating plate independent control zones on the heating plate for the independent control zones of the lower heating tubes. The heating plate independent control zones are evenly provided with multiple temperature measurement sensors to collect temperature data in real time, and the heating plate independent control zones are provided with independent temperature controllers.
[0033] In some embodiments, the heating plate temperature control step is specifically as follows: S510. In the initial stage of heating, the upper heating tube and the lower heating tube are heated at full power, enabling the heating plate to quickly reach the required temperature and shortening the overall heating time. The upper heating tube and the lower heating tube are infrared heating tubes.
[0034] S520. During the temperature rise stage, when approaching the set temperature, the independent temperature controller dynamically adjusts the power of the upper heating tube and the lower heating tube according to the temperature difference between the real-time temperature and the set temperature in the first preheating zone, the second preheating zone, or the welding zone. For example, since the temperature in the middle zone rises quickly, the temperature controller first reduces its heating power. The set temperature is the first preheating temperature, the second preheating temperature, the third preheating temperature, or the welding temperature.
[0035] S530. During the heat preservation stage, the independent temperature controller makes fine adjustments to the upper heating tube and the lower heating tube according to the fluctuations of the real-time temperature. For example, if the temperature in the middle zone slightly drops, the temperature controller appropriately increases the power of the heating tube.
[0036] The following combines Figures 4-5 Describe an embodiment of the present invention, an on-line vacuum sintering furnace. The on-line vacuum sintering furnace includes a first gate valve 1, a second gate valve 2, a third gate valve 3, a fourth gate valve 4, a fifth gate valve 5, a first preheating zone 6, a second preheating zone 7, a welding zone 8, and a cooling zone 9. The first preheating zone 6, the second preheating zone 7, the welding zone 8, and the cooling zone 9 are arranged according to the working process. The first gate valve 1 is arranged at the inlet end of the first preheating zone 6, the second gate valve 2 is arranged at the outlet end of the first preheating zone 6, the second gate valve 2 is arranged at the inlet end of the second preheating zone 7, the third gate valve 3 is arranged at the outlet end of the second preheating zone 7, the third gate valve 3 is arranged at the inlet end of the welding zone 8, the fourth gate valve 4 is arranged at the outlet end of the welding zone 8, the fourth gate valve 4 is arranged at the inlet end of the cooling zone 9, and the fifth gate valve 5 is arranged at the outlet end of the cooling zone 9. Lower heating tubes 10 are arranged inside the lower cavities of the first preheating zone 6, the second preheating zone 7, and the welding zone 8, and upper heating tubes are arranged inside the upper covers of the first preheating zone 6, the second preheating zone 7, and the welding zone 8. Heating plates are arranged inside the first preheating zone 6, the second preheating zone 7, and the welding zone 8. A cooling plate is arranged below the heating plate of the first preheating zone 6 to control the temperature of the heating plate of the first preheating zone 6, improving the temperature control efficiency.
[0037] In some embodiments, it further includes a plurality of heating tube baffles 11, and the lower heating tubes 10 are provided with heating tube baffles 11. For example, there are 15 lower heating tubes 10, divided into 3 independent control zones, with 5 lower heating tubes 10 in each independent control zone. Then 2 heating tube baffles 11 are required. The independent control zones are separated by the heating tube baffles 11, which can effectively block direct heat radiation and heat convection, reducing direct heat interference between adjacent zones, thereby improving the temperature uniformity on the surface of the heating plate. The heating tube baffles 11 can have adjustable angles. Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims
1. A temperature control method, characterized in that, Including: S00, splitting the control areas of the first preheating zone, the second preheating zone, and the welding zone of the online vacuum sintering furnace; S10, opening the first shutter valve, closing the first shutter valve after the first workpiece enters the first preheating zone, and the first workpiece performs the normal temperature preheating step; S20, opening the second shutter valve, closing the second shutter valve after the first workpiece enters the second preheating zone, opening the first shutter valve after the first preheating zone cools down to normal temperature, transferring the second workpiece to the first preheating zone, the second workpiece performs the normal temperature preheating step, and the first workpiece performs the preheating step; S30, opening the third shutter valve and the second shutter valve, the first workpiece enters the welding zone, closing the third shutter valve and the second shutter valve after the second workpiece enters the second preheating zone, opening the first shutter valve after the first preheating zone cools down to normal temperature, transferring the third workpiece to the first preheating zone, the third workpiece performs the normal temperature preheating step, the second workpiece performs the preheating step, and the third workpiece performs the welding step; S40, opening the second shutter valve, the third shutter valve, and the fourth shutter valve, the first workpiece enters the cooling zone, after the second workpiece enters the welding zone and the third workpiece enters the second preheating zone, closing the second shutter valve, the third shutter valve, and the fourth shutter valve, opening the first shutter valve after the first preheating zone cools down to normal temperature, transferring the fourth workpiece to the first preheating zone, the fourth workpiece performs the normal temperature preheating step, the third workpiece performs the preheating step, the second workpiece performs the welding step, and the first workpiece performs the cooling step; S50, opening the fifth shutter valve, closing the fifth shutter valve after the first workpiece exits the cooling zone, opening the second shutter valve, the third shutter valve, and the fourth shutter valve, the second workpiece enters the cooling zone, closing the second shutter valve, the third shutter valve, and the fourth shutter valve after the third workpiece enters the second preheating zone, opening the first shutter valve after the first preheating zone cools down to normal temperature, transferring the third workpiece to the first preheating zone, the third workpiece performs the normal temperature preheating step, the second workpiece performs the preheating step, and the first workpiece performs the cooling step; wherein, for the normal temperature preheating step, the preheating step, and the welding step, the heating is performed by the heating plate temperature control step.
2. The temperature control method according to claim 1, wherein The specific normal temperature preheating step is: S101, evacuating the first preheating zone, starting heating from normal temperature, and heating to the first preheating temperature at the first heating rate; S102, after reaching the first preheating temperature, maintaining the temperature for time T1, and heating to the second preheating temperature at the second heating rate; wherein, the first heating rate is less than the second heating rate.
3. The temperature control method according to claim 2, characterized in that, The first preheating temperature is 125°C - 145°C.
4. The temperature control method according to claim 2, characterized in that The second preheating temperature is 165°C - 185°C.
5. The temperature control method according to claim 2, wherein The specific preheating step is: Evacuating the second preheating zone and filling it with a reducing or inert gas, heating to the third preheating temperature, and maintaining the temperature for time T2; the third preheating temperature is greater than the second preheating temperature.
6. According to the temperature control method described in claim 1, characterized in that The specific welding step is: Evacuating the welding zone and filling it with a reducing or inert gas, heating to the welding temperature and maintaining the temperature for time T3; The specific cooling step is: Evacuating the cooling zone and filling it with a reducing or inert gas, cooling to the cooling temperature.
7. The temperature control method according to claim 1, characterized in that, The splitting of the control areas of the first preheating zone, the second preheating zone, and the welding zone of the online vacuum sintering furnace is specifically: S01. Divide the number M of the lower heating tubes in the first preheating zone, the second preheating zone and the welding zone of the online vacuum sintering furnace into N independent control zones. If N divides M evenly, distribute M / N evenly. If not, the number of heating tubes in the middle zone is less than that in the two side zones and the number of heating tubes in the two side zones is equal; S02. Set heating tube baffles at the edges of the independent control zones. The number of heating tube baffles is N - 1, and the height of the heating tube baffles is greater than the height of the lower heating tubes; S03. Correspondingly set heating plate independent control zones on the heating plates matching the independent control zones of the lower heating tubes. A plurality of temperature measuring sensors are evenly arranged in the heating plate independent control zones to collect temperature data in real time, and an independent temperature controller is set in the heating plate independent control zones.
8. The temperature control method according to claim 1, wherein The specific steps for controlling the heating plate temperature are as follows: S510. In the initial heating stage, the upper heating tubes and the lower heating tubes are heated at full power; S520. In the temperature rising stage, when approaching the set temperature, the independent temperature controller dynamically adjusts the power of the upper heating tubes and the lower heating tubes according to the difference between the real-time temperature and the set temperature in the first preheating zone or the second preheating zone or the welding zone; S530. In the heat preservation stage, the independent temperature controller makes fine adjustments to the upper heating tubes and the lower heating tubes according to the fluctuation of the real-time temperature.
9. An on-line vacuum sintering furnace based on the method according to any one of claims 1 to 8 above, characterized in that, The online vacuum sintering furnace includes a first gate valve, a second gate valve, a third gate valve, a fourth gate valve, a fifth gate valve, a first preheating zone, a second preheating zone, a welding zone and a cooling zone. The first preheating zone, the second preheating zone, the welding zone and the cooling zone are arranged according to the working process. The first gate valve is arranged at the inlet end of the first preheating zone, the second gate valve is arranged at the outlet end of the first preheating zone, the second gate valve is arranged at the inlet end of the second preheating zone, the third gate valve is arranged at the outlet end of the second preheating zone, the third gate valve is arranged at the outlet end of the welding zone, the fourth gate valve is arranged at the inlet end of the cooling zone, the fifth gate valve is arranged at the outlet end of the cooling zone. Lower heating tubes are arranged inside the lower cavities of the first preheating zone, the second preheating zone and the welding zone, and upper heating tubes are arranged inside the upper covers of the first preheating zone, the second preheating zone and the welding zone.
10. The online vacuum sintering furnace according to claim 9, characterized in that, It also includes a plurality of heating tube baffles, and the heating tube baffles are arranged for the lower heating tubes.