Air floatation cushion and air floatation guide rail

Abstract

The embodiment of the invention provides an air floating cushion and an air floating guide rail, the air floating cushion comprises an air floating plate, a throttler and a cover plate, the air floating plate is provided with a mounting hole, and the mounting hole is used for mounting the throttler; a plurality of microgrooves and air supply grooves are formed in the periphery of the throttler, one ends of the microgrooves communicate with the air supply grooves, and the other ends of the microgrooves extend to the bottom face of the throttler; the microgroove and the wall of the mounting hole form a throttling hole; and the cover plate is a mounting base body of the air floating plate and the throttler. According to the air floating cushion, the mounting hole is formed in the air floating plate to mount the throttler, the microgroove is formed in the throttler, and the throttling hole is defined by the microgroove and the wall of the mounting hole, so that the problem that the throttling hole with relatively long length and relatively small diameter is difficult to machine can be solved, a long micropore can be realized, and the bearing capacity and rigidity of the air floating cushion can be improved.

Description

Technical Field

[0001] This application belongs to the field of air floating pads, and specifically relates to an air floating pad and an air floating guide rail. Background Technique

[0002] Gas lubrication technology is an advanced technology applicable to ultra-high-speed or ultra-high-precision equipment, and hydrostatic air floating pads and air floating guide rails are important components for achieving high precision. The hydrostatic air floating pad and air floating guide rail introduce high-pressure gas introduced from the outside into the air floating working surface through a throttling structure to achieve the purpose of load bearing. The forms of its throttling structure mainly include orifice throttling, annular throttling, slit throttling, porous throttling, etc. With the increasingly wide application and continuous development of hydrostatic air floating technology, higher and higher requirements are put forward for the performance of hydrostatic air floating.

[0003] In recent years, a bearing structure with micro-orifice throttling has emerged. Generally, the orifice diameter of orifice throttling is above 0.1 mm, and the orifice diameter of micro-orifice throttling is 0.1 mm and below. Compared with orifice throttling, the number of throttling orifices of the micro-orifice throttling type bearing increases, and it has higher bearing capacity and stiffness in terms of performance, and greatly weakens the water hammer effect existing in traditional hydrostatic air floating pads and air floating guide rails, enhancing stability. However, with the trend of continuous reduction of the orifice diameter, it poses a great challenge to the micro-hole processing technology. Usually, the drilling process is limited by the drill bit diameter and effective length. The performance of a slender drill bit is poor and it is extremely easy to break, making it difficult to process such micro-holes. Summary of the Invention

[0004] The embodiments of this application provide an air floating pad and an air floating guide rail. The air floating pad installs a throttle through an installation hole provided on an air floating plate. Micro-grooves are opened on the throttle, and the micro-grooves and the installation hole wall enclose a throttling orifice, which can solve the problem of difficult processing of throttling orifices with longer length and smaller diameter, enabling long micro-holes to be realized, and being beneficial to improving the bearing capacity and stiffness of the air floating pad.

[0005] In a first aspect, the embodiments of this application provide an air floating pad, and the air floating pad includes:

[0006] An air floating plate, on which an installation hole is opened, and the installation hole is used to install a throttle;

[0007] The throttle, on the outer periphery of the throttle, a plurality of micro-grooves and air supply grooves are opened. One end of the micro-groove communicates with the air supply groove, and the other end of the micro-groove extends to the bottom surface of the throttle; the micro-groove and the installation hole wall form a throttling orifice;

[0008] A cover plate, which is an installation base for the air floating plate and the throttle.

[0009] In a possible example, there is one air supply groove, and the air supply groove is an annular groove along the circumferential direction, and the air supply groove communicates with each of the micro-grooves; or,

[0010] There are multiple air supply grooves, and the air supply grooves are straight grooves along the generatrix direction, and each air supply groove communicates with one micro-groove.

[0011] In a possible example, a central blind hole and radial holes are formed in the throttler;

[0012] The central blind hole communicates with the annular groove through the radial holes.

[0013] In a possible example, the throttler is cylindrical, and the throttler is in interference fit with the mounting hole; or,

[0014] The throttler is conical and table-shaped, and the throttler is in conical surface fit with the mounting hole and is pressed by the cover plate.

[0015] In a possible example, there is one mounting hole, and the mounting hole is arranged at the central position of the air bearing plate;

[0016] There are multiple mounting holes, and the multiple mounting holes are evenly distributed in a circle or in a linear array on the air bearing plate.

[0017] In a possible example, the micro-groove is a straight groove extending along the generatrix direction or a spiral groove extending along the spiral direction, and the cross-sectional shape of the micro-groove is rectangular, triangular or semi-circular.

[0018] In a possible example, the cross-sectional dimension of the air supply groove is larger than the cross-sectional dimension of the micro-groove.

[0019] In a possible example, an air supply channel is provided on the cover plate, the air supply channel is a shallow groove, an axial blind hole and a radial hole communicating with the axial blind hole are formed in the shallow groove, and the radial hole is connected to an external air supply device.

[0020] In a possible example, the number of the throttlers is multiple, an annular groove is formed on the air bearing plate, the annular groove is used for installing a sealing ring, and the annular groove surrounds the air supply groove of each throttler to form a sealed air path.

[0021] In a second aspect, an embodiment of the present application provides an air bearing guide rail, and the air bearing guide rail includes the aforementioned air bearing plate and throttler, and the shape of the air bearing guide rail is T-shaped, dovetail-shaped or closed.

[0022] It can be seen that in the embodiment of the present application, the air floating pad installs the throttle through the installation holes provided on the air floating plate. Micro-grooves are opened on the throttle, and the micro-grooves and the installation hole wall enclose a throttle hole, which can solve the problem of difficult machining of throttle holes with long lengths and small diameters, enabling long micro-holes to be realized, and is beneficial to improving the bearing capacity and stiffness of the air floating pad. Description of the Drawings

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0024] Figure 1 is an exploded view of an air floating pad provided by an embodiment of the present application;

[0025] Figure 2 is a solid schematic diagram of an air floating pad provided by an embodiment of the present application;

[0026] Figure 3 is a cross-sectional schematic diagram of an air floating pad provided by an embodiment of the present application;

[0027] Figure 4 is a cross-sectional schematic diagram of another air floating pad provided by an embodiment of the present application;

[0028] Figure 5 is a solid schematic diagram of a throttle provided by an embodiment of the present application;

[0029] Figure 6 is a solid schematic diagram of another throttle provided by an embodiment of the present application;

[0030] Figure 7 is a cross-sectional schematic diagram of a micro-groove provided by an embodiment of the present application;

[0031] Figure 8 is a cross-sectional schematic diagram of another micro-groove provided by an embodiment of the present application;

[0032] Figure 9 is a cross-sectional schematic diagram of yet another micro-groove provided by an embodiment of the present application;

[0033] Figure 10 is a schematic diagram of the central blind hole and radial hole of a throttle provided by an embodiment of the present application;

[0034] Figure 11 is a schematic diagram of the central blind hole and radial hole of another throttle provided by an embodiment of the present application;

[0035] Figure 12It is a schematic cross-sectional view of an air bearing pad with a cylindrical restrictor provided by an embodiment of the present application;

[0036] Figure 13 It is a schematic diagram of an entity of a cylindrical restrictor provided by an embodiment of the present application;

[0037] Figure 14 It is a schematic cross-sectional view of an air bearing pad with a conical restrictor provided by an embodiment of the present application;

[0038] Figure 15 It is a schematic diagram of an entity of a conical restrictor provided by an embodiment of the present application;

[0039] Figure 16 It is a schematic diagram of a T-shaped air bearing guide provided by an embodiment of the present application;

[0040] Figure 17 It is a schematic diagram of another T-shaped air bearing guide provided by an embodiment of the present application;

[0041] Figure 18 It is a schematic diagram of a dovetail-shaped air bearing guide provided by an embodiment of the present application;

[0042] Figure 19 It is a schematic diagram of a closed-type air bearing guide provided by an embodiment of the present application.

[0043] The following is an explanation of the reference numerals in the specification drawings:

[0044] Air bearing pad 1, cover plate 10, air bearing plate 20, restrictor 30, air supply channel 40, air supply groove 31, micro-groove 32, central blind hole 33, radial hole 34, mounting hole 21, air bearing guide 2. Detailed implementation manners

[0045] In order to enable those skilled in the art to better understand the solution of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0046] In the description and claims of this application and the above-mentioned drawings, terms such as "first" and "second" are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally further include steps or units not listed, or may optionally further include other steps or units inherent to these processes, methods, products or devices.

[0047] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in connection with the embodiments can be included in at least one embodiment of this application. The phrase appearing in various positions in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0048] The "and / or" in the embodiments of this application describes the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent the following three situations: A exists alone; both A and B exist simultaneously; B exists alone. Among them, A and B can be singular or plural.

[0049] In the embodiments of this application, the symbol " / " can indicate that the objects before and after are in an "or" relationship. Additionally, the symbol " / " can also represent a division sign, that is, perform a division operation. For example, A / B can represent A divided by B.

[0050] The "at least one (item)" or its similar expression in the embodiments of this application refers to any combination of these items, including any combination of a single item or multiple items, and refers to one or more, where multiple refers to two or more. For example, at least one (item) of a, b, or c can represent the following seven situations: a, b, c, a and b, a and c, b and c, a, b, and c. Among them, each of a, b, and c can be an element or a set containing one or more elements.

[0051] The "equal to" in the embodiments of this application can be used in conjunction with "greater than", applicable to the technical solutions adopted when greater than, and can also be used in conjunction with "less than", applicable to the technical solutions adopted when less than. When "equal to" is used in conjunction with "greater than", it is not used in conjunction with "less than"; when "equal to" is used in conjunction with "less than", it is not used in conjunction with "greater than".

[0052] To better understand the solutions of the embodiments of this application, the background that the embodiments of this application may involve will be introduced below.

[0053] The trend of the continuously decreasing diameter of the throttling holes in the bearing structure with micro-orifice throttling poses a great challenge to the micro-hole processing technology. Usually, the drilling process is limited by the diameter and effective length of the drill bit. The performance of the slender drill bit is poor and it is extremely easy to break, making it difficult to process such micro-holes. To solve the problem of micro-hole processing, this application provides an air bearing pad that enables the realization of long micro-holes, which is beneficial to improving the load-bearing capacity and stiffness of the air bearing pad.

[0054] This application provides an air bearing pad 1. Please refer to Figures 1-15 , Figure 1 which is an exploded view of an air bearing pad provided by an embodiment of this application; Figure 2 which is a solid schematic diagram of an air bearing pad provided by an embodiment of this application;

[0055] Figure 3 which is a cross-sectional schematic diagram of an air bearing pad provided by an embodiment of this application; Figure 4 which is a cross-sectional schematic diagram of another air bearing pad provided by an embodiment of this application; Figure 5 which is a solid schematic diagram of a throttle provided by an embodiment of this application; Figure 6 which is a solid schematic diagram of another throttle provided by an embodiment of this application; Figure 7 which is a cross-sectional schematic diagram of a micro-groove provided by an embodiment of this application; Figure 8 which is a cross-sectional schematic diagram of another micro-groove provided by an embodiment of this application; Figure 9 which is a cross-sectional schematic diagram of yet another micro-groove provided by an embodiment of this application; Figure 10 which is a schematic diagram of the central blind hole and radial holes of a throttle provided by an embodiment of this application; Figure 11 which is a schematic diagram of the central blind hole and radial holes of another throttle provided by an embodiment of this application; Figure 12 which is a cross-sectional schematic diagram of an air bearing pad with a cylindrical throttle provided by an embodiment of this application; Figure 13 which is a solid schematic diagram of a cylindrical throttle provided by an embodiment of this application; Figure 14 which is a cross-sectional schematic diagram of an air bearing pad with a conical throttle provided by an embodiment of this application; Figure 15 which is a solid schematic diagram of a conical throttle provided by an embodiment of this application.

[0056] The air bearing pad 1 provided by this application includes: a cover plate 10, an air bearing plate 20, and a throttle 30. An installation hole 21 is formed in the air bearing plate 20, and the installation hole 21 is used to install the throttle 30; a plurality of micro-grooves 32 and a gas supply groove 31 are formed on the outer periphery of the throttle 30. One end of the micro-groove 32 communicates with the gas supply groove 31, and the other end of the micro-groove 32 extends to the bottom surface of the throttle 30; the micro-groove 32 and the wall of the installation hole 21 form a throttling hole; the cover plate 10 is the installation base of the air bearing plate 20 and the throttle 30.

[0057] Among them, a single mounting hole 21 on the air floating plate 20 can correspondingly mount a throttle 30. One or more mounting holes 21 can be formed on the air floating plate 20 for mounting one or more throttles 30.

[0058] Among them, a single throttle 30 includes a plurality of micro-grooves 32 and an air supply groove 31, and the number of micro-grooves 32 and the number of air supply grooves 31 are the same or different.

[0059] Among them, the cross-sectional dimension of the air supply groove 31 is different from that of the micro-groove 32. The cross-sectional dimension of the air supply groove 31 is much larger than that of the micro-groove 32. The micro-groove 32 has a throttling effect due to its relatively small size.

[0060] Among them, the shape of the air floating plate 20 is cylindrical, rectangular, trapezoidal or other suitable shapes, which are not limited herein.

[0061] In a possible example, there is one air supply groove 31, and the air supply groove 31 is an annular groove along the circumferential direction. The air supply groove 31 communicates with each micro-groove 32; or, there are a plurality of air supply grooves 31, and the air supply grooves 31 are straight grooves along the generatrix direction. Each air supply groove 31 communicates with one micro-groove 32.

[0062] Among them, there are the following four combination ways between the micro-groove 32 and the air supply groove 31:

[0063] First, the air supply groove 31 is a straight groove and the micro-groove 32 is a straight groove;

[0064] Second, the air supply groove 31 is a straight groove and the micro-groove 32 is a spiral groove;

[0065] Third, the air supply groove 31 is an annular groove and the micro-groove 32 is a straight groove;

[0066] Fourth, the air supply groove 31 is an annular groove and the micro-groove 32 is a spiral groove.

[0067] Among them, when there are a plurality of air supply grooves 31, the air supply grooves 31 are straight grooves along the generatrix direction. The number of air supply grooves 31 is the same as the number of micro-grooves 32, and the air supply grooves 31 and the micro-grooves 32 are in one-to-one correspondence.

[0068] Exemplarily, as Figure 5 shown, Figure 5 the throttle 30 shown in includes a micro-groove 32 and an air supply groove 31. The micro-groove 32 is a straight groove extending along the generatrix direction. The air supply groove 31 is a straight groove. The number of micro-grooves 32 and air supply grooves 31 is equal, and the micro-grooves 32 and the air supply grooves 31 are connected one by one.

[0069] Exemplarily, as Figure 6 shown, Figure 6The restrictor 30 shown in [figure] includes micro-grooves 32 and air supply grooves 31. The micro-grooves 32 are spiral grooves extending in the spiral direction, and the air supply grooves 31 are straight grooves. The number of micro-grooves 32 and air supply grooves 31 is equal, and the micro-grooves 32 and air supply grooves 31 are connected one by one.

[0070] Among them, when there is one air supply groove 31, at this time the air supply groove 31 is an annular groove along the circumferential direction, the number of air supply grooves 31 is different from the number of micro-grooves 32, and one air supply groove 31 communicates with all the micro-grooves 32.

[0071] Exemplarily, as Figure 10 shown, Figure 10 The restrictor 30 shown in [figure] includes micro-grooves 32 and air supply grooves 31. The micro-grooves 32 are straight grooves extending along the generatrix direction, and the air supply grooves 31 are annular grooves along the circumferential direction. The number of micro-grooves 32 is multiple, and the number of air supply grooves 31 is one. One air supply groove 31 communicates with all the micro-grooves 32.

[0072] Exemplarily, as Figure 11 shown, Figure 11 The restrictor 30 shown in [figure] includes micro-grooves 32 and air supply grooves 31. The micro-grooves 32 are spiral grooves extending in the spiral direction, and the air supply grooves 31 are annular grooves along the circumferential direction. The number of micro-grooves 32 is multiple, and the number of air supply grooves 31 is one. One air supply groove 31 communicates with all the micro-grooves 32.

[0073] Among them, Figure 3 The upper bearing block, lower bearing block, and air bearing surface are also shown, and an enlarged view of part B is also shown.

[0074] In a possible example, a central blind hole 33 and a radial hole 34 are provided in the middle of the restrictor 30; the central blind hole 33 communicates with the annular groove through the radial hole 34.

[0075] Among them, as Figure 10 shown, Figure 10 A form of the restrictor 30 is shown. In addition to including the micro-grooves 32 and air supply grooves 31, the restrictor 30 also includes a central blind hole 33 and a radial hole 34. The central blind hole 33 is provided at the center of the restrictor 30, and the radial hole 34 is provided on the side of the restrictor 30. One end of the central blind hole 33 extends to the top of the restrictor 30, and the other end of the central blind hole 33 communicates with the radial hole 34. At this time, the air supply groove 31 is an annular groove, the micro-groove 32 is a straight groove, and both ends of the radial hole 34 communicate with the air supply groove 31.

[0076] Among them, as Figure 11 shown, Figure 11Another form of the throttle 30 is shown. In addition to including the micro-grooves 32 and the air supply grooves 31, the throttle 30 also includes a central blind hole 33 and a radial hole 34. The central blind hole 33 is opened at the center of the throttle 30, and the radial hole 34 is opened on the side of the throttle 30. One end of the central blind hole 33 extends to the top of the throttle 30, and the other end of the central blind hole 33 communicates with the radial hole 34. At this time, the air supply groove 31 is an annular groove, the micro-groove 32 is a spiral groove, and both ends of the radial hole 34 communicate with the air supply groove 31.

[0077] In a possible example, the cross-sectional shape of the micro-groove 32 is rectangular, triangular or semi-circular. The micro-groove 32 is a straight groove extending along the generatrix direction, or the micro-groove 32 is a spiral groove extending along the spiral direction.

[0078] Among them, when the micro-groove 32 is a spiral groove type, the outlet direction of the throttle hole is not perpendicular to the working surface, so the air flow distribution on the working surface can be flexibly changed.

[0079] For example, please refer to Figure 7 , Figure 7 The throttle 30 shown in [reference] includes a micro-groove 32 and an air supply groove 31. One end of the micro-groove 32 is connected to the air supply groove 31, and the cross-sectional shape of the micro-groove 32 is rectangular.

[0080] For example, please refer to Figure 8 , Figure 8 The throttle 30 shown in [reference] includes a micro-groove 32 and an air supply groove 31. One end of the micro-groove 32 is connected to the air supply groove 31, and the cross-sectional shape of the micro-groove 32 is triangular.

[0081] For example, please refer to Figure 9 , Figure 9 The throttle 30 shown in [reference] includes a micro-groove 32 and an air supply groove 31. One end of the micro-groove 32 is connected to the air supply groove 31, and the cross-sectional shape of the micro-groove 32 is semi-circular.

[0082] For example, as Figure 5 shown, Figure 5 The throttle 30 shown in [reference] includes a micro-groove 32 and an air supply groove 31. One end of the micro-groove 32 is connected to the air supply groove 31. The micro-groove 32 is a straight groove extending along the generatrix direction, and the air supply groove 31 is a straight groove.

[0083] For example, as Figure 6 shown, Figure 6 The throttle 30 shown in [reference] includes a micro-groove 32 and an air supply groove 31. One end of the micro-groove 32 is connected to the air supply groove 31. The micro-groove 32 is a spiral groove extending along the spiral direction, and the air supply groove 31 is a straight groove.

[0084] In a possible example, the throttle 30 is cylindrical, and the throttle 30 is in interference fit with the mounting hole 21; or,

[0085] The throttle 30 is of a conical table type, and the throttle 30 is in conical surface fit with the mounting hole 21 and passes through the cover plate 10.

[0086] Please refer to Figure 12 , Figure 12 , which shows a schematic cross-sectional view of the cylindrical throttle along A-A, and please refer to Figure 13 , Figure 13 , which shows the cover plate 10, the throttle 30, the air supply groove 31 and the micro-groove 32, wherein the throttle 30 is cylindrical.

[0087] Please refer to Figure 14 , Figure 14 , which shows a schematic cross-sectional view of the conical throttle along A-A, and please refer to Figure 15 , Figure 15 , which shows the cover plate 10, the throttle 30, the air supply groove 31 and the micro-groove 32, wherein the throttle 30 is conical.

[0088] In a possible example, there is one mounting hole 21, and the mounting hole 21 is arranged at the central position of the air bearing plate 20;

[0089] There are multiple mounting holes 21, and the multiple mounting holes 21 are evenly distributed in a circle or linearly arrayed on the air bearing plate 20.

[0090] In a possible example, the cover plate 10 is provided with an air supply channel 40. The air supply channel 40 is a shallow groove, and the shallow groove is provided with an axial blind hole and a radial hole 34 communicating with the axial blind hole, and the radial hole 34 is connected to an external air supply device.

[0091] In a possible example, the number of the throttles 30 is multiple. An annular groove is formed on the air bearing plate 20 for installing a sealing ring. The annular groove surrounds the air supply groove 31 of each throttle 30 to form a sealed air path.

[0092] It can be seen that the air bearing pad 1 installs the throttle 30 through the mounting hole 21 provided on the air bearing plate 20. The throttle 30 is provided with a micro-groove 32. The micro-groove 32 and the wall of the mounting hole 21 enclose a throttle hole, which can solve the problem of difficult machining of the throttle hole with a long length and a small diameter, enable the realization of long micro-holes, and is beneficial to improving the bearing capacity and stiffness of the air bearing pad.

[0093] This application provides an air bearing guide rail 2. Please refer to Figures 16-19 , Figure 16 , which is a schematic diagram of a T-shaped air bearing guide rail provided by an embodiment of this application; Figure 17 , which is a schematic diagram of another T-shaped air bearing guide rail provided by an embodiment of this application;Figure 18 It is a schematic diagram of a dovetail-shaped air-floating guide rail provided by an embodiment of the present application; Figure 19 It is a schematic diagram of an enclosed air-floating guide rail provided by an embodiment of the present application.

[0094] The air-floating guide rail 2 provided by the present application includes a plurality of the aforementioned air-floating plates and restrictors 30, and the shape of the air-floating guide rail 2 is T-shaped, dovetail-shaped or enclosed.

[0095] Among them, a single air-floating guide rail 2 includes a plurality of air-floating plates 20, and each air-floating plate includes one or more mounting holes 21 for mounting the restrictor 30.

[0096] Among them, the shapes of the plurality of air-floating plates 20 on a single air-floating guide rail 2 may be the same or different, which is not limited herein.

[0097] For example, please refer to Figure 16 and Figure 17 , Figure 16 and Figure 17 As shown, the air-floating guide rail 2 is T-shaped. The T-shaped air-floating guide rail includes five air-floating plates, and all five air-floating plates are rectangular air-floating plates. Specifically, one air-floating plate 20 is provided at the upper part, and one air-floating plate 20 connected to the upper air-floating plate is provided on each of the left and right sides, and one air-floating plate 20 connected to the side air-floating plates is provided on each of the left and right sides at the lower part. Each air-floating plate 20 is provided with a mounting hole 21, and the restrictor 30 can be correspondingly mounted in the mounting hole 21.

[0098] For example, please refer to Figure 18 , Figure 18 As shown, the air-floating guide rail 2 is dovetail-shaped. The dovetail-shaped air-floating guide rail 2 includes three air-floating plates 20. Specifically, one rectangular air-floating plate is provided at the upper part, and one trapezoidal air-floating plate connected to the upper air-floating plate is provided on each of the left and right sides.

[0099] For example, please refer to Figure 19 , Figure 19 As shown, the air-floating guide rail 2 is enclosed. The enclosed air-floating guide rail 2 includes four air-floating plates 20. Specifically, one rectangular air-floating plate is provided at the upper part, one rectangular air-floating plate connected to the upper air-floating plate is provided on each of the left and right sides, and one rectangular air-floating plate is provided at the lower part, and the lower air-floating plate is respectively connected to the side air-floating plates.

[0100] In a possible example, a plurality of micro-grooves 32 and air supply grooves 31 are provided on the outer periphery of the restrictor 30. One end of the micro-groove 32 communicates with the air supply groove 31, and the other end of the micro-groove 32 extends to the bottom surface of the restrictor 30; the micro-groove 32 and the wall of the mounting hole 21 form a throttle hole.

[0101] In a possible example, there is one air supply groove 31, and the air supply groove 31 is an annular groove along the circumferential direction, and the air supply groove 31 communicates with each micro-groove 32; or,

[0102] There are multiple air supply grooves 31, and the air supply grooves 31 are straight grooves along the generatrix direction, and each air supply groove 31 communicates with one micro-groove 32.

[0103] In a possible example, a central blind hole 33 and a radial hole 34 are provided in the throttler 30;

[0104] The central blind hole 33 communicates with the annular groove through the radial hole 34.

[0105] In a possible example, the throttler 30 is cylindrical, and the throttler 30 is in interference fit with the mounting hole 21; or,

[0106] The throttler 30 is conical and bench-shaped, and the throttler 30 is in conical surface fit with the mounting hole 21.

[0107] In a possible example, there is one mounting hole 21, and the mounting hole 21 is provided at the central position of the air-floating plate 20;

[0108] There are multiple mounting holes 21, and the multiple mounting holes 21 are evenly distributed in a circle or linearly arrayed on the air-floating plate 20.

[0109] In a possible example, the micro-groove 32 is a straight groove extending along the generatrix direction or a spiral groove extending along the spiral direction, and the cross-sectional shape of the micro-groove 32 is rectangular, triangular or semi-circular.

[0110] In a possible example, the cross-sectional dimension of the air supply groove 31 is larger than that of the micro-groove 32.

[0111] In a possible example, the number of the throttlers 30 is multiple, an annular groove is provided on the air-floating plate 20, and the annular groove is used for installing a sealing ring, and the annular groove surrounds the air supply groove 31 of each throttler 30 to form a sealed air path.

[0112] It can be seen that in the embodiment of the present application, the air-floating guide rail 2 installs the throttler 30 through the mounting hole 21 provided on the air-floating plate 20, the throttler 30 is provided with the micro-groove 32, and the micro-groove 32 and the wall of the mounting hole 21 enclose a throttling hole, which can solve the problem of difficult processing of the throttling hole with a long length and a small diameter, enable the realization of long micro-holes, and is beneficial to improving the load-bearing capacity and stiffness of the air-floating guide rail 2.

[0113] In the above embodiments, the descriptions of the respective embodiments each have their own emphasis. For parts not detailed in a certain embodiment, reference may be made to the relevant descriptions of other embodiments.

[0114] In this application, the mention of "embodiment" and "implementation manner" means that the specific features, structures or characteristics described in connection with the embodiments may be included in at least one embodiment of this application. The phrase appearing in various positions in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described in this application can be combined with other embodiments. In addition, it should also be understood that the features, structures or characteristics described in the respective embodiments of this application can be combined arbitrarily without contradiction, so as to form another embodiment that does not depart from the spirit and scope of the technical solution of this application.

[0115] Finally, it should be noted that the above implementation manners are only used to illustrate the technical solutions of this application, not to limit them. Although the technical solutions of this application have been described in detail with reference to the above preferred implementation manners, those of ordinary skill in the art should understand that the technical solutions of this application can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of this application.

Claims

1. An air floating pad, characterized in that, The air floating pad includes: An air floating plate, on which mounting holes are provided, and the mounting holes are used for mounting throttlers; The throttler, on the outer periphery of which a plurality of micro-grooves and air supply grooves are provided. One end of the micro-groove communicates with the air supply groove, and the other end of the micro-groove extends to the bottom surface of the throttler; the micro-groove and the mounting hole wall form a throttling hole; A cover plate, which is the mounting base for the air floating plate and the throttler.

2. The air floating pad according to claim 1, characterized in that, There is one air supply groove, and the air supply groove is an annular groove along the circumferential direction, and the air supply groove communicates with each micro-groove; or, There are a plurality of air supply grooves, and the air supply grooves are straight grooves along the generatrix direction, and each air supply groove communicates with one micro-groove.

3. The air floating pad according to claim 2, wherein, A central blind hole and a radial hole are provided in the middle of the throttler; The central blind hole communicates with the annular groove through the radial hole.

4. The air floating pad according to claim 1, characterized in that, The throttler is cylindrical, and the throttler is in interference fit with the mounting hole; or, The throttler is conical table-shaped, and the throttler is in tapered surface fit with the mounting hole and is pressed by the cover plate.

5. The air floating pad according to claim 4, wherein There is one mounting hole, and the mounting hole is arranged at the central position of the air floating plate; There are a plurality of mounting holes, and the plurality of mounting holes are evenly distributed in a circle or linearly arrayed on the air floating plate.

6. The air cushion according to claim 1, characterized in that The micro-groove is a straight groove extending along the generatrix direction or a spiral groove extending along the spiral direction, and the cross-sectional shape of the micro-groove is rectangular, triangular or semi-circular.

7. The air cushion according to claim 6, characterized in that, The cross-sectional dimension of the air supply groove is much larger than that of the micro-groove.

8. The air floating pad according to claim 1, wherein An air supply channel is provided on the cover plate, and the air supply channel is a shallow groove. An axial blind hole and a radial hole communicating with the axial blind hole are provided in the shallow groove, and the radial hole is connected to an external air supply device.

9. The air floating pad according to claim 8, wherein, The number of throttlers is a plurality, and an annular groove is provided on the air floating plate, and the annular groove is used for mounting a sealing ring, and the annular groove surrounds the air supply groove of each throttler to form a sealed air path.

10. A gas floating guide rail, characterized in that, The air floating guide rail includes a plurality of air floating plates and throttlers as described in any one of claims 1-9, and the shape of the air floating guide rail is T-shaped, dovetail-shaped or closed.

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