Online optical analysis module and online optical analysis device

Abstract

The invention relates to the technical field of optical detection equipment, and provides an online optical analysis module and an online optical analysis device.The online optical analysis module comprises a light-transmitting cavity, a shading shell, a light inlet connecting piece and a light outlet connecting piece. The light-transmitting cavity is used for accommodating to-be-detected liquid from process equipment, the light-shielding shell covers the light-transmitting cavity and comprises a light-in connecting hole and a light-out connecting hole, the light-in connecting piece is connected with the light-in connecting hole of the light-shielding shell, the light-out connecting piece is connected with the light-out connecting hole of the light-shielding shell, and the light-out connecting piece is connected with the light-out connecting hole of the light-shielding shell. The device can be flexibly installed on a production line for intelligent upgrading, optical properties of chemical agents in the production line can be automatically detected in real time or regularly, the production efficiency and the qualified rate are effectively improved, and the production cost of manpower, time and the like is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of optical detection equipment, and in particular to an on-line optical analysis module and an on-line optical analysis device. Background Art

[0002] In the production process of semiconductor wafers, various chemical agents are required for chemical processes such as cleaning, yellow light, electroplating, and etching to form micron or nano-scale precision structures to meet the requirements of high precision and high efficiency. After multiple reactions, as the chemical agents are used for a longer time, more by-products or impurities that affect the reaction efficiency and precision accumulate therein. If new chemical agents are not replaced in time, the unqualified rate of the wafers will increase, and even contamination will remain on the wafers, which will have a negative impact on the products and manufacturing costs.

[0003] However, currently, for the analysis of chemical agents used in the process, it is necessary to manually extract samples to be tested from each production machine one by one and then transport them to the analysis instruments in the laboratory for detection. Since the number of samples analyzed by the analysis instruments each time is limited and the manual operation of the instruments takes time, samples of different batches need to queue up for detection, resulting in problems such as time-consuming detection, labor consumption, and lack of real-time detection results. New chemical agents cannot be replaced in time, thus causing unnecessary waste of materials and costs. Summary of the Invention

[0004] To solve the above problems, the present invention provides an on-line optical analysis module and an on-line optical analysis device, which realize the on-line detection of chemical agents in the semiconductor manufacturing process, avoid the process of manual sampling, effectively increase the production efficiency and qualified rate, and reduce production costs such as labor and time.

[0005] The above technical objects of the present invention are mainly achieved by the following technical means:

[0006] On the one hand, the present invention provides an on-line optical analysis module, which includes:

[0007] A light-transmitting cavity for accommodating the liquid to be tested from the process equipment;

[0008] A light-shielding housing covering the light-transmitting cavity, and the light-shielding housing includes a light-incident connection hole and a light-emitting connection hole;

[0009] A light-incident connecting member connecting the light-incident connection hole of the light-shielding housing; and

[0010] A light-emitting connecting member connecting the light-emitting connection hole of the light-shielding housing.

[0011] Preferably, a lens is provided in the light-incident connecting member, and the focal length of the lens is equal to the distance between the central axis of the lens and the surface or central axis of the light-transmitting cavity.

[0012] Preferably, the lens is a plano-convex lens, and the convex surface of the plano-convex lens is disposed at one end close to the light-transmitting cavity.

[0013] Preferably, the light-shielding housing further includes an upper cover and a receiving portion to define a receiving cavity for receiving the light-transmitting cavity.

[0014] Preferably, the light-shielding housing includes a surface treated with acid and alkali resistance.

[0015] Preferably, the on-line optical analysis module further includes a liquid supply pipe and a liquid discharge pipe. The liquid supply pipe is liquid-connected to the bottom of the light-transmitting cavity, and the liquid discharge pipe is liquid-connected to the top of the light-transmitting cavity, so that the liquid to be measured is discharged from the top.

[0016] Preferably, the detection wavelength range of the on-line optical analysis module is from 180 nm to 1100 nm.

[0017] Preferably, the optical resolution of the on-line optical analysis module is from 0.35 nm to 1.5 nm.

[0018] Preferably, the distance between the light-transmitting cavity and the light-shielding housing is less than 0.05 cm.

[0019] On the other hand, the present invention also provides an on-line optical analysis device, which includes the on-line optical analysis module, a light source and a spectrometer as described above. The light incident connection member of the on-line optical analysis module is connected to the light source through an incident optical fiber, and the light output connection member is connected to the spectrometer through an output optical fiber.

[0020] The technical solution of the present invention has the following characteristics and advantages compared with the prior art:

[0021] The on-line optical analysis device of the present invention reduces the volume through modularization and precise structure, so it can be flexibly installed on the production line for intelligent upgrading. In addition, when the on-line optical analysis device fails or ages, the on-line optical analysis module of the present invention can be disassembled, replaced or repaired, saving the time for re-calibrating and aligning the lens and the light-transmitting cavity, and avoiding the detection blank period. Therefore, the on-line optical analysis module of the present invention realizes direct connection with the production machine in the process and obtains chemical agents, saving the time for manual extraction of samples to be measured one by one in each production machine for detection, automatically detecting the optical properties of chemical agents in real time or regularly, so as to timely replace new chemical agents, and when unqualified products appear, it can be timely known whether it is attributed to chemical agents, effectively increasing production efficiency and qualification rate, and reducing production costs such as labor and time. Description of the Drawings

[0022] Figure 1 It is a schematic diagram of the on-line optical analysis device of the present invention.

[0023] Figure 2Plan view of the on-line optical analysis device of the present invention after removing the light source.

[0024] Figure 3 Schematic diagram of the light-shielding housing of the on-line optical analysis module of the present invention.

[0025] Figure 4 For Figure 3 Schematic diagram of the light-shielding housing of after opening the upper cover.

[0026] Figure 5 Cross-sectional view of the light incident connecting member of the on-line optical analysis module of the present invention.

[0027] Description of reference numerals:

[0028] 1. On-line optical analysis device; 10. On-line optical analysis module; 11. Light-shielding housing; 12. Upper cover; 121. First fixing structure; 13. Accommodating part; 131. Accommodating cavity; 132. Light-emitting connection hole; 133. Light-incident connection hole; 134. Second fixing structure; 135. Fixing part;

[0029] 21. Translucent cavity;

[0030] 31. Light-incident connecting member; 311. Optical fiber connecting part; 312. Connection body; 313. Lens part; 314. Lens; 32. Light-incident optical fiber;

[0031] 41. Light-emitting connecting member; 411. Optical fiber connecting part; 412. Connection body; 413. Lens part; 42. Light-emitting optical fiber;

[0032] 51. Liquid discharge pipe; 52. Liquid supply pipe;

[0033] 61. Spectrometer;

[0034] 71. Light source;

[0035] 81. Base. Detailed description of the specific embodiments

[0036] The following will detail the embodiments of the present invention and use the accompanying drawings as examples to facilitate better understanding by readers. In addition to these detailed descriptions, the present invention can also be widely implemented in other embodiments. Any simple substitution, modification, or equivalent change of the said embodiments should be understood to be included within the protection scope of the present invention, and the protection scope should be subject to the claims. It should be noted in particular that the drawings are only for illustration purposes and do not represent the actual size or quantity of the components. Some details may not be fully drawn to simplify the drawings.

[0037] Please refer to Figures 1 to 2, the present invention provides an on-line optical analysis device 1, which is provided with: a light source 71, an incident optical fiber 32, an on-line optical analysis module 10, an outgoing optical fiber 42, a spectrometer 61 and a base 81. The on-line optical analysis device 1 can be applied to a production line using chemical agents, for example, in chemical process such as cleaning, yellow light, electroplating and etching in a semiconductor wafer production line, to detect the optical properties, purity, pollution degree, etc. of chemical agents.

[0038] The on-line optical analysis module 10 is arranged on the base 81, and the height of the base 81 is set such that the interfaces of the outgoing optical fiber 42 of the on-line optical analysis module 10 and the outgoing optical fiber 42 of the spectrometer 61 are at the same height. The on-line optical analysis module 10 is provided with: a light-transmitting cavity 21, a light-shielding housing 11, an incident light connecting member 31, an outgoing light connecting member 41, a liquid supply pipe 52 and a liquid discharge pipe 51.

[0039] Please refer to Figures 3 to 4 , the light-shielding housing 11 includes an upper cover 12 and a receiving portion 13, and the upper cover 12 covers the receiving portion 13 to form a receiving cavity 131 to wrap or accommodate the light-transmitting cavity 21, so as to prevent the light-transmitting cavity 21 from being interfered by external light during optical analysis. The abutting surfaces of the upper cover 12 and the receiving portion 13 may each be provided with a plurality of first fixing structures 121 and second fixing structures 134 to be snap-connected or screwed to each other. The light-shielding housing 11 can be fixed on the base 81 through a fixing portion 135, for example, by means of screw connection, adhesion or clamping.

[0040] Two opposite side walls of the light-shielding housing 11 are respectively provided with an outgoing light connection hole 132 and an incident light connection hole 133, so that the incident light from the light source 71 enters through the outgoing light connection hole 132 and exits through the incident light connection hole 133. The other two opposite side walls of the light-shielding housing 11 are respectively grooved to allow the liquid supply pipe 52 and the liquid discharge pipe 51 to move. It should be understood that the drawings of the present invention are exemplary examples, and the outgoing light connection hole 132, the incident light connection hole 133 and the grooves of the light-shielding housing 11 can be provided on the upper cover 12 or the receiving portion 13.

[0041] The light-shielding housing 11 has a surface treated with acid and alkali resistance. Preferably, the acid and alkali resistance treatment is anodic treatment, chemical deposition treatment or physical coating treatment, so that the light-shielding housing 11 has a metal oxide film, a Teflon layer or a nickel-phosphorus alloy layer, etc., to prevent damage caused by corrosion of the solution to be measured.

[0042] The material of the light-shielding housing 11 can be metal, metal alloy or polymer. Examples of metals and metal alloys include but are not limited to: gold, silver, copper, iron, aluminum or their alloys. Examples of polymers include but are not limited to: polyethylene (PE), polypropylene (PP), polyvinyl chloride (PVC), polyethylene terephthalate (PET), polystyrene (PS), polycarbonate (PC), polyvinylidene fluoride (PVDF), polytetrafluoroethylene (PTFE), perfluoroethylene propylene copolymer (FEP), tetrafluoroethylene and perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene and ethylene copolymer (ETFE) or their derivatives. Preferably, the material of the light-shielding housing 11 is aluminum or Teflon.

[0043] Please refer to Figure 4 , the light-transmitting cavity 21 is disposed within the light-shielding housing 11 and houses the liquid to be measured from the process equipment or the mixed reaction reagent thereof. The material of the light-transmitting cavity 21 is far-ultraviolet quartz glass, and the light transmittance for light within the wavelength range of 180 nm to 1100 nm is 80% to 99.99%. Preferably, the light transmittance for light within the above wavelength range is 90% to 99.99%. The distance between the light-transmitting cavity 21 and the light-shielding housing 11 is less than 0.05 cm. The light-transmitting cavity 21 can be attached to the inner wall of the receiving cavity 131 of the light-shielding housing 11 by ultrasonic welding.

[0044] The bottom of the light-transmitting cavity 21 is liquid-connected to the liquid supply pipe 52, and the top of the light-transmitting cavity 21 is liquid-connected to the liquid discharge pipe 51, such that the liquid to be measured from the process equipment fills the light-transmitting cavity 21 starting from the bottom and is discharged from the top, ensuring that the liquid to be measured completely fills the entire light-transmitting cavity 21. The liquid supply pipe 52 and the liquid discharge pipe 51 can be arranged in the form of an outlet interface or a pipeline. If in the form of an outlet interface, then a pipeline is installed to connect to the process equipment. If in the form of a pipeline, then it is directly connected to the process equipment or transferred to its pipeline.

[0045] Please refer to Figure 5 , for the sake of brevity, Figure 5Taking the light incident connection member 31 as an example, the internal structure of the light output connection member 41 is similar to that of the light incident connection member 31, so it will not be shown repeatedly. The light incident connection member 31 is connected to the light incident connection hole 133 of the light shielding housing 11 and is connected to the light source 71 through the light incident optical fiber 32. The light output connection member 41 is connected to the light output connection hole 132 of the light shielding housing 11 and is connected to the spectrometer 61 through the light output optical fiber 42. The light incident connection member 31 is provided with an optical fiber connection portion 311, a connection body 312 and a lens portion 313. The light output connection member 41 is provided with an optical fiber connection portion 411, a connection body 412 and a lens portion 413. The optical fiber connection portion 311 is connected to the light incident optical fiber 32, while the optical fiber connection portion 411 is connected to the light output optical fiber 42. The connection body 312 is arranged between the optical fiber connection portion 311 and the lens portion 313. The connection body 412 is arranged between the optical fiber connection portion 411 and the lens portion 413 and is provided with a circular or polygonal convex portion (for example: hexagon). The sizes of the lens portion 313 and the lens portion 413 are respectively suitable for being fitted in the light output connection hole 132 and the light incident connection hole 133. Lenses are provided in both the lens portion 313 and the lens portion 413. The focal length of the lens is equal to the distance between the central axis of the lens on the optical axis and the surface or the central axis of the light transmission cavity 21. Preferably, the lens 314 is a plano-convex lens. The convex surface of the plano-convex lens is arranged at one end close to the light transmission cavity 21. The focal length of the lens 314 is 5 mm to 15 mm. The focal length of the lens of the light incident connection member 31 is f1, and the focal length of the lens of the light output connection member 41 is f2, which satisfy the following conditions:

[0046] 0.8 ≤ |f1 / f2| ≤ 1.2

[0047] The light source 71 is connected to the light incident connection member 31 through the light incident optical fiber 32, so as to provide incident light to pass through the liquid to be measured in the light transmission cavity 21. Examples of the light source 71 include but are not limited to: deuterium lamp, halogen lamp or deuterium-halogen lamp. The emission wavelength range of the light source 71 is 180 nm to 110 nm.

[0048] The spectrometer 61 is connected to the light output connection member 41 through the light output optical fiber 42, so as to receive the outgoing light passing through the liquid to be measured in the light transmission cavity 21. The detection wavelength range of the spectrometer 61 is 180 nm to 1100 nm, and the optical resolution is 0.35 nm to 1.5 nm. The data measured by the spectrometer 61 can be transmitted to the target position or device by means of wired or wireless transmission. The spectrometer 61 can adopt existing principles, components and structures. For the sake of simplicity of the description, the present invention will not repeat the description here.

[0049] By arranging the on-line optical analysis module 10, the on-line optical analysis device 1 of the present invention has the light shielding housing 11 tightly covering the light transmission cavity 21. Specific wavelength light is made to enter the light transmission cavity 21 in the light shielding housing 11 through the lenses in the light incident connection member 31 and the light output connection member 41, and is emitted to the spectrometer 61 for optical analysis.

[0050] The online optical analysis device 1 of the present invention reduces its volume through modularization and precise structure, so it can be flexibly installed on the production line for intelligent upgrading. In addition, when the online optical analysis device 1 fails or ages, the online optical analysis module 10 of the present invention can be disassembled, replaced or repaired, saving the time for recalibration and alignment of the lens and the light-transmitting cavity 21, and avoiding the detection blank period. Therefore, the online optical analysis module 10 of the present invention realizes direct connection with the production machine in the process and obtains chemical agents, saving the time for manual extraction of samples to be tested one by one in each production machine for detection, automatically detecting the optical properties of chemical agents in real time or regularly, so as to replace new chemical agents in time, and when unqualified products appear, it can be timely known whether it is attributed to chemical agents, effectively increasing production efficiency and qualification rate, and reducing production costs such as labor and time.

Claims

1. An on-line optical analysis module, characterized in that Comprising: A light-transmitting cavity for accommodating a liquid to be measured from a process device; A light-shielding housing covering the light-transmitting cavity, the light-shielding housing including a light-incident connection hole and a light-exiting connection hole; A light-incident connecting member connecting the light-incident connection hole of the light-shielding housing; and A light-exiting connecting member connecting the light-exiting connection hole of the light-shielding housing.

2. The online optical analysis module according to claim 1, wherein A lens is provided in the light-incident connecting member, and the focal length of the lens is equal to the distance between the central axis of the lens and the surface or the central axis of the light-transmitting cavity.

3. The online optical analysis module according to claim 2, wherein The lens is a plano-convex lens, and the convex surface of the plano-convex lens is disposed at one end close to the light-transmitting cavity.

4. The on-line optical analysis module according to claim 1, wherein The light-shielding housing further includes an upper cover and a receiving portion to define a receiving cavity for accommodating the light-transmitting cavity.

5. The on-line optical analysis module according to claim 1, wherein The light-shielding housing includes a surface treated with acid and alkali resistance.

6. The online optical analysis module according to claim 1, wherein It further includes a liquid supply pipe and a liquid discharge pipe. The liquid supply pipe is liquid-connected to the bottom of the light-transmitting cavity, and the liquid discharge pipe is liquid-connected to the top of the light-transmitting cavity, so that the liquid to be measured is discharged from the top.

7. The on-line optical analysis module according to claim 1, characterized in that, The detection wavelength range of the on-line optical analysis module is from 180 nm to 1100 nm.

8. The online optical analysis module according to claim 1, characterized in that The optical resolution of the on-line optical analysis module is from 0.35 nm to 1.5 nm.

9. The on-line optical analysis module according to claim 1, wherein The distance between the light-transmitting cavity and the light-shielding housing is less than 0.05 cm.

10. An on-line optical analysis device, characterized in that, Comprising the on-line optical analysis module, a light source and a spectrometer according to any one of claims 1 to 9. The light-incident connecting member of the on-line optical analysis module is connected to the light source through a light-incident optical fiber, and the light-exiting connecting member is connected to the spectrometer through a light-exiting optical fiber.

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