Wafer positioning device for glue coating and developing machine

Abstract

The present invention relates to the field of semiconductor integrated circuit manufacturing technology, specifically to a wafer positioning device for a glue coating and developing machine, comprising a wafer picking and gluing table, wherein the left side of the front side of the wafer picking and gluing table is fixedly connected to a wafer gluing mechanism, the wafer picking and gluing table comprises a base, the top right side of the base is fixedly connected to a picking component, the top left side of the base is fixedly connected to a gluing component, the wafer gluing mechanism comprises a rotating control base, and the top of the rotating control base is provided with a rotating table. The present invention realizes high-precision and high-efficiency positioning and processing of wafers in a glue coating and developing machine by providing a wafer picking and gluing table and a wafer gluing mechanism. Through a series of precise mechanical structures and electrical controls, the present invention ensures the stability and accuracy of the wafer in various processing steps such as picking, placing, and gluing, thereby greatly improving the production efficiency and product quality in the fields of semiconductor manufacturing, microelectronics processing, etc.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor integrated circuit manufacturing, and more particularly to a wafer positioning device for a glue coating and developing machine. Background Art

[0002] Single crystal silicon refers to a silicon material with high purity and good crystallization properties. It is one of the most basic materials in the semiconductor industry. With its unique physical and chemical properties, it plays a vital role in the manufacture of semiconductor devices. Single crystal silicon grows from molten silicon through a specific process, such as the Czochralski method or the zone melting method, to form a material with a single crystal structure. This material has excellent conductivity and thermal stability, making it an ideal choice for manufacturing semiconductor devices such as transistors and integrated circuits. In the wafer positioning device of the coating and developing machine, although single crystal silicon is not a material that directly constitutes the device, its position in the semiconductor chip manufacturing process cannot be ignored. It provides the basic semiconductor components for the operation of the entire device.

[0003] According to the patent document: CN118943067B, a wafer positioning device for a coating and developing machine is disclosed, including a base and a pillar, a mounting cylinder is installed on the top of the pillar, a wafer is arranged above the mounting cylinder, a cavity No. 1 and a cavity No. 2 are provided inside the mounting cylinder, and an air pressure hole connected to the cavity No. 1 is provided, and a telescopic rod is installed in the inner cavity of the cavity No. 1. This device adopts a relatively gentle way to realize the positioning function of the wafer, by providing a support mechanism to pre-support the wafer, and utilizing a rotator to rotate the outer surface of the support column, so that the roller realizes the synchronous function of self-rotation and revolution, and can rotate and adapt to the displacement of the wafer in any direction. This design realizes the full rotation support of the roller on the bottom of the wafer, completely avoiding the sliding friction of the support component on the wafer due to the relative displacement during the positioning process, and greatly reducing the wear and damage of the wafer.

[0004] Single crystal silicon, silicon rods are formed into wafers after grinding, polishing and slicing. After forming, the wafers need to be coated and developed. The coating can evenly cover the surface of the silicon wafer with a layer of photoresist. However, during the coating and development process of the wafer, the wafer needs to be fixed on a turntable and the turntable rotates at high speed to achieve uniform coating of the photoresist. However, the existing turntable mostly uses a mechanical clamping method to fix the wafer. This method is not only complicated to operate, but also easily causes damage to the wafer during the clamping process, affecting the quality of the wafer. In addition, it is difficult to ensure the stability of the wafer when the turntable rotates at high speed due to the light passing through the clamping method, which easily causes the problem of uneven photoresist coating. Summary of the Invention

[0005] In order to overcome the above-mentioned defects of the prior art, the present invention provides a wafer positioning device for a coating and developing machine. The technical problem to be solved by the present invention is that the turntable mostly adopts a mechanical clamping method when fixing the wafer. This method is not only complicated to operate, but also easily causes damage to the wafer during the clamping process, affecting the quality of the wafer. Moreover, through the clamping method, it is difficult to ensure the stability of the wafer when the turntable rotates at high speed, which easily causes the problem of uneven photoresist coating.

[0006] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0007] A wafer positioning device for a glue coating and developing machine comprises a wafer taking and dispensing table, wherein a wafer gluing mechanism is fixedly connected to the left side of the front side of the wafer taking and dispensing table;

[0008] The wafer picking and dispensing station includes a base, a picking assembly is fixedly connected to the right side of the top of the base, and a dispensing assembly is fixedly connected to the left side of the top of the base;

[0009] The wafer gluing mechanism comprises a rotation control base, and a rotation platform is provided on the top of the rotation control base.

[0010] As a further solution of the present invention: the base includes a bottom upright plate, the top of the bottom upright plate is fixedly connected to a top connecting plate, the front side of the inner wall of the top connecting plate is fixedly connected to a wafer placement tube, the top of the top connecting plate is aligned with the wafer placement tube and is fixedly connected to a wafer picking guide plate, the left and right sides of the rear side of the top of the top connecting plate are fixedly connected to side support upright plates, the right side of the bottom upright plate is fixedly connected to an inverted U-shaped support upright plate, the rear side of the bottom upright plate is fixedly connected to an L-shaped connecting platform, and both sides of the left side of the top of the L-shaped connecting platform are fixedly connected to the glue-dispensing component connecting upright plate.

[0011] As a further solution of the present invention: the picking assembly includes a picking assembly bottom plate, both sides of the bottom of the picking assembly bottom plate are fixedly connected to the top of the two side support vertical plates, the right side of the bottom of the picking assembly bottom plate is fixedly connected to the top of the side support vertical plates, the top of the picking assembly bottom plate is fixedly connected with a top support plate, the left and right sides of the top rear side of the top of the top support plate are fixedly connected with side blocks, the top rear side of the top of the top support plate is fixedly connected with a guide block in the middle of the inner side of the two side blocks, the guide block and the inner side of the right side block are fixedly connected with an electric push rod, the left end of the electric push rod extends to the left side of the guide block and is fixedly connected with a horizontal L-shaped push-pull block, the front side of the horizontal L-shaped push-pull block is fixedly connected with a rack rod, the middle of the top support plate is fixedly connected with a guide cross plate, and the bottom of the rack rod is slidably connected to the top of the guide cross plate.

[0012] As a further solution of the present invention: the top of the top supporting plate is rotatably connected to a columnar rotating rod in the middle of the front side of the guide cross plate, the bottom of the outer wall of the columnar rotating rod is fixedly connected to a gear, the outer wall of the gear is meshed with the front side of the rack rod, the top of the columnar rotating rod is rotatably connected to the top plate, the three sides on the right side of the bottom of the top plate are fixedly connected to the columnar upright rod, the bottom ends of the three columnar upright rods are fixedly connected to the three sides on the right front side of the top of the top supporting plate, the middle of the outer wall of the columnar rotating rod is fixedly connected to the connecting shaft, the outer wall of the connecting shaft is fixedly connected to the connecting arm, the front side of the connecting arm is fixedly connected to the electric push rod connecting block, and the inner wall of the electric push rod connecting block is fixedly connected to the electric push rod connecting block. Rod, the bottom end of the electric push rod is fixedly connected to the vacuum suction cup, and both sides of the outer wall of the vacuum suction cup are fixedly connected to a columnar pressure rod connecting rod, and the bottom of the two columnar pressure rod connecting rods away from the vacuum suction cup are fixedly connected to the columnar pressure rod, and the left and right sides of the outer wall of the vacuum suction cup are fixedly connected to the ventilation pipe, and the bottom of the connecting arm is fixedly connected to the exhaust control block, and the ends of the two ventilation pipes away from the vacuum suction cup are fixedly connected to the left and right sides of the exhaust control block, and the front sides of the left and right sides of the connecting arm are fixedly connected to the top connecting block side rods, and the inner tops of the two top connecting block side rods are fixedly connected to the top connecting block, and the bottom of the top connecting block is fixedly connected to the top of the electric push rod.

[0013] As a further solution of the present invention: the dispensing component includes a dispensing component base plate, both sides of the bottom of the dispensing component base plate are fixedly connected to the top of the two dispensing component connecting vertical plates, the top of the dispensing component base plate is fixedly connected to the dispensing component top support plate, the left side of the top rear side of the dispensing component top support plate is fixedly connected with a limiting block, the middle and right sides of the top rear side of the dispensing component top support plate are fixedly connected with a columnar push-pull cross bar guide block, the inner walls of the two columnar push-pull cross bar guide blocks are slidably connected with a columnar push-pull cross bar, and the right end of the columnar push-pull cross bar is fixedly connected with a horizontal L-shaped push bar. The pull rod, the bottom front side of the horizontal L-shaped push-pull rod is fixedly connected to the top of the horizontal L-shaped push-pull block, the left end of the columnar push-pull cross bar is fixedly connected to the second L-shaped connecting block, the front side of the second L-shaped connecting block is fixedly connected to the second rack rod, the top middle part of the dispensing component top support plate is fixedly connected to the second guide cross plate, the bottom of the second rack rod is slidably connected to the top of the second guide cross plate, the top of the dispensing component top support plate is rotatably connected to the second columnar rotating rod in the middle part of the front side of the second guide cross plate, and the outer wall bottom of the second columnar rotating rod is fixedly connected to the second gear. The outer wall of the second gear is meshed with the front side of the second rack rod, the top of the second cylindrical rotating rod is rotatably connected to the second top plate, the three sides on the right side of the bottom of the second top plate are fixedly connected to the second cylindrical upright rod, the bottom ends of the three second cylindrical upright rods are fixedly connected to the three front sides on the right side of the top of the dispensing part top support plate, the middle part of the outer wall of the second cylindrical rotating rod is fixedly connected to the second connecting shaft, the outer wall of the second connecting shaft is fixedly connected to the second connecting arm, the front side of the second connecting arm is fixedly connected to the dispensing electric push rod connecting block, the inner wall of the dispensing electric push rod connecting block It is fixedly connected to a dispensing electric push rod, the bottom end of the dispensing electric push rod is fixedly connected to a dispensing head, the bottom of the second connecting arm is fixedly connected to a glue storage bin, both sides of the outer wall of the dispensing head are fixedly connected to glue tubes, and the ends of the two glue tubes away from the dispensing head are fixedly connected to the left and right sides of the glue storage bin, the front sides of the left and right sides of the second connecting arm are fixedly connected to the second top connecting block side rods, the inner tops of the two second top connecting block side rods are fixedly connected to the second top connecting block, and the bottom of the second top connecting block is fixedly connected to the top of the dispensing electric push rod.

[0014] As a further solution of the present invention: the right side of the rotation control base is fixedly connected to the left bottom of the bottom vertical plate, and the rear side of the rotation control base is fixedly connected to the front bottom of the L-shaped connecting platform.

[0015] As a further solution of the present invention: the rotating table includes a vertical circular disc, the outer wall of the vertical circular disc is rotatably connected to the inner wall of the rotation control base, both sides of the top of the vertical circular disc are fixedly connected to side support poles, the inner tops of the two side support poles are fixedly connected to a hexagonal connecting disc, the top annular array of the hexagonal connecting disc is fixedly connected to a columnar vertical connecting rod, and the top ends of multiple columnar vertical connecting rods are fixedly connected to a top slide disc.

[0016] As a further solution of the present invention: the outer annular array of the top chute plate is provided with chutes, the top of the top chute plate is provided with through holes on one side of the inner side of multiple chutes, and the top middle of the top chute plate is provided with an exhaust riser through hole.

[0017] As a further solution of the present invention: the top annular array of the hexagonal connecting disk is provided with a hinge groove, the outer annular array of the hexagonal connecting disk is fixedly connected with a hinge block, the inner walls of the multiple hinge grooves opened by the hexagonal connecting disk are rotatably connected with oblique rotating rods, the middle parts of the outer walls of the multiple oblique rotating rods are rotatably connected to the inner walls of the multiple hinge grooves opened by the hexagonal connecting disk, the bottoms of the multiple oblique rotating rods are rotatably connected to the vertical pull rods, the bottoms of the multiple vertical pull rods are rotatably connected to the lifting shafts, the tops of the multiple oblique rotating rods are rotatably connected to the rotating rod arc-shaped rotating vertical rods, and the rear middle parts of the multiple rotating rod arc-shaped rotating vertical rods are rotatably connected to the inner walls of multiple hinge blocks. The top of the plurality of columnar push-pull rods extend to the top of the top slide plate through a plurality of through holes opened in the top slide plate and are fixedly connected to the lower pressure plate, and the top of the lower pressure plate is fixedly connected to the wafer placing plate, and the middle parts of the lower pressure plate and the wafer placing plate are both hollowed out, and the inner wall of the lifting shaft is fixedly connected to a vacuum pump riser, and the bottom of the outer wall of the vacuum pump riser is slidably connected to the inner wall of the vertical circular plate, and the top of the outer wall of the vacuum pump riser is slidably connected to the inner wall of the pump riser through hole opened in the middle of the top slide plate.

[0018] As a further solution of the present invention: multiple columnar push-pull vertical rods extend to the outer wall of one side of the top of the top slide plate and are all covered with a spring, multiple columnar push-pull vertical rods are fixedly connected to the outer wall of one side of the bottom of the top slide plate, multiple outer walls of the hinged blocks are rotatably connected to rotating rods, multiple rotating rods are rotatably connected to inverted L-shaped clamping rods on the side away from the hinged block, the tops of multiple inverted L-shaped clamping rods extend to the top of the top slide plate through multiple slide grooves opened by the top slide plate, and the outer walls of multiple inverted L-shaped clamping rods are slidably connected to the inner walls of multiple slide grooves opened by the top slide plate.

[0019] The beneficial effects of the present invention are:

[0020] The present invention realizes high-precision and high-efficiency positioning and processing of wafers in the gluing and developing machine by providing a wafer picking and dispensing table and a wafer gluing mechanism. Through a series of precise mechanical structures and electrical controls, the present invention ensures the stability and accuracy of the wafers in various processing steps such as picking, placing, and gluing, thereby greatly improving the production efficiency and product quality in the fields of semiconductor manufacturing, microelectronics processing, etc., and providing strong technical support for automated production in related fields. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the main three-dimensional structure of the present invention;

[0022] Figure 2 This is a schematic diagram of the main body three-dimensional separation structure of the present invention;

[0023] Figure 3 This is a schematic diagram of the three-dimensional structure of the wafer taking and dispensing station of the present invention;

[0024] Figure 4 This is a schematic diagram of the three-dimensional separation structure of the wafer taking and dispensing station of the present invention;

[0025] Figure 5 It is a schematic diagram of the three-dimensional structure of the base platform of the present invention;

[0026] Figure 6 This is a schematic diagram of the three-dimensional separation structure of the picking component of the present invention;

[0027] Figure 7 This is a schematic diagram of the three-dimensional separation structure of the dispensing component of the present invention;

[0028] Figure 8 It is a schematic diagram of the three-dimensional structure of the wafer gluing mechanism of the present invention;

[0029] Figure 9 This is a schematic diagram of the three-dimensional separation structure of the wafer glue coating mechanism of the present invention;

[0030] Figure 10 It is a schematic diagram of the three-dimensional structure of the turntable of the present invention.

[0031] In the figure: 1. Wafer pick-up and dispensing station; 11. Base; 111. Bottom vertical plate; 112. Top connecting plate; 113. Inverted U-shaped support vertical plate; 114. Side support vertical plate; 115. Wafer placement tube; 116. Wafer pick-up guide plate; 117. L-shaped connecting platform; 118. Dispensing assembly connecting vertical plate; 12. Pick-up assembly; 121. Pick-up assembly base plate; 122. Top supporting plate; 123. Side block; 124. Guide block; 125. Electric push rod; 126. Horizontal L-shaped push-pull block; 127. Rack rod; 128. Guide horizontal plate; 129. Columnar vertical pole; 1210. Top plate; 1211. Columnar rotating rod; 1212, gear; 1213, connecting shaft; 1214, connecting arm; 1215, top connecting block side rod; 1216, top connecting block; 1217, take the electric push rod connecting block; 1218, take the electric push rod; 1219, vacuum suction cup; 1220, columnar pressure rod connecting rod; 1221, columnar pressure rod; 1222, exhaust control block; 1223, ventilation pipe; 13, dispensing assembly; 131, dispensing component bottom plate; 132, dispensing component top support plate; 133, second guide horizontal plate; 134, columnar push-pull horizontal bar guide block; 135, limit block; 136, columnar push-pull horizontal bar; 137, horizontal L-shaped push-pull Rod; 138, second L-shaped connecting block; 139, second rack rod; 1310, second columnar vertical rod; 1311, second top plate; 1312, second columnar rotating rod; 1313, second gear; 1314, second connecting shaft; 1315, second connecting arm; 1316, second top connecting block side rod; 1317, second top connecting block; 1318, dispensing electric push rod connecting block; 1319, dispensing electric push rod; 1320, dispensing head; 1321, glue storage bin; 1322, glue hose; 2, wafer coating mechanism; 21, rotation control base; 22, rotating table; 221, vertical disk; 222, side branch Support rod; 223, hexagonal connecting plate; 224, columnar vertical connecting rod; 225, hinge groove; 226, hinge block; 227, oblique rotating rod; 228, vertical pull rod; 229, lifting shaft; 2210, arc-shaped rotating rod; 2211, connecting bottom rod; 2212, columnar push-pull rod; 2213, spring; 2214, hinge sleeve; 2215, rotating rod; 2216, inverted L-shaped clamping rod; 2217, vacuum exhaust riser; 2218, top slide plate; 2219, through hole; 2220, exhaust riser through hole; 2221, slide; 2222, lower pressure plate; 2223, wafer placement plate. DETAILED DESCRIPTION

[0032] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0033] like Figure 1-2 As shown, the present invention provides a wafer positioning device for a glue coating and developing machine, comprising a wafer taking and dispensing table 1, to which a wafer glue coating mechanism 2 is fixedly connected on the left side of the front side.

[0034] like Figure 3-7As shown, the wafer picking and dispensing table 1 includes a base 11, a picking component 12 is fixedly connected to the right side of the top of the base 11, and a dispensing component 13 is fixedly connected to the left side of the top of the base 11. The base 11 includes a bottom vertical plate 111, a top connecting plate 112 is fixedly connected to the top of the bottom vertical plate 111, a wafer placement tube 115 is fixedly connected to the front side of the inner wall of the top connecting plate 112, a wafer picking guide plate 116 is fixedly connected to the side of the top connecting plate 112 aligned with the wafer placement tube 115, and the left and right sides of the rear side of the top of the top connecting plate 112 are fixedly connected to side support vertical plates 114, the right side of the bottom vertical plate 111 is fixedly connected to an inverted U-shaped support vertical plate 113, and the rear side of the bottom vertical plate 111 is fixedly connected to an L-shaped connecting platform 117. The L-shaped connecting platform 1 The left and right sides of the top of the top support plate 122 are fixedly connected to the left and right sides of the top rear side of the top support plate 122. The rear side of the top of the top support plate 122 is fixedly connected to the middle of the inner side of the two side blocks 123. The guide block 124 is fixedly connected to the inner side of the guide block 124 and the inner side of the right side block 123 with an electric push rod 125. The left end of the electric push rod 125 extends to the left of the guide block 124. The top of the top supporting plate 122 is rotatably connected to the middle part of the front side of the guide transverse plate 128, and the outer wall bottom of the columnar rotating rod 1211 is fixedly connected to the gear 1212. The outer wall of the gear 1212 is meshed with the front side of the rack rod 127, and the top of the columnar rotating rod 1211 is rotatably connected to the top plate 1210. The three sides on the right side of the bottom of the top plate 1210 are fixedly connected to the columnar vertical rod 129. The bottom ends of the three columnar vertical rods 129 are all fixedly connected to the top right side of the top supporting plate 122. On the three sides of the front side, the middle part of the outer wall of the columnar rotating rod 1211 is fixedly connected with a connecting shaft 1213, the outer wall of the connecting shaft 1213 is fixedly connected with a connecting arm 1214, the front side of the connecting arm 1214 is fixedly connected with a pick-up electric push rod connecting block 1217, the inner wall of the pick-up electric push rod connecting block 1217 is fixedly connected with a pick-up electric push rod 1218, the bottom end of the pick-up electric push rod 1218 is fixedly connected with a vacuum suction cup 1219, both sides of the outer wall of the vacuum suction cup 1219 are fixedly connected with columnar pressure rod connecting rods 1220, the bottom of the two columnar pressure rod connecting rods 1220 away from the vacuum suction cup 1219 are fixedly connected with a columnar pressure rod 1221, and the left and right sides of the outer wall of the vacuum suction cup 1219 are fixedly connected with a ventilation pipe 1223.The bottom of the connecting arm 1214 is fixedly connected to the vacuum control block 1222, and the ends of the two ventilation pipes 1223 away from the vacuum suction cup 1219 are fixedly connected to the left and right sides of the vacuum control block 1222. The front sides of the left and right sides of the connecting arm 1214 are fixedly connected to the top connecting block side rods 1215, and the inner tops of the two top connecting block side rods 1215 are fixedly connected to the top connecting block 1216. The bottom of the top connecting block 1216 is fixedly connected to the top of the electric push rod 1218. The dispensing component 13 includes a dispensing part base plate 131. Both sides of the bottom of the dispensing part base plate 131 are fixedly connected to the tops of the two dispensing component connecting vertical plates 118. The top of the dispensing part base plate 131 is fixedly connected to the dispensing part top support plate 132. The left side of the top rear side of the plate 132 is fixedly connected with a limiting block 135, the middle and right side of the top rear side of the dispensing part top supporting plate 132 are fixedly connected with a columnar push-pull cross bar guide block 134, the inner walls of the two columnar push-pull cross bar guide blocks 134 are slidably connected with a columnar push-pull cross bar 136, the right end of the columnar push-pull cross bar 136 is fixedly connected with a horizontal L-shaped push-pull rod 137, the bottom front side of the horizontal L-shaped push-pull rod 137 is fixedly connected to the top of the horizontal L-shaped push-pull block 126, the left end of the columnar push-pull cross bar 136 is fixedly connected with a second L-shaped connecting block 138, the front side of the second L-shaped connecting block 138 is fixedly connected to a second rack rod 139, the top middle part of the dispensing part top supporting plate 132 is fixedly connected with a second guide cross plate 133, the second rack rod 139 The bottom is slidably connected to the top of the second guide horizontal plate 133, and the top of the dispensing component top supporting plate 132 is rotatably connected to the second cylindrical rotating rod 1312 in the middle of the front side of the second guide horizontal plate 133. The bottom of the outer wall of the second cylindrical rotating rod 1312 is fixedly connected to the second gear 1313. The outer wall of the second gear 1313 is engaged with the front side of the second rack rod 139. The top of the second cylindrical rotating rod 1312 is rotatably connected to the second top plate 1311. The three sides on the right side of the bottom of the second top plate 1311 are all fixedly connected to the second cylindrical upright rod 1310. The bottom ends of the three second cylindrical upright rods 1310 are all fixedly connected to the three front sides on the right side of the top of the dispensing component top supporting plate 132. The middle of the outer wall of the second cylindrical rotating rod 1312 is fixedly connected to the second connecting shaft 131 4. The outer wall of the second connecting shaft 1314 is fixedly connected to the second connecting arm 1315, the front side of the second connecting arm 1315 is fixedly connected to the dispensing electric push rod connecting block 1318, the inner wall of the dispensing electric push rod connecting block 1318 is fixedly connected to the dispensing electric push rod 1319, the bottom end of the dispensing electric push rod 1319 is fixedly connected to the dispensing head 1320, the bottom of the second connecting arm 1315 is fixedly connected to the glue storage bin 1321, both sides of the outer wall of the dispensing head 1320 are fixedly connected to the glue tube 1322, the ends of the two glue tubes 1322 away from the dispensing head 1320 are fixedly connected to the left and right sides of the glue storage bin 1321, the front sides of the left and right sides of the second connecting arm 1315 are fixedly connected to the second top connecting block side rod 1316,The inner top of the two second top connecting block side rods 1316 is fixedly connected to the second top connecting block 1317, and the bottom of the second top connecting block 1317 is fixedly connected to the top of the dispensing electric push rod 1319;

[0035] When the bottom end of the vacuum suction cup 1219 is aligned with the top of the wafer taking guide plate 116 to take the wafer, the bottom end of the dispensing head 1320 is aligned with the middle of the top of the wafer coating mechanism 2. When the wafer needs to be taken, the electric push rod 1218 is started to drive the vacuum suction cup 1219 to move, so that the bottom end of the vacuum suction cup 1219 is closely attached to the outer wall of the wafer on the top of the wafer taking guide plate 116. At this time, the exhaust control block 1222 is started, and the exhaust control block 1222 is started. The air inside the vacuum suction cup 1219 is extracted through the vent pipe 1223, so that a negative pressure is formed inside the vacuum suction cup 1219, thereby picking up the wafer. When the wafer needs to be released, the exhaust control block 1222 is closed, and the outside air enters the inside of the vacuum suction cup 1219 through the vent pipe 1223, so that the internal air pressure of the vacuum suction cup 1219 is the same as the outside air pressure, and the wafer can be released. After the wafer is taken up, the electric push rod 125 is started, and the electric push rod 125 starts to pull The movable horizontal L-shaped push-pull block 126 moves to the right, and then drives the rack rod 127 to move to the right through the horizontal L-shaped push-pull block 126, the meshing gear 1212 rotates and drives the cylindrical rotating rod 1211 to rotate, and the cylindrical rotating rod 1211 rotates and then drives the connecting shaft 1213 and the connecting arm 1214 and the wafer taken by the bottom of the vacuum suction cup 1219 to rotate to the top of the wafer coating mechanism 2. At the same time, when the horizontal L-shaped push-pull block 126 moves to the right, the horizontal L-shaped push-pull rod 137 drives the columnar push-pull crossbar 136 to move to the right. The rightward movement of the columnar push-pull crossbar 136 drives the second rack bar 139 to move to the right. The second rack bar 139 moves to the right, engages the second gear 1313 to rotate, and drives the second columnar rotating rod 1312 to rotate. The rotation of the second columnar rotating rod 1312 drives the second connecting shaft 1314, the second connecting arm 1315, and the dispensing head 1320 to rotate to the left together, without hindering the placement of the wafer by the vacuum suction cup 1219.

[0036] When the wafer needs to be glued, the electric push rod 125 controls the horizontal L-shaped push-pull block 126 to reset, thereby resetting the structure of the connecting arm 1214 and the front side of the second connecting arm 1315 to their original state. At this time, the vacuum suction cup 1219 is aligned with the wafer taking guide plate 116, and the bottom of the glue dispensing head 1320 is aligned with the wafer placed on the top of the wafer coating mechanism 2. After that, the glue dispensing electric push rod 1319 is started, pushing the glue dispensing head 1320 to move toward the wafer for precise glue dispensing operation. The glue in the glue storage bin 1321 is passed through the glue passage. The tube 1322 is transported to the dispensing head 1320, and the dispensing head 1320 evenly applies glue on the surface of the wafer according to the preset dispensing path and amount. After the dispensing is completed, the dispensing electric push rod 1319 is retracted, driving the dispensing head 1320 to reset and prepare for the next dispensing operation. During the whole process, the precise control of the electric push rod 125 and the dispensing electric push rod 1319, as well as the coordinated action of various components, realize the precise picking, rotation and dispensing of the wafer, thereby improving the degree of automation and processing accuracy of the glue coating and developing machine.

[0037] like Figure 8-10As shown, the wafer coating mechanism 2 includes a rotating control base 21, a rotating table 22 is provided on the top of the rotating control base 21, the right side of the rotating control base 21 is fixedly connected to the left bottom of the bottom vertical plate 111, and the rear side of the rotating control base 21 is fixedly connected to the front bottom of the L-shaped connecting platform 117. The rotating table 22 includes a vertical disk 221, the outer wall of the vertical disk 221 is rotatably connected to the inner wall of the rotating control base 21, and both sides of the top of the vertical disk 221 are fixedly connected to side support rods 222, and the inner tops of the two side support rods 222 are fixedly connected to hexagonal connecting disks 223, and the top annular array of the hexagonal connecting disks 223 is fixedly connected to columnar vertical connecting rods 224, and the tops of the multiple columnar vertical connecting rods 224 are fixedly connected to top sliding The trough plate 2218, the outer annular array of the top sliding groove plate 2218 is provided with a sliding groove 2221, the top of the top sliding groove plate 2218 is provided with a through hole 2219 on one side of the inner side of the multiple sliding grooves 2221, and the top middle part of the top sliding groove plate 2218 is provided with an exhaust riser through hole 2220, the top annular array of the hexagonal connecting plate 223 is provided with a hinge groove 225, the outer annular array of the hexagonal connecting plate 223 is fixedly connected with a hinge block 226, the inner walls of the multiple hinge grooves 225 provided on the hexagonal connecting plate 223 are all rotatably connected with an oblique rotating rod 227, the middle parts of the outer walls of the multiple oblique rotating rods 227 are all rotatably connected to the inner walls of the multiple hinge grooves 225 provided on the hexagonal connecting plate 223, and the bottoms of the multiple oblique rotating rods 227 are all rotatably connected to the vertical The pull rod 228, the bottom of the multiple vertical pull rods 228 are rotatably connected to the lifting shaft 229, the tops of the multiple oblique rotating rods 227 are rotatably connected to the rotating rod arc-shaped rotating vertical rod 2210, the rear middle parts of the multiple rotating rod arc-shaped rotating vertical rods 2210 are rotatably connected to the inner walls of the multiple hinge blocks 226, the bottoms of the multiple rotating rod arc-shaped rotating vertical rods 2210 are fixedly connected to the connecting bottom rod 2211, the top outer sides of the multiple connecting bottom rods 2211 are fixedly connected to the columnar push-pull vertical rod 2212, the tops of the multiple columnar push-pull vertical rods 2212 are extended to the top of the top slide plate 2218 through the multiple through holes 2219 opened by the top slide plate 2218 and are fixedly connected to the lower pressure plate 2222, and the top of the lower pressure plate 2222 is fixedly connected to the wafer The placement plate 2223, the lower pressure plate 2222 and the middle part of the wafer placement plate 2223 are all hollow designs. The inner wall of the lifting shaft 229 is fixedly connected to the vacuum pumping riser 2217. The bottom of the outer wall of the vacuum pumping riser 2217 is slidably connected to the inner wall of the vertical circular plate 221. The top of the outer wall of the vacuum pumping riser 2217 is slidably connected to the inner wall of the pumping riser through hole 2220 opened in the middle of the top sliding groove plate 2218. Multiple columnar push-pull rods 2212 extend to the outer wall of one side of the top of the top sliding groove plate 2218, and are all covered with springs 2213. Multiple columnar push-pull rods 2212 are fixedly connected to the outer wall of one side of the bottom of the top sliding groove plate 2218 with hinged sleeves 2214. The outer walls of multiple hinged sleeves 2214 are rotatably connected to rotating rods 2215.The multiple rotating rods 2215 are rotatably connected to the side away from the hinge sleeve 2214 with an inverted L-shaped clamping rod 2216. The tops of the multiple inverted L-shaped clamping rods 2216 extend to the top of the top slide plate 2218 through the multiple slide grooves 2221 defined in the top slide plate 2218. The outer walls of the multiple inverted L-shaped clamping rods 2216 are slidably connected to the inner walls of the multiple slide grooves 2221 defined in the top slide plate 2218.

[0038] When the wafer is placed on the top of the wafer placement plate 2223 and needs to be fixed, the electric push rod 1218 is first used to control the vacuum suction cup 1219 to move downward to place the wafer on the top of the wafer placement plate 2223. At this time, the columnar pressure rods 1221 at the bottom of the columnar pressure rod connecting rod 1220 on both sides of the outer wall of the vacuum suction cup 1219 first contact the top sides of the top slide plate 2218, and the downward movement of the vacuum suction cup 1219 causes the two columnar pressure rods 1221 to press the top slide plate 2218 downward. In the process of pressing the top slide plate 2218 downward, the columnar push-pull vertical rod 2 212 slides downward in the through hole 2219. At this time, the spring 2213 is compressed to generate elastic force. At the same time, the connecting bottom rod 2211 at the bottom end of the columnar push-pull vertical rod 2212 pulls the arc-shaped rotating vertical rod 2210 to rotate with the hinge block 226 as the center of the circle. The rotation of the arc-shaped rotating vertical rod 2210 drives the oblique rotating rod 227 to rotate in the hinge groove 225. The rotation of the oblique rotating rod 227 pushes the vertical pull rod 228 to move. The movement of the vertical pull rod 228 drives the lifting shaft 229 to move up and down. The lifting of the lifting shaft 229 drives the vacuum pumping standpipe 2217 to move on the vertical disc 22 1 and slide in the top slide plate 2218. At this time, the vacuum exhaust riser 2217 moves upward to the inner wall of the wafer placement plate 2223 and fits into the bottom of the middle part of the wafer placed on its top, adsorbing and fixing the wafer on the wafer placement plate 2223. At the same time, the movement of the columnar push-pull vertical rod 2212 drives the hinged sleeve 2214 to move. The movement of the hinged sleeve 2214 pushes the inverted L-shaped clamping rod 2216 to slide in the slide groove 2221 through the rotating rod 2215. The sliding of the inverted L-shaped clamping rod 2216 clamps and fixes the wafer on the wafer placement plate 2223. The adsorption of the gas riser 2217 and the multi-layer fixation of multiple inverted L-shaped clamping rods 2216 ensure the stability and accuracy of the wafer during the processing. After the wafer is firmly fixed, the rotation control base 21 controls the rotation of the rotary table 22 as a whole, so that the wafer is evenly coated with glue during high-speed rotation. During the entire processing process, the wafer positioning device can ensure the accurate position of the wafer, thereby improving processing efficiency and product quality. In addition, the wafer positioning device also has the advantages of simple structure, easy operation, and easy maintenance. It can be widely used in semiconductor manufacturing, microelectronics processing and other fields.

[0039] The working principle of the present invention is as follows: first, the electric push rod 1218 drives the vacuum suction cup 1219 to move, so that the bottom end of the vacuum suction cup 1219 is tightly attached to the outer wall of the wafer on the top of the wafer picking guide plate 116, and then the air extraction control block 1222 is started. The air extraction control block 1222 extracts the air inside the vacuum suction cup 1219 through the vent pipe 1223, so that a negative pressure is formed inside the vacuum suction cup 1219, thereby picking up the wafer. After the wafer is picked up, the electric push rod 125 is started, and the electric push rod 125 starts to pull the horizontal L-shaped push-pull block 126 to move to the right, and then drives the rack rod 127 to move to the right through the horizontal L-shaped push-pull block 126 to engage the gear 1212 to rotate and drive the columnar rotating rod 1211 to rotate. The cylindrical rotating rod 1211 rotates to drive the connecting shaft 1213, the connecting arm 1214 and the wafer picked up by the bottom of the vacuum suction cup 1219 to rotate to the top of the wafer coating mechanism 2. At the same time, when the horizontal L-shaped push-pull block 126 moves to the right, the horizontal L-shaped push-pull rod 137 drives the cylindrical push-pull cross bar 136 to move to the right. The cylindrical push-pull cross bar 136 moves to the right and drives the second rack rod 139 to move to the right. The second rack rod 139 moves to the right to engage the second gear 1313 to rotate and drive the second cylindrical rotating rod 1312 to rotate. The rotation of the second cylindrical rotating rod 1312 drives the second connecting shaft 1314, the second connecting arm 1315 and the dispensing head 1320 to rotate to the left together, and the vacuum suction When the wafer taken by the plate 1219 is aligned with the top of the wafer placement plate 2223, the electric push rod 1218 controls the vacuum suction cup 1219 to move downward, and the exhaust control block 1222 is started. The exhaust control block 1222 extracts the air inside the vacuum suction cup 1219 through the vent pipe 1223, so that a negative pressure is formed inside the vacuum suction cup 1219, thereby taking the wafer. When the wafer needs to be released, the exhaust control block 1222 is closed. At this time, the outside air enters the inside of the vacuum suction cup 1219 through the vent pipe 1223, so that the internal air pressure of the vacuum suction cup 1219 is the same as the outside air pressure, and the wafer can be released to fall on the top of the wafer placement plate 2223, and when the electric push rod 121 is taken, the vacuum suction cup 1219 is lifted. When the vacuum suction cup 1219 is controlled to move downward to place the wafer on the top of the wafer placement plate 2223, the columnar pressure rods 1221 at the bottom ends of the columnar pressure rod connecting rods 1220 on both sides of the outer wall of the vacuum suction cup 1219 first contact the top sides of the top slide plate 2218, and the downward movement of the vacuum suction cup 1219 causes the two columnar pressure rods 1221 to press down the top slide plate 2218. During the downward pressing process of the top slide plate 2218, the columnar push-pull vertical rod 2212 is driven to slide downward in the through hole 2219. At this time, the spring 2213 is compressed to generate elastic force. At the same time, the connecting bottom rod 2211 at the bottom end of the columnar push-pull vertical rod 2212 pulls the rotating rod arc-shaped rotating vertical rod 2210 to rotate with the hinge block 226 as the center of the circle.The rotation of the arc-shaped rotating vertical rod 2210 drives the oblique rotating rod 227 to rotate in the hinge groove 225. The rotation of the oblique rotating rod 227 drives the vertical pull rod 228 to move. The movement of the vertical pull rod 228 drives the lifting shaft 229 to move up and down. The lifting and lowering of the lifting shaft 229 drives the vacuum pumping standpipe 2217 to slide in the vertical circular disk 221 and the top slide plate 2218. At this time, the vacuum pumping standpipe 2217 moves upward to the inner wall of the wafer placement plate 2223 and is connected to it. The bottom of the middle of the wafer placed on the top is fitted to adsorb and fix the wafer on the wafer placement tray 2223. At the same time, the movement of the columnar push-pull vertical rod 2212 drives the hinged sleeve 2214 to move. The movement of the hinged sleeve 2214 pushes the inverted L-shaped clamping rod 2216 to slide in the slide groove 2221 through the rotating rod 2215. The sliding of the inverted L-shaped clamping rod 2216 clamps and fixes the wafer on the wafer placement tray 2223. After that, the electric push rod 125 controls The horizontal L-shaped push-pull block 126 is reset, thereby restoring the structure of the front side of the connecting arm 1214 and the second connecting arm 1315 to its original state. At this time, the vacuum suction cup 1219 is aligned with the wafer picking guide plate 116, and the bottom of the dispensing head 1320 is aligned with the wafer placed on the top of the wafer coating mechanism 2. Then the dispensing electric push rod 1319 is started, pushing the dispensing head 1320 to move toward the wafer for precise dispensing operation. The glue in the glue storage bin 1321 is transported to the dispensing head 1320 through the glue hose 1322. The dispensing head 1320 evenly applies glue on the surface of the wafer according to the preset glue coating path and glue coating amount. After gluing, the rotating control base 21 controls the rotating table 22 to rotate as a whole, so that the wafer is evenly coated with glue during high-speed rotation. In this process, the high-speed rotation of the wafer not only ensures the uniform distribution of glue, but also effectively avoids the accumulation or omission of glue on the wafer surface through the action of centrifugal force, thereby further improving the quality of gluing. ,

[0040] The basic principles, main features, and advantages of the present invention are shown and described above. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A wafer positioning device for a glue coating and developing machine, comprising a wafer taking and dispensing station (1), characterized in that: The left side of the front side of the wafer taking and dispensing station (1) is fixedly connected to a wafer coating mechanism (2); The wafer picking and dispensing table (1) comprises a base (11), a picking component (12) is fixedly connected to the right side of the top of the base (11), and a dispensing component (13) is fixedly connected to the left side of the top of the base (11); The base (11) includes a bottom vertical plate (111), the top of the bottom vertical plate (111) is fixedly connected to a top connecting plate (112), the front side of the inner wall of the top connecting plate (112) is fixedly connected to a wafer placement tube (115), the top of the top connecting plate (112) and the side opposite to the wafer placement tube (115) are fixedly connected to a wafer picking guide plate (116), the left and right sides of the rear side of the top of the top connecting plate (112) are fixedly connected to side support vertical plates (114), the right side of the bottom vertical plate (111) is fixedly connected to an inverted U-shaped support vertical plate (113), the rear side of the bottom vertical plate (111) is fixedly connected to an L-shaped connecting platform (117), and both sides of the left side of the top of the L-shaped connecting platform (117) are fixedly connected to a glue assembly connecting vertical plate (118); The picking component (12) includes a picking component bottom plate (121), both sides of the bottom of the picking component bottom plate (121) are fixedly connected to the tops of the two side support vertical plates (114), the right side of the bottom of the picking component bottom plate (121) is fixedly connected to the top of the side support vertical plates (114), the top of the picking component bottom plate (121) is fixedly connected to a top support plate (122), the left and right sides of the top rear side of the top support plate (122) are fixedly connected to side blocks (123), and the top rear side of the top support plate (122) is inside the two side blocks (123). The middle part of the top support plate (122) is fixedly connected to a guide block (124), the guide block (124) and the inner side of the right side block (123) are fixedly connected to an electric push rod (125), the left end of the electric push rod (125) extends to the left side of the guide block (124) and is fixedly connected to a horizontal L-shaped push-pull block (126), the front side of the horizontal L-shaped push-pull block (126) is fixedly connected to a rack rod (127), the middle part of the top support plate (122) is fixedly connected to a guide horizontal plate (128), and the bottom of the rack rod (127) is slidably connected to the top of the guide horizontal plate (128); The top of the top supporting plate (122) is rotatably connected to a columnar rotating rod (1211) in the middle of the front side of the guide cross plate (128), the bottom of the outer wall of the columnar rotating rod (1211) is fixedly connected to a gear (1212), the outer wall of the gear (1212) is engaged with the front side of the rack rod (127), the top of the columnar rotating rod (1211) is rotatably connected to the top plate (1210), and the three sides on the right side of the bottom of the top plate (1210) are fixedly connected to columnar vertical rods (129), and the three columnar vertical rods (129) are fixedly connected to the top plate (1210). The bottom ends of the rods (129) are all fixedly connected to the three sides of the front right side of the top of the top support plate (122), the middle of the outer wall of the columnar rotating rod (1211) is fixedly connected to the connecting shaft (1213), the outer wall of the connecting shaft (1213) is fixedly connected to the connecting arm (1214), the front side of the connecting arm (1214) is fixedly connected to the electric push rod connection block (1217), the inner wall of the electric push rod connection block (1217) is fixedly connected to the electric push rod (1218), the electric push rod (1219) is fixedly connected to the electric push rod (1220), and the electric push rod (1221) is fixedly connected to the electric push rod (1221). The bottom end of the push rod (1218) is fixedly connected to a vacuum suction cup (1219), and both sides of the outer wall of the vacuum suction cup (1219) are fixedly connected to a columnar pressure rod connecting rod (1220), and the bottom of the two columnar pressure rod connecting rods (1220) away from the vacuum suction cup (1219) are fixedly connected to a columnar pressure rod (1221), and the left and right sides of the outer wall of the vacuum suction cup (1219) are fixedly connected to a ventilation pipe (1223), and the bottom of the connecting arm (1214) is fixedly connected to a vacuum suction cup (1219). An air control block (1222), one end of the two ventilation tubes (1223) away from the vacuum suction cup (1219) is fixedly connected to the left and right sides of the air extraction control block (1222), the front sides of the left and right sides of the connecting arm (1214) are fixedly connected to the top connecting block side rods (1215), the inner tops of the two top connecting block side rods (1215) are fixedly connected to the top connecting block (1216), and the bottom of the top connecting block (1216) is fixedly connected to the top of the electric push rod (1218); The dispensing component (13) includes a dispensing component base plate (131), both sides of the bottom of the dispensing component base plate (131) are fixedly connected to the tops of two dispensing component connecting vertical plates (118), the top of the dispensing component base plate (131) is fixedly connected to a dispensing component top support plate (132), the left side of the top rear side of the dispensing component top support plate (132) is fixedly connected to a limiting block (135), the middle and right sides of the top rear side of the dispensing component top support plate (132) are fixedly connected to a columnar push-pull cross bar guide block (134), the inner walls of the two columnar push-pull cross bar guide blocks (134) are slidably connected to a columnar push-pull cross bar (136), and the right end of the columnar push-pull cross bar (136) is fixedly connected to a horizontal L-shaped push-pull rod (137). The bottom front side of the horizontal L-shaped push-pull rod (137) is fixedly connected to the top of the horizontal L-shaped push-pull block (126); the left end of the columnar push-pull cross bar (136) is fixedly connected to the second L-shaped connecting block (138); the front side of the second L-shaped connecting block (138) is fixedly connected to the second rack rod (139); the top middle part of the dispensing component top support plate (132) is fixedly connected to the second guide cross plate (133); the bottom of the second rack rod (139) is slidably connected to the top of the second guide cross plate (133); the top of the dispensing component top support plate (132) is rotatably connected to the second columnar rotating rod (1312) in the middle of the front side of the second guide cross plate (133); the bottom of the outer wall of the second columnar rotating rod (1312) is fixedly connected to the second guide cross plate (133); A second gear (1313) is connected, the outer wall of the second gear (1313) is meshed with the front side of the second rack rod (139), the top of the second columnar rotating rod (1312) is rotatably connected to the second top plate (1311), the three sides on the right side of the bottom of the second top plate (1311) are fixedly connected to the second columnar upright rod (1310), the bottom ends of the three second columnar upright rods (1310) are fixedly connected to the three front sides on the right side of the top of the dispensing component top support plate (132), the middle part of the outer wall of the second columnar rotating rod (1312) is fixedly connected to the second connecting shaft (1314), the outer wall of the second connecting shaft (1314) is fixedly connected to the second connecting arm (1315), the second connecting arm (1315) is fixedly connected to the The front side is fixedly connected to a dispensing electric push rod connection block (1318), the inner wall of the dispensing electric push rod connection block (1318) is fixedly connected to a dispensing electric push rod (1319), the bottom end of the dispensing electric push rod (1319) is fixedly connected to a dispensing head (1320), the bottom of the second connecting arm (1315) is fixedly connected to a glue storage bin (1321), both sides of the outer wall of the dispensing head (1320) are fixedly connected to a glue tube (1322), one end of the two dispensing tubes (1322) away from the dispensing head (1320) is fixedly connected to the left and right sides of the glue storage bin (1321), the front sides of the left and right sides of the second connecting arm (1315) are fixedly connected to the second top connecting block side rod (1316),The inner tops of the two second top connecting block side rods (1316) are fixedly connected to the second top connecting block (1317), and the bottom of the second top connecting block (1317) is fixedly connected to the top of the dispensing electric push rod (1319); The wafer glue coating mechanism (2) comprises a rotation control base (21), and a rotation platform (22) is provided on the top of the rotation control base (21).

2. The wafer positioning device for a coating and developing machine according to claim 1, characterized in that: The right side of the rotation control base (21) is fixedly connected to the left bottom of the bottom vertical plate (111), and the rear side of the rotation control base (21) is fixedly connected to the front bottom of the L-shaped connecting platform (117).

3. The wafer positioning device for a coating and developing machine according to claim 1, characterized in that: The rotating platform (22) comprises a vertical circular disc (221), the outer wall of the vertical circular disc (221) is rotatably connected to the inner wall of the rotating control base (21), both sides of the top of the vertical circular disc (221) are fixedly connected to side support vertical rods (222), the inner tops of the two side support vertical rods (222) are fixedly connected to a hexagonal connecting disc (223), the top annular array of the hexagonal connecting disc (223) is fixedly connected to a columnar vertical connecting rod (224), and the tops of the plurality of columnar vertical connecting rods (224) are fixedly connected to a top chute disc (2218).

4. The wafer positioning device for a coating and developing machine according to claim 3, characterized in that: The outer annular array of the top chute plate (2218) is provided with chute grooves (2221), the top of the top chute plate (2218) is provided with through holes (2219) on one side inside the multiple chute grooves (2221), and the top middle of the top chute plate (2218) is provided with an exhaust riser through hole (2220).

5. The wafer positioning device for a coating and developing machine according to claim 3, characterized in that: The top annular array of the hexagonal connecting disk (223) is provided with a hinge groove (225), the outer annular array of the hexagonal connecting disk (223) is fixedly connected with a hinge block (226), the inner walls of the multiple hinge grooves (225) provided in the hexagonal connecting disk (223) are all rotatably connected with an oblique rotation rod (227), and the middle parts of the outer walls of the multiple oblique rotation rods (227) are all rotatably connected to the inner walls of the multiple hinge grooves (225) provided in the hexagonal connecting disk (223). The bottoms of the plurality of oblique rotating rods (227) are all rotatably connected to the vertical pull rods (228), the bottoms of the plurality of vertical pull rods (228) are rotatably connected to the lifting shafts (229), the tops of the plurality of oblique rotating rods (227) are all rotatably connected to the rotating rod arc-shaped rotating vertical rods (2210), the rear middle parts of the plurality of rotating rod arc-shaped rotating vertical rods (2210) are all rotatably connected to the inner walls of the plurality of hinge blocks (226), and the plurality of rotating rod arc-shaped rotating vertical rods (2210) are all rotatably connected to the inner walls of the plurality of hinge blocks (226). ) are fixedly connected to the bottom of the connecting bottom rod (2211), the top outer sides of the multiple connecting bottom rods (2211) are fixedly connected to the columnar push-pull vertical rod (2212), the top ends of the multiple columnar push-pull vertical rods (2212) are extended to the top of the top slide plate (2218) through the multiple through holes (2219) opened by the top slide plate (2218) and are fixedly connected to the lower pressure plate (2222), the top of the lower pressure plate (2222) is fixedly connected to the wafer placement plate ( 2223), the middle parts of the lower pressure plate (2222) and the wafer placement plate (2223) are both hollowed out, the inner wall of the lifting shaft (229) is fixedly connected to the vacuum pumping riser (2217), the bottom of the outer wall of the vacuum pumping riser (2217) is slidably connected to the inner wall of the vertical circular plate (221), and the top of the outer wall of the vacuum pumping riser (2217) is slidably connected to the inner wall of the pumping riser through hole (2220) opened in the middle of the top slide plate (2218).

6. The wafer positioning device for a coating and developing machine according to claim 5, characterized in that: The outer wall of one side of the plurality of columnar push-pull vertical rods (2212) extending to the top of the top chute plate (2218) is covered with a spring (2213), the outer wall of one side of the plurality of columnar push-pull vertical rods (2212) at the bottom of the top chute plate (2218) is fixedly connected with a hinged sleeve (2214), the outer wall of the plurality of hinged sleeves (2214) is rotatably connected with a rotating rod (2215), and the plurality of rotating rods (2215) are away from One side of the hinged sleeve (2214) is rotatably connected to an inverted L-shaped clamping rod (2216), and the tops of the multiple inverted L-shaped clamping rods (2216) extend to the top of the top slide plate (2218) through the multiple slide grooves (2221) opened by the top slide plate (2218), and the outer walls of the multiple inverted L-shaped clamping rods (2216) are slidably connected to the inner walls of the multiple slide grooves (2221) opened by the top slide plate (2218).

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