Device and method for contactless transfer of carriers

Abstract

An apparatus for contactless transport of a carrier is provided herein. The apparatus includes a carrier that is a substrate carrier or a reticle carrier. The apparatus includes a linear reluctance motor for providing both non-contact suspension and non-contact driving of the carrier. The linear reluctance motor includes one or more linear stators that define a transport track for the carrier. The linear reluctance motor includes a mover attached to the carrier. The linear reluctance motor includes a set of electromagnets and a first magnetic material. The one or more linear stators include a set of electromagnets and the mover includes a first magnetic material, or the mover includes a set of electromagnets and the one or more linear stators include a first magnetic material. The apparatus includes a controller connected to a set of electromagnets.

Description

Technical Field

[0001] This application relates to devices and methods for non - contact transfer of a substrate or a mask carrier. The substrate or mask carrier holds a substrate (such as a glass substrate or a semiconductor wafer), or holds a mask for masking a substrate in a deposition process (such as an evaporation process or a sputtering process). The substrate or mask carrier is non - contact suspended by a magnetic levitation force acting on the carrier. The substrate or mask carrier is transferred in a non - contact manner in a vacuum chamber. Background Art

[0002] Techniques for depositing layers on a substrate include, for example, sputter deposition, physical vapor deposition (PVD), chemical vapor deposition (CVD), and thermal evaporation. Coated substrates can be used in a variety of applications and various technical fields. For example, coated substrates can be used in the field of display devices. Display devices can be used to manufacture television screens, computer monitors, mobile phones, other handheld devices, and devices for displaying information, etc. Displays are typically produced by coating stacked layers of different materials on a substrate. The same is true for semiconductor wafer processing.

[0003] To deposit a layer stack, a series arrangement of processing modules can be used. An in - line processing system includes a plurality of processing modules, such as deposition modules and optionally additional processing modules, such as cleaning modules and / or etching modules, where subsequent processing is carried out in the processing modules such that a plurality of substrates can be processed continuously or quasi - continuously in the in - line processing system.

[0004] The substrate can be carried by a carrier (i.e., a holding device for holding the substrate in a vacuum system). A transfer system is typically used to transfer the carrier holding the substrate through the vacuum system. The transfer system can be a magnetic levitation system such that the carrier can be transferred in a non - contact or substantially non - contact manner. The transfer system can be configured to transfer the carrier having a substrate positioned thereon from one processing device to another processing device along one or more transfer paths in the vacuum system.

[0005] Accurately and smoothly transferring the carrier in a vacuum system is a challenge. For example, particles generated due to wear of moving parts can cause deterioration of the manufacturing process. Therefore, it is necessary to reduce or minimize the generation of particles when transferring the carrier in a processing system. In addition, the tasks of configuring, operating, and maintaining a magnetic levitation - based transfer system can be both cumbersome and time - consuming. Moreover, the cost of a magnetic levitation system can be high.

[0006] Therefore, it would be beneficial to provide improved devices and methods for transferring a carrier that overcome at least some of the above problems. Summary of the Invention

[0007] According to an embodiment, a device for non-contact transfer of a carrier is provided. The device includes a carrier that is a substrate carrier or a mask carrier. The device includes a linear reluctance motor for providing both non-contact levitation and non-contact driving of the carrier. The linear reluctance motor includes one or more linear stators that define a transfer track for the carrier. The linear reluctance motor includes a mover connected to the carrier. The linear reluctance motor includes a set of electromagnets and a first magnetic material. One or more of the linear stators include the set of electromagnets and the mover includes the first magnetic material, or the mover includes the set of electromagnets and one or more of the linear stators include the first magnetic material. The device includes a controller connected to the set of electromagnets.

[0008] According to another embodiment, a processing system for processing a substrate is provided. The processing system includes a device for non-contact transfer of a carrier as described herein; the carrier is a substrate carrier. The processing system includes a processing device, such as a deposition source or an inspection device. The linear reluctance motor can be configured to transfer the carrier to a processing position in a non-contact manner. In the processing position, the carrier can be arranged to process a substrate supported by the carrier using the processing device.

[0009] According to another embodiment, a method for non-contact transfer of a carrier is provided. The method includes: controlling at least one electromagnet in a set of electromagnets of a linear reluctance motor. The linear reluctance motor includes one or more linear stators that define a transfer track for the carrier; the carrier is a substrate carrier or a mask carrier. The linear reluctance motor includes a mover connected to the carrier. The linear reluctance motor includes a set of electromagnets and a first magnetic material. One or more of the linear stators include the set of electromagnets and the mover includes the first magnetic material, or the mover includes the set of electromagnets and one or more of the linear stators include the first magnetic material. Controlling at least one electromagnet to generate a magnetic field that interacts with the first magnetic material to provide both a magneto-resistive vertical force and a magneto-resistive driving force acting on the mover.

[0010] Embodiments are also directed to a device for performing the disclosed methods, and the embodiments include device portions for performing each described method aspect. This method aspect can be performed by hardware components, a computer programmed with appropriate software, any combination of the foregoing, or in any other manner. Additionally, embodiments according to the present application are also directed to a method for operating the described device and a method for manufacturing the devices and apparatuses described herein. The method for operating the described device includes method aspects for performing each function of the device. Description of the Drawings

[0011] In order to be able to understand the above features of the present application in detail, the present application briefly summarized above can be described more specifically with reference to the embodiments. The drawings relate to embodiments of the present application and are described as follows:

[0012] Figure 1 Shows a device for non - contact transfer of a carrier according to an embodiment described herein;

[0013] Figure 2 Shows a device for non - contact transfer of a carrier according to an embodiment described herein;

[0014] Figures 3 to 4 Shows the operation of a linear reluctance motor of a device for non - contact transfer of a carrier according to an embodiment described herein;

[0015] Figures 5 to 6 Shows a linear reluctance motor of a device for non - contact transfer of a carrier according to an embodiment described herein, the linear reluctance motor being configured to provide a lateral force based on reluctance;

[0016] Figure 7 Shows a linear reluctance motor of a device for non - contact transfer of a carrier according to an embodiment described herein, the linear reluctance motor being configured for self - centering of the carrier.

[0017] Figures 8 to 10 Shows a track switch for a carrier in a device for non - contact transfer of a carrier according to an embodiment described herein;

[0018] Figures 11 to 13 Shows a device for non - contact transfer of a carrier according to an embodiment described herein, wherein the stator poles and the mover poles have protrusions or openings for providing fine alignment of the carrier;

[0019] Figure 14 Shows a device for non - contact transfer of a carrier according to an embodiment described herein, wherein one or more stators are arranged below the levitating carrier;

[0020] Figures 15 to 16 Shows a processing system for processing a substrate. The processing system includes a device for non - contact transfer of a carrier according to an embodiment described herein;

[0021] Figure 17 Shows an example of a carrier including a slit for receiving a substrate;

[0022] Figure 18 Shows an example of a module or tile including a linear stator arranged according to a pattern;

[0023] Figure 19 Shows an example of a linear stator having inclined stator poles;

[0024] Figures 20 to 21An example of a linear stator having a set of stator poles is shown, the set of stator poles being arranged to provide a reluctance-based angular force for moving a carrier by a certain angle;

[0025] Figure 22 An apparatus for non-contact transfer of a deposition source is shown; and

[0026] Figure 23 An apparatus for non-contact transfer of a robotic arm is shown. Detailed Description

[0027] Reference will now be made in detail to various exemplary embodiments; one or more examples of the various exemplary embodiments are shown in each figure. Each example is provided by way of explanation; each example is not meant to be limiting. For example, features shown or described as part of one embodiment can be used on or in combination with other embodiments to yield another embodiment. The aim of this application is to include such modifications and variations.

[0028] In the following description of the drawings, like reference numerals indicate like components. Only the differences with respect to each embodiment are described. The structures shown in the drawings are not necessarily drawn to scale, but are used to better understand the embodiments.

[0029] As used herein, horizontal directions, orientations, axes, forces, and the like may include deviations of 5 degrees, 10 degrees, or even up to 15 degrees relative to exact horizontality. As used herein, vertical directions, orientations, axes, forces, and the like may include deviations of 5 degrees, 10 degrees, or even up to 15 degrees relative to exact verticality. Concepts such as substantially parallel directions, axes, forces, and the like allow for deviations of 5 degrees, 10 degrees, or even up to 15 degrees relative to a perfectly parallel configuration.

[0030] The carrier as described herein may be a substrate carrier. The substrate may be a thin, flat sheet of material. In this application, the term "substrate" may specifically include substantially non-flexible substrates such as wafers (such as semiconductor wafers), slices of transparent crystals (such as sapphire, etc.), or glass plates. This application is not limited thereto, and the term "substrate" may also include flexible substrates such as rolls or foils. According to the embodiments described herein, the substrate may be made of any material suitable for material deposition. For example, the substrate may be made of a material selected from the group consisting of glass (such as soda-lime glass and borosilicate glass, etc.), metals, polymers, ceramics, composites, carbon fiber materials, semiconductor materials (such as silicon, silicon carbide, or gallium arsenide), or any other material or combination of materials that can be coated by a deposition process.

[0031] The substrate can be a large-area substrate, such as a large-area substrate for display manufacturing. The term "large-area substrate" refers to a substrate with a main surface area of 0.5 square meters or more, particularly 1 square meter or more. In some embodiments, the large-area substrate can be a GEN 4.5 substrate corresponding to a substrate of about 0.67 m 2 (0.73 mx 0.92 m), a GEN 5 substrate corresponding to a substrate of about 1.4 m 2 (1.1 m x 1.3 m), a GEN 7.5 substrate corresponding to a substrate of about 4.29 m 2 (1.95 m x 2.2 m), a GEN 8.5 substrate corresponding to a substrate of about 5.7 m 2 (2.2 m x 2.5 m), and even a GEN 10 substrate corresponding to a substrate of about 8.7 m2 (2.85 m x 3.05 m). Even larger generations, such as GEN 11 and GEN 12 and their corresponding substrate areas, can be implemented similarly. In addition, the substrate thickness can be 0.1 mm to 1.8 mm, particularly about 0.9 mm or less, such as 0.7 mm or 0.5 mm. Alternatively, the substrate can be a wafer, such as a semiconductor wafer. The wafer can have a size (e.g., diameter) of 450 mm or less, particularly 300 mm or less, or even 25 mm or less.

[0032] The substrate carrier described herein can be a vertically oriented substrate carrier, for example, for supporting a large-area substrate, or can be a horizontally oriented substrate carrier, for example, for supporting a wafer.

[0033] The carrier described herein can be a mask carrier. The mask can be used in a deposition process, such as a sputtering process or an evaporation process. The mask is configured to prevent one or more portions of the substrate from receiving deposition material. One or more portions can be shielded or covered by the mask. For example, the mask can be an edge exclusion mask to prevent material deposition on one or more edge regions of the substrate. Alternatively, the mask can carry deposition material. The deposition material can be deposited onto the substrate by bringing the mask and the substrate into contact with each other such that the deposition material is transferred from the mask to the substrate. The mask carrier can be a vertically oriented mask carrier or a horizontally oriented mask carrier.

[0034] In this application, the term "non-contact" can be understood such that the weight (e.g., the weight of the carrier; specifically, the weight of the carrier carrying the substrate or the mask) is not maintained through mechanical contact or mechanical force, but through magnetic force. In other words, the term "non-contact" can be understood as using magnetic force, rather than mechanical force (i.e., contact force), to keep the carrier in a suspended or floating state.

[0035] According to an embodiment, a device for non-contact transfer of a carrier is provided. The device includes a carrier; the carrier is a substrate carrier or a mask carrier. The device includes a linear reluctance motor for providing both non-contact levitation and non-contact driving of the carrier. The linear reluctance motor includes one or more linear stators that define a transfer track for the carrier. The linear reluctance motor includes a mover connected to the carrier. The linear reluctance motor includes a set of electromagnets and a first magnetic material. One or more of the linear stators include a set of electromagnets and the mover includes the first magnetic material, or the mover includes a set of electromagnets and one or more of the linear stators include the first magnetic material. The device includes a controller connected to the set of electromagnets.

[0036] The embodiments described herein provide both non-contact levitation and non-contact driving of a substrate carrier or a mask carrier using a single system, i.e., a linear reluctance motor. Thus, the present application is different from known devices; in known devices, non-contact levitation of the carrier is provided by a magnetic levitation system and non-contact driving of the carrier is provided by a magnetic drive system separate from and independent of the operation of the magnetic levitation system. Relative to such known devices, the present application provides numerous advantages. For example, the dual cost of acquiring and maintaining two separate systems is avoided. In addition, the task of configuring, operating, and maintaining a linear reluctance motor (i.e., a single system) is much simpler compared to performing such tasks with a magnetic levitation system and a magnetic drive system as two separate systems. In addition, the carrier interacting with a single system such as a linear reluctance motor has a simplified design compared to carriers interacting with a magnetic levitation system and a magnetic drive system separately. In addition, the linear reluctance motor occupies less space compared to two separate systems for levitation and driving, resulting in a more compact device. In addition, in some embodiments, the linear reluctance motor can be operated without using permanent magnets. Thus, rare earth materials are not required and problems associated with the use of such materials (such as trade restrictions and transfer issues) are avoided. The embodiments described herein provide several further advantages such as higher uptime and reliability, a reduced number of mounting points, a reduced number of control units (no competing controllers), and increased robustness.

[0037] Figures 1 to 2 A side view of a device 100 for non-contact transfer of a carrier 110 according to an embodiment described herein is shown. The device 100 may include a vacuum chamber 120. The device 100 may be configured to transfer the carrier 110 non-contactingly within the vacuum chamber 120.

[0038] The carrier 110 may be a substrate carrier or a mask carrier. As Figure 1 shown, the carrier 110 may be held and transferred in a vertical direction of the carrier. In other embodiments, the carrier 110 may have a horizontal orientation.

[0039] The device 100 can be configured to transmit the carrier 110 in a non-contact manner. The device 100 can have a transmission track; the carrier 110 is transmitted non-contact along the transmission track. The transmission track can be a horizontal track. The transmission track can be a substantially straight transmission track, or can at least include one or more straight portions along which the carrier 110 can be transmitted non-contact. The transmission track can define a transmission direction 102 (or conveying direction); the carrier 110 is transmitted non-contact along the transmission direction 102. The transmission direction can be a horizontal direction.

[0040] The device 100 includes one or more linear stators 130, such as a plurality of linear stators. For example, depending on the desired length of the transmission track, the device can include 2 or more, 3 or more, 5 or more, or 10 or more linear stators. Alternatively, the device 100 can include one elongated linear stator 130 extending along the entire transmission track. The number of linear stators shown in the figure is exemplary; the present application should not be limited to the number of linear stators shown in this figure.

[0041] The spatial arrangement of one or more linear stators 130 can define a transmission track for the carrier 110. For example, a plurality of linear stators can be arranged one after another to define a transmission track extending along the transmission direction 102. One or more linear stators 130 are configured to remain stationary during the non-contact transmission of the carrier 110 along the transmission track.

[0042] For example, as Figure 2 shown, the linear stator 130 can include a plurality of stator poles 232, such as 2, 4, 6, 8 or more stator poles. The number of stator poles shown in the figure is exemplary; the present application should not be limited to the number of stator poles shown in this figure. The stator poles can be protrusions or teeth, which can protrude towards the carrier 110 and / or towards the mover 140 attached to the carrier. The plurality of stator poles 232 can define at least one comb-like structure. In some embodiments, the linear stator can include two comb-like structures; each comb-like structure has a plurality of stator poles.

[0043] The linear stator as described herein (more specifically, the stator poles of the linear stator) can include a magnetic material (more specifically, a ferromagnetic material) or be made of such a magnetic material. The magnetic material can be a non-permanent, or soft magnetic material. The magnetic material can be a metal, such as electrical steel, silicon steel, ferrite steel, martensitic steel or any other soft magnetic material.

[0044] The device 100 includes a mover 140. The mover 140 (specifically, the mover poles of the mover) can include a magnetic material (such as a ferromagnetic material) or be made of such a magnetic material. The magnetic material can be a non-permanent, or soft magnetic material. The magnetic material can be a metal, such as electrical steel, silicon steel, ferrite steel, martensitic steel or any other soft magnetic material.

[0045] The mover 140 is attached to the carrier 110. The mover 140 can be an elongated non-permanent magnetic material strip disposed at the top portion of the carrier (e.g., substantially along the entire width of the carrier), or the mover 140 can include an elongated non-permanent magnetic material strip disposed at the top portion of the carrier (e.g., substantially along the entire width of the carrier).

[0046] In some embodiments, for example, if the carrier is a substrate carrier for a large-area substrate or a reticle carrier for transporting a reticle for a large-area substrate, then as Figure 1 shown, the carrier 110 can be transported non-contactingly in the vertical direction of the carrier. The mover 140 can be attached at the top portion of the vertically oriented carrier. One or more linear stators 130 or at least a portion thereof can be disposed above the vertically oriented carrier. In other embodiments, the carrier 110 can be transported non-contactingly in the horizontal direction of the carrier, as discussed in more detail below.

[0047] The carrier 110 is configured to be transported non-contactingly along a transport track together with the mover 140 while one or more linear stators 130 remain stationary. During non-contact suspension and / or transport of the carrier 110, the mover 140 faces at least one linear stator 130. When the carrier 110 is transported along the transport track, the mover 140 can face different linear stators 130 respectively.

[0048] As Figure 2 shown, the mover can include a plurality of mover magnetic poles 242, such as 10, 20, 40 or more mover magnetic poles. The mover magnetic poles can be protrusions or teeth that can protrude toward at least one linear stator. The plurality of mover magnetic poles 242 can define a comb-like structure.

[0049] A pitch or spacing can be set between adjacent stator poles 232 of the linear stator 130. The term "adjacent stator poles" (and similarly, "adjacent mover poles") refers to the poles of the same linear stator 130 that are adjacent to each other with respect to the direction defined by the transport track, such as the transport direction 102. The pitch can be the distance extending along the transport track (e.g., a horizontal distance). Similarly, a pitch or spacing can be set between adjacent mover poles 242 of the mover 140. According to an embodiment, a first pitch between adjacent stator poles of the linear stator 130 can be different from a second pitch between adjacent mover poles of the mover 140. Specifically, the ratio of the first pitch to the second pitch can be non-integer (the first pitch is not an integer multiple of the second pitch, and the second pitch is not an integer multiple of the first pitch). The stator poles of the linear stator 130 and the mover poles of the mover 140 can be set according to a p / q configuration. The p / q configuration means that the distance spanned by p consecutive adjacent stator poles of the linear stator 130 (in the transport direction) includes a total of q mover poles of the mover 140. In some embodiments, q can be equal to p + 1 or p - 1. For example, it can be the case where p = 3 and q = 2; or it can be the case where p = 3 and q = 4. In a further example, it can be the case where p = 4 and q = 3.

[0050] According to some embodiments, one or more linear stators 130 include a set of electromagnets. Accordingly, one or more linear stators 130 are active magnetic systems that can provide an adjustable and controllable magnetic field. For example, each stator pole of the linear stator can carry an electromagnet. The electromagnet can include a corresponding coil wound around each stator pole. In such embodiments, the mover 140 may not include an electromagnet. The mover 140 can be a magnetically passive system, where the mover poles are formed of a non-permanent magnetic material on which no electromagnet is mounted.

[0051] Alternatively, according to other embodiments, a set of electromagnets can be part of the mover 140. Accordingly, the mover 140 is an active magnetic system. For example, each mover pole of the mover can carry an electromagnet. The electromagnet can include a corresponding coil wound around each mover pole. In such embodiments, one or more linear stators may not include any electromagnets. One or more linear stators are magnetically passive.

[0052] For the sake of specific illustration, the apparatus 100 will be described below with reference to a configuration in which one or more linear stators 130 are active magnetic systems and the mover 140 is a passive system (i.e., the electromagnets are part of one or more stators). The present application is not limited thereto, and the aspects described herein are also applicable to configurations in which the mover is an active system and one or more linear stators are passive.

[0053] An alternating current can be provided in any of the electromagnets of a set of electromagnets of a linear reluctance motor. Alternatively or additionally, a DC current can be provided in any of the electromagnets. The current (AC and / or DC) carried by the electromagnets can be configured to provide a magnetic field.

[0054] The device 100 can include a controller 150. The controller 150 is connected to a set of electromagnets for controlling the current in the electromagnets.

[0055] The controller described herein can be a single centralized controller or can be a distributed controller that includes multiple individual control units. The controller can include a central processing unit (CPU), memory, and support circuitry such as, for example. For ease of controlling the device, the CPU can be one of any form of general-purpose computer processor that can be used in an industrial environment to control various components and sub-processors. The memory can be coupled to the CPU. The memory or computer-readable medium can be one or more readily accessible memory devices, such as random access memory, read-only memory, floppy disk, hard disk, or any other form of native or remote digital storage. The support circuitry can be coupled to the CPU to support the processor in a conventional manner. The circuitry discussed includes caches, power supplies, frequency circuits, input / output circuits, and related subsystems and the like.

[0056] One or more linear stators 130 that include electromagnets can be provided together with a mover 140 to provide a linear reluctance motor for providing both non-contact levitation and non-contact drive of the carrier 110.

[0057] The linear reluctance motor described herein is a linear motor. The linear motor is configured to provide linear or translational motion of the carrier. The linear motor is not the same as a rotary motor that provides rotary motion. The linear reluctance motor of the device according to the embodiments described herein provides linear motion of the carrier along a transport track.

[0058] The linear reluctance motor described herein is a reluctance motor or reluctance mechanism. In a reluctance motor, the system formed by the (multiple) stator and mover endeavors to reach a state of minimum or at least reduced magnetic reluctance or magnetic force, thereby causing the mover to move. In the linear reluctance motor described herein, the magnetic force acting on the mover to provide levitation and drive of the carrier can result from the interaction between the magnetic field generated by one or more electromagnets mounted on the stator poles and the non-permanent magnetic material forming the mover poles. Reluctance motors are different from other types of electric motors; other types of electric motors such as induction motors (e.g., asynchronous induction motors, or synchronous motors based on the Lorentz force).

[0059] As described herein, a linear reluctance motor includes a first magnetic material; the first magnetic material can be part of one or more linear stators or rotors. The first magnetic material can be understood as part of a linear reluctance motor, and part of the linear reluctance motor interacts with a magnetic field generated by a set of electromagnets as described herein to provide a reluctance-based vertical force and a reluctance-based driving force acting on a carrier. In an embodiment where the set of electromagnets of the linear reluctance motor is part of one or more linear stators, the first magnetic material of the linear reluctance motor can be understood as the magnetic material forming the rotor poles of the rotor as described herein. In an embodiment where the set of electromagnets of the linear reluctance motor is part of the rotor, the first magnetic material of the linear reluctance motor can be understood as the magnetic material forming the stator poles of one or more stators as described herein.

[0060] The first magnetic material of the linear reluctance motor can be a ferromagnetic material. The first magnetic material can be non-permanent, or a soft magnetic material. The magnetic material can be a metal, such as electrical steel, silicon steel, ferrite steel, martensitic steel, or any other soft magnetic material.

[0061] The operating principle of the linear reluctance motor is as Figure 3 shown; Figure 3 Part of the linear stator 130 and the rotor 140 are marked in a side view. For ease of display, the carrier 110 is not shown. Additional linear stators can be provided (e.g., as Figure 1 and Figure 2 shown), and the following discussion also applies to these additional linear stators.

[0062] For the sake of specific illustration, but not limited thereto, Figure 3 the linear stator 130 shown has six consecutive stator poles numbered 331 to 336. Each stator pole has an electromagnet mounted thereon, and these six corresponding electromagnets are numbered 381 to 386. The electromagnets 381 to 386 are controlled by a controller 150.

[0063] Figure 3 Part of the rotor 140 is further shown. The rotor 140 includes a plurality of rotor poles, some of which are shown in Figure 3 and marked 341 to 346. The pitch between adjacent rotor poles is different from the pitch between adjacent stator poles of the linear stator 130; in the illustrative example, the pitch between adjacent rotor poles is greater than the pitch between adjacent stator poles of the linear stator 130.

[0064] In Figure 3 the example shown, two of the electromagnets (i.e., 381 and 384) are based on as Figure 3The closed loop shown schematically is energized to generate a magnetic field 390 or magnetic flux. The electromagnets 381 and 384 can be controlled by the controller 150 to generate the magnetic field 390. The magnetic field 390 can extend through two corresponding stator poles 331 and 334 on which the two electromagnets 381 and 384 are mounted. The magnetic field 390 can further extend through the mover pole 342 closest to the stator pole 331 and the mover pole 344 closest to the stator pole 334.

[0065] As described herein, the mover poles can include a non-permanent magnetic material such as a ferromagnetic material, or the mover poles can be made of a non-permanent magnetic material such as a ferromagnetic material. The magnetic field 390 interacts with the non-permanent magnetic material such that a magnetic force is applied to the mover 140. The magnetic force causes the mover 140 and the carrier 110 attached to the mover 140 to move towards the position of minimum magnetic resistance or minimum magnetic drag force. In other words, a non-contact force is applied to the mover 140 to minimize or at least reduce the magnetic resistance or magnetic drag force of the system. The force discussed is an attractive force. Since the magnetic resistance is smaller when the vertical distance between the mover 140 and the linear stator 130 decreases, an upward force (i.e., a magnetic levitation force) is applied to the mover 140. In addition, to reduce the magnetic resistance, the system also strives to move towards a position that minimizes the horizontal distance between, for example, the stator pole 334 and the mover pole 344. Therefore, the system aims to achieve a configuration in which the stator pole 334 and the mover pole 344 are aligned. In this document, the alignment of two poles (one stator pole and one mover pole) can be understood as the two poles facing each other such that there is no horizontal offset between the two poles. In Figure 3 In the example shown, the mover pole 344 close to the stator pole 334 will strive to align with the stator pole 334. Therefore, the non-contact force causes the mover 140 to move horizontally along the transport track; that is, in addition to the magnetic levitation force, a driving force is also provided.

[0066] In summary, the linear reluctance motor provides two forces acting on the carrier; namely, a vertical force and a driving force, where the vertical force is a levitation force that levitates the carrier non-contactingly in this example and the driving force is to convey the carrier along the transport track. Both of these forces are forces based on magnetic reluctance.

[0067] According to the embodiments described herein, the controller can be configured to control at least one electromagnet, or at least two electromagnets, in a set of electromagnets to generate a magnetic field that interacts with the first magnetic material of the linear reluctance motor to provide both a magnetic-reluctance-based vertical force and a magnetic-reluctance-based driving force acting on the mover.

[0068] The magnetoresistance-based force is the force generated by a linear magnetoresistive motor. The magnetoresistance-based force is the force generated by the interaction between the magnetic field generated by at least one electromagnet of the linear magnetoresistive motor and a non-permanent first magnetic material forming, for example, a mover pole. The magnetoresistance-based force can be understood as a magnetic force acting on a carrier, which is generated by a system composed of one or more linear stators and a mover of a linear magnetoresistive motor as described herein striving to reach a state of minimum or at least reduced magnetoresistance. The magnetoresistance-based force is an attractive force.

[0069] The magnetoresistance-based vertical force acting on the mover extends in the vertical direction. The magnetoresistance-based vertical force can be a magnetic levitation force (i.e., an upward force that lifts the carrier in the case where, for example, one or more linear stators as shown Figure 3 are arranged above the carrier). In other examples, for example, in the case of a device where one or more linear stators as shown Figure 14 are arranged below the carrier, the magnetoresistance-based vertical force can be a downward force. In this case, the magnetoresistance-based vertical force can pull the carrier downward. One or more permanent magnets providing carrier suspension can be included in the linear magnetoresistive motor, and the downward magnetoresistance-based vertical force can compensate for the suspension in a controllable manner. By controlling the downward magnetoresistance-based vertical force, the vertical position of the carrier can be controlled.

[0070] The magnetoresistance-based driving force can extend along the horizontal direction. The magnetoresistance-based driving force can extend along the conveying direction.

[0071] Both the magnetoresistance-based vertical force and the magnetoresistance-based driving force are controllable forces. The forces in question can be controlled by controlling one or more (specifically, two or more) electromagnets.

[0072] Return Figure 3 , after the mover 140 has reached a position of maximum alignment, for example, between the stator pole 334 and the mover pole 344, additional electromagnet pairs of the linear stator 130 can be activated in a similar manner; thus, the conveying movement of the mover 140 along the linear stator 130 can be continued. For example, under the control of the controller 150, the electromagnets 381 and 384 can be activated first, then the electromagnets 383 and 386, and then the electromagnets 382 and 385. That is, under the control of the controller, different electromagnets can be turned on and off. In each case, the magnetoresistance-based driving force is applied to the mover 140 to align or nearly align at least one corresponding mover pole with at least one corresponding stator pole, thereby reducing or minimizing the magnetoresistance. At the same time, the magnetoresistance-based vertical force levitation force levitates the mover 140 in a non-contact manner, also to reduce or minimize the magnetoresistance.

[0073] Since the ratio of the pitch between adjacent stator magnetic poles to the pitch between adjacent mover magnetic poles is non-integer, the mover 140 will not get stuck at the stable equilibrium position where all mover magnetic poles are aligned with all stator magnetic poles. The non-contact transfer movement of the mover 140 can be continued by providing additional linear stators 130 one after another, thereby defining a transfer track. A non-contact driving force can be provided to transfer the mover 140 and the carrier 110 any distance along the transfer track.

[0074] The current carried by the electromagnets can be understood as the current that is guided through the coils of the electromagnets to generate a magnetic field. The electromagnets described herein can carry a total current. The total current can be supplied to the electromagnets by one or more power supplies of the device 100. The total current can be a superposition or sum of a first current and a second current. The first current and the second current can be controlled separately by a controller. The first current can be a constant current or a DC current. For example, the first current can have a magnitude ranging from -30 A to +30 A, specifically from -20 A to +20 A, for example approximately + / -10 A. The second current can be an AC current, such as an AC current having a sinusoidal behavior or other time-dependent behavior. The second current can have a magnitude ranging from -30 A to +30 A, specifically from -20 A to +20 A, for example approximately + / -10 A. Which specific magnitude of the first / second current is appropriate can depend on which controller and / or amplifier is used. By controlling the first current (e.g., using the controller 150), the magnitude of the magnetoresistance-based vertical force acting on the mover 140 can be controlled, and thus the vertical position of the carrier 110 can be controlled. The first current can be referred to as the suspension control current. By controlling the second current (e.g., using the controller 150), the magnitude of the magnetoresistance-based driving force acting on the mover 140 can be controlled, and thus the horizontal position of the carrier 110 relative to the transfer direction can be controlled. The second current can be referred to as the drive control current.

[0075] In order to provide a magnetic field 390 as Figure 3 shown, two electromagnets 381 and 384 mounted to the stator magnetic poles 331 and 334 can carry drive control currents having the same phase (e.g., both electromagnets are at 0 degrees). Similarly, the drive control currents carried by a pair of electromagnets 382 and 385 can also have the same phase (e.g., 120 degrees). The latter phase can be different from the phase of the drive control currents of the electromagnets 381 and 384. Similarly, the drive control currents carried by the electromagnets 383 and 386 can have the same phase (e.g., 240 degrees), which is different from the two phases associated with the electromagnet pairs 381 / 384 and 382 / 385. Providing pairs of electromagnets with drive control currents, where the phase is the same within each pair and different between different pairs, is beneficial for providing non-contact transfer of the mover 140 along the linear stator 130. The phase shift between different electromagnet pairs can be used to provide horizontal movement of the mover 140 along the transfer track.

[0076] Although Figure 3 An example of a linear stator showing six consecutive stator poles and six corresponding electromagnets mounted thereon is shown, but the linear stator according to the present application may include any number of stator poles. For example, the linear stator may include 2K consecutive stator poles and 2K corresponding electromagnets. For each i, a pair of electromagnets composed of the i-th electromagnet and the (K + i)-th electromagnet may have the drive control current of the same i-th phase, thus providing a total of K phases. The K phases may be different from each other.

[0077] As described herein, each electromagnet may include a coil wound around a corresponding pole. Different winding schemes for winding the coil may be provided. For example, referring to Figure 3 , the coils of the electromagnets 381, 382, and 383 may be wound from top to bottom (clockwise), while the coils of the electromagnets 384, 385, and 386 may be wound from bottom to top (counterclockwise).

[0078] Between the electromagnets of adjacent stator poles of the linear stator (e.g., between the electromagnets 381 and 382 shown in Figure 3 ), one or more permanent magnets may be provided. Such permanent magnets may reduce magnetic short circuits (Halbach arrays). In addition, linearization of the magnetic field may be provided. In addition, energy losses and heat generation may be reduced. In addition, static weight compensation of the carrier may be achieved.

[0079] According to the embodiments described herein, the magnetoresistance-based vertical force and the magnetoresistance-based driving force may be separately controllable.

[0080] A set of electromagnets of a linear magnetoresistive motor may include a first electromagnet. The controller may be configured to control a first current in the first electromagnet to control the magnitude of the magnetoresistance-based vertical force. The controller may be configured to control a second current in the first electromagnet to control the magnitude of the magnetoresistance-based driving force.

[0081] A set of electromagnets of a linear magnetoresistive motor may include a first electromagnet and a second electromagnet, such as the electromagnets 381 and 384 in Figure 3 . The controller may be configured to control a first current in the first electromagnet and another first current in the second electromagnet to control the magnitude of the magnetoresistance-based vertical force. The controller may be configured to control a second current in the first electromagnet and another second current in the second electromagnet to control the magnitude of the magnetoresistance-based driving force.

[0082] The controller may be configured to control a first subset of a set of electromagnets (e.g., Figure 3the electromagnets 381 and 384 therein) to non - contactlessly transport the carrier from the first position to the second position along the transport direction by a magnetoresistance - based driving force. The controller may be configured to control a second subset of a set of electromagnets (e.g., Figure 3 the electromagnets 383 and 386 therein) to non - contactlessly transport the carrier from the second position to the third position along the transport direction by a magnetoresistance - based driving force.

[0083] Figure 4 shows another example of the operating state of the linear magnetoresistive motor described herein. Similar to Figure 3 that, Figure 4 the linear stator 130 and the mover 140 are marked in a side view. The carrier 110 to which the mover 140 is attached is not shown. As described herein, additional linear stators may be provided. For ease of representation, in Figure 4 the individual electromagnets mounted to the stator poles 331 to 336 of the linear stator 130 are not shown, but the individual electromagnets to be mounted to the stator poles 331 to 336 of the linear stator 130 are considered to be similar to Figure 3 the settings. Under the control of the controller 150, the electromagnets mounted to the stator pole 331 and the electromagnets mounted to the stator pole 334 may be excited according to a closed loop schematically shown in Figure 4 to provide a magnetic field 490. The magnetic flux passes through the stator pole 331 and the stator pole 334, and through the mover poles 342 and 344. The mover 140 may be set in a position such that the mover pole 342 is aligned with the stator pole 331 and the mover pole 344 is aligned with the stator pole 334, as Figure 4 shown. Since the poles in question are aligned with each other, the magnetic field 490 does not provide a magnetoresistance - based driving force that causes the mover 140 (and the carrier attached to the mover) to move horizontally. The magnetic field 490 only provides a magnetoresistance - based vertical force for levitating the mover 140 (and the carrier). The magnetic field 490 may be set to maintain the carrier at a target position; specifically, a target position relative to the transport direction 102.

[0084] The apparatus 100 may include one or more sensors for measuring or detecting the position of the carrier 110 during non - contact levitation and / or transport. For example, returning to Figure 2 , the sensors 270 may be disposed on opposite sides of each linear stator 130. Each sensor 270 may be configured to measure the position of the carrier 110; the position of the carrier 110 may include the vertical position and / or the horizontal position of the carrier 110, e.g., the horizontal position relative to the transport direction. The sensors 270 may be Hall - effect - based sensors, optical sensors, ultrasonic sensors, capacitive sensors, eddy - current sensors, etc. Each sensor 270 may be connected to the controller 150.

[0085] The sensor 270 can be a high-precision sensor with a sensor resolution of 100 μm or less (specifically, 10 μm or less). Therefore, the carrier can be positioned vertically and / or horizontally at the target position with high precision.

[0086] The controller 150 can use the position data provided by at least some of the sensors 270 to control at least some of the electromagnets to set the carrier 110 at the target vertical position and / or set the carrier at the target horizontal position, such as the horizontal position relative to the transport direction. For example, the position data provided by two sensors can be combined to determine the vertical position (levitation position) of the mover 140 and the horizontal position (drive position) of the mover 140 along the transport track. Based on the levitation position and drive position of the mover, under the control of the controller, current is supplied to one or more electromagnets to transport the carrier and / or position the carrier at the target position. In one example, the levitation position can be controlled by controlling the sum of the magnitudes of the respective currents in the electromagnets. The drive position can be controlled by controlling the phase of the respective currents. In another example, the control of the levitation position and drive position is based on d / q control, where the q component controls the drive position and the d component controls the levitation position.

[0087] The device according to the embodiments described herein can include one or more sensors for sensing the position of the carrier relative to the transport direction of the carrier. The controller can be configured to control the magnetoresistance-based driving force in response to signals provided by the one or more sensors to position the carrier at the target position relative to the transport direction. The magnetoresistance-based driving force can be configured to align the carrier along the transport track or the transport direction. By separately controlling the magnitude and phase angle (even if the magnitude is mainly determined by the weight of the carrier and thus its adjustment range is limited), and controlling the phase angle between the current and the mechanical mover position, multi-stage and continuous variable acceleration, acceleration, speed, and ultimately the horizontal position can be adjusted and implemented.

[0088] As described herein, the linear stator 130 can include a comb-like structure having a plurality of teeth forming the stator poles of the linear stator 130. According to an embodiment, as Figures 5 to 6 shown, the linear stator 130 can include two such comb-like structures arranged side by side in a direction transverse to the conveying direction 102.

[0089] Figure 5 A front view showing an example of the linear stator 130 including a first portion 532 and a second portion 534. In Figure 5In this case, the transmission direction 102 is perpendicular to the drawing plane. The first part 532 and the second part 534 face each other. Each of the first part 532 and the second part 534 may include or may be a corresponding comb structure; the corresponding comb structure has a plurality of stator magnetic poles forming the teeth of the comb structure. The number of stator magnetic poles of the first part 532 may be equal to the number of stator magnetic poles of the second part 534. Each stator magnetic pole of the first part 532 may face a corresponding stator magnetic pole of the second part 534. Electromagnets may be mounted to the stator magnetic poles of the first part 532 and the stator magnetic poles of the second part 534. The electromagnets may be controlled by the controller 150. In Figure 5 In the front view, only the electromagnets 582 and 584 at the corresponding front ends of the first part 532 and the second part 534 are shown.

[0090] The first part 532 and the second part 534 may be offset from each other with respect to the lateral direction 502. The lateral direction 502 may be transverse to (specifically, perpendicular to) the conveying direction 102. The lateral direction may be a horizontal direction.

[0091] The transmission track described herein may be defined by Figure 5 and Figure 6 the linear arrangement of the linear stator 130 of the type shown. Thus, a single transmission track is formed by a double row of corresponding comb structures.

[0092] Figure 6 Show Figure 5 a top view of the linear stator 130. The first part 532 may include a first comb structure having a plurality of stator magnetic poles. The electromagnet 582 may be mounted to each stator magnetic pole of the first part 532. The second part 534 may include a second comb structure having a plurality of stator magnetic poles. The electromagnet 584 may be mounted to each stator magnetic pole of the second part 534. Two sensors 270 may be provided at opposite ends of the first part 532. Two sensors 270 may be provided at opposite ends of the second part 534. Figure 6 The number and spatial arrangement of the sensors 270 in

[0093] By controlling the magnetic fields generated by at least one electromagnet 582 of the first part 532 and / or at least one electromagnet 584 of the second part 534, a magnetic field can be provided that provides a magnetoresistive lateral force acting on the mover 140. The lateral force can be understood as a force acting in the lateral direction 502. The magnetoresistive lateral force stems from the fact that the system endeavors to reduce or minimize the magnetoresistance. For example, the electromagnets can be controlled such that at least one of the electromagnets in the first part 532 generates a relatively strong magnetic field. Thus, if the mover 140 moves in the lateral direction 502 towards the first part 532, the magnetoresistance decreases. An attractive force is applied to the mover 140 (and the carrier 110) to move the mover 140 towards the first part 532.

[0094] Thus, by controlling at least one electromagnet of the first part 532 and / or at least one electromagnet of the second part 534, the carrier 110 can be positioned non - contactingly at a target position relative to the lateral direction 502. Lateral alignment of the carrier 110 can be provided. The lateral alignment can be provided during the conveyance of the carrier or during the rest of the carrier. For example, at least one sensor 270 can detect the position of the carrier 110 (e.g., the position relative to the lateral direction 502) and transmit position data related to the position of the carrier 110 to the controller 150. Based on the position data, the controller 150 can control one or more electromagnets to position the carrier 110 at a target position relative to the lateral direction 502. As described above, the sensor 270 can be a high - precision sensor. For example, the sensor 270 can have a sensor resolution of 10 μm or less. Thus, it is possible to position the carrier 110 with a high precision of, for example, 100 μm or less (specifically, 10 μm or less) relative to the conveyance direction 102. Additionally or alternatively, the sensor 270 can be a high - resolution sensor relative to the lateral direction 502, resulting in stable position control in the lateral direction 502 within an accuracy of 100 μm or less. In other embodiments, the movement of the mover 140 in the lateral direction 502 can be used to switch the mover 140 between the first part 532 and the second part 534 within a limited time (e.g., 1 second or less). The sensor 270 can thus have an accuracy of 100 μm or less relative to the lateral direction 502. In some cases, for example, when only the switch between the first part 532 and the second part 534 is implemented and no closed - position control for any position therebetween is required, the measurement regarding the lateral direction 502 can be omitted.

[0095] According to embodiments described herein, at least one of one or more linear stators of a linear magnetoresistive motor can include a first comb - like structure and a second comb - like structure. The first comb - like structure can have N teeth forming a first stator magnetic pole, and the second comb - like structure can have N teeth forming a second stator magnetic pole. Each tooth of the first comb - like structure can face a corresponding tooth of the second comb - like structure.

[0096] According to the embodiments described herein, a set of electromagnets of a linear reluctance motor may include one or more first electromagnets and one or more second electromagnets. The one or more first electromagnets may face the one or more second electromagnets relative to a lateral direction. A controller may be configured to control the one or more first electromagnets and / or the one or more second electromagnets to provide a reluctance-based lateral force acting on a mover. The reluctance-based lateral force may be provided by a magnetic field generated by the one or more first electromagnets and / or the one or more second electromagnets, wherein the magnetic field interacts with a first magnetic material of the linear reluctance motor to provide the reluctance-based lateral force. The reluctance-based lateral force may be configured to position a carrier at a target position relative to the lateral direction.

[0097] According to the embodiments described herein, a device may include one or more sensors for sensing the position of a carrier relative to a lateral direction. The controller may be configured to control the reluctance-based lateral force in response to signals provided by the one or more sensors to position the carrier at a target position relative to the lateral direction.

[0098] Figure 7 Shows another example of the linear reluctance motor described herein. Different from Figure 5 and Figure 6 the example shown, the linear stator 130 may include a single comb structure. The transfer track may be defined by a linear arrangement (i.e., a single row of corresponding comb structures) of one or more linear stators 130 of the type shown in Figure 7 Figure 7 The linear reluctance motor shown in Figure 7 may be a self-centering system relative to the lateral direction 502. As shown, the width of the mover magnetic pole 242 relative to the lateral direction 502 may be greater than the width of the stator magnetic pole 232 of the linear stator 130 relative to the lateral direction 502. Given the larger width of the mover magnetic pole 242, the magnetic force acting on the mover 140 to reduce or minimize reluctance pulls the mover magnetic pole 242 towards the center of the stator magnetic pole 232 (relative to the lateral direction 502), as shown by the arrows in Figure 7 If there is an offset between the mover magnetic pole 242 and the stator magnetic pole 232 relative to the lateral direction 502 (where in

[0099] the mover 140 is too far to the left or too far to the right of the stator magnetic pole 232), the magnetic lateral force will push the mover magnetic pole 242 back towards the center line of the stator magnetic pole 232. A self-centering system may be provided. Figure 8 the top view of Figure 9 and

[0100] ​A first transfer track may be defined by a first linear arrangement of linear stators 130a. Each linear stator 130a may be any linear stator 130 as described herein. In some embodiments, the linear stator 130a may be a self-centering system as described herein. The first transfer track or at least a portion thereof may extend along the transfer direction 102. The carrier 110 may be levitated and transferred non-contactly along the first transfer track by a first linear reluctance motor; the first linear reluctance motor may be operated in the manner described herein.

[0101] A second transfer track may be defined by a second linear arrangement of linear stators 130b. Each linear stator 130b may be any linear stator 130 as described herein. In some embodiments, the linear stator 130b may be a self-centering system as described herein. The second transfer track or at least a portion thereof may extend along the transfer direction 102. The carrier 110 may be levitated and transferred non-contactly along the second transfer track by a second linear reluctance motor; the second linear reluctance motor may be operated in the manner described herein.

[0102] The first transfer track and the second transfer track may be two separate and independently operable tracks for transferring the carrier 110 in a vacuum chamber. When transferring the carrier 110 on the first transfer track, the electromagnets of the second transfer track may not participate in the transfer of the carrier, or may not even be turned on first. Vice versa, when transferring the carrier on the second transfer track, the electromagnets of the first transfer track may not participate in the transfer of the carrier, or may not even be turned on.

[0103] The first transfer track and the second transfer track may be spaced apart from each other in the track switching direction. The track switching direction may be the lateral direction 502 as described herein.

[0104] The apparatus 100 may include one or more track-switching linear stators 130c. The one or more track-switching linear stators 130c may be disposed between the first transfer track and the second transfer track; for example, in a region where track switching of the carrier is contemplated. The track-switching linear stator 130c may have the same design as any linear stator 130 as described herein. In some embodiments, the track-switching linear stator 130c may be a self-centering system as described herein. The apparatus 100 may be configured to perform track switching of the carrier 110 from the first transfer track to the second transfer track and / or from the second transfer track to the first transfer track under the control of the controller 150. The track switching may be performed under the control of the controller 150.

[0105] Performing the track switching may include moving the carrier 110 from the first transfer track to an intermediate position between the first transfer track and the second transfer track. The intermediate position is as Figure 8As shown by the dashed line. In the intermediate position, the carrier is magnetically levitated by one or more track-switching linear stators 130c. A magnetic field can be provided by activating one or more electromagnets of one or more track-switching linear stators 130c to perform the movement from the first transfer track to the intermediate position, where the magnetic field provides a first magnetic track-switching force to push the mover 140 to move from the first transfer track to the intermediate position. The first magnetic track-switching force can be a force along the track-switching direction; the track-switching direction can be the lateral direction 502. The first magnetic track-switching force can result from the fact that the stator / mover system endeavors to minimize or at least reduce the magnetic reluctance. The track-switching movement is based on a principle similar to the lateral alignment of the carrier described herein. Figure 9 Shows the carrier 110 during the movement from the first transfer track to the intermediate position.

[0106] Performing the track-switching can include moving the carrier 110 from the intermediate position to the second transfer track. After the movement, the carrier is set on the second transfer track, as Figure 8 shown by the dashed line. The movement from the intermediate position to the second transfer track can be performed by activating one or more electromagnets of one or more linear stators 130b to provide a magnetic field, where the magnetic field provides a second magnetic track-switching force to urge the mover 140 to move from the intermediate position to the second transfer track. The second magnetic track-switching force can be a force along the track-switching direction; the track-switching direction can be the lateral direction 502. The second magnetic track-switching force can result from the fact that the stator / mover system endeavors to minimize or at least reduce the magnetic reluctance.

[0107] As Figure 10 shown, one or more track-switching linear stators 130c can be arranged in an inclined configuration. The inclined configuration can include a longitudinal axis defined by the length of the track-switching linear stator 130c, which is inclined with respect to the longitudinal axis defined by the length of the linear stator 130a of the first transfer track and / or with respect to the longitudinal axis defined by the length of the linear stator 130b of the second transfer track. For example, the longitudinal axis defined by the length of the track-switching linear stator 130c can be inclined with respect to the transfer direction 102. The inclined configuration of one or more track-switching linear stators 130c can facilitate the track-switching of the carrier 110 during the transfer of the carrier 110, such that the track-switching can be performed without stopping the carrier 110. The carrier 110 can move from the first transfer track to the intermediate position and from the intermediate position to the second transfer track in a continuous motion manner. As Figure 10As shown in the example of , in the intermediate position (indicated by the dashed line), the orientation of the carrier 110 can be inclined relative to the first transfer track and / or the second transfer track. In the inclined orientation of the carrier, the inclined configuration of one or more track-switching linear stators 130c has the following advantages: the overlap between the mover 140 and one or more track-switching linear stators 130c is enlarged, so that one or more track-switching linear stators 130c can interact more strongly with the mover 140. A stable track-switching motion can be provided, which allows track-switching to be performed without stopping the carrier 110.

[0108] According to the embodiments described herein, the linear reluctance motor described herein can be the first linear reluctance motor of the device, and the transfer track can be the first transfer track. The device can include a second linear reluctance motor for non-contact transfer of the carrier along a second transfer track. The device can include a track-switching reluctance motor; the track-switching reluctance motor includes one or more track-switching linear stators for switching the carrier between the first transfer track and the second transfer track. The track-switching can be provided by a reluctance-based track-switching force provided at least by the track-switching reluctance motor.

[0109] In some embodiments, one or more track-switching linear stators can be arranged in an inclined orientation relative to at least one of the first transfer track and the second transfer track.

[0110] In some embodiments, the stator can be enlarged at the position where the track-switching is performed. By doing so, a reduction in the number of additional stators can be achieved. For example, one linear stator can cover two tracks, thus combining, for example, the linear stators 130a, 130b, and 130c into one larger stator.

[0111] Figure 11 Shows a part of the device 100 according to another embodiment. One or more stator poles 232 of the linear stator 130 can include a pattern 1130; the pattern 1130 includes a plurality of protrusions. For example, 2 or more, particularly 3 or more, more particularly 6 or more protrusions can be provided on the stator pole. The pattern 1130 can be provided on the distal surface of the stator pole 232. The distal surface can be configured to face the mover 140. The pattern 1130 can be a wavy pattern having peaks and valleys, where the peaks form the protrusions of the pattern. The width of the protrusion or peak relative to the conveying direction can be, for example, 1 mm to 5 mm. The distance between two protrusions of the stator pole relative to the conveying direction can be, for example, 2 mm to 10 mm. In some embodiments, the pattern of the protrusions can be covered by a flat surface. The flat surface can optimize the vacuum performance of the transfer system.

[0112] Additionally or alternatively, one or more mover poles 242 of the mover 140 may include a pattern 1140; the pattern 1140 includes a plurality of protrusions. The pattern 1140 may be disposed on the distal surface of the mover pole 242. The distal surface may be configured to face the stator 130. The pattern 1140 may be a wavy pattern having peaks and valleys, similar to the pattern disposed on the stator pole 232. The number of protrusions and the dimensions of the peaks and valleys may be the same as described above.

[0113] The protrusion patterns provided on the stator poles and / or mover poles facilitate fine alignment of the carrier, such as fine alignment in the horizontal direction along the transfer track. The protrusions act as micro-magnetic poles that strive to align with each other in order to reduce or minimize the magnetic resistance of the stator / mover system when providing a magnetic field as described herein. Given the small size of the protrusions discussed, the accuracy obtained for positioning the carrier can be improved.

[0114] Figure 12 A close-up view showing a portion of the stator pole 232 including the pattern 1130 and a portion of the mover pole 242 including the pattern 1140 is shown.

[0115] Figure 13 A close-up view showing a portion of the stator pole 232 and a portion of the mover pole 242 according to another example is shown.

[0116] One or more stator poles 232 of the linear stator 130 may include a pattern 1330; the pattern 1330 includes a plurality of openings or slits. The pattern 1330 may be disposed on the remote surface of the stator pole 232. The pattern 1330 may be a wavy pattern having peaks and valleys. The number of openings and the dimensions of the peaks and valleys may be the same as those described above for the patterns 1130 and 1140. Each opening or slit may be U-shaped. The openings or slits may include a gas, such as air. The openings or slits may be empty. Alternatively, the openings or slits may include a material such as an epoxy material, a ceramic material, or a permanent magnet.

[0117] Additionally or alternatively, one or more mover poles 242 of the mover 140 may include a pattern 1340; the pattern 1340 includes a plurality of openings or slits. The pattern 1340 may be disposed on the remote surface of the mover pole 242. Similar to the pattern 1330, the pattern 1340 may be a wavy pattern having peaks and valleys and / or may be filled with a gas or a material.

[0118] The functions and effects of the patterns 1330 and 1340 including openings or slits are similar to those of the patterns 1130 and 1140 including protrusions. That is, both patterns facilitate fine alignment of the mover relative to the stator.

[0119] In another embodiment, alternatively or in addition to the patterns 1130 / 1140 including protrusions and the patterns 1330 / 1340 including openings, internal variations or modifications of the magnetic resistance of the material of one or more stator poles may be provided. Such variations are also beneficial for the fine alignment of the mover relative to the stator.

[0120] At least one of the one or more linear stators may include stator poles. The mover may include mover poles. At least one stator pole may include a pattern having a plurality of protrusions, a plurality of openings, and / or a magnetic property variation configured for non-contact fine alignment of the carrier (specifically, non-contact fine alignment relative to the transport direction). At least one mover pole may include a pattern having a plurality of protrusions, a plurality of openings, and / or a magnetic property variation configured for non-contact fine alignment of the carrier (specifically, non-contact fine alignment relative to the transport direction).

[0121] The plurality of protrusions of the poles (stator poles or mover poles) as described herein may be arranged adjacent to each other in the transport direction. The plurality of protrusions may be formed on the outer surface at the distal end of the pole. Each protrusion may protrude from the outer surface, for example, protrude from the outer surface in the vertical direction. The openings in the poles may be formed in the interior or body portion of the pole. The plurality of openings of the poles may be arranged adjacent to each other in the transport direction. The plurality of openings may be formed adjacent to the outer surface at the distal end of the pole. Each opening may include, for example, air, an epoxy resin material, a ceramic material, or a magnetic material, such as a permanent magnet or the like. The openings in the poles may be shaped as curved slits.

[0122] As Figure 13 As further shown and applicable to any embodiment described herein, the stator pole 232 and / or the mover pole 242 may include a stack of metal plates or sheets 1335 and / or 1345 such as iron disks, or be made of a stack of metal plates or sheets 1335 and / or 1345 such as iron disks. Such a configuration has multiple advantages; the multiple advantages include cost effectiveness and reduced losses.

[0123] Figure 14 An example of the device 100 is shown, where one or more linear stators 130 are disposed below the mover 140.

[0124] Figure 14 A single linear stator 130 is shown, but the present application is not limited thereto, and additional linear stators 130 may be provided. The (multiple) linear stators 130 may have any design of the linear stator as described herein.

[0125] In Figure 14 The carrier 110 is not shown; the carrier 110 may be disposed, for example, on top of the mover 140, specifically in the horizontal direction of the carrier 110. Figure 14The apparatus 100 shown in FIG. may be adapted to non - contactingly transport a carrier 110 in a horizontal direction of the carrier 110. For example, the carrier may be configured to support one or more substrates, such as semiconductor wafers, in a horizontal direction. In Figure 14 A controller is not shown in FIG., but the controller is considered to be part of the apparatus 100.

[0126] The linear stator 130 may include one or more permanent magnets 1430. For example, two permanent magnets 1430 or two arrays of permanent magnets may be disposed on opposite sides of the linear stator 130. The mover 140 may include one or more permanent magnets 1440. For example, two permanent magnets 1440 or two arrays of permanent magnets may be disposed on opposite sides of the mover 140.

[0127] One or more permanent magnets 1430 may be configured to face one or more permanent magnets 1440 to provide a repulsive magnetic force. The like - poles of one or more permanent magnets 1430 and one or more permanent magnets 1440 may face each other. The repulsive magnetic force may be an upward force (i.e., a magnetic levitation force) that lifts the mover 140 above one or more stators 130. The repulsive force may be a constant, non - adjustable force.

[0128] The linear stator 130 may include one or more electromagnets that generate a controllable magnetic field that interacts with the mover 140, as described herein. The magnetic field may provide an attractive magnetic force (a reluctance - based force) that pushes the mover 140 to a position that reduces or minimizes the magnetic reluctance of the stator / mover system, as described herein. The magnetic attractive force includes a reluctance - based driving force acting in the horizontal direction, as described herein. In addition, the magnetic attractive force also includes a reluctance - based vertical force. Different from an apparatus where the mover 140 is located below the linear stator 130, in Figure 14 this configuration, the reluctance - based vertical force will pull the carrier 110 downward (i.e., toward the linear stator 130). The downward vertical force is compensated by the upward force provided by one or more permanent magnets 1430 and one or more permanent magnets 1440. By appropriately controlling the downward reluctance - based vertical force (which can be accomplished by controlling the electromagnets (using the controller 150 of the apparatus 100)), the non - contact levitation of the carrier 110 can be precisely controlled, and the carrier 110 can be positioned at a target vertical position above the linear stator 130.

[0129] Additional methods for transporting the carrier in the horizontal direction may be provided. For example, two parallel tracks of the linear stator may be provided, which has the advantage of allowing control of the yaw, pitch, and roll of the carrier. Vibration or unwanted movement can be avoided or at least controlled. In another embodiment, the tracks may be in a similar Figure 6 parallel orientation, but horizontally aligned. The carrier can be attracted without using permanent magnets.

[0130] The apparatus according to an embodiment described herein may include a processing chamber, such as a vacuum chamber. The carrier may be configured to be transported within the processing chamber.

[0131] According to an embodiment, the linear stator 130 described herein may have a vacuum seal. To achieve the vacuum seal, a vacuum sealing film may be provided. The vacuum sealing film may be disposed between the stator poles and the mover poles. The magnetic field for levitation and transportation may protrude through the vacuum sealing film. The vacuum sealing film may separate the external atmospheric pressure from the internal low-pressure region. Maximum cleanliness within the low-pressure region may be achieved. Alternatively, the vacuum seal may be introduced on the upper side of the linear stator 130, whereby the stator poles are exposed to the low-pressure region and the magnetic field for levitation and transportation does not protrude through the film. The latter alternative avoids the need for a separating film between the stator and the mover and maximizes the efficiency of the device, but results in a lower cleanliness of the structure.

[0132] According to a further embodiment, and as Figure 15 and 16 shown, a processing system for processing a substrate is provided. The processing system includes an apparatus 100 for non-contact transportation of a carrier 110 as described herein; the carrier is a substrate carrier. The processing system includes a processing device 1510, such as a deposition source or an inspection device. The linear reluctance motor of the apparatus 100 may be configured to non-contact transport the carrier 110 to a processing position (e.g., Figure 16 the position of the carrier 110 shown). In the processing position, the carrier 110 may be arranged to process the substrate supported by the carrier using the processing device. The processing position may be a deposition position. In the deposition position, the substrate held by the carrier may receive deposition material from a deposition source. For example, in Figures 15 to 16 it, the processing device 1510 may be a deposition source for depositing deposition material on a substrate carried by the carrier 110.

[0133] According to an embodiment, the carrier may include a slit for receiving a substrate, specifically in the horizontal direction of the substrate.

[0134] Figure 17 An example of the carrier 110 is shown. As Figure 17 shown, the carrier 110 may be configured to receive a substrate, such as a semiconductor wafer, in the horizontal direction of the substrate. The carrier 110 may include an opening 1750 for receiving the substrate. The opening 1750 may be shaped as a slit in which the substrate can be held. The slit may be understood as a narrow opening for receiving the substrate. The carrier may have a support portion in the peripheral region of the slit for supporting the substrate. The slit may be shaped to cover the substrate only in the peripheral region of the substrate. The main region of the substrate held in the slit may be exposed, thereby allowing processing (e.g., coating) of the main region. For example, in Figure 17In [description], when the substrate is held by the carrier 110, most of the bottom surface of the substrate is exposed so that the bottom surface can be processed. In an alternative example, the substrate can be removed from the carrier 110 before processing the substrate (e.g., before coating the substrate). Coating can be performed without restricting the coating area of the substrate. Since the carrier does not participate in the coating process, no coating will reach the carrier. In this example, the opening 1750 can be very small. The carrier can provide protection for the substrate during transportation.

[0135] According to an embodiment, the mover attached to the carrier may include a first set of mover magnetic poles and a second set of mover magnetic poles. The first set of mover magnetic poles are formed in a linear arrangement extending in a first direction to provide movement of the carrier in the first direction, while the coating is formed in a linear arrangement extending in a second direction to provide movement of the carrier in the second direction.

[0136] As Figure 17 shown, the mover 140 attached to the carrier 110 may include a set of mover magnetic poles 1712a that are formed in a linear arrangement extending along a first direction 1702, and the first direction 1702 may be a first horizontal direction. Optionally, the mover 140 may include another set of mover magnetic poles 1712b that are formed in a linear arrangement extending along the first direction 1702. In other words, the mover 140 may include two sets of parallel mover magnetic poles 1712a and 1712b that both extend along the first direction 1702. The set of mover magnetic poles 1712a and / or the set of mover magnetic poles 1712b may be arranged to provide movement of the carrier 110 in the first direction 1702. The device may include at least one linear stator; at least one linear stator extends along the first direction 1702 and is arranged to interact with the set of mover magnetic poles 1712a and / or the set of mover magnetic poles 1712b to provide movement of the carrier 110 in the first direction 1702.

[0137] The mover 140 may include a set of mover magnetic poles 1714a that are formed in a linear arrangement extending along a second direction 1704, and the second direction 1704 may be a second horizontal direction. The second direction 1704 may be perpendicular to the first direction 1702. Optionally, the mover 140 may include another set of mover magnetic poles 1714b that are formed in a linear arrangement extending along the second direction 1704. The set of mover magnetic poles 1714a and / or the set of mover magnetic poles 1714b may be arranged to provide movement of the carrier 110 along the second direction 1704. The device may include at least one linear stator; at least one linear stator extends along the second direction 1704 and is arranged to interact with the set of mover magnetic poles 1714a and / or the set of mover magnetic poles 1714b to provide movement of the carrier 110 in the second direction 1704. Figure 17Exemplarily shown is a linear stator 130 extending along a second direction 1704. For ease of presentation, only one linear stator is shown, but it should be understood that the apparatus may include multiple linear stators extending along a first direction and / or multiple linear stators extending along a second direction.

[0138] Although Figure 17 a combination of two aspects is shown (i.e., a first aspect related to a slit-shaped carrier and a second aspect related to a mover magnetic pole group extending in different directions), it should be understood that these two aspects may be provided separately; that is, these two aspects do not necessarily have to be combined with each other.

[0139] According to an embodiment, the apparatus may include multiple linear stators. The multiple linear stators may include a first module and a second module. The first module may include linear stators arranged according to a first pattern, which includes at least one linear stator extending along a first direction and at least one linear stator extending along a second direction. The second module may include linear stators arranged according to a second pattern, which includes at least one linear stator extending along a first direction and at least one linear stator extending along a second direction.

[0140] The first pattern and the second pattern may be configured such that the second module can be placed adjacent to a first side of the first module to provide a first transmission path extending from the first module to the second module in the first direction, and such that the second module can be placed adjacent to a second side of the first module to provide a second transmission path extending from the first module to the second module in the second direction.

[0141] Figure 18 An example showing a first module 1810 including linear stators arranged according to a first pattern and a second module 1810' including linear stators arranged according to a second pattern is shown. The first pattern may have the same shape as the second pattern. The two modules may be exactly the same.

[0142] A module (which may be the first module 1810 or the second module 1810') may also be referred to as a block. A module may include linear stators arranged according to a pattern. A module may include a set of linear stators 1812a that form a linear arrangement extending along a first direction (specifically, a first horizontal direction). A module may include a set of linear stators 1814a that form a linear arrangement extending along a second direction (specifically, a second horizontal direction). The second direction may be perpendicular to the first direction. The second direction may be set at an angle different from 90 degrees with respect to the first direction. A module may selectively include another set of linear stators 1812b that form a linear arrangement extending along the first direction. A module may selectively include another set of linear stators 1814b that form a linear arrangement extending along the second direction.

[0143] Figure 18A second module 1810' is shown disposed adjacent a first side of the first module 1810. In Figure 18 the first side of the first module 1810 is the right hand side of the first module 1810. When the second module 1810' is disposed as Figure 18 shown, a first transmission path extending in a first direction may be defined by a set of linear stators 1812a / 1812b of the first module 1810 and a set of linear stators 1812a / 1812b of the second module 1810'. The first transmission path defines the transmission of a carrier from the first module 1810 to the second module 1810' (or vice versa) in the first direction.

[0144] Figure 18 Not shown in Figure 18 but the second module 1810' may optionally be disposed adjacent a second side of the first module 1810. The second side of the first module 1810 may be

[0145] the bottom side of the first module 1810 in Figure 18 When the first module 1810 and the second module 1810' are disposed accordingly, at least a portion of a second transmission path extending in a second direction may be defined by a set of linear stators 1814a of the first module 1810 and a set of linear stators 1814b of the second module 1810'. The second transmission path defines the transmission of a carrier from the first module 1810 to the second module 1810' (or vice versa) in the second direction.

[0145] According to an embodiment, Figure 18 a plurality of modules of the type shown may be disposed adjacent to each other to define one or more transmission paths for a carrier. Each transmission path may have a portion extending in a first direction, a portion extending in a second direction, and / or corresponding portions in both directions. By placing the modules or blocks in a suitable manner, any desired transmission path or pattern of transmission paths may be formed in a modular manner.

[0146] Figure 18 The linear stators shown may include any features or combinations of features of the linear stator 130 described herein.

[0147] In some embodiments, Figure 18 the arrangement of the linear stators shown may be used with Figure 17 the carrier shown. However, the present application is not limited thereto.

[0148] According to an embodiment, any of the linear stators described herein may include one or more stator poles, wherein each of the one or more stator poles is inclined relative to a vertical direction. The one or more stator poles may be a set of stator poles forming a linear arrangement extending in a first direction. The first direction may be a horizontal direction. The set of stator poles may define at least a portion of a transmission path of a carrier in the first direction.

[0149] Figure 19 An example of a linear stator 130 is shown. The linear stator 130 may have a set of stator poles 1910a. The set of stator poles 1910a may form a linear arrangement extending in a first direction 1902. The first direction 1902 may be a horizontal direction. The set of stator poles 1910a may define at least a part of the transport path of the carrier in the first direction 1902. Each stator pole 1910a may be inclined / tilted at an inclination angle 1912 with respect to the vertical direction. The inclination angle 1912 may be the angle between the vertical direction and the axis defined by the length extension of the stator pole 1910a. The inclination angle 1912 may be 90 degrees or less and / or 10 degrees or more. The set of stator poles 1910a may be provided on a surface 1950 (specifically, a side surface) of the linear stator 130. Each stator pole 1910a may protrude or project from the surface 1950, for example, in a direction perpendicular to the surface 1950. The surface 1950 may have an inclination angle 1924 with respect to the horizontal direction. The inclination angle 1924 of the surface 1950 may cause the stator poles 1910a to be inclined at the inclination angle 1912. The linear stator 130 may have a set of inclined stator poles 1910b on the opposite side of the linear stator 130, which is similar to the stator poles 1910a.

[0150] Providing stator poles with an inclined orientation facilitates allowing the carrier to be transported with increased acceleration. In the conventional case of vertically (i.e., non-inclined) stator poles, the maximum driving acceleration of the carrier that a linear reluctance motor can provide (generated by the reluctance-based driving force) has a determined upper limit; the determined upper limit is determined by the vertical force based on the maximum reluctance, and the vertical force is in turn determined by the weight of the carrier. Therefore, the acceleration due to gravity on Earth sets an upper limit on the maximum possible acceleration of the transported carrier (if the carrier has a large weight, the carrier will accelerate more slowly; that is, a greater force is required to accelerate the carrier). By inclining the stator poles, this effect can be reduced; that is, the inclination of the stator poles allows the same weight of the carrier to have a greater reluctance-based driving force. Due to the inclination, the carrier can be transported with a higher acceleration. In addition, the inclined stator poles facilitate active side guidance of the carrier during transportation; that is, controlling the position of the carrier in a direction transverse to the transportation direction during transportation or in a stationary state.

[0151] Instead of the inclined stator poles 1910a and / or 1910b as Figure 19 shown, or in addition to the inclined stator poles 1910a and / or 1910b as Figure 19 shown, the carrier may also be pulled down by using magnets to increase the force in the vertical direction (i.e., virtual weight) in order to increase the acceleration of the carrier in the transportation direction without increasing the mass. Therefore, the acceleration can be increased and is not limited by the gravity at the location where the system is used.

[0152] Return to Figure 19 , the linear stator 130 may include a set of stator magnetic poles 1920a that form a linear arrangement extending along a second direction 1904. The second direction 1904 may be a horizontal direction, which may be perpendicular to the first direction 1902. The stator magnetic poles 1920a may be non-inclined magnetic poles; that is, vertically oriented magnetic poles. A set of stator magnetic poles 1920a may define at least a part of the transmission path of the carrier in the second direction 1904. Since the stator magnetic poles 1920a are not inclined, the carrier can be transmitted with high precision and efficiency for suspension, holding, or parking. The linear stator 130 may have a set of non-inclined stator magnetic poles 1920b on the opposite side of the linear stator 130, which are similar to the stator magnetic poles 1920a. In another example, it may be the case that the stator magnetic poles or the mover magnetic poles do not necessarily protrude beyond the plane 1950, but may also be modulated into the material, such as Figure 13 shown.

[0153] The mover may include a set of mover magnetic poles arranged to interact with the stator magnetic poles 1910a-b and / or a set of mover magnetic poles arranged to interact with the stator magnetic poles 1920a-b.

[0154] Figure 19 The exemplary linear stator 130 of [[ ]] includes a combination of inclined stator magnetic poles 1910a-b and non-inclined stator magnetic poles 1920a-b. The present application is not limited to this. The linear stator may include only any one of the sets of stator magnetic poles discussed.

[0155] According to an embodiment, any linear stator described herein may include a set of stator magnetic poles that are arranged to provide a reluctance-based angular force for moving the carrier by a certain angle. The reluctance-based angular force may cause the carrier to rotate relative to a vertical axis of rotation. The reluctance-based angular force may be a horizontal force.

[0156] Figure 20 An example of the mover 140 is shown. The mover 140 may include at least one of a set of mover magnetic poles 2010a, a set of mover magnetic poles 2010b, a set of mover magnetic poles 2020a, and a set of mover magnetic poles 2020b. The mover magnetic poles 2010a-b and 2020a-b may be similar to Figure 19 the stator magnetic poles 1920a-b (i.e., non-inclined magnetic poles). Alternatively, at least one of a set of mover magnetic poles 2010a-b and a set of mover magnetic poles 2020a-b may include inclined mover magnetic poles, which are similar to Figure 19 the stator magnetic poles 1910a-b in [[ ]]. The linear stator may include a set of stator magnetic poles arranged to interact with the mover magnetic poles 2010a-b and / or a set of stator magnetic poles arranged to interact with the mover magnetic poles 2020a-b.

[0157] The mover 140 may include a set of mover magnetic poles 2030 configured to provide a reluctance-based angular force; the reluctance-based angular force is configured to move the carrier by a certain angle. As shown, the mover magnetic poles 2030 may be arranged in a curved arrangement (specifically, a circular arrangement). This application is not limited thereto, and any other arrangement of the mover magnetic poles 2030 suitable for moving the carrier by a certain angle may be provided. For example, Figure 21 shows different arrangements of the mover magnetic poles 2030 that are also suitable for providing a reluctance-based angular force.

[0158] The stator may include a set of stator magnetic poles arranged to interact with the mover magnetic poles 2030, for example, a set of stator magnetic poles arranged in a curved arrangement corresponding to the arrangement of the mover magnetic poles 2030 in Figure 20 .

[0159] Due to the arrangement of the mover magnetic poles 2030 (e.g., the curved arrangement shown in Figure 20 or the alternative arrangement shown in Figure 21 ), a reluctance-based angular force that causes the carrier to move at a certain angle may be provided. The reluctance-based angular force is provided in a manner similar to the reluctance-based driving force described herein. The system formed by the mover magnetic poles 2030 and the corresponding stator magnetic poles of the stator endeavors to reach a state of reduced magnetic reluctance. Accordingly, a horizontal movement of the carrier is provided, which causes an angular movement of the mover due to the specific arrangement of the mover magnetic poles 2030.

[0160] According to another embodiment, a method for non-contact transfer of a carrier is provided. The method includes: controlling at least one electromagnet in a set of electromagnets of a linear reluctance motor. The linear reluctance motor includes one or more linear stators defining a transfer track for the carrier; the carrier is a substrate carrier or a reticle carrier. The linear reluctance motor includes a mover connected to the carrier. The linear reluctance motor includes a set of electromagnets and a first magnetic material. One or more of the linear stators include a set of electromagnets and the mover includes the first magnetic material, or the mover includes a set of electromagnets and one or more of the linear stators include the first magnetic material. Controlling at least one electromagnet to generate a magnetic field that interacts with the first magnetic material, thereby providing both a reluctance-based vertical force and a reluctance-based driving force acting on the mover. The method may be performed by a device according to the embodiments described herein. Each function or set of functions of the devices described herein may be included, in any combination, as part of the method.

[0161] The method may include: separately controlling the reluctance-based vertical force and the reluctance-based driving force.

[0162] A set of electromagnets may include a first electromagnet. The methods described herein may include: controlling a first current in the first electromagnet to control the magnitude of a magnetoresistive-based vertical force. The methods may include: controlling a second current in the first electromagnet to control the magnitude of a magnetoresistive-based driving force.

[0163] The methods described herein may include: using one or more sensors as described herein to sense the position of a carrier relative to a transport direction. The methods may include: controlling a magnetoresistive-based driving force in response to a signal provided by one or more sensors to position the carrier at a target position relative to the transport direction.

[0164] A set of electromagnets may include one or more first electromagnets and one or more second electromagnets. The one or more first electromagnets may face the one or more second electromagnets relative to a lateral direction. The methods described herein may include: controlling the one or more first electromagnets and / or the one or more second electromagnets to provide a magnetoresistive-based lateral force acting on a mover. The magnetoresistive-based lateral force may be configured to position the carrier at a target position relative to the lateral direction.

[0165] At least one of the one or more linear stators may include stator poles. The mover may include mover poles. At least one stator pole may include a pattern having a plurality of protrusions, a plurality of openings, and / or a change in magnetic characteristics, and the methods may include: performing non-contact fine alignment of the carrier using the pattern. Additionally or alternatively, at least one mover pole may include a pattern having a plurality of protrusions, a plurality of openings, and / or a change in magnetic characteristics, and the methods may include: performing non-contact fine alignment of the carrier using the pattern.

[0166] The methods described herein may include: using a linear magnetoresistive motor to non-contactingly transport a carrier to a processing position. The methods may include: in the processing position, using a processing device to process a substrate supported by the carrier.

[0167] According to another embodiment, and as Figure 22 shown, an apparatus 2200 for non-contact transfer of a deposition source 2210 is provided. The apparatus 2200 includes a deposition source 2210. The apparatus 2200 includes a linear magnetoresistive motor for providing non-contact levitation and non-contact driving of the deposition source 2210. The linear magnetoresistive motor includes one or more linear stators 130. The one or more linear stators 130 define a transport track for the deposition source 2210. The linear magnetoresistive motor includes a mover 140 connected to the deposition source 2210. The linear magnetoresistive motor includes a set of electromagnets and a first magnetic material. The one or more linear stators 130 include a set of electromagnets and the mover 140 includes a first magnetic material, or the mover 140 includes a set of electromagnets and the one or more linear stators 130 include a first magnetic material. The apparatus 2200 includes a controller connected to the set of electromagnets.

[0168] The mover 140 is connected to the deposition source 2210. For example, the mover 140 can be directly mounted to the deposition source 2210, or the mover 140 can be mounted to a support that carries the deposition source 2210.

[0169] The deposition source 2210 can be an evaporation source. The evaporation source can be configured to evaporate a deposition material. The evaporation source can be configured to deposit an organic material, for example for use in the manufacture of OLED displays on large-area substrates. The evaporation source can have a linear shape. In operation, the evaporation source can extend in a vertical direction. For example, the length of the evaporation source can correspond to the height of the substrate. The evaporation source can include an evaporation crucible. The evaporation crucible can be configured to receive an organic material or another material and evaporate the material. A heating unit included in the evaporation source can be used to evaporate the organic material. The evaporated material can be emitted towards the substrate.

[0170] Alternatively, the deposition source 2210 can be a sputter deposition source. The sputter deposition source can include one or more sputter cathodes, such as rotatable cathodes. The cathode can be a planar or cylindrical cathode having a target material to be deposited on the substrate. The sputter deposition process can be a DC sputter source, a (mid-frequency) MF sputter source, or an RF frequency (RF: radio frequency) sputter deposition process. As an example, when the material to be deposited on the substrate is a dielectric material, an RF sputter deposition process can be used. The frequency used in the RF sputter process can be about 13.56 MHz or higher. The sputter deposition process can be carried out as magnetron sputtering. The term "magnetron sputtering" refers to sputtering performed using a magnet assembly (e.g., a unit capable of generating a magnetic field). Such a magnet assembly can include a permanent magnet, or be composed of permanent magnets. The permanent magnet can be arranged within a rotatable target, or coupled to a planar target in such a way that free electrons are trapped within a generated magnetic field generated below the surface of the rotatable target. The magnet assembly can also be configured to be coupled to a planar cathode.

[0171] The apparatus 2200 differs from the apparatus 100 described herein in that the former apparatus is configured for the transfer of a deposition source, while the latter apparatus is configured for the transfer of a substrate carrier or a mask carrier. Except for the said differences, the functions of the apparatus 2200 are completely analogous to the functions of the apparatus 100. The apparatus 2200 can include any feature or combination of features of the apparatus 100, and can perform any function or combination of functions of the apparatus 100 for non-contact transfer of a carrier as described herein, where the said feature or function now relates to the transfer of a deposition source rather than the transfer of a carrier.

[0172] In the apparatus 2200, additional permanent magnets as described in Figure 14 can be used to facilitate magnetic overcompensation to passively lift the arrangement in the vertical direction, and a set of electromagnets can be used to actively control the levitation height.

[0173] According to another embodiment, a method for non-contact transfer of a deposition source is provided. The method includes: controlling at least one electromagnet of a set of electromagnets of a linear reluctance motor. The linear reluctance motor includes one or more linear stators that define a transfer track for the deposition source. The linear reluctance motor includes a mover connected to the deposition source. The linear reluctance motor includes a set of electromagnets and a first magnetic material. One or more of the linear stators include the set of electromagnets and the mover includes the first magnetic material, or the mover includes the set of electromagnets and one or more of the linear stators include the first magnetic material. Controlling at least one electromagnet to generate a magnetic field that interacts with the first magnetic material to provide both a magneto-reluctance based vertical force and a magneto-reluctance based driving force acting on the mover.

[0174] According to another embodiment, and as Figure 23 shown, an apparatus 2300 for non-contact transfer of a robotic arm 2310 is provided. The apparatus 2300 includes the robotic arm 2310. The apparatus 2300 includes a linear reluctance motor for providing both non-contact levitation and non-contact driving of the robotic arm 2310. The linear reluctance motor includes one or more linear stators 130. One or more of the linear stators 130 define a transfer track for the robotic arm 2310. The linear reluctance motor includes a mover 140 connected to the robotic arm 2310. The linear reluctance motor includes a set of electromagnets and a first magnetic material. One or more of the linear stators 130 include the set of electromagnets and the mover 140 includes the first magnetic material, or the mover 140 includes the set of electromagnets and one or more of the linear stators 130 include the first magnetic material. The apparatus 2300 includes a controller connected to the set of electromagnets.

[0175] The robotic arm 2310 may include an arm portion and an end effector at an end of the arm portion. The end effector may be configured to pick up, hold, and move an object such as a substrate or other workpiece. The robotic arm may have one or more joints to allow movement of the end effector.

[0176] The apparatus 2300 differs from the apparatus 100 described herein in that the former apparatus is configured for transferring a robotic arm, while the latter apparatus is configured for transferring a substrate carrier or a mask carrier. Except for the said difference, the functions of the apparatus 2300 are completely analogous to the functions of the apparatus 100. The apparatus 2300 may include any feature or combination of features of the apparatus 100, and may perform any function or combination of functions of the apparatus 100 for non-contact transfer of a carrier as described herein, where the said feature or function now relates to the transfer of a robotic arm rather than the transfer of a carrier.

[0177] According to another embodiment, a method for non-contact transmission of a robotic arm is provided. The method includes: controlling at least one electromagnet in a set of electromagnets of a linear reluctance motor. The linear reluctance motor includes one or more linear stators defining a transmission track for the robotic arm. The linear reluctance motor includes a mover connected to the robotic arm. The linear reluctance motor includes a set of electromagnets and a first magnetic material. One or more of the linear stators include the set of electromagnets and the mover includes the first magnetic material, or the mover includes the set of electromagnets and one or more of the linear stators include the first magnetic material. Controlling at least one electromagnet to generate a magnetic field that interacts with the first magnetic material, thereby providing both a magnetoresistance-based vertical force and a magnetoresistance-based driving force acting on the mover.

[0178] While the foregoing is directed to some embodiments, other and further embodiments can be devised without departing from its basic scope, and its scope is determined by the appended claims of the invention.

Claims

1. A substrate carrier assembly, the substrate carrier assembly comprising: A carrier configured to support a substrate; And A first mover coupled to the carrier, the first mover comprising: A first set of magnetic poles extending in a first direction; and A second mover coupled to the carrier, the second mover comprising: A second set of magnetic poles extending in the first direction, wherein: Each magnetic pole in the first set and the second set comprises a ferromagnetic material; The first set is spaced from the second set in a second direction; and The first direction and the second direction are at a first angle to each other.

2. The substrate carrier assembly according to claim 1, the substrate carrier assembly further comprising a first elongated bar and a second elongated bar, the first elongated bar comprising the first set of magnetic poles and the second elongated bar comprising the second set of magnetic poles.

3. The substrate carrier assembly according to claim 2, wherein the first set of magnetic poles and the second set of magnetic poles are formed as a linear array extending in the first direction.

4. The substrate carrier assembly according to claim 3, wherein the first set of magnetic poles and the second set of magnetic poles extend in a third direction perpendicular to the first direction and the second direction.

5. The substrate carrier assembly according to claim 1, the substrate carrier assembly further comprising: A third mover coupled to the carrier, the third mover comprising: A third set of magnetic poles extending in the second direction; and A fourth mover coupled to the carrier, the fourth mover comprising: A fourth set of magnetic poles extending in the second direction, wherein: Each magnetic pole in the third set and the fourth set comprises a ferromagnetic material; and The third set of magnetic poles is spaced from the fourth set of magnetic poles in the first direction.

6. The substrate carrier assembly according to claim 1, wherein the carrier includes an opening for receiving the substrate.

7. The substrate carrier assembly according to claim 6, wherein the opening extends in the second direction and a third direction perpendicular to the first direction and the second direction.

8. The substrate carrier assembly according to claim 6, the substrate carrier assembly further comprising one or more support portions coupled to the carrier and extending into the opening, the one or more support portions being configured to support the substrate.

9. The substrate carrier assembly according to claim 1, wherein the first set of magnetic poles and the second set of magnetic poles each include a surface having a plurality of protrusions.

10. The substrate carrier assembly according to claim 1, wherein The carrier further includes a first edge and a second edge opposite the first edge, the first set of magnetic poles being located near the first edge, and The second set of magnetic poles being located near the second edge.

11. The substrate carrier assembly according to claim 1, wherein the carrier is configured to support a second substrate.

12. The substrate carrier assembly as claimed in claim 1, wherein the substrate carrier assembly further comprises a first elongated rod and a second elongated rod, the first elongated rod comprising the first set of magnetic poles and the second elongated rod comprising the second set of magnetic poles, and each of the first elongated rod and the second elongated rod comprises a silicon steel, a ferritic steel or a martensitic steel.

13. A substrate carrier assembly, the substrate carrier assembly comprising: a carrier configured to support a substrate; and a first elongated rod coupled to the carrier, the first elongated rod comprising: a first set of magnetic poles extending in a first direction; and a second elongated rod coupled to the carrier, the second elongated rod comprising: a second set of magnetic poles extending in a second direction, wherein: each magnetic pole in the first set and the second set comprises a ferromagnetic material; and the first direction and the second direction form a first angle with each other.

14. The substrate carrier assembly as claimed in claim 13, wherein the first set of magnetic poles forms a first linear arrangement in the first direction, and wherein the second set of magnetic poles forms a second linear arrangement in the second direction.

15. The substrate carrier assembly as claimed in claim 13, wherein the carrier comprises an opening for receiving the substrate.

16. The substrate carrier assembly as claimed in claim 15, wherein the substrate carrier assembly further comprises one or more support portions coupled to the carrier and extending into the opening, the one or more support portions being configured to support the substrate.

17. The substrate carrier assembly as claimed in claim 13, wherein each of the first elongated rod and the second elongated rod comprises a silicon steel, a ferritic steel or a martensitic steel.

18. A substrate carrier assembly, the substrate carrier assembly comprising: a carrier configured to support a substrate; and a mover coupled to the carrier, the mover comprising: a first set of magnetic poles extending in a first direction; a second set of magnetic poles extending in a second direction; and a third set of magnetic poles extending in the first direction or the second direction, wherein: each magnetic pole in the first set, the second set and the third set comprises a ferromagnetic material; and the first direction and the second direction form a first angle with each other.

19. The substrate carrier assembly as claimed in claim 13, wherein the carrier comprises an opening for receiving the substrate, and wherein the substrate carrier assembly further comprises: one or more support portions coupled to the carrier and extending into the opening, the one or more support portions being configured to support the substrate.

20. The substrate carrier assembly according to claim 18, wherein the first set of magnetic poles is arranged to provide a magnetoresistance-based angular force for moving the carrier in the first direction, and wherein the second set of magnetic poles is arranged to provide another magnetoresistance-based angular force for moving the carrier in the second direction.

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