Instantaneous heating device, instantaneous heating method and wet cleaning equipment

Abstract

The instantaneous heating device comprises a shell, an energy connecting loop and a medium inlet pipeline, and a first temperature detection component is arranged on the medium inlet pipeline and used for obtaining the temperature of a medium inlet; the medium outlet pipeline enters the shell through the medium outlet; the medium heating cavity is internally used for accommodating a medium; the heating part is arranged in the medium heating cavity; and the control component is used for obtaining corresponding energy loading power according to the temperature of the medium inlet and the target temperature of the medium outlet and controlling the heating component to heat at the energy loading power, heat emitted by the heating component is transmitted to the medium, and the medium flows out from the medium outlet pipeline after being heated. According to the device, a large amount of high-temperature media can be prevented from being left in the medium container, it can be guaranteed that the media reaching a cleaned and dried object have the high enough temperature, and therefore the cleaning and drying effects are improved on the basis that the use risk is reduced. The invention further discloses wet cleaning equipment and an instantaneous heating method, and the wet cleaning equipment and the instantaneous heating method have the same advantages.

Description

Technical Field

[0001] The present invention belongs to the technical field of cleaning equipment, and particularly relates to an instantaneous heating device, an instantaneous heating method, and a wet cleaning equipment. Background Art

[0002] In the semiconductor industry, cleaning equipment is required, and some heating devices are widely used in the cleaning equipment. This is because during the cleaning and drying processes of wafers, the temperature of the heating medium plays an important role, which directly affects the cleaning effect of the wafers. Specifically, if the temperature of the heating medium is too low, it is likely to cause insufficient cleaning. If the temperature of the heating medium is too high, it may cause the properties of the heating medium itself to be unstable, and there is even a risk of explosion. Therefore, it is necessary to control the heating medium within a suitable temperature range to ensure both the cleaning degree and the safety of the medium itself.

[0003] Taking an IPA heater as an example, IPA is an isopropyl alcohol liquid medium. In a common current IPA heater, a circulating on-line heating method is adopted inside the liquid supply end. However, in the entire pipeline system that is dozens of meters long, due to the natural heat dissipation phenomena existing in both the IPA conveying pipeline and the IPA container itself, there will be a certain gap between the medium outlet temperature and the actually set heating temperature. If the temperature at the medium outlet fails to reach the expected target temperature, the cleaning and drying effects will be significantly reduced. For example, if it is desired to make the temperature at the medium outlet reach 70°C, the circulating heating temperature inside the liquid supply end is set to 70°C. However, after the heat dissipation through the IPA container itself and the long pipeline system, the temperature finally reaching the medium outlet may have dropped to 60°C, which will greatly reduce its cleaning effect. To solve this temperature gap problem, if the sum of the outlet temperature and the temperature drop value caused by the heat dissipation of the container pipeline is used as the initial medium heating temperature, for example, the IPA medium at the liquid supply end is first heated to 76°C to ensure that the temperature finally reaching the medium outlet reaches or approaches 70°C. However, this will cause the heating temperatures of a large amount of IPA medium inside the liquid supply end to exceed a certain safety value. Since the IPA medium itself has the characteristics of being flammable and explosive, the higher the temperature, the higher the risk of explosion inside the liquid supply end. Therefore, this method of heating to a higher temperature is not applicable to the IPA medium, which will greatly increase the production risk. It can be seen that there is a contradiction that is not easy to reconcile in setting the IPA heating temperature. Summary of the Invention

[0004] To solve the above problems, the present invention provides an instantaneous heating device, an instantaneous heating method, and a wet cleaning equipment, which can avoid retaining a large amount of high-temperature medium inside the container and ensure that the medium reaching the cleaning and drying object has a sufficiently high temperature. Therefore, on the basis of reducing the use risk, the cleaning and drying effects can be improved.

[0005] An instantaneous heating device provided by the present invention includes:

[0006] A housing, which is provided with a medium inlet, a medium outlet, and an energy connection port;

[0007] An energy connection circuit, which enters the interior of the housing through the energy connection port;

[0008] A medium inlet pipeline, which enters the interior of the housing through the medium inlet, and is provided with a first temperature detection component thereon for obtaining the temperature of the medium inlet;

[0009] A medium outlet pipeline, which enters the interior of the housing through the medium outlet;

[0010] A medium heating cavity, which is arranged inside the housing and is respectively communicated with the medium inlet pipeline and the medium outlet pipeline, and is used for accommodating the medium inside;

[0011] A heating component, which is arranged inside the medium heating cavity;

[0012] A control component, which is communicatively connected to the first temperature detection component, the target temperature input module of the medium outlet, and the energy connection circuit, and is used for obtaining the corresponding energy loading power according to the temperature of the medium inlet and the target temperature of the medium outlet, and controlling the heating component to heat with the energy loading power. The heat generated by the heating component is transmitted to the medium, and the medium flows out from the medium outlet pipeline after being heated.

[0013] Preferably, in the above-mentioned instantaneous heating device, there is also a heat transfer core for completely covering the medium heating cavity, and the heat transfer core is in contact with the heating component.

[0014] Preferably, in the above-mentioned instantaneous heating device, the housing is also provided with a gas inlet and a gas outlet, and both the gas inlet and the gas outlet are communicated with the space between the housing and the medium heating cavity.

[0015] Preferably, in the above-mentioned instantaneous heating device, the medium flow channel in the medium heating cavity is a spiral groove type medium flow channel, and the medium heating cavity is a heating cavity made of PFA material.

[0016] Preferably, in the above-mentioned instantaneous heating device, the housing includes a stainless steel housing unit and a PTFE housing unit sleeved on the outer periphery of the stainless steel housing unit.

[0017] Preferably, in the above-mentioned instantaneous heating device, a heat preservation cover shell capable of surrounding the top of the heating component is also covered on the top of the medium heating cavity, and the heat preservation cover shell is provided with a through hole for passing through the energy connection circuit.

[0018] A wet cleaning device provided by the present invention includes:

[0019] A wet cleaning chamber, inside which is provided with the instantaneous heating device described in any one of the above;

[0020] A medium supply device, the medium outlet of which is communicated with the instantaneous heating device, and the instantaneous heating device is used to heat the medium coming out of the medium outlet to the target temperature again.

[0021] Preferably, in the above wet cleaning device, a flow controller is further provided between the medium outlet of the medium supply device and the instantaneous heating device, and the flow controller is communicatively connected with the control component in the instantaneous heating device, and the control component is used to control the flow rate of the flow controller.

[0022] An instantaneous heating method provided by the present invention, using the instantaneous heating device described in any one of the above, includes:

[0023] Obtaining the inlet medium temperature from the first temperature detection component;

[0024] Obtaining the outlet medium target temperature from the outlet medium target temperature input module;

[0025] Obtaining the corresponding energy loading power according to the inlet medium temperature and the outlet medium target temperature;

[0026] Controlling the heating component to heat at the energy loading power;

[0027] Transmitting the heat generated by the heating component to the medium;

[0028] After being heated, the medium flows out from the outlet medium pipeline.

[0029] Preferably, in the above instantaneous heating method, before controlling the heating component to heat at the energy loading power, it further includes:

[0030] Obtaining the flow rate passing through the instantaneous heating device;

[0031] Lowering the flow rate passing through the instantaneous heating device.

[0032] As can be seen from the above description, in the instant heating device provided by the present invention, since there is a first temperature detection component on the inlet medium pipeline for obtaining the temperature of the inlet medium, and there is a medium heating cavity inside for accommodating the medium, the heating component is arranged inside the medium heating cavity, the control component obtains the corresponding energy loading power according to the temperature of the inlet medium and the target temperature of the outlet medium, and controls the heating component to heat with this energy loading power. The heat generated by the heating component is transmitted to the medium, and the medium flows out from the outlet medium pipeline after being heated. By using this instant heating method, it can be ensured that the flowing-out medium meets the temperature requirement, and the medium in the medium container does not need to be raised to a relatively high temperature. Therefore, this instant heating device can avoid retaining a large amount of high-temperature medium inside the container and ensure that the medium reaching the cleaning and drying object has a sufficiently high temperature. Thus, it can improve the cleaning and drying effect on the basis of reducing the use risk. The instant heating method and the wet cleaning equipment provided by the present invention have the same advantages. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to the provided drawings.

[0034] Figure 1 It is a cross-sectional view of an embodiment of an instant heating device provided by the present invention;

[0035] Figure 2 It is a three-dimensional schematic diagram of an embodiment of an instant heating device provided by the present invention;

[0036] Figure 3 It is a schematic diagram of another specific embodiment of the instant heating device provided by the present invention;

[0037] Figure 4 It is a schematic diagram of an embodiment of a wet cleaning equipment provided by the present invention;

[0038] Figure 5 It is a schematic diagram of an embodiment of an instant heating method provided by the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0039] The core of the present invention is to provide an instant heating device, an instant heating method and a wet cleaning equipment, which can avoid retaining a large amount of high-temperature medium inside the container and ensure that the medium reaching the cleaning and drying object has a sufficiently high temperature. Thus, it can improve the cleaning and drying effect on the basis of reducing the use risk.

[0040] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0041] An embodiment of an instantaneous heating device provided by the present invention is as Figure 1 and Figure 2 shown. Figure 1 It is a cross-sectional view of an embodiment of an instantaneous heating device provided by the present invention. Figure 2 It is a three-dimensional schematic diagram of an embodiment of an instantaneous heating device provided by the present invention. The instantaneous heating device may include:

[0042] A housing 1, which is provided with a medium inlet 101, a medium outlet 102, and an energy connection port 103. It should be noted that the function of the housing 1 is to protect the internal components, so that the internal components are protected from the external high-temperature, high-humidity, and high-corrosion environment, and can also avoid the impact of external forces. The medium inlet 101 is used for the medium to enter the interior of the instantaneous heating device from here for reheating. The medium outlet 102 is used for the heated medium to flow out from here and be transported to the location where the cleaning and drying object is located. The medium mentioned here may but is not limited to IPA (isopropyl alcohol liquid medium). And the energy connection port 103 is used to connect to an energy supply component. The energy mentioned here may but is not limited to electricity. That is to say, electricity can be used to heat the medium. Of course, other heating methods can also be adopted according to actual needs, such as electromagnetic induction method, etc. This is not limited here;

[0043] An energy connection circuit 2 enters the interior of the housing 1 through the energy connection port 103. Specifically, it may but is not limited to a cable line. Cables with corresponding diameters can be selected according to actual power requirements to ensure meeting the needs of instantaneous heating. Specifically, at least two wires can be used. One of them is used to realize the function of the ground wire. More cable lines can also be selected according to actual needs. This is not limited here;

[0044] The medium inlet pipeline 3 enters the interior of the housing 1 through the medium inlet 101. It is equipped with a first temperature detection component 301 to obtain the temperature of the medium inlet. In this case, a medium such as IPA can sequentially pass through the medium inlet pipeline 3 and the medium inlet 101 into the housing 1 for subsequent heating processes. And this heating process depends on the value of the medium inlet temperature. Therefore, a first temperature detection component 301 is provided at the position of the medium inlet 101 to measure the medium temperature at this position in real time, so as to ensure that the medium can be heated to the desired temperature within a very short time in this instantaneous heating device for effective cleaning of the cleaning object. This time can be as short as a few seconds to more than ten seconds, which can be determined according to actual needs. The first temperature detection component 301 can be selected as a thermocouple sensor, which is easy to obtain, has a low cost, can withstand high temperatures, and has good stability;

[0045] The medium outlet pipeline 4 enters the interior of the housing 1 through the medium outlet 102. By using this medium outlet pipeline 4, the heated medium can be transported to the position where the cleaning and drying object is located. At this time, the medium temperature can meet the requirements of efficient cleaning;

[0046] The medium heating chamber 5 is arranged inside the housing 1 and is respectively connected to the medium inlet pipeline 3 and the medium outlet pipeline 4. It is used to accommodate the medium inside. It should be noted that the internal shape of the medium heating chamber 5 can be cylindrical, or other shapes can be selected according to actual needs. After the medium enters the medium heating chamber 5 from the medium inlet pipeline 3, it can be heated to a certain temperature, and then the medium can flow out from the medium outlet pipeline 4 for cleaning and drying operations;

[0047] The heating component 6 is arranged inside the medium heating chamber 5. This heating component 6 and the medium heating chamber 5 can be in direct contact or indirect contact. It is preferably to use the way of heat conduction to transfer heat to the medium heating chamber 5 so that the medium flowing through it can be heated. The power of this heating component 6 can be adjusted accordingly according to actual needs to ensure that the final temperature of the outflowing medium meets the requirements of cleaning and drying;

[0048] The control component 7 is communicatively connected to the first temperature detection component 301, the outlet medium target temperature input module 8, and the energy connection circuit 2. It is used to obtain the corresponding energy loading power based on the inlet medium temperature and the outlet medium target temperature, and control the heating component 6 to heat with the obtained energy loading power. The heat generated by the heating component 6 is transferred to the medium, and after the medium is heated, it flows out from the outlet medium pipeline 4. It should be noted that the above-mentioned outlet medium target temperature input module 8 can be a part of the touch screen. For example, when the user needs to set the outlet medium target temperature to 70 °C, the user can input 70 °C from this module, and the PID control input end of the control component 7 can obtain this message. Moreover, the control component 7 obtains the current inlet medium temperature from the first temperature detection component 301, and uses these two temperature values to obtain the corresponding energy loading power. Then, according to the instruction with this energy loading power, the corresponding power is supplied to the heating component 6. This energy loading power can ensure that after heating, the outlet medium temperature can reach the value of the above-mentioned outlet medium target temperature. It can be seen that in this solution, at a certain flow rate, through the PID control of the controller, the medium can reach the desired target temperature at the outlet position after passing through the above-mentioned instantaneous heating device, and the wafer can be more efficiently cleaned and dried at this target temperature. Therefore, it can be seen that this instantaneous heating device can achieve additional instantaneous heating of the medium about to reach the wafer position.

[0049] As can be seen from the above description, in the embodiment of the instantaneous heating device provided by the present invention, since there is a first temperature detection component on the inlet medium pipeline for obtaining the inlet medium temperature, and there is a medium heating cavity inside for accommodating the medium, the heating component is arranged inside the medium heating cavity, the control component obtains the corresponding energy loading power according to the inlet medium temperature and the outlet medium target temperature, and controls the heating component to heat with this energy loading power. The heat generated by the heating component is transferred to the medium, and after the medium is heated, it flows out from the outlet medium pipeline. Using this instantaneous heating method can ensure that the flowing out medium meets the temperature requirements, and the medium in the container does not need to be raised to a relatively high temperature. Therefore, this instantaneous heating device can avoid retaining a large amount of high-temperature medium inside the container, and can ensure that the medium reaching the cleaning and drying object has a high enough temperature. Therefore, it can improve the cleaning and drying effect on the basis of reducing the use risk.

[0050] In a specific embodiment of the above-mentioned instantaneous heating device, continue to refer to Figure 1, the instantaneous heating device may further include a heat transfer core 9 that completely wraps the medium heating chamber 5, and this heat transfer core 9 is in contact with the heating component 6. Specifically, this heat transfer core 9 can be directly in contact with the heating component 6 to achieve faster heat transfer. In this case, the heat generated by the heating component is first transferred to the heat transfer core 9 with stronger heat transfer ability, and then the heat transfer core 9 transfers the heat it obtains to the medium heating chamber 5 to rapidly heat the medium therein comprehensively. Since this heat transfer core 9 completely wraps all the surfaces of the medium heating chamber 5, it can achieve more uniform heating of the medium at various parts within the medium heating chamber 5, ultimately resulting in better uniformity of the temperature of the transmitted medium. Specifically, the material that this heat transfer core 9 can adopt includes copper or aluminum. These two metals have higher heat transfer efficiency and can further improve the rate of instantaneous heating. Of course, other types of heat transfer cores can also be selected according to actual needs, and there is no limitation here. Additionally, in some embodiments, this heat transfer core may not be provided, and it is only necessary for the heating component 6 and the medium heating chamber 5 to be in direct contact.

[0051] In another specific embodiment of the above-mentioned instantaneous heating device, continue to refer to Figure 2 , the above-mentioned housing 1 is also provided with a gas inlet 10 and a gas outlet 11, and both the gas inlet 10 and the gas outlet 11 are communicated with the space between the housing 1 and the medium heating chamber 5. In this way, gas can be input into this space between the housing 1 and the medium heating chamber 5, and after flowing through this space, the gas exits from the gas outlet 11. It should be noted that the gas introduced here can be an inert gas to avoid reacting with other substances. Further, nitrogen can be selected. By using nitrogen as a protective gas, the air in this space can be expelled to better avoid the explosion of media such as IPA liquid at high temperatures and better ensure the safety of the device. Of course, other inert gases such as argon can also be selected according to actual needs, and there is no limitation here.

[0052] In yet another specific embodiment of the above-mentioned instantaneous heating device, refer to Figure 3 , Figure 3 is a schematic diagram of yet another specific embodiment of the instantaneous heating device provided by the present invention. The medium flow channel in the medium heating chamber 5 can preferably be a spiral groove type medium flow channel. That is to say, this medium flow channel can extend spirally upward around the heating component 6. Since Figure 3It is a sectional view, so the holes are shown one by one. This type of medium flow channel can further increase the contact area between the heat transfer core 9 and the medium heating cavity 5, thereby improving the heat conduction efficiency between the heating component 6 and the medium. The medium flow process is also restricted within this flow channel, which can ensure that each part of the medium can pass through the flow channel of the same distance and be heated sufficiently and evenly. As a result, the temperature stability of the finally flowing out medium can be higher. Specifically, the number of such spirals can be selected according to actual needs, which is not restricted here. Moreover, the above-mentioned medium heating cavity 5 can preferably be a heating cavity made of PFA material. It should be noted that PFA is a copolymer of a small amount of perfluoropropyl perfluorovinyl ether and polytetrafluoroethylene, which has the characteristics of corrosion resistance, and has more excellent crack resistance, stress resistance and low friction coefficient. Therefore, using PFA to make the medium heating cavity here can avoid being corroded by the organic medium therein, can be applicable to any acid-base medium, improve the service life of this instantaneous heating device, and also determines that its working temperature can be as high as 160 °C, with a wider application range. Of course, other materials can also be selected to make this medium heating cavity 5 according to actual needs, which is not restricted here.

[0053] In a preferred embodiment of the above-mentioned instantaneous heating device, continue to refer to Figure 1 , the above-mentioned housing 1 can specifically include a stainless steel housing unit 104 and a PTFE housing unit 105 sleeved on the outer periphery of the stainless steel housing unit 104. It should be noted that this stainless steel housing unit 104 can specifically be made of "304 stainless steel" with a thickness of 4 mm. It can use an explosion-proof joint and can be sealed in the form of a flange, with a gasket added in the middle. The internal metal components are preferably grounded to prevent the generation of static electricity. In this way, the formed closed chamber has an explosion-proof function, further enhancing the overall safety performance. And PTFE is a polytetrafluoroethylene material. This material has the characteristics of being acid and alkali resistant, resistant to various organic solvents, and is almost insoluble in all solvents. It can resist the intrusion of gases and better protect the internal structure. At the same time, polytetrafluoroethylene has the characteristic of high temperature resistance, so it can work normally in a high-temperature environment, further improving the service life of the overall device. Of course, other similar materials can also be selected to surround the stainless steel housing unit 104 according to actual needs, which is not restricted here.

[0054] In another preferred embodiment of the above-mentioned instantaneous heating device, continue to refer to Figure 3, a heat insulation cover 12 that can surround the top of the heating component 6 is also provided on the top of the above-mentioned medium heating cavity 5, which can further prevent heat from dissipating from the top of the heating component 6, making the heating effect better. And the heat insulation cover 12 can be provided with a through hole 121 for passing through the energy connection circuit 2. It should be noted that the energy connection circuit 2 can be a cable. After this cable passes through the through hole 121, it can be electrically connected to the heating component 6 to supply power to the heating component 6, enabling it to convert electrical energy into heat energy. This heat energy is used to heat the medium to a certain temperature to improve the cleaning and drying effect of the medium. The number of such through holes 121 can be the same as the number of cables, allowing one cable to pass through one through hole to avoid interference between the two. It should also be noted that, continue to refer to Figure 3 , the heat insulation cover 12 can be connected to the above-mentioned stainless steel housing unit 104 by using a metal hoop structure 122 to achieve a more firm fixation between the two. Of course, other connection methods can also be used, such as snap connection, threaded connection, etc., which are not limited here.

[0055] It should also be noted that, taking IPA as an example, the boiling point of IPA medium is 82°C. When the medium is heated to 72°C to 75°C, medium gasification will occur, forming a gas-liquid mixed state at the outlet of the instantaneous heating device. However, bubbles are not allowed to appear during the cleaning and drying process to avoid causing additional impact on the process and damaging the microscopic structure of the wafer. To solve this problem, continue to refer to Figure 3 , a degasser 41 can be added in the instantaneous heating device, and its installation position can be located on the medium outlet pipeline 4, so as to effectively separate the generated bubbles from the medium itself, remove the bubbles in the medium, and improve the qualification rate of the cleaning and drying process.

[0056] In summary, the structure of the above-mentioned instantaneous heating device is relatively compact, occupies a relatively small space, is easy to install on the equipment terminal, and can be located inside the chamber for cleaning and drying. It only heats the medium required for cleaning and drying. Specifically, it reheats the medium that has undergone circulating heating at the outlet of the liquid supply device to raise the temperature to the target temperature. At this time, the distance between the medium outlet pipeline 4 and the outlet where the medium is finally used (above the object to be cleaned, such as a wafer) is about 0.5 meters, and the heat dissipation of this section of the pipeline can be ignored. In this way, the temperature of the medium reaching the position of the object to be cleaned and dried can reach the desired temperature, making the cleaning and drying effect better. This avoids storing a large amount of high-temperature medium inside the liquid supply device, thereby being able to reduce the explosion risk of the medium during use while achieving a better cleaning and drying effect.

[0057] An embodiment of a wet cleaning equipment provided by the present invention is as Figure 4 shown. Figure 4 is a schematic diagram of an embodiment of a wet cleaning equipment provided by the present invention. The wet cleaning equipment can include:

[0058] The wet cleaning chamber A is internally provided with an instantaneous heating device A1 as described in any one of the above.

[0059] The medium supply device B, whose medium outlet B1 is communicated with the instantaneous heating device A1, and the instantaneous heating device A1 is used to reheat the medium coming out of the medium outlet B1 to the target temperature.

[0060] It should be noted that one medium supply device B can supply up to 12 wet cleaning chambers A. Here, only one wet cleaning chamber A is used for illustration and explanation. In addition to the instantaneous heating device A1, the wet cleaning chamber A may also include a three-way valve A3 and some corresponding pipeline channels. In a specific embodiment of the above wet cleaning equipment, a flow controller A2 may also be provided between the medium outlet B1 of the medium supply device and the instantaneous heating device A1, and the flow controller A2 is communicatively connected to the control component in the instantaneous heating device A1, and the control component is used to control the flow rate of the flow controller A2. In this case, the first port of the three-way valve is used to connect to the pipeline returning to the medium supply device B, the second port is used to connect to the instantaneous heating device A1, and the third port is used as an outlet, which is located near the upper part of the wafer (wafer) to provide the medium (such as IPA) for cleaning the wafer. When the second port and the third port are opened, the medium heated by the instantaneous heating device can flow out from the third port and reach the position near the wafer for cleaning. When the third port is closed, the cleaning process stops. When the first port is opened, the medium heated by the instantaneous heating device can return to the medium supply device B to realize the circulating flow of the medium.

[0061] The above-mentioned medium supply device B (Chemical supply machine, CSM) may specifically include a first medium container B2, a second medium container B3, a first pump body B4, and a circulation heater B5. Among them, the first pump body B4 and the circulation heater B5 are connected in series, and the series pipeline formed by the two is simultaneously connected in parallel with the first medium container B2 and the second medium container B3. In this way, the first pump body B4 can provide power for the pumping of the medium, and at the same time, the circulation heater B5 is used to heat the medium, so that the medium can continuously circulate and be heated between the first medium container B2 and the second medium container B3. Moreover, the medium supply device B may further include a second pump body B6 and an in-line heater B7. The in-line heater B7 is connected between the second pump body B6 and the above-mentioned medium outlet B1 to reheat the medium before it exits from the medium outlet B1 to meet certain temperature requirements. The other end of the second pump body B6 is also simultaneously connected to another outlet pipeline of each of the first medium container B2 and the second medium container B3. The first port of the above-mentioned three-way valve A3 is simultaneously connected to another inlet pipeline of each of the first medium container B2 and the second medium container B3. In this way, when it is necessary to supply medium to the instantaneous heating device, the second pump body B6 can be opened to make it work, driving the medium in the first medium container B2 and the second medium container B3 to come out and pass through the second pump body B6, the in-line heater B7, and the flow controller A2 in sequence and then reach the instantaneous heating device A1. After the medium is reheated by the instantaneous heating device A1 and reaches the target temperature suitable for the cleaning process, it can reach the surface of the wafer through the three-way valve, so that the wafer can be efficiently cleaned. When the cleaning is completed and the third port of the three-way valve A3 is closed, the medium can return from its first port to the first medium container B2 and the second medium container B3, thus realizing a reciprocating cycle.

[0062] An embodiment of an instantaneous heating method provided by the present invention is as follows Figure 5 shown Figure 5 is a schematic diagram of an embodiment of an instantaneous heating method provided by the present invention. By using the instantaneous heating device as described in any one of the above, the following steps may be included:

[0063] S1: Obtain the inlet medium temperature from the first temperature detection component;

[0064] S2: Obtain the outlet medium target temperature from the outlet medium target temperature input module;

[0065] S3: Obtain the corresponding energy loading power according to the inlet medium temperature and the outlet medium target temperature;

[0066] S4: Control the heating component to heat with the energy loading power;

[0067] S5: Transmit the heat generated by the heating component to the medium;

[0068] S6: After the medium is heated, it flows out from the outlet medium pipeline.

[0069] It should be noted that it is possible to determine the energy loading power corresponding to each set of inlet medium temperature and outlet medium target temperature, and store it in the corresponding storage unit of the control component. In this way, this energy loading power can be quickly obtained according to the real-time situation, and the heating component can be controlled to perform a heating process adapted to it. In this way, the accuracy of medium heating can be ensured, neither making the temperature of the outflowing medium too low nor too high, but maintaining it within a safe range, and effectively improving the cleaning efficiency. It can be seen that this method can avoid the explosion risk caused by heating the medium in the medium container to a high temperature, and can also ensure that the medium used for cleaning is quickly heated to a temperature at which efficient cleaning can be carried out, thereby achieving safety and high cleaning efficiency.

[0070] In a specific embodiment of the above instantaneous heating method, before controlling the heating component to heat at the energy loading power, the following steps may further be included:

[0071] Obtain the flow rate passing through the instantaneous heating device;

[0072] Lower the flow rate passing through the instantaneous heating device.

[0073] It should be noted that by using the flow controller A2 in the above wet cleaning equipment and the above instantaneous heating method, the magnitude of the medium flow rate delivered into the instantaneous heating device A1 can be controlled, thereby adjusting the heating rate. Specifically, when the flow rate is larger, the heating rate is slower; when the flow rate is smaller, the heating rate is faster. Therefore, when rapid heating is required, the flow rate can be lowered. For example: Before the cleaning process, the circulating flow rate inside the instantaneous heater is set to 1000 mL / min. When the cleaning process starts, the flow rate through the instantaneous heater is set to 500 mL / min and the temperature is 72 °C. The instantaneous heater can be turned on before the cleaning process, and the temperature of the heating component (such as an aluminum block) inside it is set to 100 °C, and the outlet temperature at this time is 50 °C; after receiving the signal to start the cleaning process, the flow rate is adjusted to 500 mL / min, and the temperature of the heating component is set to 120 °C to ensure that the outlet temperature can rise to 72 °C. It can be seen that in this case, the entire process reduces the startup time of the heating component (the time required to rise from room temperature to 100 °C) and the heat conduction time between the heating component and the heat transfer core, and can heat the medium to 72 °C within 10 s, achieving more rapid instantaneous heating of the product. It can be seen that its internal heat source uses a heat transfer core, and a preheating control logic is adopted, and the control component uses a PID control algorithm to achieve constant temperature output. According to the above working conditions, the PID control is divided into 2 segments, and different PID control algorithms are used in different heating stages to achieve efficient temperature rise, and the requirements of the cleaning process for the medium temperature can be met more quickly.

[0074] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An instantaneous heating device, characterized in that, Comprising: A housing, provided with a medium inlet, a medium outlet, and an energy connection port; An energy connection circuit, entering the interior of the housing through the energy connection port; A medium inlet pipeline, entering the interior of the housing through the medium inlet, on which there is a first temperature detection component for obtaining the temperature of the medium inlet; A medium outlet pipeline, entering the interior of the housing through the medium outlet; A medium heating chamber, arranged inside the housing, and respectively communicating with the medium inlet pipeline and the medium outlet pipeline, and used for accommodating the medium inside; A heating component, arranged inside the medium heating chamber; A control component, communicatively connected to the first temperature detection component, an outlet medium target temperature input module, and the energy connection circuit, for obtaining a corresponding energy loading power according to the temperature of the medium inlet and the target temperature of the outlet medium, and controlling the heating component to heat at the energy loading power, and the heat generated by the heating component is transmitted to the medium, and the medium flows out from the medium outlet pipeline after being heated.

2. The instantaneous heating device according to claim 1, wherein It further includes a heat transfer core for completely covering the medium heating chamber, and the heat transfer core is in contact with the heating component.

3. The instantaneous heating device according to claim 1, wherein, The housing further has a gas inlet and a gas outlet, and both the gas inlet and the gas outlet communicate with the space between the housing and the medium heating chamber.

4. The instantaneous heating device according to claim 1, wherein, The medium flow channel in the medium heating chamber is a spiral groove type medium flow channel, and the medium heating chamber is a heating chamber made of PFA material.

5. The instantaneous heating device according to claim 1, characterized in that, The housing includes a stainless steel housing unit and a PTFE housing unit sleeved on the outer peripheral part of the stainless steel housing unit.

6. The instantaneous heating device according to claim 1, wherein The top of the medium heating chamber is further covered with a heat preservation cover that can surround the top of the heating component, and the heat preservation cover is provided with a through hole for passing through the energy connection circuit.

7. A wet cleaning device, characterized in that, Comprising: A wet cleaning chamber, internally provided with an instantaneous heating device as described in any one of claims 1 - 6; A medium supply device, whose medium outlet is communicated with the instantaneous heating device, and the instantaneous heating device is used for reheating the medium coming out from the medium outlet to the target temperature.

8. A wet cleaning device according to claim 7, wherein, A flow controller is further arranged between the medium outlet of the medium supply device and the instantaneous heating device, and the flow controller is communicatively connected to the control component in the instantaneous heating device, and the control component is used for controlling the flow rate of the flow controller.

9. An instantaneous heating method, characterized in that, Using the instantaneous heating device as described in any one of claims 1 - 6, including: Obtaining the temperature of the medium inlet from the first temperature detection component; Obtaining the target temperature of the outlet medium from the outlet medium target temperature input module; Obtaining a corresponding energy loading power according to the temperature of the medium inlet and the target temperature of the outlet medium; Controlling the heating component to heat at the energy loading power; Transmitting the heat generated by the heating component to the medium; The medium flows out from the medium outlet pipeline after being heated.

10. The instantaneous heating method according to claim 9, wherein, Before controlling the heating component to heat at the energy loading power, it further includes: Obtaining the magnitude of the flow rate passing through the instantaneous heating device; Lowering the magnitude of the flow rate passing through the instantaneous heating device.

Images