Method and system for cleaning filter tank of single crystal furnace

Abstract

The invention provides a single crystal furnace filter tank cleaning method and system, and the method comprises the following steps: carrying out back flushing on a filter bag, so that dust in the filter bag falls into a dust storage bin; and blowing the ash storage bin and / or extracting the ash storage bin to enable the dust to enter an ash conveying pipeline. The system comprises a first air inlet pipeline, a dust conveying pipeline, a second air inlet pipeline and / or an extraction device, the first air inlet pipeline is connected with a filter tank and used for back flushing a filter bag to enable dust in the filter bag to fall into a dust storage bin, the dust conveying pipeline is connected with the dust storage bin, the second air inlet pipeline is connected with the dust storage bin and used for purging the dust storage bin, and the extraction device is used for extracting dust from the dust storage bin. The extraction device is arranged on the ash conveying pipeline and used for extracting the ash storage bin so that the dust can enter the ash conveying pipeline. The automatic cleaning device has the beneficial effects that the automatic cleaning of the filter tank is realized, the cleaning effect is ensured, the working efficiency is improved, the potential safety hazard is avoided, and the labor cost is saved.

Description

Technical Field

[0001] The invention belongs to the technical field of production auxiliary equipment for single crystal furnaces, and particularly relates to a method and a system for cleaning a filter tank of a single crystal furnace. Background Art

[0002] The Czochralski method for growing single crystal silicon is the most widely used technology at present. During the production process of a single crystal furnace, a large amount of oxide dust is usually generated. In order to maintain the vacuum environment inside the single crystal furnace, a vacuum pump 3 is used to evacuate the single crystal furnace. In order to prevent the vacuum pump 3 from inhaling oxide dust and affecting its operation, a filter tank 1 is usually provided between the single crystal furnace and the vacuum pump 3, and a filter bag 2 is installed inside the filter tank 1 to filter the oxide dust. After long-term operation, a large amount of oxide dust will be deposited at the bottom of the filter bag 2 and the ash storage bin 4. If the cleaning is not timely, it will affect the normal operation of the single crystal furnace. In the prior art, it is usually necessary to manually clean after the furnace is stopped. The process is cumbersome and time-consuming, there are safety hazards, the work efficiency is low, and if the cleaning is not timely, the single crystal furnace cannot operate normally, affecting the normal production of single crystals. Summary of the Invention

[0003] In order to solve the above technical problems, the invention provides a method and a system for cleaning a filter tank of a single crystal furnace, effectively solving the problems of difficult cleaning of the filter tank and low work efficiency, and overcoming the deficiencies of the prior art.

[0004] The technical solution adopted by the invention is: a method for cleaning a filter tank of a single crystal furnace, comprising the following steps:

[0005] Back-blow the filter bag to make the dust inside the filter bag fall off into the ash storage bin;

[0006] Purge the ash storage bin and / or extract the ash storage bin to make the dust enter the ash conveying pipeline.

[0007] Optionally, the ash conveying pipeline transports the dust to a collection device.

[0008] The invention also provides a system for cleaning a filter tank of a single crystal furnace, comprising:

[0009] A first air inlet pipeline, connected to the filter tank, for back-blowing the filter bag to make the dust inside the filter bag fall off into the ash storage bin;

[0010] An ash conveying pipeline, connected to the ash storage bin;

[0011] A second air inlet pipeline and / or an extraction device, the second air inlet pipeline is connected to the ash storage bin for purging the ash storage bin, and the extraction device is arranged on the ash conveying pipeline for extracting the ash storage bin to make the dust enter the ash conveying pipeline.

[0012] Optionally, a collecting device is provided at one end of the ash conveying pipeline away from the ash storage bin for collecting the dust.

[0013] Optionally, at least one first air blowing pipeline is provided along the circumferential direction of the filter bag at the end of the first air inlet pipeline connected to the filter tank, and the first air blowing pipeline is distributed along the height of the filter bag in the filter tank.

[0014] Optionally, at least one first air blowing pipeline is provided along the height of the filter bag at the end of the first air inlet pipeline connected to the filter tank, and the first air blowing pipeline is distributed along the circumferential direction of the filter bag in the filter tank.

[0015] Optionally, at least one air blowing hole is provided at the connection end of the second air inlet pipeline and the ash storage bin, and the air blowing hole is arranged on the side wall of the ash storage bin opposite to the ash conveying pipeline and / or the air blowing hole is arranged at the bottom of the ash storage bin.

[0016] Optionally, a second air blowing pipeline is provided at the connection end of the second air inlet pipeline and the ash storage bin, and the second air blowing pipeline is arranged in the ash storage bin for blowing the bottom of the ash storage bin downwards.

[0017] Optionally, a collecting groove is provided at the bottom of the ash storage bin, and the ash conveying pipeline is arranged at the bottom of the collecting groove.

[0018] Optionally, the connection end of the ash conveying pipeline and the ash storage bin is in a trumpet shape.

[0019] Optionally, at least one ash conveying branch pipeline is provided at one end of the ash conveying pipeline away from the ash storage bin, the extraction device is provided on the ash conveying branch pipeline, and the collecting device is provided at one end of the ash conveying branch pipeline away from the ash conveying pipeline.

[0020] [[ID=2 (24)]]The advantages and positive effects of the present invention are as follows: By adopting the above technical solution, automatic cleaning of the filter tank is achieved, the cleaning effect is ensured, the working efficiency is improved, effectively avoiding abnormalities such as poor exhaust of the single crystal furnace and uncontrollable furnace pressure caused by blockage of the filter bag due to dust accumulation during the operation of the single crystal furnace, avoiding potential safety hazards, and saving labor costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic flow chart of a method for cleaning a filter tank of a single crystal furnace according to an embodiment of the present invention.

[0022] Figure 2 is a schematic diagram of the overall structure of Embodiment 1 of a filter tank cleaning system for a single crystal furnace according to an embodiment of the present invention.

[0023] Figure 3 is a bottom view of the first air blowing pipeline of Embodiment 1 of a filter tank cleaning system for a single crystal furnace according to an embodiment of the present invention. Note: There seems to be a numbering issue in the original text where the "24" in the English translation of the last paragraph should probably be "24" as in the original Chinese text. I've adjusted the translation accordingly while keeping the format as per the instructions.

[0024] Figure 4 It is a schematic diagram of the overall structure of the second embodiment of a cleaning system for a single-crystal furnace filter tank according to an embodiment of the present invention.

[0025] Figure 5 It is a bottom-up view of the first blow pipe of the second embodiment of a cleaning system for a single-crystal furnace filter tank according to an embodiment of the present invention.

[0026] Figure 6 It is a schematic diagram of the overall structure of the third embodiment of a cleaning system for a single-crystal furnace filter tank according to an embodiment of the present invention.

[0027] Figure 7 It is a schematic diagram of the overall structure of the fourth embodiment of a cleaning system for a single-crystal furnace filter tank according to an embodiment of the present invention.

[0028] Figure 8 It is a schematic diagram of the distribution of blow holes of the fourth embodiment of a cleaning system for a single-crystal furnace filter tank according to an embodiment of the present invention.

[0029] Figure 9 It is a schematic diagram of the overall structure of the fifth embodiment of a cleaning system for a single-crystal furnace filter tank according to an embodiment of the present invention.

[0030] Figure 10 It is a top view of the second blow pipe of the fifth embodiment of a cleaning system for a single-crystal furnace filter tank according to an embodiment of the present invention.

[0031] In the figure:

[0032] 1. Filter tank 2. Filter bag 3. Vacuum pump

[0033] 4. Ash storage bin 5. First intake pipeline 6. Second intake pipeline

[0034] 7. Ash conveying pipeline 8. Collection device 9. First blow pipe

[0035] 10. Extraction device 11. Blow hole 12. First valve

[0036] 13. Second valve 14. Third valve 15. Collection tank

[0037] 16. Ash conveying branch pipeline 17. Fourth valve 18. Check valve

[0038] 19. Second blow pipe 20. Vacuum pump auxiliary pump Detailed implementation manners

[0039] The embodiments of the present invention provide a method and system for cleaning a single-crystal furnace filter tank. The embodiments of the present invention will be described below with reference to the accompanying drawings.

[0040] In the description of the embodiments of the present invention, it should be understood that the orientation or positional relationships indicated by terms such as "top", "bottom", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention. In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "arrangement" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood through specific circumstances.

[0041] As Figure 1 shown, a method for cleaning a filter tank of a single crystal furnace according to an embodiment of the present invention includes the following steps:

[0042] Backflush the filter bag 2 to make the dust inside the filter bag 2 fall off and enter the ash storage bin 4: Due to long-term use, excessive dust will accumulate on the surface of the filter bag 2 in the filter tank 1. If the dust is not cleaned, it will affect the normal use of the filter tank 1. Inert gas is used to backflush the filter bag 2 outside the filter bag 2 to make the dust separate from the filter bag 2 and enter the ash storage bin 4. The type of inert gas is not limited and can be nitrogen or argon. Preferably, nitrogen is used.

[0043] Purge the ash storage bin 4 and / or extract the ash storage bin 4 to make the dust enter the ash conveying pipeline 7: When the dust enters the ash storage bin 4, it will deposit inside the ash storage bin 4. The ash storage bin 4 can be extracted to make the dust enter the ash conveying pipeline 7. Or, inert gas is used to purge the ash storage bin 4 to make the dust enter the ash conveying pipeline 7. Or, while extracting the ash storage bin 4, inert gas is used to purge the ash storage bin 4, which is more conducive to the dust entering the ash conveying pipeline 7.

[0044] Preferably, in order to facilitate the treatment of oxides in the dust, the ash conveying pipeline 7 transports the dust to the collection device 8. An absorption solution is provided inside the collection device 8, and the absorption solution can absorb and store the dust. The type of absorption solution is not limited. Preferably, the absorption solution is set as an aqueous solution.

[0045] As Figure 2 , Figure 4 , Figure 6 , Figure 7 and Figure 9As shown in the figure, a cleaning system for a single crystal furnace filter tank includes a first air inlet pipeline 5, an ash conveying pipeline 7, a second air inlet pipeline 6 and / or an extraction device 10. The first air inlet pipeline 5 is connected to the filter tank 1 and is used to backflush the filter bag 2 so that the dust in the filter bag 2 falls off and enters the ash storage bin 4. The ash conveying pipeline 7 is connected to the ash storage bin 4. The second air inlet pipeline 6 is connected to the ash storage bin 4 and is used to purge the ash storage bin 4. The extraction device 10 is arranged on the ash conveying pipeline 7 and is used to extract the ash storage bin 4 so that the dust enters the ash conveying pipeline 7. In some embodiments, such as Figure 2 As shown in the figure, the system includes a first air inlet pipeline 5, an ash conveying pipeline 7 and a second air inlet pipeline 6, and the purge of the second air inlet pipeline 6 is used to make the dust enter the ash conveying pipeline 7; in some embodiments, such as Figure 6 As shown in the figure, the system includes a first air inlet pipeline 5, an ash conveying pipeline 7 and an extraction device 10, and the extraction device 10 is used to make the dust enter the ash conveying pipeline 7; in some embodiments, such as Figure 4 , Figure 7 and Figure 9 As shown in the figure, the system includes a first air inlet pipeline 5, an ash conveying pipeline 7, a second air inlet pipeline 6 and an extraction device 10. Through the purge of the second air inlet pipeline 6 and the extraction of the extraction device 10, it is more conducive to the dust entering the ash conveying pipeline 7.

[0046] Preferably, in order to facilitate the treatment of oxides in the dust, a collecting device 8 is provided at one end of the ash conveying pipeline 7 away from the ash storage bin 4 for collecting dust, storing the dust centrally, and facilitating subsequent centralized treatment. The specific form of the collecting device 8 is not limited and can be a collecting pool or a collecting box. An absorption solution is contained in the collecting device 8, which can absorb and store the dust.

[0047] Preferably, in some embodiments, such as Figure 2 , Figure 4 and Figure 9 As shown in the figure, in order to enhance the backflush effect of the filter bag 2, a first air blowing pipeline 9 is arranged along the circumferential direction of the filter bag 2 at one end of the first air inlet pipeline 5 connected to the filter tank 1, and can be specifically arranged in a ring shape. The first air blowing pipeline 9 is fixed inside the filter tank 1, and the number of the first air blowing pipelines 9 is not limited and can be one or more. A plurality of through holes are formed on the first air blowing pipeline 9. Since the first air blowing pipeline 9 is arranged along the circumferential direction of the filter bag 2, by arranging a plurality of through holes, air can be blown from multiple directions to ensure the backflush effect. As Figure 2 As shown in the figure, when the number of the first air blowing pipelines 9 is one, it is arranged at the top of the filter bag 2, and the specific opening position of the through hole is not limited, but needs to be opened towards the filter bag 2 to be able to backflush the filter bag 2. Preferably, as Figure 4 As shown in the figure, a plurality of connecting pipelines can be connected to the first air blowing pipeline 9 at the top of the filter bag 2, and through holes are also formed on the connecting pipelines to backflush the filter bag 2, so that the first air blowing pipeline 9 at the top of the filter bag 2 is in a net shape, increasing the air blowing area of the first air blowing pipeline 9. AsFigure 9 As shown, when the number of the first air blowing pipelines 9 is multiple, the multiple first air blowing pipelines 9 are fixedly distributed inside the filter tank 1 along the height of the filter bag 2, so that the whole filter bag 2 can receive purging, thereby further ensuring the purging effect. Preferably, the multiple first air blowing pipelines 9 are equally spaced along the height of the filter bag 2.

[0048] Specifically, in some embodiments, as Figure 6 shown, in order to enhance the backwashing effect of the filter bag 2, one end of the first air inlet pipeline 5 connected to the filter tank 1 is provided with a first air blowing pipeline 9 along the height of the filter bag 2, which can be specifically set as a straight pipe shape. The first air blowing pipeline 9 is fixed inside the filter tank 1, and the number of the first air blowing pipelines 9 is not limited, and can be one or multiple. A plurality of through holes are formed in the first air blowing pipeline 9, and purging can be performed along the height of the filter bag 2. The specific opening positions of the through holes are not limited, and the through holes need to be opened towards the filter bag 2 to ensure that the filter bag 2 can be purged. When the number of the first air blowing pipelines 9 is set to be multiple, the multiple first air blowing pipelines 9 are fixedly distributed inside the filter tank 1 along the circumferential direction of the filter bag 2. Preferably, the multiple first air blowing pipelines 9 are equally spaced along the circumferential direction of the filter bag 2.

[0049] Specifically, as Figure 2 、 Figure 4 and Figure 7 shown, at least one air blowing hole 11 is provided at the connection end of the second air inlet pipeline 6 and the ash storage bin 4. The air blowing hole 11 is arranged on the side wall of the ash storage bin 4 opposite to the ash conveying pipeline 7 and / or the air blowing hole 11 is arranged at the bottom of the ash storage bin 4. In some embodiments, as Figure 2 shown, the air blowing hole 11 is arranged on the side wall of the ash storage bin 4 opposite to the ash conveying pipeline 7, and the dust enters the ash conveying pipeline 7 through the purging of the ash storage bin 4. The number of the air blowing holes 11 can be set to be one or multiple. When multiple air blowing holes 11 are provided, the air blowing holes 11 can be arranged along the circumferential direction of the ash storage bin 4 or along the height of the ash storage bin 4. In some embodiments, as Figure 4 shown, the air blowing hole 11 is arranged at the bottom of the ash storage bin 4 to blow up the dust deposited at the bottom of the ash storage bin 4, facilitating the dust to enter the ash conveying pipeline 7. The number of the air blowing holes 11 can be set to be one or multiple. When multiple air blowing holes 11 are provided, preferably, the multiple air blowing holes 11 are evenly distributed at the bottom of the ash storage bin 4. In some embodiments, as Figure 7 shown, air blowing holes 11 are provided on both the side wall and the bottom of the ash storage bin 4, and the air blowing holes 11 on the side wall are arranged opposite to the ash conveying pipeline 7, which is more conducive to the dust in the ash storage bin 4 to enter the ash conveying pipeline 7.

[0050] Specifically, in some embodiments, as Figure 9As shown, a second air inlet pipeline 6 is provided with a second air blowing pipeline 19 at the connection end with the ash storage bin 4. The second air blowing pipeline 19 is arranged inside the ash storage bin 4 and is used for blowing down the bottom of the ash storage bin 4. The second air blowing pipeline 19 is arranged in a ring shape along the circumferential direction of the ash storage bin 4. A plurality of through holes are formed in the second air blowing pipeline 19 to blow down the bottom of the ash storage bin 4. The plurality of through holes are arranged along the second air blowing pipeline 19.

[0051] Specifically, in some embodiments, such as Figure 6 As shown, a collection trough 15 is fixed to the bottom of the ash storage bin 4, and the ash conveying pipeline 7 is arranged at the bottom of the collection trough 15. Preferably, the collection trough 15 is in a funnel shape. After the dust detaches from the filter bag 2, it enters the ash storage bin 4 and falls into the funnel-shaped collection trough 15. The dust can fall into the ash conveying pipeline 7 at the bottom by gravity.

[0052] Preferably, as Figure 2 、 Figure 4 、 Figure 7 and Figure 9 As shown, in order to facilitate the dust to enter the ash conveying pipeline 7, the connection end of the ash conveying pipeline 7 with the ash storage bin 4 is in a flared shape.

[0053] Specifically, as Figure 7 and Figure 9 As shown, at least one ash conveying branch pipeline 16 is provided at the end of the ash conveying pipeline 7 away from the ash storage bin 4, and an extraction device 10 is provided on the ash conveying branch pipeline 16. By arranging a plurality of ash conveying branch pipelines 16, the ash conveying efficiency can be improved. The extraction device 10 is specifically an extraction pump. A collection device 8 is provided at the end of the ash conveying branch pipeline 16 away from the ash conveying pipeline 7.

[0054] Preferably, a first valve 12 is provided on the first air inlet pipeline 5, and a second valve 13 is provided on the second air inlet pipeline 6 to control the on-off of the first air inlet pipeline 5 and the second air inlet pipeline 6. During cleaning, first open the first valve 12, and the first air inlet pipeline 5 intakes air to blow the filter bag 2 in the filter tank 1, so that the dust on the filter bag 2 falls into the ash storage bin 4. Then open the second valve 13, and the second air inlet pipeline 6 intakes air to blow the ash storage bin 4, so that the dust enters the ash conveying pipeline 7. The types of the first valve 12 and the second valve 13 are not limited, as long as they can control the on-off of the pipeline. Preferably, they are set as pneumatic ball valves.

[0055] Preferably, a third valve 14 is provided on the ash conveying pipeline 7 to control the on-off of the ash conveying pipeline 7. The type of the third valve 14 is not limited. Preferably, it is set as an electric ball valve.

[0056] Preferably, as Figure 7 and Figure 9As shown in the figure, a fourth valve 17 is provided on the ash conveying branch pipe 16 to control the on / off of the ash conveying branch pipe 16. By setting the fourth valve 17, the on / off of different ash conveying branch pipes 16 can be controlled. The fourth valve 17 is arranged at the suction end of the extraction device 10. When a certain ash conveying branch pipe 16 fails, the fourth valve 17 on this ash conveying branch pipe 16 can be closed for replacement and repair without affecting the use of other ash conveying branch pipes 16. The type of the fourth valve 17 is not limited as long as it can control the on / off of the pipeline, and it is preferably set as a pneumatic ball valve.

[0057] Preferably, a one-way check valve 18 is provided on the ash conveying branch pipe 16 to prevent dust from flowing back. One-way check valves 18 are arranged at both the suction end and the discharge end of the extraction device 10.

[0058] Preferably, the system further includes a vacuum pump auxiliary pump 20 for evacuating the single crystal furnace when cleaning the filter tank 1. When the single crystal furnace is operating normally, in order to ensure the furnace pressure and the crystal growth quality of the single crystal, the filter tank 1 cannot be cleaned during the equal diameter stage of the single crystal. In order to be able to clean the filter tank 1 during the non-equal diameter stage of the single crystal, achieve continuous production and improve production efficiency, a vacuum pump auxiliary pump 20 is arranged near the vacuum pump 3. When cleaning the filter tank 1 during the non-equal diameter stage, the vacuum pump 3 is stopped, and the single crystal furnace is switched to be connected to the vacuum pump auxiliary pump 20 to ensure the normal operation of the single crystal furnace.

[0059] Example 1: As Figure 2 and Figure 3 shown, a single crystal furnace filter tank cleaning system includes a first intake pipe 5, a second intake pipe 6, an ash conveying pipe 7 and a collection device 8. The first intake pipe 5 is connected to the filter tank 1, and a circular first air blowing pipe 9 is arranged along the circumference of the filter bag 2 at the connection end with the filter tank 1. The first air blowing pipe 9 is fixed above the filter bag 2. A plurality of through holes are opened on the first air blowing pipe 9 for blowing the filter bag 2 downward to make the dust separate from the filter bag 2 and enter the bottom ash storage bin 4. The opening positions of the through holes need to ensure that the filter bag 2 can be purged, and the through holes are opened in the direction towards the filter bag 2. The second intake pipe 6 is connected to the ash storage bin 4, and an air blowing hole 11 is provided at the connection end with the ash storage bin 4. The air blowing hole 11 is arranged on the side wall of the ash storage bin 4 opposite to the ash conveying pipe 7, and the dust enters the ash conveying pipe 7 by purging the ash storage bin 4. The connection end of the ash conveying pipe 7 with the ash storage bin 4 is in a flared shape. The end of the ash conveying pipe 7 far from the ash storage bin 4 is connected with a collection device 8. A first valve 12 is provided on the first intake pipe 5, a second valve 13 is provided on the second intake pipe 6, and a third valve 14 is provided on the ash conveying pipe 7. The first valve 12 and the second valve 13 are pneumatic ball valves, and the third valve 14 is an electric ball valve. The air sources of the first intake pipe 5 and the second intake pipe 6 are nitrogen.

[0060] Example 2: As Figure 4 and Figure 5As shown in the figure, a cleaning system for a single crystal furnace filter tank includes a first air inlet pipeline 5, a second air inlet pipeline 6, an ash conveying pipeline 7, an extraction device 10, and a collection device 8. The first air inlet pipeline 5 is connected to the filter tank 1, and a circular first air blowing pipeline 9 is provided along the circumference of the filter bag 2 at the connection end with the filter tank 1. The first air blowing pipeline 9 is fixed above the filter bag 2. A plurality of connecting pipelines are connected to the first air blowing pipeline 9, making the first air blowing pipeline 9 in a mesh shape. A plurality of through holes are opened on the first air blowing pipeline 9 and the connecting pipelines for blowing the filter bag 2 downward in the reverse direction, so that the dust is separated from the filter bag 2 and enters the bottom ash storage bin 4. The through holes opened at the bottom of the first air blowing pipeline 9 and the connecting pipelines must ensure that the filter bag 2 can be purged. The second air inlet pipeline 6 is connected to the ash storage bin 4, and an air blowing hole 11 is provided at the connection end with the ash storage bin 4. The air blowing hole 11 is arranged at the bottom of the ash storage bin 4. By providing the air blowing hole 11 at the bottom, the bottom of the ash storage bin 4 is purged, which is beneficial for the dust deposited at the bottom to enter the ash conveying pipeline 7. The ash conveying pipeline 7 is connected to one side of the ash storage bin 4, and the connection end of the ash conveying pipeline 7 with the ash storage bin 4 is in a flared shape. An extraction device 10 is installed on the ash conveying pipeline 7. The end of the ash conveying pipeline 7 far from the ash storage bin 4 is connected to a collection device 8. A first valve 12 is provided on the first air inlet pipeline 5, a second valve 13 is provided on the second air inlet pipeline 6, and a third valve 14 is provided on the ash conveying pipeline 7. The first valve 12 and the second valve 13 are pneumatic ball valves, and the third valve 14 is an electric ball valve. The air sources of the first air inlet pipeline 5 and the second air inlet pipeline 6 are nitrogen.

[0061] Example 3: As Figure 6 shown in the figure, a cleaning system for a single crystal furnace filter tank includes a first air inlet pipeline 5, an ash conveying pipeline 7, an extraction device 10, and a collection device 8. The first air inlet pipeline 5 is connected to the filter tank 1, and a plurality of straight tubular first air blowing pipelines 9 are connected along the height of the filter bag 2 at the connection end with the filter tank 1. The plurality of first air blowing pipelines 9 are evenly distributed and fixed inside the filter tank 1 along the circumference of the filter bag 2. A plurality of through holes are opened along the first air blowing pipeline 9, and the through holes are opened towards the filter bag and can be purged along the height of the filter bag 2. A funnel-shaped collection trough 15 is fixed at the bottom of the ash storage bin 4, and the bottom of the collection trough 15 is connected to the ash conveying pipeline 7. An extraction device 10 is installed on the ash conveying pipeline 7. The end of the ash conveying pipeline far from the ash storage bin 4 is connected to a collection device 8. A first valve 12 is provided on the first air inlet pipeline 5, and a third valve 14 is provided on the ash conveying pipeline 7. The first valve 12 is a pneumatic ball valve, and the third valve 14 is an electric ball valve. The air source of the first air inlet pipeline 5 is nitrogen.

[0062] Example 4: As Figure 7 and Figure 8As shown in the figure, a cleaning system for a single crystal furnace filter tank includes a first air inlet pipeline 5, a second air inlet pipeline 6, an ash conveying pipeline 7, an extraction device 10, and a collection device 8. The first air inlet pipeline 5 is connected to the filter tank 1 and is arranged at the top of the filter tank 1 to directly blow air into the filter tank 1 to purge the filter bag 2. The second air inlet pipeline 6 is connected to the ash storage bin 4, and a plurality of air blowing holes 11 are provided at the connection end with the ash storage bin 4. The air blowing holes 11 are arranged on the side wall and the bottom of the ash storage bin 4. The air blowing holes 11 located on the side wall are arranged opposite to the ash conveying pipeline 7. A plurality of air blowing holes 11 are provided on the side wall and are arranged along the circumferential direction of the ash storage bin 4. The air blowing holes 11 located at the bottom are arranged at the bottom of the ash storage bin 4. The air blowing holes 11 purge the side wall and the bottom of the ash storage bin 4, which is more conducive to the dust entering the ash conveying pipeline 7. The connection end of the ash conveying pipeline 7 with the ash storage bin 4 is in a flared shape. A plurality of ash conveying branch pipelines 16 are provided at one end of the ash conveying pipeline 7 far from the ash storage bin 4, and an extraction device 10 is provided on the ash conveying branch pipeline 16. One end of the ash conveying branch pipeline 16 far from the ash storage bin 4 is connected to a collection device 8. A first valve 12 is provided on the first air inlet pipeline 5, a second valve 13 is provided on the second air inlet pipeline 6, a third valve 14 is provided on the ash conveying pipeline 7, and a fourth valve 17 is provided on the ash conveying branch pipeline 16. The fourth valve 17 is arranged at the suction end of the extraction device 10. One-way check valves 18 are arranged at both the suction end and the discharge end of the extraction device 10. The system further includes a vacuum pump sub-pump 20, which is arranged close to the vacuum pump 3 and is used to evacuate the single crystal furnace when cleaning the filter tank 1. The first valve 12, the second valve 13, and the fourth valve 17 are all pneumatic ball valves, and the third valve 14 is an electric ball valve. The gas sources of the first air inlet pipeline 5 and the second air inlet pipeline 6 are nitrogen.

[0063] Example Five: As Figure 9 and Figure 10As shown in the figure, a cleaning system for the filter tank of a single crystal furnace includes a first air inlet pipeline 5, a second air inlet pipeline 6, an ash conveying pipeline 7, an extraction device 10, and a collection device 8. The first air inlet pipeline 5 is connected to the filter tank 1. At the connection end with the filter tank 1, a plurality of annular first air blowing pipelines 9 are provided along the circumference of the filter bag 2. The plurality of first air blowing pipelines 9 are uniformly fixed inside the filter tank 1 along the height of the filter bag 2. A plurality of through holes are provided along the first air blowing pipeline 9, and the through holes are oriented towards the filter bag, and can blow along the circumference of the filter bag 2. The second air inlet pipeline 6 is connected to the ash storage bin 4. At the connection end with the ash storage bin 4, a second air blowing pipeline 19 is provided. The second air blowing pipeline 19 is arranged inside the ash storage bin 4 and is used to blow down the bottom of the ash storage bin 4. The second air blowing pipeline 19 is arranged in a ring shape along the circumference of the ash storage bin 4. A plurality of through holes are provided on the second air blowing pipeline 19 to blow down the bottom of the ash storage bin 4. The plurality of through holes are uniformly arranged along the second air blowing pipeline 19. The ash conveying pipeline 7 is connected to one side of the ash storage bin 4. The connection end of the ash conveying pipeline 7 with the ash storage bin 4 is in a horn shape. A plurality of ash conveying branch pipelines 16 are provided at the end of the ash conveying pipeline 7 far from the ash storage bin 4. An extraction device 10 is provided on the ash conveying branch pipeline 16. The end of the ash conveying branch pipeline 16 far from the ash storage bin 4 is connected to a collection device 8. A first valve 12 is provided on the first air inlet pipeline 5, a second valve 13 is provided on the second air inlet pipeline 6, a third valve 14 is provided on the ash conveying pipeline 7, and a fourth valve 17 is provided on the ash conveying branch pipeline 16. The fourth valve 17 is arranged at the suction end of the extraction device 10. One-way check valves 18 are arranged at both the suction end and the discharge end of the extraction device 10. The system further includes a vacuum pump auxiliary pump 20, which is arranged close to the vacuum pump 3 and is used to evacuate the single crystal furnace when cleaning the filter tank 1. The first valve 12, the second valve 13, and the fourth valve 17 are all pneumatic ball valves, and the third valve 14 is an electric ball valve. The gas sources of the first air inlet pipeline 5 and the second air inlet pipeline 6 are nitrogen.

[0064] The advantages and positive effects of the present invention are as follows:

[0065] 1) The automatic cleaning of the filter tank is realized, ensuring the cleaning effect, improving the work efficiency, effectively avoiding abnormalities such as poor exhaust and uncontrollable furnace pressure of the single crystal furnace caused by blockage of the filter bag due to dust accumulation during the operation of the single crystal furnace, avoiding potential safety hazards, and saving labor costs;

[0066] 2) By setting the first air inlet pipeline and the second air inlet pipeline, the cleaning is more thorough, further ensuring the cleaning effect.

[0067] 3) By setting the collection device, the centralized collection and storage of dust are realized, facilitating subsequent centralized treatment.

[0068] The above has described the embodiments of the present invention in detail, but the above content is only the preferred embodiments of the present invention and cannot be considered as defining the scope of implementation of the present invention. All equivalent changes and improvements made according to the scope of the application of the present invention shall still fall within the scope covered by the patent of the present invention.

Claims

1. A method for cleaning a filter tank of a single crystal furnace, characterized in that Including the following steps: Backflush the filter bag to make the dust inside the filter bag fall off into the ash storage bin; Purge the ash storage bin and / or extract the ash storage bin to make the dust enter the ash conveying pipeline.

2. The method for cleaning a filter tank of a single crystal furnace according to claim 1, wherein: The ash conveying pipeline transports the dust to the collection device.

3. A cleaning system for a single crystal furnace filter tank, characterized in that, Comprising: A first air inlet pipeline, connected to the filter tank, for backflushing the filter bag to make the dust inside the filter bag fall off into the ash storage bin; An ash conveying pipeline, connected to the ash storage bin; A second air inlet pipeline and / or an extraction device, the second air inlet pipeline is connected to the ash storage bin for purging the ash storage bin, and the extraction device is arranged on the ash conveying pipeline for extracting the ash storage bin to make the dust enter the ash conveying pipeline.

4. A single crystal furnace filter tank cleaning system according to claim 3, characterized in that: One end of the ash conveying pipeline away from the ash storage bin is provided with a collection device for collecting the dust.

5. A cleaning system for a single crystal furnace filter tank according to claim 4, characterized in that: One end of the first air inlet pipeline connected to the filter tank is provided with at least one first air blowing pipeline along the circumference of the filter bag, and the first air blowing pipeline is distributed along the height of the filter bag in the filter tank.

6. The cleaning system for the single crystal furnace filter tank according to claim 4, characterized in that: One end of the first air inlet pipeline connected to the filter tank is provided with at least one first air blowing pipeline along the height of the filter bag, and the first air blowing pipeline is distributed along the circumference of the filter bag in the filter tank.

7. A single crystal furnace filter tank cleaning system according to any one of claims 3-6, characterized in that: The connection end of the second air inlet pipeline and the ash storage bin is provided with at least one air blowing hole, and the air blowing hole is arranged on the side wall of the ash storage bin opposite to the ash conveying pipeline and / or the air blowing hole is arranged at the bottom of the ash storage bin.

8. A single crystal furnace filter tank cleaning system according to any one of claims 3-6, characterized in that: The connection end of the second air inlet pipeline and the ash storage bin is provided with a second air blowing pipeline, and the second air blowing pipeline is arranged in the ash storage bin for purging the bottom of the ash storage bin downward.

9. The cleaning system for the single crystal furnace filter tank according to claim 4, wherein: The bottom of the ash storage bin is provided with a collection trough, and the ash conveying pipeline is arranged at the bottom of the collection trough.

10. A single crystal furnace filter tank cleaning system according to any one of claims 3-6 and 9, characterized in that: The connection end of the ash conveying pipeline and the ash storage bin is in a flared shape.

11. A single crystal furnace filter tank cleaning system according to any one of claims 4-6 and 9, characterized in that: One end of the ash conveying pipeline away from the ash storage bin is provided with at least one ash conveying branch pipeline, the extraction device is arranged on the ash conveying branch pipeline, and one end of the ash conveying branch pipeline away from the ash conveying pipeline is provided with the collection device.

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