Quick-response high-temperature-resistant array sensor and manufacturing method and using method thereof

Abstract

The invention discloses a quick-response high-temperature-resistant array sensor and a manufacturing method and a using method thereof, and belongs to the technical field of temperature sensors. The sensor comprises a square insulating sheet, unit sensors and hollowed-out structures, the multiple unit sensors are arranged on the square insulating sheet in a circumferential array mode with the center of the square insulating sheet as the circle center, and one hollowed-out structure is arranged between every two adjacent unit sensors. The invention aims to solve the problems of increasing the response speed of a sensor in the field of high-temperature measurement, prolonging the service life of the high-temperature sensor and improving the measurement precision of the sensor, has the characteristics of small thermal capacity, quick response, high sensitivity, good flexibility and easiness in attachment, and can quickly and accurately measure the change of transient temperature.

Description

Technical Field

[0001] The present invention relates to a fast-response high-temperature resistant array sensor, a manufacturing method thereof and a using method thereof, belonging to the technical field of temperature sensors. Background Art

[0002] Gas turbines are widely used in power generation, marine power, aviation power and other fields. Their product types are increasing and their application ranges are becoming more and more extensive. The exhaust gas temperature of a gas turbine is an important indicator for characterizing whether the working state of the gas turbine is normal, and the efficiency and output power of the gas turbine are directly affected by the temperature. The commonly used sensor for a gas turbine is a filament thermocouple, and this type of sensor has the characteristic of slow response speed; later, a thin film thermocouple sensor appeared. Although the response time has been improved, due to the relatively thick substrate of this type of sensor, the application range is relatively small.

[0003] To sum up, the high-temperature temperature sensor based on a castable ceramic substrate of the present invention has the characteristics of small heat capacity, fast response, high sensitivity, good flexibility, easy fitting, etc., and can quickly and accurately measure the change of transient temperature. Due to its small size, it can measure the point temperature of an object and is applicable to fields such as engine temperature measurement, iron and steel smelting, petrochemical industry, etc. to solve the above technical problems. Summary of the Invention

[0004] The research and development purpose of the present invention is to solve the problems of improving the response speed of sensors in the high-temperature measurement field, increasing the service life of high-temperature sensors and improving the measurement accuracy of sensors. A brief overview of the present invention is given below to provide a basic understanding of certain aspects of the present invention. It should be understood that this overview is not an exhaustive overview of the present invention. It is not intended to identify the key or important parts of the present invention, nor is it intended to limit the scope of the present invention.

[0005] Technical solution of the present invention:

[0006] Solution 1: A fast-response high-temperature resistant array sensor, including a square insulating sheet, unit sensors and a hollow structure. On the square insulating sheet, a plurality of unit sensors are arranged in a circumferential array with its center as the center of the circle, and a hollow structure is arranged between every two adjacent unit sensors;

[0007] The unit sensor is prepared by a screen printing film-forming process using platinum-rhodium 30 alloy and platinum-rhodium 6 alloy.

[0008] Preferably: The platinum-rhodium 30 alloy and the platinum-rhodium 6 alloy are arranged crosswise, and the ends of the two close to the center of the square insulating sheet are set as cross-connection endpoints.

[0009] Preferably: The square insulating sheet is a castable alumina ceramic substrate.

[0010] Preferably, the platinum-rhodium 30 alloy and the platinum-rhodium 6 alloy are respectively connected to the leads through electrode pads.

[0011] Preferably, the hollow structure is a triangular hollow structure, and the triangular hollow structure is made by ceramic tape casting and co-sintering process.

[0012] Preferably, the number of the unit sensors is 4, and they are arranged in a uniform circular array.

[0013] Solution Two: The manufacturing method of the above-mentioned fast-response high-temperature-resistant array sensor includes the following steps:

[0014] Step 1, fabricate an alumina green ceramic film by tape casting process;

[0015] Step 2, use a cutting process to cut the alumina green ceramic film prepared in Step 1 into alumina green ceramic film units;

[0016] Step 3, manufacture wire passing holes in the alumina green ceramic film units by punching process to finally complete the initial processing of the square insulating sheet;

[0017] Step 4, prepare the sensitive films of platinum-rhodium 30 alloy and platinum-rhodium 6 alloy by screen printing process;

[0018] Step 5, clamp the sensitive films prepared in Step 4 between two layers of square insulating sheets by a lamination process to form a sandwich structure;

[0019] [[ID=Z8]]Step 6, make the sensitive structure extruded and formed by isostatic pressing process for the sandwich structure formed in Step 5;

[0020] Step 7, then further sinter and process by high-temperature sintering process to form a stable alumina ceramic; at this time, the sensitive films of platinum-rhodium 30 alloy and platinum-rhodium 6 alloy are formed at high temperature;

[0021] Step 8, sinter and fix the leads with conductive paste by sintering process;

[0022] Step 9, conduct the final encapsulation and testing experiment.

[0023] Solution Three: The usage method of the above-mentioned fast-response high-temperature-resistant array sensor includes the following 3 working modes:

[0024] The first one is the independent working mode, that is, each unit sensor works independently;

[0025] The second one is the voting working mode, that is, 3 unit sensors are used for temperature measurement at the same time, one data with larger error is eliminated, and the remaining two data are averaged;

[0026] The third algorithm working mode, that is, data fusion processing is performed on the measurement results of 4 unit sensors. The specific algorithm is as follows:

[0027] Arrange the data measured by the 4 unit sensors in ascending order: x1, x2, … x n-1 , x n , and set it as set A, where x n is the maximum value of set A, and x1 is the minimum value of set A;

[0028] Let the median of set A be X m , where: x m＝(xn / 2+xn / 2+1) ; Let x m and the data on its left be set L; x m and the data on its right be set R. Then, let the median of set L be x lm , and let the median of set R be x rm ;

[0029] Assume that subsequent measured values are all distributed between x1 and x n . Taking set L as an example, for a certain measured data x i falling between x lm and x m , the probability is 25%. There is the following formula:

[0030]

[0031] Then there is:

[0032]

[0033] Solve to get:

[0034]

[0035] In the formula: X ~ N(0, 1); σ L is the standard deviation, μ is the expectation, and Φ(x) is the standard normal distribution function.

[0036] Next, by looking up the standard normal distribution quantile table, we can get: Φ -1 (0.75) = 0.6744. Then, according to formula (1), we can get Delete the data in set L that is less than x m - 3σ L . Similarly, for set R, the standard deviation of set R is σ R . Delete the data in set R that is greater than x m + 3σ R . Then calculate the average value and standard deviation of set A;

[0037] From the formula:

[0038]

[0039] It can be obtained that:

[0040]

[0041] In the formula: is the average value of set A, and x i are the respective data of set A, and σ i is the variance of each unit sensor, and w i is the weight value of each unit sensor;

[0042] The optimal weight value can be obtained from formula (2):

[0043]

[0044] Finally, the optimal weight value is assigned to each unit sensor, and the final sensor value can be obtained.

[0045] The present invention has the following beneficial effects:

[0046] 1. The present invention has the characteristics of small heat capacity, fast response, high sensitivity, good flexibility, and easy fitting, and can quickly and accurately measure the change of transient temperature;

[0047] 2. The present invention is small in volume and can measure the point temperature of an object, and is applicable to fields such as engine temperature measurement, iron and steel smelting, and petrochemical industry. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] Figure 1 is the fitting installation diagram of the square insulating sheet and the hollow structure of the present invention;

[0049] Figure 2 is the fitting installation diagram of the platinum-rhodium 30 alloy and the platinum-rhodium 6 alloy of the present invention;

[0050] Figure 3 is the fitting installation diagram of the unit sensor and the hollow structure of the present invention;

[0051] Figure 4 is the fitting installation diagram of the unit sensor and the lead wire of the present invention;

[0052] Figure 5 is the structural schematic diagram of a fast-response high-temperature-resistant array sensor.

[0053] In the figure, 1-square insulating sheet, 2-unit sensor, 3-hollow structure, 4-platinum-rhodium 30 alloy, 5-platinum-rhodium 6 alloy, 6-lead wire. DETAILED DESCRIPTION OF THE INVENTION

[0054] To make the objectives, technical solutions, and advantages of the present invention more clearly understood, the present invention will be described below through specific embodiments shown in the accompanying drawings. However, it should be understood that these descriptions are merely exemplary and are not intended to limit the scope of the present invention. In addition, in the following description, descriptions of well-known structures and technologies are omitted to avoid unnecessarily confusing the concepts of the present invention.

[0055] The connections mentioned in the present invention are divided into fixed connections and detachable connections. The fixed connections, that is, non-detachable connections, include but are not limited to conventional fixed connection methods such as hemming connection, rivet connection, bonding connection, and welding connection. The detachable connections include but are not limited to conventional disassembly methods such as screw connection, snap connection, pin connection, and hinge connection. When the specific connection method is not clearly defined, it is defaulted that at least one connection method can always be found among the existing connection methods to achieve this function, and those skilled in the art can select according to their needs. For example: for fixed connection, welding connection is selected; for detachable connection, hinge connection is selected.

[0056] Specific Embodiment 1: In combination with Figures 1 - 5 This embodiment is described. A fast-response high-temperature-resistant array sensor in this embodiment includes a square insulating sheet 1, unit sensors 2, and a hollow structure 3. On the square insulating sheet 1, a plurality of unit sensors 2 are arranged in a circumferential array with its center as the center of the circle, and a hollow structure 3 is provided between every two adjacent unit sensors 2;

[0057] The unit sensor 2 is prepared by a screen printing film-forming process using platinum-rhodium 30 alloy 4 and platinum-rhodium 6 alloy 5, which is set as the sensing layer. Platinum-rhodium 30 alloy 4 and platinum-rhodium 6 alloy 5 are thermocouple sensitive materials. The platinum-rhodium 30 alloy 4 is an alloy composed of platinum Pt and rhodium Rh, in which the content of rhodium is 30% and the content of platinum is 70%. The platinum-rhodium 6 alloy 5 is an alloy composed of platinum Pt and rhodium Rh, in which the content of rhodium is 6% and the content of platinum is 94%.

[0058] The platinum-rhodium 30 alloy 4 and the platinum-rhodium 6 alloy 5 are arranged crosswise, and the ends of both of them close to the center of the square insulating sheet 1 are set as cross-connection endpoints.

[0059] The square insulating sheet 1 is a cast alumina ceramic substrate. The square insulating sheet 1 is set as an insulating layer, and an Al2O3 green ceramic film with a thickness of 70 - 100 μm is manufactured by a casting process and formed into a side length of 3 - 5 mm through a cutting process.

[0060] The platinum-rhodium 30 alloy 4 and the platinum-rhodium 6 alloy 5 are respectively connected to a lead wire (6) through electrode pads, and the bottom side length is 1.5 - 2.5 mm. The reason for using platinum-rhodium 30 alloy 4 and platinum-rhodium 6 alloy 5 is that they can withstand a maximum temperature of 1800 degrees Celsius.

[0061] The hollow structure 3 is a triangular hollow structure, which is fabricated by ceramic tape casting and co-sintering processes, and the hollow structure 3 is located inside the square insulating sheet 1.

[0062] The number of the unit sensors 2 is four, and they are arranged in a uniform circular array.

[0063] The electrodes of the four unit sensors 2 are connected to the center point of the square insulating sheet 1, greatly reducing the heat capacity, making the heat capacity at the middle position near the center the lowest, aiming to improve the response speed of the unit sensors 2. When the distance between the electrodes of the four unit sensors 2 and the square insulating sheet 1 is 0.5 mm, the response time can be controlled within 20 ms; when the distance between the vertices is 0.2 mm, the response time of the sensor is estimated to be within 10 ms.

[0064] Specific Embodiment Two: With reference to Figures 1 - 5 Describe this embodiment. Based on the manufacturing method of a fast-response high-temperature-resistant array sensor described in Specific Embodiment One, it includes the following steps:

[0065] Step 1, fabricate an alumina green ceramic film using the tape casting process;

[0066] Step 2, use the cutting process to cut the alumina green ceramic film prepared in Step 1 into alumina green ceramic film units;

[0067] Step 3, manufacture wire passing holes in the alumina green ceramic film units through the punching process to finally complete the preliminary processing of the square insulating sheet 1;

[0068] Step 4, prepare the sensitive films of platinum-rhodium 30 alloy 4 and platinum-rhodium 6 alloy 5 using the screen printing process;

[0069] Step 5, clamp the sensitive films prepared in Step 4 between two layers of square insulating sheets 1 using the lamination process to form a sandwich structure;

[0070] Step 6, make the sensitive structure extruded and formed by the isostatic pressing process for the sandwich structure formed in Step 5;

[0071] Step 7, then further sinter and process using the high-temperature sintering process to form a stable alumina ceramic; at this time, the sensitive films of platinum-rhodium 30 alloy 4 and platinum-rhodium 6 alloy 5 are formed at high temperature;

[0072] Step 8, use the sintering process to sinter and fix the lead 6 with conductive paste;

[0073] Step 9, conduct the final encapsulation and testing experiment.

[0074] Specific Embodiment Three: With reference to Figures 1 - 5This embodiment is based on the usage method of a fast-response high-temperature-resistant array sensor described in the first specific embodiment, and includes the following three working modes:

[0075] First, the independent working mode, that is, each unit sensor 2 works independently, and the 4 unit sensors 2 increase the overall working life of the sensor;

[0076] Second, the voting working mode, that is, 3 unit sensors 2 are used for temperature measurement at the same time. For the 1 data with a large error, it is eliminated, and the remaining two data are averaged, which can improve the accuracy of the data result;

[0077] The specific operation steps are as follows: Let the measurement data of the 3 sensors be T1, T2, and T3 respectively. Calculate the average value of the three data and the standard deviation σ. If the absolute deviation of a sensor data from the average value is determined to be an outlier and is eliminated. If multiple sensors are triggered abnormally at the same time, the sensor with the largest deviation from the historical data trend is preferentially eliminated. Then, take the arithmetic mean of the remaining two data.

[0078] Third, the algorithm working mode, that is, the measurement results of the 4 unit sensors 2 are subjected to data fusion processing, which improves the overall effectiveness of the system. The specific algorithm is as follows:

[0079] Arrange the data measured by the 4 unit sensors 2 in ascending order: x1, x2,... x n-1 , x n , and set it as set A, where x n is the maximum value of set A, and x1 is the minimum value of set A;

[0080] Let the median of set A be X m , where: x m＝(xn / 2+xn / 2+1) ; Let x m and the data on its left be set L; x m and the data on its right be set R. Then, let the median of set L be x lm , and let the median of set R be x rm ;

[0081] Assume that all subsequent measurement values are distributed between x1 and x n . Taking set L as an example, the probability that a certain measurement data x i falls between x lm and x m is 25%, and there is the following formula:

[0082]

[0083] Then there is:

[0084]

[0085] Solution:

[0086]

[0087] where: X ~ N(0, 1); σ L is the standard deviation, μ is the expectation, and Φ(x) is the standard normal distribution function.

[0088] Next, by looking up the standard normal distribution quantile table, we can obtain: Φ -1 (0.75) = 0.6744, then according to formula (1), we can obtain Remove the data in set L that is less than x m -3σ L Similarly for set R, the standard deviation of set R is σ R , remove the data in set R that is greater than x m +3σ R Then calculate the mean and standard deviation of set A;

[0089] From the formula:

[0090]

[0091] We can obtain:

[0092]

[0093] where: is the mean of set A, x i are the respective data of set A, σ i is the variance of each unit sensor 2, w i is the weight of each unit sensor 2;

[0094] From formula (2), the optimal weight can be obtained:

[0095]

[0096] Finally, allocate the optimal weight to each unit sensor 2 to obtain the final sensor value.

[0097] It should be noted that in the above embodiments, as long as the technical solutions are not contradictory, they can be combined. Those skilled in the art can exhaust all possibilities according to the mathematical knowledge of permutation and combination. Therefore, the present invention will no longer describe the technical solutions after permutation and combination one by one, but it should be understood that the technical solutions after permutation and combination have been disclosed by the present invention.

[0098] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, various modifications and variations can be made to the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A high-temperature resistant array sensor with fast response, characterized in that: The invention comprises a square insulating sheet (1), a unit sensor (2) and a hollow structure (3); a plurality of unit sensors (2) are arranged in a circular array on the square insulating sheet (1) with the center of the square insulating sheet as the center of a circle, and a hollow structure (3) is provided between every two adjacent unit sensors (2); The unit sensor (2) is prepared from a platinum-rhodium 30 alloy (4) and a platinum-rhodium 6 alloy (5) through a screen printing film forming process.

2. The rapid response high temperature resistant array sensor according to claim 1, wherein: The platinum-rhodium 30 alloy (4) and the platinum-rhodium 6 alloy (5) are arranged crosswise, and one end of the two close to the center of the square insulating sheet (1) is set as a cross connection end point.

3. The fast-response high-temperature resistant array sensor according to claim 2, wherein: The square insulating sheet (1) is a tape-cast alumina ceramic substrate.

4. The fast response high temperature resistant array sensor according to claim 3, characterized in that: The platinum-rhodium 30 alloy (4) and the platinum-rhodium 6 alloy (5) are respectively connected to the lead wire (6) via electrode pads.

5. The fast-response high-temperature-resistant array sensor according to claim 4, wherein: The hollow structure (3) is a triangular hollow structure, which is manufactured by ceramic casting and co-sintering technology.

6. The fast-response high-temperature resistant array sensor according to claim 5, wherein: The number of the unit sensors (2) is 4 and they are arranged in a uniform circular array.

7. The manufacturing method of a fast-response high-temperature-resistant array sensor according to any one of claims 1-6, characterized in that The following steps are involved: Step 1, using a tape casting process to prepare an alumina ceramic film; Step 2, using a cutting process to cut the alumina green ceramic film prepared in step 1 into alumina green ceramic film units; Step 3, manufacturing the wire holes of the alumina ceramic membrane on the alumina ceramic membrane unit by punching process, and finally completing the primary processing of the square insulating sheet (1); Step 4, using a screen printing process to prepare sensitive films of platinum-rhodium 30 alloy (4) and platinum-rhodium 6 alloy (5); Step 5, sandwiching the sensitive film prepared in step 4 between two layers of square insulating sheets (1) using a lamination process to form a sandwich structure; Step 6, extruding the sandwich structure formed in step 5 into a sensitive structure through an isostatic pressing process; Step 7, then further sintering is performed using a high temperature sintering process to form a stable alumina ceramic; at this time, the sensitive membranes of the platinum-rhodium 30 alloy (4) and the platinum-rhodium 6 alloy (5) are formed at high temperature; Step 8, using a sintering process to sinter the lead (6) with a conductive paste; Step 9: Conduct the final packaging test experiment.

8. The method of using a fast-response high-temperature-resistant array sensor according to claim 6, characterized in that There are three working modes: The first is the independent working mode, that is, each unit sensor (2) works independently; The second is the voting working mode, which is to use three unit sensors (2) to measure temperature at the same time, remove the data with a larger error, and perform mean processing on the remaining two data; The third algorithm working mode is to perform data fusion processing on the measurement results of the four unit sensors (2). The specific algorithm is as follows: Arrange the data measured by the four unit sensors (2) in ascending order: x1, x2, … x n-1 , x n , and denote it as set A, where x n is the maximum value of set A, and x1 is the minimum value of set A; Let the median of set A be X m , where: x m＝(xn / 2+xn / 2+1) ; Let x m and the data on its left be set L; x m and the data on its right be set R. Then let the median of set L be x lm , and let the median of set R be x rm ; Assume that subsequent measured values are all distributed between x1 and x n Taking the set L as an example, for a certain measured data x i falling between x lm and x m is 25%, and there is the following formula: Then we have: The solution is: where: X ∼ N(0, 1); σ L is the standard deviation, μ is the expectation, and Φ(x) is the standard normal distribution function; Next, by looking up the standard normal distribution quantile table, we can obtain: Φ -1 (0.75) = 0.6744. Then, according to formula (1), we can obtain Remove the data in set L that is less than x m -3σ L Similarly, for set R, the standard deviation of set R is σ R , remove the data in set R that is greater than x m +3σ R Then calculate the mean and standard deviation of set A; By the formula: We can get: Where: X is the average value of set A, and x i is each data of set A, and σ i is the variance of each unit sensor (2), and w i is the weight value of each unit sensor (2); The optimal weight can be obtained from formula (2): Finally, the optimal weight is assigned to each unit sensor (2) to obtain the final sensor value.

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