Chip fixing device for low-light microscope

Abstract

The invention discloses a chip fixing device for a low-light microscope, which relates to the technical field of low-light microscopes and comprises a base, an opening is formed in the base, light-transmitting glass is arranged at the bottom of the opening, a plurality of connecting rods are arranged on the inner wall of the opening in the circumferential direction, clamping blocks are arranged at the ends of the connecting rods, and first elastic pieces are further connected to the connecting rods. The first elastic piece is used for pushing the connecting rod to move towards one side of the center of the opening, first slopes are arranged on the side walls of the clamping blocks, and the multiple first slopes are matched to form a receiving opening. A to-be-detected chip is placed in the receiving opening and pressed towards one side of the light-transmitting glass, the connecting rod slides outwards under the action of the first inclined surface, and the clamping blocks are gradually opened until the chip is clamped among the clamping blocks. And under the action of the first elastic piece, the plurality of clamping blocks can clamp the chip in the opening. According to the chip clamping device, clamping can be completed only by pressing the chip into the receiving opening, and rapid clamping of the chip can be achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of low-light microscopes, and in particular, to a chip fixing device for a low-light microscope. Background Art

[0002] A low-light microscope (Emission Microscope, EMMI) is a high-precision analysis device based on photon detection, mainly used for locating defects or failure points in semiconductor devices. Its principle is to apply a voltage to cause electron-hole recombination or hot carrier release of photons (wavelength range 350 - 1700 nm) at the defect, and use a high-sensitivity detector (such as InGaAs or CCD) to capture these weak light signals to achieve hot spot localization.

[0003] Currently, a Chinese patent with the publication number CN203249874U discloses a device for a backside low-light microscope, including a packaging body with an opening on it, and a light-transmitting glass is provided at the bottom of the opening. In addition, a chip fixing device is also provided on the packaging body, which specifically consists of a rubber head, a telescopic rod, and a control screw. The telescopic rod extends into the above-mentioned opening, and by screwing the control screw, the telescopic rod further moves into the opening, thereby driving the rubber head to clamp the chip in the opening.

[0004] However, the method of adjustment by the control screw is time-consuming and laborious, and it is impossible to quickly clamp the chip. Summary of the Invention

[0005] An object of the present invention is to overcome the deficiencies of the prior art and provide a chip fixing device for a low-light microscope.

[0006] The object of the present invention is achieved by the following technical solutions: A chip fixing device for a low-light microscope, including a base, an opening is formed on the base, a light-transmitting glass is provided at the bottom of the opening, a plurality of connecting rods are circumferentially arranged on the inner wall of the opening, a clamping block is provided at the end of the connecting rod, and a first elastic member is also connected to the connecting rod. The first elastic member is used to push the connecting rod to move towards the center side of the opening, and a first inclined surface is provided on the side wall of the clamping block. A plurality of the first inclined surfaces cooperate to form a receiving port with a gradually increasing diameter from the bottom to the top.

[0007] Preferably, the light-transmitting glass is movably arranged vertically, and a driving mechanism for driving the movement of the light-transmitting glass is also provided on the base.

[0008] Preferably, a cleaning rod is rotatably arranged on the bottom surface of the connecting rod. A second elastic member is further connected to the cleaning rod, and the second elastic member is used to push the cleaning rod to abut against the light-transmitting glass. When the driving mechanism drives the light-transmitting glass to move away from the side of the clamping block, the cleaning rod is pushed to the cleaning position. At this time, the cleaning rod is driven to rotate and can sweep across between the clamping block and the light-transmitting glass.

[0009] Preferably, a third elastic member is connected between the light-transmitting glass and the base. The driving mechanism includes a magnetic adsorption device. A magnetic block is arranged on the light-transmitting glass, and the magnetic adsorption device can attract or release the magnetic block.

[0010] Preferably, the length of the cleaning rod is adapted such that when the first elastic member is in a natural state, the cleaning rod can rotate to make its end pass over the virtual centers of several of the clamping blocks.

[0011] Preferably, a motor for driving the cleaning rod to rotate is arranged on the connecting rod.

[0012] Preferably, a connecting column is arranged on the cleaning rod, and a driving sleeve is arranged on the bottom surface of the connecting rod. The connecting column is sleeved on the driving sleeve, and a spline structure is adapted between the connecting column and the driving sleeve.

[0013] Preferably, the connecting rod is of a hollow structure, and a driving rod is arranged in the sliding cavity of the connecting rod. The driving rod extends into the inner cavity of the connecting rod. The driving shaft of the cleaning rod extends into the inner cavity of the connecting rod, and a gear is further arranged on the driving shaft of the cleaning rod. A rack portion is arranged on the side wall of the driving rod. As the connecting rod slides outwards, the driving rod and the connecting rod move relatively, so as to drive the rack portion to engage with the gear. A torsion spring is further connected to the driving shaft of the cleaning rod, and the torsion spring is used to maintain the initial posture of the cleaning rod away from the receiving port.

[0014] Preferably, in the circumferential direction, the rack portion on the driving rod at the rear end is closer to its respective gear than the corresponding rack portion on the driving rod at the front end.

[0015] Preferably, a connection port is formed on the first inclined surface. A jet nozzle is slidably fitted in the clamping block. The jet nozzle faces the connection port. The driving rod extends into the clamping block, and a second inclined surface is provided at the end of the driving rod. A third inclined surface is provided at the end of the jet nozzle facing away from the connection port. The third inclined surface is adapted to the second inclined surface. As the driving rod and the connecting rod move relative to each other, the driving rod, under the cooperation of the third inclined surface and the second inclined surface, pushes the jet nozzle to slide from the top to the bottom. A gas source is connected to the jet nozzle.

[0016] The beneficial effects of the present invention are as follows: 1. Place the chip to be detected into the receiving port, and press the chip towards the light-transmitting glass side. Under the action of the first inclined surface, the connecting rod will slide outwards, and several clamping blocks will gradually open until the chip is clamped between several clamping blocks. Under the action of the first elastic member, several clamping blocks will clamp the chip in the opening. Compared with the prior art, the present invention can complete the clamping only by pressing the chip into the receiving port, and can quickly clamp the chip.

[0017] 2. The light-transmitting glass can move vertically, so that a gap can be maintained between the light-transmitting glass and the clamping blocks during the process of pressing the chip into the receiving port, making it difficult for the clamping blocks to scratch the light-transmitting glass.

[0018] 3. A cleaning rod is provided on the connecting rod. By rotating the cleaning rod, the light-transmitting glass can be cleaned, so that the chip is not easily disturbed by dust and other debris during detection. Description of the Drawings

[0019] Figure 1 It is a schematic structural diagram of the embodiment; Figure 2 For Figure 1 Enlarged view of part A of Figure 3 For Figure 1 Enlarged view of part B of Figure 4 It is a top view structural diagram of the clamping block (the cleaning range of the cleaning rod is schematically shown in dotted lines).

[0020] Reference numerals: 1, base; 2, opening; 3, light-transmitting glass; 4, connecting rod; 5, clamping block; 6, first elastic member; 7, first inclined surface; 8, receiving port; 9, driving mechanism; 10, cleaning rod; 11, second elastic member; 12, third elastic member; 13, magnetic adsorption device; 14, magnetic block; 15, connecting column; 16, driving sleeve; 17, driving rod; 18, gear; 19, rack portion; 20, connection port; 21, jet nozzle; 22, second inclined surface; 23, third inclined surface; 24, connection groove; 25, connection ear; 26, chip. Detailed Embodiments

[0021] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative efforts belong to the scope of protection of the present invention.

[0022] As Figures 1 to 4 shown, a chip fixing device for a low-light microscope includes a base 1. An opening 2 is formed on the base 1, and a light-transmitting glass 3 is provided at the bottom of the opening 2. Due to the blocking of the light-transmitting glass 3, the opening 2 presents a concave structure that is open upward. A plurality of connecting rods 4 are circumferentially arranged on the inner wall of the opening 2, and a first elastic member 6 is specifically adapted between the connecting rods 4 and the base 1. Under the elastic force of the first elastic member 6, the ends of the plurality of connecting rods 4 are pushed to approach each other, and clamping blocks 5 are further provided at the ends of the connecting rods 4.

[0023] A first inclined surface 7 is specifically provided on the side wall of the clamping block 5, and the first inclined surfaces 7 on the plurality of clamping blocks 5 cooperate to form a receiving port 8 with a gradually increasing diameter from the bottom to the top.

[0024] When clamping the chip 26 to be detected, the chip 26 can be placed into the receiving port 8, and then the chip 26 is further pressed into the opening 2. Under the action of the first inclined surface 7, the connecting rods 4 will slide outward, and the plurality of clamping blocks 5 gradually open until the chip 26 is clamped between the plurality of clamping blocks 5. At this time, under the action of the first elastic member 6, the plurality of clamping blocks 5 will complete the clamping of the chip 26 in the opening 2.

[0025] In some embodiments, it is preferably adapted that the light-transmitting glass 3 is movable in the vertical direction. For example, a driving mechanism 9 can be provided on the base 1 to drive the light-transmitting glass 3 to move as expected. In a possible situation, the driving mechanism 9 can be a linear ejecting device such as a cylinder or an electric cylinder (not shown in the figure). Especially when the chip 26 is not placed or just placed into the receiving port 8, the driving mechanism 9 can drive the light-transmitting glass 3 to move away from the side of the clamping block 5, so that a gap is formed between the light-transmitting glass 3 and the clamping block 5. Thus, during the subsequent process of pressing the chip 26 into the opening 2, relative friction is not likely to occur between the clamping block 5 and the light-transmitting glass 3, and the light-transmitting glass 3 is not likely to be scratched.

[0026] As Figure 1 、 Figure 3As shown, in a possible example, a third elastic member 12 may be connected between the light-transmitting glass 3 and the base 1, and a magnetic block 14 may be provided on the light-transmitting glass 3. The driving mechanism 9 may include a magnetic adsorption device 13, such as an electromagnet. When the electromagnet is energized, the magnetic block 14 is attracted to the side of the magnetic adsorption device 13. At this time, the third elastic member 12 is compressed, and a gap is formed between the clamping block 5 and the light-transmitting glass 3. When the electromagnet is de-energized, the third elastic member 12 returns to its natural state and pushes the light-transmitting glass 3 out again, causing the above gap to disappear. At this time, the side wall of the chip 26 can be completely laterally clamped by the clamping block 5, and there is no easy place to be suspended.

[0027] For example, a connection groove 24 may be opened at the bottom of the opening 2, and a connection ear 25 is provided on the side wall of the light-transmitting glass 3. The connection ear 25 is inserted into the connection groove 24, and the above magnetic adsorption device 13 is provided in the connection groove 24, and the magnetic block 14 may be correspondingly provided on the connection ear 25. On the one hand, the connection ear 25 and the connection groove 24 can form a sliding guide for the light-transmitting glass 3, making its sliding state more stable. On the other hand, the arrangement of the magnetic adsorption device 13 and the magnetic block 14 in the connection groove 24 is not likely to cause occlusion of the detection area of the light-transmitting glass 3 for light transmission.

[0028] Such as Figure 1 , Figure 2 As shown, in a preferred example, a cleaning rod 10 may be rotatably provided on the bottom surface of the connecting rod 4, and a second elastic member 11 is also connected to the cleaning rod 10. Under the elastic force of the second elastic member 11, the cleaning rod 10 will abut against the light-transmitting glass 3. For example, bristles may be provided on the bottom surface of the cleaning rod 10, and at this time the bristles will abut against the light-transmitting glass 3.

[0029] When the above light-transmitting glass 3 is braked to the side away from the clamping block 5 and the above gap is formed, the cleaning rod 10 will be pushed to the cleaning position under the action of the second elastic member 11. At this time, when looking at the vertical cross-section, the cleaning rod 10 is located between the clamping block 5 and the light-transmitting glass 3. It can be imagined that at this time, controlling the cleaning rod 10 to rotate, the cleaning rod 10 will sweep across between the clamping block 5 and the light-transmitting glass 3. In particular, it can complete the cleaning of the area of the light-transmitting glass 3 below the chip 26, so that the chip 26 is not easily interfered by dust and other debris during detection.

[0030] For example, the rotational power of the cleaning rod 10 can be provided by a motor (not shown in the figure). In a specific example, a connecting post 15 can be provided on the cleaning rod 10, and a driving sleeve 16 can be provided on the bottom surface of the connecting rod 4. The connecting post 15 is sleeved in the driving sleeve 16, and a spline structure is also adapted between the two. The second elastic member 11 can be preferably arranged inside the driving sleeve 16. The motor can be arranged on the connecting rod 4, and its output rod is attached to the driving sleeve 16. It can be understood that at this time, the driving sleeve 16 constitutes the driving shaft of the cleaning rod 10, and the rotation of the driving sleeve 16 will be transmitted to the connecting post 15 through the spline structure, finally realizing the rotational drive of the cleaning rod 10.

[0031] Preferably, a photoelectric or camera sensor (not shown in the figure) can be provided on the base 1. By sensing the pressing of the sensor induction chip 26 into the receiving port 8 by the sensor, the motor is then synchronously controlled to rotate, and the cleaning rod 10 can complete the cleaning of the light-transmitting glass 3 area below the chip 26. The motor is particularly preferably driven to rotate the cleaning rod 10 in a full-circle rotation manner, so that the cleaning rod 10 can maintain its initial posture away from the receiving port 8 when the cleaning action stops. For example, it can coincide with the connecting rod 4 vertically, thereby ensuring that the cleaning rod 10 is not easily stuck between the chip 26 and the light-transmitting glass 3.

[0032] Such as Figure 1 、 Figure 2 、 Figure 4 As shown, in a preferred example, the length of the cleaning rod 10 is adapted to meet the following situation: When the first elastic member 6 is in a natural state, the rotation of the cleaning rod 10 can make its end cross the virtual center of several clamping blocks 5.

[0033] It can be understood that after several cleaning rods 10 have all completed rotational cleaning, the cleaning areas of several cleaning rods 10 will overlap, and it is not easy to have a cleaning blind area, ensuring the dust removal effect of the light-transmitting glass 3.

[0034] In other embodiments, the connecting rod 4 can be preferably constructed as a hollow structure, and a driving rod 17 is also provided in the sliding cavity of the connecting rod 4. The driving rod 17 extends into the inner cavity of the connecting rod 4. In addition, the driving shaft of the cleaning rod 10 also extends into the inner cavity of the connecting rod 4, and a gear 18 is provided on the driving shaft of the cleaning rod 10. A rack portion 19 is provided on the side wall of the driving rod 17. During the process of pressing the chip 26 into the receiving port 8, as the connecting rod 4 slides outward (i.e., the connecting rod 4 further slides into its sliding cavity), the driving rod 17 and the connecting rod 4 will move relatively. At this time, the rack portion 19 will engage with the gear 18, thereby driving the driving shaft of the cleaning rod 10 to rotate and realizing the rotational drive of the cleaning rod 10.

[0035] In addition, a torsion spring (not shown in the figure) may be connected to the drive shaft of the cleaning rod 10. As the relative movement between the drive rod 17 and the connecting rod 4 continues, the rack portion 19 will be displaced from the gear 18. At this time, no matter where the cleaning rod 10 is rotated to, under the action of the torsion spring, the cleaning rod 10 will remain in the initial posture away from the receiving port 8.

[0036] For example, it is preferably adapted that under the cooperation of the rack portion 19 and the gear 18, the cleaning rod 10 rotates nearly a full circle, and then under the action of the torsion spring, the cleaning rod 10 can rotate in the reverse direction to complete another cleaning stroke.

[0037] In a preferred example, a plurality of rack portions 19 are arranged along the axial direction of the drive rod 17. And from the circumferential view, the rack portion 19 on the rear drive rod 17 is closer to its respective gear 18 than the rack portion 19 on the front drive rod 17. It can be imagined that although as the chip 26 is pressed into the receiving port 8, the corresponding drive rod 17 and the connecting rod 4 will have the same relative movement stroke, but because the axial positions of the corresponding rack portions 19 on the drive rod 17 are different, so along the circumference, a plurality of cleaning rods 10 will rotate and clean in sequence, and it is not easy to occur the situation that a plurality of cleaning rods 10 collide and interfere with each other.

[0038] Figure 4 The cleaning positions of different cleaning rods 10 are shown. It can be seen that under the same moving distance of the clamping block 5, the circumferential rotation angles of different cleaning rods 10 are different, so it is not easy to collide with each other.

[0039] As Figure 1 、 Figure 2 shown, a connection port 20 may preferably be formed on the first inclined surface 7, and a jet nozzle 21 opposite to the connection port 20 is slidably fitted in the clamping block 5. The drive rod 17 is preferably adapted to extend into the clamping block 5, and a second inclined surface 22 is provided at the end of the drive rod 17, and a third inclined surface 23 is provided at the end of the jet nozzle 21 facing away from the connection port 20. The second inclined surface 22 and the third inclined surface 23 have matching slopes. In addition, a gas source such as an air pump may preferably be connected to the jet nozzle 21. And through the cooperation of the second inclined surface 22 and the third inclined surface 23, the present disclosure may have the following use process: Insert the chip 26 to be detected into the receiving port 8. A number of clamping blocks 5 open up relative to each other, and the chip 26 to be detected gradually has a tendency to be clamped between the clamping blocks 5. During this period, the connecting rod 4 will further slide into its sliding cavity, and the driving rod 17 will move relative to the connecting rod 4. At this time, through the meshing of the rack portion 19 and the gear 18, the cleaning rod 10 will continuously rotate and clean. At the same time, the driving rod 17 will push the air nozzle 21 to slide from the top to the bottom, so that the air nozzle 21 can always follow the bottom surface of the chip 26 and descend synchronously. The airflow ejected from the air nozzle 21 will blow off the dust adhering to the bottom surface of the chip 26, and the cleaning rod 10 can just sweep out the fallen dust.

[0040] Through the above process, after the chip 26 is clamped, the bottom surface of the chip 26 and the top surface of the light-transmitting glass 3 are not likely to adhere to dust, making subsequent detection less likely to be interfered with.

[0041] In a specific example, the air source can preferably be an airbag (not shown in the figure) provided in the clamping block 5. As the driving rod 17 moves relatively, it will squeeze the airbag. Subsequently, the gas in the airbag can be ejected from the air nozzle 21 through a pipeline. In addition, a pressure sensor (not shown in the figure) can be provided on the clamping surface of the clamping block 5 to monitor the proper insertion of the chip 26, and then, for example, the magnetic adsorption device 13 as described above can be controlled to brake, so that the light-transmitting glass 3 fits against the clamping block 5, because the relative movement of the clamping block 5 has stopped at this time.

[0042] The above definitions of top, bottom, upper, and lower do not limit the absolute positional relationship. Especially for micro-light microscope detection, it is divided into front detection and back detection according to the characteristics of the chip. Therefore, the top, bottom, upper, and lower in this disclosure can be inverted.

[0043] In addition, the transmission principle of the first inclined surface, the second inclined surface, and the third inclined surface is the wedge block transmission principle in the prior art. The specific slope adaptation and selection of the three are well-known to those skilled in the art. The Figures 1 - 3 figure only schematically shows the setting positions of the three, and does not represent the actual slope and adaptation method. A return spring (not shown in the figure) can also be connected to the air nozzle 21 to restore the air nozzle 21 to its initial position at the top after the clamping block 5 returns to its original position.

[0044] The above are only the preferred embodiments of the present invention. It should be understood that the present invention is not limited to the form disclosed herein, and should not be regarded as excluding other embodiments. Instead, it can be used in various other combinations, modifications, and environments, and can be changed within the scope of the concept described herein through the above teachings or the technology or knowledge in related fields. Any changes and modifications made by those skilled in the art without departing from the spirit and scope of the present invention shall fall within the protection scope of the appended claims of the present invention.

Claims

1. A chip fixing device for a low-light microscope, comprising a base (1), an opening (2) is constructed on the base (1), a light-transmitting glass (3) is arranged at the bottom of the opening (2), and the characteristics are as follows: A plurality of connecting rods (4) are circumferentially arranged on the inner wall of the opening (2). Clamping blocks (5) are arranged at the ends of the connecting rods (4). A first elastic member (6) is also connected to the connecting rods (4). The first elastic member (6) is used to push the connecting rods (4) to move towards the center side of the opening (2). A first inclined surface (7) is arranged on the side wall of the clamping block (5). A plurality of the first inclined surfaces (7) cooperate to form a receiving port (8) with a gradually increasing diameter from bottom to top.

2. The chip fixing device for a low-light microscope according to claim 1, characterized in that: The light-transmitting glass (3) is movably arranged vertically. A driving mechanism (9) for driving the movement of the light-transmitting glass (3) is also arranged on the base (1).

3. The chip fixing device for a low-light microscope according to claim 2, characterized in that: A cleaning rod (10) is rotatably arranged on the bottom surface of the connecting rod (4). A second elastic member (11) is also connected to the cleaning rod (10). The second elastic member (11) is used to push the cleaning rod (10) to abut against the light-transmitting glass (3). When the driving mechanism (9) drives the light-transmitting glass (3) to move away from the side of the clamping block (5), the cleaning rod (10) is pushed to the cleaning position. At this time, the cleaning rod (10) is driven to rotate and can sweep through between the clamping block (5) and the light-transmitting glass (3).

4. The chip fixing device for a low-light microscope according to claim 2 or 3, characterized in that: A third elastic member (12) is connected between the light-transmitting glass (3) and the base (1). The driving mechanism (9) includes a magnetic adsorption device (13). A magnetic block (14) is arranged on the light-transmitting glass (3). The magnetic adsorption device (13) can attract or release the magnetic block (14).

5. The chip fixing device for a low-light microscope according to claim 3, characterized in that: The length of the cleaning rod (10) is adapted such that: When the first elastic member (6) is in a natural state, the rotation of the cleaning rod (10) can make its end cross the virtual center of a plurality of the clamping blocks (5).

6. The chip fixing device for a low-light microscope according to claim 3, characterized in that: A motor for driving the rotation of the cleaning rod (10) is arranged on the connecting rod (4).

7. The chip fixing device for a low-light microscope according to claim 3 or 6, characterized in that: A connecting column (15) is arranged on the cleaning rod (10). A driving sleeve (16) is arranged on the bottom surface of the connecting rod (4). The connecting column (15) is sleeved on the driving sleeve (16). A spline structure is adapted between the connecting column (15) and the driving sleeve (16).

8. The chip fixing device for a low-light microscope according to claim 3, characterized in that: The connecting rod (4) is of a hollow structure. A driving rod (17) is arranged in the sliding cavity of the connecting rod (4). The driving rod (17) extends into the inner cavity of the connecting rod (4). The driving shaft of the cleaning rod (10) extends into the inner cavity of the connecting rod (4). A gear (18) is also arranged on the driving shaft of the cleaning rod (10). A rack portion (19) is arranged on the side wall of the driving rod (17). As the connecting rod (4) slides outwards, the driving rod (17) and the connecting rod (4) move relatively, thereby driving the rack portion (19) to mesh with the gear (18). A torsion spring is also connected to the driving shaft of the cleaning rod (10). The torsion spring is used to maintain the initial posture of the cleaning rod (10) away from the receiving port (8).

9. The chip fixing device for a low-light microscope according to claim 8 is characterized in that: in In the circumferential direction, the rack portion (19) on the drive rod (17) at the rear end is closer to its respective gear (18) than the corresponding rack portion (19) on the drive rod (17) at the front end.

10. The chip fixing device for a low-light microscope according to claim 8 or 9, characterized in that: A connection port (20) is formed on the first inclined surface (7). A jet nozzle (21) is slidably fitted in the clamping block (5). The jet nozzle (21) faces the connection port (20). The drive rod (17) extends into the clamping block (5), and a second inclined surface (22) is provided at the end of the drive rod (17). A third inclined surface (23) is provided at the end of the jet nozzle (21) facing away from the connection port (20). The third inclined surface (23) is adapted to the second inclined surface (22). With the relative movement of the drive rod (17) and the connecting rod (4), the drive rod (17) pushes the jet nozzle (21) to slide from top to bottom under the cooperation of the third inclined surface (23) and the second inclined surface (22). A gas source is connected to the jet nozzle (21), and a return spring is also connected to the jet nozzle (21).

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