Target automatic detection device

Abstract

The invention discloses an automatic target material detection device, and relates to the technical field of magnetron coating, after coating is finished, sputtering target material position detection work is automatically carried out according to a PLC command, a telescopic mechanism is driven by a moving mechanism to move, a thickness detector is aligned with different sputtering target materials, the telescopic mechanism drives the thickness detector to make contact with the sputtering target materials, and the sputtering target material position detection work is completed. The thickness detector is driven by the moving mechanism to move and align to the upper position, the middle position and the lower position of the target material respectively, multi-position detection is carried out, the automatic detection effect is achieved, the contact area of the thickness detector and the sputtering target material is cleaned through a soft brush of the cleaning mechanism, and the thickness of the sputtering target material is detected. Pollutants are prevented from being attached to the thickness detector, so that the detection precision is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of magnetron coating, in particular to an automatic target material detection device. Background Art

[0002] Magnetron sputtering is a coating technology that uses the combined action of voltage and magnetic field in a vacuum environment to bombard the sputtering target with ionized inert gas ions, causing the sputtering target to be sputtered out in the form of ions, atoms or molecules and deposited on the substrate to form a thin film.

[0003] In actual production applications, production and equipment process personnel need to examine whether the coating results such as film thickness and uniformity are consistent with the set targets and adjust the equipment parameters as appropriate, including but not limited to power supply power, magnetic field of the magnetic bar, process, etc. However, these are all based on the margin of target life for rapid adjustment. During the coating work, the energy of the target material is constantly increasing. If there are thinner areas, the target material will break, or there will be a risk of breakage, resulting in the equipment not being able to operate normally.

[0004] With existing magnetron sputtering equipment, workers need to manually measure the target life margin after each coating. Manual measurement takes a lot of time, which increases the time required to adjust the equipment. At the same time, manual measurement may not be accurate due to factors such as the different levels of worker proficiency. When using a measuring instrument for measurement, the contact between the probe and the target may cause probe contamination, affecting the measurement accuracy. Summary of the Invention

[0005] The purpose of the present invention is to provide a target material automatic detection device to solve the problems raised in the prior art.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A target material automatic detection device includes a thickness detector, a telescopic mechanism, a mobile mechanism, a cavity, a sputtering target material and a cleaning mechanism. The thickness detector is fixedly connected to the telescopic mechanism, the telescopic mechanism is fixedly connected to the mobile mechanism, the mobile mechanism is fixedly connected to the cavity, a plurality of sputtering targets are provided, the plurality of sputtering targets are fixedly connected to the cavity, and the cleaning mechanism is fixedly connected to the telescopic mechanism.

[0008] After the coating is completed, the position of the sputtering target is automatically detected according to the PLC command. There are small wall panels on both sides inside the cavity, and there are limited plates on both sides of the small wall panels to ensure that the moving mechanism is installed at the blank of the small wall panel. There are several sputtering targets, and several sputtering targets are placed in the cavity. The sputtering targets are evenly distributed along the circular edge line at the bottom of the cavity. The moving mechanism drives the telescopic mechanism to move. The thickness detector is fixedly connected to the telescopic mechanism, so that the thickness detector is aligned with different sputtering targets. Subsequently, the moving mechanism drives the thickness detector to move and align with three different positions, namely the upper, middle, and lower positions of the target. At the same time, the telescopic mechanism drives the thickness detector to contact the sputtering target, so as to achieve the automatic detection effect, measure the thickness value of the sputtering target, realize the measurement of the remaining amount of the sputtering target, and further measure the remaining service life. Through the cleaning mechanism, the contact area between the thickness detector and the sputtering target is cleaned to prevent pollutants from adhering to the thickness detector, thus ensuring the detection accuracy.

[0009] Furthermore, the telescopic mechanism includes a first base, a telescopic unit, a clamping mobile end, a buckle, and a linear screw module. The first base is slidably connected to the telescopic unit. The clamping mobile end is fixedly connected to the first base. The buckle is fixedly connected to the telescopic unit. There are two clamping mobile ends, and the clamping mobile ends are slidably connected to the moving mechanism. The linear screw module is fixedly connected to the first base, and the mobile end of the linear screw module is fixedly connected to the telescopic unit. The buckle is fixedly connected to the thickness detector.

[0010] Through the buckle, the thickness detector is clamped between the telescopic unit and the buckle, so that the thickness detector is fixed on the buckle. When it is necessary to take out the thickness detector from the telescopic unit, it only needs to be pulled out by the operator, which can be used more conveniently. Since the mobile end of the linear screw module is fixedly connected to the telescopic unit and the first base is slidably connected to the telescopic unit, according to the PLC program setting, the linear screw module fixed on the first base drives the telescopic unit to slide on the first base, so that the telescopic unit expands and contracts, thereby driving the thickness detector to move and making the thickness detector contact the center of the sputtering target, achieving the automatic detection effect. There are two clamping mobile ends, and the two clamping mobile ends are vertically arranged at one end of the first base, forming an L-shaped structure. The side of the first base has the same thickness as the clamping mobile end. The moving area between the two clamping mobile ends is set in the middle position of the side of the first base, forming a T-shaped structure. The two clamping mobile ends are clamped on the moving plate of the moving mechanism and slide smoothly with it without shaking, ensuring the detection accuracy.

[0011] Furthermore, the telescopic unit includes a fixed plate, a movable column and a movable block, the fixed plate and the movable column are fixedly connected, the movable block and the fixed plate are fixedly connected, the No. 1 base is provided with a No. 1 sliding groove, the movable column and the No. 1 sliding groove are slidably connected, the No. 1 base is provided with a No. 2 sliding groove, the movable column and the No. 2 sliding groove are slidably connected, the No. 1 base is provided with a No. 3 sliding groove, the fixed plate and the No. 3 sliding groove are slidably connected, the No. 1 base is provided with a No. 4 sliding groove, and the movable block and the No. 4 sliding groove are slidably connected.

[0012] A running track for sliding of the fixed plate, moving column and moving block is provided through the No. 1 base. The running track is divided into sliding groove No. 1, sliding groove No. 2, sliding groove No. 3 and sliding groove No. 4. It is fixedly connected by the fixed plate and the moving column, and the moving block and the fixed plate. At the same time, the fixed plate, moving column and moving block all have protruding small blocks to ensure contact with the two sliding grooves. Through the axial and lateral double limits of the moving column and the moving block, precise linear guidance is achieved, shaking is reduced, and a stable sliding system with multiple support points is formed.

[0013] Furthermore, the moving mechanism includes a sliding platform, a No. 2 base and an adjustment unit. The No. 2 base is provided with a limiting groove, the sliding platform is placed in the limiting groove, the adjustment unit is fixedly connected to the No. 2 base, and the adjustment unit is fixedly connected to the cavity.

[0014] The No. 2 base is provided with a limit groove, and the sliding platform is moved into the limit groove to limit the moving position of the sliding end of the sliding platform to prevent the No. 1 base from hitting the cavity. The No. 1 base is fixedly connected to the No. 2 base through the adjustment unit, and the angle of the No. 2 base is adjusted to make it rotate 360 degrees, thereby driving the No. 2 base and the sliding platform to rotate. The sliding end on the sliding platform is stuck between the two stuck moving ends, and the sliding end and the two stuck moving ends are fixed, so that the No. 1 base is fixed on the sliding platform, and the thickness detector on the No. 1 base rotates with the No. 2 base, so that the thickness detector is aligned with different sputtering targets. The sliding platform drives the thickness detector to move to three different positions: upper, middle and lower of the target, to achieve multi-position detection.

[0015] Furthermore, the adjustment unit includes a connecting block, a bidirectional motor, a mounting plate, a servo motor and a No. 1 fixed block. There are two connecting blocks, the two connecting blocks are fixedly connected to the No. 2 base, the two output ends of the bidirectional motor are respectively fixedly connected to the two connecting blocks, the mounting plate is fixedly connected to the bidirectional motor, the output end of the servo motor is fixedly connected to the mounting plate, the servo motor is fixedly connected to the No. 1 fixed block, and the No. 1 fixed block is fixedly connected to the cavity.

[0016] The two output ends of the bidirectional motor are respectively fixedly connected to two connecting blocks. The bidirectional motor drives the two connecting blocks to rotate, making the second base parallel to the small wall panel of the cavity. The output end of the servo motor is fixedly connected to the mounting plate, so that the servo motor drives the mounting plate to rotate, thereby driving the bidirectional motor fixed on the mounting plate to rotate, making the second base rotate, and further aligning the thickness detector with different sputtering targets.

[0017] Further, the cleaning mechanism includes a brush, a fixing member, a driving unit, and a transmission unit. The brush is fixedly connected to the fixing member, the fixing member is fixedly connected to the first base, the brush is slidably connected to the fixing member, the driving unit is fixedly connected to the moving column, the transmission unit is hingedly connected to the fixing member, and the transmission unit is fixedly connected to the brush.

[0018] It is fixed on the first base through the fixing member. The brush is a circular soft brush. There is a circular fixing ring on the fixing member. The inner ring of the circular fixing ring is sleeved on the outer ring of the brush, so that the brush is fixed in the area coaxial with the thickness detector. The brush can slide or rotate on the fixing ring. The driving unit fixed on the moving column moves with the moving column. The driving unit drives the brush to rotate and axially move through the rod hinged to the brush on the transmission unit, thereby wiping the detection area of the thickness detector and realizing the cleaning of the thickness detector.

[0019] Further, the transmission unit includes a first connecting rod, a second connecting rod, and a return spring. The fixing member is provided with a mounting groove. The first connecting rod is placed in the mounting groove. The first connecting rod is hingedly connected to the fixing member. The first connecting rod is hingedly connected to the second connecting rod. The second connecting rod is hingedly connected to the brush. One end of the return spring is fixedly connected to the first connecting rod, and the other end of the return spring is fixedly connected to the mounting groove.

[0020] The first connecting rod is hingedly connected to the fixing member, and the hinge position is close to the first base, so that the first connecting rod forms a lever. The first connecting rod is an L-shaped rod. One end of the return spring is fixedly connected to the first connecting rod, and the other end of the return spring is fixedly connected to the mounting groove, providing a pre-tightening force for the first connecting rod, so that one end of the first connecting rod is in close contact with the driving unit, and the driving unit drives the first connecting rod to reciprocate under the action of the return spring. The two ends of the second connecting rod are respectively hingedly connected to the first connecting rod and the brush, so that the second connecting rod drives the brush to rotate and axially move as the first connecting rod moves. The angle of rotation of the soft brush during wiping is amplified through the lever structure of the first connecting rod, making the structure more compact and reducing the occupied space.

[0021] Further, the driving unit includes a third connecting rod, a convex block, and a guiding block. The third connecting rod is fixedly connected to the moving column. There are several convex blocks, and the several convex blocks are fixedly connected to the third connecting rod. There are several guiding blocks, and the several guiding blocks are fixedly connected to the third connecting rod.

[0022] The No. 3 connecting rod is fixed on the movable column, and a number of protrusions are fixed on the No. 3 connecting rod, thereby pushing the No. 1 connecting rod to move back and forth. A guide block is set between the protrusions, and the guide block has an inclined surface, so that the No. 1 connecting rod moves up and down along the inclined surface. The lever moves up and down, so that the brush can rotate clockwise to reset and then rotate counterclockwise back and forth, realizing the bidirectional reciprocating motion of the brush to alternately wipe the thickness detector, thereby enhancing the cleaning effect.

[0023] Furthermore, the thickness detector includes a probe and a host, the probe and the host are fixedly connected, and the host is provided with a network interface.

[0024] The probe is fixedly connected to the host. The probe is a spring-type induction probe, which will not cause abnormal damage to the Gaussian thickness detection instrument due to hard pressure due to position limitations. The host has a numerical display function, which can easily and clearly obtain the thickness. The display light is green when the thickness is normal and red when it is abnormal. At the same time, the host is equipped with a network interface, and the IP address connection is set to promptly feed back the detection data to the PLC, and then to the operating platform through the PLC, which is convenient for the operator to judge and replace the sputtering target in time to prevent unnecessary equipment abnormalities.

[0025] Compared with the prior art, the present invention has the following beneficial effects:

[0026] 1. After the coating is completed, the bidirectional motor automatically drives the two connecting blocks to rotate according to the PLC command, and the servo motor drives the mounting plate to rotate, so that the thickness detector is aligned with different sputtering targets. The linear screw module drives the telescopic unit to bring the probe into contact with the sputtering target, achieving automatic detection effect. There is no need for workers to perform manual measurements, which reduces detection time and improves the working efficiency of the equipment.

[0027] 2. After the thickness detector is aligned with the sputtering target, the sliding platform drives the thickness detector to move to three different positions: upper, middle, and lower. The telescopic mechanism drives the probe to contact the sputtering target. At the same time, the axial and lateral double limit of the moving column and the moving block are used to achieve precise linear guidance, reduce shaking, and form a stable sliding structure with multiple support points to achieve multi-position detection, thereby ensuring the accuracy of detection.

[0028] 3. The No. 3 connecting rod moves with the moving column, and pushes the lever formed by the No. 1 connecting rod to move up and down and left and right through the protrusion and guide block, driving the No. 1 connecting rod to move and drive the brush to rotate and move axially. The No. 2 connecting rod moves with the No. 1 connecting rod to drive the brush to rotate and move axially. The bidirectional reciprocating motion of the brush wipes and cleans the thickness detector alternately, enhancing the cleaning effect and ensuring the accuracy of the detection. The lever structure of the No. 1 connecting rod amplifies the rotation angle of the soft brush during wiping, making the structure more compact and reducing the occupied space. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is the overall structural schematic diagram of the present invention;

[0030] Figure 2 is Figure 1 the enlarged view of part A of

[0031] Figure 3 This is the structural schematic diagram of the telescopic mechanism of the present invention;

[0032] Figure 4 This is the structural schematic diagram of the telescopic unit of the present invention;

[0033] Figure 5 is Figure 1 the enlarged view of part B of

[0034] Figure 6 This is the structural schematic diagram of the adjustment unit of the present invention;

[0035] Figure 7 This is the structural schematic diagram of the cleaning mechanism of the present invention;

[0036] Figure 8 is Figure 7 the enlarged view of part C of

[0037] Figure 9 This is the structural schematic diagram of the drive unit of the present invention.

[0038] In the figure: 1. Thickness detector; 11. Probe; 12. Host; 121. Network interface; 2. Telescopic mechanism; 21. First base; 211. First sliding groove; 212. Second sliding groove; 213. Third sliding groove; 214. Fourth sliding groove; 22. Telescopic unit; 221. Fixed plate; 222. Moving column; 223. Moving block; 23. Positioning mobile end; 24. Buckle; 25. Linear lead screw module; 3. Moving mechanism; 31. Sliding platform; 321. Limiting groove; 32. Second base; 33. Adjustment unit; 331. Connecting block; 332. Bidirectional motor; 333. Mounting plate; 334. Servo motor; 335. First fixing block; 4. Cavity; 5. Sputtering target; 6. Cleaning mechanism; 61. Brush; 62. Fixing member; 621. Mounting groove; 63. Drive unit; 631. Third connecting rod; 632. Convex block; 633. Guide block; 64. Transmission unit; 641. First connecting rod; 642. Second connecting rod; 643. Return spring. Specific embodiments

[0039] Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0040] Embodiment: As Figure 1 andFigure 2 As shown in the figure, the present invention provides a technical solution for an automatic target detection device. An automatic target detection device includes a thickness detector 1, a telescopic mechanism 2, a moving mechanism 3, a cavity 4, a sputtering target 5, and a cleaning mechanism 6. The thickness detector 1 is fixedly connected to the telescopic mechanism 2, the telescopic mechanism 2 is fixedly connected to the moving mechanism 3, the moving mechanism 3 is fixedly connected to the cavity 4, there are several sputtering targets 5, and the several sputtering targets 5 are fixedly connected to the cavity 4. The cleaning mechanism 6 is fixedly connected to the telescopic mechanism 2.

[0041] After the film coating is completed, the position detection of the sputtering target 5 is automatically carried out according to the PLC command. There are small wallboards on both sides inside the cavity 4, and there are limiting plates on both sides of the small wallboards to ensure that the moving mechanism 3 is installed at the blank of the small wallboard. There are several sputtering targets 5, and the several sputtering targets 5 are placed in the cavity 4. The sputtering targets 5 are evenly distributed along the annular edge line at the bottom of the cavity 4. The moving mechanism 3 drives the telescopic mechanism 2 to move. Since the thickness detector 1 is fixedly connected to the telescopic mechanism 2, the thickness detector 1 is aligned with different sputtering targets 5. Subsequently, the moving mechanism 3 drives the thickness detector 1 to move and align with three different positions, namely the upper, middle, and lower positions of the target respectively. At the same time, the telescopic mechanism 2 drives the thickness detector 1 to contact the sputtering target 5, so as to achieve the automatic detection effect, measure the thickness value of the sputtering target 5, realize the measurement of the remaining amount of the sputtering target 5, and further measure the remaining service life. Through the cleaning mechanism 6, the contact area between the thickness detector 1 and the sputtering target 5 is cleaned to avoid pollutants adhering to the thickness detector 1, thereby ensuring the detection accuracy.

[0042] As Figure 2 and Figure 3 shown, the telescopic mechanism 2 includes a first base 21, a telescopic unit 22, a clamping mobile end 23, a buckle 24, and a linear screw module 25. The first base 21 is slidably connected to the telescopic unit 22. The clamping mobile end 23 is fixedly connected to the first base 21. The buckle 24 is fixedly connected to the telescopic unit 22. There are two clamping mobile ends 23, and the clamping mobile ends 23 are slidably connected to the moving mechanism 3. The linear screw module 25 is fixedly connected to the first base 21, and the mobile end of the linear screw module 25 is fixedly connected to the telescopic unit 22. The buckle 24 is fixedly connected to the thickness detector 1.

[0043] The thickness detector 1 is clamped between the telescopic unit 22 and the buckle 24 through the buckle 24, so that the thickness detector 1 is fixed on the buckle 24. When it is necessary to take out the thickness detector 1 from the telescopic unit 22, it only needs to be pulled out by the operator, which can be used more conveniently. The mobile end of the linear screw module 25 is fixedly connected to the telescopic unit 22, and the first base 21 is slidably connected to the telescopic unit 22. According to the PLC program setting, the linear screw module 25 fixed on the first base 21 drives the telescopic unit 22 to slide on the first base 21, so that the telescopic unit 22 expands and contracts, thereby driving the thickness detector 1 to move, making the thickness detector 1 contact the center of the sputtering target 5, achieving an automatic detection effect. There are two positioning mobile ends 23, and the two positioning mobile ends 23 are vertically arranged at one end of the first base 21, forming an L-shaped structure. The edge of the first base 21 has the same thickness as the positioning mobile end 23. The moving area between the two positioning mobile ends 23 is set in the middle position of the edge of the first base 21, forming a T-shaped structure. The two positioning mobile ends 23 are stuck on the moving plate of the moving mechanism 3 and slide smoothly with it without shaking, ensuring the detection accuracy.

[0044] As Figure 4 shown, the telescopic unit 22 includes a fixed plate 221, a moving column 222 and a moving block 223. The fixed plate 221 is fixedly connected to the moving column 222, and the moving block 223 is fixedly connected to the fixed plate 221. The first base 21 is provided with a first sliding groove 211, and the moving column 222 is slidably connected to the first sliding groove 211. The first base 21 is provided with a second sliding groove 212, and the moving column 222 is slidably connected to the second sliding groove 212. The first base 21 is provided with a third sliding groove 213, and the fixed plate 221 is slidably connected to the third sliding groove 213. The first base 21 is provided with a fourth sliding groove 214, and the moving block 223 is slidably connected to the fourth sliding groove 214.

[0045] The first base 21 is provided with a running track for the fixed plate 221, the moving column 222 and the moving block 223 to slide. The running track is divided into a first sliding groove 211, a second sliding groove 212, a third sliding groove 213 and a fourth sliding groove 214. The fixed plate 221 is fixedly connected to the moving column 222, and the moving block 223 is fixedly connected to the fixed plate 221. At the same time, the fixed plate 221, the moving column 222 and the moving block 223 all have protruding small blocks to ensure contact with the two sliding grooves. Through the double limit of the axial and transverse directions of the moving column 222 and the moving block 223, precise linear guidance is achieved, reducing shaking, and a stable sliding system with multiple support points is formed.

[0046] As Figure 1 and Figure 5As shown in the figure, the moving mechanism 3 includes a sliding platform 31, a second base 32, and an adjusting unit 33. The second base 32 is provided with a limiting groove 321. The sliding platform 31 is placed in the limiting groove 321. The adjusting unit 33 is fixedly connected to the second base 32, and the adjusting unit 33 is fixedly connected to the cavity 4.

[0047] The second base 32 is provided with a limiting groove 321. The sliding platform 31 is placed into the limiting groove 321 to limit the moving position of the sliding end of the sliding platform 31, avoiding the first base 21 hitting the cavity 4. By fixedly connecting the adjusting unit 33 to the second base 32, the angle of the second base 32 is adjusted to rotate it 360 degrees, thereby driving the second base 32 and the sliding platform 31 to rotate. The sliding end on the sliding platform 31 is stuck between the two positioning mobile ends 23, and the sliding end is fixed to the two positioning mobile ends 23, so that the first base 21 is fixed on the sliding platform 31, and the thickness detector 1 on the first base 21 rotates with the second base 32, so that the thickness detector 1 is aligned with different sputtering targets 5. The sliding platform 31 drives the thickness detector 1 to move to three different positions, namely the upper, middle, and lower positions of the target, to achieve multi-position detection.

[0048] As Figure 6 shown in the figure, the adjusting unit 33 includes a connecting block 331, a bidirectional motor 332, a mounting plate 333, a servo motor 334, and a first fixing block 335. There are two connecting blocks 331. The two connecting blocks 331 are fixedly connected to the second base 32. The two output ends of the bidirectional motor 332 are respectively fixedly connected to the two connecting blocks 331. The mounting plate 333 is fixedly connected to the bidirectional motor 332. The output end of the servo motor 334 is fixedly connected to the mounting plate 333. The servo motor 334 is fixedly connected to the first fixing block 335. The first fixing block 335 is fixedly connected to the cavity 4.

[0049] By fixedly connecting the two output ends of the bidirectional motor 332 to the two connecting blocks 331 respectively, the bidirectional motor 332 drives the two connecting blocks 331 to rotate, making the second base 32 parallel to the small wall plate of the cavity 4. The output end of the servo motor 334 is fixedly connected to the mounting plate 333, so that the servo motor 334 drives the mounting plate 333 to rotate, thereby driving the bidirectional motor 332 fixed on the mounting plate 333 to rotate, making the second base 32 rotate, and further aligning the thickness detector 1 with different sputtering targets 5.

[0050] As Figure 3 and Figure 7 shown in the figure, the cleaning mechanism 6 includes a brush 61, a fixing member 62, a driving unit 63, and a transmission unit 64. The brush 61 is fixedly connected to the fixing member 62. The fixing member 62 is fixedly connected to the first base 21. The brush 61 is slidably connected to the fixing member 62. The driving unit 63 is fixedly connected to the moving column 222. The transmission unit 64 is hingedly connected to the fixing member 62. The transmission unit 64 is fixedly connected to the brush 61.

[0051] It is fixed on the first base 21 through a fixing member 62. The brush 61 is a circular soft brush 61. There is a circular fixing ring on the fixing member 62. The inner ring of the circular fixing ring is sleeved on the outer circle of the brush 61, so that the brush 61 is fixed in the area coaxial with the thickness detector 1. The brush 61 can slide or rotate on the fixing ring. The driving unit 63 fixed on the moving column 222 moves with the moving column 222. The driving unit 63 drives the brush 61 to rotate and move axially through the rod hinged to the brush 61 on the transmission unit 64, so as to wipe the detection area of the thickness detector 1 and realize the cleaning of the thickness detector 1.

[0052] Such as Figure 7 and Figure 8 As shown, the transmission unit 64 includes a first connecting rod 641, a second connecting rod 642 and a return spring 643. The fixing member 62 is provided with an installation groove 621. The first connecting rod 641 is placed in the installation groove 621. The first connecting rod 641 is hinged to the fixing member 62. The first connecting rod 641 is hinged to the second connecting rod 642. The second connecting rod 642 is hinged to the brush 61. One end of the return spring 643 is fixedly connected to the first connecting rod 641, and the other end of the return spring 643 is fixedly connected to the installation groove 621.

[0053] The first connecting rod 641 is hinged to the fixing member 62, and the hinge position is close to the first base 21, so that the first connecting rod 641 forms a lever. The first connecting rod 641 is an L-shaped rod. One end of the return spring 643 is fixed to the first connecting rod 641, and the other end of the return spring 643 is fixed to the installation groove 621, providing a pre-tightening force for the first connecting rod 641, so that one end of the first connecting rod 641 is in close contact with the driving unit 63, and the driving unit 63 drives the first connecting rod 641 to reciprocate under the action of the return spring 643. The two ends of the second connecting rod 642 are respectively hinged to the first connecting rod 641 and the brush 61, so that the second connecting rod 642 drives the brush 61 to rotate and move axially as the first connecting rod 641 moves. The rotation angle of the soft brush 61 during wiping is amplified through the lever structure of the first connecting rod 641, making the structure more compact and reducing the occupied space.

[0054] Such as Figure 7 and Figure 9 As shown, the driving unit 63 includes a third connecting rod 631, a convex block 632 and a guiding block 633. The third connecting rod 631 is fixedly connected to the moving column 222. A plurality of convex blocks 632 are provided, and the plurality of convex blocks 632 are fixedly connected to the third connecting rod 631. A plurality of guiding blocks 633 are provided, and the plurality of guiding blocks 633 are fixedly connected to the third connecting rod 631.

[0055] Through the third connecting rod 631 fixed to the moving column 222, several bumps 632 are fixed on the third connecting rod 631, thereby driving the first connecting rod 641 to reciprocate. By arranging a guide block 633 between the bumps 632, the guide block 633 has an inclined surface, enabling the first connecting rod 641 to move up and down along the inclined surface. Through the up and down movement of the lever, the brush 61 can rotate clockwise to reset and then rotate counterclockwise back and forth, realizing the double reciprocating movement of the brush 61 to alternately wipe the thickness detector 1, thereby enhancing the cleaning effect.

[0056] As Figure 3 and Figure 4 shown, the thickness detector 1 includes a probe 11 and a main unit 12. The probe 11 and the main unit 12 are fixedly connected, and the main unit 12 is provided with a network interface 121.

[0057] The probe 11 and the main unit 12 are fixedly connected. The probe 11 is a spring-type induction probe 11, which will not cause abnormal damage to the Gaussian thickness detector 1 due to hard pressing caused by position limitations. The main unit 12 has a numerical display function, which can conveniently and clearly obtain the thickness. When the thickness is normal, the display light is green, and when it is abnormal, it is red. At the same time, through the network interface 121 provided on the main unit 12, the IP address is set for connection, and the detection data is timely fed back to the PLC, and then fed back to the operation platform through the PLC, which is convenient for the operator to judge and timely replace the sputtering target 5 to prevent unnecessary equipment abnormalities.

[0058] Working principle: After the coating is completed, automatically according to the PLC command, the bidirectional motor 332 drives the two connecting blocks 331 to rotate, making the second base 32 parallel to the small wall panel of the cavity 4. The servo motor 334 drives the mounting plate 333 to rotate, thereby driving the second base 32 to rotate, and then aligning the thickness detector 1 with different sputtering targets 5. The sliding platform 31 drives the first base 21 to move, so that the thickness detector 1 is respectively aligned with the upper, middle, and lower three different positions of the target. At the same time, at each position, the linear screw module 25 drives the moving block 223 to move. Through the axial and transverse double limit of the moving column 222 and the moving block 223, linear precision guidance is achieved, reducing shaking, enabling the thickness detector 1 to slide stably, and then driving the probe 11 to contact the sputtering target 5, thereby measuring the thickness value of the sputtering target 5, and then measuring the remaining service life, achieving the automatic detection effect. At the same time, the third connecting rod 631 moves with the moving column 222, and the lever formed by the bump 632 and the guide block 633 pushes the first connecting rod 641 to move up and down and left and right reciprocally. The second connecting rod 642 moves with the first connecting rod 641 and drives the brush 61 to rotate reciprocally in both directions and move axially reciprocally, thereby cleaning the probe 11 and ensuring the detection accuracy.

[0059] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or perform equivalent replacements for some of the technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. An automatic target detection device, characterized in that: The detection device includes a thickness detector (1), a telescopic mechanism (2), a moving mechanism (3), a cavity (4), a sputtering target (5), and a cleaning mechanism (6). The thickness detector (1) is fixedly connected to the telescopic mechanism (2), the telescopic mechanism (2) is fixedly connected to the moving mechanism (3), the moving mechanism (3) is fixedly connected to the cavity (4), there are several sputtering targets (5), and the several sputtering targets (5) are fixedly connected to the cavity (4). The cleaning mechanism (6) is fixedly connected to the telescopic mechanism (2), and the moving mechanism (3) abuts against the cavity (4).

2. An automatic target detection device according to claim 1, characterized in that: The telescopic mechanism (2) includes a first base (21), a telescopic unit (22), a clamping mobile end (23), a buckle (24), and a linear screw module (25). The first base (21) is slidably connected to the telescopic unit (22), the clamping mobile end (23) is fixedly connected to the first base (21), the buckle (24) is fixedly connected to the telescopic unit (22). There are two clamping mobile ends (23), and the two clamping mobile ends (23) are slidably connected to the moving mechanism (3). The linear screw module (25) is fixedly connected to the first base (21), the mobile end of the linear screw module (25) is fixedly connected to the telescopic unit (22), and the buckle (24) is fixedly connected to the thickness detector (1).

3. An automatic target detection device according to claim 2, characterized in that: The telescopic unit (22) includes a fixing plate (221), a moving column (222), and a moving block (223). The fixing plate (221) is fixedly connected to the moving column (222), and the moving block (223) is fixedly connected to the fixing plate (221). The first base (21) is provided with a first sliding groove (211), the moving column (222) is slidably connected to the first sliding groove (211). The first base (21) is provided with a second sliding groove (212), the moving column (222) is slidably connected to the second sliding groove (212). The first base (21) is provided with a third sliding groove (213), the fixing plate (221) is slidably connected to the third sliding groove (213). The first base (21) is provided with a fourth sliding groove (214), and the moving block (223) is slidably connected to the fourth sliding groove (214).

4. An automatic target detection device according to claim 3, characterized in that: The moving mechanism (3) includes a sliding platform (31), a second base (32), and an adjusting unit (33). The second base (32) is provided with a limiting groove (321), the sliding platform (31) is placed in the limiting groove (321), the adjusting unit (33) is fixedly connected to the second base (32), and the adjusting unit (33) is fixedly connected to the cavity (4).

5. The automatic target detection device according to claim 4, wherein: The adjusting unit (33) includes a connecting block (331), a bidirectional motor (332), a mounting plate (333), a servo motor (334) and a first fixing block (335). There are two connecting blocks (331), and the two connecting blocks (331) are fixedly connected to the second base (32). The two output ends of the bidirectional motor (332) are respectively fixedly connected to the two connecting blocks (331). The mounting plate (333) is fixedly connected to the bidirectional motor (332). The output end of the servo motor (334) is fixedly connected to the mounting plate (333). The servo motor (334) is fixedly connected to the first fixing block (335). The first fixing block (335) is fixedly connected to the cavity (4).

6. The automatic target detection device according to claim 5, characterized in that: The cleaning mechanism (6) includes a brush (61), a fixing member (62), a driving unit (63) and a transmission unit (64). The brush (61) is fixedly connected to the fixing member (62). The fixing member (62) is fixedly connected to the first base (21). The brush (61) is slidably connected to the fixing member (62). The driving unit (63) is fixedly connected to the moving column (222). The transmission unit (64) is hingedly connected to the fixing member (62). The transmission unit (64) is fixedly connected to the brush (61).

7. An automatic target detection device according to claim 6, characterized in that: The transmission unit (64) includes a first connecting rod (641), a second connecting rod (642) and a return spring (643). The fixing member (62) is provided with a mounting groove (621). The first connecting rod (641) is placed in the mounting groove (621). The first connecting rod (641) is hingedly connected to the fixing member (62). The first connecting rod (641) is hingedly connected to the second connecting rod (642). The second connecting rod (642) is hingedly connected to the brush (61). One end of the return spring (643) is fixedly connected to the first connecting rod (641), and the other end of the return spring (643) is fixedly connected to the mounting groove (621).

8. An automatic target detection device according to claim 7, characterized in that: The driving unit (63) includes a third connecting rod (631), a convex block (632) and a guiding block (633). The third connecting rod (631) is fixedly connected to the moving column (222). There are several convex blocks (632), and the several convex blocks (632) are fixedly connected to the third connecting rod (631). There are several guiding blocks (633), and the several guiding blocks (633) are fixedly connected to the third connecting rod (631).

9. The automatic target detection device according to claim 8, wherein: The thickness detector (1) includes a probe (11) and a main unit (12). The probe (11) is fixedly connected to the main unit (12). The main unit (12) is provided with a network interface (121).

Images