Sputtering pretreatment device for COF packaging base material

Abstract

The invention discloses a COF packaging base material sputtering pretreatment device, and belongs to the technical field of flexible base material treatment.The COF packaging base material sputtering pretreatment device is characterized in that an upper cleaning roller and a lower cleaning roller are installed between a first supporting plate and a second supporting plate, a driving assembly is installed at the upper end, and a first regulation and control assembly and a second regulation and control assembly are installed at the lower end of the driving assembly; the lower end of the first regulation and control assembly and the lower end of the second regulation and control assembly are connected with the end of the upper cleaning roller, a supplementing assembly is installed on the side wall of the second supporting plate, a first placing assembly and a second placing assembly are installed between the first supporting plate and the second supporting plate, and the supplementing assembly is connected with the first placing assembly and the second placing assembly. The solution is supplemented to the upper cleaning roller and the lower cleaning roller regularly and quantitatively through the supplementing assembly, the cleaning effect is improved, and volatilization of an organic solvent is reduced; the lower push plate drives the upper cleaning roller to loosen or tension the base material, operation of the base material is not affected in the regulation and control period, and the technical effect of continuous work adjustment is achieved.

Description

Technical Field

[0001] The present invention belongs to the technical field of flexible substrate processing, and particularly relates to a sputtering pretreatment device for a COF packaging substrate. Background Art

[0002] Magnetron sputtering coating is an important method of vacuum coating. It uses high-energy particles (usually positive ions accelerated by an electric field, such as argon ions) to bombard the solid surface, causing the atoms or molecules on the solid surface to exchange kinetic energy with the incident high-energy particles and then splash out from the solid surface. These sputtered atoms (or atomic clusters) have a certain amount of energy and can redeposit and condense on the surface of the solid substrate to form a film, that is, sputtering coating.

[0003] Impurities, oil stains, etc. on the surface of the flexible substrate will affect the adhesion between the sputtered film and the substrate. Therefore, before sputtering, it is necessary to thoroughly clean the surface of the substrate. Organic solvents (such as acetone, ethanol, etc.) can be used to wipe the surface of the substrate, then rinsed with deionized water, and finally the organic residues and oxides on the surface are further removed by plasma cleaning. However, there are many problems in the actual cleaning process. On the one hand, when cleaning the upper and lower surfaces of the flexible substrate, it is difficult for the existing devices to ensure the flatness of the flexible substrate during the cleaning process, which affects the cleaning effect. Moreover, although there are some tensioning devices in the existing technology, it is often impossible to achieve real-time tensioning and relaxation of the flexible substrate during the cleaning process, and the work process is prone to interruption, resulting in low production efficiency.

[0004] On the other hand, organic solvents such as ethanol and acetone are volatile and will continuously volatilize during the cleaning process, making it difficult to maintain the stability of the concentration and amount of the organic solvent, which affects the cleaning effect. In order to ensure the cleaning effect, the traditional method is to continuously add a large amount of organic solvent, but this will not only cause waste of the organic solvent, increase production costs, but also may cause greater pollution to the environment. However, if the organic solvent is not replenished in time, it may not achieve the ideal cleaning effect due to insufficient organic solvent. Summary of the Invention

[0005] In view of the above situation, in order to overcome the defects of the prior art, the present invention provides a sputtering pretreatment device for a COF packaging substrate, which at least partially solves the problems raised in the above background art.

[0006] The technical solution adopted by the present invention is as follows: A sputtering pretreatment device for a COF packaging substrate comprises a first support plate and a second support plate for supporting and fixing, the first support plate and the second support plate are placed opposite to each other, an upper cleaning roller and a lower cleaning roller are installed between the first support plate and the second support plate, the upper cleaning roller is arranged at the upper end of the lower cleaning roller, a driving assembly is installed at the upper end of the first support plate and the second support plate, and a regulating assembly 1 and a regulating assembly 2 are installed at the lower end of the driving assembly, and the regulating assembly 1 and the regulating assembly 2 are symmetrically placed with the center line between the first support plate and the second support plate as the symmetry axis, the regulating assembly 1 is arranged on the first support plate, and the regulating assembly 2 is arranged on the second support plate, and the lower end of the regulating assembly 1 and the lower end of the regulating assembly 2 are respectively connected to the end of the upper cleaning roller, and a supplementary assembly is installed on the side wall of the second support plate, and a placement assembly 1 and a placement assembly 2 are also installed between the first support plate and the second support plate, the placement assembly 1 is arranged at the upper end of the upper cleaning roller, and the placement assembly 2 is arranged at the lower end of the lower cleaning roller, and the supplementary assembly is respectively connected to the placement assembly 1 and the placement assembly 2.

[0007] Preferably, gear one, gear two, gear three and gear four are movably installed on the outer wall of the second support plate in sequence, gear one is connected to one end of the lower cleaning roller, gear four is connected to one end of the upper cleaning roller, gear two is movably installed on the second support plate, and gear two is meshingly connected with gear one, gear three is meshingly connected with gear two, and gear three can move along the outer wall of gear two, gear four is meshingly connected with gear three, and gear four can move along the outer wall of gear three, a connecting rod one is movably installed at the center of gear two, and the other end of the connecting rod one is movably connected to the center of gear three, a connecting rod two is movably installed at the center of gear three, and the other end of the connecting rod two is movably connected to the center of gear four.

[0008] Furthermore, a lower cleaning piece is provided on the outer side wall of the lower cleaning roller, the lower cleaning piece is elastically arranged, and a flexible material that is easy to absorb liquid, such as a flexible sponge, is installed on the outer side wall; a ventilation cavity three is provided between the lower cleaning piece and the outer side wall of the lower cleaning roller, a ventilation cavity one is provided in the center of the lower cleaning roller, and a plurality of ventilation cavities two for gas circulation are also provided in the lower cleaning roller, one end of the ventilation cavity two is through-connected with the ventilation cavity one, and the other end of the ventilation cavity two is through-connected with the ventilation cavity three; an upper cleaning piece is provided on the outer side wall of the upper cleaning roller, and a flexible material that is easy to absorb liquid, such as a flexible sponge, is installed on the outer side wall of the upper cleaning piece; a toggle piece is installed on the end of the lower cleaning roller close to the supplementary component, the toggle piece is arranged at the upper end of the supplementary component and can be movably connected with the supplementary component, the ventilation cavity one passes through the other end of the lower cleaning roller and is arranged in the center of the toggle piece, the end of the toggle piece away from the lower cleaning roller is an arc structure, and a plurality of groups of balls that can reduce friction are movably installed.

[0009] In which, the driving assembly includes a connecting plate and a hydraulic rod, the two ends of the connecting plate are respectively connected to the upper walls of the first support plate and the second support plate, the first support plate and the second support plate support the connecting plate, the hydraulic rod is arranged at the center position of the connecting plate, the connecting plate supports and fixes the hydraulic rod, the movable end of the hydraulic rod is installed with a push-down plate, airbag 1 and airbag 2 are installed between the push-down plate and the connecting plate, a ventilation pipe 1 is installed between the airbag 1 and the airbag 2, the ventilation pipe 1 is used for the gas flow between the airbag 1 and the airbag 2, a ventilation pipe 2 is installed on one side wall of the airbag, the other end of the ventilation pipe 2 is movably connected to the center of the toggle member, and the ventilation pipe 2 connects the airbag 1 and the ventilation chamber 1.

[0010] Preferably, the supplementary component includes a fixing plate 1, which is arranged on the side wall of the second support plate, and the second support plate supports and fixes the fixing plate 1. A telescopic rod is installed on the upper wall of the fixing plate 1, and a pressure plate is installed on the upper end of the telescopic rod. A spring and a folding bag are installed between the pressure plate and the fixing plate 1, and the spring is arranged on the outside of the folding bag. The toggle member is arranged at the upper end of the pressure plate. When the toggle member rotates to the lower end, it can drive and squeeze the pressure plate. The downward movement of the pressure plate drives the spring and the telescopic rod, and the folding bag is compressed.

[0011] Among them, the space inside the folding bag is divided into cavity one and cavity two, an upper connecting tube is installed at the upper end of cavity one, and the other end of the upper connecting tube is connected to the placement component one, and a lower connecting tube is installed at the lower end of cavity two, and the other end of the lower connecting tube is connected to the placement component two, and the supplementary component also includes a storage box, in which ethanol, propanol or isopropanol, etc. for cleaning the flexible substrate are placed, and the storage box is connected to cavity one and cavity two through a delivery pipe, and the delivery pipe, the upper connecting pipe and the lower connecting pipe are all provided with a one-way valve, which can control the liquid in the storage box to enter cavity one and cavity two through the delivery pipe, the liquid in cavity one enters the placement component one through the upper connecting pipe, and the liquid in cavity two enters the placement component two through the lower connecting pipe.

[0012] Preferably, the placement component 1 includes a placement plate 1, the two ends of the placement plate 1 are respectively arranged on the opposite side walls of the first support plate and the second support plate, the bottom wall of the placement plate 1 is provided with a temporary storage cavity 1, the upper cleaning piece is arranged at the lower end of the temporary storage cavity 1, the bottom wall of the temporary storage cavity 1 is provided with a plurality of groups of through holes for liquid circulation, the upper end of the placement plate 1 is provided with an air vent, the air vent is through-connected with the temporary storage cavity 1, the other end of the upper connecting tube penetrates the upper wall of the placement plate 1 and is through-connected with the temporary storage cavity 1, the liquid in the cavity 1 enters the temporary storage cavity 1 through the upper connecting tube, and flows into the upper cleaning piece through the through hole.

[0013] Among them, the first placing component includes a second placing plate. The two ends of the second placing plate are respectively arranged on the opposite side walls of the first support plate and the second support plate. A second temporary storage cavity is provided on the upper wall of the second placing plate. The lower cleaning part is arranged in the second temporary storage cavity. The other end of the lower connecting pipe penetrates through the second placing plate and is connected to the second temporary storage cavity in a through manner. The liquid in the second cavity enters the second temporary storage cavity through the lower connecting pipe.

[0014] Further, slot holes are provided at the upper ends of both the first support plate and the second support plate. The lower end of the first regulating component is movably clamped in the slot hole in the first support plate, and the lower end of the second regulating component is movably clamped in the slot hole in the second support plate. The first regulating component and the second regulating component have the same structure. Only one group of them will be introduced here. The first regulating component includes a second fixing plate, a driving rod, and a mounting block. The mounting block is movably clamped in the slot hole in the first support plate. The second fixing plate is arranged on the upper wall of the first support plate and is located directly above the slot hole. A sleeve is installed at the center of the second fixing plate. The driving rod movably penetrates through the sleeve. The upper end of the driving rod is connected to the bottom wall of the lower pushing plate, and the lower end of the driving rod is connected to the upper wall of the mounting block. Both ends of the upper cleaning roller are movably connected to the mounting block.

[0015] Among them, a mounting seat is provided on the side wall of the first support plate. A motor is installed on the mounting seat. The output shaft end of the motor is connected to the other end of the lower cleaning roller. The motor works to drive the lower cleaning roller to rotate.

[0016] After adopting the above structure, the beneficial effects of the present invention are as follows: (1) The liquid in the first cavity enters the first temporary storage cavity through the upper connecting pipe and flows into the rotating upper cleaning part through the through hole. The liquid in the second cavity enters the second temporary storage cavity through the lower connecting pipe. When the lower cleaning roller rotates, the liquid in the second temporary storage cavity is adsorbed in the lower cleaning part. The solution is replenished for the upper cleaning roller and the lower cleaning roller regularly and quantitatively through the replenishing component, improving the cleaning effect and reducing the volatilization of organic solvents at the same time.

[0017] (2) During the cleaning process, when it is necessary to tension the flexible substrate, the lower pushing plate can drive the upper cleaning roller to tension the substrate; when it is necessary to relax the flexible substrate, the lower pushing plate can drive the upper cleaning roller to relax the substrate. During the regulation period, the operation of the substrate is not affected, achieving the technical effect of continuous working adjustment without pause.

[0018] (3) When the lower pushing plate moves downward, the gas in the lower cleaning part decreases. When the lower pushing plate moves upward, the gas in the lower cleaning part increases. The distance between the upper cleaning part and the lower cleaning part can be adjusted in time according to the tensioning or relaxing effect of the substrate, facilitating the passage of the substrate. Description of the Drawings

[0019] The accompanying drawings are used to provide a further understanding of the present invention, and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation to the present invention.

[0020] Figure 1 Structural schematic of a sputtering pretreatment device for a COF encapsulation substrate proposed by the present invention Figure 1 ; Figure 2 is Figure 1 partial enlarged view of part A; Figure 3 Structural schematic of a supplementary component proposed by the present invention; Figure 4 is Figure 3 partial enlarged view of part B; Figure 5 Structural schematic of a sputtering pretreatment device for a COF encapsulation substrate proposed by the present invention Figure 2 ; Figure 6 is Figure 5 partial enlarged view of part C; Figure 7 Cross-section of a sputtering pretreatment device for a COF encapsulation substrate proposed by the present invention Figure 1 ; Figure 8 is Figure 7 partial enlarged view of part D; Figure 9 is Figure 7 partial enlarged view of part E; Figure 10 Cross-section of a sputtering pretreatment device for a COF encapsulation substrate proposed by the present invention Figure 2 .

[0021] In the accompanying drawings: 1. First support plate, 2. Second support plate, 3. Upper cleaning roller, 4. Lower cleaning roller, 5. Driving assembly, 6. First regulating assembly, 7. Second regulating assembly, 8. Supplementary assembly, 9. First placing assembly, 10. Second placing assembly, 11. First gear, 12. Second gear, 13. Third gear, 14. Fourth gear, 15. First connecting rod, 16. Second connecting rod, 17. Lower cleaning member, 18. Third ventilation cavity, 19. First ventilation cavity, 20. Second ventilation cavity, 21. Upper cleaning member, 22. Poking member, 23. Connecting plate, 24. Hydraulic rod, 25. Lower pushing plate, 26. First airbag, 27. Second airbag, 28. First ventilation pipe, 29. Second ventilation pipe, 30. First fixing plate, 31. Telescopic rod, 32. Pressing plate, 33. Spring, 34. Folding bladder, 35. First cavity, 36. Second cavity, 37. Upper connecting pipe, 38. Lower connecting pipe, 39. Storage box, 40. First placing plate, 41. First temporary storage cavity, 42. Second placing plate, 43. Second temporary storage cavity, 44. Slot hole, 45. Second fixing plate, 46. Driving rod, 47. Mounting block, 48. Sleeve, 49. Mounting seat, 50. Motor. Detailed implementation manners

[0022] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments; based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0023] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or elements inherent to such process, method, article or device.

[0024] Such as Figures 1 - 10As shown in the figure, a sputtering pretreatment device for a COF packaging substrate includes a first support plate 1 and a second support plate 2 for support and fixation. The first support plate 1 and the second support plate 2 are placed opposite to each other. An upper cleaning roller 3 and a lower cleaning roller 4 are installed between the first support plate 1 and the second support plate 2. The upper cleaning roller 3 is located directly above the lower cleaning roller 4. A driving assembly 5 is installed at the upper ends of the first support plate 1 and the second support plate 2. A first regulating assembly 6 and a second regulating assembly 7 are installed at the lower ends of the driving assembly 5. The first regulating assembly 6 and the second regulating assembly 7 are symmetrically placed with the center line between the first support plate 1 and the second support plate 2 as the axis of symmetry. The first regulating assembly 6 is installed on the first support plate 1, and the second regulating assembly 7 is installed on the second support plate 2. The lower ends of the first regulating assembly 6 and the second regulating assembly 7 are respectively connected to the ends of the upper cleaning roller 3. A supplementary assembly 8 is installed on the side wall of the second support plate 2. A first placing assembly 9 and a second placing assembly 10 are also installed between the first support plate 1 and the second support plate 2. The first placing assembly 9 is located above the upper cleaning roller 3, and the second placing assembly 10 is located below the lower cleaning roller 4. The supplementary assembly 8 is respectively connected to the first placing assembly 9 and the second placing assembly 10.

[0025] A first gear 11, a second gear 12, a third gear 13 and a fourth gear 14 are sequentially and movably installed on the outer side wall of the second support plate 2. The first gear 11 is connected to one end of the lower cleaning roller 4. The fourth gear 14 is connected to one end of the upper cleaning roller 3. The second gear 12 is movably installed on the second support plate 2, and the second gear 12 is meshed and connected with the first gear 11. The third gear 13 is meshed and connected with the second gear 12, and at the same time, the third gear 13 can move along the outer side wall of the second gear 12. The fourth gear 14 is meshed and connected with the third gear 13, and at the same time, the fourth gear 14 can move along the outer side wall of the third gear 13. A first connecting rod 15 is movably installed at the center of the second gear 12. The other end of the first connecting rod 15 is movably connected to the center of the third gear 13. A second connecting rod 16 is movably installed at the center of the third gear 13. The other end of the second connecting rod 16 is movably connected to the center of the fourth gear 14; It should be noted that when the lower cleaning roller 4 rotates, it drives the first gear 11 to rotate. The first gear 11 drives the meshed second gear 12 to rotate. The second gear 12 drives the third gear 13 to rotate. The third gear 13 drives the fourth gear 14 to rotate. The fourth gear 14 drives the upper cleaning roller 3 to rotate. When the first regulating assembly 6 and the second regulating assembly 7 move downward, they push the upper cleaning roller 3. The upper cleaning roller 3 moves downward along the slot hole 44, driving the fourth gear 14 to move downward. The fourth gear 14 moves downward under the restriction of the slot hole 44, pushing the second connecting rod 16 to move. The second connecting rod 16 drives the third gear 13. The third gear 13 moves along the second gear 12 in a direction away from the slot hole 44, and the first connecting rod 15 swings. Due to the settings of the first connecting rod 15 and the second connecting rod 16, the second gear 12 still meshes with the third gear 13, and the third gear 13 still meshes and connects with the fourth gear 14.

[0026] The outer wall of the lower cleaning roller 4 is provided with a lower cleaning piece 17, the lower cleaning piece 17 is elastically arranged, and the outer wall is installed with a flexible material that is easy to absorb liquid, such as a flexible sponge, a ventilation cavity 3 18 is provided between the lower cleaning piece 17 and the outer wall of the lower cleaning roller 4, a ventilation cavity 19 is provided at the center of the lower cleaning roller 4, and a plurality of ventilation cavities 20 for gas circulation are also provided in the lower cleaning roller 4, one end of the ventilation cavity 20 is connected to the ventilation cavity 19, and the other end of the ventilation cavity 20 is connected to the ventilation cavity 3 18, and the outer wall of the upper cleaning roller 3 is provided with an upper cleaning piece 21, and the outer wall of the upper cleaning piece 21 is installed with a flexible material that is easy to absorb liquid. Material, such as flexible sponge; the gas in ventilation chamber 19 enters ventilation chamber 3 18 through ventilation chamber 2 20, and the lower cleaning piece 17 bulges; the lower cleaning roller 4 is provided with a toggle member 22 at one end close to the supplementary component 8, and the toggle member 22 is arranged at the upper end of the supplementary component 8 and can be movably connected with the supplementary component 8, the ventilation chamber 19 passes through the other end of the lower cleaning roller 4 and is arranged in the center of the toggle member 22, the end of the toggle member 22 away from the lower cleaning roller 4 is an arc structure, and multiple groups of balls that can reduce friction are movably installed; when the lower cleaning roller 4 rotates, it can drive the toggle member 22 to rotate, and when the toggle member 22 rotates, it drives the supplementary component 8.

[0027] The driving assembly 5 includes a connecting plate 23 and a hydraulic rod 24, the two ends of the connecting plate 23 are respectively connected to the upper walls of the first support plate 1 and the second support plate 2, the first support plate 1 and the second support plate 2 support the connecting plate 23, the hydraulic rod 24 is arranged at the center of the connecting plate 23, the connecting plate 23 supports and fixes the hydraulic rod 24, the movable end of the hydraulic rod 24 is installed with a push-down plate 25, an airbag 1 26 and an airbag 2 27 are installed between the push-down plate 25 and the connecting plate 23, a vent pipe 1 28 is installed between the airbag 1 26 and the airbag 2 27, the vent pipe 1 28 is used for the gas flow between the airbag 1 26 and the airbag 2 27, a vent pipe 29 is installed on the side wall of the airbag 1 26, the other end of the vent pipe 29 is movably connected to the center of the toggle member 22, and the vent pipe 29 connects the airbag 1 26 and the ventilation cavity 19; It should be noted that when the hydraulic rod 24 drives the push plate 25 to move upward, the push plate 25 squeezes the airbag 1 26 and the airbag 2 27, and the gas in the airbag 1 26 enters the ventilation cavity 19 through the ventilation pipe 29, and the gas in the airbag 2 27 enters the airbag 1 26 through the ventilation pipe 1 28.

[0028] The supplementary component 8 includes a fixed plate 30, which is arranged on the side wall of the second support plate 2, and the second support plate 2 supports and fixes the fixed plate 30. A telescopic rod 31 is installed on the upper wall of the fixed plate 30, and a pressure plate 32 is installed on the upper end of the telescopic rod 31. A spring 33 and a folding bag 34 are installed between the pressure plate 32 and the fixed plate 30, and the spring 33 is arranged on the outside of the folding bag 34. The toggle member 22 is arranged at the upper end of the pressure plate 32. When the toggle member 22 rotates to the lower end, it can drive and squeeze the pressure plate 32. The pressure plate 32 moves downward to drive the spring 33 and the telescopic rod 31, and the folding bag 34 is compressed.

[0029] The space inside the folding capsule 34 is divided into a cavity 1 35 and a cavity 2 36. An upper connecting tube 37 is installed at the upper end of the cavity 1 35, and the other end of the upper connecting tube 37 is connected to the placement component 1 9. A lower connecting tube 38 is installed at the lower end of the cavity 2 36, and the other end of the lower connecting tube 38 is connected to the placement component 2 10. The supplementary component 8 also includes a storage box 39. Ethanol, propanol or isopropanol, etc. for cleaning the flexible substrate are placed in the storage box 39. The storage box 39 is connected to the cavity 1 35 and the cavity 2 36 through a delivery pipe. The delivery pipe, the upper connecting tube 37 and the lower connecting tube 38 are all provided with a one-way valve, which can control the liquid in the storage box 39 to enter the cavity 1 35 and the cavity 2 36 through the delivery pipe. The liquid in the cavity 1 35 enters the placement component 1 9 through the upper connecting tube 37, and the liquid in the cavity 2 36 enters the placement component 2 10 through the lower connecting tube 38.

[0030] The placement assembly 9 includes a placement plate 40, the two ends of which are respectively arranged on the opposite side walls of the first support plate 1 and the second support plate 2, the bottom wall of the placement plate 40 is provided with a temporary storage cavity 41, the upper cleaning piece 21 is arranged at the lower end of the temporary storage cavity 41, the bottom wall of the temporary storage cavity 41 is provided with a plurality of through holes for liquid circulation, the upper end of the placement plate 40 is provided with an air vent, the air vent is connected with the temporary storage cavity 41, the other end of the upper connecting pipe 37 penetrates the upper wall of the placement plate 40 and is connected with the temporary storage cavity 41, the liquid in the cavity 35 enters the temporary storage cavity 41 through the upper connecting pipe 37, and flows into the upper cleaning piece 21 through the through hole.

[0031] The placement component 19 includes a placement plate 2 42, the two ends of which are respectively arranged on the opposite side walls of the first support plate 1 and the second support plate 2, and the upper wall of the placement plate 42 is provided with a temporary storage cavity 2. The lower cleaning member 17 is arranged in the temporary storage cavity 43, and the other end of the lower connecting pipe 38 passes through the placement plate 42 and is connected with the temporary storage cavity 43. The liquid in the cavity 36 enters the temporary storage cavity 43 through the lower connecting pipe 38.

[0032] The first support plate 1 and the second support plate 2 are both provided with a slotted hole 44 at the upper end, the lower end of the regulating component 1 6 is movably connected to the slotted hole 44 in the first support plate 1, and the lower end of the regulating component 2 7 is movably connected to the slotted hole 44 in the second support plate 2. The regulating component 1 6 and the regulating component 2 7 have the same structure. Only one group is introduced here. The regulating component 1 6 includes a fixing plate 2 45, a driving rod 46 and a mounting block 47. The mounting block 47 is movably connected to the slotted hole 44 in the first support plate 1. The fixing plate 2 45 is arranged on the upper wall of the first support plate 1 and is arranged at the upper end of the slotted hole 44. A sleeve 48 is installed at the center of the fixing plate 2 45. The driving rod 46 movably penetrates the sleeve 48. The upper end of the driving rod 46 is connected to the bottom wall of the lower push plate 25, and the lower end of the driving rod 46 is connected to the upper wall of the mounting block 47. The two ends of the upper cleaning roller 3 are movably connected to the mounting block 47 respectively. It should be noted that when the lower push plate 25 moves down or up, it can drive the drive rod 46 to move down or up along the sleeve 48, the drive rod 46 drives the mounting block 47 to move down or up along the slot 44, and the mounting block 47 drives the upper cleaning roller 3 to move down or up.

[0033] A mounting seat 49 is disposed on the side wall of the first support plate 1 , and a motor 50 is mounted on the mounting seat 49 . The output shaft end of the motor 50 is connected to the other end of the lower cleaning roller 4 , and the motor 50 drives the lower cleaning roller 4 to rotate when it works.

[0034] The specific usage is as follows: The flexible substrate to be cleaned passes through the upper cleaning roller 3 and the lower cleaning roller 4 through movement. The flexible substrate pay-off end and the receiving end are provided with driving force, which can drive the flexible substrate. The upper cleaning roller 3 is arranged on the upper side of the flexible substrate, and the lower cleaning roller 4 is arranged on the lower side. The motor 50 drives the lower cleaning roller 4 to rotate, and the rotation of the lower cleaning roller 4 drives the gear 1 11 to rotate, the gear 1 11 drives the gear 2 12 meshing therewith to rotate, the gear 2 12 drives the gear 3 13 to rotate, the gear 3 13 drives the gear 4 14 to rotate, and the gear 4 14 drives the upper cleaning roller 3 to rotate; The lower cleaning roller 4 drives the toggle member 22 to rotate when rotating. When the toggle member 22 rotates to the lower end, it can drive and squeeze the pressure plate 32. The pressure plate 32 moves downward to drive the spring 33 and the telescopic rod 31. The folding capsule 34 is compressed, and the liquid in the cavity 1 35 enters the temporary storage cavity 1 41 through the upper connecting pipe 37 and flows into the rotating upper cleaning member 21 through the through hole. The liquid in the cavity 2 36 enters the temporary storage cavity 2 43 through the lower connecting pipe 38. When the lower cleaning roller 4 rotates, the liquid in the temporary storage cavity 2 43 is adsorbed in the lower cleaning member 17. The lower cleaning roller 4 and the upper cleaning roller 3 contaminated with the cleaning solvent can clean the upper and lower sides of the substrate when rotating. When the toggle member 22 is separated from the pressure plate 32 , the spring 33 pushes the pressure plate 32 to move upward, and the liquid in the storage box 39 enters the cavity 1 35 and the cavity 2 36 through the delivery pipe.

[0035] During the cleaning process, if the flexible substrate needs to be tensioned, the hydraulic rod 24 works to push the push plate 25 downward, and the push plate 25 can drive the driving rod 46 to move downward along the sleeve 48, and the driving rod 46 drives the mounting block 47 to move downward along the slot 44, and the mounting block 47 drives the upper cleaning roller 3 to move downward, and the upper cleaning roller 3 performs tensioning on the substrate; At the same time, when the upper cleaning roller 3 moves down along the slot hole 44, it can drive the gear 4 14 to move down. The gear 4 14 moves down under the restriction of the slot hole 44, pushing the connecting rod 2 16 to move. The connecting rod 2 16 drives the gear 3 13. The gear 3 13 moves along the gear 2 12 in the direction away from the slot hole 44. The connecting rod 1 15 swings. Due to the setting of the connecting rod 1 15 and the connecting rod 2 16, the gear 2 12 is still meshed with the gear 3 13, and the gear 3 13 is still meshed and connected with the gear 4 14; When the push plate 25 moves downward, the airbag 1 26 and the airbag 2 27 are stretched, and the gas in the ventilation cavity 3 18 enters the airbag 1 26 and the airbag 2 27 through the ventilation cavity 20, the ventilation cavity 1 19 and the ventilation pipe 2 29, and the gas in the lower cleaning member 17 is reduced, which facilitates the passage of the substrate. After adjustment, cleaning can be carried out according to the above cleaning process; During the cleaning process, if the flexible substrate needs to be loosened, the hydraulic rod 24 works to push the lower push plate 25 upward, and the lower push plate 25 can drive the driving rod 46 to move upward along the sleeve 48, and the driving rod 46 drives the mounting block 47 to move upward along the slot 44, and the mounting block 47 drives the upper cleaning roller 3 to move upward, and the upper cleaning roller 3 loosens the substrate; At the same time, when the upper cleaning roller 3 moves up along the slot hole 44, it can drive the gear 4 14 to move up. The gear 4 14 moves up under the restriction of the slot hole 44, driving the connecting rod 2 16 to move. The connecting rod 2 16 drives the gear 3 13. The gear 3 13 moves along the gear 2 12 in the direction close to the slot hole 44. The connecting rod 1 15 swings in the opposite direction. Due to the setting of the connecting rod 1 15 and the connecting rod 2 16, the gear 2 12 is still meshed with the gear 3 13, and the gear 3 13 is still meshed and connected with the gear 4 14; When the push plate 25 moves upward, the airbag 1 26 and the airbag 2 27 are squeezed, and the gas in the airbag 1 26 enters the ventilation cavity 19 through the ventilation pipe 29, and the gas in the airbag 27 enters the airbag 1 26 through the ventilation pipe 1 28. The gas in the lower cleaning part 17 increases, which is convenient for the substrate to pass through. After adjustment, cleaning can be carried out according to the above cleaning process.

[0036] Although embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the invention. The scope of the invention is defined by the appended claims and their equivalents. In general, if those of ordinary skill in the art are inspired by it and, without departing from the purpose of the present invention, design similar structural methods and embodiments to this technical solution without creative efforts, they should all fall within the protection scope of the present invention.

Claims

1. A sputtering pretreatment device for a COF packaging substrate, comprising a first support plate and a second support plate for support and fixation, characterized in that, An upper cleaning roller and a lower cleaning roller are installed between the first support plate and the second support plate, a driving assembly is installed at the upper ends of the first support plate and the second support plate, and a regulating assembly 1 and a regulating assembly 2 are installed at the lower ends of the driving assembly, the regulating assembly 1 is arranged on the first support plate, and the regulating assembly 2 is arranged on the second support plate, the lower ends of the regulating assembly 1 and the regulating assembly 2 are respectively connected to the ends of the upper cleaning roller, a supplementary assembly is installed on the side wall of the second support plate, and a placing assembly 1 and a placing assembly 2 are also installed between the first support plate and the second support plate, the placing assembly 1 is arranged at the upper end of the upper cleaning roller, and the placing assembly 2 is arranged at the lower end of the lower cleaning roller, and the supplementary assembly is respectively connected to the placing assembly 1 and the placing assembly 2.

2. The sputtering pretreatment device for a COF packaging substrate according to claim 1, wherein, Gear 1, gear 2, gear 3 and gear 4 are movably installed on the outer wall of the second support plate in sequence, gear 1 is connected to one end of the lower cleaning roller, gear 4 is connected to one end of the upper cleaning roller, gear 2 is movably installed on the second support plate, and gear 2 is meshingly connected with gear 1, gear 3 is meshingly connected with gear 2, and gear 3 can move along the outer wall of gear 2, gear 4 is meshingly connected with gear 3, and gear 4 can move along the outer wall of gear 3, a connecting rod 1 is movably installed at the center of gear 2, and the other end of the connecting rod 1 is movably connected to the center of gear 3, a connecting rod 2 is movably installed at the center of gear 3, and the other end of the connecting rod 2 is movably connected to the center of gear 4.

3. The sputtering pretreatment device for a COF encapsulation substrate according to claim 2, wherein The outer wall of the lower cleaning roller is provided with a lower cleaning piece, a ventilation cavity three is provided between the lower cleaning piece and the outer wall of the lower cleaning roller, a ventilation cavity one is provided in the center of the lower cleaning roller, and a plurality of ventilation cavities two for gas circulation are also provided in the lower cleaning roller, one end of the ventilation cavity two is through-connected with the ventilation cavity one, and the other end of the ventilation cavity two is through-connected with the ventilation cavity three, and an upper cleaning piece is provided on the outer wall of the upper cleaning roller; a toggle piece is installed at one end of the lower cleaning roller close to the supplementary component, the toggle piece is provided at the upper end of the supplementary component, the ventilation cavity one penetrates the other end of the lower cleaning roller and is provided in the center of the toggle piece, and the end of the toggle piece away from the lower cleaning roller is an arc structure.

4. A sputtering pretreatment device for a COF packaging substrate according to claim 3, characterized in that, The driving assembly includes a connecting plate and a hydraulic rod, the two ends of the connecting plate are respectively connected to the upper walls of the first support plate and the second support plate, the hydraulic rod is arranged at the center position of the connecting plate, the movable end of the hydraulic rod is installed with a push-down plate, airbag 1 and airbag 2 are installed between the push-down plate and the connecting plate, a ventilation pipe 1 is installed between airbag 1 and airbag 2, a ventilation pipe 2 is installed on one side wall of the airbag, and the other end of the ventilation pipe 2 is movably connected to the center of the toggle member.

5. The sputtering pretreatment device for a COF encapsulation substrate according to claim 4, wherein, The supplementary component includes a fixed plate 1, which is arranged on the side wall of the second support plate. A telescopic rod is installed on the upper wall of the fixed plate 1, and a pressure plate is installed on the upper end of the telescopic rod. A spring and a folding bag are installed between the pressure plate and the fixed plate 1, the spring is arranged on the outside of the folding bag, and the toggle member is arranged at the upper end of the pressure plate.

6. The sputtering pretreatment device for a COF packaging substrate according to claim 5, characterized in that, The folded bladder inner space is divided into a first cavity and a second cavity. An upper connecting pipe is installed at the upper end of the first cavity, and the other end of the upper connecting pipe is connected to the first placement component in a through manner. A lower connecting pipe is installed at the lower end of the second cavity, and the other end of the lower connecting pipe is connected to the second placement component in a through manner. The replenishing component further includes a storage box, and the storage box is connected to the first cavity and the second cavity through a conveying pipe. One-way valves are provided in the conveying pipe, the upper connecting pipe, and the lower connecting pipe.

7. The sputtering pretreatment device for a COF packaging substrate according to claim 6, characterized in that, The first placement component includes a first placement plate. The two ends of the first placement plate are respectively arranged on the opposite side walls of the first support plate and the second support plate. A first temporary storage cavity is provided on the bottom wall of the first placement plate. The upper cleaning member is arranged directly below the first temporary storage cavity. A plurality of through holes for liquid circulation are provided on the bottom wall of the first temporary storage cavity. Ventilation holes are provided on the upper end of the first placement plate, and the ventilation holes are connected to the first temporary storage cavity in a through manner. The other end of the upper connecting pipe penetrates through the upper wall of the first placement plate and is connected to the first temporary storage cavity in a through manner.

8. A sputtering pretreatment device for a COF packaging substrate according to claim 7, characterized in that, The second placement component includes a second placement plate. The two ends of the second placement plate are respectively arranged on the opposite side walls of the first support plate and the second support plate. A second temporary storage cavity is provided on the upper wall of the second placement plate. The lower cleaning member is arranged in the second temporary storage cavity. The other end of the lower connecting pipe penetrates through the second placement plate and is connected to the second temporary storage cavity in a through manner.

9. A sputtering pretreatment device for a COF packaging substrate according to claim 8, characterized in that, Slot holes are provided at the upper ends of the first support plate and the second support plate. The lower end of the first regulating component is movably clamped in the slot hole in the first support plate, and the lower end of the second regulating component is movably clamped in the slot hole in the second support plate. The first regulating component and the second regulating component have the same structure. The first regulating component includes a second fixing plate, a driving rod, and a mounting block. The mounting block is movably clamped in the slot hole in the first support plate. The second fixing plate is arranged on the upper wall of the first support plate and is directly above the slot hole. A sleeve is installed at the center of the second fixing plate. The driving rod movably penetrates through the sleeve. The upper end of the driving rod is connected to the bottom wall of the lower pushing plate, and the lower end of the driving rod is connected to the upper wall of the mounting block. The two ends of the upper cleaning roller are respectively movably connected to the mounting block.

10. The sputtering pretreatment device for a COF packaging substrate according to claim 9, characterized in that, A mounting seat is provided on the side wall of the first support plate, and a motor is installed on the mounting seat. The output shaft end of the motor is connected to the other end of the lower cleaning roller.

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