Sputtering coating machine

Abstract

The invention provides a sputter coating machine. The sputter coating machine comprises a sputter coating machine body 4; the base 8 is mounted in the sputtering coating machine body 4, and the base 8 is used for mounting a target material 7; the first servo motor 1 is mounted in the sputtering coating machine body 4, the top of the first servo motor 1 is connected with a mounting rod 2, and a movable mechanism is arranged on the mounting rod 2; the movable mechanism comprises a fixed rod 15 fixedly connected with the outer side of the mounting rod 2, a first sliding rod 6 is slidably connected into the fixed rod 15, and a connecting block 5 is fixedly connected to the top and / or the bottom of the first sliding rod 6; the fixing plates 16 are connected with the connecting blocks 5, each fixing plate 16 is fixedly connected with two fixing blocks 11, and the two fixing blocks 11 fixedly support a second sliding rod 14; and the sliding blocks 12 are connected to the second sliding rods 14 in a sliding mode, the side, away from the mounting rod 2, of each sliding block 12 is fixedly connected with a storage rod 13, and more than two sliding blocks 12 are connected to each second sliding rod 14 in a sliding mode.

Description

Technical Field

[0001] This application relates to the technical field of thin film manufacturing, and particularly to a sputtering coating machine. Background Art

[0002] A sputtering coating machine is one of the vacuum coating equipment. Magnetron sputtering coating refers to a coating technology in which the coating material is used as the target cathode, and argon ions are used to bombard the target to generate cathode sputtering, and the target atoms are sputtered onto the workpiece to form a deposition layer.

[0003] It should be noted that the above introduction of the technical background is only for the convenience of clearly and completely explaining the technical solution of this application and facilitating the understanding of those skilled in the art. It cannot be considered that the above technical solutions are well known to those skilled in the art just because these solutions are described in the background art part of this application. Summary of the Invention

[0004] The inventors of this application found that when a sputtering coating machine is coating, it is inconvenient to place the products to be coated. In addition, the coating thickness is not uniform enough, and it is inconvenient to uniformly utilize the materials.

[0005] To solve at least one or at least similar problems among the above problems, an embodiment of this application provides a sputtering coating machine. A sliding block provided with a placement rod is slidably connected to a sliding rod. Thus, the position of the placement rod can be adjusted by sliding the sliding block, thereby facilitating the placement of the products to be coated. In addition, by providing a second servo motor and a rack, the position of the products to be coated in the height direction can be adjusted, so that the thickness of the coating on the product surface is more uniform.

[0006] According to one aspect of the embodiments of this application, a sputtering coating machine is provided, and the sputtering coating machine includes:

[0007] A sputtering coating machine body 4;

[0008] A base 8, which is installed inside the sputtering coating machine body 4, and the base 8 is used for installing a target 7; and

[0009] A first servo motor 1, which is installed inside the sputtering coating machine body 4. The top of the first servo motor 1 is connected with an installation rod 2, and an activity mechanism is arranged on the installation rod 2;

[0010] The activity mechanism includes:

[0011] A fixed rod 15 fixedly connected to the outside of the installation rod 2. A first sliding rod 6 is slidably connected inside the fixed rod 15, and a connection block 5 is fixedly connected to the top and / or bottom of the first sliding rod 6;

[0012] The fixed plate 16 is connected to the connection block 5, and two fixing blocks 11 are fixedly connected to each of the fixed plates 16. The two fixing blocks 11 fixedly support the second sliding rod 14; and

[0013] The sliding block 12 is slidably connected to the second sliding rod 14. A placing rod 13 is fixedly connected to a side of the sliding block 12 away from the mounting rod 2.

[0014] Two or more of the sliding blocks 12 are respectively slidably connected to each of the second sliding rods 14.

[0015] In at least one embodiment, the sliding block 12 is connected to the fixed plate 16 by a fixing screw 10.

[0016] In at least one embodiment, a groove 16a adapted to the size of the fixing screw 10 is formed in the fixed plate 16.

[0017] In at least one embodiment, the sputtering coating machine further includes:

[0018] A second servo motor 17 is fixedly connected to the outside of the fixed rod 15. An output shaft of the second servo motor 17 is fixedly connected to a gear 19; and

[0019] A rack 18 is fixedly installed on the fixed plate 16.

[0020] In at least one embodiment, the outer circumference of the gear 19 meshes with the rack 18.

[0021] In at least one embodiment, a first through hole 15a adapted to the size of the first sliding rod 6 is formed inside the fixed rod 15, and the first sliding rod 6 is arranged by passing through the first through hole 15a.

[0022] In at least one embodiment, a second through hole 12a adapted to the size of the second sliding rod 14 is formed inside the sliding block 12, and the second sliding rod 14 is arranged by passing through the second through hole 12a.

[0023] In at least one embodiment, the sliding block 12 is Z-shaped, and a side 121 of the sliding block 12 close to the fixed plate 16 is connected to the fixed plate 16 by the fixing screw 10.

[0024] In at least one embodiment, a side 122 of the sliding block 12 away from the fixed plate 16 is slidably connected to the second sliding rod 14.

[0025] The beneficial effects of the present application are as follows: The sliding block provided with the storage rod is slidably connected to the sliding rod. Thus, the position of the storage rod can be adjusted by sliding the sliding block, which facilitates the placement of the products to be coated. In addition, by providing the second servo motor and the rack, the position of the products to be coated in the height direction can be adjusted, so that the thickness of the coating on the product surface is more uniform.

[0026] Referring to the following description and the accompanying drawings, specific embodiments of the present application are disclosed in detail, indicating the ways in which the principles of the present application can be employed. It should be understood that the embodiments of the present application are not limited thereby in scope. Within the spirit and terms of the appended claims, the embodiments of the present application include many changes, modifications, and equivalents.

[0027] Features described and / or illustrated for one embodiment can be used in the same or similar manner in one or more other embodiments, combined with the features in other embodiments, or replace the features in other embodiments.

[0028] It should be emphasized that the term "comprising / including" when used herein refers to the presence of features, whole units, steps, or components, but does not exclude the presence or addition of one or more other features, whole units, steps, or components. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The accompanying drawings included are used to provide a further understanding of the embodiments of the present application, which form a part of the specification, for illustrating the embodiments of the present application, and are used to explain the principles of the present application together with the written description. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts. In the drawings:

[0030] Figure 1 is a schematic diagram of the front sectional structure of the sputtering coating machine according to an embodiment of the present application;

[0031] Figure 2 is a schematic diagram of the top sectional structure of the sputtering coating machine according to an embodiment of the present application;

[0032] Figure 3 is Figure 1 an enlarged schematic diagram of part A in

[0033] Figure 4 is a schematic diagram of the structure of the sliding block and the fixed plate of the sputtering coating machine according to an embodiment of the present application.

[0034] In the figure: 1 first servo motor, 2 mounting rod, 3 vacuum pump, 4 sputtering coating machine body, 5 connecting block, 6 first slide bar, 7 target, 8 base, 9 magnetic strip, 10 fixing screw, 11 fixing block, 12 sliding block, 13 storage rod, 14 second slide bar, 15 fixing rod, 16 fixing plate, 17 second servo motor, 18 rack, 19 gear. Detailed implementation manners

[0035] Referring to the attached drawings and through the following description, the foregoing and other features of the present application will become apparent. In the description and drawings, specific implementation manners of the present application are specifically disclosed, which show some implementation manners in which the principles of the present application can be adopted. It should be understood that the present application is not limited to the described implementation manners. On the contrary, the present application includes all modifications, variations, and equivalents falling within the scope of the appended claims.

[0036] Embodiment

[0037] Figure 1 This is a schematic diagram of the front view sectional structure of the sputtering coating machine according to an embodiment of the present application. Figure 2 This is a schematic diagram of the top view sectional structure of the sputtering coating machine according to an embodiment of the present application. Figure 3 Is Figure 1 The enlarged schematic diagram at A in Figure 4 This is a schematic diagram of the structure of the sliding block and the fixing plate of the sputtering coating machine according to an embodiment of the present application.

[0038] In the description of each embodiment of the present application, for convenience of description, the height direction of the sputtering coating machine body 4 is called the first direction D1, the width direction of the sputtering coating machine body 4 is called the second direction D2, and the thickness direction of the sputtering coating machine body 4 is called the third direction D3. Among them, the first direction D1, the second direction D2, and the third direction D3 are perpendicular to each other. The first direction D1 can also be called the longitudinal direction, and the second direction D2 and the third direction D3 can be collectively called the transverse direction.

[0039] In the first direction D1, the direction from the first servo motor 1 to the mounting rod 2 is called the "up" direction, and the opposite direction to the "up" direction is the "down" direction.

[0040] It should be noted that the above "up" direction and "down" direction are only for convenience of description and do not limit the orientation or attitude of the sputtering coating machine of the present application during use.

[0041] As Figures 1 to 4 shown, the sputtering coating machine 100 of the present application includes: a sputtering coating machine body 4, a base 8, and a first servo motor 1.

[0042] Among them, the sputtering coating machine body 4 can be a sealed housing. The sputtering coating machine body 4 can be connected to a vacuum pump 3. For example, the vacuum pump 3 can be fixedly installed at the end of the sputtering coating machine body 4 in the second direction D2. The vacuum pump 3 can extract the gas inside the sputtering coating machine body 4, so that the inside of the sputtering coating machine body 4 has a certain degree of vacuum.

[0043] The base 8 can be installed inside the sputtering coating machine body 4. For example, the base 8 is installed at the lower end inside the sputtering coating machine body 4. A target 7 can be installed at the upper end of the base 8, and a magnetic strip 9 can be arranged inside the target 7, and the magnetic strip 9 has magnetism.

[0044] The first servo motor 1 can be installed inside the sputtering coating machine body 4. The rotating shaft of the first servo motor 1 can extend along the first direction D1. The top of the first servo motor 1 can be connected with a mounting rod 2, and a moving mechanism is arranged on the mounting rod 2. When the first servo motor 1 operates, it can drive the mounting rod 2 to rotate around the first direction D1. The rotation center of the mounting rod 2 can be represented as Figure 2 C.

[0045] In this application, the moving mechanism can be arranged outside the rotation center C of the mounting rod 2. In the following description of this application, the outside of the rotation center C of the mounting rod 2 can be simply referred to as the outside of the mounting rod 2.

[0046] As Figures 1 to 4 shown, the moving mechanism can include: a fixed rod 15, a fixed plate 16 and a sliding block 12.

[0047] Among them, the fixed rod 15 is fixedly connected to the outside of the mounting rod 2. A first sliding rod 6 is slidably connected inside the fixed rod 15.

[0048] As Figure 3 shown, a first through hole 15a adapted to the size of the first sliding rod 6 is formed inside the fixed rod 15, and the first sliding rod 6 is arranged by passing through the first through hole 15a. Thus, the first sliding rod 6 and the first through hole 15a can be slidably connected. For example, the cross section of the first sliding rod 6 is rectangular, and the cross section of the first through hole 15a is also rectangular. In addition, it can also be other shapes besides rectangular.

[0049] A connecting block 5 is fixedly connected to the top and / or bottom of the first sliding rod 6. In Figure 1 the embodiment, taking the example that connecting blocks 5 are fixedly connected to both the top and bottom of the first sliding rod 6 for illustration.

[0050] The number of the fixed rods 15 is, for example, 4. In addition, it can also be other numbers. When the number of the fixed rods 15 is more than 2, the more than 2 fixed rods 15 can be evenly distributed outside the mounting rod 2. The first sliding rod 6 is correspondingly arranged with the fixed rod 15, and the numbers of the two are the same.

[0051] The fixed plate 16 is connected to the connecting block 5, and the number of the fixed plates 16 is the same as the number of the first sliding rods 6. Thus, the fixed plates 16, the connecting blocks 5, and the first sliding rods 6 are connected as a whole and can move together.

[0052] Two fixing blocks 11 are fixedly connected to each of the fixed plates 16 ( Figure 4 only 1 fixing block 11 is shown in the figure), and the two fixing blocks 11 fixedly support the second sliding rod 14. For example, the opposite surfaces of the two fixing blocks 11 are respectively connected to the second sliding rod 14. Thus, the two fixing blocks 11 respectively support the second sliding rod 14 from both ends of the second sliding rod 14. The extending direction of the second sliding rod 14 can be perpendicular to the first direction D1. In this application, the number of the second sliding rods 14 can be the same as the number of the fixed plates 16, for example, 4.

[0053] As Figure 3 and Figure 4 shown, a placing rod 13 is fixedly connected to the side of the sliding block 12 away from the mounting rod 2, and the placing rod 13 can be used to place the product to be coated.

[0054] The sliding block 12 can be slidably connected to the second sliding rod 14 (as Figure 4 shown), for example, the second sliding rod 14 can pass through the sliding block 12. Thus, the sliding block 12 can slide on the second sliding rod 14.

[0055] In this application, two or more sliding blocks 12 can be respectively slidably connected to each of the second sliding rods 14. Thus, the distance between the two or more sliding blocks 12 can be adjusted. After the distance is adjusted, the placing rods 13 of the two sliding blocks 12 can abut against the inner wall of the product to be coated, so as to support the product to be coated. Therefore, when the size of the product to be coated changes, the product to be coated can be effectively supported by adjusting the distance between the two sliding blocks 12. In addition, the placing rod 13 can abut against the inner wall of the product to be coated, which can avoid affecting the coating on the outer surface of the product to be coated.

[0056] In at least one embodiment, the sliding block 12 can be connected to the fixed plate 16 by a fixing screw 10. For example, a groove 16a adapted to the fixing screw 10 is formed on the fixed plate 16, and the inner wall of the groove 16a has a thread cooperating with the screw 10. A plurality of grooves 16a can be provided on the fixed plate 16. Thus, when the sliding block 12 slides to a certain position, it can be installed in the corresponding groove 16a by the fixing screw 10, so as to fix the sliding block 12 at this position.

[0057] In the present application, a second through hole 12a adapted to the size of the second slide bar 14 is formed inside the sliding block 12, and the second slide bar 14 is arranged by passing through the second through hole 12a. Thus, the two can be slidably connected. For example, the cross-section of the second slide bar 14 is rectangular, and the cross-section of the second through hole 12a is also rectangular. In addition, it can also be other shapes besides rectangular.

[0058] As Figure 4 shown, the sliding block 12 can be Z-shaped. The Z-shaped sliding block 12 can have a side 121 close to the fixed plate 16 and a side 122 far from the fixed plate 16. Among them, the side 121 of the sliding block 12 close to the fixed plate 16 is connected to the fixed plate 16 by a fixing screw 10. For example, the sliding block 12 has a threaded hole, which is aligned with the groove 16a, and the fixing screw 10 is installed into the threaded hole and the groove 16a.

[0059] As Figure 4 shown, the side 122 of the sliding block 12 far from the fixed plate 16 is slidably connected to the second slide bar 14. For example, the second through hole 12a can be arranged on the side 122 of the sliding block 12 far from the fixed plate 16.

[0060] In the present application, as Figure 3 shown, the sputtering coating machine 100 further includes: a second servo motor 17 and a rack 18.

[0061] The second servo motor 17 is fixedly connected to the outside of the fixed rod 15, and an output shaft of the second servo motor 17 is fixedly connected with a gear 19. The rack 18 is fixedly installed on the fixed plate 16, and the rack 18 can extend along the first direction D1. The outer periphery of the gear 19 meshes with the rack 18. Thus, when the second servo motor 17 operates, the gear 19 rotates, causing the rack 18 to move along the first direction D1, thereby driving the fixed plate 16 to move along the first direction D1.

[0062] By providing the second servo motor 17 and the rack 18 in the present application, the position of the product to be coated in the height direction (i.e., the first direction D1) can be adjusted, so that the thickness of the coating on the surface of the product to be coated is more uniform.

[0063] The working principle of the sputtering coating machine 100 is as follows:

[0064] (1) When using the sputtering coating machine 100, open the door of the sputtering coating machine body 4 (not shown in the figure), rotate the fixing screw 10. After the fixing screw 10 disengages from the fixing plate 16, slide the sliding block 12. After adjusting the sliding block 12 to a suitable position, turn the fixing screw 10 into the groove formed inside the fixing plate 16, and place the part to be coated (i.e., the product to be coated) on the placing rod 13. The placing rod 13 plays a role in limiting the coating parts of different sizes and does not block the outer ends of the coating parts, facilitating coating.

[0065] (2) At the beginning of the sputtering deposition process, turn on the switch of the second servo motor 17. When the output end of the second servo motor 17 rotates, it drives the gear 19 to rotate. When the gear 19 rotates, it drives the fixing plate 16 to move up and down through the rack 18; turn on the switch of the vacuum pump 3. The air inside the sputtering coating machine body 4 is pumped away by the vacuum pump 3, and then argon is introduced into the interior of the sputtering coating machine body 4 to create a low-pressure argon atmosphere. A magnetic field is formed near the magnetic strip 9 inside the cylindrical target 7 to ensure uniform utilization of the material. A high voltage is applied to the target 7, thereby generating plasma, which concentrates along the magnetic field, and then coating can be carried out.

[0066] Contents not described in detail in this specification can be referred to the related technologies.

[0067] Compared with the prior art, the technical solution of this application has the following beneficial effects:

[0068] When placing the coating parts, slide the sliding block 12, and then adjust the distance between the two sliding blocks. Place the part on the upper end of the placing rod 13. Thus, it is convenient to place parts of different sizes, and the installation and disassembly are convenient and fast; in addition, it is set that when the output end of the second servo motor 17 rotates, it drives the gear 19 to rotate. When the gear rotates, it drives the fixing plate to move through the rack 18, thereby driving the coating parts to move up and down, making the sputtering more uniform and facilitating uniform coating.

[0069] The electrical components mentioned in the text are all electrically connected to the controller and the power supply. The control method of this application is controlled by the controller. The control circuit of the controller can be realized by simple programming by those skilled in the art. The provision of the power supply also belongs to the common knowledge in the art, and this application mainly aims to protect the mechanical device, so the control method and circuit connection of this application will not be explained in detail.

[0070] The standard parts used in this application can all be purchased from the market. The specific connection methods of each part all adopt conventional means such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts, and equipment all adopt conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be described here.

[0071] It should be noted that in this text, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprising", "including" or any other variant thereof are intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the element.

[0072] Although the embodiments of the present application have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A sputtering coating machine, characterized in that, The sputtering coating machine includes: A sputtering coating machine body (4); A base (8), which is installed inside the sputtering coating machine body (4), and the base (8) is used for installing a target (7); and A first servo motor (1), which is installed inside the sputtering coating machine body (4), and an installation rod (2) is connected to the top of the first servo motor (1), and a moving mechanism is arranged on the installation rod (2); Wherein, The moving mechanism includes: A fixed rod (15) fixedly connected to the outside of the installation rod (2), a first sliding rod (6) is slidably connected inside the fixed rod (15), and a connecting block (5) is fixedly connected to the top and / or bottom of the first sliding rod (6); A fixing plate (16), which is connected to the connecting block (5), and two fixing blocks (11) are fixedly connected to each fixing plate (16), and the two fixing blocks (11) fixedly support a second sliding rod (14); and A sliding block (12), which is slidably connected to the second sliding rod (14), and an object placing rod (13) is fixedly connected to a side of the sliding block (12) away from the installation rod (2), Two or more sliding blocks (12) are respectively slidably connected to each second sliding rod (14).

2. The sputtering coating machine according to claim 1, wherein The sliding block (12) is connected to the fixing plate (16) by a fixing screw (10).

3. The sputtering coating machine with uniform film thickness according to claim 2, wherein A groove (16a) adapted to the size of the fixing screw (10) is formed on the fixing plate (16).

4. The sputtering coating machine according to claim 1, characterized in that The sputtering coating machine further includes: A second servo motor (17), which is fixedly connected to the outside of the fixed rod (15), and a gear (19) is fixedly connected to the output shaft of the second servo motor (17); and A rack (18), which is fixedly installed on the fixing plate (16).

5. The sputtering coating machine according to claim 4, wherein The outer circumference of the gear (19) meshes with the rack (18).

6. The sputtering coating machine according to claim 1, wherein A first through hole (15a) adapted to the size of the first sliding rod (6) is formed inside the fixed rod (15), and the first sliding rod (6) is arranged by passing through the first through hole (15a).

7. The sputtering coating machine according to claim 1, wherein A second through hole (12a) adapted to the size of the second sliding rod (14) is formed inside the sliding block (12), and the second sliding rod (14) is arranged by passing through the second through hole (12a).

8. The sputtering coating machine according to claim 2, wherein The sliding block (12) is Z-shaped, and a side (121) of the sliding block (12) close to the fixing plate (16) is connected to the fixing plate (16) by the fixing screw (10).

9. The sputtering coating machine according to claim 2, wherein One side (122) of the sliding block (12) away from the fixed plate (16) is slidably connected to the second sliding rod (14).

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