Sprayer, chemical mechanical polishing machine and collecting method of sprayer

Abstract

The invention provides a sprayer, which is arranged above a workbench of a chemical mechanical polishing machine and comprises a main body, the nozzle is connected with the main body; the rotating mechanism is connected with the side wall of the main body and drives the main body to rotate to a set position; the circumferential position of the positioning mechanism is fixed, and the positioning mechanism is used for fixing the main body at the set position; the controller is used for controlling the rotating mechanism to enable the main body to rotate by a set angle to a set position and controlling the positioning mechanism to fix the main body at the set position, the automatic collection of the sprayer is realized, the mechanical design improves the operation efficiency, simplifies the operation steps, reduces errors and mistakes caused by manual operation, and improves the production efficiency. And the intelligent level of the chemical mechanical polishing equipment is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of chemical mechanical polishing, and particularly relates to an atomizer, a chemical mechanical polishing machine and a method for converging the atomizer. Background Art

[0002] Chemical mechanical polishing technology is a combined technology of mechanical grinding and chemical corrosion. A smooth and flat surface is formed on the surface of a wafer through the grinding action and chemical corrosion action of a slurry. CMP (Chemical Mechanical Planarization) technology has now become one of the mainstream technologies for global planarization of semiconductor devices.

[0003] During the chemical mechanical polishing process, it is necessary to use an atomizer to spray a moisturizing liquid on the internal space and the surfaces of various components of the chemical mechanical polishing machine for moisturizing, so as to prevent crystals left after the evaporation of the chemical liquid from falling onto the surfaces of various components and contaminating the wafer, which affects the polishing effect; after the chemical mechanical polishing process is completed, it is necessary to maintain the workbench of the chemical mechanical polishing machine. At present, since the nozzle of the atomizer is suspended above the workbench, before maintaining the workbench, it is necessary to converge the nozzle of the atomizer, that is, to move the nozzle of the atomizer from directly above the workbench to the side of the workbench to avoid affecting subsequent maintenance operations.

[0004] Currently, the nozzle of the atomizer is usually manually adjusted to move, but this method, on the one hand, is cumbersome to operate and has low efficiency, and manual operation is prone to errors, which may damage the hardware. On the other hand, manually moving the nozzle may also cause unnecessary contamination to the workbench. Summary of the Invention

[0005] The purpose of the present invention is to solve the problems of cumbersome operation, low efficiency, easy damage to hardware due to errors, and even contamination of the workbench caused by the current manual adjustment of the atomizer nozzle.

[0006] To achieve the above purpose, the present invention provides an atomizer, which is arranged above the workbench of a chemical mechanical polishing machine and includes: a main body; a nozzle connected to the main body; a rotating mechanism connected to the side wall of the main body, driving the main body to rotate to a set position; a positioning mechanism with a fixed circumferential position, used to fix the main body at the set position; and a controller, used to control the rotating mechanism to rotate the main body by a set angle to the set position and control the positioning mechanism to fix the main body at this set position.

[0007] Optionally, the set positions of the main body include a first position and a second position. The first position is the working position or the converging position of the atomizer, and the second position is the converging position or the working position of the atomizer.

[0008] Optionally, the rotation mechanism includes a driving device and a gear device. The gear device includes a driving gear and an arc-shaped driven gear provided on the side wall of the main body and cooperating with the driving gear.

[0009] Optionally, the main body is cylindrical. The positioning mechanism includes a positioning member and a driving member. The positioning member is in a "7" shape and has a first end and a second end. The first end is arranged above the top surface of the main body for fixing the circumferential position of the main body, and the second end is arranged inside the cylinder of the main body or below the central axis of the main body through the cylinder of the main body. The driving member is arranged below the second end of the positioning member and is connected to the second end of the positioning member for lifting and lowering the positioning member.

[0010] Optionally, the controller controls the driving member to lift and lower the positioning member so that the positioning member rises from the top surface of the main body or descends to the top surface of the main body.

[0011] Optionally, a positioning pin or a jack is provided on one side of the first end of the positioning member facing the top surface of the main body, and a first positioning hole and a second positioning hole or a first plug and a second plug cooperating with the positioning pin or the jack are provided on the top surface of the main body.

[0012] Optionally, the first positioning hole or the first plug corresponds to the first position, and the second positioning hole or the second plug corresponds to the second position.

[0013] Optionally, the set position of the main body further includes at least one third position, which is the working position of the sprayer. At least one third positioning hole or a third plug cooperating with the positioning pin or the jack is further provided on the top surface of the main body, and the third positioning hole or the third plug corresponds to the third position.

[0014] Optionally, the set angle is the included angle between the first positioning hole and the second positioning hole or between the first plug and the second plug, and is 60° - 90°.

[0015] Optionally, a positioning monitoring device is provided in the first positioning hole and the second positioning hole or on the first plug and the second plug. The positioning monitoring device is connected to the controller for monitoring whether the positioning pin is above the first positioning hole or the second positioning hole, or whether the first plug or the second plug is above the jack, and sending the monitoring result to the controller. The positioning monitoring device is a positioning sensor.

[0016] Optionally, the driving device is a servo motor, and the output end of the servo motor is connected to the rotating shaft of the driving gear.

[0017] Optionally, the driving member is a cylinder, and the output end of the cylinder is connected to the second end of the positioning member.

[0018] Optionally, the radian of the passive gear is not less than the set angle.

[0019] In a second aspect of the present invention, a chemical mechanical polishing machine is provided, including a workbench and the sprayer arranged above the workbench. The workbench includes: a polishing platen; a polishing liquid delivery arm for delivering polishing liquid above the polishing platen; a polishing pad arranged on the polishing platen for delivering the polishing liquid to the wafer to be polished; a polishing head arranged on the polishing pad for polishing the wafer to be polished placed between the polishing head and the polishing pad; and a dresser for dressing the surface of the polishing pad.

[0020] In a third aspect of the present invention, a method for converging a sprayer is provided. Using the sprayer, the method includes the following steps: when the sprayer is in the first position, the controller controls the driving member to raise the positioning member, so that the positioning pin on the positioning member disengages from the first positioning hole, or the first plug disengages from the jack of the positioning member; the controller controls the rotating mechanism to rotate by a set angle, driving the main body to rotate to the second position; the positioning monitoring device in the second positioning hole monitors whether the positioning pin is above the second positioning hole, or the positioning monitoring device on the second plug monitors whether the second plug is above the jack, and sends the monitoring result to the controller; after receiving the monitoring result of the positioning monitoring device, the controller controls the driving member to lower the positioning member, so that the positioning pin on the positioning member is inserted into the second positioning hole, or the second plug is inserted into the jack of the positioning member, fixing the sprayer in the second position.

[0021] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0022] The sprayer for a chemical mechanical polishing machine proposed in this solution includes a main body, a nozzle, a rotating mechanism connected to the side wall of the main body, a positioning mechanism for fixing the main body in a set position, and a controller for controlling the rotating mechanism and the positioning mechanism; the rotating mechanism automatically rotates by a set angle to rotate the main body to the set position, and the positioning mechanism automatically fixes the circumferential position of the main body, thereby realizing the automatic convergence of the sprayer. The mechanical design improves the operation efficiency, simplifies the operation steps, reduces the errors and mistakes caused by manual operation, and improves the intelligent level of the chemical mechanical polishing equipment;

[0023] In this solution, a positioning monitoring device is arranged in the positioning hole or on the plug to monitor the circumferential position of the main body, ensuring that the set position of the main body rotates below the positioning member, further ensuring the accuracy of the device, and being able to detect problems in time when the device has problems, improving the fault tolerance rate and safety of the system. Description of the Drawings

[0024] Figure 1A top view schematic diagram of a chemical mechanical polishing machine according to an embodiment of the present invention;

[0025] Figure 2 A structural schematic diagram of a sprayer according to an embodiment of the present invention;

[0026] Figure 3 A flowchart of a method for converging a sprayer according to an embodiment of the present invention. Detailed implementation manners

[0027] The following will combine the drawings in the embodiments of the present invention to elaborate in detail on the technical solutions, structural features, achieved objectives, and effects in the embodiments of the present invention.

[0028] It should be noted that the drawings adopt a very simplified form and all use non-precise scales, only for conveniently and clearly assisting in explaining the purpose of the embodiments of the present invention, and are not used to limit the limiting conditions of the embodiments of the present invention. Therefore, they do not have technical essence. Any modification of the structure, change of the proportional relationship, or adjustment of the size, without affecting the effects that the present invention can produce and the objectives that can be achieved, should still fall within the scope covered by the technical content disclosed by the present invention.

[0029] It should be noted that in the present invention, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the term "comprising", "including", or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article, or device including a series of elements not only includes those elements clearly listed, but also includes other elements not explicitly listed, or also includes elements inherent to such a process, method, article, or device.

[0030] This embodiment discloses a chemical mechanical polishing machine, as Figure 1 shown. The chemical mechanical polishing machine includes: a workbench, and a sprayer 600 arranged above the workbench; the workbench includes: a polishing disc 200, which rotates to convey polishing liquid to the wafer to be polished; a polishing liquid conveying arm 100, which is used to convey polishing liquid to the polishing disc 200; a polishing pad (not shown in the figure), arranged above the polishing disc 200, and the polishing pad cooperates with the rotating polishing disc 200 to convey the polishing liquid to the wafer to be polished; a polishing head 500, arranged on the polishing pad, and the wafer to be polished is placed between the polishing head 500 and the polishing pad, and the wafer to be polished is polished by the polishing head 500; the workbench further includes a dresser 400, which is used to dress the surface of the polishing pad to timely remove the polishing residues on the polishing pad.

[0031] The sprayer 600 is used to spray a moisturizing liquid onto the workbench to moisturize each component, such as Figure 2 As shown, the sprayer 600 includes: a main body 611, which is cylindrical and used to store the moisturizing liquid; a nozzle 608, which is connected to the main body 611, and through which the moisturizing liquid is sprayed onto the workbench; a rotating mechanism, which is connected to the side wall of the main body 611, so as to drive the main body 611 to rotate, enabling the main body 611 to rotate from the working position to the retracted position. The working position refers to the position where the sprayer 600 sprays the moisturizing liquid onto the workbench, and the retracted position refers to the position where, after the process is completed, the nozzle 608 of the sprayer 600 is moved to the side of the workbench to avoid affecting subsequent maintenance of the workbench; a positioning mechanism, the circumferential position of which is fixed, that is, the circumferential position of the positioning mechanism is relatively rotatable with respect to the main body 611, and the main body 611 is fixed at the working position or the retracted position through this positioning mechanism; the sprayer 600 further includes a controller (not shown in the figure), which is used to control the rotating mechanism to rotate the main body 611, and to control the positioning mechanism to fix the position of the main body 611.

[0032] The rotating mechanism includes a driving device 603 and a gear device. The gear device includes a driving gear 604 and a driven gear 605. The driven gear 605 is arranged on the side wall of the main body 611. Specifically, a groove is formed on the side wall of the main body 611, and the driven gear 605 is installed in the groove. In other embodiments, the driven gear 605 can also be directly installed on the side wall of the main body 611, that is, the driven gear 605 protrudes from the side wall of the main body 611; the driven gear 605 cooperates with the driving gear 604, and under the rotational action of the driving gear 604, the driven gear 605 is driven to rotate, thereby driving the main body 611 to rotate.

[0033] Such as Figure 2 As shown, the driving gear 604 drives the driven gear 605 to rotate through a driven gear, but this is not a limitation to the present invention. In other embodiments, the driving gear 604 can directly cooperate with the driven gear 605, or can drive the driven gear 605 to rotate through more driven gears.

[0034] The driven gear 605 is arc-shaped, and its radian is greater than the radian of the angle between the working position and the retracted position of the main body 611, so that the main body 611 can rotate between the working position and the retracted position through the driven gear 605.

[0035] The driving device 603 is a servo motor. The output end of the servo motor 603 is connected to the rotation center axis of the driving gear 604, so as to drive the driving gear 604 to rotate under the control of the controller, and then drive the main body 611 and the nozzle 608 to rotate.

[0036] The positioning mechanism includes a positioning member 606 and a driving member 602. The positioning member 606 is in a "7" shape, which has a first end 607 and a second end 601. The first end 607 is arranged above the top surface of the main body 611, and this first end 607 is used to fix the circumferential position of the main body 611. The second end 601 is arranged inside the cylinder center of the main body 611. The driving member 602 is arranged below the second end 601 and is connected to the second end 601. The driving member 602 is used to provide driving force to the second end 601 to lift and lower the positioning member 606. In other embodiments, the positioning member 606 can also pass through the cylinder of the main body 611 so that the second end 601 is arranged below the central axis of the main body 611.

[0037] As Figure 2 shown, a positioning pin 609 is arranged on one side of the first end 607 of the positioning member 606 facing the top surface of the main body 611. A first positioning hole 610 and a second positioning hole (not shown in the figure) that cooperate with the positioning pin 609 are arranged on the top surface of the main body 611. The circumferential position of the positioning member 606 is fixed and does not rotate with the main body 611. In this embodiment, the main body 611 is driven to rotate around its central axis under the action of the rotating mechanism, that is, the main body 611 rotates around the positioning member 601 at its center, and the circumferential relative position between the main body 611 and the positioning member 601 changes. When the first positioning hole 610 rotates to directly below the positioning pin 609, the main body 611 is in the working position. When the second positioning hole rotates to directly below the positioning pin 609, the main body 611 is in the retracted position.

[0038] When the first positioning hole 610 or the second positioning hole rotates to directly below the positioning pin 609, the driving member 602 drives the positioning member 606 to descend under the control of the controller, so that the positioning pin 609 is inserted into the first positioning hole 610 or the second positioning hole, and the position of the main body 611 is fixed in the working position or the retracted position. When it is necessary to rotate the main body 611, the driving member 602 drives the positioning member 606 to rise under the control of the controller, so that the positioning pin 609 disengages from the first positioning hole 610 or the second positioning hole. In this embodiment, the driving member 602 is a cylinder, and its output end is connected to the second end 601 of the positioning member 606, and can control the lifting and lowering of the positioning member 606.

[0039] In other embodiments, other positioning components may also be provided at the first end 607 of the positioning member 606 and the top surface of the main body 611. For example, the positions of the positioning pin and the positioning hole are swapped, that is, a jack is provided on the side of the first end 607 of the positioning member 606 facing the top surface of the main body 611, and a first plug pin and a second plug pin that cooperate with the jack are provided on the top surface of the main body 611; when the first plug pin matches the jack, the sprayer 600 is in the working position, and when the second plug pin matches the jack, the sprayer 600 is in the retracted position; when the positioning member 606 descends, the first plug pin or the second plug pin is inserted into the jack to fix the position of the main body 611 in the working position or the retracted position; when the positioning member 606 ascends, the first plug pin or the second plug pin disengages from the jack.

[0040] In this embodiment, considering that the sprayer 600 is arranged above the workbench in the chemical mechanical polishing machine, in order to prevent the sprayer 600 from touching the top of the chemical mechanical polishing machine upward, the length of the positioning pin 609 is set to be less than 5 cm, and the height at which the driving member 602 raises the positioning member 606 is set to be 5 cm, so that the driving member 602 can raise the positioning member 606 without touching the top of the chemical mechanical polishing machine upward. In other embodiments, according to the component layout of the chemical mechanical polishing machine, the sizes of other positioning pins 609 and the raising height of the positioning member 606 can also be set.

[0041] Furthermore, a positioning monitoring device (not shown in the figure) is also provided in each of the first positioning hole 610 and the second positioning hole, for monitoring whether the positioning pin 609 is above the first positioning hole 610 or the second positioning hole. The positioning monitoring device is connected to the controller and sends the monitoring result to the controller; after receiving the monitoring result sent by the positioning monitoring device, the controller then controls the driving member 602 to lower the positioning member 606. The monitoring result means that the positioning monitoring device in the first positioning hole 610 or the second positioning hole monitors that the positioning pin 609 is above the first positioning hole 610 or the second positioning hole. If no monitoring result is received after the controller controls the rotation mechanism to rotate, or the monitoring result does not match the expectation, it indicates that there is a problem with the device and maintenance and inspection are required. In this embodiment, an optical sensor is used as the positioning monitoring device. In other embodiments, other positioning sensors can also be used as the positioning monitoring device. By setting this positioning monitoring device, the rotation condition of the main body 611 is monitored, further ensuring that the main body 611 rotates to the set position, making the rotation result of the position of the sprayer 600 more accurate, and being able to detect errors in the system in a timely manner, improving the system fault tolerance rate.

[0042] Correspondingly, in the case where the positions of the positioning pin and the positioning hole are swapped, a positioning monitoring device is provided on the first plug pin and the second plug pin to monitor whether the first plug pin or the second plug pin is above the jack. At this time, an optical sensor can still be used as the positioning monitoring device to perform positioning monitoring based on the principle of optical ranging.

[0043] The positioning member 606 and the main body 611 are in a relationship of relative circumferential rotation. The second end 601 of the positioning member 606 is connected to the driving member 602. In this embodiment, the driving member 602 is fixedly connected to the fixed component of the chemical mechanical polishing machine to fix the position of the driving member 602. The main body 611 is placed on a plane with a fixed position, and this plane is fixedly connected to the fixed component of the chemical mechanical polishing machine. The driving member 602 can also be fixed to this plane, so that the main body 611 is placed on the fixed plane. The positioning member 606 passes through or is located inside the center of the cylinder of the main body 611, and the position of the main body 611 is relatively fixed without affecting its rotation around the positioning member 606. Among them, the diameter of the positioning member 606 is slightly smaller than the inner diameter of the main body 611.

[0044] The included angle between the first positioning hole 610 and the second positioning hole or between the first plug pin and the second plug pin is the included angle between the working position and the retracted position of the sprayer 600, generally 60° to 90°, and 75° in this embodiment. The passive gear 605 is arc-shaped, and its radian is not less than the included angle between the working position and the retracted position, so that the main body 611 can rotate through a sufficient angle through the passive gear 605 to adjust the position between the working position and the retracted position.

[0045] The controller is pre-installed with a set rotation angle. When it is necessary to rotate the sprayer 600 between the working position and the retracted position, the controller controls the rotation mechanism to rotate the corresponding set angle, so that the main body 611 rotates the set angle correspondingly to reach the working position or the retracted position. The set angle is the included angle between the working position and the retracted position.

[0046] In this embodiment, the sprayer 600 corresponds to only one working position. Since the workbench is in a rotating state, the sprayer 600 can spray all parts of the workbench without moving during the working process. In other embodiments, the sprayer 600 can also correspond to multiple working positions, that is, a first positioning hole 610, a second positioning hole, and at least one third positioning hole are provided on the top surface of the main body 611. The third positioning hole also cooperates with the positioning pin 609, and each third positioning hole corresponds to a working position of a sprayer 600; these positioning holes are on the concentric circle of the sprayer 600. By setting a set angle corresponding to the angle between each positioning hole, the controller automatically rotates the sprayer 600. Correspondingly, when the positions of the positioning pin and the positioning hole are swapped, a first plug pin, a second plug pin, and at least one third plug pin are provided on the top surface of the main body 611, and the third plug pin matches the jack.

[0047] Finally, this embodiment also discloses a method for retracting the sprayer, which rotates the position of the sprayer 600 from the working position to the retracted position, using the above-mentioned sprayer 600, as Figure 3 shown, including the following steps:

[0048] S1. When the sprayer 600 is in the working position, at this time, the positioning pin 609 is inserted into the first positioning hole 610, and the controller controls the cylinder 602 to raise the positioning member 606 so that the positioning pin 609 disengages from the first positioning hole 610;

[0049] Or, when the positions of the positioning pin and the positioning hole are swapped, the first plug pin is inserted into the jack, and the controller controls the cylinder 602 to raise the positioning member 606 so that the first plug pin disengages from the jack;

[0050] S2. The controller controls the servo motor 603 to drive the driving gear 604 to rotate by a set angle, that is, 75°, so that the driven gear 605 drives the main body 611 to rotate by 75° to reach the retracted position of the sprayer 600. At this time, the second positioning hole reaches below the positioning pin 609, and the positioning sensor in the second positioning hole monitors that the positioning pin 609 is above the second positioning hole and sends the monitoring result to the controller;

[0051] Or, when the positions of the positioning pin and the positioning hole are swapped, when the sprayer 600 reaches the retracted position, the second plug pin reaches below the jack, and the positioning sensor on the second plug pin monitors that the jack is above the second plug pin and sends the monitoring result to the controller;

[0052] S3. After the controller receives the monitoring result of the positioning monitoring device, it controls the cylinder 602 to lower the positioning member 606 so that the positioning pin 609 on the positioning member 606 is inserted into the second positioning hole, thereby fixing the sprayer 600 in the retracted position;

[0053] Alternatively, the controller controls the cylinder 602 to lower the positioning member 606, so that the second pin is inserted into the jack of the positioning member 606, thereby fixing the sprayer 600 at the retracted position.

[0054] Correspondingly, when it is necessary to rotate the position of the sprayer 600 from the retracted position to the working position, only the rotation direction of the rotating mechanism needs to be reversed, and the above steps can be repeated. Specifically: the controller controls the cylinder 602 to raise the positioning member 606, so that the positioning pin 609 disengages from the second positioning hole; the controller controls the servo motor 603 to drive the driving gear 604 to rotate reversely by 75°, so that the main body 611 reaches the retracted position of the sprayer 600, and the positioning sensor in the first positioning hole 610 monitors that the positioning pin 609 is above the first positioning hole 610, and sends the monitoring result to the controller; after receiving the monitoring result of the positioning monitoring device, the controller controls the cylinder 602 to lower the positioning member 606, so that the positioning pin 609 is inserted into the first positioning hole 610, thereby fixing the sprayer 600 at the working position. This method is still applicable when the positions of the positioning pin and the positioning hole are swapped, and will not be elaborated here.

[0055] Although the content of the present invention has been described in detail through the above preferred embodiments, it should be recognized that the above description should not be considered as a limitation of the present invention. After those skilled in the art have read the above content, various modifications and substitutions of the present invention will be obvious. Therefore, the protection scope of the present invention should be defined by the appended claims.

Claims

1. A sprayer is arranged above the workbench of a chemical mechanical polishing machine, and is characterized in that, Comprising: A main body; A nozzle, connected to the main body; A rotating mechanism, connected to the side wall of the main body, for driving the main body to rotate to a set position; A positioning mechanism, with a fixed circumferential position, for fixing the main body at the set position; A controller, for controlling the rotating mechanism to rotate the main body by a set angle to the set position, and for controlling the positioning mechanism to fix the main body at this set position.

2. The sprayer according to claim 1, wherein The set positions of the main body include a first position and a second position. The first position is the working position or the retracted position of the sprayer, and the second position is the retracted position or the working position of the sprayer.

3. The sprayer according to claim 1, characterized in that, The rotating mechanism includes a driving device and a gear device. The gear device includes a driving gear and an arc-shaped driven gear provided on the side wall of the main body and cooperating with the driving gear.

4. The sprayer according to claim 2, characterized in that, The main body is cylindrical. The positioning mechanism includes a positioning member and a driving member; The positioning member is in the shape of "7", having a first end and a second end. The first end is arranged above the top surface of the main body for fixing the circumferential position of the main body, and the second end is arranged inside the cylinder of the main body, or is arranged below the central axis of the main body through the cylinder of the main body; The driving member is arranged below the second end of the positioning member and is connected to the second end of the positioning member for lifting and lowering the positioning member.

5. The sprayer according to claim 4, characterized in that, The controller controls the driving member to lift and lower the positioning member, so that the positioning member rises from the top surface of the main body, or descends to the top surface of the main body.

6. The sprayer according to claim 5, characterized in that, One side of the first end of the positioning member facing the top surface of the main body is provided with a positioning pin or a jack. The top surface of the main body is provided with a first positioning hole and a second positioning hole or a first plug and a second plug cooperating with the positioning pin or the jack.

7. The sprayer according to claim 6, characterized in that, The first positioning hole or the first plug corresponds to the first position, and the second positioning hole or the second plug corresponds to the second position.

8. The sprayer according to claim 6, characterized in that, The set positions of the main body further include at least one third position, and this third position is the working position of the sprayer; The top surface of the main body is further provided with at least one third positioning hole or a third plug cooperating with the positioning pin or the jack, and this third positioning hole or the third plug corresponds to the third position.

9. The sprayer according to claim 7, characterized in that, The set angle is the included angle between the first positioning hole and the second positioning hole or between the first plug and the second plug, and is 60° - 90°.

10. The sprayer according to claim 7, characterized in that, A positioning monitoring device is provided in the first positioning hole and the second positioning hole or on the first plug and the second plug. The positioning monitoring device is connected to the controller for monitoring whether the positioning pin is above the first positioning hole or the second positioning hole, or whether the first plug or the second plug is above the jack; And sending the monitoring result to the controller. The positioning monitoring device is a positioning sensor.

11. The sprayer according to claim 3, wherein, The driving device is a servo motor, and the output end of the servo motor is connected to the rotating shaft of the driving gear.

12. The sprayer according to claim 5, wherein The driving member is a cylinder, and the output end of the cylinder is connected to the second end of the positioning member.

13. The sprayer according to claim 9, characterized in that, The radian of the driven gear is not less than the set angle.

14. A chemical mechanical polishing machine, characterized in that, Including a workbench and a sprayer as described in any one of claims 1 - 13 provided above the workbench. The workbench includes: A polishing disc; A polishing liquid conveying arm for conveying polishing liquid above the polishing disc; A polishing pad, which is arranged on the polishing disc and used to convey the polishing liquid to the wafer to be polished; A polishing head, which is arranged on the polishing pad and used to polish the wafer to be polished placed between the polishing head and the polishing pad; A dresser, which is used to dress the surface of the polishing pad.

15. A method for converging a sprayer, using the sprayer according to any one of claims 1-13, characterized in that, It includes the following steps: When the sprayer is in the first position, the controller controls the driving member to raise the positioning member, so that the positioning pin on the positioning member disengages from the first positioning hole, or the first pin disengages from the insertion hole of the positioning member; The controller controls the rotating mechanism to rotate by a set angle, driving the main body to rotate to the second position; The positioning monitoring device in the second positioning hole monitors whether the positioning pin is above the second positioning hole, or the positioning monitoring device on the second pin monitors whether the second pin is above the insertion hole, and sends the monitoring result to the controller; After receiving the monitoring result of the positioning monitoring device, the controller controls the driving member to lower the positioning member, so that the positioning pin on the positioning member is inserted into the second positioning hole, or the second pin is inserted into the insertion hole of the positioning member, fixing the sprayer in the second position.

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