Quartz boat, boat taking device and wafer moving assembly

Abstract

The invention relates to the technical field of semiconductors, and discloses a quartz boat, a boat taking device and a wafer moving assembly. The quartz boat comprises a boat body, a first supporting structure, a second supporting structure and a boat taking supporting structure. The boat taking supporting structure is provided with a boat taking groove penetrating in the axial direction of the boat body, the boat taking groove is an open groove, and an opening of the boat taking groove faces the second supporting structure. The boat taking device is matched with a quartz boat and comprises a boat connecting structure, a support and a handle. The boat connecting structure comprises a boat groove fixing jacking column and a boat supporting plate which are fixedly connected, and the boat groove fixing jacking column is suitable for being inserted into a boat taking groove of the quartz boat and at least partially abuts against the inner wall of the boat taking groove; the boat supporting plate is suitable for being at least partially connected with the outwards-protruding arc face of the boat body of the quartz boat in an abutting mode when the boat groove fixing jacking column is inserted into the boat taking groove of the quartz boat. The method can solve the problems that the operation time is long, the cleanliness of the wafer is influenced and the operation is not facilitated when the boat is taken from the front side.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and particularly to a quartz boat, a boat lifter, and a wafer transfer assembly. Background Art

[0002] In the process of semiconductor manufacturing, a quartz boat, as a key carrying tool, is used to safely send wafers into a high-temperature furnace tube for various heat treatment processes.

[0003] The quartz boat is made of high-purity quartz material, has excellent high-temperature resistance performance, and can stably operate in an environment with a temperature of up to more than 1100 degrees Celsius. Its surface is smooth and chemically stable, and it can effectively prevent wafers from being contaminated.

[0004] Since the temperature of the quartz boat is still relatively high after high-temperature treatment, and strict requirements are imposed on the cleanliness levels of both the quartz boat and the furnace body, it cannot be directly touched by hand, and a boat lifter is needed to pick up and place the quartz boat and the wafers it carries.

[0005] Currently, due to the structural limitations of existing quartz boats and boat lifters, after the boat lifter is connected to the quartz boat, the handle of the boat lifter faces the front of the wafer. Therefore, when operating by hand, the hand also faces the front of the wafer. That is, currently, the front-side boat-picking method is mostly adopted. Such a structure and boat-picking method have the following disadvantages:

[0006] 1. The quartz boat is placed on the cantilever paddle of the furnace body, and the boats can only be picked up one by one in sequence along the length direction of the cantilever paddle, resulting in a long operation time and affecting work efficiency;

[0007] 2. The hand faces the front of the wafer, which is extremely unfavorable for particle control and ion contamination control of the wafer;

[0008] 3. The operator needs to avoid the high-temperature side of the furnace mouth according to the structure of the high-temperature furnace tube and operate the boat lifter with the left hand or the right hand, which does not match the hand usage habits of the operator. Summary of the Invention

[0009] In view of this, the present invention provides a quartz boat, a boat lifter, and a wafer transfer assembly to solve the problems of long operation time, affecting the cleanliness of the wafer, and being unfavorable for operation existing in front-side boat-picking.

[0010] In a first aspect, the present invention provides a quartz boat, comprising a boat body, a first support structure, a second support structure, and a boat-taking support structure. The boat body is an arc-shaped plate structure; the first support structure is fixedly arranged on the concave arc surface of the boat body, and along the axial direction of the boat body, the first support structure is provided with a plurality of wafer limiting slots at intervals; the second support structure is fixedly arranged on the convex arc surface of the boat body; the boat-taking support structure is arranged on the convex arc surface of the boat body and is located between the second support structure and the edge of the boat body. The boat-taking support structure is provided with a boat-taking slot that penetrates along the axial direction of the boat body. The boat-taking slot is an open slot, and the opening of the boat-taking slot faces the second support structure.

[0011] Advantageous effects: The boat body is an arc-shaped plate structure to match the structure of the wafer.

[0012] The first support structure is fixedly arranged on the concave arc surface of the boat body and is provided with a plurality of wafer limiting slots that are distributed at intervals along the axial direction. Multiple wafers can be respectively placed and limited in the wafer limiting slots, which can ensure that the wafers are firmly limited during the processing, reducing the risk of damage caused by vibration or movement.

[0013] The second support structure is fixedly arranged on the convex arc surface of the boat body, which can provide additional supporting force to facilitate placing the quartz boat body and the wafers it carries on the cantilever paddle of the diffusion furnace.

[0014] The boat-taking support structure is located between the second support structure and the edge of the boat body and is designed with a boat-taking slot that penetrates along the axial direction of the boat body. The boat-taking slot is an open slot and the opening faces the second support structure, which is convenient for the boat-taking device to insert and stably grab the quartz boat. Since the boat-taking slot is arranged along the axial direction of the boat body and is provided with an opening, after the boat-taking slot is connected to the boat body, the handle is located on the side of the wafer, and side boat-taking can be realized. When the quartz boat is placed on the cantilever paddle of the diffusion furnace, the operator also just faces the side of the wafer. Therefore, the operator can take and place the quartz boat at any position on the cantilever paddle without having to take the boats in sequence along the length direction of the cantilever paddle, greatly shortening the operation time and improving work efficiency. At the same time, compared with the traditional way that the operator's hand faces the front of the wafer, the present invention can realize side boat-taking, and the hand is located on the side of the wafer, which is beneficial to particle control and ion contamination control of the wafer and meets the cleanliness level requirements of the wafer. Finally, since the present invention realizes side boat-taking, the operator does not need to use the non-dominant hand to operate the boat-taking device to avoid the high-temperature side of the furnace mouth. The present invention can conform to the operator's hand use habit, making the movement of the wafer safer and more stable.

[0015] Second aspect, the present invention also provides a boat extractor, which is adapted to cooperate with the quartz boat in the above technical solution, and includes a boat connection structure, a bracket and a handle. The boat connection structure includes a boat groove fixed top column and a boat support plate which are fixedly connected. The boat groove fixed top column is adapted to be inserted into the boat extraction groove of the quartz boat and at least partially abut against the inner wall of the boat extraction groove; the boat support plate is adapted to at least partially abut against the convex arc surface of the boat body of the quartz boat when the boat groove fixed top column is inserted into the boat extraction groove of the quartz boat; the bracket is connected to the boat connection structure and extends in a direction away from the quartz boat; the handle is connected to the bracket.

[0016] Beneficial effects: The boat groove fixed top column is inserted into the boat extraction groove of the quartz boat and at least partially abuts against the inner wall of the boat extraction groove, so as to ensure the precise connection between the boat extractor and the quartz boat, ensure that the boat extractor can firmly hold the quartz boat, and avoid loosening or falling off during the operation.

[0017] When the boat support plate is inserted into the boat extraction groove, the boat support plate at least partially abuts against the convex arc surface of the boat body of the quartz boat, enhancing the supporting effect of the boat extractor on the quartz boat. Through the cooperation of the boat groove fixed top column and the boat extraction groove, and the cooperation of the boat support plate and the boat body, a stable support structure is formed, effectively preventing the quartz boat from tilting or shifting during transportation or operation, thereby improving the stability of the quartz boat during movement.

[0018] Through the dual fixing effects of the boat groove fixed top column and the boat support plate, and the reasonable layout of the bracket and the handle, side boat extraction can be realized. When the quartz boat is placed on the cantilever paddle of the diffusion furnace, the operator is just facing the side of the wafer. Therefore, the operator can pick up and place the quartz boat at any position on the cantilever paddle without having to pick up the boat sequentially along the length direction of the cantilever paddle, greatly shortening the operation time and improving the work efficiency. At the same time, compared with the traditional method where the human hand faces the front of the wafer, the present invention can realize side boat extraction, and the human hand is located on the side of the wafer, which is beneficial to the control of particles and ion contamination of the wafer and meets the cleanliness level requirements for the wafer. Finally, since the present invention realizes side boat extraction, the operator does not need to use the non-dominant hand to operate the boat extractor to avoid the high-temperature side of the furnace mouth. The present invention can conform to the operator's hand usage habit, making the movement of the wafer safer and more stable.

[0019] Third aspect, the present invention also provides a wafer moving assembly, which includes the quartz boat in the above technical solution and the boat extractor in the above technical solution.

[0020] Beneficial effects: Since the wafer moving assembly includes the quartz boat and the boat extractor in the above technical solution and can realize side boat extraction, its technical effects are the same as those of the quartz boat and the boat extractor, and will not be elaborated here. Description of the Drawings

[0021] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0022] Figure 1 Schematic structural diagram of a quartz boat according to an embodiment of the present invention;

[0023] Figure 2 For Figure 1 View of the quartz boat shown along the X direction;

[0024] Figure 3 For Figure 1 Schematic diagram of the arc angles of each structure in the quartz boat shown;

[0025] Figure 4 For Figure 1 Top view of the quartz boat shown;

[0026] Figure 5 For Figure 1 View of the quartz boat shown along the Y direction;

[0027] Figure 6 Schematic structural diagram of a boat lifter according to an embodiment of the present invention;

[0028] Figure 7 For Figure 6 Front view of the boat lifter shown;

[0029] Figure 8 For Figure 6 Top view of the boat lifter shown;

[0030] Figure 9 For Figure 6 Left view of the boat lifter shown;

[0031] Figure 10 Schematic structural diagram of a wafer moving assembly when moving a wafer according to an embodiment of the present invention.

[0032] Explanation of reference numerals:

[0033] 10. Quartz boat; 11. Boat body; 12. First support structure; 121. First convex rib; 122. Groove; 13. Second support structure; 131. Second convex rib; 14. Boat-taking support structure; 141. Boat-taking groove; 20. Boat-taking device; 21. Boat connection structure; 211. Boat groove fixed top column; 212. Boat support plate; 213. Connection plate; 22. Bracket; 221. Support plate; 222. Baffle; 223. Reinforcing rib; 23. Handle; 100. Wafer moving assembly; 200. Wafer. Detailed implementation manner

[0034] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0035] The following combines Figures 1 to 10 , to describe the embodiments of the present invention.

[0036] According to an embodiment of the present invention, in a first aspect, a quartz boat 10 is provided. Referring to Figures 1 to 5 , it includes a boat body 11, a first support structure 12, a second support structure 13, and a boat-taking support structure 14. The boat body 11 is an arc-shaped plate structure; the first support structure 12 is fixedly arranged on the concave arc surface of the boat body 11, and along the axial direction of the boat body 11, the first support structure 12 is provided with a plurality of wafer 200 limiting slots at intervals; the second support structure 13 is fixedly arranged on the convex arc surface of the boat body 11; the boat-taking support structure 14 is arranged on the convex arc surface of the boat body 11 and is located between the second support structure 13 and the edge of the boat body 11. The boat-taking support structure 14 is provided with a boat-taking groove 141 that penetrates along the axial direction of the boat body 11. The boat-taking groove 141 is an open groove, and the opening of the boat-taking groove 141 faces the second support structure 13.

[0037] The boat body 11 is an arc-shaped plate structure to match the structure of the wafer 200.

[0038] The first support structure 12 is fixedly arranged on the concave arc surface of the boat body 11 and is provided with a plurality of wafer 200 limiting slots that are spaced apart along the axial direction. A plurality of wafers 200 can be respectively placed and limited in the wafer 200 limiting slots, which can ensure that the wafers 200 are firmly limited during the processing, reducing the risk of damage caused by vibration or movement.

[0039] The second support structure 13 is fixedly arranged on the convex arc surface of the boat body 11, which can provide additional supporting force to facilitate placing the quartz boat 10 and the wafers 200 carried thereon on the cantilever paddle of the diffusion furnace. When the quartz boat 10 is placed on the cantilever paddle of the diffusion furnace, the plane of the wafer 200 is perpendicular to the cantilever paddle and parallel to the axis of the boat body 11 of the quartz boat 10.

[0040] Combined Figure 10 , the boat-taking support structure 14 is located between the second support structure 13 and the edge of the boat body 11, and is designed with a boat-taking groove 141 penetrating along the axial direction of the boat body 11. The boat-taking groove 141 is an open groove and the opening faces the second support structure 13, which is convenient for the boat-taking device 20 to insert and stably grasp the quartz boat 10. Since the boat-taking groove 141 is arranged along the axial direction of the boat body 11 and has an opening, after the boat-taking groove 141 is connected to the boat body 11, the handle 23 is located on the side of the wafer 200, and side boat-taking can be realized. When the quartz boat 10 is placed on the cantilever paddle of the diffusion furnace, the operator also just faces the side of the wafer 200. Therefore, the operator can take and place the quartz boat 10 at any position on the cantilever paddle, without having to take the boats in sequence along the length direction of the cantilever paddle, greatly shortening the operation time and improving the work efficiency. At the same time, compared with the traditional method where the human hand faces the front of the wafer 200, the present invention can realize side boat-taking, and the human hand is located on the side of the wafer 200, which is beneficial to the particle control and ion contamination control of the wafer 200 and meets the cleanliness level requirements for the wafer 200. Finally, since the present invention realizes side boat-taking, the operator does not need to use the non-dominant hand to operate the boat-taking device 20 to avoid the high-temperature side of the furnace mouth. The present invention can conform to the hand-using habit of the operator, making the movement of the wafer 200 safer and more stable.

[0041] In some embodiments, the boat-taking groove 141 is an arc-shaped groove.

[0042] The cross-section of the boat-taking groove 141 can be of various shapes. When the boat-taking groove 141 is designed as an arc-shaped groove, it can better disperse the force exerted by the boat-taking device 20 when grasping the quartz boat 10, reduce local stress concentration, and thus reduce the risk of damage to the quartz boat 10 due to uneven force.

[0043] In some embodiments, the circular arc angle of the boat-taking groove 141 is 200°±10°. As Figure 3 shown by angle A in

[0044] The size of the arc angle of the boat slot 141 determines the opening size of the boat slot 141. If the arc angle of the boat slot 141 is too large, the opening size of the boat slot 141 is smaller, which is not conducive to the insertion of the boat slot fixing top column 211 of the boat gripper 20 into the boat slot 141. Or, in order to make the boat slot fixing top column 211 of the boat gripper 20 insert into the boat slot 141, it is necessary to reduce the size of the boat slot fixing top column 211, which will reduce the structural strength of the boat slot fixing top column 211 of the boat gripper 20. If the arc angle of the boat slot 141 is too small, the opening size of the boat slot 141 is larger. Although this is more conducive to the insertion of the boat slot fixing top column 211 of the boat gripper 20 into the boat slot 141, it will reduce the contact area and support force between the boat slot fixing top column 211 and the boat slot 141, increase the possibility of sliding or offset, and reduce the connection strength between the boat gripper 20 and the quartz boat 10, thus affecting the stability and reliability of the connection between the boat gripper 20 and the quartz boat 10. Therefore, the arc angle of the boat slot 141 is set to 200° ± 10°, which can fix the quartz boat 10 more safely during handling and reduce the risk of dropping or collision during transportation.

[0045] In some embodiments, the arc angle between the opening of the boat slot 141 and the midline of the bottom of the boat body 11 is 40° to 45°. As Figure 3 shown by angle B in the figure.

[0046] If the arc angle between the opening of the boat slot 141 and the midline of the bottom of the boat body 11 is greater than 45°, the opening of the boat slot 141 is closer to the edge of the boat body 11. Taking the boat at this position has a smaller force arm, resulting in laborious movement of the quartz boat 10 and the wafers 200 it carries by the operator. If the arc angle between the opening of the boat slot 141 and the midline of the bottom of the boat body 11 is less than 40°, the position of the boat slot 141 is closer to the bottom of the boat body 11, which is not conducive to the insertion of the boat slot fixing top column 211 of the boat gripper 20 into the boat slot 141 and is prone to collision or jamming. Controlling the arc angle between the opening of the boat slot 141 and the midline of the bottom of the boat body 11 within the range of 40° to 45° facilitates the mating connection between the boat gripper 20 and the quartz boat 10. While making it easier for the operator to pick up and place the quartz boat 10, it can also provide space for the boat support plate 212 of the boat gripper 20, ensuring that there is sufficient contact area between the boat support plate 212 of the boat gripper 20 and the boat body 11 of the quartz boat 10, which helps to disperse the acting force generated during the picking and placing process, making the force more evenly distributed on the quartz boat 10, thereby reducing the risk of damage caused by excessive local stress and enhancing the stability of the quartz boat 10 during the picking and placing process. In addition, such a setting is conducive to the rapid assembly of the boat gripper 20 and the quartz boat 10. Especially in the case where the quartz boat 10 needs to be frequently replaced or the position needs to be adjusted, it can significantly reduce the operation difficulty and improve the work efficiency.

[0047] In some embodiments, the arc angle of the boat body 11 is 115° to 125°. As Figure 3 shown by angle C therein.

[0048] Controlling the arc angle of the boat body 11 within the range of 115° to 125° enables a more uniform force distribution when the boat body 11 places the wafer 200, effectively avoiding the problem of excessive local stress, thereby improving the stability and load-bearing capacity of the overall structure. At the same time, it helps to ensure that the boat body 11 has a sufficient bearing area for the wafer 200, reduces shaking or offset, enhances the stability of the wafer 200 during movement, and can significantly improve safety. Finally, by optimizing the design of the arc angle, the amount of material used can be minimized while meeting the functional requirements, reducing the manufacturing cost.

[0049] In some embodiments, two boat lifting support structures 14 are provided, and the two boat lifting support structures 14 are symmetrically arranged about the axis of the boat body 11.

[0050] With this arrangement, the quartz boat 10 does not need to distinguish the direction during the picking and placing process and can be directly placed on the cantilever paddle of the diffusion furnace. There is always one boat lifting support structure 14 facing the operator, and the boat lifter 20 can be directly connected to the boat lifting support structure 14 on this side, thereby shortening the operation time and improving work efficiency.

[0051] In some embodiments, the first support structure 12 includes a plurality of first convex ribs 121 spaced along the arc surface of the boat body 11. The first convex ribs 121 extend along the axial direction of the boat body 11, and a plurality of grooves 122 are spaced along the axial direction of the boat body 11 on the first convex ribs 121. The groove 122 positions of the plurality of first convex ribs 121 correspond to form a plurality of wafer 200 limiting slots.

[0052] By correspondingly arranging the plurality of first convex ribs 121 and the grooves 122 therein, a plurality of wafer 200 limiting slots are formed. In this way, a plurality of wafers 200 can be placed at intervals, and each wafer 200 can be accurately positioned and fixed, avoiding its offset or collision during transportation or high-temperature treatment, thereby ensuring the quality and integrity of the wafer 200. The regular arrangement of the first convex ribs 121 and the corresponding arrangement of the grooves 122 simplify the manufacturing and assembly process of the quartz boat 10 and reduce the production difficulty. Finally, it can effectively avoid the direct contact between the surface of the wafer 200 and other parts of the boat body 11, reduce the risk of scratches or contamination, and ensure the cleanliness and smoothness of the surface of the wafer 200.

[0053] In some embodiments, the second support structure 13 includes two second convex ribs 131 spaced along the arc surface of the boat body 11. The second convex ribs 131 extend along the axial direction of the boat body 11.

[0054] The second support structure 13 is arranged in such a way that the overall structural stability of the quartz boat 10 can be effectively enhanced. Through the second support structure 13, when the quartz boat 10 and the wafers 200 carried thereon are placed on the cantilever paddle of the diffusion furnace, it can cooperate with the cantilever paddle to enable the quartz boat 10 to be more stably supported, reducing the possibility of shaking and deviation. In addition, only setting two second convex ribs 131 can significantly simplify the processing technology and reduce the manufacturing difficulty.

[0055] According to an embodiment of the present invention, in a second aspect, a boat lifter 20 is further provided. Referring to Figures 6 to 9 , which is matched with the quartz boat 10 in the above embodiment, includes a boat connection structure 21, a bracket 22 and a handle 23. The boat connection structure 21 includes a boat slot fixing top column 211 and a boat support plate 212 that are fixedly connected. The boat slot fixing top column 211 is adapted to be inserted into the boat taking slot 141 of the quartz boat 10 and at least partially abut against the inner wall of the boat taking slot 141; the boat support plate 212 is adapted to at least partially abut against the outer convex arc surface of the boat body 11 of the quartz boat 10 when the boat slot fixing top column 211 is inserted into the boat taking slot 141 of the quartz boat 10; the bracket 22 is connected to the boat connection structure 21, and the bracket 22 extends in a direction away from the quartz boat 10; the handle 23 is connected to the bracket 22.

[0056] The boat slot fixing top column 211 is inserted into the boat taking slot 141 of the quartz boat 10 and at least partially abuts against the inner wall of the boat taking slot 141, which can ensure the precise connection between the boat lifter 20 and the quartz boat 10, guarantee that the boat lifter 20 can firmly hold the quartz boat 10, and avoid loosening or falling off during the operation.

[0057] Combined with Figure 10 , when the boat support plate 212 is inserted into the boat taking slot 141, it at least partially abuts against the outer convex arc surface of the boat body 11 of the quartz boat 10, enhancing the supporting effect of the boat lifter 20 on the quartz boat 10. Through the cooperation between the boat slot fixing top column 211 and the boat taking slot 141, and the cooperation between the boat support plate 212 and the boat body 11, a stable support structure is formed, effectively preventing the quartz boat 10 from tilting or deviating during transportation or operation, thereby improving the stability of the quartz boat 10 during movement.

[0058] Through the dual fixation of the boat groove fixing top column 211 and the boat support plate 212, as well as the reasonable layout of the bracket 22 and the handle 23, side boat taking can be achieved. When the quartz boat 10 is placed on the cantilever paddle of the diffusion furnace, the operator is just facing the side of the wafer 200. Therefore, the operator can pick up and place the quartz boat 10 at any position on the cantilever paddle without having to pick up the boat sequentially along the length direction of the cantilever paddle, greatly shortening the operation time and improving work efficiency. At the same time, compared with the traditional method where the operator's hand faces the front of the wafer 200, the present invention can achieve side boat taking, with the hand located on the side of the wafer 200, which is beneficial to particle control and ion contamination control of the wafer 200 and meets the cleanliness level requirements for the wafer 200. Finally, since the present invention realizes side boat taking, the operator does not need to use the non-dominant hand to operate the boat picker 20 to avoid the high-temperature side of the furnace mouth. The present invention can conform to the operator's hand usage habit, making the movement of the wafer 200 safer and more stable.

[0059] In some embodiments, the boat groove fixing top column 211 is a cylinder, and the diameter of the boat groove fixing top column 211 is smaller than the opening width of the boat taking groove 141.

[0060] Designing the boat groove fixing top column 211 as a cylinder with a diameter smaller than the opening width of the boat taking groove 141 can ensure that the boat groove fixing top column 211 can be smoothly inserted into the boat taking groove 141, avoiding the risk of difficult insertion or damage due to size mismatch, and improving the reliability and efficiency of the operation. At the same time, since the diameter of the boat groove fixing top column 211 is smaller than the opening width of the boat taking groove 141, there will be a certain gap between the two, which helps to reduce the frictional force generated during insertion or extraction, thereby reducing the possibility of wear and damage and extending the service life of the quartz boat 10 and the boat picker 20. Finally, the cylindrical boat groove fixing top column 211 has a simple structure, is easy to process and manufacture, reducing the production difficulty and cost.

[0061] In some embodiments, the boat support plate 212 is an arc-shaped plate that fits the convex arc surface of the boat body 11 of the quartz boat 10.

[0062] The boat support plate 212 is designed as an arc-shaped plate that fits the convex arc surface of the boat body 11 of the quartz boat 10, which can achieve a tight fit between the two. This not only improves the support effect of the boat picker 20 on the quartz boat 10 but also effectively prevents loosening or displacement during operation. At the same time, the boat support plate 212 can better adapt to the convex arc surface of the quartz boat 10, making the support force applied by the boat picker 20 on the boat body 11 more evenly distributed. Also, through the cooperation of the arc-shaped plate and the convex arc surface of the quartz boat 10, the friction and scratches that may occur between the two can be reduced, thereby better protecting the surface quality and integrity of the quartz boat 10.

[0063] In some embodiments, the boat connection structure 21 further includes a connecting plate 213. The boat groove fixed top post 211 and the boat support plate 212 are connected through the connecting plate 213, and the thickness of the connecting plate 213 is less than the opening width of the boat taking groove 141.

[0064] By integrally fixing the boat groove fixed top post 211 and the boat support plate 212 through the connecting plate 213, the structural strength of the boat connection structure 21 can be ensured. Since the thickness of the connecting plate 213 is less than the opening width of the boat taking groove 141, it is ensured that the boat groove fixed top post 211 can be smoothly inserted into the boat taking groove 141 without the risk of difficult insertion or damage due to the excessive thickness of the connecting plate 213.

[0065] In some embodiments, the bracket 22 includes a support plate 221 and a baffle 222 connected at an angle. The support plate 221 is connected to the boat connection structure 21; the handle 23 is connected to the baffle 222, and the top of the baffle 222 is 3 cm to 5 cm higher than the top of the handle 23. As Figure 7 shown by the height h in the figure.

[0066] The top of the baffle 222 being 3 cm to 5 cm higher than the top of the handle 23 can isolate particles and ions, so that when the boat taking device 20 grasps the quartz boat 10, the risk of contaminating the wafer 200 by being in close contact with human hands is isolated.

[0067] In some embodiments, the support plate 221 and the baffle 222 are arranged vertically.

[0068] In some embodiments, the bracket 22 further includes a reinforcing rib 223. The reinforcing rib 223 is connected between the support plate 221 and the baffle 222 and can enhance the structural strength of the bracket 22.

[0069] According to an embodiment of the present invention, in a third aspect, a wafer moving assembly 100 is further provided, including the quartz boat 10 in the above embodiments and the boat taking device 20 in the above embodiments.

[0070] Since the wafer moving assembly 100 includes the quartz boat 10 and the boat taking device 20 in the above embodiments and can realize side boat taking, its technical effect is the same as that of the quartz boat 10 and the boat taking device 20, and will not be elaborated here.

[0071] Although the embodiments of the present invention are described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A quartz boat, characterized in that, Comprising: A boat body (11), the boat body (11) being an arc-shaped plate structure; A first support structure (12), the first support structure (12) being fixedly arranged on the concave arc surface of the boat body (11), and along the axial direction of the boat body (11), a plurality of wafer (200) limiting slots are arranged at intervals on the first support structure (12); A second support structure (13), the second support structure (13) being fixedly arranged on the convex arc surface of the boat body (11); A boat-taking support structure (14), the boat-taking support structure (14) being arranged on the convex arc surface of the boat body (11) and located between the second support structure (13) and the edge of the boat body (11), the boat-taking support structure (14) being provided with a boat-taking slot (141) penetrating along the axial direction of the boat body (11), the boat-taking slot (141) being an open slot, and the opening of the boat-taking slot (141) facing the second support structure (13).

2. The quartz boat according to claim 1, wherein The boat-taking slot (141) is an arc-shaped slot.

3. The quartz boat according to claim 2, characterized in that, The circular arc angle of the boat-taking slot (141) is 200° ± 10°.

4. The quartz boat according to claim 1 or 2, characterized in that, The circular arc angle between the opening of the boat-taking slot (141) and the midline of the bottom of the boat body (11) is 40° to 45°.

5. The quartz boat according to claim 1 or 2, characterized in that, The circular arc angle of the boat body (11) is 115° to 125°.

6. The quartz boat according to claim 1 or 2, characterized in that, Two boat-taking support structures (14) are provided, and the two boat-taking support structures (14) are symmetrically arranged about the axis of the boat body (11).

7. A boat picker, characterized in that, Cooperating with the quartz boat according to any one of claims 1 to 6, comprising: A boat connection structure (21), including a boat slot fixed top column (211) and a boat support plate (212) fixedly connected, the boat slot fixed top column (211) being adapted to be inserted into the boat-taking slot (141) of the quartz boat (10) and at least partially abutting against the inner wall of the boat-taking slot (141); the boat support plate (212) being adapted to at least partially abut against the convex arc surface of the boat body (11) of the quartz boat (10) when the boat slot fixed top column (211) is inserted into the boat-taking slot (141) of the quartz boat (10); A bracket (22), the bracket (22) being connected to the boat connection structure (21), and the bracket (22) extending in a direction away from the quartz boat (10); A handle (23), the handle (23) being connected to the bracket (22).

8. The boat lifter according to claim 7, characterized in that, The boat slot fixed top column (211) is a cylinder, and the diameter of the boat slot fixed top column (211) is smaller than the opening width of the boat-taking slot (141).

9. The boat picker according to claim 7, characterized in that, The bracket (22) includes a support plate (221) and a baffle (222) connected at an angle, the support plate (221) being connected to the boat connection structure (21); the handle (23) is connected to the baffle (222), and the top of the baffle (222) is 3 cm to 5 cm higher than the top of the handle (23).

10. A wafer moving component, characterized in that, Including the quartz boat according to any one of claims 1 to 6 and the boat-taking device according to any one of claims 7 to 9.

Images