Method and device for determining length of rotor spindle of molecular pump, electronic equipment and storage medium

Abstract

The invention provides a method and device for determining the length of a rotor spindle of a molecular pump, electronic equipment and a storage medium, the working rotating speed of the molecular pump is a first speed, and the method comprises the following steps: determining a first target nutation frequency based on the first speed; based on the first target nutation frequency and a first mapping relation, the first target length of the molecular pump rotor spindle is determined; wherein the ratio of the first target nutation frequency to a first rotor fundamental frequency is smaller than or equal to 80%, and the first rotor fundamental frequency is determined based on the first speed. The nutation frequency is suppressed by adjusting the length of the main shaft, so that vibration of the molecular pump caused by the nutation frequency is reduced, and the overall stability of the rotor is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum molecular pumps, and more particularly, to a method for determining the length of the rotor main shaft of a molecular pump, a molecular pump, and related equipment. Background Art

[0002] Molecular pumps have the advantages of fast pumping speed, small volume, clean operation, etc., making them widely used in fields such as semiconductor manufacturing, industrial coating, nuclear energy, and aerospace. However, the problems of large displacement fluctuations and large vibrations of molecular pumps have always been one of the bottlenecks restricting their development. Taking the magnetic levitation molecular pump as an example, the magnetic levitation molecular pump has a compact structure and a very small assembly gap between the stator and the rotor. Therefore, when the radial displacement fluctuation of the magnetic levitation molecular pump is relatively large, the resulting severe vibration not only affects the stability of the product operation, shortens the service life of the magnetic levitation molecular pump, but also is very likely to cause the devastating damage of the magnetic levitation molecular pump. Summary of the Invention

[0003] In view of this, the present application provides a method for determining the length of the rotor main shaft of a molecular pump, a molecular pump, and related equipment, in order to solve the above problems.

[0004] In a first aspect, the present application provides a method for determining the length of the rotor main shaft of a molecular pump, where the working speed of the molecular pump is a first speed, including:

[0005] Determining a first target nutation frequency of the molecular pump based on a first rotor fundamental frequency;

[0006] Determining a first target length of the rotor main shaft of the molecular pump based on the first target nutation frequency and a first mapping relationship;

[0007] Wherein, the ratio of the first target nutation frequency to the first rotor fundamental frequency is less than or equal to 80%, and the first rotor fundamental frequency is determined based on the first speed.

[0008] The present application suppresses the nutation frequency by adjusting the main shaft length, thereby reducing the vibration of the molecular pump caused by the nutation frequency and improving the overall stability of the rotor.

[0009] In a possible way, the ratio of the first target nutation frequency to the first rotor fundamental frequency is equal to 80%.

[0010] In a possible way, in the step of determining the first target length of the rotor main shaft of the molecular pump based on the first target nutation frequency and a first mapping relationship, the first mapping relationship is as follows:

[0011]

[0012] n - moment of inertia ratio;

[0013] p1 - The first value, the first speed;

[0014] l1 - The first target length of the main shaft of the molecular pump rotor;

[0015] δ pn1 - The first target nutation frequency;

[0016] C - Constant.

[0017] A possible way is that when the operating speed of the molecular pump is converted from the first speed to the second speed, the method further includes:

[0018] Obtaining the first nutation frequency and the current length of the main shaft of the molecular pump rotor, where the first nutation frequency is the nutation frequency corresponding to the current length of the main shaft of the molecular pump rotor when the operating speed of the molecular pump is the first speed;

[0019] Determining the second target length of the main shaft of the molecular pump rotor based on the first nutation frequency, the second mapping relationship, the first speed and the second speed, and the second target nutation frequency, and adjusting the current length of the main shaft of the molecular pump rotor based on the second target length of the main shaft of the molecular pump rotor;

[0020] Wherein, the ratio of the second target nutation frequency to the second basic rotor frequency is less than or equal to 80%, and the second basic rotor frequency is determined based on the second speed.

[0021] A possible way is that the second mapping relationship is as follows:

[0022]

[0023] p1 - The first speed;

[0024] p2 - The second speed;

[0025] l2 - The current length of the main shaft of the molecular pump rotor;

[0026] l3 - The second target length of the main shaft of the molecular pump rotor;

[0027] δ pn2 - The first nutation frequency;

[0028] δ pn3 - The second target nutation frequency;

[0029] C - Constant.

[0030] A possible way is to determine the constant C in the first and second mapping relationships in the following manner:

[0031] Obtaining the preset parameters of the molecular pump, and obtaining the second nutation frequency based on the preset parameters of the molecular pump;

[0032] Determine the constant C in the first and second mapping relationships based on the dynamic frequency described in the second chapter, the preset molecular pump length, and the third mapping relationship.

[0033] Among them, the preset molecular pump length exists in the preset parameters of the molecular pump.

[0034] A possible way is that the third mapping relationship is as follows:

[0035] δ pn0 =(0.0023l0 2 -1.8482l0 2 ) + C;

[0036] l0 - preset molecular pump length;

[0037] δ pn0 —dynamic frequency described in the second chapter;

[0038] C - constant.

[0039] In a second aspect, the present application provides a device for determining the length of the rotor main shaft of a molecular pump. The working speed of the molecular pump is the first speed, including:

[0040] The first determination module: used to determine the first target nutation frequency of the molecular pump based on the first rotor fundamental frequency;

[0041] The second determination module: used to determine the first target length of the rotor main shaft of the molecular pump based on the first target nutation frequency and the first mapping relationship;

[0042] Among them, the ratio of the first target nutation frequency to the first rotor fundamental frequency is less than or equal to 80%, and the first rotor fundamental frequency is determined based on the first speed.

[0043] In a third aspect, an embodiment of the present application provides an electronic device, including:

[0044] At least one processor; and

[0045] At least one memory communicatively connected to the processor, where:

[0046] The memory stores program instructions executable by the processor, and the processor can execute the method described in the first aspect by calling the program instructions.

[0047] In a fourth aspect, the present application provides a computer-readable storage medium. The computer-readable storage medium stores computer instructions, and the computer instructions cause the computer to execute the method described in the first aspect.

[0048] Other features and advantages of the present invention will be set forth in the following description, and in part will be obvious from the description, or may be learned by practice of the present invention. The objectives and other advantages of the present invention are realized and attained by the structure particularly pointed out in the specification, claims and drawings.

[0049] To make the above objectives, features and advantages of the present invention more comprehensible, the following specific preferred embodiments are given, in conjunction with the accompanying drawings, and are described in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0051] Figure 1 Shows the rotor structure of a molecular pump in the prior art;

[0052] Figure 2 Shows the structure of a quarter of the rotor of the molecular pump provided by the embodiment of the present invention;

[0053] Figure 3 Is a flowchart of a method for determining the spindle length of the rotor of a molecular pump provided by an embodiment of the present invention;

[0054] Figure 4 Is a simulation verification diagram of the mapping relationship of the spindle length shown in an exemplary embodiment;

[0055] Figure 5 Is a flowchart of another method for determining the spindle length of the rotor of a molecular pump provided by an embodiment of the invention;

[0056] Figure 6 Is a flowchart of another method for determining the spindle length of the rotor of a molecular pump provided by an embodiment of the invention;

[0057] Figure 7 Is a structural diagram of a device for determining the spindle length of the rotor of a molecular pump provided by an embodiment of the present invention;

[0058] Figure 8 Is a structural diagram of an electronic device provided by an embodiment of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0059] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the scope of protection of the present invention.

[0060] Molecular pumps have the advantages of fast pumping speed, small volume, and clean operation, making them widely used in fields such as semiconductor manufacturing, industrial coating, nuclear energy, and aerospace. However, the problems of large displacement fluctuations and vibrations in a molecular pump have always been one of the bottlenecks restricting its development. Taking the magnetic levitation molecular pump as an example, its structure is compact, and the assembly gap between the stator and the rotor is very small. Therefore, when the radial displacement fluctuation of the molecular pump is large, the resulting intense vibration not only affects the stability of the product operation and reduces the service life of the magnetic levitation molecular pump, but also is very likely to cause catastrophic damage to the magnetic levitation molecular pump.

[0061] To solve the above problems, the embodiments of the present application provide a method, device, electronic device, and storage medium for determining the length of the rotor main shaft of a molecular pump, in order to solve the above problems.

[0062] First, the molecular pump related to the present application is elaborated:

[0063] Referring to Figure 1 , the molecular pump includes a stator (not shown in the figure), a rotor 10, and a main shaft 20. The rotor 10 is composed of high-speed rotating blades or turbine structures, and through momentum transfer, gas molecules are guided from the inlet to the outlet to form a directional air flow. The stator is paired with the rotor 10 and fixed inside the pump body to form a gas flow channel. The main shaft is a key component connecting the power system and the rotor, responsible for transmitting torque and supporting the high-speed rotation of the rotor.

[0064] Referring to Figure 2 , in the embodiments adopted in the present application, the length of the rotor main shaft of the molecular pump can be understood as the overall length or effective length of the main shaft of the molecular pump rotor, where the effective length is understood as the length of the part of the main shaft covered by the stator. For specific reference, see L in Figure 2 .

[0065] Secondly, the professional terms involved in the present application are elaborated:

[0066] The fundamental frequency of the rotor: The fundamental frequency of the rotor generally refers to the frequency of the rotor's rotation, that is, the number of complete rotations of the rotor per unit time. Specifically, it can be calculated in the following manner:

[0067]

[0068] p - The operating speed of the molecular pump;

[0069] f—the fundamental frequency of the rotor.

[0070] Nutation frequency: When a rotating body (such as a gyroscope, celestial body) is subjected to a torque disturbance, the periodic small swing frequency generated by its axis of symmetry. The smaller the nutation frequency, the smaller the swing when subjected to a torque disturbance, and the higher the rotor stability.

[0071] Moment of inertia ratio: Used to characterize the matching relationship between the moment of inertia of the impeller and the drive system (such as a motor), and its value is affected by the geometric shape of the impeller, material density, and mass distribution.

[0072] Next, the method for determining the length of the main shaft of the molecular pump rotor provided in the embodiments of the present application will be described:

[0073] Refer to Figure 3 , in the embodiment provided in the present application, first execute S101: Determine the first target nutation frequency of the molecular pump based on the first fundamental frequency of the rotor.

[0074] In the embodiment provided in the present application, the first target nutation frequency is the allowable range of the nutation frequency corresponding to the working speed of the molecular pump being the first speed (such as the rated speed). In other words, it means that when the working speed of the molecular pump is the first speed, when the nutation frequency of the molecular pump conforms to the first target nutation frequency, the displacement fluctuation and vibration of the molecular pump are within the safe range.

[0075] In the embodiment provided in the present application, when the ratio of the first target nutation frequency to the first fundamental frequency of the rotor is less than or equal to 80%, the displacement fluctuation and vibration of the molecular pump are within the safe range.

[0076] At the same time, the first fundamental frequency of the rotor is determined based on the first speed.

[0077] Specifically, the first fundamental frequency of the rotor can be determined in the following manner:

[0078]

[0079] p1—the first speed;

[0080] f1—the first fundamental frequency of the rotor.

[0081] After determining the first target nutation frequency, execute S102: Determine the first target length of the main shaft of the molecular pump rotor based on the first target nutation frequency and the first mapping relationship.

[0082] In the embodiment provided in the present application, the first target length of the main shaft of the molecular pump rotor represents the target value of the length of the main shaft of the molecular pump rotor when the working speed of the molecular pump is the first speed.

[0083] Specifically, the first mapping relationship is as follows:

[0084]

[0085] n—the moment of inertia ratio;

[0086] p1—the first velocity of the first value;

[0087] l1—the first target length of the main shaft of the molecular pump rotor;

[0088] δ pn1 —the first target nutation frequency;

[0089] C—a constant.

[0090] Through the above formula, after the moment of inertia ratio of the molecular pump is given, the first target length of the main shaft of the molecular pump rotor can be determined.

[0091] In order to reduce the vibration caused by the nutation frequency, it is necessary to increase the length of the main shaft, and the length of the main shaft will further increase the volume of the molecular pump. In order to reduce the vibration caused by the nutation frequency and at the same time reduce the impact of increasing the main shaft length on the overall volume of the molecular pump, in the embodiment provided in the present application, the ratio of the first target nutation frequency to the first rotor fundamental frequency is preferably equal to 80%.

[0092] Thus, the present application increases the length of the main shaft to suppress the nutation frequency, thereby reducing the vibration of the molecular pump caused by the nutation frequency and improving the overall stability of the rotor.

[0093] For the validity of the above formula, in the embodiment provided in the present application, a simulation verification was also carried out on a certain molecular pump, and the parameters of the molecular pump are shown in the following table:

[0094] Name Value <![CDATA[Rotor diameter Moment of inertia J d (kg·mm 2 )]]> 48344 <![CDATA[Rotor pole moment of inertia J p (kg·mm 2 )]]> 33544 Rated speed of molecular pump (r / min) 20000 Rated power of molecular pump (kW) 1.5 Ratio of moment of inertia 0.69 Radial magnetic bearing stiffness (N / mm) 800 Axial magnetic bearing stiffness (N / mm) 1200 Damping (N·s / mm) 0.1

[0095] Figure 4 One of the two curves in the figure represents the relationship between the amount of suppressing the nutation frequency and the change amount of the main shaft length of the given molecular pump based on the finite element. Specifically, the abscissa is the change amount of the main shaft length, and the ordinate is the change amount of the nutation frequency. One curve in the figure is the simulation calculation curve, and the other curve is the curve generated by the analytical calculation using the above formula. The simulation results are basically consistent with the analytical results, and the average error between the two is less than 5 Hz, thus verifying the correctness of the above formula.

[0096] On the basis of the foregoing embodiment, when the operating speed of the molecular pump is converted from the first speed to the second speed (such as the modified rated speed), the following method is used to determine the second target length of the main shaft of the molecular pump rotor:

[0097] S201: Obtain the first nutation frequency and the current length of the main shaft of the molecular pump rotor.

[0098] In the embodiments provided by the present application, the first wobbling frequency is the wobbling frequency corresponding to the current length of the rotor main shaft of the molecular pump when the operating speed of the molecular pump is the first speed. Specifically, it can be the wobbling frequency when the operating speed of the molecular pump remains unchanged. The second target wobbling frequency specifically refers to the allowable range of the wobbling frequency when the operating speed of the molecular pump is the second speed, that is, it represents that when the operating speed of the molecular pump is the second speed and the wobbling frequency of the molecular pump conforms to the second target wobbling frequency, the displacement fluctuation and vibration of the molecular pump are within the safe range.

[0099] In the embodiments provided by the present application, the ratio of the second target wobbling frequency to the second rotor fundamental frequency is less than or equal to 80%.

[0100] It should be noted that in the embodiments provided by the present application, the second rotor fundamental frequency represents the fundamental frequency of the molecular pump when the operating speed of the molecular pump is the second speed. Thus, it can be seen that the second rotor fundamental frequency is determined based on the second speed.

[0101] Specifically, the following formula can be used to calculate the aforementioned second rotor fundamental frequency:

[0102]

[0103] p2—the second speed;

[0104] f2—the second rotor fundamental frequency.

[0105] S202: Determine the second target length of the rotor main shaft of the molecular pump based on the first wobbling frequency, the second mapping relationship, the first speed and the second speed, and the second target wobbling frequency, and adjust the current length of the rotor main shaft of the molecular pump based on the second target length of the rotor main shaft of the molecular pump.

[0106] In the embodiments provided by the present application, the second mapping relationship is as follows:

[0107]

[0108] p1—the first speed;

[0109] p2—the second speed;

[0110] l1—the current length of the rotor main shaft of the molecular pump;

[0111] l2—the second target length of the rotor main shaft of the molecular pump;

[0112] —the first wobbling frequency;

[0113] —the second target wobbling frequency;

[0114] C—a constant.

[0115] Through the above formula, when the operating speed of the molecular pump changes, the length of the rotor main shaft of the molecular pump after the speed change is determined, so as to adjust the length of the current rotor main shaft of the molecular pump, thereby suppressing the nutation frequency and reducing the vibration of the molecular pump caused by the nutation frequency, and improving the overall stability of the rotor.

[0116] Specifically, in some examples, the length of the current rotor main shaft of the molecular pump corresponds to the first target length of the rotor main shaft of the molecular pump described above. In this context, the first nutation frequency is the first target nutation frequency.

[0117] In some examples, the length of the current rotor main shaft of the molecular pump corresponds to the preset molecular pump length described below. In this context, the first nutation frequency corresponds to the second nutation frequency described below.

[0118] Refer to Figure 6 In the embodiments provided in the present application, it can be seen from the foregoing that there is a constant C in the first and second mapping relationships. The constant C in the first and second mapping relationships can be determined in the following specific manner:

[0119] S301: Obtain the preset parameters of the molecular pump, and obtain the second nutation frequency based on the preset parameters of the molecular pump;

[0120] In the embodiments provided in the present application, the preset parameters of the molecular pump include: preset molecular pump length, rotor diameter moment of inertia, rotor pole moment of inertia, preset molecular pump speed, molecular pump rated power, moment of inertia ratio, radial magnetic bearing stiffness, axial magnetic bearing stiffness, and damping.

[0121] It should be noted that in the embodiments provided in the present application, the preset parameters of the molecular pump can be the parameters of the molecular pump during design or the parameters of the molecular pump under a certain preset condition.

[0122] S302: Determine the constant C in the first and second mapping relationships based on the second nutation frequency, the preset molecular pump length, and the third mapping relationship.

[0123] It can be seen from the foregoing that the preset molecular pump length exists in the preset parameters of the molecular pump.

[0124] In order to determine the foregoing constant C, the third mapping relationship is as follows:

[0125] δ pn0 =(0.0023l0 2 -1.8482l0 2 )+C;

[0126] l0 - preset molecular pump length;

[0127] δ pn0 —the second nutation frequency;

[0128] C - constant.

[0129] In the above - mentioned manner, the constant C in the aforementioned first and second mappings is determined.

[0130] In some scenarios, when designing a molecular pump, it is first necessary to obtain the preset parameters of the molecular pump. After obtaining the preset parameters of the molecular pump, the aforementioned second - order nutation frequency is obtained. If the ratio of the second - order nutation frequency to the fundamental frequency of the first rotor is greater than 80%, the steps of the aforementioned S101 to S102 are executed.

[0131] Based on the foregoing embodiments, an embodiment of the present application provides a device for determining the length of the rotor main shaft of a molecular pump. The operating speed of the molecular pump is the first speed, and it includes:

[0132] The first determination module: used to determine the first target nutation frequency of the molecular pump based on the fundamental frequency of the first rotor;

[0133] The second determination module: used to determine the first target length of the rotor main shaft of the molecular pump based on the first target nutation frequency and the first mapping relationship;

[0134] Wherein, the ratio of the first target nutation frequency to the fundamental frequency of the first rotor is less than or equal to 80%, and the fundamental frequency of the first rotor is determined based on the first speed.

[0135] Unless otherwise specifically stated, the relative steps, numerical expressions, and values of the components and steps set forth in these embodiments do not limit the scope of the present invention.

[0136] The device provided by the embodiment of the present invention has the same implementation principle and the same technical effects as those of the foregoing method embodiment. For the sake of brief description, for the parts not mentioned in the device embodiment, reference may be made to the corresponding content in the foregoing method embodiment.

[0137] Based on the foregoing embodiments, the present application further provides a molecular pump, which determines the length of the main shaft of the molecular pump by using the foregoing method. At the same time, the molecular pump is applied to a vacuum environment.

[0138] In the embodiments provided by the present application, the molecular pump is a magnetic - levitation molecular pump or a mechanical molecular pump.

[0139] In all the examples shown and described here, any specific value should be construed as merely exemplary, not as a limitation. Therefore, other examples of the exemplary embodiments may have different values.

[0140] It should be noted that: similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0141] The flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of systems, methods, and computer program products according to various embodiments of the present invention. In this regard, each block in the flowchart or block diagram may represent a module, a segment of code, or a portion thereof, which contains one or more executable instructions for implementing the specified logical function. It should also be noted that, in some alternative implementations, the functions noted in the blocks may occur in a different order than that noted in the accompanying drawings. For example, two consecutive blocks may actually be executed substantially in parallel, or they may sometimes be executed in the reverse order, depending on the functions involved. It should also be noted that each block in the block diagrams and / or flowcharts, and combinations of blocks in the block diagrams and / or flowcharts, may be implemented by a dedicated hardware-based system that performs the specified functions or actions, or may be implemented by a combination of dedicated hardware and computer instructions.

[0142] Figure 8 A block diagram of an exemplary electronic device suitable for use in implementing the embodiments of the present invention is shown. Figure 8 The electronic device shown is merely an example and should not impose any limitation on the functionality and scope of use of the embodiments of the present invention.

[0143] As Figure 8 shown, the electronic device is presented in the form of a general-purpose computing device. The components of the electronic device may include, but are not limited to: one or more processors 410, a communication interface 420, and a memory 430, and a communication bus 440 that connects different system components (including the memory 430 and the processing unit 410).

[0144] The communication bus 440 represents one or more of several types of bus structures, including a memory bus or a memory controller, a peripheral bus, a graphics acceleration port, a processor, or a local bus using any of the various bus structures. By way of example, these architectures include, but are not limited to, an Industry Standard Architecture (ISA) bus, a Micro Channel Architecture (MAC) bus, an Enhanced ISA bus, a Video Electronics Standards Association (VESA) local bus, and a Peripheral Component Interconnection (PCI) bus.

[0145] An electronic device typically includes various computer system-readable media. These media can be any available media accessible by the electronic device, including volatile and non-volatile media, removable and non-removable media.

[0146] Memory 430 may include computer system-readable media in the form of volatile memory, such as random access memory (RAM) and / or cache memory. The electronic device may further include other removable / non-removable, volatile / non-volatile computer system storage media. Memory 430 may include at least one program product having a set (e.g., at least one) of program modules configured to perform the functions of the embodiments of the present invention.

[0147] A program / utility with a set (at least one) of program modules may be stored in memory 430. Such program modules include—but are not limited to—an operating system, one or more application programs, other program modules, and program data. Each or some combination of these examples may include the implementation of a network environment. The program modules generally perform the functions and / or methods described in the embodiments of the present invention.

[0148] Processor 410 executes various functional applications and data processing by running the programs stored in memory 430, such as implementing the method provided by the embodiments of the present invention.

[0149] The embodiments of the present invention provide a non-transitory computer-readable storage medium that stores computer instructions, and the computer instructions cause a computer to execute the method provided by the embodiments of the present invention.

[0150] The above computer-readable storage medium may adopt any combination of one or more computer-readable media. The computer-readable media may be a computer-readable signal medium or a computer-readable storage medium. The computer-readable storage medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any combination of the above. More specific examples (a non-exhaustive list) of the computer-readable storage medium include: an electrical connection having one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (hereinafter referred to as: ROM), an erasable programmable read-only memory (hereinafter referred to as: EPROM) or a flash memory, an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In this document, the computer-readable storage medium may be any tangible medium that contains or stores a program that can be used by or in conjunction with an instruction execution system, apparatus, or device.

[0151] The computer-readable signal medium may include a data signal propagated in a baseband or as part of a carrier wave, which carries the computer-readable program code. Such a propagated data signal may take various forms, including - but not limited to - an electromagnetic signal, an optical signal, or any suitable combination of the above. The computer-readable signal medium may also be any computer-readable medium other than the computer-readable storage medium, which can send, propagate, or transmit a program for use by or in conjunction with an instruction execution system, apparatus, or device.

[0152] The program code contained on the computer-readable medium may be transmitted using any appropriate medium, including - but not limited to - wireless, wire, optical cable, RF, etc., or any suitable combination of the above.

[0153] The computer program code for performing the operations of the embodiments of the present invention can be written in one or more programming languages or combinations thereof. The programming languages include object-oriented programming languages such as Java, Smalltalk, C++, and also include conventional procedural programming languages such as the "C" language or similar programming languages. The program code can be executed entirely on the user's computer, partially on the user's computer, executed as an independent software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer can be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or can be connected to an external computer (for example, by connecting through the Internet service provider via the Internet).

[0154] The above describes specific embodiments of the embodiments of the present invention. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recited in the claims can be performed in a different order than in the embodiments and still achieve the desired result. Additionally, the processes depicted in the drawings do not necessarily require the particular order or sequential order shown to achieve the desired result. In certain embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0155] In the description of the embodiments of the present invention, the descriptions referring to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present invention. In the embodiments of the present invention, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in the embodiments of the present invention and the features of different embodiments or examples.

[0156] Furthermore, the terms "first" and "second" are used only for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" can explicitly or implicitly include at least one of the features. In the description of the embodiments of the present invention, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically defined.

[0157] Any process or method description depicted in a flowchart or otherwise described herein can be understood to represent a module, segment, or portion of code that includes one or more executable instructions for implementing a customized logical function or process. The scope of the preferred embodiments of the embodiments of the present invention includes additional implementations, where functions may be performed in a manner other than that shown or discussed, including in a substantially simultaneous manner or in a reverse order according to the functions involved, which should be understood by those skilled in the technical field to which the embodiments of the present invention pertain.

[0158] Depending on the context, the word "if" as used herein can be interpreted as "when" or "while" or "in response to determining" or "in response to detecting". Similarly, depending on the context, the phrase "if determined" or "if detected (stated condition or event)" can be interpreted as "when determined" or "in response to determining" or "when detected (stated condition or event)" or "in response to detecting (stated condition or event)".

[0159] It should be noted that the terminals involved in the embodiments of the present invention may include, but are not limited to, personal computers (Personal Computer; hereinafter referred to as: PC), personal digital assistants (Personal Digital Assistant; hereinafter referred to as: PDA), wireless handheld devices, tablet computers, mobile phones, MP3 players, MP4 players, etc.

[0160] In several embodiments provided by the embodiments of the present invention, it should be understood that the disclosed systems, devices, and methods can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of the units is only a logical function division, and there may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed coupling or direct coupling or communication connection between each other can be through some interfaces, and the indirect coupling or communication connection of the device or unit can be in an electrical, mechanical, or other form.

[0161] In addition, in each embodiment of the embodiments of the present invention, the functional units can be integrated in a processing unit, or each unit can exist physically alone, or two or more units can be integrated in one unit. The above-mentioned integrated units can be implemented in the form of hardware, or in the form of a combination of hardware and software functional units.

[0162] The integrated unit implemented in the form of software functional units can be stored in a computer-readable storage medium. The above software functional units stored in a storage medium include a number of instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) or a processor to execute some steps of the methods described in the various embodiments of the present invention. The foregoing storage medium includes: various media such as a USB flash drive, a mobile hard disk, a read-only memory (ROM for short), a random access memory (RAM for short), a magnetic disk, or an optical disc that can store program codes.

[0163] The foregoing are only the preferred embodiments of the present invention, and are not intended to limit the embodiments of the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the embodiments of the present invention shall be included within the scope of protection of the embodiments of the present invention.

Claims

1. A method for determining the length of the rotor main shaft of a molecular pump, characterized in that, The operating speed of the molecular pump is the first speed, including: Determining the first target nutation frequency of the molecular pump based on the first rotor fundamental frequency; Determining the first target length of the main shaft of the molecular pump rotor based on the first target nutation frequency and the first mapping relationship; Wherein, the ratio of the first target nutation frequency to the first rotor fundamental frequency is less than or equal to 80%, and the first rotor fundamental frequency is determined based on the first speed.

2. The method according to claim 1, wherein The ratio of the first target nutation frequency to the first rotor fundamental frequency is equal to 80%.

3. The method according to claim 1, characterized in that In the step of determining the first target length of the main shaft of the molecular pump rotor based on the first target nutation frequency and the first mapping relationship, the first mapping relationship is as follows: n - Moment of inertia ratio; p1 - First value of the first speed; l1 - First target length of the main shaft of the molecular pump rotor; δ pn1 — the first target nutation frequency; C - Constant.

4. The method according to any one of claims 1 to 3, characterized in that, When the operating speed of the molecular pump is converted from the first value of the first speed to the second value of the second speed, the method further includes: Obtaining the first nutation frequency and the current length of the main shaft of the molecular pump rotor, where the first nutation frequency is the nutation frequency corresponding to the current length of the main shaft of the molecular pump rotor when the operating speed of the molecular pump is the first speed; Determining the second target length of the main shaft of the molecular pump rotor based on the first nutation frequency, the second mapping relationship, the first speed and the second speed, and the second target nutation frequency, and adjusting the current length of the main shaft of the molecular pump rotor based on the second target length of the main shaft of the molecular pump rotor; Wherein, the ratio of the second target nutation frequency to the second rotor fundamental frequency is less than or equal to 80%, and the second rotor fundamental frequency is determined based on the second speed.

5. The method according to claim 4, wherein The second mapping relationship is as follows: p1 - First speed; p2 - Second speed; l2 - Current length of the main shaft of the molecular pump rotor; l3 - Second target length of the main shaft of the molecular pump rotor; δ pn2 — Chapter 1: Dynamic Frequency; δ pn3 — the second target nutation frequency; C - Constant.

6. The method according to claim 4, characterized in that, The constant C in the first and second mapping relationships is determined in the following manner: Obtaining the preset parameters of the molecular pump, and obtaining the second nutation frequency based on the preset parameters of the molecular pump; Determining the constant C in the first and second mapping relationships based on the second nutation frequency, the preset length of the molecular pump, and the third mapping relationship, Wherein, the preset length of the molecular pump exists in the preset parameters of the molecular pump.

7. The method according to claim 6, wherein The third mapping relationship is as follows: δ pn0 = (0.0023l0 2 - 1.8482l0 2 ) + C; l0 - Preset length of the molecular pump; δ pn0 — Chapter 2 Dynamic Frequency; C - Constant.

8. A device for determining the length of the rotor main shaft of a molecular pump, characterized in that, The operating speed of the molecular pump is the first speed, including: The first determination module: used to determine the first target nutation frequency of the molecular pump based on the first rotor fundamental frequency;; The second determination module: used to determine the first target length of the main shaft of the molecular pump rotor based on the first target nutation frequency and the first mapping relationship; Wherein, the ratio of the first target nutation frequency to the first rotor fundamental frequency is less than or equal to 80%, and the first rotor fundamental frequency is determined based on the first speed.

9. An electronic device, characterized in that, Including: At least one processor; And At least one memory communicatively connected to the processor, wherein: The memory stores program instructions executable by the processor, and the processor can execute the method according to any one of claims 1 to 7 by invoking the program instructions.

10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer instructions that cause the computer to perform the method according to any one of claims 1 to 7.

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