Manufacturing equipment for laminated dimming product

Abstract

The invention provides manufacturing equipment for a laminated light-dimming product, which comprises a vacuum-pumping cavity system, a vacuum-pumping cavity system, a vacuum-pumping device and a control system. The laminated light-dimming product is placed in the vacuum-pumping cavity system, and the vacuum-pumping cavity system is used for carrying out vacuum-pumping on the laminated light-dimming product; the pressure and temperature control system is used for applying pressure to the vacuumizing cavity system, so that the pressure is transmitted to the laminated dimming product placed in the vacuumizing cavity system through the vacuumizing cavity system; and the temperature control system is also used for controlling the temperature of the vacuumizing cavity system so as to control the temperature of the laminated dimming product placed in the vacuumizing cavity system.

Description

Technical Field

[0001] This application relates to the field of optoelectronic technologies, and particularly to a manufacturing device for laminated dimming products. Background Art

[0002] Laminated dimming glass is a product in which a dimming device (such as a dimming film device with flexible characteristics) is cured between two pieces of glass. The dimming device can adjust the transmittance, such as an EC-type dimming device or a dye liquid crystal-type dimming device. The types of dimming devices also include devices that can adjust the haze, such as a PDLC-type dimming device. Dimming devices and laminated dimming glass containing dimming devices are widely used in scenarios such as building and automotive doors and windows, interior partitions, and partitions and doors and windows of aircraft.

[0003] Dimming devices can be classified into dimming devices with a liquid-type dimming material layer, dimming devices with a solid-type dimming material layer, and dimming devices with a semi-solid semi-liquid dimming material layer according to the state of the dimming material layer contained therein. Among them, dimming devices with a liquid-type dimming material layer and dimming devices with a semi-solid semi-liquid dimming material layer are flexible dimming devices made of flexible substrates, and the flexible dimming devices are further laminated between two glass substrates and a bonding layer by a lamination process.

[0004] In the prior art, the process of manufacturing the above-mentioned laminated dimming glass includes: first, two glass substrates, two bonding layers located between the two glass substrates, and a dimming device located between the two bonding layers are stacked together, and air is evacuated and pressed at normal temperature and pressure so that the stacked layers are preliminarily bonded together; then it is sent into an autoclave for high-temperature and high-pressure treatment to melt the bonding layer and tightly bond the glass substrates and the dimming device on both sides of the bonding layer. At the same time, in this process, the residual gas in the bonding layer and the gaps between the glass substrates and the dimming device and the bonding layer is dissolved into the bonding layer to avoid obvious bubble phenomena; then the high pressure is removed and cooled to obtain the final laminated dimming glass product.

[0005] The inventors of this application found the following technical problems during the testing of the above prior art:

[0006] 1. Although the residual gas will be dissolved into the bonding layer during the high-temperature and high-pressure treatment in the autoclave, when the substrate of the dimming device itself is a flexible substrate such as plastic, the water vapor barrier ability of the flexible substrate is relatively poor compared to that of the glass substrate. Therefore, in the latter half of the manufacturing process and during the actual use of the product, the gas dissolved into the bonding layer will precipitate at normal temperature and penetrate into the interior of the dimming device through the substrate with poor water vapor barrier ability of the dimming device, resulting in bubbles appearing inside the dimming device, and in severe cases, even reacting with the material of the dimming device, causing the device to fail.

[0007] 2. Since the air extraction and pressing in the first step are carried out at normal temperature and pressure, the air extraction effect in this step is not ideal. As a result, when the high-temperature and high-pressure treatment is carried out in the autoclave in the second step, the amount of residual gas dissolved in the bonding layer is relatively large, further exacerbating the bubble phenomenon and the problem of failure of the dimming device described in point 1 above.

[0008] Therefore, there is an urgent need to propose a manufacturing device for laminated dimming products that can improve the bubble problem and the device failure problem. Summary of the Invention

[0009] To solve the above problems, the present application provides a manufacturing device for laminated dimming products, which can improve the bubble problem and the device failure problem.

[0010] To achieve the above object, the present application provides a manufacturing device for laminated dimming products, including:

[0011] A vacuum pumping cavity system, in which a laminated dimming product is placed and the laminated dimming product is evacuated;

[0012] A pressure and temperature control system, which is used to apply pressure to the vacuum pumping cavity system, so as to transfer pressure to the laminated dimming product placed therein through the vacuum pumping cavity system; and is also used to control the temperature of the vacuum pumping cavity system, so as to control the temperature of the laminated dimming product placed inside the vacuum pumping cavity system.

[0013] In a preferred embodiment, the vacuum pumping cavity system includes a containing cavity and a vacuum pumping device communicated with the containing cavity, and the vacuum pumping device is used to evacuate the inside of the containing cavity.

[0014] In a preferred embodiment, the outer wall of the containing cavity is made of a flexible material.

[0015] In a preferred embodiment, the containing cavity is formed by a flexible bag.

[0016] In a preferred embodiment, the vacuum pumping device includes a vacuum pump and a vacuum pumping pipeline communicated with the vacuum pump.

[0017] In a preferred embodiment, the pressure and temperature control system includes a pressure control system and a temperature control system.

[0018] In a preferred embodiment, the pressure control system includes a pneumatic pressurizing device.

[0019] In a preferred embodiment, the pneumatic pressurizing device includes an air inlet device for inflating the inside of the manufacturing device.

[0020] In a preferred embodiment, the pressure control system further includes an exhaust device for exhausting air from inside the manufacturing equipment.

[0021] In a preferred embodiment, the pressure control system further includes a barometric pressure monitoring device for monitoring the barometric pressure inside the manufacturing equipment.

[0022] In a preferred embodiment, the pressure control system is configured to adjust the barometric pressure inside the manufacturing equipment based on the PID algorithm according to the barometric pressure inside the manufacturing equipment monitored by the barometric pressure monitoring device and the set barometric pressure.

[0023] In a preferred embodiment, the temperature control system includes a heating device.

[0024] In a preferred embodiment, the heating device includes an electric heating wire or an electric heating rod.

[0025] In a preferred embodiment, the temperature control system further includes a cooling device.

[0026] In a preferred embodiment, the cooling device includes a water cooling and / or air cooling device.

[0027] In a preferred embodiment, the temperature control system further includes a temperature monitoring device for monitoring the temperature inside the manufacturing equipment.

[0028] In a preferred embodiment, the temperature control system is configured to adjust the temperature inside the manufacturing equipment based on the PID algorithm according to the temperature inside the manufacturing equipment monitored by the temperature monitoring device and the set temperature.

[0029] In a preferred embodiment, the pressure control system and the temperature control system independently control the pressure and temperature applied to the evacuated chamber system.

[0030] The beneficial effects of the present application are as follows. The manufacturing equipment proposed in the present application includes both an evacuated chamber system and a pressure and temperature control system. The pressure and temperature control system can apply pressure and temperature loads to the laminated light control product placed inside the evacuated chamber system. Thus, the laminated light control product can not only be evacuated inside the evacuated chamber system, but also be simultaneously applied with the pressure load transmitted through the evacuated chamber system and the conducted temperature load. This supports the simultaneous implementation of evacuation and high-temperature and high-pressure treatment, enabling the residual gas during the high-temperature and high-pressure process to be continuously evacuated by the evacuation process, reducing the amount of gas dissolved into the laminated light control product, and preventing the laminated light control product from re-forming bubbles during subsequent cooling and use. At the same time, evacuating during the application of pressure and temperature loads can also improve the evacuation efficiency and further reduce the amount of residual gas.

[0031] It should be understood that the above general description and the following detailed description of the present application are both exemplary and illustrative and are intended to provide further explanation of the claimed present application. Description of the Drawings

[0032] The drawings are included to provide a further understanding of the present application, are incorporated into and constitute a part of this specification, the drawings illustrate embodiments of the present application and, together with the description, are used to explain the principles of the present application. In the drawings:

[0033] Figure 1 is a structural block diagram of a manufacturing apparatus for a laminated dimming article provided by an embodiment of the present application;

[0034] Figure 2 is a schematic diagram of a specific example of a laminated dimming article;

[0035] Figure 3 is a schematic structural diagram of further details of a manufacturing apparatus for a laminated dimming article provided by an embodiment of the present application;

[0036] Figure 4 shows a schematic structural diagram of further details of a manufacturing apparatus for a laminated dimming article provided by another embodiment of the present application. Detailed Embodiments

[0037] Now, reference will be made in detail to the exemplary embodiments of the present application, examples of which are shown in the drawings. Wherever possible, the same reference numerals will be used throughout the drawings to refer to the same or like parts.

[0038] The shapes, sizes, ratios, angles and quantities disclosed in the drawings used to describe the embodiments of the present application are only examples, and thus, the present application is not limited to the illustrated details. Similar reference numerals always denote similar elements. In the following description, when it is determined that a detailed description of related known functions or structures unnecessarily confuses the gist of the present application, the detailed description will be omitted.

[0039] In the case of using "comprising", "having" and "including" described in this specification, other parts may be added unless "only" is used. Terms in the singular form may include the plural form unless stated to the contrary.

[0040] When interpreting an element, the element is interpreted as including an error range although not explicitly described.

[0041] In the description of the embodiments of the present application, when a structure (e.g., an electrode, a wire, a wiring, a layer or a contact) is described as being formed on an upper part / lower part of another structure or on / under another structure, this description should be understood to include the case where these structures are in contact with each other, and in addition, the case where a third structure is provided therebetween.

[0042] In the process of describing temporal relationships, for example, when the temporal order is described as "after", "subsequently", "next", and "before", discontinuous cases may be included unless "exactly" or "immediately" is used.

[0043] It should be understood that although terms such as "first", "second", etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, without departing from the scope of the present application, a first element may be referred to as a second element, and similarly, a second element may be referred to as a first element.

[0044] The "X-axis direction", "Y-axis direction", and "Z-axis direction" should not be interpreted only by the geometric relationship of being perpendicular to each other, but may have a broader directivity within the range where the elements of the present application can function.

[0045] The term "at least one" should be understood to include any combination and all combinations of one or more of the related listed items. For example, the meaning of "at least one of the first item, the second item, and the third item" represents all combinations of the items proposed from the first item, the second item, and the third item, as well as two or more of the first item, the second item, or the third item.

[0046] The features of the various embodiments of the present application may be partially or wholly connected or combined with each other, and may operate with each other in various ways and be technology-driven, as can be fully understood by those skilled in the art. The embodiments of the present application may be executed independently of each other, or may be executed together in a mutually dependent relationship.

[0047] Hereinafter, exemplary embodiments of the present application will be described in detail with reference to the accompanying drawings.

[0048] Figure 1 A structural block diagram of a manufacturing apparatus for a laminated dimming article provided by the present application is shown. The manufacturing apparatus 10 includes: a vacuum chamber system 11 and a pressure and temperature control system 12. The vacuum chamber system 11 places the laminated dimming article and evacuates the laminated dimming article. The pressure and temperature control system 12 is used to apply pressure to the vacuum chamber system, so as to transfer pressure to the laminated dimming article placed therein through the vacuum chamber system, and is also used to control the temperature of the vacuum chamber system, so as to control the temperature of the laminated dimming article placed inside the vacuum chamber system.

[0049] It can be seen that the manufacturing equipment proposed in this application simultaneously includes a vacuum pumping chamber system and a pressure and temperature control system. The pressure and temperature control system can apply pressure and temperature loads to the laminated dimming product placed in the vacuum pumping chamber system. Thus, the laminated dimming product can not only be subjected to vacuum pumping operations inside the vacuum pumping chamber system, but also be simultaneously applied with the pressure load transmitted through the vacuum pumping chamber system and the conducted temperature load. This supports the simultaneous implementation of vacuum pumping and high-temperature and high-pressure treatment, enabling the residual gas during the high-temperature and high-pressure process to be continuously removed by the vacuum pumping treatment, reducing the amount of it dissolved into the laminated dimming product, and avoiding the re-occurrence of bubbles in the laminated dimming product during subsequent cooling and use. At the same time, performing vacuum pumping during the application of pressure and temperature loads can also improve the pumping efficiency and further reduce the amount of residual gas.

[0050] As Figure 2 shown, as an example, the laminated dimming product 20 may include a first rigid substrate 201, a first adhesive layer 202, a dimming device 203, a second adhesive layer 204, and a second rigid substrate 205 that are stacked. In addition, a frame 206 is provided outside the edge of the dimming device 203.

[0051] The first adhesive layer 202, the second adhesive layer 204, and / or the frame 206 may be hot melt adhesives. The hot melt adhesives may include thermoplastic materials or thermosetting materials. Among them, the thermoplastic materials may include PVB (Polyvinyl Butyral) or SGP (Sentry Glas Plus). The thermosetting materials may include: EVA (Ethylene Vinyl Acetate) or POE (Polyolefin Elastomer). Among them, the narrow sense of POE is made of ethylene-α-olefin copolymer catalyzed by metallocene. The laminated dimming product in this embodiment can be a laminated glass product in practice. Correspondingly, the first rigid substrate 201 and the second rigid substrate 205 may be glass substrates. At least one of the first rigid substrate 201 and the second rigid substrate 205 may be planar or curved. The curved surface may be a single curved surface or a double curved surface. In this embodiment, the entire laminated dimming product is taken as an example of a planar shape for illustration.

[0052] The dimming device 203 can modulate the intensity, color, phase, polarization, and / or direction of incident light. Therefore, as an example, the dimming device 203 may be a component capable of adjusting the light transmittance, or a component capable of adjusting its own haze, or a component capable of adjusting both the light transmittance and its own haze.

[0053] The types of the dimming device 203 may include electrochromic dimming devices, liquid crystal dimming devices, and / or SPD dimming devices.

[0054] Among them, the electrochromic dimming device and the SPD dimming device can adjust the light transmittance, and the liquid crystal dimming device can adjust the light transmittance.

[0055] In addition, there is also a liquid crystal dimming device that can not only adjust the light transmittance but also adjust the haze. For example, a liquid crystal dimming device in Chinese Patent Application No. 202111232990.8 applied by the applicant in 2021 will not be elaborated here.

[0056] Since the size of the dimming device 203 is smaller than the sizes of the first rigid substrate 201 and the second rigid substrate 202, and a frame body 206 is provided on the outer periphery of the dimming device 203, the area of the entire laminated dimming product 20 can be divided into a dimming device area A1 and an outer frame area A2. The dimming device area A1 corresponds to the planar area occupied by the dimming device 203 in the entire laminated dimming product 20, and the outer frame area A2 corresponds to the planar area occupied by the frame body 206 in the entire laminated dimming product 20.

[0057] Figure 3 The figure shows a further detailed schematic diagram of the manufacturing equipment provided in this application. In this example, the vacuum pumping cavity system 11 includes a containing cavity 110 and a vacuum pumping device 111 communicated therewith. The vacuum pumping device 111 is used to pump the inside of the containing cavity 110 into a vacuum. The containing cavity 110 is used to place the laminated dimming product. The outer wall of the containing cavity 110 can be made of a flexible material, so that the shape of the containing cavity 110 can be deformed. During the process of the vacuum pumping device 111 pumping the containing cavity 110 into a vacuum, a pressure difference is formed inside and outside the containing cavity 110, causing the outer wall of the containing cavity 110 to contract and deform inward, relatively tightly wrapping the laminated dimming product placed inside the containing cavity 110, so that the pressure and temperature control system can more easily transfer and conduct the pressure and temperature loads from the outside through the outer wall of the containing cavity 110 to the laminated dimming product inside.

[0058] In Figure 3 In the shown example, the pressure and temperature control system includes a pressure control system 121 and a temperature control system 122. The pressure control system 121 is used to apply pressure to the vacuum pumping cavity system 11, so as to transfer the pressure to the laminated dimming product placed therein through the vacuum pumping cavity system 11. The temperature control system 122 is used to control the temperature of the vacuum pumping cavity system 111, so as to control the temperature of the laminated dimming product placed inside the vacuum pumping cavity system 11.

[0059] The pressure control system 121 and the temperature control system 122 can work jointly and coordinately, or independently. Therefore, the pressure and temperature applied by the pressure and temperature control system to the evacuated chamber system 11 can be controlled independently. This makes the lamination process of the laminated dimming product flexible and adjustable. According to the changes of the laminated dimming product during the lamination process, the curves of the applied pressure and temperature can be adjusted. For example, between the cycles of two control time periods, the pressure can be kept constant while the temperature is increased or decreased; or the temperature can be kept constant while the pressure is increased or decreased.

[0060] Figure 4 FIG. shows a schematic diagram of another specific embodiment of the manufacturing equipment for the laminated dimming product provided by the present application. In this embodiment, the manufacturing equipment can be designed to have a structure similar to an autoclave, but this embodiment is not limited thereto.

[0061] As Figure 4 shown, the manufacturing equipment includes a housing 101. A cavity is formed inside the housing 101 for arranging the evacuated chamber system and the pressure and temperature control system.

[0062] The evacuated chamber system includes a flexible bag 1101, a vacuum pump 1111, and a vacuum pipeline 1113 connecting the flexible bag 1101 and the vacuum pump 1111. Here, the flexible bag 1101 serves as a containing cavity for placing the laminated dimming product 20; while the vacuum pump 1111 and the vacuum pipeline 1113 serve as a vacuuming device. The vacuum pump 1111 evacuates the gas inside the flexible bag 1101 through the vacuum pipeline 1113, thereby realizing the vacuuming operation. Of course, those skilled in the art should understand that the so-called vacuuming here means evacuating the gas inside the flexible bag 1101 to below a certain threshold, and is not limited to evacuating to a strict "vacuum" level. The vacuum pump 1111 can be arranged outside the cavity formed by the housing 101 of the manufacturing equipment, so as to facilitate operation and control.

[0063] In a preferred manner, a pressure regulating valve can be arranged in the passage between the vacuum pump 1111 and the flexible bag 1101. The pressure regulating valve can adjust the vacuum degree inside the flexible bag 1101 during the vacuuming process. The pressure regulating valve can be arranged at one end close to the flexible bag 1101, or at one end close to the vacuum pump 1111, or at a certain position in the vacuum pipeline 1113. In Figure 4 particular, the pressure regulating valve 1112 is arranged at one end close to the vacuum pump 1111, for example, at the inlet end of the vacuum pump 1111. The advantage of such an arrangement is that the pressure regulating valve 1111 is arranged outside the cavity formed by the housing 101 of the manufacturing equipment, so as to facilitate operation. And it is not arranged in the vacuum pipeline 1113, which can avoid damaging the sealing performance of the vacuum pipeline 1113.

[0064] In addition, for the requirements of installation convenience and sealing, a high-pressure valve 1114 is provided on the housing 101 of the manufacturing equipment, thereby dividing the vacuum pumping pipeline 1113 into two sections. One section of the vacuum pumping pipeline 1113 is connected to the high-pressure valve 1114 and the vacuum pump 1111, and the other section is connected to the high-pressure valve 1114 and the flexible bag 1101. An air extraction interface 1101a can be provided at the position where the vacuum pumping pipeline 1113 is connected to the flexible bag 1101. The air extraction interface 1101a can protect the outlet edge of the flexible bag 1101 at this position from being damaged.

[0065] In Figure 4 the illustrated example, the pressure control system in the pressure and temperature control system includes a pneumatic pressurizing device. The pneumatic pressurizing device may include an air intake device for inflating the interior of the manufacturing equipment. On this basis, in order to increase the freedom of pressure control, the pressure control system may further include an exhaust device for exhausting air from the interior of the manufacturing equipment. Generally speaking, Figure 4 the pressure control system in Figure 4 adopts a pneumatic control method. Specifically, referring to Figure 4 , in a specific implementation manner, the air intake device includes a secondary pressurizing device 1211. The secondary pressurizing device 1211 sucks the compressed air 1211a into it, performs secondary pressurization, and then pumps the pressurized compressed air into the cavity surrounded by the housing 101 of the manufacturing equipment through the air intake pipeline 1211b to increase the pressure inside the manufacturing equipment. The exhaust device may include an air outlet valve 1212 installed on the housing 101 of the manufacturing equipment. When the pressure inside the manufacturing equipment exceeds the set value, the air outlet valve 1212 can be opened to release the gas inside the manufacturing device to reduce the pressure.

[0066] It should be noted that inside the manufacturing equipment (i.e., the cavity surrounded by the housing 101), the lamination dimming device is placed inside the flexible bag 1101. The flexible bag 1101 is connected to the vacuum pump 1111, so that there is almost no or very little air flow exchange inside and outside the flexible bag 1101. Therefore, although the cavity surrounded by the housing 101 of the manufacturing equipment is maintained at a high pressure by compressed air, these airs hardly or rarely enter the inside of the flexible bag 1101, and thus will not affect the vacuum pumping operation effect carried out inside the flexible bag 1101.

[0067] In a preferred embodiment, in order to achieve precise control of the pressure value inside the manufacturing equipment, a gas pressure monitoring device can be provided inside the manufacturing equipment or on its housing 101 for monitoring the air pressure inside the manufacturing equipment, specifically a pressure sensor 1213. The control unit (not shown in the figure) can read the actual pressure value inside the manufacturing equipment obtained by the pressure sensor 1213, and based on the deviation between the set pressure value and the actual pressure value, control the intake device and the exhaust device to perform corresponding pressurization and depressurization processes, so that the actual pressure value inside the manufacturing equipment approaches or equals the set pressure value. The control unit can generate corresponding control logic based on the PID (Proportion Integration Differentiation) algorithm based on the deviation between the set pressure value and the actual pressure value, and control the intake device and the exhaust device to perform corresponding pressurization and depressurization processes.

[0068] The temperature control system in the pressure and temperature control system includes a heating device. In this example, the heating device is specifically an electric heating device, and the electric heating device can specifically be an electric heating wire or an electric heating rod (not shown in the figure). The electric heating device can be provided on the inner wall of the housing 101 of the manufacturing equipment or inside the manufacturing equipment. To increase the temperature control efficiency, the temperature control system can further include a cooling device. The cooling device can specifically be a water cooling device and / or an air cooling device. For example Figure 4 a cooling water pipe 1222 is wrapped around the outside of the housing 101 of the manufacturing equipment as the water cooling device. The heating device and the cooling device achieve the temperature regulation inside the manufacturing equipment. Since heat can be conducted between the inner and outer surfaces of the flexible bag 1101 inside the manufacturing equipment, the temperature regulation inside the manufacturing equipment can indirectly regulate the temperature of the laminated light control product 20 placed inside the flexible bag 1101.

[0069] In a preferred embodiment, in order to achieve precise control of the temperature value inside the manufacturing equipment, a temperature monitoring device can be provided inside the manufacturing equipment or on the inner wall of its housing 101 for monitoring the temperature inside the manufacturing equipment. The temperature monitoring device can specifically be a temperature sensor 1221. The control unit (not shown in the figure) can read the actual temperature value inside the manufacturing equipment obtained by the temperature sensor 1221, and based on the deviation between the set temperature value and the actual temperature value, control the heating device and the cooling device to perform corresponding heating and cooling processes, so that the actual temperature value inside the manufacturing equipment approaches or equals the set temperature value. The control unit can generate corresponding control logic based on the PID (Proportion Integration Differentiation) algorithm based on the deviation between the set temperature value and the actual temperature value, and control the heating device and the cooling device to perform corresponding heating and cooling processes.

[0070] The preferred embodiments of the present application have been described in detail above in conjunction with the accompanying drawings. However, the present application is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present application, various simple modifications can be made to the technical solutions of the present application, and these simple modifications all fall within the protection scope of the present application. In addition, any combination can be made among various different embodiments of the present application as long as it does not violate the idea of the present application, and it should also be regarded as the content disclosed by the present application.

Claims

1. A manufacturing device for laminated dimming products, comprising: A vacuum pumping cavity system, in which the laminated dimming product is placed and the laminated dimming product is vacuum pumped. A pressure and temperature control system, which is used to apply pressure to the vacuum pumping cavity system, so as to transfer pressure to the laminated dimming product placed therein through the vacuum pumping cavity system; and is also used to control the temperature of the vacuum pumping cavity system, so as to control the temperature of the laminated dimming product placed inside the vacuum pumping cavity system.

2. The manufacturing apparatus according to claim 1, wherein, The vacuum pumping cavity system includes a containing cavity and a vacuum pumping device communicated with it, and the vacuum pumping device is used to vacuum pump the inside of the containing cavity.

3. The manufacturing device according to claim 2, characterized in that, The outer wall of the containing cavity is made of flexible material.

4. The manufacturing apparatus according to claim 3, wherein The containing cavity is formed by a flexible bag body.

5. The manufacturing apparatus according to claim 2, wherein, The vacuum pumping device includes a vacuum pump and a vacuum pumping pipeline connected to the vacuum pump.

6. The manufacturing apparatus according to claim 1, wherein The pressure and temperature control system includes a pressure control system and a temperature control system.

7. The manufacturing apparatus according to claim 6, wherein, The pressure control system includes a pneumatic pressurizing device.

8. The manufacturing apparatus according to claim 7, wherein, The pneumatic pressurizing device includes an air inlet device for inflating the inside of the manufacturing device.

9. The manufacturing apparatus according to claim 8, wherein The pressure control system further includes an exhaust device for exhausting air from the inside of the manufacturing device.

10. The manufacturing apparatus according to claim 8, wherein The pressure control system further includes a pressure monitoring device for monitoring the air pressure inside the manufacturing device.

11. The manufacturing apparatus according to claim 10, wherein, The pressure control system is used to adjust the air pressure inside the manufacturing device based on the PID algorithm according to the air pressure inside the manufacturing device monitored by the pressure monitoring device and the set air pressure.

12. The manufacturing apparatus according to claim 6, wherein The temperature control system includes a heating device.

13. The manufacturing apparatus according to claim 12, wherein The heating device includes an electric heating wire or an electric heating rod.

14. The manufacturing apparatus according to claim 12, characterized in that, The temperature control system further includes a cooling device.

15. The manufacturing apparatus according to claim 14, wherein, The cooling device includes a water cooling and / or air cooling device.

16. The manufacturing device according to claim 12, wherein, The temperature control system further includes a temperature monitoring device for monitoring the temperature inside the manufacturing device.

17. The manufacturing apparatus according to claim 16, wherein, The temperature control system is used to adjust the temperature inside the manufacturing device based on the PID algorithm according to the temperature inside the manufacturing device monitored by the temperature monitoring device and the set temperature.

18. The manufacturing device according to claim 6, wherein, The pressure control system and the temperature control system independently control the pressure and temperature applied to the vacuum pumping cavity system respectively.

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