Annealing furnace

Abstract

The invention relates to an annealing furnace for heat treating tantalum wire, comprising: a furnace body, having a cylindrical reaction chamber, the reaction chamber being evenly divided into three parts along an axial direction, and a group of gas supply ports being opened in the furnace body corresponding to each part; two furnace tubes, respectively connected with the upper and lower ends of the furnace body, a plurality of wire passing tubes being fixed in the two furnace tubes, and the wire passing tubes of the two furnace tubes corresponding one to one along the axial direction; a furnace core, arranged inside the reaction chamber, a tantalum sheet heating element being arranged inside the furnace core, and wire passing holes corresponding one to one to the wire passing tubes being opened through the furnace core from top to bottom; a gas supply assembly, connected with the gas supply ports of the furnace body, and used for filling the reaction chamber with protective gas; the cylindrical reaction chamber can effectively eliminate airflow dead corners and avoid oxygen accumulation in corners; and gas supply ports are independently arranged in the three parts of the reaction chamber along the axial direction, so that protective gas can be injected from different heights of the reaction chamber, thereby improving the uniformity of protective gas distribution and improving gas replacement efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field related to tantalum wire processing, and in particular to an annealing furnace. Background Art

[0002] Tantalum (Ta), a strategic rare metal, is widely used in high-end capacitors, semiconductor sputtering targets, and implantable medical devices due to its high melting point (3017°C), excellent corrosion resistance, and biocompatibility. Tantalum wire, with its unique physical and chemical properties, plays an irreplaceable role in electronics, aerospace, medical devices, and other fields.

[0003] Due to the high melting point of tantalum, the heating temperature requirement during the heat treatment of tantalum wire is relatively high. Traditional graphite heating elements are prone to volatilization when heated to the temperature required for tantalum wire heat treatment, which affects the heat treatment effect. Therefore, tantalum wire annealing furnaces mostly use tantalum sheet heating elements.

[0004] However, the easily oxidizable nature of tantalum means that any residual oxygen in the annealing furnace will cause the tantalum to oxidize, which will, on the one hand, affect the heat treatment effect of the tantalum wire, and on the other hand, will also cause oxidation damage to the tantalum sheet heating element. Summary of the Invention

[0005] Based on this, it is necessary to provide an annealing furnace that can effectively reduce the possibility of oxidation of tantalum wire and tantalum sheet heating elements in the current tantalum wire annealing furnace.

[0006] The present application provides an annealing furnace for heat treating tantalum wire, comprising:

[0007] The furnace body has a cylindrical reaction chamber, the reaction chamber is divided into three parts along the axis direction, and the furnace body corresponding to each part is provided with a group of gas supply ports;

[0008] Furnace tubes, wherein the two furnace tubes are respectively connected to the upper and lower ends of the furnace body, and a plurality of wire tubes are fixed in the two furnace tubes, and the wire tubes of the two furnace tubes correspond to each other along the axial direction;

[0009] A furnace core is provided inside the reaction chamber, wherein a tantalum heating element is provided inside the furnace core and wire holes corresponding to the wire tubes are opened from top to bottom of the furnace core;

[0010] The gas supply assembly is connected to each of the gas supply ports of the furnace body and is used to fill the reaction chamber with protective gas.

[0011] In one embodiment, each group of the air supply ports includes at least two air supply ports, and the air supply ports in each group of the air supply ports are evenly distributed along the circumference of the furnace body; the three groups of the air supply ports are respectively the first air supply port, the second air supply port and the third air supply port from top to bottom.

[0012] In one embodiment, the furnace body includes a furnace body main body and a furnace door hinged to the furnace body main body, and the furnace door and the furnace body main body are both provided with at least one second air supply port.

[0013] In one embodiment, the electrode connector of the tantalum heating element is located between the furnace and the top wall of the reaction chamber.

[0014] In one embodiment, the first gas supply port is communicated with the inner wall of the reaction chamber and is located close to the top wall of the reaction chamber.

[0015] In one embodiment, the third gas supply port is communicated with the inner bottom wall of the reaction chamber, and a vertical projection of the third gas supply port is located inside the furnace.

[0016] In one embodiment, the annealing furnace further includes an air curtain flange, the furnace tube is connected to the furnace body through the air curtain flange, a tantalum wire through hole and a gas through cavity are provided in the air curtain flange, the tantalum wire through hole is connected to the furnace tube and the reaction chamber, the gas through cavity is arranged around the tantalum wire through hole, the gas through cavity is connected to the gas supply assembly outwardly through the air curtain air inlet hole, and is connected to the tantalum wire through hole inwardly through the air curtain air outlet hole.

[0017] In one embodiment, the projections of the air curtain air inlet and the air curtain air outlet along the horizontal direction do not intersect.

[0018] In one embodiment, each of the air curtain flanges is provided with at least two rows of air curtain outlet holes along the axial direction, each row of the air curtain outlet holes is evenly distributed along the circumferential direction, and two adjacent rows of the air curtain outlet holes are staggered.

[0019] In one embodiment, the air curtain outlet hole is opened along the radial direction of the tantalum wire through hole, or is opened close to one end of the tantalum wire through hole and inclined away from the furnace.

[0020] The above-mentioned annealing furnace, by adopting a cylindrical reaction chamber, can effectively eliminate airflow dead corners. The corners and right-angled areas of the traditional rectangular furnace chamber are prone to forming air stagnation areas, while the smooth curved surface of the cylindrical structure makes the protective gas flow more evenly distributed, avoiding the accumulation of oxygen in the corners.

[0021] In addition, gas supply ports are independently set at three parts of the reaction chamber along the axial direction, which can inject protective gas from different heights of the reaction chamber, improve the uniformity of protective gas distribution, and can adjust the gas flow in each area according to process requirements to improve gas replacement efficiency;

[0022] Furthermore, the two sets of air supply ports at the top and bottom can also form a gas barrier, thereby preventing the air in the upper furnace tube from sinking and blocking the air in the lower furnace tube from flowing back, thereby inhibiting the air from invading the furnace body from the upper and lower furnace tubes. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A perspective view of the annealing furnace of this application;

[0024] Figure 2 for Figure 1 Enlarged view of point A in the middle;

[0025] Figure 3 This is a three-dimensional diagram of the annealing furnace of this application after the furnace door is closed;

[0026] Figure 4 for Figure 3 A three-dimensional image from another angle;

[0027] Figure 5 for Figure 1 A cross-sectional view of the furnace body;

[0028] Figure 6 for Figure 5 Enlarged view of point B in the middle;

[0029] Figure 7 This is a schematic diagram of the flow simulation of the protective gas in the annealing furnace of this application;

[0030] Figure 8 Schematic diagram of fluid simulation in the furnace under different gas supply port arrangements;

[0031] Figure 9 Schematic diagram of fluid simulation in the furnace under different gas supply port arrangements;

[0032] Figure 10 Schematic diagram of fluid simulation in the furnace under different gas supply port arrangements;

[0033] Figure 11 Schematic diagram of fluid simulation in the furnace under different gas supply port arrangements;

[0034] Figure 12 Schematic diagram of fluid simulation in the furnace under different air supply port arrangements.

[0035] Figure numerals: 10, furnace body; 10a, furnace body main body; 10b, furnace door; 11, reaction chamber; 12, gas supply port; 121, first gas supply port; 122, second gas supply port; 123, third gas supply port; 20, furnace tube; 21, wire tube; 30, furnace core; 30a, first furnace core part; 30b, second furnace core part; 31, tantalum sheet heating element; 311, electrode joint; 32, wire hole; 40, air curtain flange; 41, tantalum wire through hole; 42, gas through chamber; 43, air curtain outlet hole; 50, air supply assembly. DETAILED DESCRIPTION

[0036] To make the above-mentioned objects, features, and advantages of the present invention more readily apparent, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings. The following description sets forth numerous specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0037] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0039] In the present invention, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0040] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0041] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0042] It should be noted that the reaction chamber inside the furnace body of a traditional annealing furnace is mostly in the shape of a rectangular block. The edges and corners of the rectangular block are prone to accumulation and residual air is difficult to exhaust, which leads to unwanted oxidation of the tantalum wire and tantalum sheet heating element in the annealing furnace during the heat treatment process, resulting in a decrease in the heat treatment effect of the tantalum wire and the need for frequent replacement of the tantalum sheet heating element, which greatly increases the operating cost of the equipment.

[0043] In this regard, please combine Figure 1 as well as Figure 2 As shown, the present application provides an annealing furnace for heat treating tantalum wire, comprising: a furnace body 10, having a cylindrical reaction chamber 11, the reaction chamber 11 is evenly divided into three parts along the axial direction, and the furnace body 10 corresponding to each part is provided with a group of gas supply ports 12; furnace tubes 20, two furnace tubes 20 are respectively connected to the upper and lower ends of the furnace body 10, and a plurality of wire tubes 21 are fixed in the two furnace tubes 20, and the wire tubes 21 of the two furnace tubes 20 correspond one to one along the axial direction; a furnace core 30 is arranged inside the reaction chamber 11, a tantalum sheet heating element 31 is provided inside the furnace core 30, and wire holes 32 corresponding one to one to the wire tubes 21 are opened through the furnace core 30 from top to bottom; a gas supply component 50, connected to each gas supply port 12 of the furnace body 10, for filling the reaction chamber 11 with protective gas.

[0044] In the present application, the cylindrical reaction chamber 11 can effectively eliminate airflow dead corners. The corners and right-angled areas of the traditional rectangular furnace chamber are prone to form air stagnation areas, while the smooth curved surface of the cylindrical structure makes the protective gas flow more evenly distributed, avoiding oxygen accumulation in the corners, thereby reducing the residual oxygen concentration;

[0045] In addition, gas supply ports 12 are independently provided at three parts of the reaction chamber 11 along the axial direction, so that shielding gas can be injected from different heights of the reaction chamber 11, thereby improving the uniformity of shielding gas distribution and adjusting the gas flow rate of each zone according to process requirements, thereby improving gas replacement efficiency.

[0046] Furthermore, the two groups of air supply ports 12 at the top and bottom can also form a gas barrier, thereby preventing the air in the upper furnace tube 20 from sinking and blocking the air in the lower furnace tube 20 from flowing back, thereby inhibiting the air from invading the furnace body 10 from the upper and lower furnace tubes 20.

[0047] Furthermore, the protective gas is high-purity argon or other commonly used inert gases, as long as it can prevent unnecessary oxidation of the tantalum wire and the tantalum sheet heating element 31.

[0048] Specifically, in some embodiments, at least two positioning plates are fixed within each furnace tube 20, and each wire-passing tube 21 passes through the positioning plates to ensure accurate positioning of the tantalum wire and prevent the tantalum wire from deviating or breaking. More specifically, two positioning plates are fixed above and below each furnace tube 20, and ten wire-passing tubes 21 are fixed at equal intervals along the circumferential direction within each furnace tube 20.

[0049] Please combine Figure 3 as well as Figure 4 As shown, in some embodiments, each group of air supply ports 12 includes at least two air supply ports 12, and the air supply ports 12 of each group of air supply ports 12 are evenly distributed along the circumference of the furnace body 10; the three groups of air supply ports 12 are respectively the first air supply port 121, the second air supply port 122 and the third air supply port 123 from top to bottom.

[0050] It should be understandable that the cylindrical symmetrical structure of the reaction chamber 11 cooperates with the circumferential gas supply of each group of gas supply ports 12 to allow the protective gas to diffuse evenly in the circumferential direction in a laminar manner, forming an annular wrapped airflow. While further improving the uniformity of the protective gas distribution, it can eliminate the horizontal airflow blind spots and avoid the occurrence of oxygen residue in local areas.

[0051] Please combine Figure 1 、 Figure 3 as well as Figure 4 As shown, in some embodiments, the furnace body 10 includes a furnace body 10a and a furnace door 10b hinged to the furnace body 10a, and at least one second air supply port 122 is provided on the furnace door 10b and the furnace body 10a.

[0052] It should be understandable that there is a potential risk of oxygen infiltration at the joint surface between the furnace body 10a and the furnace door 10b. By providing at least one second air supply port 122 on both the furnace door 10b and the furnace body 10a, the annular wrapping airflow formed by the air supply from each second air supply port 122 can cover the joint surface between the furnace body 10a and the furnace door 10b, forming a local positive pressure barrier and actively blocking the infiltration of external oxygen, thereby further reducing the residual oxygen concentration.

[0053] In addition, the second gas supply port 122 is located in the middle of the reaction chamber 11, corresponding to the core heating position of the tantalum sheet heating element 31. The coordinated gas supply through the furnace door 10b and the furnace body 10a can ensure the continuity of the airflow at the core heating position, avoiding the uneven concentration of the protective gas due to the lack of the gas supply port 12 at the furnace door 10b.

[0054] Specifically, the furnace core 30 includes a first furnace core portion 30a fixed to the furnace body 10a and a second furnace core portion 30b fixed to the furnace door 10b.

[0055] Please combine Figure 2 as well as Figure 5 As shown, in some embodiments, the electrode connector 311 of the tantalum heater 31 is located between the furnace 30 and the inner top wall of the reaction chamber 11, and the electrode connector 311 is used to supply power to the tantalum heater 31. It should be understood that a space for accommodating the electrode connector 311 is reserved between the furnace 30 and the inner top wall of the reaction chamber 11. In other words, the distance between the furnace 30 and the inner top wall of the reaction chamber 11 is greater than the distance between the furnace 30 and the inner bottom wall of the reaction chamber 11.

[0056] Please combine Figure 3 as well as Figure 5 As shown, in some embodiments, the first gas supply port 121 is connected to the inner wall of the reaction chamber 11 and is located near the top wall of the reaction chamber 11. That is, the protective gas is injected into the top area of ​​the reaction chamber 11 at a horizontal incident angle after passing through the first gas supply port 121.

[0057] It should be understood that the protective gases entering the reaction chamber 11 through the first gas supply ports 121 collide with each other and can diffuse and effectively fill the right-angle area at the top of the reaction chamber 11, reducing the residual amount of oxygen in the right-angle area; in addition, the diffused protective gas can also form an umbrella-shaped air curtain downward under the action of gravity to prevent the air in the upper furnace tube 20 from penetrating from top to bottom.

[0058] Please combine Figure 4 as well as Figure 5 As shown, in some embodiments, the third gas supply port 123 is connected to the inner bottom wall of the reaction chamber 11, and the vertical projection of the third gas supply port 123 is located inside the furnace 30. In other words, the protective gas passes through the third gas supply port 123 and directly enters the furnace 30 at a vertical angle of incidence.

[0059] It should be understandable that a portion of the protective gas passing through each third gas supply port 123 can enter the interior of the furnace 30 through the wire hole 32 and directly irradiate the heat treatment core area of ​​the tantalum heating element 31 to prevent the tantalum sheet from being oxidized; the other part of the protective gas collides and diffuses with the bottom wall of the furnace 30, thereby filling the right-angle area at the bottom of the reaction chamber 11 and reducing the residual amount of oxygen in the right-angle area.

[0060] It is worth mentioning that Figure 7 、 Figure 8 、 Figure 9 、 Figure 10 、 Figure 11 as well as Figure 12 , a schematic diagram of fluid simulation in the furnace body 10 under different arrangements of the air supply port 12 is shown.

[0061] Figure 7 In the corresponding arrangement of the air supply ports 12, a group of air supply ports 12 is respectively provided in three regions along the vertical direction of the furnace body 10. Each group of air supply ports 12 includes two air supply ports 12 evenly distributed circumferentially. The first air supply port 121 and the second air supply port 122 are connected to the inner wall of the reaction chamber 11, and the third air supply port 123 is connected to the inner bottom wall of the reaction chamber 11 and its projection along the vertical direction is located within the furnace 30. Figure 7 This is a schematic diagram of the fluid simulation of the protective gas in the furnace body 10 under this embodiment. Combined with other fluid simulation diagrams, it can be seen that the gas uniformity of the protective gas under this embodiment is the best and the density is the highest, with a density of 998 kg / m³. This arrangement allows the argon gas to be more evenly filled into the cavity to prevent air residue.

[0062] Figure 8 The corresponding arrangement of the air supply port 12 is compared with Figure 7 The corresponding arrangement of the gas supply ports 12 is such that the number of each group of gas supply ports 12 remains unchanged, but the third gas supply port 123 is connected to the inner wall of the reaction chamber 11; Figure 7 as well as Figure 8 It can be seen that, under the arrangement of the gas supply ports 12 , the gas in the furnace body 10 is more uniformly distributed but has a lower density.

[0063] Figure 9 The corresponding arrangement of the air supply port 12 is compared with Figure 7 The corresponding arrangement of the gas supply ports 12 is such that the number of each group of gas supply ports 12 remains unchanged, and the third gas supply port 123 is still connected to the inner bottom wall of the reaction chamber 11 but is located at the outer edge, that is, the projection of the third gas supply port 123 in the vertical direction does not intersect with the furnace 30; Figure 7 as well as Figure 9 It can be seen that under the arrangement of the air supply port 12, air still remains in the gas dead corner.

[0064] Figure 10 The corresponding arrangement of the air supply port 12 is compared with Figure 7 The corresponding arrangement of the air supply ports 12 is such that the number of each group of air supply ports 12 remains unchanged, but the position of the first air supply port 121 is moved down to the middle of the furnace body 10; Figure 7 as well as Figure 10 It can be seen that under the arrangement of the air supply port 12, air still remains in the gas dead corner.

[0065] Figure 11 The corresponding arrangement of the air supply port 12 is compared with Figure 7 The corresponding arrangement of the air supply ports 12 is such that the positions of the air supply ports 12 in each group remain unchanged, but the number of air supply ports 12 in each group is reduced to one; Figure 7 as well as Figure 11 It can be seen that, in the arrangement of the gas supply port 12 , the density of the gas along the periphery of the cavity is uneven and relatively low.

[0066] Figure 12 The corresponding arrangement of the air supply port 12 is compared with Figure 8 The corresponding arrangement of the air supply ports 12 increases the number of air supply ports 12 in each group to three; Figure 7 、 Figure 8 as well as Figure 12 It can be seen that the gas density in the furnace body 10 under the arrangement of the gas supply port 12 is better than Figure 8 But still less than Figure 7 That is to say, when the position of the gas supply port 12 is unreasonable, even if the number of the gas supply ports 12 is increased, the optimal gas density and uniformity cannot be achieved.

[0067] Please combine Figure 5 as well as Figure 6 As shown, in some embodiments, the annealing furnace further includes an air curtain flange 40, and the furnace tube 20 is connected to the furnace body 10 through the air curtain flange 40. A tantalum wire through hole 41 and a gas through cavity 42 are provided in the air curtain flange 40. The tantalum wire through hole 41 connects the furnace tube 20 and the reaction chamber 11, and the gas through cavity 42 is arranged around the tantalum wire through hole 41. The gas through cavity 42 is connected to the gas supply assembly 50 outwardly through the air curtain air inlet hole, and is connected to the tantalum wire through hole 41 inwardly through the air curtain air outlet hole 43.

[0068] The gas supply assembly 50 continuously sprays protective gas into the tantalum wire through-hole 41 through the air curtain air inlet hole, the gas cavity 42 and the air curtain air outlet hole 43 to form an annular high-speed air curtain around the tantalum wire. Similar to the gas barrier formed by the upper and lower groups of air supply ports 12, the air curtain air outlet hole 43 and the air supply port 12 can form a double gas barrier, thereby effectively preventing air from invading the furnace body 10 from the upper and lower furnace tubes 20.

[0069] It should be understandable that, since some oxygen may be attached to the tantalum wire when it enters the furnace body 10 through the upper furnace tube 20, the protective gas sprayed by the air curtain flange 40 located on the upper side can also blow this part of oxygen away from the tantalum wire to prevent it from entering the furnace body 10 and affecting the heat treatment process; in addition, the tantalum wire needs to be cooled quickly after annealing in the furnace 30, and the protective gas sprayed by the air curtain flange 40 located on the lower side can cool the tantalum wire to improve the cooling efficiency of the tantalum wire.

[0070] In some embodiments, the horizontal projections of the air curtain inlet and the air curtain outlet 43 do not intersect, so as to ensure that the protective gas entering the gas cavity 42 through the air flow inlet does not flow out directly through the air curtain outlet 43, but first collides and diffuses with the inner wall of the gas cavity 42, and then flows out along the air curtain outlet 43. In other words, the above-mentioned horizontal projection staggered design can force the airflow to diffuse along a non-straight path in the gas cavity 42, avoiding directly flowing along a straight line from the air curtain inlet to the air curtain outlet 43, forming a local cavity of the air curtain (i.e., a "short-circuit" effect).

[0071] Please refer to Figure 6 In some embodiments, each air curtain flange 40 is provided with at least two air curtain outlet holes 43 along the axial direction, each air curtain outlet hole 43 is evenly distributed along the circumferential direction, and adjacent air curtain outlet holes 43 are staggered.

[0072] The air curtain flange 40 is designed with multiple rows of axially staggered and circumferentially evenly distributed air curtain outlet holes 43. Through multi-level and multi-dimensional airflow superposition and coverage optimization, the air curtain protection performance at the tantalum wire through-hole 41 is significantly enhanced. Specifically, multiple rows of air curtain outlet holes 43 are spaced apart along the axial direction, forming multiple independent air curtains in front and behind, improving the interception effect of air through multiple interceptions. More specifically, the air curtain outlet holes 43 in two adjacent rows are staggered at a certain angle in the circumferential direction, so that the airflow of axially adjacent air curtain outlet holes 43 forms a staggered coverage in space, so that the air curtain in any axial section is covered by at least one row of air curtain outlet holes 43, preventing air from penetrating the air curtain in a straight line direction.

[0073] Please refer to Figure 6 In some embodiments, the air curtain outlet holes 43 are opened along the radial direction of the tantalum wire through hole 41 , that is, the air curtain formed by the protective gas is perpendicular to the traveling direction of the tantalum wire.

[0074] In some embodiments, the air curtain outlet hole 43 is opened at an angle close to one end of the tantalum wire through hole 41 away from the furnace 30, that is, the outlet direction of the protective gas is inclined outward, so that the protective gas has an outward discharge tendency, which can spray out the oxygen carried by the tantalum wire, further reducing the possibility of oxygen entering the furnace body 10.

[0075] In some embodiments, an annular water-cooling cavity is provided in both furnace tubes 20 for cooling water circulation to ensure that the tantalum wire can be cooled quickly after annealing; further, the water inlet of the water-cooling cavity is located at the lower side and the water outlet is located at the upper side to ensure that the cooling water can fill the furnace tube 20.

[0076] In some embodiments, the furnace body 10 is a double-layer structure, with the inner layer made of high-temperature resistant alloy and the outer layer made of stainless steel. The interlayer between the inner and outer layers is a water-cooling cavity to prevent the furnace body 10 from deforming at high temperatures.

[0077] Preferably, the inner wall of the reaction chamber 11 is polished to improve the smoothness of the inner wall, reduce gas adsorption, and reduce impurity contamination.

[0078] In some embodiments, the furnace body 10 is also provided with a tungsten-rhenium thermocouple that penetrates the furnace body 10 and the furnace core 30 to the inside of the tantalum sheet heating element 31 for measuring the heat treatment temperature of the tantalum wire; the furnace body 10 is also provided with at least three oxygen analyzer structures for real-time monitoring of the oxygen content inside the reaction chamber 11.

[0079] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0080] The above-described embodiments merely illustrate several implementations of the present invention, and while their descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the patent for this invention shall be determined by the appended claims.

Claims

1. An annealing furnace for heat treating tantalum wire, characterized in that: include: The furnace body (10) has a cylindrical reaction chamber (11), wherein the reaction chamber (11) is divided into three parts along the axial direction, and each part of the furnace body (10) is provided with a group of air supply ports (12); Furnace tubes (20), wherein the two furnace tubes (20) are respectively connected to the upper and lower ends of the furnace body (10), and a plurality of wire tubes (21) are fixed in the two furnace tubes (20), and the wire tubes (21) of the two furnace tubes (20) correspond to each other along the axial direction; A furnace core (30) is arranged inside the reaction chamber (11), a tantalum sheet heating element (31) is arranged inside the furnace core (30), and wire holes (32) are opened through the furnace core (30) from top to bottom and correspond to the wire tubes (21); a gas supply assembly (50) in communication with each of the gas supply ports (12) of the furnace body (10) and configured to charge protective gas into the interior of the reaction chamber (11); The three groups of air supply ports (12) are respectively a first air supply port (121), a second air supply port (122) and a third air supply port (123) from top to bottom; The third gas supply port (123) is in communication with the inner bottom wall of the reaction chamber (11), and a projection of the third gas supply port (123) in the vertical direction is located within the furnace (30).

2. The annealing furnace according to claim 1, characterized in that Each group of the air supply ports (12) comprises at least two air supply ports (12), and the air supply ports (12) of each group of the air supply ports (12) are evenly distributed along the circumference of the furnace body (10).

3. The annealing furnace according to claim 2, characterized in that The furnace body (10) comprises a furnace body main body (10a) and a furnace door (10b) hinged to the furnace body main body (10a), and at least one second air supply port (122) is provided on both the furnace door (10b) and the furnace body main body (10a).

4. The annealing furnace according to claim 2, characterized in that The electrode connector (311) of the tantalum sheet heating element (31) is located between the furnace (30) and the inner top wall of the reaction chamber (11).

5. The annealing furnace according to claim 4, characterized in that The first gas supply port (121) is in communication with the inner side wall of the reaction chamber (11) and is located close to the inner top wall of the reaction chamber (11).

6. The annealing furnace according to claim 1, characterized in that The annealing furnace further includes an air curtain flange (40), the furnace tube (20) is connected to the furnace body (10) through the air curtain flange (40), a tantalum wire through hole (41) and a gas through cavity (42) are provided in the air curtain flange (40), the tantalum wire through hole (41) is connected to the furnace tube (20) and the reaction chamber (11), the gas through cavity (42) is arranged around the tantalum wire through hole (41), the gas through cavity (42) is connected to the gas supply component (50) outwardly through the air curtain air inlet hole, and is connected to the tantalum wire through hole (41) inwardly through the air curtain air outlet hole (43).

7. The annealing furnace according to claim 6, characterized in that The projections of the air curtain air inlet and the air curtain air outlet (43) along the horizontal direction do not intersect.

8. The annealing furnace according to claim 6, characterized in that Each of the air curtain flanges (40) is provided with at least two rows of air curtain outlet holes (43) along the axial direction, each row of the air curtain outlet holes (43) is evenly distributed along the circumferential direction, and two adjacent rows of the air curtain outlet holes (43) are staggered.

9. The annealing furnace according to claim 6, characterized in that The air curtain outlet hole (43) is opened along the radial direction of the tantalum wire through hole (41), or is opened close to one end of the tantalum wire through hole (41) and tilted toward a side away from the furnace (30).

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