Vertical furnace system

Abstract

The invention provides a vertical furnace system, and belongs to the technical field of semiconductors. In order to solve the problems that a vertical furnace system is high in sealing cost and low in sealing performance, the vertical furnace system comprises a front-end storage unit and a rear-end process unit which are arranged in sequence; the rear-end process unit comprises a loading unit and a furnace body unit; the loading unit is provided with a first shell; the furnace body unit is provided with a second shell; the first shell and the second shell are mutually independent; the first shell is provided with a first opening and a second opening, the first opening is used for being attached to a port of the box opening mechanism, the second opening is used for being attached to the furnace body inlet and outlet, and after the first shell is assembled and formed, the surfaces where the first opening and the second opening are located are processed to be smooth. According to the vertical furnace system, the rear-end process unit is divided into the loading unit and the furnace body unit, and the loading unit and the furnace body unit are independently provided with the shells, so that the sealing performance of the loading unit can be independently improved, the sealing difficulty is reduced, and the sealing performance of the vertical furnace system is improved on the basis of controlling the cost.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and particularly to a vertical furnace system. Background Art

[0002] In the semiconductor manufacturing process, the vertical furnace is one of the devices widely used in the heat treatment of silicon wafers, and the vertical furnace is also called a vertical diffusion furnace. A front-end storage unit is usually provided at the front end of the vertical furnace device (i.e., the back-end process unit), and the two together form a vertical furnace system.

[0003] The front-end storage unit usually includes a wafer cassette loading / unloading port, several wafer cassette storage positions, a wafer cassette transfer robot arm, and the front part of the cassette opening device, which are mainly used for transporting, storing, and opening / closing the FOUP (wafer cassette); in the front-end storage unit, the wafers are located in the wafer cassette, so the front-end storage unit has a relatively low requirement for sealing. The back-end process unit usually includes the back part of the cassette opening device, a wafer transfer robot arm, and a vertical furnace (a furnace body and a boat that can carry several wafers in and out of the furnace body), which are mainly used for wafer process treatment; in the back-end process unit, the wafers are exposed, so the back-end process unit has a high requirement for sealing.

[0004] In order to ensure the sealing performance of the existing vertical furnace system, the housing of the back-end process unit is covered with a whole piece of plate, that is, it is usually set as a regular cuboid, with each face using a whole piece of plate and assembled and welded through the edges to form an integral body, that is, first the plate is formed (the whole piece of plate is perforated and grooved according to the design) and then assembled and welded, so as to ensure a small number of joints and ensure the sealing performance through the welding process. However, this method cannot meet the requirements today when the sealing requirements are becoming increasingly strict, and the cost is relatively high. Summary of the Invention

[0005] The purpose of this application is to solve the problems in the prior art that the sealing cost of the vertical furnace system is high and the sealing performance is low. Therefore, this application provides a vertical furnace system. By splitting the back-end process unit into a loading unit and a furnace body unit, and independently setting the housings respectively, the sealing performance of the loading unit can be improved alone, the sealing difficulty is reduced, and thus the sealing performance of the vertical furnace system is improved on the basis of controlling the cost.

[0006] An embodiment of this application provides a vertical furnace system, including a front-end storage unit and a back-end process unit arranged in sequence;

[0007] The back-end process unit includes a loading unit and a furnace body unit;

[0008] The loading unit has a first housing, and an opening mechanism rear part, a wafer transfer mechanism, and a boat area for accommodating the boat are arranged in the first housing;

[0009] The furnace body unit has a second housing, and the furnace body of the vertical furnace is arranged in the second housing.

[0010] The first housing and the second housing are independent of each other;

[0011] The first housing has a first opening and a second opening. The first opening is used to fit with the port of the cartridge opening mechanism, and the second opening is used to fit with the furnace body inlet and outlet. Moreover, after the first housing is assembled and formed, the surfaces where the first opening and the second opening are located are processed to be flat.

[0012] With the above technical solution, by splitting the backend process unit into a loading unit and a furnace body unit, and the housings of the two units are independently arranged, that is, the housing of the existing backend process unit is changed from a complete one to two spliced ones, so that the sealing performance of the loading unit can be improved separately, the sealing difficulty is reduced, and thus the sealing performance of the vertical furnace system is improved on the basis of controlling the cost; and, changing the housing of the existing backend process unit from a larger one to two smaller ones makes the required sheet material specifications (surface area) of a single housing, especially the first housing of the loading unit, smaller, thereby further reducing the cost. At the same time, the weld length is shortened during assembly, reducing the continuous high welding process requirements, that is, reducing the assembly difficulty and improving the sealing reliability; moreover, changing the housing of the existing backend process unit from a larger one to two smaller ones also makes the overall volume of a single housing, especially the first housing of the loading unit, smaller, so that the first housing can be integrally processed after being assembled and formed, that is, the flat surface treatment is carried out on the required surface, which can reduce the flat surface requirements during assembly, thereby reducing the accuracy requirements for each component (sheet material, pipe, etc.) itself and reducing the assembly difficulty, and can also avoid the flat surface process being affected by the assembly process (such as deformation caused by welding heat, etc.), ensuring the flatness of the finished product.

[0013] In some embodiments, the first housing includes a frame body and a plurality of sheet materials covering the outside of the frame body by welding. The frame body includes a plurality of solid pipes welded together;

[0014] The second housing is arranged above the first housing, and the sheet materials of the two are bent after grooving.

[0015] With the above technical solution, the frame body is composed of solid pipes, which can avoid the internal and external communication of the first housing caused by the damage of the frame body surface (such as welding through during assembly), thus ensuring the sealing performance of the first housing; and, by grooving and bending the sheet materials, the sheet materials are easy to be bent and formed, and the outer R of the bending angle can be minimized, so as to fit more closely with other components (such as the frame body), thereby reducing the welding difficulty and improving the sealing performance.

[0016] In some embodiments, after the first housing is assembled and formed, the surfaces where the first opening and the second opening are located are milled flat.

[0017] In some embodiments, the circumferential direction of the first housing is successively a first side surface, a second side surface, a third side surface, and a fourth side surface, and the top surface of the first housing is attached to the bottom surface of the second housing;

[0018] The first side surface of the first housing is attached to the front-end storage unit and is provided with the first opening;

[0019] The top surface of the first housing is provided with the second opening.

[0020] In some embodiments, the second side surface and the fourth side surface of the first housing are oppositely arranged, and both are covered by a single piece of plate, and a maintenance door is provided on the third side surface;

[0021] The plates on the second side surface and the fourth side surface of the first housing are bent and extended to the third side surface and are connected to the maintenance door.

[0022] In some embodiments, a plurality of gas supply pipelines are provided on the first side surface, and the gas supply pipelines are formed by splicing a plurality of plates, and the splicing seams are fully welded and filled with sealant.

[0023] In some embodiments, the top surface includes a first plate and a second plate welded at the edge, and the bearing capacity of the second plate is greater than that of the first plate, and the second plate is provided with the second opening.

[0024] In some embodiments, the front-end storage unit includes a casing, a front port communicating with the inside is provided at the front end of the casing, and a carrier plate for carrying a wafer cassette is provided at the front port;

[0025] Support blocks are provided on both sides of the casing near the front port, and both sides of the carrier plate are lapped on the corresponding support blocks;

[0026] A connecting frame is connected below the carrier plate, both sides of the connecting frame are movably connected to the casing, and the connecting frame can drive the carrier plate to enter and exit the front port.

[0027] By adopting the above technical solution, by changing the carrier plate conventionally fixed at the front port of the casing to a movable connection, specifically, by lapping the carrier plate on the support blocks of the casing and movably connecting the carrier plate to the casing through the connecting frame, the carrier plate can enter and exit the front port, and the connection with the casing is maintained through the connecting frame, realizing the complete integral disassembly of the mechanism at the front port, with high reset accuracy, thereby reducing the difficulty of entering the interior of the front-end storage unit of the vertical furnace, improving the manual maintenance efficiency, and reducing the risk of wafer cassette transfer.

[0028] In some embodiments, a first connecting member is provided on one side of the casing corresponding to the connecting frame;

[0029] One side of the connecting frame is detachably connected to the first connecting member through a second connecting member, and the other side is rotatably connected to the casing.

[0030] With the above technical solution, the connecting frame can rotate relative to the casing, and drive the bearing plate to move out to the side of the front port, so that there is no obstruction at the front port and it is completely exposed, which is convenient for maintenance personnel to enter, with convenient operation, simple structure, small volume and easy maintenance.

[0031] In some embodiments, the bearing plate is movably connected to the connecting frame and can move from one side of the connecting frame to the other side.

[0032] With the above technical solution, the bearing plate can be separated from its normal working position prior to the connecting frame, thus avoiding affecting the subsequent entry and exit of the connecting frame from the front port, and ensuring that when it is in its normal working position, it is as close as possible to the inner wall of the casing to control the volume of the front-end storage unit of the vertical furnace.

[0033] Other features and corresponding beneficial effects of the present application are described in the following part of the specification, and it should be understood that at least some of the beneficial effects are obvious from the description in the specification of the present application. Description of the Drawings

[0034] Figure 1 is a structural schematic diagram of the present application;

[0035] Figure 2 is a structural schematic diagram of the first casing in the present application;

[0036] Figure 3 is a structural schematic diagram of the third side of the first casing in the present application;

[0037] Figure 4 is a structural schematic diagram of the front-end storage unit in the present application after removing the front panel;

[0038] Figure 5 is a partial structural schematic diagram of the front-end storage unit in the present application.

[0039] Description of the Reference Numerals:

[0040] 1. Rear-end process unit; 2. Front-end storage unit;

[0041] 100. First casing; 110. First side; 111. First opening; 120. Second side; 130. Third side; 131. Maintenance door; 140. Top surface; 141. Second opening;

[0042] 200. Second casing;

[0043] 300. Casing; 301. Front port; 302. Top port; 303. Front panel;

[0044] 310. Support block;

[0045] 320. Carrier plate; 321. Handle;

[0046] 330. Connecting frame; 331. First connecting member; 332. Second connecting member; 333. First mounting member; 334. Second mounting member;

[0047] 340. Auxiliary support. Detailed implementation manners

[0048] The following specific embodiments illustrate the implementation manners of the present application. Those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification. Although the description of the present application will be introduced in conjunction with preferred embodiments, this does not mean that the features of this application are limited to this implementation manner. On the contrary, the purpose of introducing the application in conjunction with the implementation manner is to cover other alternatives or modifications that may be extended based on the claims of the present application. To provide a deep understanding of the present application, many specific details will be included in the following description. The present application can also be implemented without these details. In addition, to avoid confusing or obscuring the key points of the present application, some specific details will be omitted in the description. It should be noted that, without conflict, the embodiments and features in the embodiments of the present application can be combined with each other.

[0049] It should be noted that in this specification, similar reference numerals and letters indicate similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0050] In the description of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. These are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present application. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Therefore, the features defined with "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, the meaning of "a plurality" is two or more. Unless otherwise clearly specified and limited, the terms "mounted", "connected", "coupled" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0051] It should be noted that the vertical furnace system generally includes a front-end storage unit 2 and a rear-end process unit 1 arranged in sequence. The two units are usually separately manufactured and assembled. Among them, in the rear-end process unit 1, since the wafer is exposed, the requirement for the sealing performance of the housing is high. Therefore, in order to ensure the sealing performance of the existing vertical furnace system, the housing of the rear-end process unit 1 is covered with a whole piece of plate, that is, it is usually set as a regular cuboid, and each surface uses a whole piece of plate and is assembled and welded through the edges. That is, after the plate is formed (the whole piece of plate is perforated and grooved according to the design), it is assembled and welded, so as to ensure a small number of seams and improve the sealing performance. However, the weld length is long, and the requirement for the welding process is high; at the same time, the housing has a large volume and the plate specifications are large. During the plate splicing and welding process during assembly, the plate is prone to skew and deformation, which further increases the welding difficulty and also affects the flatness of the plate surface, thereby affecting the connection sealing performance with other components.

[0052] It should also be noted that in the rear-end process unit 1, there are usually a rear part of the cassette opening device (the cassette opening device refers to the device used to open the wafer cassette, usually with its port as the front and rear boundary, including a loading platform for carrying the wafer cassette in the front part and a transfer mechanism for fixing and transferring the cassette cover in the rear part, etc.), a wafer transfer robot arm, and a vertical furnace (usually including a furnace body and a boat that can carry a number of wafers and enter and exit the furnace body).

[0053] Please refer to Figure 1 , Figure 1 which is a schematic structural diagram of the present application.

[0054] An embodiment of the present application provides a vertical furnace system, including a front-end storage unit 2 and a rear-end process unit 1 arranged in sequence.

[0055] The rear-end process unit 1 includes a loading unit and a furnace body unit.

[0056] The loading unit has a first housing 100, and a rear part of the cassette opening mechanism, a wafer transfer mechanism, and a cassette area for accommodating a cassette are arranged inside the first housing 100.

[0057] The furnace body unit has a second housing 200, and a furnace body of the vertical furnace is arranged inside the second housing 200.

[0058] The first housing 100 and the second housing 200 are independent of each other.

[0059] The first housing 100 has a first opening 111 and a second opening 141. The first opening 111 is used to fit with the port of the cassette opening mechanism, and the second opening 141 is used to fit with the furnace body entrance and exit. Moreover, after the first housing 100 is assembled and formed, the surfaces where the first opening 111 and the second opening 141 are located are processed to be flat. It can be understood that if there are other openings on the first housing 100 that need to be fitted and docked with working equipment, the same processing method can also be adopted for these openings.

[0060] By splitting the rear-end process unit 1 into a loading unit and a furnace body unit, and independently setting the housings of the two units, that is, changing the housing of the existing rear-end process unit 1 from a complete one to two spliced ones, the sealing performance of the loading unit can be improved alone, the sealing difficulty is reduced, and thus the sealing performance of the vertical furnace system is improved on the basis of controlling costs.

[0061] Moreover, changing the housing of the existing rear-end process unit 1 from a larger one to two smaller ones makes the required sheet material specifications (surface area) of a single housing, especially the first housing 100 of the loading unit, smaller, thereby further reducing costs. At the same time, the weld length during assembly is shortened, the continuous high welding process requirements are reduced, that is, the assembly difficulty is reduced and the sealing reliability is improved.

[0062] Furthermore, changing the housing of the existing rear-end process unit 1 from a larger one to two smaller ones also makes the overall volume of a single housing, especially the first housing 100 of the loading unit, smaller. As a result, the first housing 100 can be integrally processed after being assembled and formed, that is, the flat surface treatment for the required surfaces can reduce the surface flatness requirements during assembly, thereby reducing the precision requirements for each component (sheet materials, pipes, etc.) itself and the assembly difficulty. And it can also avoid the flatness process being affected by the assembly process (such as deformation caused by welding heat, etc.), ensuring the flatness of the finished product.

[0063] In one embodiment, the first shell 100 includes a frame body and a plurality of plates covered on the outside of the frame body by welding, and the frame body includes a plurality of solid tubes welded together, and the solid tubes can prevent the surface of the frame body from being damaged (for example, welding through during assembly, etc.) and causing the inside and outside of the first shell 100 to be connected, thereby ensuring the sealing of the first shell 100. It can be understood that the frame body includes not only a plurality of solid tubes constituting the side edges of the first shell 100, but also solid tubes arranged at other positions according to strength requirements, etc.

[0064] In one embodiment, the second shell 200 is disposed above the first shell 100, and the plates of both are bent after being grooved, so that the plates are easy to bend into shape and the outer R of the bending angle can be minimized, thereby fitting more closely with other components (such as the frame body), thereby reducing the difficulty of welding and improving the sealing.

[0065] In one embodiment, after the first housing 100 is assembled and formed, the surfaces where the first opening 111 and the second opening 141 are located are milled flat.

[0066] See also Figure 2-3 , Figure 2 It is a structural schematic diagram of the first shell 100 in this application; Figure 3 It is a schematic structural diagram of the third side surface 130 of the first shell 100 in the present application.

[0067] In one embodiment, the circumference of the first shell 100 is the first side surface 110 , the second side surface 120 , the third side surface 130 and the fourth side surface in sequence, and the top surface 140 of the first shell 100 is in contact with the bottom surface of the second shell 200 .

[0068] The first side surface 110 of the first housing 100 is in contact with the front storage unit 2 and is provided with a first opening 111 .

[0069] The top surface 140 of the first housing 100 is provided with a second opening 141 .

[0070] In one embodiment, the second side surface 120 and the fourth side surface of the first housing 100 are disposed opposite to each other and are both covered by a single plate, and a maintenance door 131 is disposed on the third side surface 130 .

[0071] The plates of the second side surface 120 and the fourth side surface of the first housing 100 are bent and extended to the third side surface 130 , and are connected to the maintenance door 131 .

[0072] It should be noted that the first shell 100 needs to be quickly ventilated to ensure the circulation of specific internal gas while ensuring sealing, and the box opening device connected to the first opening 111 on the first side 110 usually also needs air supply.

[0073] Thus, in one embodiment, the first side surface 110 includes a plurality of air supply pipelines. The air supply pipelines are formed by splicing multiple plates. The splicing seams are fully welded and filled with sealant to improve the sealing performance.

[0074] In one embodiment, the top surface 140 includes a first plate and a second plate welded at the edge, and the bearing capacity of the second plate is greater than that of the first plate. The second plate is provided with a second opening 141, that is, the second plate is used for installing the furnace body. The second plate can be made of thick steel plate, and the first plate can be made of sheet metal material, so as to control the cost and facilitate assembly, and further ensure the sealing performance. At the same time, the second plate can ensure the bearing capacity of the furnace body and ensure the flatness through subsequent surface treatment, so as to ensure the sealing performance.

[0075] The front-end storage unit 2 usually has two loading and unloading ports. One is the front port 301 for manual / AGV (automatic guided vehicle) to transfer the wafer cassette, and the other is the top port 302 for OHT (overhead hoist transport) to transfer the wafer cassette.

[0076] To store as many wafer cassettes as possible, the inner wall of the housing 300 of the front-end storage unit 2 is usually densely arranged with wafer cassette storage stations, and it is difficult to set a maintenance door 131 for maintenance personnel to enter the interior of the unit. Therefore, during manual maintenance of the front-end storage unit 2, usually each mechanism of the front port 301 is removed one by one and entered from the front port 301. However, this method is not only time-consuming and laborious during disassembly, with many small parts, such as a large number of screws, but also during reinstallation, due to the high position accuracy requirements for each mechanism of the front port 301, the reinstallation efficiency is low and it may lead to the risk of wafer cassette transfer.

[0077] Therefore, in the embodiment of the present application, the carrier plate 320 that is conventionally fixed to the front port 301 of the housing 300 of the front-end storage unit 2 is changed to a movable connection, which improves the manual maintenance efficiency and reduces the risk of wafer cassette transfer.

[0078] Please refer to Figure 4-5 , Figure 4 which is a schematic structural diagram of the front-end storage unit 2 in the present application after removing the front panel 303; Figure 5 which is a partial structural diagram of the front-end storage unit 2 in the present application.

[0079] In one embodiment, the front-end storage unit 2 includes a housing 300. A front port 301 communicating with the interior is provided at the front end of the housing 300. A carrier plate 320 for carrying the wafer cassette is provided at the front port 301. The carrier plate 320 is usually provided with positioning pins for positioning the wafer cassette, control buttons, etc.

[0080] On both sides of the housing 300 near the front port 301, support blocks 310 are provided. Both sides of the carrier plate 320 are lapped on the corresponding support blocks 310. A connecting frame 330 is connected below the carrier plate 320. Both sides of the connecting frame 330 are movably connected to the housing 300, and the connecting frame 330 can drive the carrier plate 320 in and out of the front port 301, so as to change the carrier plate 320 that is conventionally fixed at the front port 301 of the housing 300 to a movable connection, enabling the carrier plate 320 to enter and exit the front port 301, and maintaining the connection with the housing 300 through the connecting frame 330, realizing the complete disassembly and assembly of the mechanism at the front port 301 with high efficiency. Moreover, through the connection between the connecting frame 330 and the housing 300, the reset has a reinstallation reference and high reset accuracy, thereby reducing the difficulty of entering the interior of the front-end storage unit 2 of the vertical furnace, improving the manual maintenance efficiency, and reducing the risk of wafer cassette transfer.

[0081] In one embodiment, a front panel 303 is detachably provided at the front end of the housing 300 where the connecting frame 330 is located, so as to cooperate with the housing 300 to expose only the front port 301 at the front end of the front-end storage unit 2 of the vertical furnace, protecting the internal components.

[0082] In one embodiment, a first connecting member 331 is provided on one side of the housing 300 corresponding to the connecting frame 330. One side of the connecting frame 330 is detachably connected to the first connecting member 331 through a second connecting member 332, and the other side is rotatably connected to the housing 300. Thus, the connecting frame 330 can rotate relative to the housing 300 and drive the carrier plate 320 to move out to the side of the front port 301, making the front port 301 unobstructed and completely exposed, facilitating the entry of maintenance personnel, with convenient operation, simple structure, small volume, and easy maintenance.

[0083] In a specific embodiment, the first connecting member 331 is a plug-in block, and a plug-in hole is provided on the plug-in block. The second connecting member 332 is a plug pin adapted to the plug-in hole.

[0084] In one embodiment, the carrier plate 320 is movably connected to the connecting frame 330 and can move from one side of the connecting frame 330 to the other side, enabling the carrier plate 320 to first move away from its normal working position relative to the connecting frame 330, thus avoiding affecting the subsequent entry and exit of the connecting frame 330 from the front port 301. And when ensuring its normal working position, it is as close as possible to the inner wall of the housing 300 to control the volume of the front-end storage unit 2 of the vertical furnace. This method is especially applicable when the connecting frame 330 is rotatably connected to the housing 300, and the carrier plate 320 first moves away from its normal working position (the position for horizontally loading the wafer cassette), that is, at least one side is far from the inner wall of the housing 300, so as to avoid the connecting frame 330 colliding with the housing 300 when driving it out of the front port 301.

[0085] In one embodiment, the front edge of the carrier plate 320 is rotatably connected to the connecting frame 330 and can be flipped from the rear side of the connecting frame 330 to the front side, so that the movable connection structure between the carrier plate 320 and the connecting frame 330 is simple, small in size and easy to maintain.

[0086] In other alternative embodiments, the carrier plate 320 is slidably connected to the connecting frame 330 and can slide from the rear side of the connecting frame 330 to the front side.

[0087] In one embodiment, an auxiliary support 340 is further included. The auxiliary support 340 is used to support the carrier plate 320 flipped to the front side of the connecting frame 330 and keep a gap between it and the front side of the connecting frame 330, so as to prevent the carrier plate 320 from colliding with the connecting frame 330 after flipping and causing damage to the components thereon.

[0088] In one embodiment, a first mounting member 333 and a second mounting member 334 are provided on the connecting frame 330. The auxiliary support 340 can be detachably connected to the first mounting member 333 and the second mounting member 334; and

[0089] When the auxiliary support 340 is connected to the first mounting member 333, the auxiliary support 340 is embedded in the connecting frame 330;

[0090] When the auxiliary support 340 is connected to the second mounting member 334, the auxiliary support 340 is used to support the carrier plate 320 flipped to the front side of the connecting frame 330 and keep it horizontal.

[0091] In a specific embodiment, both the first mounting member 333 and the second mounting member 334 are clamping grooves, and clamping blocks adapted to the clamping grooves are provided on the auxiliary support 340.

[0092] In one embodiment, handles 321 are provided on both sides of the carrier plate 320 to facilitate the movement of the carrier plate 320.

[0093] In one embodiment, at least two loading and unloading stations are provided on the carrier plate 320 to improve the loading and unloading efficiency of the wafer cassette.

[0094] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A vertical furnace system, characterized in that, It includes a front-end storage unit and a back-end process unit arranged in sequence; The back-end process unit includes a loading unit and a furnace body unit; The loading unit has a first housing, and an opening mechanism rear part, a wafer transfer mechanism, and a boat area for accommodating a boat are arranged in the first housing; The furnace body unit has a second housing, and a furnace body of a vertical furnace is arranged in the second housing; The first housing and the second housing are independent of each other; The first housing has a first opening and a second opening. The first opening is used to fit with the port of the opening mechanism, and the second opening is used to fit with the furnace body entrance and exit. Moreover, after the first housing is assembled and formed, the surfaces where the first opening and the second opening are located are processed to be flat.

2. The vertical furnace system according to claim 1, wherein The first housing includes a frame body and a plurality of plates covering the outside of the frame body by welding. The frame body includes a plurality of solid pipes welded together; The second housing is arranged above the first housing, and the plates of both are bent after grooving; 3. The vertical furnace system according to claim 1, characterized in that, After the first housing is assembled and formed, the surfaces where the first opening and the second opening are located are milled flat.

4. The vertical furnace system according to claim 1, wherein The circumferential direction of the first housing is successively a first side surface, a second side surface, a third side surface, and a fourth side surface. The top surface of the first housing is attached to the bottom surface of the second housing; The first side surface of the first housing is attached to the front-end storage unit, and the first opening is arranged thereon; The second opening is arranged on the top surface of the first housing; 5. The vertical furnace system according to claim 4, wherein The second side surface and the fourth side surface of the first housing are arranged oppositely, and both are covered by a single plate. A maintenance door is arranged on the third side surface; The plates of the second side surface and the fourth side surface of the first housing are bent and extended to the third side surface and connected to the maintenance door; 6. The vertical furnace system according to claim 4, characterized in that, The first side surface includes a plurality of gas supply pipelines, and the gas supply pipelines are formed by splicing a plurality of plates. The splicing seams are fully welded and filled with sealant; 7. The vertical furnace system according to claim 4, wherein The top surface includes a first plate and a second plate welded at the edge, and the bearing capacity of the second plate is greater than that of the first plate. The second opening is provided on the second plate; 8. The vertical furnace system according to claim 1, wherein The front-end storage unit includes a casing. A front port communicating with the inside is arranged at the front end of the casing, and a carrier plate for carrying a wafer cassette is arranged at the front port; Support blocks are arranged on both sides of the casing near the front port, and both sides of the carrier plate are lapped on the corresponding support blocks; A connecting frame is connected below the carrier plate. Both sides of the connecting frame are movably connected to the casing, and the connecting frame can drive the carrier plate to enter and exit the front port; 9. The vertical furnace system according to claim 8, wherein, A first connecting piece is arranged on one side of the casing corresponding to the connecting frame; One side of the connecting frame is detachably connected to the first connecting piece through a second connecting piece, and the other side is rotatably connected to the casing; 10. The vertical furnace system according to claim 8, wherein The carrier plate is movably connected to the connecting frame and can move from one side of the connecting frame to the other side.

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