CVD (Chemical Vapor Deposition) vacuum reactor with pneumatic seal

Abstract

The invention discloses a CVD vacuum reactor with a pneumatic seal, and relates to the technical field of chemical vapor deposition, the CVD vacuum reactor comprises a shell, an air inlet pipe, an adjusting unit and a storage unit, a heating device is mounted in the shell, a mounting hole is formed in the top end of the shell, and a feeding door is mounted on the side wall of the shell; the adjusting unit comprises a base shell, a flow spray pipe, an adjustable spray head and a self-adaptive flow adjusting assembly. The self-adaptive flow adjusting assembly automatically completes self-adaptive adjustment of the flow of the air inlet pipe by changing the air pressure change generated after the injection area of the adjusting unit is changed, and compared with the prior art that the flow of the air inlet pipe and the injection area of the adjusting unit are synchronously and fixedly adjusted, the air pressure fluctuates in the adjusting process, and the flow of the air inlet pipe and the injection area of the adjusting unit are adjusted. According to the adjusting unit, after the spraying area is changed, the flow of gaseous substances discharged from each spraying hole tends to be consistent with the original flow, and the coating effect on a base material is prevented from being affected.

Description

Technical Field

[0001] The present invention relates to the technical field of chemical vapor deposition, and particularly to a CVD vacuum reactor with pneumatic sealing. Background Art

[0002] CVD refers to "chemical vapor deposition", which is a technique for depositing solid thin films by gas-phase deposition. It uses gaseous substances to generate solid deposits on the gas or gas-solid interface through chemical reactions at a certain temperature. CVD reactions are usually carried out at atmospheric pressure or in a vacuum, and the film has good diffraction properties, enabling uniform film coating on the surfaces of workpieces with complex shapes.

[0003] After retrieval, Chinese Patent Publication No. CN116083887B discloses a CVD vacuum reactor with pneumatic sealing, which includes: a housing, an inlet pipe, an adjustment unit, and a placement unit; a feed door is installed on the housing, and the feed door is connected to the housing through a valve. A heating device is installed inside the housing... The placement unit is used to place and fix multiple substrates. This patent identifies the number of substrates to be coated by judging the deformation amount of the spring. If the number of substrates is large, the inner tube can be rotated forward to synchronously increase the intake air flow rate and the spraying area; if the number of substrates is small, the inner tube can be rotated backward to synchronously reduce the intake air flow rate and the spraying area; thereby improving the film coating effect on the substrates, reducing the waste of gaseous substances, and improving the effective utilization of energy. However, this patent has the following defects in actual use:

[0004] 1. The air flow control of the adjustment unit is inaccurate: The intake air flow rate is determined by the overlapping area of the holes of the second flow adjustment piece and the first flow adjustment piece. When the inner tube is rotated, the intake air flow rate will continuously change. The spraying area is adjusted by the number of spray holes blocked by the slider. Due to the spacing between the spray holes, the spraying area changes in a stepped manner when the inner tube is rotated. This design results in inconsistent gas flow rates discharged from the spray holes when the spraying area changes, affecting the film coating effect on the substrates. For example, the film coating thickness may be uneven for different numbers of substrates in the same batch.

[0005] 2. The heat conduction problem of the adjustment unit: The adjustment unit is located inside the housing. When the heating device is started, the heat inside the housing will be conducted to the adjustment unit, causing chemical reactions of gaseous substances inside the adjustment unit to generate solid deposits, which will then block the spray holes and affect the normal operation of the device. Summary of the Invention

[0006] The purpose of the present invention is to provide a CVD vacuum reactor with pneumatic sealing to solve the problems raised in the above background art.

[0007] To achieve the above invention purpose, the present invention adopts the following technical solutions:

[0008] The present invention provides a CVD vacuum reactor with pneumatic seal, comprising a housing, an air inlet pipe, an adjustment unit, and a storage unit. The housing has a heating device installed therein, and a mounting hole is provided at the top of the housing. The air inlet pipe delivers gaseous substances into the housing through the mounting hole through the adjustment unit. The storage unit is installed in the housing, and a feed door is installed on the side wall of the housing. The adjustment unit is characterized in that it includes a base shell, a flow nozzle, an adjustable nozzle, and an adaptive flow adjustment component.

[0009] The edge of the bottom of the base shell extends outward to form an outer edge that can completely cover the mounting hole. The base shell is mounted on the top of the shell body through the outer edge and blocks the mounting hole. The interior of the base shell is hollow to form a transition cavity.

[0010] The output end of the air inlet pipe is connected to the top end of the flow nozzle. The bottom end of the flow nozzle is sealed and extends vertically downward through the center of the top wall of the base shell into the transition cavity. Strip-shaped air ports are evenly arranged on the outer wall of the bottom end of the flow nozzle along the circumferential direction. A cross-shaped groove is formed through the bottom wall of the base shell. The cross-shaped groove consists of four strip grooves in the shape of right triangles, and the four strip grooves are arranged perpendicular to each other with their right-angle vertices as a common center point.

[0011] The adjustable nozzle is sealed and rotatably mounted on the outer edge of the base shell, with the top surface of the adjustable nozzle closely contacting the bottom wall of the base shell. The adjustable nozzle has a plurality of spray holes distributed in a cross-shaped array at positions corresponding to the cross-shaped groove. The adjustable nozzle is also connected to a first driving member for driving it to rotate.

[0012] The adaptive flow regulation component includes a sealing ring that is sealingly and slidingly sleeved on the strip-shaped air port of the flow nozzle and a second driving component. The second driving component is used to drive the sealing ring to slide to adaptively adjust the sealing area of the strip-shaped air port so that the air pressure in the transition chamber is at a preset air pressure value.

[0013] Furthermore, the base shell includes an upper cover body and a lower cover body that are detachably connected. Both the upper cover body and the lower cover body are cylindrical and flat structures. A matching hole for matching with the flow nozzle is provided at the center position of the upper cover body, and the outer wall of the flow nozzle is threadedly matched with the inner wall of the matching hole.

[0014] Furthermore, a fixing ring adapted to the mounting hole is provided at the bottom of the outer edge, the edge of the top of the adjustable nozzle extends outward to form a mounting ring adapted to the fixing ring, and the inner side of the fixing ring is threadedly connected to a pressure ring that interferes with the mounting ring.

[0015] Furthermore, the first driving member includes a connecting block that is slidably fitted in the inner arc groove of the fixing ring and a handle fixed to the top of the connecting block. The bottom end of the connecting block is fixedly connected to the mounting ring, and a scale is provided on the top of the outer edge.

[0016] Further, the second driving member includes a partition plate and a counterweight ring. The center of the partition plate has a through hole adapted to the flow nozzle. The inner wall of the through hole is in sealed sliding fit with the outer wall of the flow nozzle. The outer wall of the partition plate is in sealed sliding fit with the inner wall of the transition cavity. The counterweight ring is fixedly arranged on the top of the partition plate. The partition plate is fixedly connected to the blocking ring through a connecting member. A limiting ring is also arranged on the flow nozzle.

[0017] Further, a heat insulation assembly is arranged outside the adjustable nozzle. The heat insulation assembly includes a heat insulation cover with an open top. The top of the heat insulation cover is welded to the bottom of the mounting ring. There is a first equidistant gap between the inner wall of the heat insulation cover and the outer wall of the adjustable nozzle. There is a second equidistant gap between the bottom wall of the heat insulation cover and the bottom wall of the adjustable nozzle. The first equidistant gap and the second equidistant gap communicate to form a heat insulation cavity. A nozzle corresponding to the injection hole of the adjustable nozzle is also arranged on the bottom wall of the heat insulation cover. The top end of the nozzle is in sealed fit connection with the bottom wall of the adjustable nozzle.

[0018] Further, the heat insulation cover is made of heat insulation material.

[0019] Further, channels penetrating through the mounting ring and the connecting block are symmetrically arranged on the adjustable nozzle. The two channels are respectively a liquid inlet channel and a liquid outlet channel. Both the liquid inlet channel and the liquid outlet channel communicate with the heat insulation cavity and are connected to an external coolant circulation device.

[0020] Further, the adjustable nozzle includes a columnar body. The columnar body is in threaded fit connection with a pressing ring. The injection holes are arranged on the columnar body. The columnar body and the heat insulation cover enclose a heat insulation cavity.

[0021] Further, a sealing gasket is arranged between the mounting ring and the outer extension edge, and sealing is achieved by compressing the sealing gasket.

[0022] Compared with the prior art, the above one or more technical solutions have the following beneficial effects:

[0023] 1. Adaptive flow regulation: Through the adaptive flow regulation component, the intake air flow can be automatically adjusted according to the change of the injection area, ensuring that the flow of gaseous substances discharged from each injection hole remains consistent, thereby avoiding the problem of uneven coating thickness of the substrate.

[0024] 2. Heat insulation and cooling design: A heat insulation assembly is arranged outside the adjustable nozzle, effectively blocking the heat conduction from the shell to the adjustment unit, preventing the generation of solid deposits of gaseous substances in the adjustment unit, and preventing the spray holes from being blocked.

[0025] 3. Precise adjustment and stability: The combined design of the adjustable nozzle and the cross-shaped groove, together with the first driving member and the second driving member, can precisely adjust the injection area and the intake air flow, ensuring the stable operation of the reactor under different working conditions.

[0026] 4. Modularity and Convenient Maintenance: The base shell is designed to be detachable, facilitating the installation and maintenance of the flow nozzle and the adjustment component; the modular design of the adjustable nozzle and the heat insulation component enables regular cleaning and maintenance, extending the service life of the equipment.

[0027] In summary, by optimizing the structural design of the adjustment unit, the present invention solves the problems of inaccurate air flow control and heat conduction in the prior art, and significantly improves the coating effect and operation stability of the CVD vacuum reactor.

[0028] It should be understood that the above general description and the following detailed description are only exemplary and explanatory, and cannot limit the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The attached drawings forming a part of this specification are used to provide a further understanding of the present invention. The schematic embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention.

[0030] Figure 1 is a schematic diagram of the overall structure of the present invention;

[0031] Figure 2 is a schematic top view structure diagram of the present invention;

[0032] Figure 3 is Figure 2 a schematic A-A cross-sectional structure diagram of

[0033] Figure 4 is Figure 3 a partial structure schematic diagram at B of

[0034] Figure 5 is Figure 4 a three-dimensional structure schematic diagram of

[0035] Figure 6 is a schematic front view structure diagram of the present invention;

[0036] Figure 7 is Figure 6 a schematic C-C cross-sectional structure diagram of

[0037] Figure 8 is a schematic front view structure diagram after the present invention is disassembled;

[0038] Figure 9 is Figure 8 a schematic diagram of the first perspective of

[0039] Figure 10 is Figure 8 a schematic diagram of the second perspective of

[0040] In the figure:

[0041] 1 - Housing; 11 - Mounting hole; 2 - Adjusting unit; 3 - Base housing; 31 - Extension edge; 311 - Fixed ring; 312 - Pressing ring; 313 - Arc groove; 32 - Transition cavity; 33 - Cross-shaped groove; 331 - Strip-shaped groove; 34 - Upper cover body; 341 - Adaptation hole; 35 - Lower cover body; 4 - Flow nozzle; 41 - Strip-shaped air port; 5 - Adjustable nozzle; 51 - Injection hole; 52 - First driving member; 521 - Connecting block; 522 - Handle; 53 - Mounting ring; 54 - Liquid inlet channel; 55 - Liquid outlet channel; 56 - Columnar body; 61 - Sealing ring; 62 - Second driving member; 621 - Partition plate; 622 - Counterweight ring; 623 - Limiting ring; 7 - Heat shield; 71 - Heat insulation cavity; 711 - First equidistant gap; 712 - Second equidistant gap; 72 - Nozzle. Detailed implementation manners

[0042] In order to enable those skilled in the art to better understand the solution of this application, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are only a part of the embodiments of this application, rather than all the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of this application.

[0043] Please refer to Figures 1-10 , the present invention provides a CVD vacuum reactor with pneumatic sealing, including a housing 1, an inlet pipe (not shown), an adjusting unit 2 and a placement unit. A heating device is installed inside the housing 1, and a mounting hole 11 is opened at the top of the housing 1. The inlet pipe conveys gaseous substances into the housing 1 through the adjusting unit 2 at the mounting hole 11, the placement unit is installed inside the housing 1, and a feed door is installed on the side wall of the housing 1. During use, the substrates are placed in the placement unit in sequence from the center to the outside, and the staff can adjust the spraying area and flow rate of the gaseous substances through the adjusting unit 2 according to the number of substrates (i.e., the area occupied by the substrates) to ensure the coating effect of the substrates and avoid energy waste of the gaseous substances.

[0044] In order to ensure that after the spraying area of the adjusting unit 2 changes, the flow rate of the gaseous substances can remain relatively stable, so as to ensure the consistent coating thickness of the substrates and improve the coating effect.

[0045] The present invention optimizes the structure of the adjusting unit 2 in the prior art.

[0046] Specifically, as Figure 4 shown, the adjusting unit 2 includes a base housing 3, a flow nozzle 7, an adjustable nozzle 5 and an adaptive flow rate adjusting component.

[0047] Among them, the edge at the bottom of the base shell 3 extends outward to form an extension edge 31 that can completely cover the mounting hole 11, enabling the base shell 3 to be mounted on the top of the shell 1 through the extension edge 31 and block the mounting hole 11, so as to form a sealed space inside the shell 1 after the base shell 3 is mounted. Specifically, the extension edge 31 of the base shell 3 can be mounted on the top of the shell 1 by means of welding or bolts, etc.

[0048] The interior of the base shell 3 is hollow to form a transition cavity 32.

[0049] The output end of the intake pipe is connected to the top end of the flow nozzle 7. The bottom end of the flow nozzle 7 is provided with a plug and extends vertically downward through the center of the top wall of the base shell 3 into the transition cavity 32. Strip-shaped air ports 41 are uniformly arranged on the outer wall of the bottom end of the flow nozzle 7 along the circumferential direction.

[0050] Such as Figure 5 、 Figure 7 、 Figure 9 and Figure 10 As shown, a cross-shaped groove 33 is formed through the bottom wall of the base shell 3. The cross-shaped groove is composed of four strip-shaped grooves 331 in the shape of right-angled triangles, and the four strip-shaped grooves 331 are arranged perpendicular to each other with their right-angled vertices as the common center point.

[0051] The adjustable nozzle 5 is sealed and rotationally assembled on the extension edge 31 of the base shell 3, and the top surface of the adjustable nozzle 5 is closely attached to the bottom wall of the base shell 3. A number of injection holes 51 are arranged in a cross-shaped array at the position of the adjustable nozzle 5 corresponding to the cross-shaped groove 33. The adjustable nozzle 5 is also connected with a first driving member 52 for driving it to rotate.

[0052] Working principle: During use, the intake pipe introduces gaseous substances into the flow nozzle 7. The gaseous substances enter the transition cavity 32 through the strip-shaped air ports 41, and then are introduced into the shell 1 through the injection holes 51 of the adjustable nozzle 5. The heating device in the shell 1 heats the gaseous substances, causing various gaseous substances to undergo chemical reactions, thereby generating solid deposits on the surface of the substrate and completing the vacuum coating of the substrate.

[0053] Before coating, the staff can drive the adjustable nozzle 5 to rotate through the first driving member 52 according to the number of substrates to adjust the spraying range of the adjustable nozzle 5. For example: If the number of substrates is small, the adjustable nozzle 5 can be rotated to gradually block the peripheral injection holes 51 by the bottom wall of the base shell 3, thereby reducing the spraying area of the adjustable nozzle 5. If the number of substrates is large, the adjustable nozzle 5 can be rotated to reduce the number of injection holes 51 blocked by the bottom wall of the base shell 3, thereby increasing the spraying area of the adjustable nozzle 5.

[0054] When adjusting the spraying range of the adjustable nozzle 5, if the spraying area of the adjustable nozzle 5 changes while the flow rate of the gaseous substance entering the transition chamber 32 remains unchanged (i.e., the diameter of the strip-shaped air port 41 does not change), the air pressure in the transition chamber 32 will change, resulting in a change in the flow rate of the gaseous substance discharged from each spraying hole 51 of the adjustable nozzle 5, thereby affecting the coating effect of the substrate.

[0055] Therefore, the present invention designs an adaptive flow rate adjustment component, which includes a blocking ring 61 and a second driving member 62 that are hermetically and slidably sleeved at the strip-shaped air port 41 of the flow rate spray pipe 7.

[0056] The second driving member 62 is used to drive the blocking ring 61 to slide, so as to adaptively adjust the blocking area of the strip-shaped air port 41 and make the air pressure in the transition chamber 32 reach a preset air pressure value. When the spraying area of the adjustable nozzle 5 decreases: the air pressure in the transition chamber 32 increases, and the second driving member 62 drives the blocking ring 61 to move, increasing the blocking area of the strip-shaped air port 41 and reducing the effective diameter of the gaseous substance passing through the strip-shaped air port 41, thereby reducing the flow rate of the gaseous substance entering the transition chamber 32 and avoiding waste of the gaseous substance.

[0057] When the spraying area of the adjustable nozzle 5 increases: the air pressure in the transition chamber 32 decreases, and the second driving member 62 drives the blocking ring 61 to move, reducing the blocking area of the strip-shaped air port 41 and increasing the effective diameter of the gaseous substance passing through the strip-shaped air port 41, thereby increasing the flow rate of the gaseous substance entering the transition chamber 32 and ensuring that the flow rate of the gaseous substance discharged from each spraying hole 51 of the adjustable nozzle 5 tends to be the same as the original flow rate, avoiding affecting the coating effect of the substrate.

[0058] In this embodiment, the base shell 3 includes a detachable upper cover 34 and a lower cover 35. Both the upper cover 34 and the lower cover 35 are columnar flat structures. At the central position of the upper cover 34, there is an adaptation hole 341 adapted to the flow rate spray pipe 7, and the outer wall of the flow rate spray pipe 7 is in threaded cooperation with the inner wall of the adaptation hole 341. This design enables the base shell 3 to be disassembled, facilitating the installation and regular maintenance of the flow rate spray pipe 7 and the second driving member 62.

[0059] In this embodiment, a fixing ring 311 adapted to the installation hole 11 is provided at the bottom of the extension edge 31. The edge at the top of the adjustable nozzle 5 extends outward to form an installation ring 53 adapted to the fixing ring 311. The inner side of the fixing ring 311 is threadedly connected with a pressing ring 312 that abuts against the installation ring 53. During use, the adjustable nozzle 5 snaps the installation ring 53 into the fixing ring 311, and then the pressing ring 312 abuts against the installation ring 53 to make the installation ring 53 closely adhere to the bottom of the extension edge 31, thereby completing the installation of the adjustable nozzle 5. To improve the sealing performance, a sealing gasket is provided between the installation ring 53 and the extension edge 31, and the sealing is achieved by compressing the sealing gasket.

[0060] In order to facilitate the staff to rotate the adjustable nozzle 5, in this embodiment, arc grooves 313 are symmetrically and penetratingly formed on the outer extension edge 31 inside the fixed ring 311. The first driving member 52 includes a connecting block 521 slidably fitted in the arc groove 313 and a handle 522 fixed to the top end of the connecting block 521. The bottom end of the connecting block 521 is fixedly connected to the mounting ring 53, and a scale (not shown) is provided on the top of the outer extension edge 31. During use, the staff can rotate the handle 522 and precisely control the rotation angle of the adjustable nozzle 5 according to the scale, so that the bottom wall of the base shell 3 adaptively covers the injection holes 51 of the adjustable nozzle 5, thereby completing the precise adjustment of the injection area of the adjustment unit 2.

[0061] In this embodiment, the second driving member 62 includes a partition plate 621 and a counterweight ring 622. The center of the partition plate 621 has a through hole adapted to the flow nozzle 7, and the inner wall of the through hole is in sealed sliding fit with the outer wall of the flow nozzle 7. The outer wall of the partition plate 621 is in sealed sliding fit with the inner wall of the transition chamber 32. The counterweight ring 622 is fixedly arranged on the top of the partition plate 621, and the partition plate 621 is fixedly connected to the plugging ring 61 through a connecting member. A limiting ring 623 is also provided on the flow nozzle 7.

[0062] When the gaseous substance enters the transition chamber 32, the air pressure in the transition chamber 32 causes the partition plate 621 to disengage from the limiting ring 623 and remain in a stable state after rising to a certain height. When the injection area of the adjustment unit 2 decreases, the air pressure in the transition chamber 32 increases, pushing the partition plate 621 upward, and driving the plugging ring 61 to move upward synchronously through the connecting member, increasing the plugging area of the strip-shaped air port 41, thereby reducing the flow rate of the gaseous substance entering the transition chamber 32 (the partition plate 621 tends to be stable after rising to a certain height). When the injection area of the adjustment unit 2 increases, under the action of the gravity of the counterweight ring 622, the partition plate 621 moves downward, driving the plugging ring 61 to move downward synchronously through the connecting member, reducing the plugging area of the strip-shaped air port 41, thereby increasing the flow rate of the gaseous substance entering the transition chamber 32 (the partition plate 621 tends to be stable after descending to a certain height).

[0063] To prevent the temperature of the heating device from being conducted into the adjustment unit 2, which may cause chemical reactions of gaseous substances in the adjustment unit 2 to generate solid deposits, in this embodiment, a heat insulation component is provided outside the adjustable nozzle 5. The heat insulation component includes a heat insulation cover 7 with an open top, and the top of the heat insulation cover 7 is welded to the bottom of the mounting ring 53. There is a first equidistant gap 711 between the inner wall of the heat insulation cover 7 and the outer wall of the adjustable nozzle 5, and a second equidistant gap 712 between the inner bottom wall of the heat insulation cover 7 and the bottom wall of the adjustable nozzle 5. The first equidistant gap 711 and the second equidistant gap 712 communicate to form a heat insulation cavity 71. A nozzle 72 corresponding to the injection hole 51 of the adjustable nozzle 5 is also provided on the bottom wall of the heat insulation cover 7, and the top end of the nozzle 72 is in sealed cooperation connection with the bottom wall of the adjustable nozzle 5. The heat insulation cover 7 is made of heat insulation material. During use, after the gaseous substances are discharged through the injection hole 51, they can be discharged into the housing 1 through the nozzle 72. During this process, the heat insulation cover 7 wraps around the outside of the adjustable nozzle 5 to play a heat insulation role, preventing chemical reactions of gaseous substances in the adjustable nozzle 5 and the transition cavity 32 to generate solid deposits.

[0064] Furthermore, channels penetrating through the mounting ring 53 and the connecting block 521 are symmetrically provided on the adjustable nozzle 5. The two channels are respectively a liquid inlet channel 54 and a liquid outlet channel 55. The liquid inlet channel 54 and the liquid outlet channel 55 are both communicated with the heat insulation cavity 71 and are connected to an external coolant circulation device (not shown). During use, the coolant circulation device introduces the coolant into the heat insulation cavity 71 from the liquid inlet channel 54 and then discharges it from the liquid outlet channel 55, so that the heat insulation cavity 71 is filled with circulating coolant. A condensation layer is formed by the coolant in the heat insulation cavity 71. On the one hand, it blocks heat transfer, and on the other hand, it controls the temperature of the adjustable nozzle 5 to prevent chemical reactions of gaseous substances in the adjustable nozzle 5 and the transition cavity 32 due to excessive temperature to generate solid deposits.

[0065] Even further, the adjustable nozzle 5 includes a columnar body 56, and the columnar body 56 is in threaded fit connection with the pressing ring 312. The injection hole 51 is provided on the columnar body 56, and the columnar body 56 and the heat insulation cover 7 enclose to form the heat insulation cavity 71. This design enables the columnar body 56 and the mounting ring 53 to be disassembled, facilitating regular maintenance and cleaning work inside the heat insulation cavity 71.

[0066] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its inventive concept, makes equivalent substitutions or changes, and should be covered within the protection scope of the present invention.

Claims

1. A CVD vacuum reactor with pneumatic sealing, comprising a housing, an intake pipe, an adjustment unit and a placement unit. A heating device is installed inside the housing, and an installation hole is provided at the top of the housing. The intake pipe conveys gaseous substances into the housing through the adjustment unit at the installation hole. The placement unit is installed inside the housing, and a feed door is installed on the side wall of the housing; characterized in that, The adjustment unit includes a base shell, a flow nozzle, an adjustable nozzle, and an adaptive flow rate adjustment component; It is characterized in that the edge of the bottom of the base shell extends outward to form an outer extension edge that can completely cover the mounting hole. The base shell is mounted on the top of the shell through the outer extension edge and seals the mounting hole. The interior of the base shell is hollow to form a transition cavity; The output end of the intake pipe is connected to the top end of the flow nozzle. The bottom end of the flow nozzle is sealed and arranged vertically downward through the center of the top wall of the base shell and extends into the transition cavity. Strip-shaped air ports are uniformly arranged on the outer wall of the bottom end of the flow nozzle along the circumferential direction; a cross-shaped groove is formed through the bottom wall of the base shell. The cross-shaped groove is composed of four strip-shaped grooves in the shape of right triangles, and the four strip-shaped grooves are arranged perpendicular to each other with their right-angle vertices as the common center point; The adjustable nozzle is hermetically and rotatably assembled on the outer extension edge of the base shell. The top surface of the adjustable nozzle is closely attached to the bottom wall of the base shell. A number of injection holes are arranged in a cross-shaped array at the position of the adjustable nozzle corresponding to the cross-shaped groove. The adjustable nozzle is also connected with a first driving member for driving it to rotate; The adaptive flow rate adjustment component includes a plugging ring hermetically and slidably sleeved at the strip-shaped air port of the flow nozzle and a second driving member. The second driving member is used to drive the plugging ring to slide to adaptively adjust the plugging area of the strip-shaped air port so that the air pressure in the transition cavity is at a preset air pressure value.

2. The CVD vacuum reactor with an attached pneumatic seal according to claim 1, characterized in that, The base shell includes a detachable upper cover body and a lower cover body. Both the upper cover body and the lower cover body are columnar flat structures. There is an adaptation hole adapted to the flow nozzle at the central position of the upper cover body. The outer wall of the flow nozzle is in threaded cooperation with the inner wall of the adaptation hole.

3. The CVD vacuum reactor with an attached pneumatic seal according to claim 1, characterized in that, A fixing ring adapted to the mounting hole is arranged at the bottom of the outer extension edge. The edge of the top of the adjustable nozzle extends outward to form a mounting ring adapted to the fixing ring. A pressing ring that abuts against the mounting ring is threadedly connected to the inner side of the fixing ring.

4. The CVD vacuum reactor with an attached pneumatic seal according to claim 1, characterized in that, The first driving member includes a connecting block slidably adapted in the inner arc groove of the fixing ring and a handle fixed to the top end of the connecting block. The bottom end of the connecting block is fixedly connected to the mounting ring. A scale is arranged at the top of the outer extension edge.

5. The CVD vacuum reactor with an attached pneumatic seal according to claim 1, wherein The second driving member includes a partition plate and a counterweight ring. The center of the partition plate has a through hole adapted to the flow nozzle. The inner wall of the through hole is in sealed and sliding cooperation with the outer wall of the flow nozzle. The outer wall of the partition plate is in sealed and sliding cooperation with the inner wall of the transition cavity. The counterweight ring is fixedly arranged on the top of the partition plate. The partition plate is fixedly connected to the plugging ring through a connecting member. A limiting ring is also arranged on the flow nozzle.

6. The CVD vacuum reactor with an attached pneumatic seal according to claim 1, characterized in that, An insulation component is arranged on the outer side of the adjustable nozzle. The insulation component includes an insulation cover with an open top. The top of the insulation cover is welded to the bottom of the mounting ring. There is a first equidistant gap between the inner wall of the insulation cover and the outer wall of the adjustable nozzle. There is a second equidistant gap between the inner bottom wall of the insulation cover and the bottom wall of the adjustable nozzle. The first equidistant gap and the second equidistant gap communicate to form an insulation cavity. A nozzle corresponding to the injection hole of the adjustable nozzle is also arranged on the bottom wall of the insulation cover. The top end of the nozzle is in sealed cooperation connection with the bottom wall of the adjustable nozzle.

7. The CVD vacuum reactor with an attached pneumatic seal according to claim 6, characterized in that, The insulation cover is made of insulation material.

8. The CVD vacuum reactor with an attached pneumatic seal according to claim 6, characterized in that, Channels penetrating through the mounting ring and the connecting block are symmetrically arranged on the adjustable nozzle. The two channels are respectively a liquid inlet channel and a liquid outlet channel. Both the liquid inlet channel and the liquid outlet channel communicate with the heat insulation cavity and are connected to an external coolant circulation device.

9. The CVD vacuum reactor with an attached pneumatic seal according to claim 6, characterized in that, The adjustable nozzle includes a columnar body, which is threadedly connected with a pressing ring. Injection holes are arranged on the columnar body, and the columnar body and the heat insulation cover enclose a heat insulation cavity.

10. The CVD vacuum reactor with an attached pneumatic seal according to any one of claims 1 to 9, characterized in that, A sealing gasket is arranged between the mounting ring and the outer extension edge, and sealing is achieved by compressing the sealing gasket.

Images