Micro-nano structure processing and detection integrated device for micro-spherical surface and centering method

Abstract

The invention discloses a micro-nano structure machining and detecting integrated device for a micro-spherical surface and a centering method. The device comprises an AFM, a high-precision air floating main shaft, a centering mechanism, an XZ-direction two-dimensional manual displacement table and a Y-direction one-dimensional manual displacement table, and the centering mechanism comprises a clamp, a clamp adapter and an XY-direction two-dimensional manual displacement table; the clamp is fixed on the clamp adapter; the clamp adapter is fixed on the XY-direction two-dimensional manual displacement table; the XY-direction two-dimensional manual displacement table is fixed on the rotary table; the rotary table is fixed on the Y-direction one-dimensional manual displacement table; and the AFM is fixed on the XZ-direction two-dimensional manual displacement table. According to the invention, the AFM is combined with the high-precision air floating main shaft and other devices, so that the integration of processing and detection on the surface of the microsphere is realized, and high-precision aligning is realized. The center adjusting operation is simple, machining and detection of the spherical surface can be achieved, the machined structure is stable, the consistency is good, mass copying can be achieved, the detection performance is stable, and the data repeatability is high.

Description

Technical Field

[0001] The present invention belongs to the field of micro-nano structure processing and detection, and relates to a micro-nano structure processing and detection device for a micro-spherical surface and a centering method using the device. Background Art

[0002] As an instrument for characterizing the morphology and properties of a sample, the Atomic Force Microscope (AFM) has the advantages of high resolution and diverse working environments. The atomic force microscope uses a micro-cantilever to sense the atomic-level force between the probe tip and the sample under test, and maintains the constancy of the force during the scanning process by controlling the expansion and contraction of the piezoelectric ceramic, and realizes the real-time detection of the sample morphology according to the expansion and contraction amount of the piezoelectric ceramic. When the acting force increases to cause plastic deformation or even material removal of the sample, nano-mechanical processing similar to traditional mechanical processing can also be realized.

[0003] To measure the complete morphological state of a spherical surface, in theory, every point on the spherical surface should be measured. However, due to the special spatial structure of the spherical surface, this is very difficult to achieve in measurement practice. There are two methods for approximate substitution: one method is to measure a part of the spherical surface, and use the local surface information to replace the entire spherical surface state to evaluate some local characteristic indexes of the measured surface (such as surface roughness, etc.). Instruments with high precision but small measurement ranges such as AFM can achieve this type of measurement; another method is to measure several circumferential trace lines of the spherical surface in a certain way, and use these circumferential trace lines to characterize the overall information of the spherical surface. For example, a roundness instrument is used to measure the roundness, sphericity error, etc. of the sphere. AFM has become the first choice for sensors for measuring the surface morphology of micro-spheres due to its high precision and small measurement contact force. In addition, a precision rotary shaft system and an auxiliary indexing and rotating shaft system are required to realize the measurement of complete circumferential trace lines in any direction on the micro-sphere surface.

[0004] When processing and detecting on the micro-sphere surface, it is crucial to adjust the center of the micro-sphere so that the center of the sphere can be aligned with the rotation center of the high-precision air-bearing rotary shaft. If the eccentricity exceeds the expansion and contraction range of the piezoelectric ceramic, the effect of micro-sphere detection and processing will be seriously affected at this time, and even the probe and the sample will be damaged. Summary of the Invention

[0005] The present invention provides an integrated device for micro-nano structure processing and detection for a micro-spherical surface and a centering method, which can perform processing and detection on the micro-spherical surface and adjust the eccentricity between the micro-sphere and the turntable, and can also efficiently realize the centering of the micro-sphere center and the rotation center of the high-precision air-bearing rotary shaft.

[0006] The object of the present invention is achieved by the following technical solutions:

[0007] A micro-nano structure processing and detection integrated device for a micro-sphere surface, comprising an AFM, a high-precision air-bearing spindle, an alignment mechanism, a two-dimensional XZ manual displacement stage, and a one-dimensional Y manual displacement stage, wherein:

[0008] The alignment mechanism includes a fixture, a fixture adapter seat, and a two-dimensional XY manual displacement stage;

[0009] The fixture is fixed on the fixture adapter seat;

[0010] The fixture adapter seat is fixed on the two-dimensional XY manual displacement stage;

[0011] The two-dimensional XY manual displacement stage is fixed on a turntable;

[0012] The turntable is fixed on the one-dimensional Y manual displacement stage;

[0013] The AFM is fixed on the two-dimensional XZ manual displacement stage;

[0014] The AFM includes a force control head, a camera, a lens, a Z-axis electric displacement stage, a three-dimensional XYZ piezoelectric nano-positioning stage, and a three-dimensional XYZ manual displacement stage;

[0015] The force control head is fixed on the three-dimensional XYZ piezoelectric nano-positioning stage;

[0016] The camera and the lens are fixed on the three-dimensional XYZ manual displacement stage;

[0017] The three-dimensional XYZ piezoelectric nano-positioning stage and the three-dimensional XYZ manual displacement stage are fixed on the Z-axis electric displacement stage;

[0018] The Z-axis electric displacement stage is connected to a right-angle adapter plate, and the right-angle adapter plate is fixed on an optical platform;

[0019] The force control head includes a first convex lens, a second convex lens, a reflector, a laser, a laser position sensor, a probe holder, a probe, a spring, and a pressing piece;

[0020] The elastic force of the spring acts on the pressing piece, and the pressing piece presses the probe and clamps it on the probe holder;

[0021] The laser emitted by the laser passes through the first convex lens and converges on the probe cantilever, is reflected by the probe cantilever to the reflector, and the reflector reflects the laser through the second convex lens and irradiates it on the laser position sensor.

[0022] A method for aligning a micro-sphere using the above micro-sphere micro-nano structure processing and detection integrated device, the method comprising the following steps:

[0023] Use AFM centering. Touch the probe to the microsphere at the 0° and 180° positions respectively. Calculate the distance between the two contact positions using the displacements of the piezoelectric ceramic position and the Z-direction electric displacement stage, and calculate the eccentric position for centering. After centering in two perpendicular directions, the eccentricity adjustment of the microsphere can be achieved.

[0024] A method for detecting the circumferential trace of a microsphere using the above-mentioned integrated microsphere surface micro-nano structure processing and detection device, comprising the following steps:

[0025] (1) Fix the target sphere to the fixture and perform centering;

[0026] (2) Move the probe to the position where it touches the microsphere. After controlling the electric displacement stage to move the probe to a position close to the microsphere, run the automatic needle lowering. The probe will automatically start approaching until it touches the spherical surface;

[0027] (3) Set the rotation speed of the turntable, control the turntable to rotate one week. The AFM closed-loop controls the contact force between the probe and the microsphere surface to be constant. Continuously record the Z-axis position coordinates of the piezoelectric ceramic displacement stage during the rotation of the microsphere to obtain the circumferential trace profile of the spherical surface.

[0028] A method for processing the microsphere surface micro-nano structure using the above-mentioned integrated microsphere surface micro-nano structure processing and detection device, comprising the following steps:

[0029] (1) Place the target sphere on the fixture and perform centering;

[0030] (2) Move the probe to the position where it touches the microsphere. After controlling the electric displacement stage to move the probe to a position close to the microsphere, run the automatic needle lowering. The probe will automatically start approaching until it touches the spherical surface;

[0031] (3) Replace the probe with a diamond-coated AFM probe; Apply a normal load to the AFM tip, and realize the processing of the nano-structure through the relative movement between the AFM tip and the microsphere surface;

[0032] (4) After processing one cavity, control the spindle to rotate to the next processing position.

[0033] A method for detecting the local topography of the microsphere surface using the above-mentioned integrated microsphere surface micro-nano structure processing and detection device, comprising the following steps:

[0034] (1) Fix the target sphere to the fixture and perform centering;

[0035] (2) Move the probe to the position where it touches the microsphere. After controlling the electric displacement stage to move the probe to a position close to the microsphere, run the automatic needle lowering. The probe will automatically start approaching until it touches the spherical surface;

[0036] (3) Run the automatic needle lifting to make the probe 50 - 100 microns away from the surface, and find the position to be detected under the lens;

[0037] (4) Run the automatic needle insertion, and the probe will automatically start approaching until it touches the spherical surface;

[0038] (5) Set the detection range and scanning frequency;

[0039] (6) Start the detection. During the detection process, the XY axes perform a zigzag scan, and the closed-loop control keeps the contact force between the probe and the sample surface constant. Continuously record the position coordinates of the piezoelectric ceramics on the XYZ axes to obtain the sample topography.

[0040] Compared with the prior art, the present invention has the following advantages:

[0041] 1. The present invention combines AFM with devices such as a high-precision air-bearing spindle to achieve the integration of processing and detection on the surface of the microsphere and achieve high-precision alignment.

[0042] 2. The alignment operation of the present invention is simple, capable of realizing the processing and detection of the spherical surface. The processed structure is stable, has good consistency and can be mass-produced. The detection performance is stable, and the data has high repeatability. Description of the Drawings

[0043] Figure 1 It is the front view of the AFM.

[0044] Figure 2 It is the left view of the AFM.

[0045] Figure 3 It is the physical diagram of the integrated device for processing and detecting the micro-nano structure on the microsphere surface.

[0046] Figure 4 It is the front view of the 3D model of the integrated device for processing and detecting the micro-nano structure on the microsphere surface.

[0047] Figure 5 It is the right view of the 3D model of the integrated device for processing and detecting the micro-nano structure on the microsphere surface.

[0048] Figure 6 It is the closed-loop control of the force between the probe and the sample.

[0049] Figure 7 It is the 3D model diagram of the force control head.

[0050] Figure 8 It is the operation interface of the alignment software;

[0051] Figure 9 It is the flowchart of the alignment probe descending;

[0052] Figure 10 It is a microsphere with a diameter of 1575 μm;

[0053] Figure 11 It is the circumferential trace of continuous multiple measurements at the same position of the microsphere;

[0054] Figure 12 Photos taken by the processed lens, (a) square cavity (length 10 μm), (b) circular cavity (diameter 20 μm), (c) triangular cavity (base 20 μm), (d) nanowire groove (length 30 μm);

[0055] Figure 13 For local detection of the XY-axis movement trajectory;

[0056] Figure 14 Image detected by the present invention, (a) square cavity (length 10 μm), (b) circular cavity (diameter 20 μm), (c) triangular cavity (base 20 μm);

[0057] Figure 15 3D image plotted from the detection data, (a) square cavity (length 10 μm), (b) circular cavity (diameter 20 μm), (c) triangular cavity (base 20 μm).

[0058] In the figure, 1 - lens, 2 - three-dimensional manual displacement stage in the XYZ directions, 3 - three-dimensional piezoelectric nano-positioning stage in the XYZ directions, 4 - force control head, 5 - two-dimensional manual displacement stage in the XY directions, 6 - electric displacement stage in the Z direction, 7 - AFM, 8 - microsphere, 9 - centering mechanism, 10 - high-precision air-bearing spindle, 11 - cylindrical ball fixture, 12 - ER collet, 13 - ER nut, 14 - ball fixture adapter, 15 - two-dimensional manual displacement stage in the XZ directions, 16 - one-dimensional manual displacement stage in the Y direction, 17 - first convex lens, 18 - second convex lens, 19 - mirror adjusting bracket, 20 - mirror, 21 - laser optical path, 22 - laser adjusting bracket, 23 - laser fixing seat, 24 - laser, 25 - convex lens fixing seat, 26 - laser position sensor, 27 - probe clamp, 28 - probe, 29 - spring, 30 - pressing piece. Specific embodiments

[0059] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings, but are not limited thereto. Any modification or equivalent replacement of the technical solutions of the present invention, without departing from the spirit and scope of the technical solutions of the present invention, shall be covered by the protection scope of the present invention.

[0060] Example 1:

[0061] This example provides an integrated device for processing and detecting micro-spherical micro-nano structures, as Figures 3 - 5As shown, the device includes an AFM 7, a high-precision air-bearing spindle 10, a centering mechanism 9, an XZ two-dimensional manual displacement stage 15, a Y one-dimensional manual displacement stage 16, etc. The centering mechanism 9 includes a cylindrical ball fixture 11, an ER collet 12, a nut 13, a ball fixture adapter 14, and an XY two-dimensional manual displacement stage 5. The microsphere 8 is fixed on the cylindrical ball fixture 11. The ER collet 12 and the ER nut 13 fix the cylindrical ball fixture 11 on the ball fixture adapter 14. The ball fixture adapter 14 is fixed on the XY two-dimensional manual displacement stage 5 by screws. The XY two-dimensional manual displacement stage 5 is fixed on the turntable. Rotating the knob of the XY two-dimensional manual displacement stage 5 can adjust the relative position between the microsphere center and the high-precision air-bearing spindle 10 of the turntable. The turntable is fixed on the Y one-dimensional manual displacement stage 16, and the AFM 7 is fixed on the XZ two-dimensional manual displacement stage 15. The XZ two-dimensional manual displacement stage 15 and the Y one-dimensional manual displacement stage 16 work together to adjust the relative position between the probe and the microsphere.

[0062] As Figures 1 - 2 shown, the AFM 7 includes a force control head 4, a camera, a lens 1, a Z-axis electric displacement stage 6, an XYZ three-dimensional piezoelectric nano-positioning stage 3, an XYZ three-dimensional manual displacement stage 2, etc. Among them: The force control head 4 is integrally fixed on the XYZ three-dimensional piezoelectric nano-positioning stage 3; the camera and the lens 1 are fixed on the XYZ three-dimensional manual displacement stage 2 for adjusting the lens field of view; the XYZ three-dimensional piezoelectric nano-positioning stage 3 and the XYZ three-dimensional manual displacement stage 2 are respectively fixed on the Z-axis electric displacement stage 6 through adapter plates. The Z-axis electric displacement stage 6 is connected to a right-angle adapter plate, and the right-angle adapter plate is fixed on the optical platform. During operation, the sample is placed under the probe, that is, on the XY two-dimensional manual displacement stage 5. Rotate the knob of the XY two-dimensional manual displacement stage 5 to adjust the processing or detection position.

[0063] As Figure 7As shown in the figure, the force control head 4 includes a first convex lens 17, a second convex lens 18, a mirror adjustment bracket 19, a mirror 20, a laser adjustment bracket 22, a laser fixing base 23, a laser 24, a convex lens fixing base 25, a laser position sensor 26, a probe clamp 27, a probe 28, a spring 29, and a pressing piece 30. The probe 28 is clamped by the probe clamp 27. The elastic force of the spring 29 acts on the pressing piece 30, and the pressing piece 30 presses the probe 28 and is clamped on the probe clamp 27. The laser 24 is fixed on the laser adjustment bracket 22 using screws and the laser fixing base 23. The first convex lens 17 is fixed in front of the laser 24 using screws and the convex lens fixing base 25. The convex lens fixing base 25 and the laser fixing base 23 are connected with a fine thread. Rotating the convex lens fixing base 25 can adjust the distance between the first convex lens 17 and the probe 28, and the convex lens fixing base 25 can be fixed using screws. The mirror 20 is fixed on the mirror adjustment bracket 19 using glue. The incident optical path and the reflected optical path can be adjusted by adjusting the knobs of the laser adjustment bracket 22 and the mirror adjustment bracket 19. The laser passes through the first convex lens 17 and converges on the probe cantilever, is reflected by the probe cantilever to the mirror 20, and the mirror reflects the laser to pass through the second convex lens 18 and finally irradiates on the laser position sensor 26 (PSD).

[0064] Embodiment 2:

[0065] This embodiment provides a method for aligning a microsphere using the microsphere alignment and processing integrated device described in Embodiment 1. The method uses AFM alignment. The probe is respectively contacted with the microsphere at the 0° and 180° positions. The distance between the two contact positions is calculated using the displacement of the piezoelectric ceramic position and the macro displacement stage, and the eccentricity position is calculated based on this for alignment. After alignment in two perpendicular directions, the eccentricity adjustment of the microsphere can be achieved. The specific implementation method is as follows:

[0066] (1) Run the supporting alignment software, Figure 8 As shown in the operation interface of the alignment software, adjust the laser spot to the center of the PSD.

[0067] (2) Move the probe to the position in contact with the microsphere. After controlling the electric displacement stage to move the probe to a position close to the microsphere, click the needle button, and the probe will automatically start approaching until it contacts the spherical surface.

[0068] (3) Click the start alignment button to enter the alignment process. The relative position of the probe will start to display numbers. At this time, the probe position is set as the relative position zero point, and the telescopic position of the piezoelectric ceramic at this time is recorded as x0 (the direction close to the ball is the positive direction). The calculation method of the relative position of the probe during the alignment process is shown in Equation (1):

[0069] r = h - a0 * t - (x - x0) (1)

[0070] Where r is the relative position of the probe during the centering process; h is the distance that the electric displacement stage moves upward; a0 is the distance that the displacement stage descends each time during the descending process; t is the number of times the displacement stage descends during the descending process; x is the telescopic position of the piezoelectric ceramic; x0 is the telescopic position of the piezoelectric ceramic when the start button is clicked.

[0071] (4) Click the up button, give a fixed number of pulse signals to the stepper motor, move upward a fixed distance, record this distance as h, the rising height can be set, and can be set according to the estimated eccentricity.

[0072] (5) Rotate the ball 180°.

[0073] (6) Click the down button, the probe will automatically descend, and the flowchart of the needle lowering is as Figure 9 shown. The Z-axis piezoelectric nano-positioning stage elongates 180 nm each time. After each elongation, it is judged whether the PSD differential signal reaches the setpoint value. If it reaches, the needle lowering ends. If it still does not reach the setpoint value after 100 cycles, the piezoelectric nano-positioning stage contracts 18 microns, and the electric slide table descends 15 microns. Cycle until the PSD differential signal reaches the setpoint value. Record the number of times t that the electric displacement stage descends during the descending process, and record the distance of each descent as a0.

[0074] (7) Click the button to calculate the adjustment position, and calculate the position to be adjusted according to the probe position coordinates before and after the rise.

[0075] (8) Click the needle lifting button to prevent hitting the probe when adjusting the manual displacement stage.

[0076] (9) Adjust the manual displacement stage according to the distance to be adjusted shown by the software.

[0077] (10) Repeat the above operations (2)-(9) until the eccentricity position is calculated within 3 μm. At this time, the fine adjustment in one direction is completed.

[0078] (11) Rotate the turntable 90° and repeat the above operations (2)-(10) to perform fine adjustment perpendicular to the previous direction. After the fine adjustments in two perpendicular directions are completed, the entire centering operation is completed.

[0079] Example 3:

[0080] This embodiment provides a method for detecting the circumferential trace of a microsphere by using the microsphere micro-nano structure processing and detection integrated device described in Embodiment 1. The method can detect the circumferential trace of the microsphere. For the circumferential trace detection, the AFM probe is brought into contact with the microsphere after centering is completed, the microsphere is rotated, and the position information of the AFM piezoelectric ceramic is continuously recorded, and the circumferential trace can be obtained. The specific implementation method is as follows:

[0081] (1) Fix the target ball to the fixture with glue and perform centering.

[0082] (2) Move the probe to the position in contact with the microsphere. After controlling the electric displacement stage to move the probe to a position close to the microsphere, run the automatic needle lowering, and the probe will automatically start approaching until it contacts the spherical surface.

[0083] (3) Set the rotation speed of the turntable and control the turntable to rotate one week. The AFM closed-loop control keeps the contact force between the AFM probe and the microsphere surface constant. During the rotation of the microsphere, continuously record the Z-axis position coordinates of the piezoelectric ceramic displacement stage to obtain the circumferential trace profile of the spherical surface.

[0084] In this embodiment, a microsphere with a diameter of about 1500 μm was selected for circumferential trace detection, as Figure 10 shown. Multiple consecutive measurements were carried out at the same position of the target sphere, and the measurement results are compared as Figure 11 shown. The detection results of different times are in good agreement, indicating that the present invention can achieve circumferential trace detection and the system is stable.

[0085] Example 4:

[0086] This embodiment provides a method for processing the microsphere micro-nano structure by using the microsphere micro-nano structure processing and detection integrated device described in Example 1. The method can perform constant-force or variable-force scanning processing on the microsphere surface to obtain a three-dimensional nano structure. The core of the variable-force processing method is to control the force between the probe and the sample. Its closed-loop control system is as Figure 6 shown. The actuator of the system is the piezoelectric ceramic displacement stage (PZT), the controlled object is the deformation of the probe cantilever. When the probe tip contacts the sample, a force is generated, which causes the deformation of the probe cantilever. The laser irradiates the upper surface of the cantilever and is reflected. The deformation of the cantilever causes the change of the reflection optical path. The laser is finally irradiated to the PSD after multiple reflections. The output voltage of the PSD is related to the laser position. The output of the controlled object is fed back to the comparator through the PSD to form a closed-loop control. The present invention realizes variable-force processing by changing the setpoint value of the closed-loop system during the processing. The specific implementation is as follows:

[0087] (1) Fix the target sphere to the fixture with glue and perform centering.

[0088] (2) Move the probe to the position in contact with the microsphere. After controlling the electric displacement stage to move the probe to a position close to the microsphere, run the automatic needle lowering, and the probe will automatically start approaching until it contacts the spherical surface.

[0089] (3) Replace the probe with a diamond-coated AFM probe. Apply a normal load to the AFM tip, and realize the processing of the nano structure through the relative movement between the AFM tip and the microsphere surface. During the processing, the air spindle remains stationary.

[0090] (4) After machining a cavity, control the spindle to rotate to the next machining position.

[0091] In this embodiment, the microspheres used in machining are as Figure 10 shown. Square cavities, circular cavities, triangular cavities, and nano-grooves are machined at different positions on the surface of the microspheres. Figure 12 Shown is a photograph of the nanostructure obtained by machining, taken by the lens in the present invention.

[0092] Embodiment 5:

[0093] This embodiment provides a method for detecting the local topography of a microsphere surface using the integrated microsphere surface micro-nano structure machining and detection device described in Embodiment 1. The method can detect the local topography of the microsphere surface. The detection of the local topography of the microsphere surface is the same as that of the plane. During the detection process, the contact force between the AFM probe and the sample surface is controlled in a closed loop to be constant, and the XY axes perform a zigzag scan. During the scan process, the position coordinates of the piezoelectric ceramics on the XYZ axes are continuously recorded to obtain the sample topography. The specific implementation is as follows:

[0094] (1) Fix the target sphere to the fixture with glue and perform centering.

[0095] (2) Move the probe to the position where it contacts the microsphere. After controlling the electric displacement stage to move the probe to a position close to the microsphere, run the automatic needle lowering, and the probe will automatically start approaching until it contacts the spherical surface.

[0096] (3) Run the automatic needle lifting to make the probe 50 - 100 microns away from the surface, and find the position to be detected under the lens.

[0097] (4) Run the automatic needle lowering, and the probe will automatically start approaching until it contacts the spherical surface.

[0098] (5) Set parameters such as the detection range and scan frequency in the supporting software.

[0099] (6) Start the detection. During the detection process, the XY axes perform a zigzag scan. The running trajectory of the XY piezoelectric ceramics is as Figure 13 shown. During the detection process, the contact force between the AFM probe and the sample surface is controlled in a closed loop to be constant. During the detection process, the position coordinates of the piezoelectric ceramics on the XYZ axes are continuously recorded to obtain the sample topography.

[0100] The detection image in the supporting software in this embodiment is as Figure 14 shown. The detection data can be saved and analyzed using other software. Figure 15 is a three-dimensional image drawn using the detection data. The machining structure and the spherical curvature can be clearly seen in the three-dimensional image. The machining and detection results show that the present invention can achieve spherical machining and local detection of the spherical surface.

Claims

1. An integrated device for micro-nano structure processing and detection for a micro-sphere surface, characterized in that The device includes an AFM, a high-precision air-bearing spindle and a centering mechanism, an XZ two-dimensional manual displacement stage, and a Y one-dimensional manual displacement stage, where: The centering mechanism includes a fixture, a fixture adapter, and an XY two-dimensional manual displacement stage; The fixture is fixed on the fixture adapter; The fixture adapter is fixed on the XY two-dimensional manual displacement stage; The XY two-dimensional manual displacement stage is fixed on the turntable; The turntable is fixed on the Y one-dimensional manual displacement stage; The AFM is fixed on the XZ two-dimensional manual displacement stage.

2. The integrated device for processing and detecting micro-nano structures facing a microsphere, as claimed in claim 1, wherein The AFM includes a force control head, a camera, a lens, a Z-axis electric displacement stage, an XYZ three-dimensional piezoelectric nano-positioning stage, and an XYZ three-dimensional manual displacement stage; The force control head is fixed on the XYZ three-dimensional piezoelectric nano-positioning stage; The camera and the lens are fixed on the XYZ three-dimensional manual displacement stage; The XYZ three-dimensional piezoelectric nano-positioning stage and the XYZ three-dimensional manual displacement stage are fixed on the Z-axis electric displacement stage; The Z-axis electric displacement stage is connected to a right-angle adapter plate, and the right-angle adapter plate is fixed on the optical platform.

3. The integrated device for processing and detecting micro-nano structures facing a microsphere according to claim 2, characterized in that The force control head includes a first convex lens, a second convex lens, a reflector, a laser, a laser position sensor, a probe clamp, a probe, a spring, and a pressing piece; The elastic force of the spring acts on the pressing piece, and the pressing piece presses the probe and is clamped on the probe clamp; The laser emitted by the laser passes through the first convex lens and converges on the probe cantilever, is reflected by the probe cantilever to the reflector, and the reflector reflects the laser through the second convex lens and irradiates it on the laser position sensor.

4. A method for aligning a microsphere by using the integrated microsphere micro-nano structure processing and detection device according to any one of claims 1-3, characterized in that The method includes the following steps: Use the AFM to center. The probe is respectively contacted with the microsphere at the 0° and 180° positions. The distance between the two contact positions is calculated by using the piezoelectric ceramic position and the displacement of the Z-axis electric displacement stage, and the eccentric position is calculated for centering. After centering in two perpendicular directions, the eccentricity adjustment of the microsphere can be realized.

5. The method for aligning a microsphere by using the integrated device for microsphere processing and detection with a microsphere micro-nano structure, characterized in that The specific steps of the method are as follows: (1) Run the centering software and adjust the laser spot to the center of the PSD; (2) Move the probe to the contact position with the microsphere. After controlling the electric displacement stage to move the probe to a position close to the microsphere, click the needle button, and the probe will automatically start approaching until it contacts the spherical surface; (3) Click the start centering button to enter the centering process. The relative position of the probe will start to display numbers. At this time, the probe position is set as the relative position zero point, and the telescopic position of the piezoelectric ceramic at this time is recorded as x0. The calculation method of the relative position of the probe during the centering process is shown in Equation (1): r = h - a0*t - (x - x0) (1) In the formula, r is the relative position of the probe during the centering process; h is the distance that the electric displacement stage moves upward; a0 is the distance that the displacement stage descends each time during the descent process; t is the number of times the displacement stage descends during the descent process; x is the telescopic position of the piezoelectric ceramic; x0 is the telescopic position of the piezoelectric ceramic when the start button is clicked; (4) Click the up button, give the number of pulse signals fixed to the stepping motor, move upward a fixed distance, and record this distance as h; (5) Rotate the ball 180°; (6) Click the down button, and the probe will automatically descend. Record the number of times t that the electric displacement stage descends during the descent process, and record the distance of each descent as a0; (7) Point calculation and adjustment position button, which calculates the position to be adjusted according to the probe position coordinates before rising and after falling; (8) Point lifting needle button, which prevents the probe from hitting when adjusting the manual displacement stage; (9) Adjust the manual displacement stage according to the distance to be adjusted displayed by the software; (10) Repeat the above operations (2)-(9) until the eccentricity position is calculated within 3μm, and at this time, the fine adjustment in one direction is completed; (11) Rotate the turntable by 90° and repeat the above operations (2)-(10) to perform fine adjustment perpendicular to the previous direction. After the fine adjustment in two perpendicular directions is completed, all the centering operations are completed.

6. The method for aligning a microsphere by using the integrated device for microsphere processing and detection with a microspherical micro-nano structure according to claim 5, characterized in that The process of the automatic descent of the probe is as follows: The Z-axis piezoelectric nano-positioning stage elongates 180nm each time. After each elongation, it judges whether the PSD differential signal reaches the setpoint value. If it reaches, the needle lowering ends. If the setpoint value is still not reached after 100 cycles, the piezoelectric nano-positioning stage contracts 18μm and the electric slide table descends 15μm, and the cycle continues until the PSD differential signal reaches the setpoint value.

7. A method for detecting the circumferential trace of a microsphere by using the integrated device for processing and detecting the microsphere micro-nano structure according to any one of claims 1-3, characterized in that The method includes the following steps: (1) Fix the target ball to the fixture and perform centering; (2) Move the probe to the position in contact with the microsphere. After controlling the electric displacement stage to move the probe to a position close to the microsphere, run the automatic needle lowering, and the probe will automatically start approaching until it contacts the spherical surface; (3) Set the rotation speed of the turntable, control the turntable to rotate one week, and the AFM closed-loop controls the contact force between the probe and the microsphere surface to be constant. During the rotation of the microsphere, continuously record the Z-axis position coordinates of the piezoelectric ceramic displacement stage to obtain the spherical circumferential trace profile.

8. A method for fabricating a micro-spherical micro-nano structure by using the integrated device for fabricating and detecting the micro-spherical micro-nano structure according to any one of claims 1-3, characterized in that The method includes the following steps: (1) Fix the target ball to the fixture and perform centering; (2) Move the probe to the position in contact with the microsphere. After controlling the electric displacement stage to move the probe to a position close to the microsphere, run the automatic needle lowering, and the probe will automatically start approaching until it contacts the spherical surface; (3) Replace the probe with a diamond-coated AFM probe; Apply a normal load to the AFM tip, and realize the processing of nanostructures through the relative movement between the AFM tip and the microsphere surface; (4) After processing one cavity, control the spindle to rotate to the next processing position.

9. A method for detecting the local topography of a microsphere using the integrated microsphere micro-nano structure processing and detection device according to any one of claims 1-3, characterized in that The method includes the following steps: (1) Fix the target ball to the fixture and perform centering; (2) Move the probe to the position in contact with the microsphere. After controlling the electric displacement stage to move the probe to a position close to the microsphere, run the automatic needle lowering, and the probe will automatically start approaching until it contacts the spherical surface; (3) Run the automatic needle lifting to make the probe 50-100μm away from the surface, and find the position to be detected under the lens; (4) Run the automatic needle lowering, and the probe will automatically start approaching until it contacts the spherical surface; (5) Set the detection range and scanning frequency; (6) Start detection. During the detection process, the XY axis performs a zigzag scan, and the closed-loop controls the contact force between the probe and the sample surface to be constant, and continuously record the XYZ-axis piezoelectric ceramic position coordinates to obtain the sample morphology.

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