Excimer laser pressure protection and gas treatment device

Abstract

The invention discloses an excimer laser pressure protection and gas treatment device which comprises a rupture disk device (1), one end of the rupture disk device (1) can be communicated with an excimer laser resonant cavity, and the other end of the rupture disk device (1) is provided with a one-way safety valve (2) which can be jacked open by working gas leaked from the resonant cavity when a diaphragm (14) of the rupture disk device (1) is ruptured. The one-way safety valve (2) is connected with an absorption device (3) capable of purifying leaked working gas, and the absorption device (3) is provided with an exhaust port (4) capable of exhausting the purified gas. The excimer laser is simple in structure, external air can be prevented from flowing backwards into the excimer laser, internal gas is kept pure, exhausted gas is absorbed and purified, the exhausted gas can reach the emission standard, and harm to workers and the environment is eliminated.

Description

Technical Field

[0001] The present invention relates to the field of excimer lasers, and more particularly to a pressure protection and gas treatment device for an excimer laser.

Background Art

[0002] With the improvement of industrial processing technology and the promotion of research on the interaction mechanism between lasers and biological tissues as well as clinical application research, excimer lasers have developed very rapidly. In particular, rare gas halide excimer lasers, such as ArF 193nm, KrF 248nm, and XeCl 308nm excimer lasers, have been widely used in scientific research, medical treatment, and industry. Along with the popularization and application of rare gas halide excimer lasers, the gas pressure protection, gas discharge, and treatment methods of gas halides have been put on the table.

[0003] Traditional excimer gas protection devices lack waste gas treatment devices. When the air pressure in the laser exceeds a predetermined value and is depressurized, the gas will be directly discharged into the atmosphere, and the discharged halogen-containing gas poses a serious threat to the human body and the environment. In addition, traditional excimer gas pressure protection devices often adopt a fully open design. This design cannot maintain the unidirectional flow of gas during gas pressure relief, and situations such as external air backflow into the excimer laser chamber may occur, causing damage to the interior of the chamber. Moreover, traditional excimer gas pressure protection devices have a relatively complex structure, occupy a large space, and have a high cost.

[0004] Therefore, the present invention is precisely produced based on the above deficiencies.

Summary of the Invention

[0005] The object of the present invention is to overcome the deficiencies of the prior art and provide a pressure protection and gas treatment device for an excimer laser. When the gas pressure in the resonant cavity of the excimer laser exceeds the set value, the gas is depressurized to protect the laser. At the same time of depressurization, a certain absolute gas pressure of more than 0.2 Mpa is maintained inside the excimer laser, so that the internal pressure exceeds the atmospheric pressure value, preventing external air from flowing back into the excimer laser, keeping the internal gas pure, and also absorbing and purifying the discharged gas to make it meet the emission standard and eliminate the harm to workers and the environment.

[0006] The present invention is achieved through the following technical solutions:

[0007] An excimer laser pressure protection and gas treatment device, including a rupture disk device whose one end can communicate with the resonator cavity of the excimer laser. The other end of the rupture disk device is provided with a one-way safety valve that can be pushed open by the working gas leaking from the resonator cavity when the diaphragm of the rupture disk device ruptures. An absorption device for purifying the leaked working gas is connected to the one-way safety valve, and an exhaust port for discharging the purified gas is provided on the absorption device.

[0008] The rupture disk device includes a first connection seat, a connection ring, a diaphragm, and a second connection seat. The diaphragm is fixed inside the connection ring. The connection ring is arranged between the first connection seat and the second connection seat. An air inlet communicating with the resonator cavity of the excimer laser is provided at one end of the first connection seat. An air outlet for the air flow to pass through when the diaphragm ruptures is provided on the second connection seat, and the air outlet is connected to the one-way safety valve.

[0009] The one-way safety valve includes a valve seat. One end of the valve seat is connected to the air outlet on the second connection seat, and the other end is fixedly connected to the absorption device. A valve port is provided inside the valve seat. A valve head that can close the valve port and can be opened under the pushing of a gas at a set pressure is provided at the position of the valve port. The valve head includes a valve core that cooperates with the valve port and a return spring that pushes the valve core. A sealing ring is provided between the valve core and the edge of the valve port.

[0010] The absorption device includes a shell. One end of the shell is connected to the valve seat. An end cover is provided at the other end of the shell. The exhaust port is provided on the end cover. Purifying materials are provided inside the shell.

[0011] A abutment plate is provided at the end of the shell connected to the valve seat. One end of the return spring abuts against the abutment plate, and the other end abuts against the valve core. A channel for the air flow to flow into the purifying materials is provided on the abutment plate.

[0012] Two wire meshes are provided at intervals inside the shell. The two wire meshes divide the internal space of the shell into a first space, a second space, and a third space in sequence. The purifying materials include a first filtering material arranged in the first space, an absorption substance arranged in the second space and capable of chemically reacting with the halogen-containing gas, and a second filtering material arranged in the third space.

[0013] Both the first filtering material and the second filtering material are glass wool, and the absorption substance is solid alkali particles.

[0014] The first connection seat, the connection ring, and the second connection seat are welded together, and the second connection seat, the valve seat, the shell, and the end cover are sequentially thread-sealed.

[0015] Compared with the prior art, the present invention has the following advantages:

[0016] 1. While relieving pressure, the present invention keeps the cavity chamber of the excimer laser resonator free from pollution and highly safe.

[0017] 2. When discharging harmful gases, the present invention eliminates the harm to the staff, and at the same time does not affect the working environment or pollute the air.

[0018] 3. The bursting disc device, one-way safety valve and absorption device of the present invention are connected in sequence, combining the three modules of pressure protection, one-way gas discharge and harmful substance absorption into a whole to achieve a more efficient and coordinated effect. Integrating the three modules reduces the floor area while achieving multi-functional problem-solving, with a small volume and low cost.

[0019] 4. The present invention can adjust the opening pressure of the one-way safety valve according to the strength of the return spring, which can reduce the waste of working gas.

Description of the Drawings

[0020] Figure 1 is a perspective view of the present invention;

[0021] Figure 2 is an exploded view of the present invention;

[0022] Figure 3 is a cross-sectional view of the present invention.

Detailed Embodiment

[0023] The present invention will be further described below with reference to the drawings:

[0024] Such as Figures 1 to 3As shown, a pressure protection and gas treatment device for an excimer laser includes a bursting disc device 1 whose one end can communicate with the resonator cavity of the excimer laser. In this embodiment, the specification of the bursting disc device 1 is 0.7 Mpa, and the working gases of the corresponding excimer laser are gases such as XeCL and ArF. Once the working gas pressure in the resonator cavity of the excimer laser is greater than 0.7 Mpa, the diaphragm 14 of the bursting disc device 1 will rupture to relieve pressure, and the gas will leak and flow to the one-way safety valve 2 connected to the other end of the bursting disc device 1. The working gas will push open the one-way safety valve 2 and enter the absorption device 3 connected to the one-way safety valve 2 and be discharged. The one-way safety valve 2 allows the gas to flow unidirectionally, preventing external air from flowing back into the excimer laser cavity and keeping the inside of the laser cavity clean and pollution-free. The absorption device 3 purifies and absorbs the leaked halogen-containing gas, making the gas discharged through the exhaust port 4 of the absorption device 3 harmless to humans and the environment. In practice, when the diaphragm 14 of the bursting disc device ruptures, the bursting disc device 1 needs to be replaced. However, the excimer laser is protected from pressure, and the leaked gas is purified. In this embodiment, the opening pressure of the one-way safety valve 2 is 0.2 Mpa, that is, when the diaphragm 14 ruptures and discharges the gas in the resonator cavity of the laser, when the air pressure in the cavity drops below 0.2 Mpa, the one-way safety valve 2 closes, preventing the entry of external air.

[0025] As Figures 1 to 3 shown, the bursting disc device 1 includes a first connection seat 11, a connection ring 13, a diaphragm 14 and a second connection seat 12. The diaphragm 14 is fixed inside the connection ring 13. The connection ring 13 is arranged between the first connection seat 11 and the second connection seat 12. The first connection seat 11, the connection ring 13 and the second connection seat 12 are welded together. One end of the first connection seat 11 is provided with an air inlet 15 communicating with the resonator cavity of the excimer laser. The second connection seat 12 is provided with an air outlet 16 for the air flow to pass through when the diaphragm 14 ruptures. The air outlet 16 is connected to the one-way safety valve 2.

[0026] As Figures 1 to 3As shown in the figure, the one-way safety valve 2 includes a valve seat 21. One end of the valve seat 21 is connected to the air outlet 16 on the second connection seat 12, and the other end is fixedly connected to the absorption device 3. A valve port 22 is provided in the valve seat 21. At the position of the valve port 22, there is a valve head 23 that can close the valve port 22 and can open the valve port 22 under the pushing of gas at a set pressure. The valve head 23 includes a valve core 231 that cooperates with the valve port 22 and a return spring 232 that pushes the valve core 231. A sealing ring 24 is provided between the valve core 231 and the edge of the valve port 22. When the air pressure in the resonator cavity of the excimer laser is greater than 0.7 Mpa, the diaphragm 14 ruptures, and the gas in the cavity enters the valve seat 21 through the air inlet 15 and the air outlet 16. The gas pushes open the valve core 231, and the return spring 232 is compressed. Then the gas flows out through the gap between the valve core 231 and the valve port 22 and enters the absorption device 3. After being purified in the absorption device 3, it is discharged to the external atmosphere through the exhaust port 4, without causing harm to the environment and the human body.

[0027] As Figure 3 shown in the figure, the absorption device 3 includes a housing 31. One end of the housing 31 is connected to the valve seat 21. The other end of the housing 31 is provided with an end cover 32, and the exhaust port 4 is provided on the end cover 32. In this example, the second connection seat 12, the valve seat 21, the housing 31, and the end cover 32 are sequentially threadedly and hermetically connected, which is convenient for assembly and installation. The whole device is the rupture disk device 1, the one-way safety valve 2, and the absorption device 3 in sequence. The three modules of pressure protection, one-way gas discharge, and harmful substance absorption are integrated into a whole, with a compact structure, reducing space and cost while realizing multiple functions to solve problems.

[0028] As Figure 3 shown in the figure, purification materials are provided in the housing 31. One end of the housing 31 connected to the valve seat 21 is provided with a abutment plate 34. One end of the return spring 232 abuts against the abutment plate 34, and the other end abuts against the valve core 231. The abutment plate 34 is provided with a channel 35 through which air flow can flow into the purification materials.

[0029] As Figure 2 and Figure 3As shown in the figure, two wire meshes 36 are provided at intervals inside the housing 31. The two wire meshes 36 divide the internal space of the housing 31 into a first space 37, a second space 38, and a third space 39 in sequence. The purification material 33 includes a first filtering material 331 disposed in the first space 37, an absorption substance 332 disposed in the second space 38 and capable of chemically reacting with the halogen-containing gas, and a second filtering material 333 disposed in the third space 39. Both the first filtering material 331 and the second filtering material 333 are glass wool, and the absorption substance 332 is solid alkali particles. When the depressurized gas enters the absorption device 3 through the one-way safety valve 2, the gas is first filtered and purified by the glass wool in the first space 37, and then enters the solid alkali particles in the second space 38. The halogen-containing gas in the gas will chemically react with the solid alkali particles, and the harmful halogen gas is absorbed. The remaining safe gas is discharged through the exhaust port 4. When the gas in the cavity is depressurized and lower than 0.2 MP, the return spring 232 causes the valve core 231 to return to its original position, and the valve core 231 closes the valve port 22, so that external air will not flow back from the exhaust port 4 to contaminate the working gas in the excimer laser cavity.

[0030] The present invention provides an integrated and portable gas pressure safety relief and harmful gas treatment and emission solution. The above has described this embodiment in detail with reference to the accompanying drawings. However, the present invention is not limited to the above embodiment. Within the scope of knowledge possessed by those of ordinary skill in the technical field, various changes can be made without departing from the gist of the present invention.

Claims

1. An excimer laser pressure protection and gas treatment device, characterized in that: It includes a rupture disk device (1) with one end capable of being connected to the resonator cavity of an excimer laser. At the other end of the rupture disk device (1), there is a one-way safety valve (2) that can be pushed open by the working gas leaking from the resonator cavity when the diaphragm (14) of the rupture disk device (1) ruptures. An absorption device (3) capable of purifying the leaked working gas is connected to the one-way safety valve (2), and an exhaust port (4) for discharging the purified gas is provided on the absorption device (3).

2. The excimer laser pressure protection and gas treatment device according to claim 1, wherein: The rupture disk device (1) includes a first connection seat (11), a connection ring (13), a diaphragm (14), and a second connection seat (12). The diaphragm (14) is fixed inside the connection ring (13). The connection ring (13) is arranged between the first connection seat (11) and the second connection seat (12). One end of the first connection seat (11) is provided with an air inlet (15) connected to the resonator cavity of the excimer laser. The second connection seat (12) is provided with an air outlet (16) for the airflow to pass through when the diaphragm (14) ruptures. The air outlet (16) is connected to the one-way safety valve (2).

3. The excimer laser pressure protection and gas treatment device according to claim 2, wherein: The one-way safety valve (2) includes a valve seat (21). One end of the valve seat (21) is connected to the air outlet (16) on the second connection seat (12), and the other end is fixedly connected to the absorption device (3). A valve port (22) is provided inside the valve seat (21). At the position of the valve port (22), there is a valve head (23) that can close the valve port (22) and can open the valve port (22) under the pushing of a gas at a set pressure. The valve head (23) includes a valve core (231) that cooperates with the valve port (22) and a return spring (232) that pushes the valve core (231).

4. The excimer laser pressure protection and gas treatment device according to claim 3, characterized in that: A sealing ring (24) is provided at the edge position between the valve core (231) and the valve port (22).

5. The excimer laser pressure protection and gas treatment device according to claim 3, characterized in that: The absorption device (3) includes a housing (31). One end of the housing (31) is connected to the valve seat (21). At the other end of the housing (31), there is an end cover (32). The exhaust port (4) is provided on the end cover (32). Purifying materials are provided inside the housing (31).

6. The excimer laser pressure protection and gas treatment device according to claim 5, wherein: One end of the housing (31) connected to the valve seat (21) is provided with a abutment plate (34). One end of the return spring (232) abuts against the abutment plate (34), and the other end abuts against the valve core (231). A channel (35) for the airflow to flow into the purifying materials is provided on the abutment plate (34).

7. The excimer laser pressure protection and gas treatment device according to claim 6, characterized in that: Two wire meshes (36) are spaced inside the housing (31). The two wire meshes (36) divide the internal space of the housing (31) into a first space (37), a second space (38), and a third space (39) in sequence. The purifying materials include a first filtering material (331) provided in the first space (37), an absorption substance (332) provided in the second space (38) and capable of chemically reacting with the halogen-containing gas, and a second filtering material (333) provided in the third space (39).

8. The excimer laser pressure protection and gas treatment device according to claim 7, characterized in that: Both the first filtering material (331) and the second filtering material (333) are glass wool.

9. The excimer laser pressure protection and gas treatment device according to claim 8, characterized in that: The absorption material (332) is solid alkali particles.

10. The excimer laser pressure protection and gas treatment device according to claim 6, characterized in that: The first connecting seat (11), the connecting ring (13) and the second connecting seat (12) are welded together. The second connecting seat (12), the valve seat (21), the housing (31) and the end cap (32) are sequentially connected by thread sealing.

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