Vacuum treatment equipment

Abstract

The invention belongs to the technical field of vacuum treatment, and discloses vacuum treatment equipment which is characterized in that a first loading frame can load a plurality of workpieces, and the first loading frame can be integrally placed in or leave a first cavity; the carrying mechanism is arranged in the first cavity and can carry the workpiece between the first cavity and the second cavity and selectively drive the workpiece to rotate in the workpiece carrying process. The first loading frame can be integrally placed in or separated from the first cavity, cleaning is convenient, and the workpiece conveying efficiency and the vacuum treatment yield are improved; the to-be-coated surface of the workpiece is loaded on the first loading frame towards the outside, and the carrying mechanism drives the workpiece to move and turn over, so that the to-be-coated surface of the workpiece faces the outside in the second cavity; the to-be-coated surface of the workpiece faces inwards and is loaded on the first loading frame, the carrying mechanism drives the workpiece to move, the workpiece does not need to be overturned, and the to-be-coated surface of the workpiece naturally faces outwards in the second cavity; and due to selective overturning of the carrying mechanism, the production flexibility of the vacuum treatment equipment is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum processing, and particularly to a vacuum processing device. Background Art

[0002] As an important thin film preparation process, sputtering coating technology bombards a target with high-energy particles in a vacuum environment, causing target atoms or molecules to sputter onto the surface of a substrate and deposit to form a thin film. This technology has advantages such as good film uniformity, strong adhesion, and controllable composition, and is widely used in fields such as optical devices, electronic components, and new energy batteries. It is one of the key technologies for realizing the preparation of high-performance functional thin films. With the continuous improvement of the requirements for film performance in various industries, higher demands are put forward for the structural optimization and process expansion of sputtering coating equipment.

[0003] In the prior art, the traditional way for a substrate to enter the loading chamber or leave the unloading chamber mostly adopts a single-piece mounting mode, that is, only one substrate can be transported each time. This mode not only results in a relatively low overall production capacity of the equipment, making it difficult to meet the efficiency requirements of large-scale industrial production; moreover, because the hanging rack for mounting the substrate is prone to adsorbing and accumulating particle contaminants during long-term use, the existing way of taking a single substrate as the transport unit makes it difficult to thoroughly clean the hanging rack. These residual contaminants may fall off and adhere to the coating surface of the substrate during the substrate transmission process, affecting the uniformity of the subsequent coating process and the yield of finished products, and increasing the difficulty of process stability control. Summary of the Invention

[0004] The purpose of the present invention is to provide a vacuum processing device to solve the problems of relatively low efficiency and difficulty in cleaning the hanging rack existing in the traditional way for a substrate to enter the loading chamber or leave the unloading chamber in the prior art due to the adoption of the single-piece mounting mode. The present invention improves the process compatibility, production efficiency, and production quality of the coating equipment.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] Provide a vacuum processing device, including:

[0007] A containing component, the containing component includes a first chamber and a second chamber, the first chamber and the second chamber are selectively communicated, and a workpiece can move between the first chamber and the second chamber;

[0008] A loading mechanism, the loading mechanism is arranged in the first chamber, the loading mechanism includes a first loading rack, the first loading rack can load a plurality of the workpieces, and the first loading rack can be integrally placed into or taken out of the first chamber;

[0009] A conveying mechanism is provided in the first chamber. The conveying mechanism can convey the workpiece between the first chamber and the second chamber and selectively drive the workpiece to rotate during the conveying process.

[0010] As an alternative technical solution of the vacuum processing equipment, there are two first chambers.

[0011] As an alternative technical solution of the vacuum processing equipment, the loading mechanism further includes a second loading rack. The second loading rack is rotatably arranged around its own central axis in the first chamber. There are multiple first loading racks, and the first loading racks are annularly arranged around the central axis of the second loading rack on the second loading rack. The first loading racks are detachable and can rotate around their own central axes.

[0012] As an alternative technical solution of the vacuum processing equipment, the loading mechanism further includes a first fitting, a first receiver, a second fitting, and a second receiver. The first fitting and the second fitting are respectively arranged at the top and bottom of the first loading rack, and the first receiver and the second receiver are respectively arranged at the top and bottom of the second loading rack;

[0013] The first fitting and the second fitting are both fixedly connected to the first loading rack. The first receiver is rotatably connected to the second loading rack. The first fitting is drivingly connected to the first receiver and is detachable;

[0014] The second receiver can be rotatably connected to the second loading rack and is drivingly connected to the second fitting and is detachable;

[0015] Or the second receiver can be fixedly connected to the second loading rack and is rotatably connected to the second fitting.

[0016] As an alternative technical solution of the vacuum processing equipment, the vacuum processing equipment further includes a driving mechanism. The driving mechanism is arranged at the top or bottom of the second loading rack to drive the first loading rack and the second loading rack to rotate.

[0017] As an alternative technical solution of the vacuum processing equipment, the loading mechanism further includes a counterweight. The counterweight is detachably loaded on the first loading rack.

[0018] As an alternative technical solution of the vacuum processing equipment, the conveying mechanism includes a carrier and a fixing member. The fixing member is arranged on the carrier. The bottom of the workpiece is detachably connected to the fixing member. The carrier can rotate at any angle around the vertical direction to drive the workpiece to rotate at any angle.

[0019] As an alternative technical solution of the vacuum processing equipment, the conveying mechanism further includes a limiting member disposed on the periphery of the carrier, and the limiting member can selectively abut against the carrier to limit the rotation of the carrier.

[0020] As an alternative technical solution of the vacuum processing equipment, the conveying mechanism further includes a conveying member disposed in the first chamber, and the carrier is slidably disposed on the conveying member and can extend into or withdraw from the second chamber to drive the workpiece to move between the first chamber and the second chamber.

[0021] As an alternative technical solution of the vacuum processing equipment, the conveying mechanism further includes a robotic arm disposed on the top of the first chamber. The robotic arm is detachably connected to the workpiece, and the robotic arm and the carrier can jointly clamp the workpiece to load or unload the workpiece onto the first loading rack.

[0022] Advantages of the present invention:

[0023] The present application discloses a vacuum processing equipment, which includes a housing assembly, a loading mechanism, and a conveying mechanism. The housing assembly includes a first chamber and a second chamber, and the first chamber and the second chamber are selectively communicated, and the workpiece can move between the first chamber and the second chamber; the loading mechanism is disposed in the first chamber, and the loading mechanism includes a first loading rack capable of loading a plurality of workpieces, and the first loading rack can be integrally placed into or removed from the first chamber; the conveying mechanism is disposed in the first chamber, and the conveying mechanism can convey the workpiece between the first chamber and the second chamber and selectively drive the workpiece to rotate during the conveying process. By enabling the first loading rack to be integrally placed into or removed from the first chamber, the efficiency of workpiece conveying is improved, and the detachable first loading rack is convenient for cleaning, improving the yield of workpiece vacuum processing; a conveying mechanism is provided between the first chamber and the second chamber. When it is necessary to vacuum process the workpiece in the first chamber, the coating surface of the workpiece is oriented outward and loaded on the first loading rack. After the vacuum processing is completed, the conveying mechanism drives the workpiece to move and flip so that the coating surface of the workpiece faces outward in the second chamber; when the first chamber does not need to vacuum process the workpiece, the coating surface of the workpiece is oriented inward and loaded on the first loading rack, and the conveying mechanism drives the workpiece to move without flipping, and the coating surface of the workpiece will naturally face outward in the second chamber; the selective flipping of the conveying mechanism improves the production flexibility of the vacuum processing equipment. Description of the Drawings

[0024] To more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the accompanying drawings required for the description of the embodiments of the present invention. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can be obtained based on the content of the embodiments of the present invention and these accompanying drawings.

[0025] Figure 1 is one of the schematic structural diagrams of the vacuum processing equipment provided by the embodiments of the present invention;

[0026] Figure 2 is another schematic structural diagram of the vacuum processing equipment provided by the embodiments of the present invention;

[0027] Figure 3 is one of the partial schematic structural diagrams of the vacuum processing equipment provided by the embodiments of the present invention;

[0028] Figure 4 is the schematic structural diagram of the first fitting provided by one of the embodiments of the present invention;

[0029] Figure 5 is the schematic structural diagram of the first receiver provided by one of the embodiments of the present invention;

[0030] Figure 6 is the schematic structural diagram of the second fitting provided by one of the embodiments of the present invention;

[0031] Figure 7 is the schematic structural diagram of the second receiver provided by one of the embodiments of the present invention;

[0032] Figure 8 is the schematic structural diagram of the transfer mechanism of the vacuum processing equipment provided by the embodiments of the present invention;

[0033] Figure 9 is another partial schematic structural diagram of the vacuum processing equipment provided by the embodiments of the present invention.

[0034] In the figure:

[0035] 1. Workpiece;

[0036] 100. Accommodating assembly; 110. First chamber; 120. Second chamber;

[0037] 200. Loading mechanism; 210. First loading rack; 211. Sub-rotating shaft; 212. First sub-rotating disk; 213. Second sub-rotating disk; 214. Fixed pin; 215. Clamping plate; 220. Second loading rack; 221. First main rotating disk; 222. Second main rotating disk; 230. First fitting; 231. First quick-hanging part; 232. Second quick-hanging part; 233. Positioning pin; 240. First receiving part; 241. Abutting plate; 2411. Fitting hole; 24111. Guide surface; 2412. Positioning hole; 250. Second fitting; 260. Second receiving part; 261. Bearing; 262. Collar;

[0038] 300. Conveying mechanism; 310. Bearing part; 311. Abutting block; 320. Fixing part; 330. Conveying part; 340. Robot arm; 350. Limiting part; 360. Driving part;

[0039] 400. Driving mechanism. Detailed implementation mode

[0040] The present invention will be further described in detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present invention, rather than limiting the present invention. In addition, it should be noted that for the convenience of description, only the parts related to the present invention rather than all the structures are shown in the drawings.

[0041] In the description of the present invention, unless otherwise clearly defined and limited, the terms "connected", "connected", and "fixed" shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0042] In the present invention, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include direct contact between the first and second features, or may include that the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "above", and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "below", and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely means that the horizontal height of the first feature is lower than that of the second feature.

[0043] In the description of this embodiment, the orientation or positional relationships such as "upper", "lower", "right", etc. are based on the orientation or positional relationships shown in the drawings. It is only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present invention. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0044] In the prior art, the traditional way for a substrate to enter the loading chamber or leave the unloading chamber mostly adopts a single-piece mounting mode, that is, only one substrate can be transported each time. This mode not only results in a relatively low overall production capacity of the equipment, making it difficult to meet the efficiency requirements of large-scale industrial production; moreover, because the hanger for mounting the substrate is prone to adsorbing and accumulating particle contaminants during long-term use, the existing way of taking a single substrate as the transport unit makes it difficult to thoroughly clean the hanger. These residual contaminants may fall off and adhere to the coating surface of the substrate during the substrate transmission process, affecting the uniformity of the subsequent coating process and the yield of finished products, and increasing the difficulty of process stability control.

[0045] To solve the above problems, this embodiment provides a vacuum processing device. Refer to Figures 1 - 3 , the vacuum processing device includes a housing assembly 100, a loading mechanism 200, and a transfer mechanism 300.

[0046] Furthermore, the housing assembly 100 includes a first chamber 110 and a second chamber 120. The first chamber 110 and the second chamber 120 are selectively communicated, and the workpiece 1 can move between the first chamber 110 and the second chamber 120. In this embodiment, there are two first chambers 110. Specifically, the two first chambers 110 are respectively set as a loading chamber and an unloading chamber, and the second chamber 120 is set as a coating chamber. The two first chambers 110 and the second chamber 120 are distributed at triangular positions. Specifically, the first chamber 110 can be selectively provided with a coating source or an ion treatment source. Specifically, a gate valve or a throttle valve is provided between the first chamber 110 and the second chamber 120 to ensure the independence of the first chamber 110 and the second chamber 120 and prevent mutual contamination. A gate valve or a throttle valve is provided between the first chamber 110 and the atmosphere to maintain the vacuum performance of the first chamber 110 and avoid contamination of the first chamber 110 by pollutants in the atmosphere. It should be noted that vacuum devices are provided in both the first chamber 110 and the second chamber 120 to change the vacuum environment of the first chamber 110 and the second chamber 120. This is prior art and will not be elaborated here.

[0047] Further, a loading mechanism 200 is provided in the first chamber 110. The loading mechanism 200 includes a first loading rack 210 which is capable of loading a plurality of workpieces 1, and the first loading rack 210 can be integrally inserted into or removed from the first chamber 110. By enabling the first loading rack 210 to be integrally inserted into or removed from the first chamber 110, the conveying efficiency of the workpiece 1 is improved, and the detachable first loading rack 210 is convenient for cleaning, thereby improving the yield of vacuum treatment of the workpiece 1.

[0048] In the prior art, a sputtering coating apparatus generally includes three core functional areas: a wafer loading chamber, a coating chamber, and a wafer unloading chamber. During the substrate conveying process, limited by the mechanical structure design and the conveying path requirements, the substrate needs to maintain the posture with the coating surface facing inward in the wafer loading chamber and the wafer unloading chamber to ensure that when the substrate is conveyed to the coating chamber through the transfer mechanism, the coating surface can be adjusted to face outward, so as to align with the target in the coating chamber for deposition. This posture limitation results in the ineffective utilization of the space in the wafer loading chamber and the wafer unloading chamber: if a coating source is added in the wafer loading chamber or the wafer unloading chamber, since the coating surface of the substrate faces inward, it is impossible to form an effective deposition angle with the newly added coating source, making it difficult for the apparatus to expand the multi-functional coating process in links such as pre-cleaning and bottom film preparation, which restricts the process compatibility and production flexibility of the apparatus.

[0049] To solve the above problems, in this embodiment, a transfer mechanism 300 is provided in the first chamber 110. The transfer mechanism 300 can transfer the workpiece 1 between the first chamber 110 and the second chamber 120, and selectively drive the workpiece 1 to rotate during the transfer of the workpiece 1. It should be noted that the transfer mechanism 300 can choose to drive the workpiece 1 to rotate or not to drive the workpiece 1 to rotate. In other embodiments, if there is no working condition that requires driving the workpiece 1 to rotate, the first chamber 110 can be adaptively adjusted to cancel the setting of the transfer mechanism 300. By providing the transfer mechanism 300 between the first chamber 110 and the second chamber 120, when the workpiece 1 needs to be vacuum-treated in the first chamber 110, the coating surface to be coated of the workpiece 1 is loaded on the first loading rack 210 facing outward. After the vacuum treatment is completed, the transfer mechanism 300 drives the workpiece 1 to move and flip, so that the coating surface to be coated of the workpiece 1 faces outward in the second chamber 120; when the workpiece 1 does not need to be vacuum-treated in the first chamber 110, the coating surface to be coated of the workpiece 1 is loaded on the first loading rack 210 facing inward, and the transfer mechanism 300 drives the workpiece 1 to move without flipping, and the coating surface to be coated of the workpiece 1 will naturally face outward in the second chamber 120; the selective flipping of the transfer mechanism 300 improves the production flexibility of the vacuum treatment apparatus.

[0050] It should be noted that the loading quantity of the first loading rack 210 needs to be adjusted according to the required quantity of the workpieces 1 in the second chamber 120. Specifically, the loading mechanism 200 further includes a counterweight, which is detachably loaded on the first loading rack 210. When the required quantity of the workpieces 1 does not match the number of loading stations of the first loading rack 210, a counterweight needs to be loaded on the vacant loading station to ensure the stability and balance of the first loading rack 210. Specifically, an identification member is provided on the top of the counterweight to prevent the counterweight from being transported by the transport mechanism 300. It should be noted that setting an identification member on the counterweight and enabling the counterweight to be recognized by the manipulator is prior art, which will not be elaborated here.

[0051] Specifically, the loading mechanism 200 further includes a second loading rack 220. The second loading rack 220 is rotatably arranged in the first chamber 110 around its own central axis. There are multiple first loading racks 210, and the first loading racks 210 are annularly arranged around the central axis of the second loading rack 220 and are detachably rotatable around their own central axes. Specifically, the second loading rack 220 includes a main rotating shaft, a first main turntable 221, and a second main turntable 222. The main rotating shaft extends in the vertical direction and is respectively connected to the geometric centers of the first main turntable 221 and the second main turntable 222 at both ends.

[0052] In one embodiment, the first main turntable 221 is arranged as a circular disk, and the second main turntable 222 is arranged as a petal-shaped disk. In one embodiment, both the first main turntable 221 and the second main turntable 222 are arranged as circular disks. In one embodiment, both the first main turntable 221 and the second main turntable 222 are arranged as petal-shaped disks. It should be noted that the number of petals of the petal-shaped disk can be adjusted according to the actual demand quantity of the workpieces 1, and no limitation is made here.

[0053] Specifically, the first loading rack 210 includes a sub-rotating shaft 211, a first sub-rotating disk 212, and a second sub-rotating disk 213. The sub-rotating shaft 211 extends in the vertical direction and is rotatably connected to the first main rotating disk 221 and the second main rotating disk 222. Specifically, since connection holes are provided on the top, bottom, and non-coated surfaces of the workpiece 1, the first loading rack 210 has two styles, corresponding to the case where the surface to be coated of the workpiece 1 faces outward and the case where the surface to be coated of the workpiece 1 faces inward; when the surface to be coated of the workpiece 1 faces outward, the first sub-rotating disk 212 and the second sub-rotating disk 213 are arranged at intervals along the axial direction of the sub-rotating shaft 211, and the interval distance is less than the length of the workpiece 1. Fixing pins 214 are provided on the top surfaces of the first sub-rotating disk 212 and the second sub-rotating disk 213 to be inserted and fixed with the connection holes on the non-coated surface of the workpiece 1; when the surface to be coated of the workpiece 1 faces inward, the first sub-rotating disk 212 and the second sub-rotating disk 213 are arranged at intervals along the axial direction of the sub-rotating shaft 211, and the interval distance is greater than the length of the workpiece 1. Fixing pins 214 are provided on the opposite surfaces of the first sub-rotating disk 212 and the second sub-rotating disk 213 to be inserted and fixed with the connection holes on the top and bottom of the workpiece 1.

[0054] Specifically, both the first sub-rotating disk 212 and the second sub-rotating disk 213 are arranged as petal-shaped disks, and each petal is further divided into two small petals, and each small petal corresponds to a fixing pin 214. It should be noted that the number of petals of the petal-shaped disk can be adjusted according to the actual demand of the workpiece 1, and there is no limit here.

[0055] Furthermore, the first loading rack 210 further includes clamping plates 215. There are two clamping plates 215, which are arranged at intervals on the sub-rotating shaft 211. The distance between the two clamping plates 215 is greater than the length of the workpiece 1, facilitating the clamping manipulator to clamp the two clamping plates 215 under the condition that the workpiece 1 is loaded on the first loading rack 210, so as to drive the whole first loading rack 210 to move.

[0056] Furthermore, the vacuum processing equipment further includes a driving mechanism 400. The driving mechanism 400 is arranged on the top or bottom of the second loading rack 220 to drive the first loading rack 210 and the second loading rack 220 to rotate. The driving mechanism 400 includes a rotating motor or a rotating cylinder and a plurality of synchronizing members. Through the cooperation of the rotating motor and the plurality of synchronizing members, the single rotation of the second loading rack 220 and the synchronous rotation of a plurality of first loading racks 210 can be realized. It should be noted that since the driving mechanism 400 is a prior art, it will not be elaborated here.

[0057] Furthermore, the loading mechanism 200 further includes a first fitting 230, a first receiver 240, a second fitting 250, and a second receiver 260. The first fitting 230 and the second fitting 250 are respectively disposed at the top and bottom of the first loading rack 210, and the first receiver 240 and the second receiver 260 are respectively disposed at the top and bottom of the second loading rack 220. The first fitting 230 and the second fitting 250 are fixedly connected to the first loading rack 210. The first receiver 240 is rotatably connected to the second loading rack 220. The first fitting 230 is drivingly connected to the first receiver 240 and is detachable. The second receiver 260 can be rotatably connected to the second loading rack 220, drivingly connected to the second fitting 250, and is detachable; or the second receiver 260 can be fixedly connected to the second loading rack 220 and rotatably connected to the second fitting 250. Specifically, the fixed connection can be selected as integral molding or fixed fitting, which is not limited herein. Specifically, the driving mechanism 400 is connected to the first receiver 240 to drive the first loading rack 210 to rotate.

[0058] In this embodiment, the second fitting 250 is drivingly connected to the second receiver 260, and the second receiver 260 is rotatably connected to the second loading rack 220. Refer to Figures 4 - 7 , specifically, the first fitting 230 is set as a quick-release block, the first receiver 240 is set as a quick-release seat, the second fitting 250 is set as a short shaft, and the second receiver 260 is set as a follower seat.

[0059] Specifically, the quick-release block is set as a stepped shaft, including a first quick-release portion 231 and a second quick-release portion 232. The inner diameter of the first quick-release portion 231 is larger than that of the second quick-release portion 232. A receiving hole is provided at the end of the second quick-release portion 232. The sub-rotating shaft 211 is in transitional fit with the receiving hole. A positioning pin 233 is provided on the connection surface between the first quick-release portion 231 and the second quick-release portion 232. The quick-release seat is set as a "C" shape. An abutting plate 241 is provided on one side of the quick-release seat. A fitting hole 2411 is opened inside the abutting plate 241. The inner diameter of the fitting hole 2411 is the same as the outer diameter of the second quick-release portion 232. The second quick-release portion 232 is in transitional fit with the fitting hole 2411. The side wall of the fitting hole 2411 is set as an inwardly inclined guiding surface 24111. The side wall of the second quick-release portion 232 is set as an inclined surface with the same inclination angle. The side wall of the fitting hole 2411 guides the second quick-release portion 232. The abutting plate 241 is further provided with a guiding notch, which extends from the fitting hole 2411 to the notch of the quick-release seat. The abutting plate 241 is further provided with a positioning hole 2412, and the positioning hole 2412 is provided on the circumference of the fitting hole 2411. In this embodiment, the positioning hole 2412 and the positioning pin 233 are in corresponding positions and both are provided with two.

[0060] Specifically, the short shaft is arranged at the bottom of the sub-rotating shaft 211. The follower seat includes a bearing 261 and a collar 262. The second main turntable 222 is provided with an inner hole. The collar 262 is rotatably arranged in the inner hole. A bearing 261 is arranged between the collar 262 and the side wall of the inner hole. The short shaft is in transitional fit with the collar 262.

[0061] Specifically, when the first loading rack 210 needs to be installed on the second loading rack 220, the clamping manipulator clamps the clamping plate 215 to drive the first loading rack 210 close to the second loading rack 220. The sub-rotating shaft 211 enters the quick-connecting seat through the guiding notch. When the positioning pin 233 corresponds to the positioning hole 2412 in position, the first loading rack 210 is moved downward to insert the positioning pin 233 into the positioning hole 2412. The second quick-connecting part 232 enters the mating hole 2411 under the guiding of the guiding surface 24111, and the short shaft enters the collar 262, completing the detachable connection between the first loading rack 210 and the second loading rack 220. When the first loading rack 210 needs to be unloaded from the second loading rack 220, the clamping manipulator drives the first loading rack 210 to move upward, so that the positioning pin 233 is disengaged from the positioning hole 2412, the second quick-connecting part 232 is disengaged from the mating hole 2411, and the short shaft is disengaged from the collar 262. Then, the first loading rack 210 is driven to move out from the notch of the quick-connecting seat, completing the unloading of the first loading rack 210 from the second loading rack 220.

[0062] In another embodiment, the second fitting 250 and the second receiving part 260 are rotatably connected, and the second receiving part 260 and the second loading rack 220 are fixedly connected. The first fitting 230 is arranged as a telescopic rotating shaft, the second fitting 250 is arranged as a fixed rotating shaft, the first receiving part 240 and the second receiving part 260 are arranged as a first shaft sleeve and a second shaft sleeve. The telescopic rotating shaft is arranged at the top of the first loading rack 210 and corresponds to the position of the sub-rotating shaft 211. The fixed rotating shaft is arranged at the bottom of the first loading rack 210 and corresponds to the position of the sub-rotating shaft 211. The first shaft sleeve is rotatably arranged on the first main turntable 221, the second shaft sleeve is fixedly arranged on the second main turntable 222. A first plane is arranged inside the first shaft sleeve, and a second plane is arranged on the side wall of the telescopic rotating shaft. The first plane is attached to the second plane to limit the relative rotation of the telescopic rotating shaft with respect to the first shaft sleeve. The fixed rotating shaft is rotatably connected to the second shaft sleeve. Specifically, multiple first planes and second planes can be arranged. Specifically, a groove extending in the vertical direction can be arranged on the telescopic rotating shaft, and a limiting block extending in the first direction can be arranged inside the first shaft sleeve. The limiting block is clamped with the groove. Specifically, balls can be arranged between the fixed rotating shaft and the second shaft sleeve. Specifically, one of the clamping plates 215 is fixed to the telescopic rotating shaft, and the other clamping plate 215 is fixed to the sub-rotating shaft 211. Specifically, the sub-rotating shaft 211 is provided with an avoidance hole in the vertical direction. The clamping plate 215 is arranged in a ring shape and has a connecting rod extending in the horizontal direction. The connecting rod extends into the avoidance hole and is welded or glued to the telescopic rotating shaft.

[0063] When the first loading rack 210 needs to be installed on the second loading rack 220, during the process that the clamping manipulator clamps the two clamping plates 215 to drive the first loading rack 210 close to the second loading rack 220, the telescopic rotating shaft is driven by the clamping plate 215 to retract into the sub-rotating shaft 211. When the first loading rack 210 needs to be moved to the installation position, the position of the telescopic rotating shaft corresponds to that of the first shaft sleeve and has a telescopic space, and the fixed rotating shaft corresponds to the second shaft sleeve and has a receiving space. Then, the whole first loading rack 210 is driven to move downward so that the fixed rotating shaft can be inserted into the second shaft sleeve. The clamping manipulator releases the clamping plate 215, so that the telescopic rotating shaft extends out of the sub-rotating shaft 211 and is inserted into the first shaft sleeve, completing the detachable connection between the first loading rack 210 and the second loading rack 220. When the first loading rack 210 needs to be unloaded from the second loading rack 220, the clamping manipulator clamps the two clamping plates 215 to drive the telescopic rotating shaft to retract into the sub-rotating shaft 211, and the clamping manipulator drives the first loading rack 210 to move upward to separate the fixed rotating shaft from the second shaft sleeve, and then drives the first loading rack 210 to move, completing the unloading of the first loading rack 210.

[0064] In another embodiment, the second fitting 250 and the second receiving member 260 are in transmission connection, and the second receiving member 260 is rotatably connected to the second loading rack 220. Specifically, both the first fitting 230 and the second fitting 250 are arranged as square blocks, and both the first receiving member 240 and the second receiving member 260 are arranged as "C"-shaped receiving seats. A chute is arranged in the receiving seat, and two clamping jaws are slidably arranged in the chute. The first ends of the two clamping jaws are connected to each other by a return spring, and the second ends both face the opening position of the receiving seat. The distance between the two clamping jaws gradually decreases from the second end to the first end, that is: the two clamping jaws gradually thicken from the second end to the first end. Specifically, the first fitting 230 and the second fitting 250 can also be arranged as triangles or trapezoids, etc. Specifically, the first fitting 230 and the second fitting 250 can also be provided with a chamfered edge, that is, a limiting plane, to limit the relative rotation of the first fitting 230 and the second fitting 250 with respect to the receiving seat.

[0065] When the first loading rack 210 needs to be installed on the second loading rack 220, the clamping manipulator clamps two clamping plates 215 to drive the first loading rack 210 close to the second loading rack 220. The square block enters through the opening of the receiving seat and first abuts against the second ends of the two jaws. When the square block gradually penetrates into the receiving seat, the distance between the second ends of the two jaws gradually decreases, the distance between the two first ends gradually increases, and the return spring is gradually stretched. When the square block reaches the first end, the square block abuts against the end faces of the first ends of the two jaws. At this time, the positions of the two jaws are fixed and the square block is clamped due to the restoring force of the return spring, completing the detachable connection between the first loading rack 210 and the second loading rack 220. When the first loading rack 210 needs to leave the second loading rack 220, the clamping manipulator drives the first loading rack 210 to move, so that the square block disengages from the first end and gradually approaches the second end. Under the retraction of the return spring, the second ends of the two jaws gradually move away from each other and release the square block, completing the unloading of the first loading rack 210.

[0066] It should be noted that there are other implementation manners for the loading and unloading of the first loading rack 210, which will not be listed one by one here.

[0067] Further, referring to Figure 8 and Figure 9 , the conveying mechanism 300 includes a carrier 310 and a fixing member 320. The fixing member 320 is provided on the carrier 310. The bottom of the workpiece 1 is detachably connected to the fixing member 320. The carrier 310 can rotate at any angle around the vertical direction to drive the workpiece 1 to rotate at any angle. Specifically, the carrier 310 is set as a carrier plate. The conveying mechanism 300 further includes a driving member 360. The driving member 360 is a rotating motor or a rotating cylinder and is provided at the bottom of the carrier plate. The driving member 360 is fixedly connected to the geometric center of the carrier plate and drives the carrier plate to rotate at any angle. Specifically, two connecting holes are provided at the bottom of the workpiece 1. The fixing member 320 is set as a plug pin. There are two plug pins corresponding to the positions of the two connecting holes. The plug pins are inserted into the connecting holes to detachably fix the carrier 310 and the workpiece 1. In this embodiment, the carrier plate is set as a rectangle.

[0068] Specifically, the conveying mechanism 300 further includes a limiting member 350. The limiting member 350 is provided on the periphery of the carrier 310. The limiting member 350 can selectively abut against the carrier 310 to limit the rotation of the carrier 310. Specifically, the limiting member 350 is set as a movable limiting rod. The limiting rod can move in a direction close to or away from the carrier 310 and abut against the side wall of the carrier plate to rigidly limit the carrier 310 and prevent the carrier 310 from rotating.

[0069] In one embodiment, the limiting member 350 is arranged as a limiting rod with a fixed position. Among the four corners of the carrier 310, two corners are provided with abutting blocks 311, and the other two corners are provided with avoidance holes. When the carrier 310 rotates, the avoidance holes can avoid the position of the limiting rod, enabling the carrier 310 to move between the rotation trajectory ranges of the two abutting blocks 311. It should be noted that those skilled in the art can adjust the position and quantity of the abutting blocks 311 according to actual needs.

[0070] Further, the conveying mechanism 300 further includes a conveying member 330. The conveying member 330 is arranged in the first chamber 110. The carrier 310 is slidably arranged on the conveying member 330 and can extend into or withdraw from the second chamber 120 to drive the workpiece 1 to move between the first chamber 110 and the second chamber 120. The conveying mechanism 300 further includes a robotic arm 340. The robotic arm 340 is placed at the top of the first chamber 110. The robotic arm 340 is detachably connected to the workpiece 1. The robotic arm 340 and the carrier 310 can jointly clamp the workpiece 1 to load or unload the workpiece 1 onto the first loading rack 210.

[0071] Specifically, the conveying member 330 is arranged as a conveying plate, and the driving member 360 is fixedly arranged on the conveying plate. In this embodiment, a slide rail is arranged between the first chamber 110 and the second chamber 120. A slider is arranged at the bottom of the conveying plate, and the slider cooperates with the slide rail to drive the conveying plate to move.

[0072] Specifically, the robotic arm 340 is provided with a plug-in pin that can be inserted into the connection hole at the top of the workpiece 1. A lifting member is arranged at the bottom of the conveying member 330. The lifting member drives the conveying plate to lift and thus drives the carrier plate to lift, enabling the plug-in pin to move upward and insert into the connection hole to drive the workpiece 1 to be detachably connected to the robotic arm 340.

[0073] Specifically, the conveying plate is arranged as a stepped plate. The carrier 310 is fixed to the higher plate surface. When the carrier 310 moves to the bottom of the workpiece 1, the distance between the carrier 310 and the bottom of the workpiece 1 is reduced due to the arrangement of the stepped plate, thereby reducing the stroke of the lifting member. Since the stroke of the lifting member is reduced, components with high precision and short stroke can be selected for the lifting member, improving the accuracy of the cooperation between the plug-in pin and the connection hole.

[0074] It should be noted that position recognition members should be correspondingly arranged at the positions where different components cooperate and dock in this embodiment, and the moving components in this embodiment should cooperate with the driving components. This is prior art and will not be elaborated here.

[0075] Further, this embodiment also provides a loading method for the first loading rack 210. Taking four first loading racks 210 as an example, the method includes the following steps:

[0076] Step 1: Load the first first loading rack 210;

[0077] Step 2: Rotate the second loading rack 220 by 180°, and load the second first loading rack 210;

[0078] Step 3: Rotate the second loading rack 220 by 90°, and load the third first loading rack 210;

[0079] Step 4: Rotate the second loading rack 220 by 180°, and load the fourth first loading rack 210.

[0080] Furthermore, this embodiment also provides a method for unloading the first loading rack 210. Taking four first loading racks 210 as an example, the method includes the following steps:

[0081] Step 1: Unload the first first loading rack 210;

[0082] Step 2: Rotate the second loading rack 220 by 180°, and unload the second first loading rack 210;

[0083] Step 3: Rotate the second loading rack 220 by 90°, and unload the third first loading rack 210;

[0084] Step 4: Rotate the second loading rack 220 by 180°, and unload the fourth first loading rack 210.

[0085] Through the above loading and unloading methods, when the second loading rack 220 loads and unloads the first loading rack 210, the force can be kept as uniform as possible, avoiding damage to the second loading rack 220 caused by uneven force during the loading and unloading process. When the number of the first loading racks 210 is set to other values, the single rotation of the second loading rack 220 can be adjusted adaptively, which will not be elaborated here.

[0086] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, rather than limitations on the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A vacuum treatment device, characterized in that, Comprising: A containing component (100), the containing component (100) includes a first chamber (110) and a second chamber (120), the first chamber (110) and the second chamber (120) are selectively communicated, and the workpiece (1) can move between the first chamber (110) and the second chamber (120); A loading mechanism (200), the loading mechanism (200) is arranged in the first chamber (110), the loading mechanism (200) includes a first loading rack (210), the first loading rack (210) can load a plurality of the workpieces (1), and the first loading rack (210) can be integrally placed into or taken out of the first chamber (110); A conveying mechanism (300), the conveying mechanism (300) is arranged in the first chamber (110), the conveying mechanism (300) can convey the workpiece (1) between the first chamber (110) and the second chamber (120), and selectively drive the workpiece (1) to rotate during the conveying of the workpiece (1).

2. The vacuum treatment device according to claim 1, characterized in that, There are two of the first chambers (110).

3. The vacuum processing equipment according to claim 1, characterized in that, The loading mechanism (200) further includes a second loading rack (220), the second loading rack (220) is rotatably arranged in the first chamber (110) around its own central axis, there are a plurality of the first loading racks (210), and the first loading racks (210) are annularly arranged around the central axis of the second loading rack (220) on the second loading rack (220), and the first loading racks (210) are detachable and can rotate around their own central axes.

4. The vacuum processing apparatus according to claim 3, wherein The loading mechanism (200) further includes a first fitting (230), a first receiving member (240), a second fitting (250) and a second receiving member (260), the first fitting (230) and the second fitting (250) are respectively arranged at the top and bottom of the first loading rack (210), and the first receiving member (240) and the second receiving member (260) are respectively arranged at the top and bottom of the second loading rack (220); The first fitting (230) and the second fitting (250) are both fixedly connected to the first loading rack (210), the first receiving member (240) is rotatably connected to the second loading rack (220), the first fitting (230) is in transmission connection with the first receiving member (240) and has detachability; The second receiving member (260) can be rotatably connected to the second loading rack (220) and is in transmission connection with the second fitting (250) and has detachability; Or the second receiving member (260) can be fixedly connected to the second loading rack (220) and is rotatably connected to the second fitting (250).

5. The vacuum processing equipment according to claim 3, characterized in that, The vacuum processing equipment further includes a driving mechanism (400), the driving mechanism (400) is arranged at the top or bottom of the second loading rack (220) to drive the first loading rack (210) and the second loading rack (220) to rotate.

6. The vacuum processing equipment according to claim 1, characterized in that, The loading mechanism (200) further includes a counterweight, and the counterweight is detachably loaded on the first loading rack (210).

7. The vacuum processing apparatus according to any one of claims 1-6, characterized in that, The conveying mechanism (300) includes a carrier (310) and a fixing member (320). The fixing member (320) is provided on the carrier (310). The bottom of the workpiece (1) is detachably connected to the fixing member (320). The carrier (310) can rotate by any angle around the vertical direction to drive the workpiece (1) to rotate by any angle.

8. The vacuum processing equipment according to claim 7, characterized in that, The conveying mechanism (300) further includes a limiting member (350). The limiting member (350) is provided on the periphery of the carrier (310). The limiting member (350) can selectively abut against the carrier (310) to limit the rotation of the carrier (310).

9. The vacuum processing apparatus according to claim 7, wherein, The conveying mechanism (300) further includes a conveying member (330). The conveying member (330) is provided in the first chamber (110). The carrier (310) is slidably arranged on the conveying member (330) and can extend into or withdraw from the second chamber (120) to drive the workpiece (1) to move between the first chamber (110) and the second chamber (120).

10. The vacuum treatment device according to claim 9, characterized in that, The conveying mechanism (300) further includes a robotic arm (340). The robotic arm (340) is placed at the top of the first chamber (110). The robotic arm (340) is detachably connected to the workpiece (1). The robotic arm (340) and the carrier (310) can jointly clamp the workpiece (1) to load or unload the workpiece (1) onto or from the first loading rack (210).

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