Online thickness gauge long drift calibration method and device

Abstract

The invention discloses an online thickness gauge long drift calibration method and device, and relates to the technical field of thickness gauges. Obtaining a preset calibration algorithm; measuring a pure ray source signal without the thin film to obtain a signal value of pure ray intensity; measuring a signal of the standard component to obtain a signal value of rays of the weakened standard component relative to the material and the thickness of the standard sample; a pure ray source signal value at the moment is calculated by adopting the calibration algorithm, the calibration of the pure ray source signal value near the moment is realized by utilizing the gradual change characteristic of the pure ray source signal value, and then the thickness of the measured film can be calculated by inputting a ray absorption formula. Measurement data of the thickness gauge can be monitored in real time and compared with standard data, so that measurement errors are calculated.

Description

Technical Field

[0001] The present invention relates to the technical field of thickness gauges, and specifically to an online thickness gauge long drift calibration method and device. Background Technique

[0002] In the booming development of today's industrial production, ensuring the accurate measurement of material thickness has become an indispensable part. The ray thickness gauge, as an advanced non-destructive testing technology, plays a key role in many fields such as metal processing, film manufacturing, and pipe production by virtue of its unique advantages.

[0003] However, during the use of the online thickness gauge, due to various factors such as equipment aging, environmental factor interference, and sensor wear, its measurement accuracy gradually decreases over time, and this phenomenon is called "long drift". The long drift phenomenon poses a serious threat to the measurement accuracy of the online thickness gauge, which may lead to deviations in product quality control and further affect the safety and reliability of the product. Therefore, it is very necessary to calibrate the ray thickness gauge. The traditional calibration method is usually carried out in an offline state, that is, the thickness gauge needs to be removed from the production line and calibrated using a standard sample. This method is not only time-consuming and laborious, but also cannot reflect the real situation of the thickness gauge in the working state in real time. Summary of the Invention

[0004] Aiming at the deficiencies of the prior art, the present invention provides an online thickness gauge long drift calibration method and device, which solves the problems raised in the background technique.

[0005] To achieve the above objectives, the present invention is realized through the following technical solutions: An online thickness gauge long drift calibration method and device includes: Obtain a preset calibration algorithm; Measure the pure ray source signal without placing a film to obtain the signal value of the pure ray intensity ; Measure the signal of the standard part to obtain the signal value of the ray weakened by the standard part ; The material and thickness of the standard sample are known; Record the pure ray source signal value, the thickness value of the standard part, the signal value of the standard part, and the signal values at the initial moment and the calibration moment according to the designed device, use the calibration algorithm to calculate the pure ray source signal value at the moment, utilize the slow change characteristic of the pure ray source signal value to realize the calibration of the pure ray signal value near the moment, and then input the ray absorption formula to calculate the thickness of the measured film.

[0006] Preferably, the establishment process of the calibration algorithm includes: measuring the signal value of a pure radiation source using a calibration device, measuring the signal value of the placed standard, according to the following formula: At moment, ; At moment, ; At nearby, .

[0007] Preferably, through the calibration method, the thickness value of the calibrated film and the thickness values of the films with different numbers of layers placed can be obtained.

[0008] Preferably, the calibration device mainly consists of a radiation source, a double-layer coating, a standard, a detector, and a standard roller. The structure of the double-layer coating consists of a first coating, a substrate, and a second coating.

[0009] Preferably, when the thickness gauge starts to work, the thickness gauge enters the automatic long drift calibration state. The standard rotates at the set speed with the standard roller. During this period, the radiation source and the detector are in a concentric state, and the signal values of the pure radiation source and the standard are sampled in sequence. Through the set calibration algorithm, the calibration of the sampled values is achieved. At this time, as the coating on the coating machine moves, the thickness of the film layer is calculated and output according to the set algorithm, and the signal values of the standard sample and the measured sample are collected online, including the following steps: Step 1: Measure the signal value of the pure radiation source without the film placed; Step 2: The standard rotates to the center of the detector and the radiation source at the specified speed, and the signal values of the standard at the initial moment and the calibration moment are recorded respectively; Step 3: The calibration algorithm calculates the signal value of the pure radiation source at moment. Using the slow-varying characteristic of the signal value of the pure radiation source, the calibration of the pure radiation signal value near moment is achieved; ; Step 4: As the double-layer coating on the coating machine moves, when the film moves to the center position of the detector and the radiation source, the thickness of the measured film is calculated and output according to the set radiation absorption formula.

[0010] Beneficial effects The present invention provides a method and device for long drift calibration of an online thickness gauge. Compared with the prior art, the following beneficial effects are achieved: A method and device for long drift calibration of an online thickness gauge. By designing a high-precision calibration device, the measurement data of the thickness gauge can be monitored in real time and compared with the standard data, so as to calculate the measurement error. The principle of this device is to know the initial value of the collected data and an attenuator with a fixed magnification (a standard part with a known thickness). Since there is a slow-changing signal, the data changes with time , and at this time, the value after the attenuator is measured , so as to obtain the value that changes with time , where . When measuring the film thickness, it is found that changes with time after the machine is turned on. Since is unknown, the real-time calibration of the sampling value is realized through a standard part with a known material and thickness. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 is a schematic structural diagram of the present invention.

[0012] In the figure: 1, radiation source; 2, first coating; 3, base material; 4, second coating; 5, standard part; 6, detector; 7, standard part roller. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0013] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0014] Please refer to Figure 1 , the present invention provides a technical solution: a method for long drift calibration of an online thickness gauge, including: Obtaining a preset calibration algorithm; Measuring the signal of the pure radiation source 1 without placing a thin film to obtain the signal value of the pure radiation intensity ; Measuring the signal of the standard part 5 to obtain the signal value of the radiation weakened by the standard part 5 ; The material and thickness of the standard sample are known; Record the signal value of the pure radiation source 1, the thickness value of the standard part 5, the signal value of the standard part 5, and the signal values at the initial moment and the calibration moment according to the designed device. Use the calibration algorithm to calculate the signal value of the pure radiation source 1 at a certain moment, and utilize the slow-varying characteristic of the signal value of the pure radiation source 1 to calibrate the pure radiation signal value near that moment. Then, input the radiation absorption formula to calculate the thickness of the measured thin film.

[0015] The establishment process of the calibration algorithm includes: measuring the signal value of the pure radiation source 1 using a calibration device, measuring the signal value of the standard part 5 placed, according to the following formula: At moment, ; At moment, ; At nearby, .

[0016] Through the calibration method, the thickness value of the calibrated thin film and the thickness values of the thin films with different numbers of layers placed can be obtained.

[0017] The calibration device mainly consists of radiation source 1, double-layer coating, standard part 5, detector 6, and standard part roller 7. The structure of the double-layer coating consists of coating layer 1 2, substrate 3, and coating layer 2 4.

[0018] When the thickness gauge starts to work, it enters the automatic long drift calibration state. The standard part 5 rotates at the set speed with the standard part roller 7. During this period, the radiation source 1 and the detector 6 are in a concentric state, and the signal values of the pure radiation source and the standard part 5 are sampled in sequence. Through the set calibration algorithm, the calibration of the sampled values is achieved. At this time, as the coating on the coating machine moves, the calculation and output of the film layer thickness are realized according to the set algorithm, and the signal values of the standard sample and the measured sample are collected online, including the following steps: Step 1: Measure the signal value of the pure radiation source 1 without placing a thin film; Step 2: The standard part 5 rotates to the center of the detector 6 and the radiation source 1 at the specified speed, and the signal values of the standard part 5 at the initial moment and the calibration moment are respectively recorded; Step 3: The calibration algorithm calculates the signal value of the pure radiation source 1 at moment , and utilize the slow-varying characteristic of the pure radiation source signal value to achieve the calibration of the pure radiation signal value near moment Calibration of Step 4: As the double-layer coating on the coating machine moves, when the film moves to the center of the detector 6 and the radiation source 1, according to the set The ray absorption formula is used to calculate and output the thickness of the film being measured.

[0019] When the thickness gauge starts working, it starts to enter the automatic long drift calibration state. The thickness gauge working program automatically samples the signal value of the pure radiation source 1. As the standard part 5 rotates at a certain speed on the standard part roller 7 to the position just above the radiation source 1 and the detector 6, the working program samples the signal value of the standard part 5 at the initial moment. and calibration time The signal value Sampling is performed and the calibration algorithm is set to achieve Pure ray signal value near time As the double-layer coating on the coating machine moves, its structure consists of coating layer 1 2, substrate 3 and coating layer 2 4. When the coating moves to the center of the detector 6 and the radiation source 1, according to the set The ray absorption formula can calculate and output the film thickness. By designing a high-precision calibration device, the measurement data of the thickness gauge can be monitored in real time and compared with the standard data to calculate the measurement error. and a fixed-rate attenuator (Standard part 5 with known thickness), due to the presence of slow-changing signals, the data changes with time , then by measuring the value after the attenuator , thus obtaining the value that changes over time ,in When measuring the film thickness, it was found that It changes with time after startup. The sample value is unknown, so the real-time calibration of the sample value is realized by using the standard part 5 of known material and thickness. When starting the test, the thickness gauge working program automatically samples the signal value of the pure radiation source 1 to obtain the signal value As the standard roller 7 rotates, the sampling value of the standard 5 at the initial moment when it initially rotates to the top of the detector 6 is ,exist At the moment, the sampling signal value of the detector 6 to the standard 5 is .pass and Formula substitution to calculate ,exist nearby and Approximately equal. According to this method, Pure ray signal value near the moment Calibration of, and thus substituting into The ray absorption formula to calculate the film thickness data.

[0020] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device.

[0021] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An online thickness gauge long drift calibration method, characterized in that: Including: Obtain a preset calibration algorithm; Measure the pure radiation source signal without placing the thin film to obtain the signal value of the pure radiation intensity ; Measure the signals of the standard parts to obtain the signal values of the rays weakened by the standard parts ; The material and thickness of the standard sample are known; Record the pure radiation source signal value, the thickness value of the standard part, the signal value of the standard part, and the signal values at the initial moment and the calibration moment according to the designed device. Use the calibration algorithm to calculate the pure radiation source signal value at the moment. Utilize the slow-varying characteristic of the pure radiation source signal value to achieve the calibration of the pure radiation signal value near the moment, and then input the radiation absorption formula to calculate the thickness of the thin film to be measured.

2. The online thickness gauge long drift calibration method according to claim 1, characterized in that: The establishment process of the calibration algorithm includes: measuring the signal value of the pure radiation source using a calibration device, measuring the signal value of the standard part placed, according to the following formula: At moment ； At moment ； At nearby 。 3. An online thickness gauge long drift calibration method according to claim 1, characterized in that: Through the calibration method, the thickness value of the thin film obtained after calibration and the thickness values of the thin films with different numbers of layers placed can be obtained.

4. An on-line thickness gauge long drift calibration device, characterized in that: The calibration device mainly consists of a radiation source (1), a double-layer coating, a standard part (5), a detector (6) and a standard part roller (7), and the structure of the double-layer coating consists of a first coating (2), a substrate (3) and a second coating (4).

5. An on - line thickness gauge long - drift calibration device according to claim 4, characterized in that: When the thickness gauge starts to work, the thickness gauge enters the automatic long drift calibration state. The standard part (5) rotates at the set speed with the standard part roller (7). During this period, the radiation source (1) and the detector (6) are in a concentric state, successively realizing the sampling of the signal values of the pure radiation source and the standard part (5). Through the set calibration algorithm, the calibration of the sampled values is achieved. At this time, as the coating on the coating machine moves, the calculation and output of the film layer thickness are realized according to the set algorithm, and the signal values of the standard sample and the sample to be measured are collected online, including the following steps: Step 1: Measure the signal value of the pure radiation source without the thin film placed; Step 2: The standard part rotates to the center of the detector and the radiation source at a specified speed, and the signal values of the standard part at the initial moment and the calibration moment are recorded. ​ Step 3: The calibration algorithm calculates the pure ray source signal value at the moment. Using the slow-varying characteristic of the pure ray source signal value, calibration of the pure ray signal value near the moment is achieved. Step 4: As the double-layer coating on the coating machine moves, when the film moves to the center position of the detector and the radiation source, the thickness of the film to be measured is calculated and output according to the set ray absorption formula.

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