Linkage lifting mechanism and detection equipment

Abstract

The invention discloses a linkage lifting mechanism and detection equipment, the linkage lifting mechanism comprises a supporting assembly and a lifting driving assembly, the lifting driving assembly comprises a rotation driving part, a first rotating part and a second rotating part, and the second rotating part is provided with at least three lifting guide parts; the at least three supporting pieces are slidably connected with the at least three lifting guide parts in a one-to-one correspondence mode. As the linkage lifting mechanism can install the power source in the vacuum detection cavity, and connecting structures such as pipelines for connecting the inside and the outside of the vacuum detection cavity can be omitted, the linkage lifting mechanism can be easily arranged on a motion platform in the vacuum detection cavity, and lifting support of a wafer to be detected is realized; moreover, due to the fact that movement of connecting structures such as staggered avoiding pipelines does not need to be arranged, the linkage lifting mechanism and other mechanisms can be fused to be at the same height, mechanism stacking is reduced, and occupied space is more compact.

Description

Technical Field

[0001] The present invention relates to the field of detection technology, and particularly relates to a linkage lifting mechanism and a detection device. Background Art

[0002] Currently, in the semiconductor industry, during the transfer of wafers, when the process position receives the wafers transferred by the robot in the loadlock chamber, it is often necessary to use a lifting support member to catch the wafers transferred by the robot, and at the same time raise a certain height so that the robot fingers can be disengaged from the wafers. During the process, it is also necessary for the support member to lower a certain height to place the wafers on the chuck at the process position.

[0003] However, for the current lifting support member structure, the handling situation is relatively simple when the process position is a fixed position. However, for the situation where the process position is placed on an x-y moving platform, it is relatively troublesome to implement. Summary of the Invention

[0004] The present invention provides a linkage lifting mechanism and a detection device, which are used to solve the problem that it is difficult to implement the linkage lifting mechanism when the process position is placed on an x-y moving platform.

[0005] In one embodiment, a linkage lifting mechanism is provided, including:

[0006] A support assembly, including at least three support members having support ends, the support ends of at least three of the support members being located in a plane, and at least three of the support members being used to jointly support a workpiece to be measured; and

[0007] A lifting drive assembly, including a rotary drive member, a first rotary member, and a second rotary member connected in sequence. The second rotary member is provided with at least three lifting guide portions, and at least three of the support members are slidably connected to at least three of the lifting guide portions in a one-to-one correspondence; during lifting drive, the rotary drive member drives the first rotary member to rotate, the rotation of the first rotary member drives the second rotary member to rotate synchronously, and at least three lifting guide portions of the second rotary member drive at least three of the support members to rise or fall synchronously.

[0008] In one embodiment, the second rotary member is an annular body, and the lifting guide portions are provided on the outer side surface or the inner side surface of the annular body.

[0009] In one embodiment, the second rotary member includes at least three arc-shaped bodies distributed on the same circumference, and one or more of the lifting guide portions are provided on the outer side surface or the inner side surface of the arc-shaped body.

[0010] In one embodiment, the lifting guiding portion is a guiding groove or a guiding hole located on the curved surface. The guiding groove or the guiding hole is a parabolic or arc structure. The lifting guiding portion includes a first end and a second end. In the vertical direction, the first end is higher than the second end. When the support member slides to be connected to the first end, the support member is at the highest position. When the support member slides to be connected to the second end, the support member is at the lowest position.

[0011] In one embodiment, a cam follower is installed at one end of the support member away from the supporting end. The support member is slidably connected to the lifting guiding portion through the cam follower.

[0012] In one embodiment, the linkage lifting mechanism further includes at least three support mounting frames. Each support member is liftably installed on one of the support mounting frames.

[0013] In one embodiment, the support mounting frame is provided with a guiding and limiting member. The guiding and limiting member has a lifting movement channel. A part of the support member is located in the lifting movement channel. The support member moves up and down along the lifting movement channel.

[0014] In one embodiment, the support mounting frame includes a first mounting frame and a second mounting frame. The first mounting frame is vertically arranged outside the second rotating member. The second mounting frame is horizontally arranged. One end of the second mounting frame is connected to the upper end of the first mounting frame. The end of the second mounting frame away from the first mounting frame extends to the inside of the second rotating member and is provided with a mounting hole. The guiding and limiting member is arranged on the first mounting frame. The support member passes through the mounting hole.

[0015] In one embodiment, the support member includes a first rod, a second rod and a third rod connected in sequence. The first rod and the third rod are vertically arranged. The second rod is horizontally or obliquely arranged. A part of the first rod is located in the lifting movement channel. A part of the third rod is located in the mounting hole.

[0016] In one embodiment, the first rotating member includes a circular gear and an arc-shaped rack engaged with each other. The circular gear is connected to the rotation driving member. The arc-shaped rack is arranged on the outer side surface of the second rotating member. The rotation driving member drives the second rotating member to rotate through the circular gear and the arc-shaped rack in sequence.

[0017] In one embodiment, the lifting guiding portion is a spiral structure; and / or, each cylindrical body is provided with two lifting guiding portions that are centrosymmetric. A cam follower is installed at one end of the support member away from the supporting end. The two cam followers are slidably connected to the two lifting guiding portions in one-to-one correspondence.

[0018] In one embodiment, the second rotating member is a cylindrical body, and the lifting guiding portion is disposed on the inner side surface of the cylindrical body, or the lifting guiding portion penetrates from the inner side surface of the cylindrical body to the outer side surface of the cylindrical body.

[0019] In one embodiment, the first rotating member includes a first gear, a second gear, and at least three third gears. The first gear is connected to the rotation driving member. At least three third gears are provided. The first gear is meshed with the second gear, the second gear is meshed with at least three third gears, and at least three third gears are respectively connected to at least three cylindrical bodies in one-to-one correspondence. The rotation driving member drives the cylindrical bodies to rotate through the first gear, the second gear, and the third gears in sequence.

[0020] In one embodiment, a detection device is provided, including:

[0021] A box body having a vacuum detection chamber;

[0022] A moving platform disposed in the vacuum detection chamber;

[0023] The above-mentioned linkage lifting mechanism disposed in the vacuum detection chamber, the elevator is disposed on the moving platform, and the moving platform is used to drive the linkage lifting mechanism to move.

[0024] According to the linkage lifting mechanism and the detection device of the above embodiment, since the lifting drive assembly of the linkage lifting mechanism includes a rotation driving member, a first rotating member, and a second rotating member, the rotation driving member can drive at least three lifting guiding portions of the second rotating member to rotate synchronously through the first rotating member, so as to drive at least three supporting members to rise or fall synchronously; the lifting drive assembly adopts a mechanical structure of rotational transmission drive, so that the linkage lifting mechanism can be integrally installed in the vacuum detection chamber of the detection device, that is, the power source of this structure of the linkage lifting mechanism can be installed in the vacuum detection chamber, and the connection structures such as pipes connecting inside and outside the vacuum detection chamber can be omitted. Therefore, this linkage lifting mechanism can be relatively easily arranged on the moving platform in the vacuum detection chamber to realize the lifting support of the wafer to be measured; and, since there is no need to set up a moving structure for staggering and avoiding connection structures such as pipes, the linkage lifting mechanism and other mechanisms can be integrated at the same height, reducing the stacking of mechanisms and making the space occupation more compact. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic structural diagram of a linkage lifting mechanism in one embodiment;

[0026] Figure 2 It is a schematic structural diagram of a lifting drive assembly and a base in one embodiment;

[0027] Figure 3 Schematic structural diagram of the lifting drive assembly and the base in an embodiment;

[0028] Figure 4 Schematic structural diagram of the support assembly in an embodiment;

[0029] Figure 5 Schematic structural diagram of the linkage lifting mechanism in an embodiment;

[0030] Figure 6 Schematic structural diagram of the second rotating member in an embodiment;

[0031] Figure 7 Along Figure 6 Cross-sectional view taken along the A-A section line in;

[0032] Figure 8 Schematic structural diagram of the second rotating member and the support assembly in an embodiment;

[0033] Figure 9 Schematic structural diagram of the detection device in an embodiment;

[0034] Wherein the reference numerals are as follows:

[0035] 1 - Support assembly, 11 - Support member, 111 - First rod, 112 - Second rod, 113 - Third rod, 12 - Cam follower, 13 - Support mounting bracket, 131 - First mounting bracket, 132 - Second mounting bracket, 133 - Fixed plate, 14 - Guide and limit member;

[0036] 2 - Lifting drive assembly, 21 - Rotary drive, 22 - First rotating member, 221 - Circular gear, 222 - Arc-shaped rack, 223 - First gear, 224 - Second gear, 225 - Third gear, 23 - Second rotating member, 231 - Lifting guide portion, 2311 - First end, 2312 - Second end, 232 - Connecting shaft, 24 - Drive mounting seat, 241 - Bottom plate, 242 - Top plate, 243 - Support column;

[0037] 3 - Base, 31 - Turntable, 32 - Ring-shaped frame;

[0038] 100 - Box body, 200 - Moving platform, 300 - Linkage lifting mechanism. Detailed implementation manners

[0039] In the prior art, since the power source of the linkage lifting mechanism is arranged outside the vacuum environment, the power source is connected to the linkage lifting mechanism through connecting structures such as pipelines. For example, the driving member of the lifting structure is a cylinder, and the driving air source of the cylinder is located outside the equipment. When the linkage lifting mechanism is installed on a fixed platform, the above structural layout can be achieved; however, when the linkage lifting mechanism is installed on a moving platform, the connecting structures such as pipelines connecting the inside and outside will also move accordingly, which will easily cause problems such as entanglement of the internal components of the equipment, and further lead to difficulties in the layout of the linkage lifting mechanism.

[0040] Based on the above analysis, the present application proposes a new linkage lifting mechanism. The linkage lifting mechanism adopts a mechanical motor drive, and the power source is integrated into the linkage lifting mechanism, so that the linkage lifting mechanism and its power source can be installed on the moving platform together, that is, the entire linkage lifting mechanism is installed in the vacuum environment inside the equipment. Such a setting can eliminate the connecting structures such as pipelines connecting the inside and outside, and it is easy to realize the layout of the linkage lifting mechanism; moreover, since there is no need to set aside and avoid the movement of the connecting structures such as pipelines, the linkage lifting mechanism and other mechanisms can be integrated at the same height, reducing the stacking of mechanisms and making the space occupation more compact.

[0041] The present invention will be further described in detail below in conjunction with the accompanying drawings through specific embodiments. Similar elements in different embodiments are labeled with related similar element numbers. In the following embodiments, many details are described to enable a better understanding of the present application. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, or methods. In some cases, some operations related to the present application are not shown or described in the specification, which is to avoid the core part of the present application being submerged by excessive description. For those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0042] In addition, the features, operations, or characteristics described in the specification can be combined in any appropriate manner to form various embodiments. At the same time, the steps or actions in the method description can also be reordered or adjusted in an obvious manner by those skilled in the art. Therefore, the various sequences in the specification and drawings are only for clearly describing a certain embodiment, and do not mean that they are the necessary sequences, unless it is stated that a certain sequence must be followed.

[0043] The serial numbers assigned to the components in this article, such as "first", "second", etc., are only used to distinguish the described objects and do not have any sequential or technical meaning. The "connection" and "coupling" mentioned in the present application, unless otherwise specified, both include direct and indirect connection (coupling).

[0044] Surface inspection involves acquiring images of the surface of a workpiece to be measured through an imaging system and analyzing them using corresponding algorithms, enabling defect detection of the surface of the workpiece. In semiconductor production, the workpiece to be measured can include wafers, and surface defect detection is required for the front side of the wafers. In some cases, the inspection of wafers needs to be carried out in a vacuum environment, and a corresponding carrier device is also required for support and fixation. When the robot arm places the wafer on the carrier device, a linkage lifting mechanism is also needed to transfer the wafer from the robot arm to the carrier device. To meet the positioning requirements of the wafer, the carrier device needs to be set as a moving platform along the x-y axis, and the linkage lifting mechanism will move along with the moving platform. Therefore, the entire linkage lifting mechanism needs to be installed on the moving platform in the vacuum environment to achieve the layout of the linkage lifting mechanism and a compact stacked structure.

[0045] In one embodiment, a linkage lifting mechanism is provided. This linkage lifting mechanism is a mechanism in the inspection equipment for supporting the lifting of wafers. When rising, it can receive the wafer from the robot arm and provide temporary support, and when descending, it can make the wafer fall smoothly onto the carrier platform (also known as the CHUCK). This linkage lifting mechanism uses a motor and mechanical transmission to drive multiple support members to lift simultaneously, enabling the power source and corresponding transmission mechanism of the linkage lifting mechanism to be assembled together and installed on the moving platform in the vacuum environment, thus facilitating the layout of the linkage lifting mechanism. Moreover, since there is no need to set up moving connection structures such as staggered avoidance pipes, the linkage lifting mechanism can be integrated with other mechanisms at the same height, reducing the stacked structure of the mechanisms and occupying a more compact space.

[0046] Please refer to Figures 1 to 4 , the linkage lifting mechanism of this embodiment mainly includes a support component 1 and a lifting drive component 2. The linkage lifting mechanism may also include a base 3. The support component 1 is installed on the base 3 in a liftable manner, and the lifting drive component 2 is installed on the base 3. The linkage lifting mechanism may also not include the base 3, and the support component 1 and the lifting drive component 2 may also be installed on the moving platform.

[0047] In this embodiment, the support component 1 includes at least three support members 11, preferably three support members 11. The three support members 11 are vertically distributed at the three vertices of an equilateral triangle, and the three vertices can form a support surface, which can avoid overconstraint. The support member 11 is a rod-shaped structure. One end of the support member 11 is a support end, and the support end is used to support and abut against workpieces such as wafers. The support ends of the three support members 11 form three points, and the three points are located in a horizontal plane to jointly support the horizontally placed wafer. In other embodiments, the support component 1 may also include four support members 11 or other numbers of support members 11. The four support members 11 are vertically distributed at the four vertices of a square, and can also achieve the support of the wafer.

[0048] In this embodiment, a PIN needle ejector rod or other flexible structure terminals can be installed at the supporting end of the support member 11, so that the supporting end of the support member 11 is in flexible contact with the wafer, which can avoid scratching the wafer when the support member 11 supports the wafer to move up and down.

[0049] The lifting drive assembly 2 is connected to at least three support members 11, that is, the lifting drive assembly 2 is connected to all the support members 11. The lifting drive assembly 2 is used to drive all the support members 11 to rise or fall simultaneously. All the support members 11 are connected to the lifting drive assembly 2, which can realize the synchronous rise or fall of all the support members 11, and further improve the more stable rise or fall of the wafer to be measured.

[0050] The lifting drive assembly 2 includes a rotation drive member 21, a first rotating member 22 and a second rotating member 23 connected in sequence.

[0051] The rotation drive member 21 can be a rotary motor, and the rotary motor has an output shaft, and the output shaft of the rotary motor outputs a rotary pair. The rotation drive member 21 can be installed on the base 3 through a drive mount 24. The drive mount 24 is a frame structure. The drive mount 24 can include a bottom plate 241, a top plate 242 and support columns 243. The bottom plate 241 and the top plate 242 are arranged in parallel at intervals. The bottom plate 241 is connected to the outer circumferential surface of the base 3, and the top plate 242 is installed on the bottom plate 241 through a plurality of support columns 243. A space for accommodating other components is formed between the bottom plate 241 and the top plate 242. In other embodiments, the drive mount 24 can also be of other structures. For example, the drive mount 24 is a U-shaped structure tilted 90°. The upper end and the lower end of the drive mount 24 can form a support surface, and a space for avoiding other components can also be formed in the middle.

[0052] As Figure 1 shown, in this embodiment, the output shaft of the rotation drive member 21 is arranged vertically, and the output shaft of the rotation drive member 21 is arranged vertically downward. The main body part of the rotation drive member 21 can be fixed to the upper end of the top plate 242 by means of screws, welding, etc. The output shaft of the rotation drive member 21 passes through the top plate 242 from top to bottom and is located in the space between the top plate 242 and the bottom plate 241. The top plate 242 has a through hole for avoiding the output shaft of the rotation drive member 21. With such a layout, the main body part of the rotation drive member 21 can be located at the upper end of the drive mount 24, and is staggered in the vertical space with the bottom base 3, so that the rotation drive member 21 and components such as the support member 11 are located in the same height space, which can reduce the overall height occupied space of the linkage lifting mechanism.

[0053] In other embodiments, the output shaft of the rotary driving member 21 can also be horizontally arranged. The output shaft of the rotary driving member 21 is connected to a helical gear set to convert the horizontal rotation of the output shaft of the rotary driving member 21 into vertical rotation, which can also achieve the lifting drive of the support member 11.

[0054] In this embodiment, the first rotating member 22 belongs to a transmission component. The rotary driving member 21 can drive the second rotating member 23 to rotate through the first rotating member 22, and the rotation of the second rotating member 23 drives the support member 11 to rise or fall.

[0055] The second rotating member 23 is provided with at least three lifting guiding portions 231. The number of the lifting guiding portions 231 is the same as the number of the support members 11. The multiple lifting guiding portions 231 are connected to the multiple support members 11 in one-to-one correspondence. The support member 11 is slidably connected to the lifting guiding portion 231. One second rotating member 23 drives one support member 11 to rise or fall through the lifting guiding portion 231.

[0056] The base 3 is an annular base. The base 3 can be an integral structure, or the base 3 can also be composed of a combination of multiple annular structures. The annular second rotating member 23 is rotatably arranged on the base 3. The base 3 can be provided with a concave mounting table. The lower end of the annular second rotating member 23 can be rotatably connected to the mounting table of the base 3 through a transition structure such as a turntable 31, and the second rotating member 23 is fixedly connected to the turntable 31. The setting of the turntable 31 can improve the stability of the second rotating member 23, and at the same time, the turntable 31 can be used as a support surface for installing other components.

[0057] As Figure 1 shown, the second rotating member 23 is an annular body. The central axis of the annular body is vertically arranged, and the lifting guiding portion 231 is arranged on the circumferential outer side surface of the annular body. The second rotating member 23 is arranged in an annular body structure, which increases the area of the circumferential outer side surface of the second rotating member 23, so that the lifting guiding portion 231 has a larger distribution area. A longer transition line can be arranged between the highest point and the lowest point of the lifting guiding portion 231, which can realize a more gentle rise or fall of the support member 11, and further improve the smoothness of the rise or fall of the wafer to be measured.

[0058] Among them, the annular body can be provided with a notch for avoiding other components. The notch is located between two lifting guiding portions 231, which does not affect the driving of the support member 11 to rise or fall by the lifting guiding portion 231.

[0059] Three support members 11 are arranged on the circumferential outer side of the annular body. The support member 11 is slidably connected to the lifting guiding portion 231 on the circumferential outer side surface of the annular body. The support member 11 is arranged on the outer side of the annular body, and can be staggered from other components inside the annular body. If no other components are arranged inside the annular body, the support member 11 can also be arranged inside the annular body.

[0060] In other embodiments, the second rotating member 23 may include at least three arc-shaped bodies, which are arranged at intervals on a circumference. The multiple arc-shaped bodies may have the same size, and a lifting guide portion 231 is provided on the outer side surface of each arc-shaped body. The multiple arc-shaped bodies may also have different sizes, and a lifting guide portion 231 is provided on some of the arc-shaped bodies, and two lifting guide portions 231 may be provided on some other arc-shaped bodies. The three arc-shaped bodies are respectively fixedly connected to the turntable 31, and the three arc-shaped bodies are connected through the turntable 31, so that the three second rotating members 23 can rotate synchronously, thereby driving the three supporting members 11 to rise or fall synchronously. The second rotating member 23 adopts a structure of multiple arc-shaped bodies, and can also realize driving the three supporting members 11 to rise or fall synchronously.

[0061] In this embodiment, the first rotating member 22 includes a circular gear 221 and an arc-shaped rack 222 that are meshed and connected. The circular gear 221 is connected to the output shaft of the rotation driving member 21. The radian of the arc-shaped rack 222 is the same as the radian of the outer surface of the circumferential body formed by the three second rotating members 23. The arc-shaped rack 222 can be fixed to the outer surface of the circumferential body formed by the second rotating member 23 by means of screws, welding, etc. Among them, the length of the arc-shaped rack 222 only needs to be greater than the circumferential distance between the two ends of the lifting guide portion 231.

[0062] In this embodiment, the lifting guide portion 231 may be a parabolic or arc structure located on a curved surface. The lifting guide portion 231 includes a first end 2311 and a second end 2312. In the vertical direction, the first end 2311 is higher than the second end 2312, that is, the first end 2311 is the highest end and the second end 2312 is the lowest end. There is a smoothly transitioning parabolic or arc structure between the first end 2311 and the second end 2312. A cam follower 12 is installed at the lower end (the end far from the supporting end) of the supporting member 11. The cam follower 12 is a pulley installed at the lower end of the supporting member 11. The diameter of the cam follower 12 is adapted to the width of the lifting guide portion 231. The cam follower 12 is slidably installed in the lifting guide portion 231. The lifting guide portion 231 is respectively on the vertical side surfaces. The lifting guide portion 231 has an upper inner side surface and a lower inner side surface. The cam follower 12 contacts the upper inner side surface and the lower inner side surface of the lifting guide portion 231. The cam follower 12 can roll along the upper inner side surface and the lower inner side surface of the lifting guide portion 231, thereby driving the supporting member 11 to rise or fall.

[0063] Among them, the first end 2311 and the second end 2312 of the lifting and guiding part 231 can be set as horizontal grooves, so that when the cam follower 12 slides to the first end 2311 or the second end 2312, it can be in a relatively stable state, which can avoid the accidental sliding of the cam follower 12 relative to the lifting and guiding part 231. In other words, it can improve the stability of the support member 11 in the highest position and the lowest position.

[0064] When the three second rotating members 23 are connected into an integral ring body, the first end 2311 and the second end 2312 of the lifting and guiding part 231 can be set with a larger spacing to lengthen the stroke between the first end 2311 and the second end 2312. In the case of rising or falling at the same height, lengthening the rolling stroke can reduce the rising or falling speed, thereby improving the smoothness of the rising or falling of the support member 11.

[0065] An annular frame 32 can be installed at the upper end of the base 3, and the ring body formed by the second rotating members 23 is located inside the annular frame 32.

[0066] The support assembly 1 further includes at least three support mounting brackets 13. The number of support mounting brackets 13 is the same as the number of support members 11, and one support mounting bracket 13 is used to mount one support member 11. The lower end of the support mounting bracket 13 can be fixed to the annular frame 32 by means of screw connection, welding, clamping, etc. The support mounting bracket 13 and the annular frame 32 can also be an integral structure. The support member 11 is liftably mounted on the support mounting bracket 13, and the support mounting bracket 13 is used to limit the freedom of movement of the support member 11 in the horizontal plane, so that when the cam follower 12 on the support member 11 slides relative to the lifting and guiding part 231, the support member 11 cannot rotate with the ring body and can only move up and down relative to the support mounting bracket 13.

[0067] In this embodiment, the lifting drive principle of the linkage lifting mechanism is as follows:

[0068] When the support member 11 rises: the rotary drive member 21 drives the circular gear 221 to rotate, the circular gear 221 drives the arc-shaped rack 222 to rotate, the arc-shaped rack 222 drives the integral second rotating member 23 to rotate, that is, drives the three lifting and guiding parts 231 to rotate at the same time, and the three lifting and guiding parts 231 respectively drive the three cam followers 12 to roll, thereby driving the three support members 11 to rise synchronously.

[0069] When the support member 11 descends: the rotary drive member 21 drives the circular gear 221 to rotate in the reverse direction, and it can drive the three support members 11 to descend synchronously.

[0070] For the linkage lifting mechanism of this embodiment, since the lifting drive assembly 2 includes a rotary drive member 21, a first rotary member 22, and a second rotary member 23, the rotary drive member 21 can drive at least three second rotary members 23 to rotate synchronously through the first rotary member 22, so as to drive at least three support members 11 to rise or fall synchronously; the lifting drive assembly 2 uses a mechanical structure of rotary transmission drive, enabling the linkage lifting mechanism to be installed as a whole in the vacuum detection cavity of the detection device. That is, for the linkage lifting mechanism with this structure, the power source can be installed in the vacuum detection cavity, and connection structures such as pipes connecting inside and outside the vacuum detection cavity can be omitted. Therefore, this linkage lifting mechanism can be relatively easily arranged on the moving platform in the vacuum detection cavity to realize the lifting and support of the wafer to be tested; moreover, since there is no need to set up moving structures such as staggered pipes for avoidance, the linkage lifting mechanism can be integrated with other mechanisms at the same height, reducing the stacking of mechanisms and making the space occupation more compact.

[0071] Please refer to Figure 3 , the lifting guide part 231 is a parabolic groove. At the same height difference, the travel trajectory L of the lifting guide part 231 is extended, which can realize the smooth movement of the support member 11 with equal acceleration or equal deceleration, and realize the smooth rise or fall of the support member 11.

[0072] Please refer to Figure 4 , in one embodiment, on the side of the support mounting frame 13 facing the center of the base 3, there is a guiding and limiting member 14. The guiding and limiting member 14 has a lifting movement channel. The guiding and limiting member 14 can include four or other numbers of rollers. The four rollers are arranged in two vertical columns, and a vertical lifting movement channel is formed between the four rollers in the two vertical columns. The support member 11 is installed in the lifting movement channel between the four rollers in the two vertical columns. The four rollers limit the support member 11, and the support member 11 cannot move left and right or forward and backward relative to the support mounting frame 13. The support member 11 can rise or fall along the rollers. The guiding and limiting member 14 is set as a roller structure, which can not only play a role in limiting and guiding, but also reduce the friction with the support member 11, and can avoid the influence of guiding on the rise or fall of the support member 11.

[0073] In other embodiments, the guiding and limiting member 14 can also be a guiding cylinder, and the support member 11 is installed in the guiding cylinder, which can also realize the lifting and guiding of the support member 11.

[0074] Please refer to Figure 4, In one embodiment, the support mounting bracket 13 can be an inverted L-shaped structure. The support mounting bracket 13 includes a first mounting bracket 131 and a second mounting bracket 132. The first mounting bracket 131 and the second mounting bracket 132 can be rod-shaped or block-shaped structures. The first mounting bracket 131 is vertically mounted on the annular bracket 32, and the guiding and limiting member 14 is arranged on the vertical side surface of the first mounting bracket 131. The second mounting bracket 132 is horizontally arranged. One end of the second mounting bracket 132 is fixedly connected to the first mounting bracket 131, and the other end of the second mounting bracket 132 extends above the inner side of the annular body. A vertical mounting hole is further provided at the other end of the second mounting bracket 132.

[0075] The support member 11 is a Z-shaped structure. The support member 11 includes a first rod 111, a second rod 112, and a third rod 113. The first rod 111, the second rod 112, and the third rod 113 are connected in sequence. The first rod 111 and the third rod 113 are vertically arranged, and the second rod 112 is horizontally arranged. A cam follower 12 is provided at the lower end of the first rod 111. The first rod 111 is parallel to the first mounting bracket 131, and the first rod 111 is slidably connected to the guiding and limiting member 14 on the first mounting bracket 131. The second rod 112 is parallel and located below the second mounting bracket 132. The third rod 113 passes through the mounting hole of the second mounting bracket 132. The upper end of the third rod 113 is the supporting end of the support member 11. The mounting hole of the second mounting bracket 132 can also play a role in limiting and guiding the support member 11. Among them, the second rod 112 can also be inclined, as long as the first rod 111 and the third rod 113 are vertically arranged, and the vertical lifting movement of the support member 11 can also be realized.

[0076] The first rod 111, the second rod 112, and the third rod 113 can be formed by vertically bending a rod twice, or the first rod 111, the second rod 112, and the third rod 113 can also be fixedly connected by means of screw connection, welding, etc.

[0077] The support member 11 is set as a Z-shaped structure, and the support mounting bracket 13 is set as an inverted L-shaped structure. The lower end of the support mounting bracket 13 is located on the first circumference, and the upper end of the support mounting bracket 13 is located on the second circumference. The first circumference is larger than the second circumference, so that the lower ends of the three support members 11 are fixed to the outside of the second rotating member 23, and the supporting ends of the three support members 11 are located above the inner side of the second rotating member 23. The support member 11 can avoid the installation of other components inside the second rotating member 23, and can also realize the support of smaller-sized wafers to be measured.

[0078] In other embodiments, the support member 11 and the support mounting bracket 13 can also be set as vertical rod-shaped structures, and the supporting ends of the three support members 11 are located within a larger circumference to support larger-sized wafers to be measured.

[0079] Please refer to Figures 5 to 8, In one embodiment, a linkage lifting mechanism is provided. The difference between this linkage lifting mechanism and the above embodiment lies in that the first rotating member 22 and the second rotating member 23 are different.

[0080] In this embodiment, the first rotating member 22 is a multi-stage gear structure, and the second rotating member 23 is at least three spaced apart from each other and distributed on the same circumference. The first rotating member 22 synchronously drives the second rotating member 23 to rotate through the multi-stage gear, so as to drive at least three supporting members 11 to rise or fall.

[0081] The first rotating member 22 includes a first gear 223, a second gear 224 and a third gear 225. The first gear 223 is connected to the output shaft of the rotation driving member 21. The second gear 224 is a large annular gear. There are at least three third gears 225, and the number of the third gears 225 is the same as the number of the supporting members 11. As Figure 5 shown, the first gear 223 is meshed and connected with the second gear 224. Three third gears 225 are connected to the outer circumference of the second gear 224, and the second gear 224 is meshed and connected with the three third gears 225. The rotation of the first gear 223 drives the second gear 224 to rotate, and the second gear 224 then drives the three third gears 225 to rotate synchronously.

[0082] The second rotating member 23 is a cylindrical structure. The lifting guiding portion 231 penetrates and extends from the inner side surface of the cylindrical body to the outer side surface of the cylindrical body. The lifting guiding portion 231 is a spiral structure, and the lifting guiding portion 231 is spirally arranged along the axial direction of the cylindrical body. Similarly, the first end 2311 of the lifting guiding portion 231 is located at the upper end, and the second end 2312 is located at the lower end. The arrangement that the lifting guiding portion 231 penetrates the cylindrical body enables the cylindrical body to adopt a structure with a thinner wall thickness, so as to reduce the weight and cost of the product. If the cylindrical body adopts a structure with a larger wall thickness, the lifting guiding portion 231 can also be arranged on the inner side surface of the cylindrical body without penetrating the cylindrical body.

[0083] The second rotating member 23 can be provided with two lifting guiding portions 231 distributed symmetrically about the center. The two lifting guiding portions 231 are wound parallel to each other. Two symmetric cam followers 12 are provided at the lower end of the supporting member 11, and the two cam followers 12 are connected to the two lifting guiding portions 231 in a one-to-one correspondence. The two cam followers 12 rise or fall synchronously along the lifting guiding portions 231. The second rotating member 23 is provided with two lifting guiding portions 231, which can improve the stability of the sliding connection with the supporting member 11, and further improve the stability of the rising or falling of the supporting member 11. In other embodiments, the second rotating member 23 can also drive the supporting member 11 to rise or fall by providing one lifting guiding portion 231.

[0084] A connecting shaft 232 is provided at the lower end of the second rotating member 23, and the connecting shaft 232 is used for fixedly connecting the third gear 225.

[0085] The lower end of the second rotating member 23 can be fixedly connected to the third gear 225 by means of threaded connection, welding machine, etc. The central axes of the second rotating member 23 and the third gear 225 overlap, and the third gear 225 can drive the second rotating member 23 to rotate.

[0086] An installation cavity is formed in the middle of the second rotating member 23 with a cylindrical structure. The lower end (the first support member 111) of the support member 11 is arranged in the installation cavity, and the cam follower 12 on the support member 11 is slidably connected to the lifting guide portion 231.

[0087] In this embodiment, the first mounting frame 131 of the support mounting frame 13 can be provided with two fixing plates 133, and the two fixing plates 133 are horizontally and fixedly spaced on the same side of the first mounting frame 131. The two fixing plates 133 have through holes axially aligned vertically. The second rotating member 23 with a cylindrical structure is installed in the through holes of the two fixing plates 133 and can rotate relative to the through holes. The second rotating member 23 with a cylindrical structure can be rotatably connected to the two fixing plates 133 through a rotating structure such as a bearing.

[0088] In this embodiment, the lifting drive principle of the linkage lifting mechanism is as follows:

[0089] When the support member 11 rises: The rotation drive member 21 drives the first gear 223 to rotate, the first gear 223 drives the second gear 224 to rotate, the second gear 224 drives the three third gears 225 to rotate, and then drives the second rotating member 23 to rotate, that is, drives the three lifting guide portions 231 to rotate at the same time. The three lifting guide portions 231 respectively drive the three cam followers 12 to roll, and then drive the three support members 11 to rise synchronously.

[0090] When the support member 11 descends: The rotation drive member 21 drives the circular gear 221 to rotate in the reverse direction, and the synchronous descent of the three support members 11 can be realized.

[0091] The linkage lifting mechanism of this embodiment has a lifting drive component 2 including a rotary drive component 21, a first rotary component 22 and a second rotary component 23. The rotary drive component 21 can drive at least three second rotary components 23 to rotate synchronously through the first rotary component 22, so as to drive at least three support components 11 to rise or fall synchronously. The lifting drive component 2 adopts a rotary transmission drive of a mechanical structure, so that the linkage lifting mechanism can be installed as a whole in the vacuum detection chamber of the detection equipment, that is, the linkage lifting mechanism of this structure can install the power source in the vacuum detection chamber, and can eliminate the pipes and other connecting structures connecting the inside and outside of the vacuum detection chamber. Therefore, the linkage lifting mechanism can be more easily arranged on the motion platform in the vacuum detection chamber to realize the lifting support of the wafer waiting for testing. Moreover, since there is no need to set up the movement of the connecting structures such as the staggered avoidance pipes, the linkage lifting mechanism and other mechanisms can be integrated into the same height, reducing the stacking of the mechanisms and making the space occupation more compact.

[0092] Please refer to Figure 9 In one embodiment, a detection device is provided, which can be a wafer surface defect detection device.

[0093] In this embodiment, the detection device includes a box 100, a motion platform 200, and the linkage lifting mechanism 300 in any of the above embodiments. The detection device may also be provided with a carrying mechanism, an imaging mechanism, a manipulator, and other mechanisms.

[0094] The box 100 has a vacuum detection chamber, and other mechanisms such as the motion platform 200 and the linkage lifting mechanism 300 are installed in the vacuum detection chamber of the box 100. The wafer waiting to be tested is tested in a vacuum environment to improve the accuracy of the test.

[0095] The motion platform 200 can perform planar motion translation along the XY axis. The linkage lifting mechanism 300 is integrally fixedly mounted on the motion platform 200 , and the linkage lifting mechanism 300 can move along with the motion platform 200 .

[0096] In this embodiment, the principle process of the transport wafer detection of the linkage lifting mechanism 300 is as follows:

[0097] The robot first transfers the wafer to be tested to the top of the carrier and stops it;

[0098] The support member 11 of the linkage lifting mechanism 300 passes through the carrying mechanism and rises to receive the wafer, and the robot arm then withdraws;

[0099] The supporting member 11 of the linkage lifting mechanism 300 descends to transfer the wafer to the carrying surface of the carrying mechanism and separates from the wafer;

[0100] The carrier mechanism opens the vacuum adsorption, clamping components and other fixing structures to fix the wafer on the carrier surface to complete the fixation of the wafer;

[0101] The imaging mechanism takes photos and detects the wafer fixed on the carrying mechanism.

[0102] Before the imaging mechanism takes pictures for detection, the motion platform 200 can also be used to drive the wafer plane to move to an accurate detection area.

[0103] In this embodiment, the linkage lifting mechanism 300 adopts a rotary transmission drive of a mechanical structure, so that the linkage lifting mechanism 300 can be installed as a whole in the vacuum detection chamber of the detection equipment, that is, the linkage lifting mechanism 300 of this structure can install the power source in the vacuum detection chamber, and can eliminate the pipes and other connecting structures connecting the inside and outside of the vacuum detection chamber. Therefore, this linkage lifting mechanism 300 can be more easily arranged on the motion platform in the vacuum detection chamber to realize the lifting and lowering support of the wafer waiting for testing; and since there is no need to set up staggered avoidance pipes and other connecting structures, the linkage lifting mechanism and other mechanisms can be integrated into the same height, reducing the stacking of mechanisms and making the space occupancy more compact.

[0104] The above specific examples are used to illustrate the present invention, which is only used to help understand the present invention and is not intended to limit the present invention. For those skilled in the art, according to the concept of the present invention, some simple deductions, modifications or substitutions can be made.

Claims

1. A linkage lifting mechanism, characterized in that, Comprising: A support component, including at least three support members having support ends, the support ends of at least three of the support members being located in a plane, and at least three of the support members being used to jointly support the component to be measured; And A lifting drive component, including a rotary drive member, a first rotary member, and a second rotary member connected in sequence. The second rotary member is provided with at least three lifting guide portions, and at least three of the support members are slidably connected to at least three of the lifting guide portions in a one-to-one correspondence. During lifting drive, the rotary drive member drives the first rotary member to rotate, the rotation of the first rotary member drives the second rotary member to rotate synchronously, and at least three lifting guide portions of the second rotary member drive at least three of the support members to rise or fall synchronously.

2. The linkage lifting mechanism according to claim 1, characterized in that, The second rotary member is an annular body, and the lifting guide portions are provided on the outer side surface or the inner side surface of the annular body.

3. The linkage lifting mechanism according to claim 1, wherein, The second rotary member includes at least three arc-shaped bodies distributed on the same circumference, and one or more of the lifting guide portions are provided on the outer side surface or the inner side surface of the arc-shaped body.

4. The linkage lifting mechanism according to claim 2 or 3, characterized in that, The lifting guide portion is a guide groove or a guide hole located on a curved surface, the guide groove or the guide hole is a parabolic or arc structure, the lifting guide portion includes a first end and a second end, and in the vertical direction, the first end is higher than the second end; when the support member slides to be connected to the first end, the support member is at the highest position, and when the support member slides to be connected to the second end, the support member is at the lowest position.

5. The linkage lifting mechanism according to claim 4, wherein One end of the support member away from the support end is provided with a cam follower, and the support member is slidably connected to the lifting guide portion through the cam follower.

6. The linkage lifting mechanism according to claim 2 or 3, wherein The linkage lifting mechanism further includes at least three support mounting brackets, and each of the support members is liftably mounted on one of the support mounting brackets.

7. The linkage lifting mechanism according to claim 6, wherein The support mounting bracket is provided with a guiding and limiting member, the guiding and limiting member has a lifting movement channel, a part of the support member is located in the lifting movement channel, and the support member moves up and down along the lifting movement channel.

8. The linkage lifting mechanism according to claim 7, characterized in that, The support mounting bracket includes a first mounting bracket and a second mounting bracket. The first mounting bracket is vertically arranged outside the second rotary member, the second mounting bracket is horizontally arranged, one end of the second mounting bracket is connected to the upper end of the first mounting bracket, the end of the second mounting bracket away from the first mounting bracket extends to the inner side of the second rotary member and is provided with a mounting hole, and the guiding and limiting member is arranged on the first mounting bracket; the support member passes through the mounting hole.

9. The linkage lifting mechanism according to claim 8, characterized in that, The support member includes a first rod, a second rod, and a third rod connected in sequence. The first rod and the third rod are vertically arranged, the second rod is horizontally or obliquely arranged, a part of the first rod is located in the lifting movement channel, and a part of the third rod is located in the mounting hole.

10. The linkage lifting mechanism according to claim 1, characterized in that, The first rotary member includes a spur gear and an arc-shaped rack that are meshed and connected. The spur gear is connected to the rotary drive member, the arc-shaped rack is arranged on the outer side surface of the second rotary member, and the rotary drive member drives the second rotary member to rotate through the spur gear and the arc-shaped rack in sequence.

11. The linkage lifting mechanism according to claim 1, characterized in that, The second rotating member is a cylindrical body, and the lifting guiding portion is disposed on the inner side surface of the cylindrical body, or the lifting guiding portion penetrates from the inner side surface of the cylindrical body to the outer side surface of the cylindrical body.

12. The linkage lifting mechanism according to claim 11, characterized in that, The lifting guiding portion is a spiral structure; and / or, each of the cylindrical bodies is provided with two lifting guiding portions that are centrosymmetric, and two cam followers are installed at one end of the support member away from the support end, and the two cam followers are slidably connected to the two lifting guiding portions in a one-to-one correspondence.

13. The linkage lifting mechanism according to claim 11, wherein, The first rotating member includes a first gear, a second gear, and a third gear. The first gear is connected to the rotation driving member. There are at least three third gears. The first gear is meshed with the second gear, the second gear is meshed with at least three third gears, and at least three third gears are connected to at least three cylindrical bodies in a one-to-one correspondence. The rotation driving member drives the cylindrical body to rotate through the first gear, the second gear, and the third gear in sequence.

14. A detection device, characterized in that, Comprising: a box body having a vacuum detection cavity; a moving platform disposed in the vacuum detection cavity; a linkage lifting mechanism as described in any one of claims 1 to 13 disposed in the vacuum detection cavity. The linkage lifting mechanism is disposed on the moving platform, and the moving platform is used to drive the linkage lifting mechanism to move.

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