Gate valve structure and annealing equipment

Abstract

The invention provides a gate valve structure and annealing equipment. The gate valve structure comprises a gate plate, a base arranged on the side, opposite to an opening, of the gate plate, a transverse pushing piece and a reset piece, wherein the transverse pushing piece and the reset piece are embedded in the base. The side, facing the door plate, of the base is provided with a first containing cavity and a second containing cavity for containing the transverse pushing piece and the reset piece respectively, the transverse pushing piece is contained in the first containing cavity, a gas seam is formed between the bottom of the transverse pushing piece and the bottom of the first containing cavity, the base is provided with a gas supply pipe communicated with the gas seam, and the reset piece is contained in the second containing cavity and fixedly connected with the door plate. The side portion of the reset piece extends outwards in the radial direction to form a reset part, and the cavity opening of the second containing cavity shrinks inwards in the radial direction to form a blocking part limiting the reset part in the second containing cavity. Compressed gas is conveyed to or output from the gas seam through the gas supply pipe, so that the transverse pushing piece applies or cancels pressing force for sealing the opening to the door plate. According to the invention, the opening formed by the annealing cabin in the annealing equipment is movably sealed.

Description

Technical Field

[0001] The present invention relates to the technical field of heat treatment, and particularly to a valve structure and an annealing device. Background Art

[0002] A wafer annealing device is a special device used for annealing wafers in semiconductor manufacturing. The annealing process improves the electrical properties and structural characteristics of the wafers through heating and cooling. The wafer annealing device usually consists of a process chamber with an opening and a valve with a door panel. The valve drives the door panel to open or close the opening. When it is open, it is used for a manipulator to transfer the wafer into or out of the process chamber through the opening, and when it is closed, it is used to isolate the internal environment of the process chamber from the external environment.

[0003] The wafer annealing device usually needs to be carried out under protective gas conditions such as vacuum or nitrogen to prevent oxidation and contamination and ensure the process quality. If it is carried out under vacuum conditions, the inside of the process chamber needs to be evacuated when it is closed. At this time, the pressure difference between the inside and outside of the process chamber will press the door panel against the process chamber to ensure the sealing effect. If it is carried out under protective gas conditions such as nitrogen, the inside of the process chamber needs to be evacuated first when it is closed, and then nitrogen is introduced into the process chamber. At this time, a positive pressure environment will be formed inside and outside the process chamber. If the sealing effect is to be ensured, the fixation of the valve itself needs to be ensured, and a large horizontal force needs to be applied to the door panel to make it fit against the side wall of the process chamber. For this, the existing valve structure is realized by an auxiliary pressing cylinder. If sufficient pressing force needs to be provided, the cylinder diameter of the auxiliary pressing cylinder needs to be large, resulting in problems of large occupied space and affecting the layout of other mechanisms.

[0004] In view of this, it is necessary to improve the valve structure in the prior art to solve the above problems.

[0005] It should be noted that the above introduction of the background art is only for the convenience of clearly and completely explaining the technical solutions of the present application and facilitating the understanding of those skilled in the art. It cannot be considered that the above technical solutions are well-known to those skilled in the art just because these solutions are described in the background art part of the present application. Summary of the Invention

[0006] The purpose of the present invention is to solve the problem that in the existing valve structure, an auxiliary pressing cylinder is used to press the door panel. If sufficient pressing force needs to be provided, the cylinder diameter of the auxiliary pressing cylinder needs to be large, resulting in problems of large occupied space and affecting the layout of other mechanisms.

[0007] To achieve the above purpose, the present invention provides a valve structure for actively sealing an opening formed by an annealing chamber in an annealing device. The valve structure includes:

[0008] A door panel, a base provided on a side of the door panel facing away from the opening, and a horizontal pusher and a reset member embedded in the base;

[0009] The base defines a first receiving cavity and a second receiving cavity on a side facing the door panel for receiving the horizontal pusher and the reset member respectively. The horizontal pusher is received in the first receiving cavity and its bottom forms a gas gap with the first receiving cavity. The base is provided with an air supply pipe communicating with the gas gap. The reset member is received in the second receiving cavity and its top is fixedly connected to the door panel. A reset portion extends radially outward from a side portion of the reset member. The diameter of the second receiving cavity contracts radially inward to form a blocking portion that confines the reset portion within the second receiving cavity;

[0010] Compressed gas is supplied or output to the gas gap through the air supply pipe, so as to apply or cancel a pressing force for sealing the opening to the door panel by the horizontal pusher.

[0011] As a further improvement of the present invention, the reset member includes: a reset rod received in the second receiving cavity and an elastic member sleeved outside the reset rod. The reset portion is formed on a side portion of the reset rod. The elastic member is sleeved between the blocking portion and the reset portion, and the blocking portion only allows the reset rod to extend out.

[0012] As a further improvement of the present invention, the horizontal pusher includes: a horizontal push column received in the first receiving cavity and a first sealing ring and a lubricating member disposed around the outside of the horizontal push column. A first groove and a second groove for receiving the first sealing ring and the lubricating member respectively are formed by inwardly recessing a side portion of the horizontal push column.

[0013] As a further improvement of the present invention, the horizontal push column includes: a first column body and a second column body connected in sequence. The horizontal pusher further includes: a limiting plate disposed outside the first receiving cavity and fixedly connected to a side of the base facing the door panel. The limiting plate only allows the first column body to protrude, and both the first groove and the second groove are formed on a side portion of the second column body.

[0014] As a further improvement of the present invention, the valve structure further includes: a guide shaft embedded in the base. The base defines a third receiving cavity on a side facing the door panel for receiving the guide shaft. The guide shaft is movably received in the third receiving cavity and its top is fixedly connected to the door panel.

[0015] As a further improvement of the present invention, an installation plate protrudes from a side of the door panel facing the base, and a first installation hole and a second installation hole for fixedly connecting the reset member and the guide shaft respectively are recessed in the installation plate.

[0016] As a further improvement of the present invention, the valve structure further includes: a mounting bracket for supporting the base and a driving member fixedly connected to the mounting bracket to drive the axial movement of the base. The driving member axially extends a driving shaft through the base. The mounting bracket is provided with a guide rod passing through the base, and the guide rod is parallel to the driving shaft.

[0017] As a further improvement of the present invention, the mounting bracket further includes: a first sensor and a limit block provided on the top of the base and a second sensor provided on the side of the base.

[0018] As a further improvement of the present invention, a second sealing ring adapted to the edge of the opening is provided on the side of the door panel facing the opening. The transverse pushing members are configured to be multiple and are evenly embedded on the side of the base facing the door panel.

[0019] Based on the same inventive concept, the present invention also discloses an annealing device, including:

[0020] An annealing chamber forming an opening and a valve structure as described in any one of the above inventive concepts provided on the side of the annealing chamber.

[0021] Compared with the prior art, the beneficial effects of the present invention are:

[0022] The valve structure includes: a door panel, a base provided on the side of the door panel facing away from the opening, and a transverse pushing member and a reset member embedded in the base. A first receiving cavity and a second receiving cavity for receiving the transverse pushing member and the reset member respectively are formed on the side of the base facing the door panel. The transverse pushing member is received in the first receiving cavity and a gas gap is formed between the bottom of the transverse pushing member and the first receiving cavity. The base is provided with an air supply pipe communicating with the gas gap. The reset member is received in the second receiving cavity and the top of the reset member is fixedly connected to the door panel. A reset portion radially extends outward from the side of the reset member, and the diameter of the second receiving cavity contracts radially inward to form a blocking portion for restricting the reset portion in the second receiving cavity. In the present invention, by supplying or outputting compressed gas to the gas gap, a pressing force for sealing the opening is applied to or removed from the door panel by the transverse pushing member. Only by adjusting the air pressure of the compressed gas can the purpose of adjusting the pressing force be achieved, which can meet the requirements of annealing treatment of wafers under different special conditions. Compared with the valve structure in the prior art, the pressing force requirements under different special conditions can be achieved without using an auxiliary pressing cylinder, and the problems that the valve structure in the prior art occupies a large space and affects the layout of other mechanisms are solved. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a perspective view of the valve structure shown in the present invention from a certain perspective;

[0024] Figure 2 It is a perspective view of the valve structure with the door panel omitted from a certain perspective;

[0025] Figure 3 Isometric view of the base from a certain perspective;

[0026] Figure 4 Isometric view of the base with the horizontal pusher, reset member, and guide shaft omitted from a certain perspective;

[0027] Figure 5 Isometric view of the base with the horizontal pusher, reset member, and guide shaft omitted from another perspective;

[0028] Figure 6 Is Figure 5 Cross-sectional view taken along the A-A direction in

[0029] Figure 7 Is Figure 5 Cross-sectional view taken along the B-B direction in

[0030] Figure 8 Is Figure 5 Cross-sectional view taken along the C-C direction in

[0031] Figure 9 Isometric view of the horizontal pusher from a certain perspective;

[0032] Figure 10 Isometric view of the reset member from a certain perspective;

[0033] Figure 11 Isometric view of the guide shaft from a certain perspective;

[0034] Figure 12 Isometric view of the door panel from a certain perspective;

[0035] Figure 13 Isometric view of the partial annealing chamber and valve structure from a certain perspective. Detailed implementation manners

[0036] The present invention will be described in detail below with reference to the embodiments shown in the drawings. However, it should be noted that these embodiments do not limit the present invention, and any equivalent transformation or substitution in terms of function, method, or structure made by those of ordinary skill in the art according to these embodiments falls within the protection scope of the present invention.

[0037] In particular, it should be noted that "transverse" refers to the direction along the Figure 2 X-axis shown in Figure 2 and "longitudinal" refers to the direction along the

[0038] Please refer to Figures 1 to 13As shown, the present invention shows a specific embodiment of a valve structure 10, which is used to actively seal an opening 21 formed by an annealing chamber 20 in an annealing device (not shown). When a wafer (not shown) is conveyed from the opening 21 into the interior of the annealing chamber 20, the opening 21 is sealed by the valve structure 10 to ensure that the wafer is annealed under special conditions (for example, in a protective gas condition such as vacuum or nitrogen), thereby ensuring the final annealing effect of the wafer.

[0039] As shown in Figure 1 , Figure 2 , Figure 4 , Figure 6 , Figure 7 and Figure 10 shown, the valve structure 10 includes: a door panel 11, a base 12 disposed on the side of the door panel 11 facing away from the opening 21, and a transverse pusher 13 and a reset member 14 embedded in the base 12. A first receiving cavity 121 and a second receiving cavity 122 for accommodating the transverse pusher 13 and the reset member 14 respectively are formed on the side of the base 12 facing the door panel 11. The transverse pusher 13 is accommodated in the first receiving cavity 121 and a gas gap 123 is formed between its bottom and the first receiving cavity 121. The base 12 is provided with an air supply pipe 124 communicating with the gas gap 123. The reset member 14 is accommodated in the second receiving cavity 122 and its top is fixedly connected to the door panel 11. A reset portion 141 extends radially outward from the side of the reset member 14, and the diameter of the second receiving cavity 122 contracts radially inward to form a blocking portion 126 that restricts the reset portion 141 within the second receiving cavity 122. Compressed gas is supplied to or output from the gas gap 123 through the air supply pipe 124, so as to apply or cancel the pressing force for sealing the opening 21 to the door panel 11 by the transverse pusher 13.

[0040] It should be noted that the aforementioned transverse pusher 13 is accommodated in the first receiving cavity 121 and a gas gap 123 is formed between its bottom and the first receiving cavity 121. That is, a gas gap 123 is formed between the bottom of the transverse pusher 13 and the first receiving cavity 121. The bottom of the transverse pusher 13 refers to the side of the transverse pusher 13 away from the door panel 11. When the transverse pusher 13 is accommodated in the first receiving cavity 121, its bottom does not contact the first receiving cavity 121, thus forming the gas gap 123. The aforementioned reset member 14 is accommodated in the second receiving cavity 122 and its top is fixedly connected to the door panel 11. That is, the top of the reset member 14 is fixedly connected to the door panel 11. The top of the reset member 14 refers to the side of the reset member 14 close to the door panel 11. The fixed connection between the top of the reset member 14 and the door panel 11 can be achieved by locking members such as bolts and nuts. The aforementioned cavity opening of the second receiving cavity 122 refers to the cavity opening formed on the side of the second receiving cavity 122 close to the door panel 11, and its diameter contracts radially inward to restrict the reset portion 141 within the second receiving cavity 122.

[0041] In the present invention, compressed gas is delivered to the gas slit 123 through the gas supply pipe 124, and a pressure difference is generated between the pressure of the compressed gas and the pressure inside the annealing chamber 20, and the pressure of the compressed gas is greater than the pressure inside the annealing chamber 20. Thus, the compressed gas exerts a force on the cross-pushing member 13 towards the annealing chamber 20, so as to apply a pressing force for sealing the opening 21 to the door panel 11 by the cross-pushing member 13; the compressed gas in the gas slit 123 is output through the gas supply pipe 124 to cancel the force exerted on the cross-pushing member 13 by the compressed gas towards the annealing chamber 20, thereby canceling the pressing force for sealing the opening 21 applied to the door panel 11 by the cross-pushing member 13. Thus, the opening 21 formed by sealing the annealing chamber 20 through the valve structure 10 is realized. In the present invention, by delivering or outputting compressed gas to the gas slit 123, to apply or cancel the pressing force for sealing the opening 21 to the door panel 11 by the cross-pushing member 13, only by adjusting the pressure of the compressed gas can achieve the purpose of adjusting the pressing force, which can meet the requirements of annealing the wafer under different special conditions. Compared with the valve structure in the prior art, it is not necessary to use an auxiliary pressing cylinder to realize the pressing force requirements under different special conditions, and solves the problems that the valve structure in the prior art has a large occupied space and affects the layout of other mechanisms.

[0042] In one embodiment, as shown in Figure 6 FIG. Figure 9 The cross-pushing member 13 includes: a cross-pushing column 131 accommodated in the first receiving cavity 121, a first sealing ring 132 and a lubricating member (not shown) disposed around the outer side of the cross-pushing column 131. The side portion of the cross-pushing column 131 is recessed inward to form a first groove 133 and a second groove 134 for accommodating the first sealing ring 132 and the lubricating member respectively. The first groove 133 is disposed on the side of the second groove 134 close to the gas slit 123. The first sealing ring 132 is accommodated in the first groove 133 to seal the gas slit 123 and prevent the compressed gas in the gas slit 123 from leaking, thereby causing pressure relief; the lubricating member is accommodated in the second groove 134 to facilitate the movement of the cross-pushing member 13 in the first receiving cavity 121 towards or away from the door panel 11, and prevent the cross-pushing column 131 from getting stuck due to friction during the movement in the first receiving cavity 121.

[0043] It should be noted that the aforementioned lubricating member can be, for example, a lubricating oil or other components with lubricating functions, and the specific components are not limited in this embodiment. In addition, the specific numbers of the first sealing ring 132, the lubricating member, the corresponding first groove 133 and the second groove 134 are not limited in this embodiment. For example, the first sealing ring 132, the lubricating member, the first groove 133 and the second groove 134 are all configured as one, and the first sealing ring 132 is arranged on the side of the lubricating member close to the gas slit 123; or, the first sealing ring 132, the lubricating member, the first groove 133 and the second groove 134 are all configured as two, and the first sealing ring 132 is arranged on the side closest to the gas slit 123 to ensure the sealing effect of the first sealing ring 132 on the gas slit 123. Preferably, the first sealing ring 132 and the first groove 133 are both configured as two, and the lubricating member and the second groove 134 are both configured as one. The second groove 134 is arranged between the two first grooves 133. Thus, not only can the first sealing ring 132 accommodated in the first groove 133 seal the gas slit 123, but also the two first sealing rings 132 can respectively seal the lubricating member (for example, lubricating oil) accommodated in the second groove 134 on both sides, thereby preventing the lubricating member from dripping.

[0044] In an implementation manner, the transverse pushing members 13 are configured as multiple and are evenly embedded on the side of the base 12 facing the door panel 11, so as to evenly apply a pressing force to the door panel 11 by the multiple transverse pushing members 13, ensuring that the door panel 11 is evenly stressed. Compared with the valve structure in the prior art, the transverse pushing members 13 in the present application are embedded in the middle area of the base 12 and evenly apply a pressing force to the middle area of the door panel 11, and the reaction force formed inside the annealing chamber 20 is concentrated at one place, so that the door panel 11 fits more reliably with the annealing chamber 20 to ensure the sealing effect of the valve structure 10 on the opening 21 formed in the annealing chamber 20. Preferably, the transverse pushing members 13 are configured as three, the resetting members 14 are configured as two, the guiding shafts 17 are configured as two, and the transverse pushing members 13, the resetting members 14, the guiding shafts 17, the transverse pushing members 13, the guiding shafts 17, the resetting members 14, and the transverse pushing members 13 are arranged in sequence along the transverse direction.

[0045] In an implementation manner, refer Figure 5 to Figure 6As shown in the figure, the horizontal pushing column 131 includes a first column body 1311 and a second column body 1312 that are connected in sequence. The horizontal pushing member 13 further includes a limiting plate 135 that is disposed outside the first receiving cavity 121 and fixedly connected to the base 12 on the side facing the door panel 11. The limiting plate 135 only allows the first column body 1311 to protrude, and both the first groove 133 and the second groove 134 are formed on the side of the second column body 1312. Specifically, the transverse cross-section of the first column body 1311 is larger than that of the second column body 1312, and the first column body 1311 and the second column body 1312 can be of an integral structure. When the horizontal pushing column 131 is received in the first receiving cavity 121, the second column body 1312 is entirely received in the first receiving cavity 121, and the first column body 1311 can be partially received in the first receiving cavity 121 or entirely received in the first receiving cavity 121. The limiting plate 135 is disposed outside the first receiving cavity 121 and fixedly connected to the base 12. When the horizontal pushing column 131 moves in the direction towards the door panel 11 under the action of compressed gas, the first column body 1311 protrudes from the limiting plate 135, while the second column body 1312 is restricted within the first receiving cavity 121 under the abutment of the limiting plate 135 to prevent the horizontal pushing column 131 from slipping out of the first receiving cavity 121.

[0046] In one embodiment, referring to Figure 7 and Figure 10 As shown in the figure, the reset member 14 includes a reset rod 142 received in the second receiving cavity 122 and an elastic member 143 sleeved outside the reset rod 142. The reset portion 141 is formed on the side of the reset rod 142. The elastic member 143 is sleeved between the blocking portion 126 and the reset portion 141, and the blocking portion 126 only allows the reset rod 142 to extend out. The top of the reset rod 142 extends out from the blocking portion 126 formed by the opening of the second receiving cavity 122 and is fixedly connected to the door panel 11. The top of the reset rod 142 refers to the side of the reset rod 142 close to the door panel 11. The elastic member 143 is sleeved on the side of the reset portion 141 close to the blocking portion 126. When the horizontal pushing member 13 applies a pressing force to the door panel 11, the reset rod 142 moves in the direction towards the annealing chamber 20 along with the door panel 11, and the reset portion 141 also moves in the direction towards the annealing chamber 20 along with the door panel 11. The elastic member 143 is compressed under the clamping of the blocking portion 126 and the reset portion 141. When the horizontal pushing member 13 cancels the pressing force applied to the door panel 11, the reset portion 141 moves in the direction away from the annealing chamber 20 under the rebounding action of the elastic member 143, and the reset rod 142 and the door panel 11 also move in the direction away from the annealing chamber 20 along with the reset portion 141. Thus, after the pressing force applied to the door panel 11 by the valve structure 10 is cancelled, the reset of the door panel 11 and the reset member 14 is realized. It should be noted that the aforementioned elastic member 143 can be, for example, a spring or other components with elastic deformation, and the specific components are not limited in this embodiment.

[0047] In one embodiment, referring toFigure 2 , Figure 5 , Figure 8 and Figure 11 As shown, the valve structure 10 further includes a guide shaft 17 embedded in the base 12. A third receiving cavity 125 for receiving the guide shaft 17 is formed on one side of the base 12 facing the door panel 11. The guide shaft 17 is movably received in the third receiving cavity 125 and is fixedly connected to the door panel 11 at the top. The top of the guide shaft 17 protrudes from the third receiving cavity 125 and extends horizontally to form a connecting portion 171. The connecting portion 171 is fixedly connected to the door panel 11. For the specific fixed connection method, it can be similar to the aforementioned reset member 14 and realized by locking members such as bolts and nuts. This embodiment does not make specific limitations in this regard. When the horizontal pushing member 13 applies a pressing force to the door panel 11, the guide shaft 17 moves in the direction close to the annealing chamber 20 along with the door panel 11. When the horizontal pushing member 13 cancels the pressing force applied to the door panel 11, the guide shaft 17 and the door panel 11 also move in the direction away from the annealing chamber 20 along with the reset portion 141. Thus, the guide shaft 17 can play a guiding role for the movement of the door panel 11. Preferably, a bearing 172 sleeved on the outer side of the guide shaft 17 is arranged in the third receiving cavity 125 to facilitate the better movement of the guide shaft 17.

[0048] In one embodiment, referring to Figure 12 As shown, an installation plate 112 protrudes from one side of the door panel 11 facing the base 12, and a first installation hole 113 and a second installation hole 114 for fixedly connecting the reset member 14 and the guide shaft 17 are respectively recessed in the installation plate 112. The installation plate 112 is recessed inward for receiving the connecting portion 171 formed by the horizontal extension of the top of the guide shaft 17. The connecting portion 171 is received therein and fixedly connected to the door panel 11 through the second installation hole 114. The reset rod 142 is fixedly connected to the door panel 11 through the first installation hole 113, thereby ensuring the connection between the door panel 11 and the base 12 and ensuring the relative position between the door panel 11 and the base 12. Among them, the installation plate 112 and the door panel 11 can be of an integral structure, and this embodiment does not make specific limitations on the number of the first installation hole 113 and the second installation hole 114.

[0049] In one embodiment, referring to Figure 1 and Figure 2As shown, the valve structure 10 further includes: a mounting frame 15 that supports the base 12 and a driving member 16 fixedly connected to the mounting frame 15 to drive the axial movement of the base 12. The driving member 16 axially extends a driving shaft 161 that penetrates through the base 12. The mounting frame 15 is provided with a guide rod 151 that penetrates through the base 12, and the guide rod 151 is parallel to the driving shaft 161. Specifically, the mounting frame 15 includes: a first plate body 155 located above the base 12, a second plate body 156 located below the base 12, and a third plate body 157 and a fourth plate body 158 respectively connecting the two ends of the first plate body 155 and the second plate body 156. Thus, the first plate body 155, the second plate body 156, the third plate body 157, and the fourth plate body 158 are arranged to enclose the base 12. The first plate body 155 and the second plate body 156 are arranged oppositely, and a guide rod 151 that penetrates through the base 12 is provided between the first plate body 155 and the second plate body 156; the third plate body 157 and the fourth plate body 158 are arranged oppositely to fix the first plate body 155 and the second plate body 156.

[0050] In one example, the driving member 16 is arranged at the bottom of the second plate body 156 and fixedly connected to the side of the second plate body 156 facing away from the first plate body 155. The driving member 16 extends the driving shaft 161 to continuously penetrate through the second plate body 156 and the base 12; in another example, the driving member 16 is arranged at the bottom of the base 12 and fixedly connected to the side of the second plate body 156 facing the first plate body 155. The driving member 16 extends the driving shaft 161 to penetrate through the base 12. The specific structure of this embodiment is not limited as long as it can realize the axial movement of the driving shaft 161 driven by the driving member 16 to drive the axial movement of the base 12 along the guide rod 151, thereby adjusting the position of the whole formed by the base 12 and the door panel 11 relative to the annealing chamber 20, so as to facilitate the movable sealing of the opening 21 formed by the annealing chamber 20. To further ensure the stability of the base 12 during the movement process, two guide rods 151 are arranged oppositely and respectively penetrate through both sides of the base 12 to further ensure the stability of the base 12 when adjusting the position under the driving action of the driving member 16.

[0051] In one embodiment, refer to Figures 1 to 3As shown, the mounting bracket 15 further includes: a first sensor 152 and a limit block 154 disposed on the top of the base 12, and a second sensor 153 disposed on the side of the base 12. The limit block 154 is disposed on the side of the first plate body 155 facing the second plate body 156. When the driving member 16 drives the base 12 to axially move, it moves until the limit block 154 abuts against the top of the base 12 to limit the axial position of the base 12. The first sensor 152 is disposed on the side of the first plate body 155 facing away from the second plate body 156 for detecting the longitudinal position of the base 12 (which can be understood as the axial position); the second sensor 153 is disposed on the side of the third plate body 157 facing the fourth plate body 158 or on the side of the fourth plate body 158 facing the third plate body 157 for detecting the lateral position of the base 12, so as to position the base 12 by the first sensor 152 and the second sensor 153.

[0052] In one embodiment, a second sealing ring 111 adapted to the edge of the opening 21 is disposed on the side of the door panel 11 facing the opening 21. When the door panel 11 seals the opening 21, the second sealing ring 111 is disposed around the periphery of the opening 21 to further ensure the sealing effect of the door panel 11 on the opening 21.

[0053] Based on the same inventive concept, refer Figure 13 As shown, the present invention also discloses an annealing device (not shown), and the annealing device includes: an annealing chamber 20 forming an opening 21 and a valve structure 10 disposed on the side of the annealing chamber 20. For the specific implementation manner of the valve structure 10, reference may be made to the foregoing description, and details are not repeated herein.

[0054] The series of detailed descriptions listed above are only specific descriptions of the feasible embodiments of the present invention, and they are not intended to limit the protection scope of the present invention. Any equivalent embodiments or changes made without departing from the technical spirit of the present invention should be included in the protection scope of the present invention.

[0055] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above-described exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present invention. Any reference signs in the claims should not be regarded as limiting the claimed rights.

[0056] In addition, it should be understood that although this specification is described in terms of embodiments, not every embodiment contains only an independent technical solution. This narrative manner of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A valve structure for an opening formed by actively sealing an annealing chamber in an annealing device, characterized in that The valve structure includes: a door panel, a base disposed on a side of the door panel facing away from the opening, and a horizontal pusher and a reset member embedded in the base; a first receiving cavity and a second receiving cavity are formed on a side of the base facing the door panel for receiving the horizontal pusher and the reset member respectively. The horizontal pusher is received in the first receiving cavity and a gas gap is formed between the bottom of the horizontal pusher and the first receiving cavity. The base is provided with an air supply pipe communicating with the gas gap. The reset member is received in the second receiving cavity and the top of the reset member is fixedly connected to the door panel. A reset portion extends radially outward from a side portion of the reset member. The diameter of the second receiving cavity contracts radially inward to form a blocking portion that restricts the reset portion in the second receiving cavity; Compressed gas is supplied or output to the gas gap through the air supply pipe, so as to apply or cancel a pressing force for sealing the opening to the door panel by the horizontal pusher.

2. The valve structure according to claim 1, characterized in that, The reset member includes: a reset rod received in the second receiving cavity and an elastic member sleeved outside the reset rod. The reset portion is formed on a side portion of the reset rod. The elastic member is sleeved between the blocking portion and the reset portion, and only the reset rod is allowed to extend out of the blocking portion.

3. The valve structure according to claim 1, wherein The horizontal pusher includes: a horizontal push column received in the first receiving cavity and a first sealing ring and a lubricating member annularly arranged outside the horizontal push column. A first groove and a second groove are formed by inward depressions on a side portion of the horizontal push column for receiving the first sealing ring and the lubricating member respectively.

4. The valve structure according to claim 3, wherein The horizontal push column includes: a first column body and a second column body connected in sequence. The horizontal pusher further includes: a limiting plate disposed outside the first receiving cavity and fixedly connected to a side of the base facing the door panel. Only the first column body is allowed to protrude from the limiting plate, and both the first groove and the second groove are formed on a side portion of the second column body.

5. The valve structure according to claim 1, characterized in that, The valve structure further includes: a guide shaft embedded in the base. A third receiving cavity for receiving the guide shaft is formed on a side of the base facing the door panel. The guide shaft is movably received in the third receiving cavity and the top of the guide shaft is fixedly connected to the door panel.

6. The valve structure according to claim 5, wherein A mounting plate protrudes from a side of the door panel facing the base, and a first mounting hole and a second mounting hole for fixedly connecting the reset member and the guide shaft respectively are recessed in the mounting plate.

7. The valve structure according to claim 1, characterized in that The valve structure further includes: a mounting bracket for supporting the base and a driving member fixedly connected to the mounting bracket to drive the base to move axially. A driving shaft axially extends out of the driving member and penetrates the base. The mounting bracket is provided with a guide rod penetrating the base, and the guide rod is parallel to the driving shaft.

8. The valve structure according to claim 7, wherein The mounting bracket further includes: a first sensor and a limiting block disposed on the top of the base and a second sensor disposed on a side portion of the base.

9. The valve structure according to claim 1, characterized in that A second sealing ring adapted to the edge of the opening is disposed on a side of the door panel facing the opening. The horizontal pushers are configured to be multiple and are uniformly embedded on a side of the base facing the door panel.

10. An annealing device, characterized in that, Including: an annealing chamber forming an opening and the valve structure according to any one of claims 1 to 9 disposed on a side portion of the annealing chamber.

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