Graphite boat piece carrying mechanism and graphite boat dismounting and mounting equipment

Abstract

The invention relates to the technical field of graphite boat disassembly and assembly, in particular to a graphite boat piece carrying mechanism and graphite boat disassembly and assembly equipment, the graphite boat piece carrying mechanism comprises a driving assembly and a graphite boat piece adsorption carrying mechanism, and the graphite boat piece adsorption carrying mechanism comprises a transverse frame, a vacuum suction nozzle, a positioning needle and a ceramic ring clamping mechanism; the driving assembly is used for driving the transverse frame to move in the X-axis, Y-axis and Z-axis directions; the upper surface of the transverse frame is connected with a driving assembly, and a vacuum suction nozzle, a positioning needle and a ceramic ring clamping mechanism are installed on the lower surface of the transverse frame. The distribution positions of the positioning needles correspond to the distribution positions of mounting holes formed in the graphite boat sheet, and the driving assembly drives the graphite boat sheet adsorption carrying mechanism until the positioning needles are aligned and penetrate into the mounting holes of the graphite boat sheet; the ceramic ring clamping mechanism is used for clamping the ceramic rings, the vacuum suction nozzle is used for adsorbing the graphite boat pieces, and efficient disassembly and carrying of the graphite boat pieces can be achieved.

Description

[0001] This application is a divisional application of the following application: the application date is November 11, 2024, the application number is 202411599094.9, and the invention name is a graphite boat disassembly and assembly device. Technical Field

[0002] The present invention relates to the technical field of graphite boat disassembly and assembly, and specifically relates to a graphite boat sheet handling mechanism and a graphite boat disassembly and assembly device. Background Art

[0003] With the continuous reduction of the cost of photovoltaic power generation, solar power generation will have a broader market space. The graphite boat, as a carrier when plating anti-reflection films on solar cell wafers, its structure and size directly affect the conversion efficiency and production efficiency of silicon wafers.

[0004] After the graphite boat is used for a period of time, the boat sheets will become loose, and the surface of the boat sheets will be covered with dust, affecting the efficiency of the graphite boat. Therefore, the graphite boat will be disassembled, the boat sheets will be purged and cleaned of dust, and damaged accessories such as nuts, ceramic rings, and clamping points will be replaced. After replacing the accessories and calibration, the graphite boat sheets will be assembled and applied.

[0005] The existing disassembly and assembly of graphite boats use independent mechanical equipment in cooperation with manual labor to complete disassembly and assembly, with relatively low efficiency, and the various equipment is scattered and occupies a large area.

[0006] Therefore, we propose a graphite boat disassembly and assembly device to facilitate solving the problems raised above. Summary of the Invention

[0007] The purpose of the present invention is to provide a graphite boat disassembly and assembly device to solve the problems raised in the above background art.

[0008] To achieve the above purpose, the present invention provides the following technical solution: A graphite boat disassembly and assembly device, comprising: a graphite boat disassembly and assembly machine main body, a graphite boat sheet buffer area, and a graphite boat clamping point loading and unloading machine. The graphite boat disassembly and assembly machine main body is docked with the graphite boat sheet buffer area, and the graphite boat sheet buffer area is docked with the graphite boat clamping point loading and unloading machine;

[0009] A graphite boat rotation and handling mechanism, two graphite boat disassembly and assembly components, a graphite boat sheet transmission device, a loading and unloading turnover mechanism, and a graphite boat sheet handling mechanism are arranged inside the graphite boat disassembly and assembly machine main body. The two graphite boat disassembly and assembly components are located on both sides of the graphite boat sheet transmission device. A graphite boat sheet handling mechanism is arranged above the two graphite boat disassembly and assembly components and the graphite boat sheet transmission device. A graphite boat rotation and handling mechanism is arranged above the loading and unloading turnover mechanism and the graphite boat sheet handling mechanism. The loading and unloading turnover mechanism caches graphite boats;

[0010] The graphite boat disassembly and assembly component includes a disassembly and assembly mechanism, a first placement platform, a disassembly and assembly platform, and a second placement platform. The second placement platform is located on both sides of the graphite boat sheet transfer device. In the direction away from the graphite boat sheet transfer device, the disassembly and assembly platform and the first placement platform are sequentially arranged. The disassembly and assembly mechanism is arranged above the disassembly and assembly platform and the first placement platform;

[0011] On both ends of the disassembly and assembly platform, there are a good product placement platform, an electrode block buffer column, and a waste product recycling box. The electrode block buffer column is connected to the electrode block picking and placing mechanism;

[0012] An elevating and positioning mechanism is installed below the disassembly and assembly platform. The elevating and positioning mechanism includes a fixed platform plate, which is fixedly installed on the outer frame on both sides of the disassembly and assembly platform. Above the fixed platform plate, there is a lifting platform plate. Two linkage rods are slidably arranged on the lifting platform plate. Between the fixed platform plate and the lifting platform plate, two third lifting drive mechanisms are arranged. The third lifting drive mechanism drives the lifting platform plate to lift. Below both ends of the lifting platform plate, two groups of horizontal pushing cylinders are respectively arranged. The telescopic end of the horizontal pushing cylinder is fixed to the connecting arm. The other end of the connecting arm is fixedly connected to the linkage rod. A number of driving linkages are fixedly installed on the linkage rod. A clamping seat is installed at the end of the driving linkage. The clamping seats are clamped in a staggered manner. The graphite boat sheet series connection rod is clamped inside the clamping seat. A number of pairs of nut positioning columns are fixedly installed on the fixed platform plate. The nut positioning columns pass through the disassembly and assembly platform and the clamping seat movably and are inserted and fixed to the bottom of the graphite boat sheet series connection rod;

[0013] A boat sheet buffering mechanism is arranged in the graphite boat sheet buffer area. The boat sheet buffering mechanism buffers the scrapped boat sheets and the good boat sheets.

[0014] Preferably, the graphite boat rotating and handling mechanism includes two groups of symmetric first slide rails and a first conveying device. A handling machine main body is slidably arranged on the first slide rail. The handling machine main body is fixedly connected to the first conveying device. The first conveying device drives the handling machine main body to move along the first slide rail above the graphite boat disassembly and assembly component and the loading and unloading turnover mechanism.

[0015] Preferably, the handling machine main body includes a moving platform seat. Both ends of the moving platform seat are slidably connected to the first slide rail. Both ends of the moving platform seat are fixedly connected to the first conveying device. Two first lifting drive mechanisms are arranged on the moving platform seat. The lower end of the first lifting drive mechanism is connected to the jaw lifting seat. Claw assemblies are installed at both ends of the jaw lifting seat. The claw assemblies are automatically slidably connected to the jaw lifting seat. The claw assemblies are provided with a motor assembly for driving the claw to flip.

[0016] Preferably, the graphite boat sheet handling mechanism includes two groups of symmetric second slide rails and a second conveying device. Two moving cross beams are slidably arranged on the second slide rail. Both ends of the moving cross beam are fixedly connected to the second conveying device. A graphite boat sheet adsorption and handling mechanism is hoisted in the middle of the moving cross beam.

[0017] Preferably, the graphite boat sheet adsorption and handling mechanism includes a fixed seat fixedly installed on the moving crossbeam. An automatic lifting seat is slidably connected to the fixed seat. The automatic lifting seat hoists a crossbeam. A number of vacuum suction nozzles, positioning pins and ceramic ring clamping mechanisms are provided on the crossbeam. The vacuum suction nozzles adsorb the boat sheets, and pressing ejector pin assemblies are installed at both ends of the fixed seat.

[0018] Preferably, the disassembly and assembly mechanism includes a bracket which is fixedly arranged. A Y-axis moving component is arranged on the bracket. Two groups of X-axis moving components are arranged on the Y-axis moving component. A Z-axis disassembly and assembly manipulator is arranged on the X-axis moving component;

[0019] The Z-axis disassembly and assembly manipulator includes a Z-axis moving seat, and a nut disassembly machine and a vision inspection machine are installed in the Z-axis moving seat;

[0020] The Z-axis moving seat is an automatic Z-axis moving module, which drives the nut disassembly machine and the vision inspection machine to lift;

[0021] A clamping jaw driven by a clamping cylinder is further arranged at the lower end of the Z-axis moving seat.

[0022] Preferably, end positioning mechanisms are installed on the lower surfaces at both ends of the disassembly and assembly platform. The end positioning mechanism includes a fourth lifting drive mechanism which drives a lifting connection with a lifting seat. A supporting clamping jaw, a lifting cylinder and a supporting positioning column are arranged on the lifting seat. The lifting cylinder drives a lifting connection with the supporting clamping jaw.

[0023] Preferably, the first placement platform includes a fixed fixing plate. The fixing plate is fixedly connected to a second lifting drive mechanism in the middle. The telescopic end of the second lifting drive mechanism is fixedly connected to a lifting flat plate. A number of guide columns are arranged between the fixing plate and the lifting flat plate;

[0024] A number of ceramic ring buffer columns are installed on the upper surface of the fixing plate. The ceramic ring buffer columns pass through the lifting flat plate movably. The ceramic ring buffer columns buffer the removed ceramic rings. The removed graphite boat accessories such as nuts are placed on the upper surface of the lifting flat plate.

[0025] Preferably, a number of bottom positioning cylinders are installed below the disassembly and assembly platform. The bottom positioning cylinders drive a positioning plate.

[0026] Preferably, the graphite boat sheet transmission device includes a first section of conveyor line and a second section of conveyor line. The first section of conveyor line and the second section of conveyor line are butted. A boat sheet carrier plate positioning mechanism is arranged in the first section of conveyor line. A detection camera and an air knife are arranged at the end of the second section of conveyor line.

[0027] Compared with the prior art, the beneficial effects of the present invention are:

[0028] The graphite boat is loaded onto the loading and unloading turnover mechanism. The graphite boat rotary handling mechanism rotates the graphite boat on the loading and unloading turnover mechanism by 90° and then transports it to the graphite boat disassembly and assembly component for the disassembly of nuts, ceramic rings, and electrode blocks. The graphite boat plate handling mechanism sequentially adsorbs the boat plates and places them into the graphite boat plate transmission device to be transported to the boat plate temporary buffer mechanism, and then after being detected by the champing machine and replacing the champing points, it is sent back to the graphite boat disassembly and assembly component for assembly. The assembled graphite boat is then sent to the loading and unloading turnover mechanism for unloading. During this process, the scrapped boat plates, nuts, and ceramic rings are automatically replaced. The whole process has a high degree of automation. Two sets of graphite boat disassembly and assembly components work alternately, and the disassembly and assembly are completed integrally, greatly improving the efficiency of graphite boat plate calibration and replacement of accessories. The overall structure of the equipment is compact and occupies a small area. Description of the Drawings

[0029] Figure 1 It is a structural schematic diagram of the present invention;

[0030] Figure 2 It is a schematic diagram of the main structure of the present invention;

[0031] Figure 3 It is an exploded view of the main structure of the present invention;

[0032] Figure 4 It is a structural schematic diagram of the graphite boat rotary handling mechanism in the present invention;

[0033] Figure 5 For the present invention Figure 4 An enlarged view of part A;

[0034] Figure 6 It is a structural schematic diagram of the graphite boat plate handling mechanism in the present invention;

[0035] Figure 7 It is a structural schematic diagram of the graphite boat plate adsorption and handling mechanism in the present invention;

[0036] Figure 8 An enlarged partial view of the graphite boat plate adsorption and handling mechanism in the present invention;

[0037] Figure 9 It is a structural schematic diagram of the graphite boat disassembly and assembly component in the present invention;

[0038] Figure 10 It is an exploded view of the disassembly and assembly mechanism and the disassembly and assembly platform in the present invention;

[0039] Figure 11 For the present invention Figure 10 An enlarged view of part B;

[0040] Figure 12 It is a structural schematic diagram of the disassembly and assembly mechanism in the present invention;

[0041] Figure 13It is a partial structural schematic diagram of the Z-axis disassembly and assembly manipulator in the present invention;

[0042] Figure 14 It is a structural schematic diagram of the end positioning mechanism in the present invention;

[0043] Figure 15 It is a structural schematic diagram of the first placement platform in the present invention;

[0044] Figure 16 It is a structural schematic diagram of the lifting and positioning mechanism in the present invention;

[0045] Figure 17 It is a partial side elevation view of the lifting and positioning mechanism in the present invention;

[0046] Figure 18 For the present invention Figure 16 Enlarged view of part D;

[0047] Figure 19 For the present invention Figure 10 Enlarged view of part C

[0048] Figure 20 It is a structural schematic diagram of the graphite boat sheet transmission device in the present invention.

[0049] In the figure: 1. Main body of the graphite boat disassembly and assembly machine; 2. Buffer area for graphite boat plates; 3. Loading and unloading machine for graphite boat clamping points; 4. Rotary handling mechanism for graphite boat; 41. First slide rail; 42. First conveying device; 44. Main body of the handler; 441. Mobile platform base; 442. First lifting drive mechanism; 443. Claw lifting seat; 444. Claw assembly; 5. Disassembly and assembly component for graphite boat; 51. Disassembly and assembly mechanism; 511. Bracket; 512. Y-axis moving component; 513. X-axis moving component; 514. Z-axis disassembly and assembly manipulator; 5141. Nut disassembly and assembly machine; 5142. Vision inspection machine; 5143. Z-axis moving seat; 5144. Clamping cylinder; 5145. Opening and closing claw; 52. First placement platform; 521. Fixed plate; 522. Second lifting drive mechanism; 523. Lifting flat plate; 524. Guide post; 525. Ceramic ring buffer post; 53. Disassembly and assembly platform; 531. Good product placement platform; 532. Electrode block buffer post; 533. Scrap recycling box; 534. Electrode block picking and placing mechanism; 54. Second placement platform; 55. Lifting and positioning mechanism; 551. Fixed platform plate; 552. Lifting platform plate; 553. Driving link; 554. Clamping seat; 555. Third lifting drive mechanism; 556. Horizontal pushing cylinder; 557. Nut positioning post; 558. Connecting arm; 559. Linkage rod; 56. End positioning mechanism; 561. Fourth lifting drive mechanism; 562. Supporting claw; 563. Lifting seat; 564. Lifting cylinder; 565. Supporting positioning post; 57. Bottom positioning cylinder; 6. Boat plate buffer mechanism; 7. Gantry handling mechanism; 8. Temporary buffer mechanism for boat plates; 9. Graphite boat plate transmission device; 91. First section of conveyor line; 92. Second section of conveyor line; 93. Detection camera; 94. Air knife; 10. Loading and unloading turnover mechanism; 11. Graphite boat plate handling mechanism; 111. Second slide rail; 112. Second conveying device; 113. Moving cross beam; 114. Graphite boat plate adsorption and handling mechanism; 1141. Fixed seat; 1142. Automatic lifting seat; 1143. Cross frame; 1144. Vacuum suction nozzle; 1145. Positioning pin; 1146. Ceramic ring clamping mechanism; 1147. Pressing down thimble assembly. Detailed implementation manners

[0050] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0051] Please refer to Figure 1, the present invention provides a technical solution: a graphite boat disassembly and assembly device, comprising: a graphite boat disassembly and assembly machine main body 1, a graphite boat sheet buffer area 2, and a graphite boat clamping point loading and unloading machine 3. The graphite boat disassembly and assembly machine main body 1 is docked with the graphite boat sheet buffer area 2, and the graphite boat sheet buffer area 2 is docked with the graphite boat clamping point loading and unloading machine 3. After the graphite boat is disassembled by the graphite boat disassembly and assembly machine main body 1, the boat sheets enter the graphite boat sheet buffer area 2, then enter the graphite boat clamping point loading and unloading machine 3 to replace the clamping points, and then return to the graphite boat disassembly and assembly machine main body 1 for assembly.

[0052] Please refer to Figure 2 and Figure 3 , a graphite boat rotation and handling mechanism 4, two graphite boat disassembly and assembly components 5, a graphite boat sheet transmission device 9, a loading and unloading turnover mechanism 10, and a graphite boat sheet handling mechanism 11 are arranged in the graphite boat disassembly and assembly machine main body 1. The two graphite boat disassembly and assembly components 5 are located on both sides of the graphite boat sheet transmission device 9. A graphite boat sheet handling mechanism 11 is horizontally arranged above the two graphite boat disassembly and assembly components 5 and the graphite boat sheet transmission device 9. A graphite boat rotation and handling mechanism 4 is horizontally arranged above the loading and unloading turnover mechanism 10 and the graphite boat sheet handling mechanism 11. The loading and unloading turnover mechanism 10 buffers the graphite boat. The graphite boat rotation and handling mechanism 4 transports and flips the graphite boat on the loading and unloading turnover mechanism 10 by 90° and places it on the graphite boat disassembly and assembly component 5 for disassembly into boat sheets. The graphite boat sheet handling mechanism 11 places the disassembled boat sheets on the graphite boat sheet transmission device 9 and transports them to the graphite boat sheet buffer area 2. The boat sheets after replacing the clamping points are placed back on the graphite boat sheet transmission device 9 and transported back. They are transported to the graphite boat disassembly and assembly component 5 by the graphite boat sheet handling mechanism 11 for assembly. Then, the assembled graphite boat is transported to the loading and unloading turnover mechanism 10 for unloading by the graphite boat rotation and handling mechanism 4.

[0053] Please refer to Figure 4 , the graphite boat rotation and handling mechanism 4 includes two groups of symmetric first slide rails 41 and a first transmission device 42. A set of handling machine main bodies 44 are slidably arranged on the first slide rails 41. The handling machine main bodies 44 are fixedly connected to the first transmission device 42. The first transmission device 42 drives the handling machine main bodies 44 to move along the first slide rails 41 above the graphite boat disassembly and assembly components 5 and the loading and unloading turnover mechanism 10.

[0054] Please refer to Figure 5The conveyor body 44 includes a mobile platform seat 441, both ends of the mobile platform seat 441 are slidably connected to the first slide rail 41, both ends of the mobile platform seat 441 are fixedly connected to the first conveying device 42, and two first lifting drive mechanisms 442 are arranged on the mobile platform seat 441. The lower end of the first lifting drive mechanism 442 is connected to the clamping claw hanging seat 443, and the two ends of the clamping claw hanging seat 443 are installed with a clamping claw assembly 444. The clamping claw assembly 444 is automatically slidably connected with the clamping claw hanging seat 443. The clamping claw assembly 444 is provided with a motor assembly for clamping claw flipping drive to realize the three-axial movement of the clamping claw assembly 444, so as to grab the graphite boat and travel back and forth between the graphite boat disassembly assembly assembly 5 and the loading and unloading turnover mechanism 10. At the same time, after the clamping claw assembly 444 grabs the graphite boat, it is driven to rotate by the motor assembly to flip the graphite boat 90°.

[0055] See also Figure 6 The graphite boat transport mechanism 11 includes two sets of symmetrical second slide rails 111 and a second conveying device 112. Two movable beams 113 are slidably arranged on the second slide rails 111. Both ends of the movable beams 113 are fixedly connected to the second conveying device 112. A graphite boat adsorption and transport mechanism 114 is centrally suspended on the movable beams 113. The second conveying device 112 drives the graphite boat adsorption and transport mechanism 114 to move linearly along the second slide rails 111, so that the graphite boat adsorption and transport mechanism 114 adsorbs the graphite boat and travels back and forth between the graphite boat transmission device 9 and the graphite boat disassembly and assembly component 5.

[0056] See also Figure 7 and Figure 8 The graphite boat sheet adsorption and transportation mechanism 114 includes a fixed seat 1141, which is fixedly installed on the moving crossbeam 113. The fixed seat 1141 is slidably connected to an automatic lifting seat 1142. The automatic lifting seat 1142 is hoisted on a cross frame 1143. The cross frame 1143 is provided with a plurality of vacuum suction nozzles 1144, positioning needles 1145 and a ceramic ring clamping mechanism 1146. The vacuum suction nozzle 1144 adsorbs the boat sheet, and the positioning needles 1145 are used to position the boat sheet during adsorption. The ceramic ring clamping mechanism 1146 clamps the ceramic ring. Pressing pin assemblies 1147 are installed at both ends of the fixed seat 1141 for pressing down the graphite rods or ceramic rods at both ends of the graphite boat to keep the graphite boat electrode block in a state to be grasped.

[0057] See also Figure 9, the graphite boat disassembly and assembly component 5 includes a disassembly and assembly mechanism 51, a first placement platform 52, a disassembly and assembly platform 53, and a second placement platform 54. The second placement platform 54 is located on one side of the graphite boat sheet transfer device 9. The disassembly and assembly platform 53 and the first placement platform 52 are arranged in sequence in the direction away from the graphite boat sheet transfer device 9. The disassembly and assembly mechanism 51 is arranged above the disassembly and assembly platform 53 and the first placement platform 52. After the graphite boat is rotated 90°, it is placed on the disassembly and assembly platform 53 for positioning. The disassembly and assembly mechanism 51 disassembles the nuts of the graphite boat. The graphite boat sheet adsorption and handling mechanism 114 sequentially adsorbs and places the boat sheets on the graphite boat sheet transfer device 9. Then, the graphite boat sheet adsorption and handling mechanism 114 clamps and places the ceramic rings on the first placement platform 52. When returning, the boat sheets on the graphite boat sheet transfer device 9 are adsorbed and transported to the second placement platform 54 for caching. After all the boat sheets are returned, the boat sheets on the second placement platform 54 and the ceramic rings on the first placement platform 52 are sequentially transported to the disassembly and assembly platform 53. Finally, the disassembly and assembly mechanism 51 assembles and detects the nuts, etc. After the detection is completed, it is transported to the loading and unloading turnover mechanism 10 for unloading by the graphite boat rotation and handling mechanism 4.

[0058] Please refer to Figure 10 and Figure 11 , at both ends of the disassembly and assembly platform 53, there are a good product placement platform 531, an electrode block buffer column 532, and a waste product recycling box 533. The electrode block buffer column 532 is connected to the electrode block picking and placing mechanism 534. The good product placement platform 531 pre-stores good nuts and ceramic rings for replacing the worn nuts and ceramic rings removed from the graphite boat. The worn nuts and ceramic rings are put into the waste product recycling box 533 for recycling. The electrode block buffer column 532 is used for buffering the disassembled motor sheets. The electrode block picking and placing mechanism 534 is used to lift the electrode block to the top of the buffer column for easy removal of the electrode block.

[0059] Please refer to Figure 12 and Figure 13 , the disassembly and assembly mechanism 51 includes a bracket 511. The bracket 511 is fixedly arranged. A Y-axis moving component 512 is arranged on the bracket 511. Two groups of X-axis moving components 513 are arranged on the Y-axis moving component 512. A Z-axis disassembly and assembly manipulator 514 is arranged on the X-axis moving component 513 to realize the movement of the Z-axis disassembly and assembly manipulator 514 along the X, Y, and Z axes;

[0060] The Z-axis disassembly and assembly manipulator 514 includes a Z-axis moving seat 5143. A nut disassembly machine 5141 and a vision inspection machine 5142 are installed in the Z-axis moving seat 5143. The nut disassembly machine 5141 is used for disassembling and assembling accessories such as nuts. The removed nuts are placed on the first placement platform 52. The vision inspection machine 5142 is used for taking pictures of accessories such as nuts, positioning the accessories such as nuts, and detecting whether they are worn;

[0061] The Z-axis moving seat 5143 is an automatic Z-axis moving module that drives the nut disassembly machine 5141 and the vision inspection machine 5142 to lift and lower;

[0062] At the lower end of the Z-axis moving seat 5143, there is also an opening and closing jaw 5145 driven by a clamping cylinder 5144. The opening and closing jaw 5145 is used to clamp the electrode block and the ceramic ring, place the electrode block on the electrode block buffer column 532, or remove it from the electrode block buffer column 532 and place it on the graphite boat. The scrapped nuts and ceramic rings are put into the scrap recycling box 533.

[0063] Please refer to Figure 10 and Figure 14 , at the lower surfaces of both ends of the disassembly and assembly platform 53, an end positioning mechanism 56 is installed. The end positioning mechanism 56 includes a fourth lifting drive mechanism 561. The fourth lifting drive mechanism 561 drives the lifting connection of the lifting seat 563. On the lifting seat 563, there are a supporting jaw 562, a lifting cylinder 564, and a supporting positioning column 565. The lifting cylinder 564 drives the lifting connection of the supporting jaw 562. When disassembling the boat plate, the lower end of the series connection rod of the graphite boat plate is lifted and fixed by the supporting positioning column 565, which is convenient for the nut at the top to be rotated and disassembled. After the boat plate is disassembled, the supporting positioning column 565 descends, and the supporting jaw 562 rises to clamp the series connection rod to prevent the series connection rod from shaking.

[0064] Please refer to Figure 15 , the first placement platform 52 includes a fixed fixing plate 521. The fixing plate 521 is fixedly connected to the second lifting drive mechanism 522 in the middle. The telescopic end of the second lifting drive mechanism 522 is fixedly connected to the lifting flat plate 523. Between the fixing plate 521 and the lifting flat plate 523, there are several guiding columns 524. The guiding columns 524 are used for guiding to make the fixing plate 521 and the lifting flat plate 523 lift vertically;

[0065] On the upper surface of the fixing plate 521, several ceramic ring buffer columns 525 are installed. The ceramic ring buffer columns 525 pass through the lifting flat plate 523 movably. The ceramic ring buffer columns 525 are used to buffer the removed ceramic rings. The upper surface of the lifting flat plate 523 is used to place the removed nuts and other accessories.

[0066] Please refer to Figure 9 , Figure 15 , Figure 16 and Figure 17, a lifting and positioning mechanism 55 is installed below the disassembly and assembly platform 53. The lifting and positioning mechanism 55 includes a fixed platform plate 551, which is suspended and hoisted below the disassembly and assembly platform 53. Above the fixed platform plate 551, there is a lifting platform plate 552. Two linkage rods 559 are slidably arranged on the lifting platform plate 552. Between the fixed platform plate 551 and the lifting platform plate 552, two third lifting drive mechanisms 555 are arranged. The third lifting drive mechanism 555 drives the lifting of the lifting platform plate 552. Below both ends of the lifting platform plate 552, two groups of horizontal push cylinders 556 are respectively arranged. The telescopic ends of the horizontal push cylinders 556 are fixed to the connecting arms 558. The other ends of the connecting arms 558 are fixedly connected to the linkage rods 559. A number of drive link rods 553 are fixedly installed on the linkage rods 559. Clamping seats 554 are installed at the ends of the drive link rods 553. The clamping seats 554 are misaligned for clamping. A number of pairs of nut positioning columns 557 are installed on the fixed platform plate 551. The nut positioning columns 557 pass through the clamping seats 554 and the disassembly and assembly platform 53 movably;

[0067] The nut positioning columns 557 fix the nuts at the bottom of the graphite boat sheet series connection rod from below, so that the series connection rod is fixed, and then it is convenient to disassemble and assemble the nuts at the top of the series connection rod. The third lifting drive mechanism 555 drives the lifting of the lifting platform plate 552 to drive the clamping seats 554 to rise. The horizontal push cylinders 556 drive the two linkage rods 559 to approach through the connecting arms 558, so that the clamping seats 554 clamp the graphite boat sheet series connection rod to make it vertical and stable.

[0068] Please refer to Figure 9 and Figure 18 , a number of bottom positioning cylinders 57 are installed below the disassembly and assembly platform 53. The bottom positioning cylinders 57 drive the positioning plates to clamp the graphite boat sheets from the side for side positioning of the graphite boat.

[0069] Please refer to Figure 19 , the graphite boat sheet transmission device 9 includes a first section of conveyor line 91 and a second section of conveyor line 92. The first section of conveyor line 91 and the second section of conveyor line 92 are butt-jointed. In the first section of conveyor line 91, a boat sheet carrier positioning mechanism is arranged. The boat sheet carrier positioning mechanism is composed of a cylinder driving a convex shaft to insert into the boat sheet to achieve boat sheet positioning. At the end of the second section of conveyor line 92, a detection camera 93 and an air knife 94 are arranged. The detection camera 93 is used to detect the appearance and clamping points on the boat sheet. At the same time, the air knife 94 cleans the dust on the surface of the boat sheet and the graphite boat residues on the carrier plate.

[0070] Please refer to Figure 2 , a boat sheet caching mechanism 6 is arranged in the graphite boat sheet buffer area 2. The boat sheet caching mechanism 6 is used to cache scrapped boat sheets and good boat sheets. The detected unqualified boat sheets are put into the boat sheet caching mechanism 6 for discharging, and the good boat sheets are taken away to replace the scrapped boat sheets;

[0071] The boat piece buffer mechanism 6 is docked with the boat piece temporary buffer mechanism 8, and the boat piece temporary buffer mechanism 8 is docked with the boat piece clamping point machine. Above the boat piece temporary buffer mechanism 8 and the boat piece buffer mechanism 6, a gantry handling mechanism 7 is horizontally arranged. The gantry handling mechanism 7 travels back and forth through the boat piece temporary buffer mechanism 8, the boat piece buffer mechanism 6, and the graphite boat piece transmission device 9 for handling the boat pieces of the three parties.

[0072] Working principle: The graphite boat is loaded onto the loading and unloading turnover mechanism 10. The graphite boat rotating handling mechanism 4 rotates the graphite boat on the loading and unloading turnover mechanism 10 by 90° and then transports it to the graphite boat disassembly and assembly component 5 for disassembling nuts, ceramic rings, and electrode blocks. The graphite boat piece handling mechanism 11 sequentially adsorbs the boat pieces and places them into the graphite boat piece transmission device 9 for transportation to the boat piece temporary buffer mechanism 8. After being detected by the clamping point machine and having the clamping points replaced, it is sent back to the graphite boat disassembly and assembly component 5 for assembly. The assembled graphite boat is then sent to the loading and unloading turnover mechanism 10 for unloading.

[0073] During this process, the scrapped boat pieces, nuts, and ceramic rings are automatically replaced.

[0074] The whole process has a high degree of automation. The two groups of graphite boat disassembly and assembly components 5 work alternately, and the disassembly and assembly are completed integrally, greatly improving the efficiency of graphite boat piece calibration and replacement of accessories. The structure is compact and the floor area is small.

[0075] The content not described in detail in this specification belongs to the prior art well-known to those skilled in the art.

[0076] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A graphite boat sheet handling mechanism, characterized in that, It includes a driving component and a graphite boat sheet adsorption and handling mechanism (114). The graphite boat sheet adsorption and handling mechanism (114) includes a cross frame (1143), a vacuum suction nozzle (1144), a positioning pin (1145), and a ceramic ring clamping mechanism (1146). The driving component is used to drive the cross frame (1143) to move in the XYZ three-axis directions; The upper surface of the cross frame (1143) is connected to the driving component, and the vacuum suction nozzle (1144), the positioning pin (1145), and the ceramic ring clamping mechanism (1146) are installed on the lower surface of the cross frame (1143); The distribution positions of the positioning pins (1145) correspond to the distribution positions of the mounting holes opened on the graphite boat sheet. The driving component drives the graphite boat sheet adsorption and handling mechanism (114) to move until the positioning pins (1145) are aligned with and penetrate into the mounting holes of the graphite boat sheet; The ceramic ring clamping mechanism (1146) is used to clamp the ceramic ring, and the vacuum suction nozzle (1144) is used to adsorb the graphite boat sheet.

2. The graphite boat sheet handling mechanism according to claim 1, characterized in that The driving component includes a lifting component and a translation component. The lifting component includes a fixed seat (1141) and an automatic lifting seat (1142); One end of the fixed seat (1141) is fixedly installed on the translation component, and the other end of the fixed seat (1141) is slidably connected to the automatic lifting seat (1142) along the Z axis. The automatic lifting seat (1142) hoists the cross frame (1143).

3. The graphite boat sheet handling mechanism according to claim 2, wherein The translation component includes a second conveying device (112), a moving cross beam (113), and a second slide rail (111); Two sets of the second conveying devices (112) are arranged oppositely. Two sets of the second slide rails (111) are correspondingly arranged below the two sets of the second conveying devices (112). The two ends of the moving cross beam (113) are respectively connected to the two sets of the second conveying devices (112) arranged oppositely. The two bottom ends of the moving cross beam (113) are respectively slidably connected to the two sets of the second slide rails (111). The fixed seat (1141) is hoisted in the middle of the moving cross beam (113).

4. The graphite boat sheet handling mechanism according to claim 1, characterized in that, Both ends in the length direction of the cross frame (1143) include a pressing down thimble assembly (1147). Each set of the pressing down thimble assemblies (1147) includes a thimble main body and a liftable cylinder. The two thimble main bodies are respectively opposite to the positions of two graphite rods at both ends in the length direction of the graphite boat. The liftable cylinder drives the thimble main body to press down the graphite rod to facilitate the opening and closing jaws to clamp the electrode block.

5. The graphite boat sheet handling mechanism according to claim 4, wherein, The thimble main body is arranged at the output end of the liftable cylinder. The liftable cylinder drives the thimble main body to descend in a direction perpendicular to the surface of the graphite boat sheet until it abuts against the graphite rod; the thimble main body is cylindrical, and the abutting surface is adapted to the surface of the graphite rod or the ceramic rod.

6. A graphite boat disassembly and assembly device, characterized in that, It includes the graphite boat sheet handling mechanism according to any one of claims 1-5.

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