Multifunctional piezoelectric ceramic electrical property test cavity

Abstract

This invention discloses a multifunctional piezoelectric ceramic electrical performance testing chamber, comprising a metal top cover (1) and a metal chamber (2). The chamber (2) is characterized by: a sample stage composed of a top cover (5) and a stage (6) at its bottom; a heating wire inside the stage (6); a mechanical clamping assembly (30) for fixing the sample at its bottom; an air extraction port (24), a water inlet (22), a water outlet (23), and a wiring port on the circumferential side of the metal chamber (2); a silicon dioxide disc (3) at the top of the metal top cover (1); and the wiring port electrically connected to the mechanical clamping assembly (30) and the heating wire, respectively. This invention can change the clamping force on the sample, the temperature around the sample, and the air pressure environment inside the chamber, thus simulating the requirements for testing the electrical performance of piezoelectric ceramics under various testing environments, facilitating a better assessment of the stability and applicability of piezoelectric ceramics.

Description

Technical Field

[0001] This invention relates to the field of testing equipment for the electrical properties of piezoelectric materials, and more specifically to a multifunctional testing chamber for the electrical properties of piezoelectric ceramics. Background Technology

[0002] With the continuous development of piezoelectric materials and their theories, various measuring devices for measuring the performance of piezoelectric ceramics have been developed. However, most current test chambers can only be used to test under a single environmental condition. Measurement equipment for various complex environments has not yet been fully developed. Meanwhile, backgrounds with varying force, air pressure, and temperature can be used to detect how the electrical properties of piezoelectric ceramics change with the environment, simulating real working conditions and determining the stability and applicability of piezoelectric ceramics.

[0003] Common electrical performance testing equipment fixtures cannot precisely control the clamping force, which has a significant impact on the test results of piezoelectric ceramics. Consequently, existing testing platforms require lengthy calibration periods for each test. Common variable-temperature testing systems can only perform heating for high-temperature electrical testing, relying solely on natural cooling, resulting in low testing efficiency. Furthermore, they can only conduct tests in air, failing to simulate a vacuum testing environment, and are prone to oxidation of the high-temperature chamber and fixtures. Summary of the Invention

[0004] The purpose of this invention is to provide a multifunctional testing chamber for the electrical properties of piezoelectric ceramics. This invention can modify the clamping force on the sample, the ambient temperature, and the internal gas pressure environment to simulate the electrical performance testing of piezoelectric ceramics under various testing conditions, thus facilitating a better assessment of the stability and applicability of piezoelectric ceramics.

[0005] The technical solution of the present invention is as follows: A multifunctional piezoelectric ceramic electrical performance testing chamber includes a metal top cover and a metal chamber. The bottom of the metal chamber is provided with a sample stage composed of the top cover and a carrier. A heating wire is built into the carrier. The bottom of the metal chamber is provided with a mechanical clamping assembly for fixing the sample. The circumferential side of the metal chamber is provided with an air extraction port, a water inlet, a water outlet, and a wiring port. A silicon dioxide disc is provided at the top of the metal top cover. The wiring port is electrically connected to the mechanical clamping assembly and the heating wire, respectively.

[0006] In the aforementioned multifunctional piezoelectric ceramic electrical performance testing chamber, the upper end of the metal chamber is connected to the metal cover via a threaded structure, and a rubber gasket is provided at the upper end of the metal chamber.

[0007] In the aforementioned multifunctional piezoelectric ceramic electrical performance testing chamber, the mechanical clamping assembly includes a clamp fixing rod disposed on a partition, an upper clamp connected to the clamp fixing rod via a bolt assembly, and a lower clamp for placing samples on the upper cover; the upper clamp is provided with a clamping force adjustment assembly, and the upper clamp and the lower clamp are connected to a wiring port via wires.

[0008] In the aforementioned multifunctional piezoelectric ceramic electrical performance testing chamber, the upper end of the clamp fixing rod is provided with an alumina screw, the upper end of the alumina screw is fitted with an insulator located on the upper and lower sides of the upper clamp, and the upper end of the alumina screw is provided with an alumina nut.

[0009] In the aforementioned multifunctional piezoelectric ceramic electrical performance testing chamber, the clamping force adjustment assembly includes a fixed column passing through the upper clamp, an adjusting nut at the upper end of the fixed column, and a spring between the upper clamp and the lower part of the fixed column.

[0010] In the aforementioned multifunctional piezoelectric ceramic electrical performance testing chamber, the metal cover is a metal cover with an attached ring handle.

[0011] In the aforementioned multifunctional piezoelectric ceramic electrical performance testing chamber, the wiring port includes a wire passage located on the side of the metal chamber, and wiring terminals provided inside the wire passage, which are electrically connected to the upper clamp, the lower clamp, and the heating wire, respectively.

[0012] In the aforementioned multifunctional piezoelectric ceramic electrical performance testing chamber, a partition is provided inside the metal chamber, the air extraction port is located above the partition, and the water inlet and outlet are located below the partition.

[0013] In the aforementioned multifunctional piezoelectric ceramic electrical performance testing chamber, both the top cover and the stage are made of alumina ceramic.

[0014] Compared with the prior art, the present invention has the following advantages:

[0015] 1. In this invention, the sample to be tested is placed on the sample stage and fixed by a mechanical clamping assembly. The wiring port is energized, and the clamping force of the upper clamp on the sample can be adjusted by the mechanical clamping assembly. The stage has a built-in heating wire, which heats the sample. The inlet and outlet of the metal cavity on both sides allow the cooling liquid to enter and exit, achieving cooling inside the cavity and enabling rapid changes in the temperature environment inside the cavity, thus improving detection efficiency. The evacuation port of the metal cavity can be used to create a vacuum environment inside the metal cavity. At high temperatures, the metal cavity and clamps are prone to oxidation. To eliminate the interference of this factor, the metal cavity is evacuated to a vacuum environment. This invention can change the clamping force on the sample, the temperature around the sample, and the air pressure environment inside the cavity, so as to meet the needs of testing the electrical performance of piezoelectric ceramics under various test environments, which is conducive to better judging the stability and applicable range of piezoelectric ceramics.

[0016] 2. The upper end of the metal cavity is connected to the metal cover via a threaded structure, and a rubber gasket is provided at the upper end of the metal cavity. This structure facilitates connection, and the rubber gasket can improve the sealing performance of the cavity.

[0017] 3. When in use, the clamping force adjustment component can be adjusted by rotating the adjusting nut to cause the fixed column to move up and down, thereby adjusting the clamping force of the upper clamping end on the sample. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the present invention;

[0019] Figure 2 This is a schematic diagram of the mechanical clamping assembly.

[0020] The markings in the attached diagram are as follows: 1-Metal top cover, 2-Metal cavity, 3-Silica disc, 4-Rubber gasket, 5-Top cover, 6-Platform, 7-Upper clamp, 8-Lower clamp, 9-Piezoelectric sample, 20-Terminal, 21-Wire passage, 22-Water inlet, 23-Water outlet, 24-Air extraction port, 25-Baffle, 26-Cooling pipe, 70-Fixing post, 71-Spring, 72-Adjusting nut, 73-Clamp fixing rod, 74-Alumina screw, 75-Insulator, 76-Alumina nut, 30-Mechanical clamping assembly, 31-Clamping force adjusting assembly. Detailed Implementation

[0021] The present invention will be further described below with reference to the accompanying drawings and embodiments, but this should not be construed as limiting the present invention.

[0022] Example: A multifunctional piezoelectric ceramic electrical performance testing chamber, comprising a metal cover 1 and a metal cavity 2, as shown in the attached figure. Figure 1As shown, the upper end of the metal cavity 2 is connected to the metal cover 1 via a threaded structure, and a rubber gasket 4 is provided at the upper end of the metal cavity 2. This structure facilitates connection, and the rubber gasket improves the sealing performance of the cavity. The metal cover 1 is a metal cover 1 with a ring handle for easy handling. A partition 25 is installed at the bottom of the metal cavity 2, and a sample stage consisting of a cover 5 and a platform 6 is fixed on the partition 25. Both the cover 5 and the platform 6 are made of alumina ceramic. The piezoelectric sample 9 is placed on the sample stage, and a heating wire is built into the platform 6. A mechanical clamping assembly 30 for fixing the sample is provided at the bottom of the metal cavity 2. An air extraction port 24, a water inlet 22, a water outlet 23, and a wiring port are provided on the circumferential side of the metal cavity 2. The wiring port is electrically connected to the mechanical clamping assembly 30 and the heating wire, respectively. The wiring port includes a wire passage 2 located on the side of the metal cavity 2. 1. The wires pass through the terminals 20 provided inside the port 21, and the terminals 20 are electrically connected to the upper clamp 7, the lower clamp 8, and the heating wire, respectively. In this embodiment, the wiring port is connected to the temperature control system, which includes a cooling system, a resistance wire heating system, and a temperature sensor. The heating system includes a heating wire, terminals, wires, a DC power supply, a temperature controller, and a solid-state relay. The temperature controller connects a thermocouple to the solid-state relay. The thermocouple is in contact with the piezoelectric sample. The DC power supply is connected to the heating wire through the terminals. The heating wire is placed inside the stage 6 to achieve temperature rise within the cavity. The cooling system includes a water pump and a water tank connected to the water inlet. A cooling pipe 26 is provided at the water inlet 22, and the water pump is connected to the water tank through the pipe. This achieves temperature drop within the cavity.

[0023] In this embodiment, the air extraction port 24 is connected to the air pressure control device, which includes a vacuum pump and an air pipe. The vacuum pump extracts air from the inside of the multifunctional cavity through the air extraction port 24 via the air pipe, achieving a vacuum in the testing environment. In this embodiment, a sample testing system is used for sample testing. The sample testing system includes an electrical performance testing device and an optical monitoring device. The electrical performance testing device includes an upper clamp 7 and a lower clamp 8 installed inside the multifunctional electrical testing cavity, serving as upper and lower electrodes. The optical monitoring device includes a silicon dioxide disc 3 installed at the opening of the metal cover 1 and a laser vibrometer installed outside the multifunctional cavity. The silicon dioxide disc 3 and the metal cover 1 are sealed together, and the laser vibrometer monitors the piezoelectric sample 9 inside the multifunctional cavity through the silicon dioxide disc 3. The top of the metal cover has a circular opening for installing the silicon dioxide disc 3, and the installation area is also sealed. The mechanical clamping assembly 30 includes a clamp fixing rod 73 installed on the partition 25, as shown in the attached figure. Figure 2As shown, an upper clamp 7 is connected to the clamp fixing rod 73 via a bolt assembly. The clamping end of the upper clamp 7 is a hollow cylindrical structure, which forms a ring structure with the piezoelectric sample to reduce the contact area and increase the clamping force. A lower clamp 8 for placing the sample is installed on the alumina ceramic upper cover 5. A clamping force adjustment assembly 31 is installed on the upper clamp 7. The clamping force adjustment assembly 31 includes a fixing post 70 passing through the upper clamp 7. An adjusting nut 72 is screwed onto the upper end of the fixing post 70. A spring 71 is engaged between the upper clamp 7 and the lower part of the fixing post 70. When in use, by rotating the adjusting nut, the fixing post is displaced vertically, resulting in different distances between the end of the fixing post and the upper clamp, thus generating different weights. Consequently, the clamping force of the upper clamp on the piezoelectric sample varies, thereby adjusting the clamping force of the upper clamp on the sample.

[0024] An alumina screw 74 is inserted through the upper end of the clamp fixing rod 73. An insulator 75, which is located on the upper and lower sides of the upper clamp 7, is sleeved on the alumina screw 74. An alumina nut 76 is provided at the upper end of the alumina screw 74. By combining and placing the clamp fixing rod and the upper clamp, the height of the upper clamp can be adjusted by changing different insulators when handling piezoelectric samples of different thicknesses, making it flexible and convenient to use.

[0025] The working principle of this invention is as follows: The sample to be tested is placed in the lower clamp on the upper part of the alumina ceramic cover. The upper clamp presses down on the sample. The clamping force adjustment component can adjust the clamping force of the upper clamp on the sample. The signal generator is turned on, and after passing through the high voltage amplifier, voltage is transmitted to the upper clamp 7 and the lower clamp 8, which is transmitted to the upper and lower surfaces of the piezoelectric sample 9. The vibration change of the piezoelectric sample 9 is monitored by a laser vibrometer through the silicon dioxide disc 3. The stage has a heating wire, and heating is achieved by heating the wire. The sample stage is set on the partition, and the lower part of the partition is connected to a metal cavity. The inlet and outlet ports on both sides allow cooling liquid to enter and exit, achieving cooling within the cavity and enabling rapid temperature changes, thus improving detection efficiency. The evacuation port, located within the metal cavity, can create a vacuum environment. High-temperature metal cavities and fixtures are prone to oxidation; to eliminate this interference, the metal cavity is evacuated. This invention can modify the clamping force on the sample, the ambient temperature, and the internal pressure environment, simulating various testing conditions to assess the electrical performance of piezoelectric ceramics, facilitating a better assessment of the stability and applicability of piezoelectric ceramics.

Claims

1. A multifunctional piezoelectric ceramic electrical performance testing chamber, comprising a metal top cover (1) and a metal chamber (2), characterized in that: The bottom of the metal cavity (2) is provided with a sample stage consisting of a top cover (5) and a stage (6); the stage (6) is equipped with a heating wire; the bottom of the metal cavity (2) is provided with a mechanical clamping assembly (30) for fixing the sample; the circumferential side of the metal cavity (2) is provided with an air extraction port (24), a water inlet (22), a water outlet (23) and a wiring port; the top of the metal top cover (1) is provided with a silicon dioxide disc (3); the wiring port is electrically connected to the mechanical clamping assembly (30) and the heating wire respectively; The mechanical clamping assembly (30) includes a clamp fixing rod (73) set on the partition plate (25), an upper clamp (7) is connected to the clamp fixing rod (73) by a bolt assembly, and a lower clamp (8) for placing samples is provided on the upper cover (5); a clamping force adjusting assembly (31) is provided on the upper clamp (7), and the upper clamp (7) and the lower clamp (8) are connected to the wiring port by a wire; an alumina screw (74) is provided at the upper end of the clamp fixing rod (73), an insulator (75) is provided on the upper and lower sides of the upper clamp (7) on the upper sleeve of the alumina screw (74), and an alumina nut (76) is provided at the upper end of the alumina screw (74); the clamping force adjusting assembly (31) includes a fixing post (70) passing through the upper clamp (7), an adjusting nut (72) is provided at the upper end of the fixing post (70), and a spring (71) is provided between the upper clamp (7) and the lower part of the fixing post (70).

2. The multifunctional piezoelectric ceramic electrical performance testing chamber according to claim 1, characterized in that: The upper end of the metal cavity (2) is connected to the metal cover (1) via a threaded structure, and a rubber gasket (4) is provided at the upper end of the metal cavity (2).

3. The multifunctional piezoelectric ceramic electrical performance testing chamber according to claim 1, characterized in that: The metal cover (1) is a metal cover (1) with an attached ring handle.

4. The multifunctional piezoelectric ceramic electrical performance testing chamber according to claim 1, characterized in that: The wiring port includes a wire passage (21) located on the side of the metal cavity (2), and a wiring terminal (20) provided in the wire passage (21). The wiring terminal (20) is electrically connected to the upper clamp (7), the lower clamp (8) and the heating wire, respectively.

5. The multifunctional piezoelectric ceramic electrical performance testing chamber according to claim 1, characterized in that: The metal cavity (2) is provided with a partition (25), the air extraction port (24) is located above the partition (25), and the water inlet (22) and water outlet (23) are located below the partition (25).

6. The multifunctional piezoelectric ceramic electrical performance testing chamber according to claim 1, characterized in that: The top cover (5) and the platform (6) are both made of alumina ceramic.

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