Multi-ion-source synchronous sputter coating device and process

Abstract

The invention relates to the technical field of sputter coating, in particular to a multi-ion-source synchronous sputter coating device and process, and the multi-ion-source synchronous sputter coating process comprises the step that the multi-ion-source synchronous sputter coating device is adopted for coating; the multi-ion-source synchronous sputter coating device comprises a shell and a plurality of cathode shooting heads inserted in the shell, each cathode shooting head comprises a connecting arm, a target seat, a crimping part, a shielding cover and a plurality of first bolts, and the target seat is used for placing a target material; the crimping part is crimped on the target material; the shielding cover is arranged on the crimping part in a covering manner and can be in threaded fit with the connecting arm, and a plurality of first tooth bulges are arranged on the shielding cover; the first bolts are inserted into the crimping parts, can be in threaded fit with the target seat and can be in stop fit with the crimping parts, each first bolt is provided with a plurality of second tooth protrusions, and the second tooth protrusions can be in meshing fit with the first tooth protrusions, so that all the first bolts can be driven to rotate synchronously through the shielding cover, and the disassembly and assembly efficiency can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of sputtering coating, and in particular to a multi-ion source synchronous sputtering coating device and process. Background Art

[0002] Sputtering coating is a physical vapor deposition (PVD) technology. Its principle is that in a high-vacuum environment, high-energy ions accelerated by an electric field bombard a target, causing target atoms or molecules to escape overcoming the binding force. After moving randomly in the vacuum environment, they are deposited on the surface of a substrate to form a uniform thin film.

[0003] Magnetron sputtering coating is a specific technical means of sputtering coating. On the basis of sputtering coating, a magnetic field is introduced on the surface of the target cathode, and the magnetic field is used to constrain charged particles to increase the plasma density to increase the sputtering rate. Existing magnetron sputtering coating equipment usually consists of a vacuum chamber, a vacuum system, a cathode target, a sputtering power supply, and an air intake system. During coating, the vacuum system first pumps the vacuum chamber to a specified vacuum degree, and the air intake system fills it with argon. Then, the sputtering power supply applies a high voltage to the argon to initiate glow discharge and ionize the argon. Positively charged argon ions are attracted by the negative potential of the cathode and bombard the cathode target at high speed, sputtering out atoms and depositing them on the anode substrate, gradually forming a thin film with specific properties.

[0004] However, existing magnetron sputtering coating equipment also has some problems when in use: when the target needs to be replaced, the operator needs to loosen multiple bolts in sequence before the old target can be removed. This operation process is not only cumbersome, consuming a lot of time and energy, but also during the disassembly process, the bolts are numerous and small in volume, and are extremely easy to lose. Once the bolts are lost, it will bring great trouble to the subsequent reassembly of the equipment, seriously affecting the ease of use and working efficiency of the equipment. Summary of the Invention

[0005] Based on this, it is necessary to provide a multi-ion source synchronous sputtering coating device and process for the problem of troublesome operation during the target replacement process of current magnetron sputtering coating equipment.

[0006] The above object is achieved by the following technical solutions:

[0007] A multi-ion source synchronous sputtering coating device, the multi-ion source synchronous sputtering coating device includes a housing and a plurality of cathode nozzles all inserted into the housing;

[0008] Wherein, the cathode tip points to the component to be coated, and includes a connecting arm, a target seat, a crimping part, a shielding cover and a plurality of first bolts. The connecting arm is arranged on the housing; the target seat is arranged on the connecting arm and is used for placing a target; the crimping part crimps on the target; the shielding cover covers the crimping part and the target seat and forms a threaded fit with the connecting arm. A plurality of first tooth protrusions are arranged on the shielding cover along the circumferential direction; the first bolts are inserted into the crimping part and form a threaded fit with the target seat. The first bolts and the crimping part form a stop fit. A plurality of second tooth protrusions are arranged on each first bolt along the circumferential direction, and the second tooth protrusions can form an engaging fit with the first tooth protrusions.

[0009] Further, external threads are arranged on each first bolt; a plurality of mounting holes are arranged on the target seat, and internal threads are arranged on each mounting hole. The internal threads and the external threads form a threaded fit; the shielding cover can form a stop fit with all the first bolts; along the gravity direction, when the first bolts are located below the mounting holes, the cathode tip further includes a plurality of first limiting grooves, second limiting grooves, protrusions and a first elastic member, all in plurality. The first limiting grooves are opened on the inner peripheral wall of the mounting holes and can form a stop fit with the first bolts; the second limiting grooves are opened on the inner peripheral wall of the mounting holes and are communicated with the first limiting grooves; the plurality of protrusions are arranged along the axis direction of the first bolts and are respectively arranged on the adjacent multiple layers of the external threads closest to the mounting holes. The protrusions can be slidably inserted into the second limiting grooves to limit the rotation of the first bolts. The protrusions can form a threaded fit with the internal threads; the first elastic member is arranged between the crimping part and the first bolts and is configured to have a tendency to drive the protrusions to insert into the second limiting grooves.

[0010] Further, the first elastic member is a shrapnel.

[0011] Further, external threads are provided on each of the first bolts; a plurality of mounting holes are provided on the target base, and internal threads are provided on each of the mounting holes. The internal threads and the external threads form a threaded fit; the shielding cover can form a stop fit with all the first bolts; along the direction of gravity, when the first bolts are located above the mounting holes, the cathode emitter further includes a plurality of first limiting grooves, second limiting grooves, protrusions, and second elastic members, all of which are provided in plurality. The first limiting grooves are formed on the inner peripheral wall of the mounting holes and can form a stop fit with the first bolts; the second limiting grooves are formed on the inner peripheral wall of the mounting holes and communicate with the first limiting grooves; the plurality of protrusions are arranged along the axis direction of the first bolts and are respectively provided on the adjacent multiple layers of the external threads closest to the mounting holes. The protrusions can be slidably inserted into the second limiting grooves to limit the rotation of the first bolts, and the protrusions can form a threaded fit with the internal threads; the second elastic members are provided between the target base and the first bolts and are configured to have a tendency to drive the first bolts out of the mounting holes.

[0012] Further, the second elastic member is a compression spring.

[0013] Further, the shielding cover has a first part and a second part in a sleeved manner. The second part is located on the outside. The second part can slide relative to the first part along the axis direction, can rotate relative to the first part, and can form a stop fit with the first part. When the second part and the first part form a stop fit, the second part can frictionally drive the first part to rotate.

[0014] Further, the cathode emitter further includes a rotating arm, and the rotating arm is hinged on the connecting arm and can rotate around its own axis.

[0015] Further, the multi-ion source synchronous sputtering coating device further includes a first driving member, and the first driving member is configured to be able to provide a driving force for the rotation of the rotating arm.

[0016] Further, the multi-ion source synchronous sputtering coating device further includes a second driving member, and the second driving member is configured to be able to provide a driving force for the rotation of the connecting arm around the hinge point.

[0017] The present invention also provides a multi-ion source synchronous sputtering coating process, which adopts a multi-ion source synchronous sputtering coating device. The multi-ion source synchronous sputtering coating process includes the following steps:

[0018] S1. Rotate the shielding cover in the reverse direction. The shielding cover drives all the first bolts to rotate through the meshing fit between the first tooth protrusion and the second tooth protrusion, so that the first bolts are disengaged from the cooperation between the crimping part and the target base;

[0019] S2. Remove the old target from the target seat and replace it with a new target.

[0020] S3. Rotate the shielding cover in the forward direction. The shielding cover drives all the first bolts to rotate through the meshing fit between the first tooth protrusion and the second tooth protrusion, so that the first bolts are re - mated with the crimping part and the target seat.

[0021] S4. Perform coating.

[0022] The beneficial effects of the present invention are as follows:

[0023] The present invention relates to a multi - ion - source synchronous sputtering coating device and process. The multi - ion - source synchronous sputtering coating process includes using a multi - ion - source synchronous sputtering coating device for coating. When replacing the target of the multi - ion - source synchronous sputtering coating device, first rotate the shielding cover to disengage the threaded fit between the shielding cover and the connecting arm, and then continue to rotate the shielding cover. The shielding cover drives all the first bolts to rotate through the meshing fit between the first tooth protrusion and the second tooth protrusion. When the first bolts rotate, they first release the stop fit with the crimping part, so that the crimping part no longer presses the target tightly, and then disengage the threaded fit with the target seat, so that the shielding cover, the crimping part and all the first bolts can be removed from the target seat as a whole. Then, the old target is removed from the target seat and replaced with a new target. This process does not require loosening multiple bolts one by one, improving the target replacement efficiency. Moreover, the first bolts are always inside the crimping part, avoiding the problem of easy loss due to the large number and small volume of the bolts, significantly improving the simplicity of use of the equipment, and thus ensuring the working efficiency of the equipment.

[0024] Furthermore, by providing that the cathode emitter further includes a plurality of first limiting grooves, second limiting grooves, protrusions and first elastic members, during use, when the first bolts are aligned with the mounting holes, under the action of the first elastic members, the first bolts are inserted into the mounting holes and form a stop fit with the first limiting grooves. Then rotate the shielding cover. The shielding cover drives all the first bolts to rotate through the meshing fit between the first tooth protrusion and the second tooth protrusion. When any one of the first bolts rotates to align the protrusion with the second limiting groove, under the action of the first elastic member, the first bolt is inserted into the second limiting groove and stays in the second limiting groove, and the second tooth protrusion on it disengages from the first tooth protrusion. When all the first bolts are inserted into the second limiting grooves, the shielding cover moves synchronously and re - forms a stop fit with all the first bolts. Then continue to rotate the shielding cover. The shielding cover drives all the first bolts to rotate through the meshing fit between the first tooth protrusion and the second tooth protrusion, so that all the first bolts are simultaneously in threaded fit with the target seat, thereby ensuring that the tightening forces between all the first bolts and the target seat are the same.

[0025] Further, by providing that the shielding cover has a first part and a second part that are sleeved, when the shielding cover rotates, the second part can form a threaded fit with the connecting arm, and at the same time, the first part can drive all the first bolts to rotate through the meshing fit between the first tooth protrusion and the second tooth protrusion periodically, effectively avoiding the jamming problem caused by different pitches while improving the disassembly and assembly efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 FIG. 1 is a schematic three-dimensional structure diagram of a multi-ion source synchronous sputtering coating device provided by an embodiment of the present invention;

[0027] Figure 2 FIG. 2 is a schematic cross-sectional structure diagram of a multi-ion source synchronous sputtering coating device provided by an embodiment of the present invention;

[0028] Figure 3 FIG. 3 is a schematic cross-sectional structure diagram of a cathode head of a multi-ion source synchronous sputtering coating device provided by an embodiment of the present invention;

[0029] Figure 4 FIG. 4 is a schematic three-dimensional structure diagram of a cathode head of a multi-ion source synchronous sputtering coating device provided by an embodiment of the present invention with the rotating arm removed;

[0030] Figure 5 FIG. 5 is a schematic cross-sectional structure diagram of a cathode head of a multi-ion source synchronous sputtering coating device provided by an embodiment of the present invention with the rotating arm removed;

[0031] Figure 6 FIG. 6 is a schematic three-dimensional cross-sectional structure diagram of a cathode head of a multi-ion source synchronous sputtering coating device provided by an embodiment of the present invention with the rotating arm, target, crimping part, shielding cover and first bolts removed;

[0032] Figure 7 FIG. 7 is Figure 6 a partially enlarged structural diagram at A in FIG. 1;

[0033] Figure 8 FIG. 8 is a schematic three-dimensional cross-sectional structure diagram of the crimping part, first bolts, target and protrusions of a multi-ion source synchronous sputtering coating device provided by an embodiment of the present invention during assembly;

[0034] Figure 9 FIG. 9 is Figure 8 a partially enlarged structural diagram at B in FIG. 2;

[0035] Figure 10 FIG. 10 is Figure 8 a partially enlarged structural diagram at C in FIG. 3;

[0036] Figure 11 FIG. 11 is a schematic three-dimensional cross-sectional structure diagram of the shielding cover of a multi-ion source synchronous sputtering coating device provided by an embodiment of the present invention.

[0037] Wherein:

[0038] 1. Housing;

[0039] 2. Cathode ray head; 201. Connecting arm; 2011. Hinge hole; 2012. Slide post; 202. Target seat; 2021. Mounting hole; 203. Crimping part; 2031. First ring platform; 2032. Slot; 2033. Stop groove; 204. Shielding cover; 2041. First tooth projection; 2042. First part; 20421. Third ring platform; 2043. Second part; 20431. Ring groove; 20432. Fourth ring platform; 2044. Second ring platform; 205. First bolt; 2051. Second tooth projection; 206. First limiting groove; 207. Second limiting groove; 208. Projection; 209. Compression spring; 210. Rotating arm; 2101. Slide groove; 2102. Hinge post; 211. Base; 212. Magnet; 213. End cover; 214. Insulating part; 215. Magnet

[0040] 3. Target material. Detailed implementation manners

[0041] In order to make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described in detail below through embodiments and in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0042] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the described objects and do not have any sequential or technical meanings. The terms "connection" and "coupling" mentioned herein, unless otherwise specified, both include direct and indirect connection (coupling). In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation of the present invention.

[0043] In the present invention, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the horizontal height of the first feature is less than that of the second feature.

[0044] As Figures 1 to 11 shown, a multi-ion source synchronous sputtering coating device provided by an embodiment of the present invention is used for coating a workpiece to be coated, and is arranged to include a housing 1 and a plurality of cathode heads 2 all inserted into the housing 1; wherein, the cathode heads 2 point to the workpiece to be coated, and include a connecting arm 201, a target seat 202, a crimping part 203, a shielding cover 204 and a plurality of first bolts 205, the connecting arm 201 is arranged on the housing 1; the target seat 202 is arranged on the connecting arm 201 and is used for placing a target 3; the crimping part 203 is crimped on the target 3; the shielding cover 204 covers the crimping part 203 and the target seat 202 and forms a threaded fit with the connecting arm 201, and a plurality of first tooth protrusions 2041 are arranged on the shielding cover 204 along the circumferential direction; the first bolts 205 are inserted into the crimping part 203 and form a threaded fit with the target seat 202, the first bolts 205 and the crimping part 203 form a stop fit, and a plurality of second tooth protrusions 2051 are arranged on each first bolt 205 along the circumferential direction, and the second tooth protrusions 2051 can form an engagement fit with the first tooth protrusions 2041.

[0045] Specifically in this embodiment, taking the number of the cathode heads 2 being set to four as an example, as Figure 1 shown, the four cathode heads 2 are all arranged on the top of the housing 1, as Figure 2 shown, the cathode heads 2 all face downwards and jointly point to the middle of the housing 1 to ensure that they can jointly coat the workpiece to be coated; as Figure 8 、 Figure 9 and Figure 10As shown, the target 3 is in a disc structure and is arranged at the bottom of the target seat 202; the crimping part 203 is in an annular structure to ensure that the target 3 can be exposed to guarantee the normal sputtering of the target 3. A first annular platform 2031 is arranged on the inner peripheral wall of the crimping part 203 near the bottom. When the crimping part 203 is installed, it is crimped on the target 3 through the first annular platform 2031 to ensure the crimping effect on the target 3. A plurality of slots 2032 are arranged at the top of the crimping part 203. The plurality of slots 2032 are evenly arranged in the circumferential direction. The slots 2032 penetrate through the outer peripheral wall of the crimping part 203 at the same time. When the first bolt 205 is installed, it is inserted into the slot 2032 along the radial direction to ensure a definite positional relationship between the first bolt 205 and the crimping part 203. At the same time, two retaining grooves 2033 are formed on the side wall of each slot 2032. The retaining grooves 2033 are configured to form a friction fit with the first bolt 205 to limit the first bolt 205 from disengaging from the crimping part 203 in the radial direction, ensuring that after the first bolt 205 is loosened, the first bolt 205 can still stay within the crimping part 203.

[0046] The connecting arm 201 is arranged on the inner top wall of the housing 1; the shielding cover 204 is in an annular structure with both ends open and is sleeved on the bottom of the connecting arm 201 to ensure that the target 3 can be exposed to guarantee the normal sputtering of the target 3; the first tooth protrusions 2041 are arranged on the inner peripheral wall of the shielding cover 204 and are close to the bottom. The plurality of first tooth protrusions 2041 are evenly arranged in the circumferential direction; the second tooth protrusions 2051 are arranged in the middle of the first bolt 205. The plurality of second tooth protrusions 2051 are evenly arranged in the circumferential direction and can abut against the top of the slot 2032 to ensure a stop fit with the crimping part 203 to guarantee the pressing effect.

[0047] When the target 3 needs to be replaced, first rotate the shielding cover 204. The shielding cover 204 rotates and moves downward while rotating, and then disengages from the threaded fit with the connecting arm 201; when the shielding cover 204 and the connecting arm 201 are disengaged, move the shielding cover 204 downward to engage the first tooth protrusions 2041 and the second tooth protrusions 2051, and then rotate the shielding cover 204. The shielding cover 204 drives all the first bolts 205 to rotate through the meshing fit between the first tooth protrusions 2041 and the second tooth protrusions 2051. The first bolts 205 rotate and move downward while rotating, and first disengage from the stop fit with the crimping part 203, so that the crimping part 203 no longer presses the target 3, and then disengages from the threaded fit with the target seat 202, so that the shielding cover 204, the crimping part 203 and all the first bolts 205 can be removed from the target seat 202 as a whole. Then, the old target is removed from the target seat 202 and a new target is installed. This process does not require loosening multiple bolts one by one, improving the replacement efficiency of the target 3. Moreover, the first bolts 205 are always within the crimping part 203, avoiding the problem of easy loss due to the large number and small volume of the bolts, significantly improving the usability of the equipment, and thus ensuring the working efficiency of the equipment.

[0048] After replacing the new target, first press the crimping part 203 onto the new target, then sleeved the shielding cover 204 on the bottom of the connecting arm 201, so that the first tooth protrusion 2041 and the second tooth protrusion 2051 are engaged, and then drive the shielding cover 204 to rotate. The shielding cover 204 drives all the first bolts 205 to rotate through the meshing cooperation between the first tooth protrusion 2041 and the second tooth protrusion 2051. The first bolt 205 rotates and moves upward until it forms an abutting fit with the crimping part 203, so that the crimping part 203 is pressed tightly on the new target. Then move the shielding cover 204 upward to disengage the first tooth protrusion 2041 and the second tooth protrusion 2051, and then rotate the shielding cover 204 so that the shielding cover 204 is threadedly connected to the connecting arm 201.

[0049] In some embodiments, when the disassembly of the old target is completed and the new target is replaced, the fastening of the target 3 is crucial; however, there are significant defects in the prior art in this regard: currently, the common operation method is to manually tighten the bolts. Due to the uneven force applied by the operator's hand and the difficulty in accurately controlling the tightening degree of each bolt, it inevitably leads to uneven tightening degrees of the bolts. This difference will cause uneven stress on the target 3 during the fixing process. During the subsequent sputtering process, the sputtering forces received by different parts of the target 3 deviate from the design expectations, which will seriously affect the service performance of the target 3 and reduce the quality and stability of the coating; even if a torque wrench is used to assist in the operation, it only improves the accuracy of the tightening force of a single bolt to a certain extent. However, since the bolts still need to be tightened one by one, the operation process is cumbersome, consuming a large amount of time and labor costs, and the work efficiency is low.

[0050] To solve the above problems, external threads are provided on each of the first bolts 205; a plurality of mounting holes 2021 are provided on the target base 202, and internal threads are provided on each of the mounting holes 2021. The internal threads and the external threads form a threaded fit; the shielding cover 204 can form a stop fit with all the first bolts 205; along the gravity direction, when the first bolt 205 is located below the mounting hole 2021, the cathode ray head 2 further includes a plurality of first limiting grooves 206, second limiting grooves 207, protrusions 208 and a first elastic member. The first limiting grooves 206 are formed on the inner peripheral wall of the mounting hole 2021 and can form a stop fit with the first bolt 205; the second limiting grooves 207 are formed on the inner peripheral wall of the mounting hole 2021 and communicate with the first limiting grooves 206; the plurality of protrusions 208 are arranged along the axial direction of the first bolt 205 and are respectively provided on the adjacent multi-layer external threads closest to the mounting hole 2021. The protrusions 208 can be slidably inserted into the second limiting grooves 207 to limit the rotation of the first bolt 205, and the protrusions 208 can form a threaded fit with the internal threads; the first elastic member is provided between the crimping portion 203 and the first bolt 205 and is configured to have a tendency to drive the protrusions 208 to insert into the second limiting grooves 207.

[0051] Specifically, in this embodiment, to facilitate the shielding cover 204 to form a stop fit with all the first bolts 205, a second annular platform 2044 is provided on the inner peripheral wall of the shielding cover 204 near the bottom. The second annular platform 2044 can abut against the bottom ends of all the first bolts 205 to ensure that a stop fit can be formed; as Figure 7 shown, the first limiting groove 206 is provided in a sunk groove structure and is formed at the bottom of the mounting hole 2021. The first limiting groove 206 can abut against the protrusion 208 to ensure that a stop fit can be formed; the second limiting groove 207 is provided in a strip structure and extends along a direction parallel to the extending direction of the mounting hole 2021. The top end of the second limiting groove 207 extends to a part of the internal threads in the mounting hole 2021, and the bottom end communicates with the first limiting groove 206; the protrusion 208 is provided in a strip spiral structure. Taking the number of the protrusions 208 as three as an example, as Figure 9As shown, three protrusions 208 are arranged in parallel on the first, second, and third layers of external threads counted from top to bottom; the first elastic member can be set as a spring plate, and is inclined and arranged on the bottom wall of the retaining groove 2033, and can abut against the first bolt 205. Under the action of the spring plate, the protrusion 208 has a tendency to insert into the second limiting groove 207; the second elastic member can be set as a compression spring 209, and the compression spring 209 is inserted into the mounting hole 2021, and the top end is fixed to the top of the mounting hole 2021, and the bottom end can abut against the first bolt 205. Under the action of the compression spring 209, the first bolt 205 has a tendency to protrude from the mounting hole 2021, so as to avoid the first bolt 205 directly cooperating with the internal thread on the mounting hole 2021 under the combined action of the spring plate and gravity, resulting in affecting the subsequent process of adjusting the same tightening degree of all the first bolts 205.

[0052] After replacing the new target, hold the crimping part 203, and then align the first bolt 205 with the mounting hole 2021. Under the push of the spring plate, the first bolt 205 is inserted into the mounting hole 2021, and the top end of the first bolt 205 abuts against the top wall of the first limiting groove 206; then while rotating the shielding cover 204, push the shielding cover 204 upward. At this time, the shielding cover 204 can maintain self-rotation through the stop between the second annular platform 2044 and the first bolt 205 without axial movement. The shielding cover 204 drives all the first bolts 205 to rotate through the meshing cooperation between the first tooth protrusion 2041 and the second tooth protrusion 2051; when any one of the first bolts 205 rotates until the protrusion 208 is aligned with the second limiting groove 207, under the push of the spring plate, the protrusion 208 is inserted into the second limiting groove 207, so that the first bolt 205 can stay in the second limiting groove 207, and the second tooth protrusion 2051 on it is disengaged from the first tooth protrusion 2041; when at least one of the first bolts 205 does not rotate until the protrusion 208 is aligned with the second limiting groove 207, the shielding cover 204 can only rotate self under the stop between the first bolt 205 and the second annular platform 2044.

[0053] When all the first bolts 205 are inserted into the second limiting groove 207, the shielding cover 204 moves upward and forms a stop fit with all the first bolts 205 again, and a meshing fit is re-formed between the first tooth protrusion 2041 and the second tooth protrusion 2051; then continue to rotate the shielding cover 204, and the shielding cover 204 drives all the first bolts 205 to rotate through the meshing cooperation between the first tooth protrusion 2041 and the second tooth protrusion 2051, so that all the first bolts 205 can simultaneously form a thread fit with the target seat 202 at the same angle, thereby ensuring that the tightening degrees of all the first bolts 205 are consistent, effectively avoiding the problem of uneven force on the target 3 caused by the traditional manual operation method, greatly improving the accuracy and stability of the installation of the target 3, and further improving the overall working performance and coating quality of the multi-ion source synchronous sputtering coating device.

[0054] In other embodiments, along the direction of gravity, when the first bolt 205 is located above the mounting hole 2021, the structure of the multi-ion source synchronous sputtering coating device is basically the same as that of the previous embodiment. The difference is that the cathode head 2 further includes a plurality of second elastic members, which are arranged between the target seat 202 and the first bolt 205 and configured to have a tendency to drive the first bolt 205 out of the mounting hole 2021.

[0055] Specifically, the second elastic member can be set as a compression spring 209, which is inserted into the mounting hole 2021 and can abut against the first bolt 205.

[0056] The working process of the multi-ion source synchronous sputtering coating device is basically the same as that of the previous embodiment. The difference is that when any first bolt 205 rotates until the protrusion 208 is aligned with the second limiting groove 207 and then the first bolt 205 is inserted into the second limiting groove 207 under the action of gravity, it then abuts against the compression spring 209, enabling the first bolt 205 to stay in the second limiting groove 207.

[0057] In some other embodiments, the shielding cover 204 is provided with a sleeved first part 2042 and a second part 2043. The second part 2043 is located on the outside. The second part 2043 can slide relative to the first part 2042 along the axial direction, can rotate relative to the first part 2042, and can form a stop fit with the first part 2042. When the second part 2043 forms a stop fit with the first part 2042, the second part 2043 can frictionally drive the first part 2042 to rotate.

[0058] Specifically in this embodiment, as Figure 11 shown, a third annular platform 20421 is provided on the outer peripheral wall of the first part 2042 near the top, and an annular groove 20431 is provided on the inner peripheral wall of the second part 2043 near the bottom. The annular groove 20431 penetrates through the bottom of the second part 2043 at the same time. The third annular platform 20421 is movably inserted into the annular groove 20431 during installation to ensure that the second part 2043 can slide relative to the first part 2042 along the axial direction and can also rotate relative to the first part 2042; a fourth annular platform 20432 is provided on the inner peripheral wall of the annular groove 20431 near the bottom. The third annular platform 20421 can frictionally abut against the top of the annular groove 20431 to ensure that a stop fit can be formed, and can also frictionally abut against the top of the fourth annular platform 20432 to ensure that a stop fit can be formed; the first tooth protrusion 2041 is provided on the inner peripheral wall of the first part 2042; the second annular platform 2044 is provided on the inner peripheral wall of the first part 2042 and is close to the bottom.

[0059] When the target 3 needs to be replaced, rotate the second part 2043. As the second part 2043 rotates, it moves downward. The first part 2042 maintains the frictional contact at the top of the third annular platform 20421 and the fourth annular platform 20432 under the action of gravity, so as to move downward while rotating.

[0060] When the first part 2042 moves until the first tooth projection 2041 and the second tooth projection 2051 are engaged, as the second part 2043 rotates, the first part 2042 drives the first bolt 205 to rotate and move downward through the engagement between the first tooth projection 2041 and the second tooth projection 2051. Since the transmission ratio between the first tooth projection 2041 and the second tooth projection 2051 is relatively large, the rotation speed of the first bolt 205 is relatively fast. As a result, the first bolt 205 can first move downward synchronously with the first part 2042, and then can move downward relative to the first part 2042, so that the first tooth projection 2041 and the second tooth projection 2051 can be disengaged from the engagement; subsequently, the second part 2043 continues to drive the first part 2042 to rotate and move downward; when the first part 2042 moves until the first tooth projection 2041 and the second tooth projection 2051 are re-engaged, as the second part 2043 rotates, the first bolt 205 can first move downward synchronously with the first part 2042, and then can move downward relative to the first part 2042, so that the first tooth projection 2041 and the second tooth projection 2051 are disengaged from the engagement; repeating the above process enables the first part 2042 to periodically drive all the first bolts 205 to rotate through the engagement between the first tooth projection 2041 and the second tooth projection 2051, and at the same time, the shielding cover 204 can be gradually loosened on the connecting arm 201, improving the disassembly efficiency and effectively avoiding the jamming problem caused by different thread pitches.

[0061] After replacing the new target, first press the crimping part 203 on the new target, and then pre-screw the first bolt 205 into the target seat 202; then sleeved the shielding cover 204 on the bottom of the connecting arm 201, and make the shielding cover 204 and the connecting arm 201 form a threaded fit; then rotate the second part 2043. As the second part 2043 rotates, it moves upward. The second part 2043 drives the first part 2042 to rotate and move upward through the frictional contact at the top of the third annular platform 20421 and the fourth annular platform 20432.

[0062] After the first part 2042 moves to the position where the first tooth projection 2041 meshes with the second tooth projection 2051, as the second part 2043 rotates, the first part 2042 drives the first bolt 205 to move upward while rotating through the meshing between the first tooth projection 2041 and the second tooth projection 2051. Due to the relatively large meshing transmission ratio between the first tooth projection 2041 and the second tooth projection 2051, the rotation speed of the first bolt 205 is relatively fast. As a result, the first bolt 205 can first move upward synchronously with the first part 2042, and then can move upward relative to the first part 2042, so that the first tooth projection 2041 and the second tooth projection 2051 can disengage from the meshing; subsequently, the second part 2043 continues to drive the first part 2042 to move upward while rotating; when the first part 2042 moves to the position where the first tooth projection 2041 and the second tooth projection 2051 mesh again, as the second part 2043 rotates, the first bolt 205 can first move upward synchronously with the first part 2042, and then can move upward relative to the first part 2042, so that the first tooth projection 2041 and the second tooth projection 2051 disengage from the meshing; repeating the above process, the first part 2042 can periodically drive all the first bolts 205 to rotate through the meshing cooperation between the first tooth projection 2041 and the second tooth projection 2051, and at the same time, the shielding cover 204 can be gradually tightened on the connecting arm 201, improving the installation efficiency and effectively avoiding the jamming problem caused by different pitches.

[0063] Further, when the cathode tip 2 is further provided with a plurality of first limiting grooves 206, second limiting grooves 207, protrusions 208 and elastic pieces, the process of removing the old target is the same as above; after replacing the new target, the process is generally the same, except that first, the crimping part 203 is crimped on the new target, then the shielding cover 204 is sleeved on the bottom of the connecting arm 201, and then while rotating the first part 2042, the first part 2042 is pushed upward. At this time, the first part 2042 can maintain self-rotation through the stop of the second annular platform 2044 and the first bolt 205 without axial movement. The first part 2042 drives all the first bolts 205 to rotate through the meshing cooperation between the first tooth protrusion 2041 and the second tooth protrusion 2051; when any first bolt 205 rotates until the protrusion 208 is aligned with the second limiting groove 207, under the push of the elastic piece, the protrusion 208 is inserted into the second limiting groove 207, so that the first bolt 205 can stay in the second limiting groove 207, and the second tooth protrusion 2051 thereon is disengaged from the first tooth protrusion 2041; when at least one first bolt 205 does not rotate until the protrusion 208 is aligned with the second limiting groove 207, the first part 2042 can only rotate self under the stop between the first bolt 205 and the second annular platform 2044; when all the first bolts 205 are inserted into the second limiting groove 207, the first part 2042 moves upward and forms a stop cooperation with all the first bolts 205 again, realizing the pre-screw-in of the first bolts 205 into the target seat 202.

[0064] In some other embodiments, to enable the orientation of the cathode tip 2 to be adjustable, the cathode tip 2 is further provided with a rotating arm 210. The rotating arm 210 is hinged to the connecting arm 201 and can rotate around its own axis.

[0065] Specifically in this embodiment, the top end of the rotating arm 210 is vertically arranged on the inner top wall of the housing 1, and the bottom end is hinged to the connecting arm 201; to facilitate the hinged cooperation between the connecting arm 201 and the rotating arm 210, as Figure 3 and Figure 4 shown, on the right side of the top of the connecting arm 201, there is a hinge hole 2011, on the left side of the top of the connecting arm 201, there is a sliding column 2012, on the right side of the bottom of the rotating arm 210, there is a hinge column 2102, and on the left side of the bottom of the rotating arm 210, there is a sliding groove 2101. The sliding groove 2101 is set as an arc structure, and the concave surface faces the sliding groove 2101. The sliding column 2012 is slidably inserted into the sliding groove 2101 during installation, and the hinge column 2102 is rotatably inserted into the hinge hole 2011 during installation, thereby improving the hinged stability between the connecting arm 201 and the rotating arm 210 while ensuring the connection strength between the connecting arm 201 and the rotating arm 210.

[0066] During use, the angle between the connecting arm 201 and the rotating arm 210 can be adjusted first, and then the rotating arm 210 is driven to rotate. The rotating arm 210 synchronously drives the connecting arm 201 to rotate, so as to change the orientation of the cathode head 2 and improve the applicability of the device.

[0067] In a further embodiment, the multi-ion source synchronous sputtering coating device is further provided with a first driving member, and the first driving member is configured to be able to provide a driving force for the rotation of the rotating arm 210.

[0068] Specifically in this embodiment, the first driving member can be set as a first driving motor. The motor shaft of the first driving motor can be directly arranged on the rotating arm 210 to directly drive the rotating arm 210 to rotate, or the rotating arm 210 can be driven to rotate through a first gear and a second gear. Specifically, the first gear is fixedly sleeved on the rotating arm 210 during installation, the second gear is fixedly sleeved on the motor shaft of the first driving motor during installation, and the first gear and the second gear are meshed.

[0069] In other embodiments, the multi-ion source synchronous sputtering coating device is further provided with a second driving member, and the second driving member is configured to be able to provide a driving force for the connecting arm 201 to rotate around the hinge point.

[0070] Specifically in this embodiment, the hinge column 2102 is rotatably arranged on the rotating arm 210, and the connecting arm 201 is fixedly sleeved on the hinge column 2102 through the hinge hole 2011; the second driving member can be set as a second driving motor, and the second driving motor is arranged on the rotating arm 210, and the motor shaft is fixedly arranged on the hinge column 2102, so as to be able to drive the connecting arm 201 to rotate and change the angle between the connecting arm 201 and the rotating arm 210.

[0071] In some other embodiments, to facilitate the cathode head 2 to form a complete magnetron structure, the cathode head 2 can be further provided with a base 211, a magnetic steel 212, an end cover 213, an insulating member 214 and a plurality of magnets 215, as Figure 5 shown, the base 211 is arranged on the top of the target seat 202; a plurality of magnets 215 are inserted through the base 211; the magnetic steel 212 is arranged on the top of the target seat 202 and is fixedly connected to the target seat 202 through a second bolt. The magnetic steel 212 is configured to be able to connect magnetic lines of force to ensure that the magnetic field strength at the top can be enhanced; the end cover 213 is arranged in a ring structure and is arranged on the top of the target seat 202 and is fixedly connected to the target seat 202 through a third bolt. The end cover 213 is simultaneously sleeved outside the base 211, the carbon steel and the plurality of magnets 215. The base 211, the magnetic steel 212, the magnets 215 and the end cover 213 are all at a negative high voltage potential; the insulating member 214 is arranged in a ring structure and can be made of plastic, such as polytetrafluoroethylene, and is located between the connecting arm 201 and the end cover 213.

[0072] Furthermore, for the convenience of placing the workpiece to be coated, the multi-ion source synchronous sputtering coating device is further provided with a bracket, which is inserted into the housing 1 and located in the middle of the housing 1 to ensure that the workpiece to be coated can simultaneously receive the coating molecules or atoms sputtered by the four cathode nozzles 2.

[0073] Another embodiment of the present invention also provides a multi-ion source synchronous sputtering coating process, which uses a multi-ion source synchronous sputtering coating device. The multi-ion source synchronous sputtering coating process includes the following steps:

[0074] S1. Rotate the shielding cover 204 in the reverse direction. The shielding cover 204 drives all the first bolts 205 to rotate through the meshing cooperation between the first tooth protrusion 2041 and the second tooth protrusion 2051, so that the first bolts 205 are disengaged from the cooperation between the crimping part 203 and the target seat 202.

[0075] Specifically, the shielding cover 204 can be rotated manually.

[0076] S2. Remove the old target from the target seat 202 and replace it with a new target.

[0077] S3. Rotate the shielding cover 204 in the forward direction. The shielding cover 204 drives all the first bolts 205 to rotate through the meshing cooperation between the first tooth protrusion 2041 and the second tooth protrusion 2051, so that the first bolts 205 are re-engaged with the crimping part 203 and the target seat 202.

[0078] S4. Coating.

[0079] The technical features of the above embodiments can be combined arbitrarily. For the sake of brief description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0080] The above-described embodiments only represent several implementation manners of the present invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention.

Claims

1. A multi-ion source synchronous sputtering coating device, characterized in that, The multi-ion source synchronous sputtering coating device includes a housing and a plurality of cathode heads all inserted in the housing; Among them, the cathode heads point to the workpiece to be coated, and each cathode head includes a connecting arm, a target seat, a crimping part, a shielding cover and a plurality of first bolts. The connecting arm is arranged on the housing; the target seat is arranged on the connecting arm and is used for placing a target; the crimping part crimps on the target; the shielding cover covers the crimping part and the target seat and forms a threaded fit with the connecting arm. A plurality of first tooth protrusions are arranged on the shielding cover along the circumferential direction; the first bolts are inserted in the crimping part and form a threaded fit with the target seat. The first bolts and the crimping part form a stop fit. A plurality of second tooth protrusions are arranged on each first bolt along the circumferential direction, and the second tooth protrusions can form an engaging fit with the first tooth protrusions.

2. The multi-ion source synchronous sputtering coating device according to claim 1, characterized in that, External threads are arranged on each first bolt; a plurality of mounting holes are arranged on the target seat, and internal threads are arranged on each mounting hole. The internal threads and the external threads form a threaded fit; the shielding cover can form a stop fit with all the first bolts; along the gravity direction, when the first bolts are located below the mounting holes, the cathode heads further include a plurality of first limiting grooves, second limiting grooves, protrusions and a first elastic member, all in plurality. The first limiting grooves are formed on the inner peripheral wall of the mounting holes and can form a stop fit with the first bolts; the second limiting grooves are formed on the inner peripheral wall of the mounting holes and communicate with the first limiting grooves; the plurality of protrusions are arranged along the axis direction of the first bolts and are respectively arranged on the adjacent multiple layers of the external threads closest to the mounting holes. The protrusions can be slidably inserted into the second limiting grooves to limit the rotation of the first bolts. The protrusions can form a threaded fit with the internal threads; the first elastic member is arranged between the crimping part and the first bolts and is configured to have a tendency to drive the protrusions to insert into the second limiting grooves.

3. The multi-ion source synchronous sputtering coating device according to claim 2, wherein, The first elastic member is a shrapnel.

4. The multi-ion source synchronous sputtering coating device according to claim 1, characterized in that, External threads are provided on each of the first bolts; a plurality of mounting holes are provided on the target seat, and internal threads are provided on each of the mounting holes, and the internal threads and the external threads form a threaded fit; the shielding cover can form a stop fit with all the first bolts; along the direction of gravity, when the first bolt is located above the mounting hole, the cathode emitter further includes a plurality of first limiting grooves, second limiting grooves, protrusions and second elastic members, the first limiting grooves are formed on the inner peripheral wall of the mounting hole and can form a stop fit with the first bolt; the second limiting grooves are formed on the inner peripheral wall of the mounting hole and communicate with the first limiting grooves; the plurality of protrusions are arranged along the axis of the first bolt and are respectively arranged on the adjacent multi-layers of the external threads closest to the mounting hole, and the protrusions can be slidably inserted into the second limiting grooves to limit the rotation of the first bolt, and the protrusions can form a threaded fit with the internal threads; the second elastic member is arranged between the target seat and the first bolt and is configured to have a tendency to drive the first bolt out of the mounting hole.

5. The multi-ion source synchronous sputtering coating device according to claim 4, wherein The second elastic member is a compression spring.

6. The multi-ion source synchronous sputtering coating device according to claim 1, characterized in that, The shielding cover has a first part and a second part in a sleeved manner, the second part is located outside, the second part can slide relative to the first part along the axial direction, can rotate relative to the first part, and can form a stop fit with the first part, and when the second part and the first part form a stop fit, the second part can frictionally drive the first part to rotate.

7. The multi-ion source synchronous sputtering coating device according to claim 1, wherein The cathode emitter further includes a rotating arm, the rotating arm is hinged to the connecting arm, and the rotating arm can rotate around its own axis.

8. The multi-ion source synchronous sputtering coating device according to claim 7, characterized in that, 9. The multi-ion source synchronous sputtering coating device according to claim 7, characterized in that, The multi-ion source synchronous sputtering coating device further includes a first driving member configured to provide a driving force for the rotation of the rotating arm.

10. A multi-ion source synchronous sputtering coating process, characterized in that, The multi-ion source synchronous sputtering coating device further includes a second driving member configured to provide a driving force for the connecting arm to rotate around the hinge point. Using the multi-ion source synchronous sputtering coating device according to claim 1, the multi-ion source synchronous sputtering coating process includes the following steps: S1. Rotate the shielding cover in the reverse direction, and the shielding cover drives all the first bolts to rotate through the meshing fit between the first tooth protrusion and the second tooth protrusion, so that the first bolts are disengaged from the cooperation between the crimping part and the target seat; S2. Remove the old target from the target seat and replace it with a new target; S3. Rotate the shielding cover in the forward direction, and the shielding cover drives all the first bolts to rotate through the meshing fit between the first tooth protrusion and the second tooth protrusion, so that the first bolts are re-engaged with the crimping part and the target seat; S4. Coating.

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