Electrochemical sensor unit, electrochemical sensor unit for odor components, and method for manufacturing electrochemical sensor unit

Abstract

The purpose of the present invention is to provide a technique capable of detecting a plurality of chemical substances in a sample with high accuracy. According to the present technology, there is provided an electrochemical sensor unit including two or more electrochemical sensor parts, each of which is connected to an AC signal generation unit, wherein each of the electrochemical sensor parts includes a sensitive film whose physical characteristics change in response to a chemical substance in a sample, and the sensitive films are separated from each other in plan view via at least one of an insulating film and an electrode. At least a portion of the electrochemical sensor portions may be arranged in an array.

Description

Technical Field

[0001] The present technology relates to an electrochemical sensor cell, an electrochemical sensor cell for odor components, and a method for manufacturing the electrochemical sensor cell. Background Art

[0002] Electrochemical sensors are one of the most commonly used sensors in industry today and are used in a wide range of applications such as gas detection, water quality testing, bioanalysis, and food testing. By using this type of sensor, chemicals can be detected based on electronic parameters generated using an electrochemical reaction resulting from the type or concentration of the chemical.

[0003] For example, Patent Document 1 discloses a technique related to an odor sensor that detects an odor substance as an example of the chemical substance. Citation list Patent Literature

[0004] Patent Document 1: Japanese Patent Application Laid-Open No. 2020-8522 Summary of the Invention Technical Problems to be Solved by the Invention

[0005] However, in order to accurately detect chemical substances in a sample, it is preferable that the sensitive membranes whose physical properties change in response to the chemical substances are separated from each other. This allows the electrochemical sensor unit to include, for example, multiple types of sensitive membranes. Patent Document 1 does not mention a technique for separating sensitive membranes.

[0006] Therefore, a main object of the present technology is to provide an electrochemical sensor cell, an electrochemical sensor cell for odor components, and an electrochemical sensor cell capable of accurately detecting a plurality of chemical substances in a sample by arranging sensitive films separated from each other. Solutions to technical problems

[0007] The present technology provides an electrochemical sensor unit comprising: Two or more electrochemical sensor sections, each of which is connected to an alternating current (AC) signal generating unit, wherein Each of the electrochemical sensor portions includes a sensitive membrane whose physical properties change in response to a chemical substance in a sample, and The sensitive films are separated from each other via at least one of an insulating film and an electrode in a plan view. At least a portion of the electrochemical sensor portions may be arranged in an array. The types of the sensitive films included in two or more of the electrochemical sensor portions may be different from each other. The sensitive film may have a contact surface that contacts the chemical substance, and The contact surfaces included in the two or more electrochemical sensor portions may have different sizes. The size of the contact surface may vary depending on the type of the sensitive membrane. Frequencies input to the AC signal generating units of the two or more electrochemical sensor portions may be different from each other. The frequencies of the AC signal generation unit input to the two or more electrochemical sensor portions may be different depending on at least one of the type and size of the sensitive membrane. The electrochemical sensor unit may further include one or more response signal output circuits that output response signals from the electrochemical sensor portion, wherein At least a portion of the response signal output circuit may include an in-phase / quadrature-phase (IQ) conversion circuit, and At least a portion of the electrodes may include an IQ electrode connected to the IQ conversion circuit and an AC electrode connected to the AC signal generating unit. The sensitive film may have a contact surface that contacts the chemical substance, and The IQ electrode and the AC electrode may be arranged on opposite sides of the contact surface. An area where the IQ electrode and the sensitive film are in contact with each other and an area where the AC electrode and the sensitive film are in contact with each other may be substantially the same. One of the electrochemical sensor portions may be connected to one of the IQ conversion circuits. Two or more of the electrochemical sensor units may be connected to one of the IQ conversion circuits, respectively. The electrochemical sensor unit may further include an identification system unit that identifies the chemical substance based on an output from the response signal output circuit. The sensitive film may comprise an organic polymer. The sensitive film may comprise an inorganic material. The sensitive membrane may contain olfactory cells. The sample may be in any of a gaseous state, a liquid state, a semi-solid state, and a solid state. In addition, the present technology provides an electrochemical sensor unit for odor components, comprising: Two or more electrochemical sensor sections, each of which is connected to one AC signal generating unit, wherein Each of the electrochemical sensor portions includes a sensitive membrane whose physical properties change in response to an odor component in a sample, and The sensitive films are separated from each other via at least one of an insulating film and an electrode in a plan view. In addition, the present technology provides a method for manufacturing an electrochemical sensor unit, the method comprising: forming a sensitive film whose physical properties change in response to chemicals in the sample; and The sensitive films are separated from each other via at least one of an insulating film and an electrode in a plan view.

[0008] According to the present technology, an electrochemical sensor cell, an electrochemical sensor cell for odor components, and an electrochemical sensor cell capable of accurately detecting multiple chemical substances in a sample can be provided. Note that the effects described herein are not necessarily restrictive, and any effect described in the present disclosure can be exhibited. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 is a circuit diagram showing a configuration example of the electrochemical sensor cell 1 according to an embodiment of the present technology. Figure 2 : is a schematic cross-sectional view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 3 : is a schematic plan view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 4 : is a schematic cross-sectional view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 5 : is a schematic plan view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 6 : is a schematic plan view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 7 : is a schematic plan view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 8 : is a schematic cross-sectional view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 9 : is a schematic plan view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 10 : is a schematic plan view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 11 : is a schematic plan view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 12 : is a schematic plan view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 13 : is a schematic cross-sectional view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 14 : is a schematic plan view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 15 : is a schematic plan view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 16 : is a schematic plan view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 17 : is a schematic cross-sectional view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 18 is a block diagram showing a configuration example of a device 10 including an electrochemical sensor portion 12 according to an embodiment of the present technology. Figure 19 : is a schematic cross-sectional view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 20 : is a schematic cross-sectional view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 21 is a circuit diagram showing a configuration example of a circuit including the electrochemical sensor cell 1 according to an embodiment of the present technology. Figure 22 is a block diagram illustrating a configuration example of a device 10 including an electrochemical sensor portion 12 according to an embodiment of the present technology. Figure 23 : is a schematic cross-sectional view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 24 : is a schematic cross-sectional view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 25 : is a schematic plan view showing an example of the shape of the electrode 123 according to an embodiment of the present technology. Figure 26A It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 26B It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 26C It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 26D It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 26E It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 26F It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 26G It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 26H It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 26I It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 26J It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 26K It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 27A It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 27B It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 27C It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 27D It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 27E It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 27F It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 27G It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 27H It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 27IIt is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. Figure 27J It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology. DETAILED DESCRIPTION

[0010] Hereinafter, preferred embodiments of the present technology will be described with reference to the accompanying drawings. Note that the embodiments described below each illustrate an example of a representative embodiment of the present technology, and the scope of the present technology is not limited thereto. In addition, in the present technology, the following embodiments and their modifications can be arbitrarily combined.

[0011] In the description of the following embodiments, terms with the word "approximately" such as "approximately parallel" or "approximately orthogonal" may sometimes be used to describe the configuration. For example, "approximately parallel" not only means completely parallel, but also means almost parallel, that is, a state that deviates from a completely parallel state by about a few percent. The same applies to other terms with the word "approximately". In addition, the drawings are schematic diagrams and are not necessarily strictly illustrated. In order to facilitate understanding of the technical features, the scale of the drawings is exaggerated. Therefore, it should be noted that the scale of the drawings and the scale of the actual device are not necessarily the same.

[0012] Unless otherwise specified, in the drawings, "upper" refers to an upward direction or an upper side in the drawings, "lower" refers to a downward direction or a lower side in the drawings, "left" refers to a leftward direction or a left side in the drawings, and "right" refers to a rightward direction or a right side in the drawings. In addition, in the drawings, the same or equivalent elements or components are denoted by the same reference numerals, and redundant descriptions will be omitted.

[0013] The description will be given in the following order. 1. First Embodiment of the Present Technology (Example 1 of Electrochemical Sensor Cell) (1) Electrochemical sensor circuit (2) AC signal generation unit (3) Electrochemical sensor unit (4) Response signal output circuit (5) Identification system unit (6) Example of electrochemical sensor structure (7) Example of sensitive film structure (8) Example of electrode structure 2. Second Embodiment of the Present Technology (Example 2 of Electrochemical Sensor Cell) 3. Third Embodiment of the Present Technology (Example 3 of Electrochemical Sensor Cell) 4. Fourth Embodiment of the Present Technology (Example 4 of Electrochemical Sensor Cell) 5. Fifth Embodiment of the Present Technology (Example 5 of Electrochemical Sensor Cell) 6. Sixth Embodiment of the Present Technology (Example 6 of Electrochemical Sensor Cell) 7. Seventh Embodiment of the Present Technology (Example of an Electrochemical Sensor Cell for Odor Components) 8. Eighth Embodiment of the Present Technology (Example 1 of Method of Manufacturing Electrochemical Sensor Cell) 9. Ninth Embodiment of the Present Technology (Example 2 of the Method for Manufacturing an Electrochemical Sensor Cell)

[0014] [1. First Embodiment of the Present Technology (Example 1 of Electrochemical Sensor Cell)] [(1) Electrochemical sensor circuit] The present technology provides an electrochemical sensor unit including two or more electrochemical sensor sections, each of which is connected to an AC signal generating unit, wherein each electrochemical sensor section includes a sensitive membrane whose physical properties change in response to a chemical substance in a sample, and the sensitive membranes are separated from each other by at least one of an insulating film and an electrode in a plan view.

[0015] The electrochemical sensor unit according to the embodiment of the present technology constitutes an electrochemical sensor circuit that identifies chemical substances in a sample. Figure 1 The electrochemical sensor cell is described. Figure 1 is a circuit diagram showing a configuration example of the electrochemical sensor cell 1 according to an embodiment of the present technology.

[0016] like Figure 1 As shown, the electrochemical sensor unit 1 includes two or more electrochemical sensor sections 12A to 12I, each of which is connected to one AC signal generating unit 11. The electrochemical sensor unit 1 may further include: one or more response signal output circuits 13 that output response signals from the electrochemical sensor sections 12A to 12I; and an identification system unit 14 that identifies chemical substances in a sample based on the outputs from the response signal output circuits 13.

[0017] At least a portion of the response signal output circuit 13 includes an IQ conversion circuit 131 and an analog-to-digital (AD) conversion circuit 132. This can improve recognition accuracy. The IQ conversion circuit 131 and the AD conversion circuit 132 will be described later.

[0018] Note that in this specification, a "chemical substance" is an object to be identified contained in a sample and refers to any chemical substance, such as a simple substance, a pure substance composed of compounds, or a mixture. Furthermore, the source of the chemical substance is not particularly limited and is not limited to natural sources, and the chemical substance may be artificially synthesized.

[0019] Note that in this specification, "sample" refers to any sample including biological samples. In addition, in the present technology, the form of the sample is not particularly limited, but is preferably any one of gaseous, liquid, semi-solid and solid, and is particularly preferably gaseous. Note that gas refers to a gas that is completely vaporized at room temperature (25°C). In addition, liquid refers to a liquid that is completely liquefied at room temperature. In addition, solid refers to a solid that is completely solidified at room temperature. In addition, semi-solid refers to a semi-solid that has a melting point of 25°C or above but is not completely solidified at room temperature. The chemical substances in the sample may be fixed on the sample by adhesion, adsorption, burial, etc., or may float in the sample without being fixed.

[0020] [(2) AC signal generation unit] The AC signal generating unit 11 generates an AC signal. In this embodiment, the frequency of the AC signal generating unit 11 can fluctuate within an arbitrary range and can be used variably. As a result, for example, an AC signal can be applied to each of the electrochemical sensor units 12A to 12I described later at a different frequency. The frequency of the AC signal generating unit 11 is not particularly limited, and any frequency (e.g., a range of 1 kHz to 10 MHz, etc.) can be used.

[0021] Note that, in the present embodiment, the frequency of the AC signal generating unit 11 may be controlled based on the recognition result of the recognition system unit 14 described later.

[0022] In addition, in this embodiment, the number of AC signal generating units 11 is not particularly limited, as long as there is one or more AC signal generating units 11. When there are two or more AC signal generating units 11, the frequencies output from the respective AC signal generating units 11 may be the same, but some or all of them may be different.

[0023] In the case where there are two or more AC signal generating units 11 , each AC signal generating unit 11 may have a different frequency for each row or column of the electrochemical sensor portions 12A to 12I arranged in an array or a portion of the response signal output circuit 13 .

[0024] [(3) Electrochemical sensor unit] The electrochemical sensor sections 12 to 12I generate electronic parameters (e.g., such as current, voltage, capacity, impedance, etc., preferably impedance) as response signals using electrochemical reactions generated from the type and concentration of the chemical substances. In this embodiment, it is sufficient to provide two or more electrochemical sensor sections 12 to 12I for one AC signal generating unit 11, and the number of electrochemical sensor sections 12 to 12I is not particularly limited.

[0025] The electrochemical sensor sections 12 to 12I are not particularly limited, and conventionally known electrochemical sensors can be used. Among conventionally known electrochemical sensors, electrochemical sensors based on amperometry (ie, current measurement sensors) are common.

[0026] In the present embodiment, by providing at least two or more electrochemical sensor portions 12A to 12I each connected to one AC signal generating unit 11 , a plurality of chemical substances in a sample can be accurately identified.

[0027] At this time, at least a portion of the electrochemical sensor units 12A to 12I are preferably arranged in an array form. As a result, various types and sizes of membranes constituting the electrochemical sensor units 12A to 12I can be measured at an optimal frequency, and gases mixed with multiple components (such as gases containing odor components, etc.) can be identified based on the difference in response signals caused by the type or size of the membrane. In addition, the area efficiency of the peripheral circuits of the electrochemical sensor units 12 to 12I is improved. In addition, by controlling the drive of the AC signal generating unit 11, etc. according to the recognition state, etc., further improvement of the recognition accuracy can be expected. Note that the configuration of the electrochemical sensor unit 12 will be described later.

[0028] Note that in this circuit configuration example, the electrochemical sensor portions 12 are arranged two-dimensionally with M rows and N columns (M and N are integers equal to or greater than 2), but the circuit configuration is not limited to this configuration. For example, the electrochemical sensor portions 12 may be arranged one-dimensionally with 1 row and N columns.

[0029] [(4) Response signal output circuit] The response signal output circuit 13 outputs the response signal from the electrochemical sensor portions 12A to 121. In the present embodiment, the number of the response signal output circuits 13 is not particularly limited as long as there is one or more response signal output circuits 13.

[0030] At least a part of the response signal output circuit 13 includes an IQ conversion circuit 131 and an AD conversion circuit 132. This can improve the recognition accuracy.

[0031] The IQ conversion circuit 131 expands (converts) the signal to be processed into a complex signal. Specifically, it generates an I signal having the same phase (in-phase) as the reference signal and a Q signal having a quadrature phase offset by 90° from the phase of the reference signal. The IQ conversion circuit 131 supplies these I and Q signals to the AD conversion circuit 132.

[0032] The AD conversion circuit 132 converts the analog I and Q signals into digital signals and supplies the converted signals to the identification system unit 14. For example, as the AD conversion circuit 132, a conventionally known single-slope AD converter or the like can be used. In a single-slope AD converter, the analog signal to be processed is converted into a digital signal based on the period from the start of conversion to the time when the reference voltage matches the voltage of the signal to be processed. As a mechanism for this, for example, a comparator (voltage comparator) that compares the single-slope waveform with the direct current (DC) level of the output signal of the IQ conversion circuit and a counter that quantizes the comparison period can be used. Then, a reference voltage is supplied, and counting is started using a clock signal at the same time, and AD conversion is performed by comparing the DC level of the signal output from the IQ conversion circuit with the reference voltage and counting until a pulse signal is obtained.

[0033] The AD conversion circuits 132 are arranged and laid out in the column direction relative to the IQ conversion circuits 131 arranged in an array. This circuit configuration improves layout efficiency and reduces the overall area of the electrochemical sensor circuit. Note that, although not shown, in this embodiment, the AD conversion circuits 132 may be arranged and laid out in the row direction relative to the IQ conversion circuits 131 arranged in an array.

[0034] In this embodiment, the AD conversion circuit 132 can reduce noise by performing multi-sampling (multiple operations), which can improve recognition accuracy.

[0035] Furthermore, in this embodiment, the circuit constants of the response signal output circuit 13 can be freely changed by, for example, changing the frequency band cut off by the low-pass filter (LPF) according to the type and size of the sensitive membrane constituting the electrochemical sensor section 12. This allows the circuit constants to be optimized according to the type and size of the sensitive membrane, thereby improving recognition accuracy.

[0036] In addition, in this embodiment, at least a portion of the response signal output circuits 13 may not be arranged in an array form. Alternatively, at least two or more electrochemical sensor portions 12A to 12I may each be connected to one response signal output circuit 13 .

[0037] In addition, in this embodiment, when the frequency of the AC signal generating unit 11 is used variably as described above, the response signal output circuit 13 may include two or more switches, and the frequency of each switch and the AC signal generating unit 11 may be controlled according to the electrochemical sensor parts 12A to 12I.

[0038] [(5) Identification system unit] The identification system unit 14 identifies the chemical substance in the sample based on the output from the response signal output circuit 13. In the present embodiment, the number of identification system units 14 is not particularly limited as long as there is one or more identification system units 14.

[0039] In this embodiment, the identification system unit 14 can identify the chemical substance in the sample by checking the response signal of each electrochemical sensor portion 12 against a database.

[0040] The recognition result of the recognition system unit 14 can be fed back to control the frequency of the AC signal generation unit 11. This can promote an improvement in recognition accuracy and an improvement in recognition speed.

[0041] [(6) Example of the structure of the electrochemical sensor section] Will refer to Figure 2 and Figure 3 An example of the structure of the electrochemical sensor section 12 will be described. Figure 2 : is a schematic cross-sectional view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 3 1 is a schematic plan view showing a configuration example of the electrochemical sensor portion 12 according to an embodiment of the present technology. In more detail, Figure 2 It is along Figure 1 The cross-sectional view shown is taken along a first cutting line (a cutting line passing through the electrochemical sensor portions 12A, 12D, and 12G). Figure 2 is a plan view along the first cutting line.

[0042] like Figure 2 and Figure 3 As shown, the electrochemical sensor portions 12A, 12D, and 12G include sensitive films 121A, 121D, and 121G, respectively, whose physical properties change in response to chemical substances in a sample.

[0043] Note that in this specification, "film" includes films having any hardness, and both very rigid films and very soft films are included in "film". Examples of films include metal films of platinum, gold, etc.; films of graphite carbon, boron-doped diamond, etc.; polymer films formed of conductive polymers such as polyaniline or polythiophene. In this embodiment, the size of the film (for example, several μm) 2 To a few mm 2etc.), area, thickness, etc. are not particularly limited.

[0044] The AC signal from the AC signal generating unit 11 is input to each of the sensitive films 121A, 121D, and 121G. Each of the sensitive films 121A, 121D, and 121G adsorbs chemicals in the sample to react with the chemicals, thereby changing physical properties and generating electronic parameters as response signals.

[0045] The sensitive film 121 including the sensitive films 121A, 121D, and 121G only needs to be able to generate an electronic parameter as a response signal, and the type of the sensitive film 121 is not particularly limited. The sensitive film may include, for example, an organic polymer. An example of the organic polymer may include polyaniline.

[0046] Alternatively, the sensitive film may include, for example, an inorganic material. Examples of inorganic materials may include metal oxides. Examples of metals may include molybdenum and aluminum.

[0047] Alternatively, the sensitive membrane may include, for example, olfactory cells. Olfactory cells are cells that receive odor components as examples of chemical substances. The following non-patent document discloses a technology related to olfactory cells.

[0048] <Non-patent literature> An ultrasensitive electrochemical impedance-based biosensor using insect odorant receptors to detect odorants, Biosensors and Bioelectronics, 2019, Vol.126, pp.207-213

[0049] In forming the sensitive film 121, the technology disclosed in the non-patent document can be used. Figure 4 An example of this formation will be described. Figure 4 : is a schematic cross-sectional view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology.

[0050] like Figure 4 As shown, the sensitive film 121 may be formed by arranging olfactory cells 1212 in a solvent 1211. Examples of the solvent 1211 include water, physiological saline, and solid electrolytes.

[0051] Note that in this specification, "odor component" can include any component of the above-mentioned chemical substances that stimulates some or all of the receptors present in the nasal cavity, such as odor molecules. For example, in the nasal cavity, in addition to olfactory receptors, there are also receptors of the trigeminal nerve that control stimuli such as cold, heat, and pain, and the odor component in this technology is a broad concept that includes all components that stimulate some or all of these receptors. Specifically, for example, in the case of using menthol as an odor component, menthol can be used as a stimulant via olfactory receptors and a cold stimulant via trigeminal nerve receptors (transient receptor potential ankyrin 1 (TRPA1) channel).

[0052] [(7) Example of sensitive film structure] Depending on the type of film, for example, sensitivity, required size of the contact surface with chemicals, required frequency of AC signals, etc. are different. Therefore, it is preferable to have a configuration that can change the size of the contact surface or the film thickness for each sensitive film 121.

[0053] To achieve this, Figure 2 and Figure 3 As shown, the sensitive films 121 are separated from each other in a plan view via an insulating film 122. As a result, the film type and the like can be changed for each sensitive film 121. Furthermore, since the distance between the sensitive films 121 can be shortened, the electrochemical sensor portion 12 can be further miniaturized. Furthermore, for example, the size of the contact surface, the film thickness, the frequency of the AC signal, and the like can be changed depending on the type of sensitive film 121.

[0054] The insulating film 122 only needs to have insulating properties, and there is no particular limitation on the type of the insulating film 122. For example, the insulating film 122 can be formed of SiO2 or the like.

[0055] In addition, the types of the sensitive films 121 included in two or more electrochemical sensor portions 12 may be different from each other. Figure 2 For example, the types of sensitive films 121A and 121D can be different from each other, and the types of sensitive films 121D and 121G can be the same. Alternatively, the types of sensitive films 121A, 121D, and 121G can all be different from each other. Since the types of sensitive films 121 are different from each other, the circuit including the electrochemical sensor unit 1 can accurately identify multiple chemical substances in a sample.

[0056] Each sensitive film 121 has a contact surface that contacts the chemical substance. In this case, the sizes of the contact surfaces included in the two or more electrochemical sensor parts 12 may be different from each other. Figure 2For example, the sizes of the contact surfaces of sensitive film 121A and 121D can be different, while the sizes of the contact surfaces of sensitive film 121D and 121G can be the same. Alternatively, the sizes of the contact surfaces of sensitive film 121A, 121D, and 121G can all be different. Because the sizes of the contact surfaces are different, the circuit including the electrochemical sensor unit 1 can accurately identify multiple chemical substances in a sample.

[0057] As described above, for example, depending on the type of the sensitive film, the sensitivity, the required size of the contact surface, etc. are different. Therefore, the size of the contact surface may be different depending on the type of the sensitive film 121.

[0058] The frequencies of the AC signals input to the two or more electrochemical sensor portions 12 may be different from each other. Figure 2 For example, the frequencies of the AC signals input to electrochemical sensor sections 12A and 12D can be different from each other, while the frequencies of the AC signals input to electrochemical sensor sections 12D and 12G can be substantially the same. Alternatively, the frequencies of the AC signals input to electrochemical sensor sections 12A, 12D, and 12G can all be different from each other. Because the frequencies of the AC signals are different, the circuit including the electrochemical sensor unit 1 can accurately identify multiple chemical substances in a sample.

[0059] As described above, for example, the frequency of the AC signal varies depending on the type of the sensitive film, the size of the contact surface, or both. Therefore, the frequency of the AC signal input to the two or more electrochemical sensor portions 12 may vary depending on at least one of the type and size of the sensitive film.

[0060] Although not shown, a support member supporting the sensitive film 121 may be formed on one surface (particularly, a surface opposite to the contact surface) of each sensitive film 121. In other words, the sensitive film 121 and the support member may be stacked.

[0061] The support member is preferably formed of a conductive material, and examples thereof include a silicon substrate and a metal substrate. Examples of the metal substrate include platinum (Pt), gold (Au), copper (Cu), palladium (Pd), nickel (Ni), and silver (Ag).

[0062] To form the support member on one surface of the sensitive film 121, a metal film may be formed by a conventionally known method such as sputtering or vapor phase synthesis, or a polymer film may be formed by a conventionally known method such as chemical modification.

[0063] [(8) Example of electrode structure] At least a portion of the IQ electrode 123A and at least a portion of the AC electrode 123B are arranged in contact with the sensitive film 121. The IQ electrode 123A is connected to the IQ conversion circuit 131 included in the response signal output circuit 13 via the through hole 124 and the wiring 125A. The AC electrode 123B is connected to the AC signal generation unit 11 via the through hole 124 and the wiring 125B. As a result, the AC signal from the AC signal generation unit 11 is input to the sensitive film 121 via the AC electrode 123B. Then, the response signal generated by the sensitive film 121 is input to the IQ conversion circuit 131 via the IQ electrode 123A.

[0064] The IQ electrode 123A and the AC electrode 123B are preferably arranged on opposite sides of the contact surface. As a result, it is possible to prevent the IQ electrode 123A and the AC electrode 123B from becoming obstacles that make it difficult for chemicals to come into contact with the sensitive film 121.

[0065] As the electrode, for example, an electrode formed of a metal such as Pt, Au, Cu, Pd, Ni or Ag, a diamond electrode, a boron-doped diamond (BDD) electrode, a carbon electrode, etc. can be used. The electrode can be formed using a conventionally known method such as a semi-additive method or a subtractive method.

[0066] Will refer to Figures 5 to 7 A configuration example of the electrode 123 , the through hole 124 , and the wiring 125 will be described. Figures 5 to 7 1 is a schematic plan view showing a configuration example of the electrochemical sensor portion 12 according to an embodiment of the present technology. Figure 5 yes Figure 2 A plan view of a layer in which an electrode 123 is formed. Figure 6 yes Figure 2 A plan view of a layer in which a through hole 124 is formed. Figure 7 yes Figure 2 A plan view of a layer in which wiring 125 is formed.

[0067] exist Figure 5 , an IQ electrode 123A and an AC electrode 123B are shown. In addition, a region 126 corresponding to the periphery of the contact surface of the sensitive film 121 is shown.

[0068] exist Figure 6 , a through hole 124 is shown. The through hole 124 electrically connects the electrode 123 and the wiring 125 to each other. Note that, to help understanding, the through hole 124 is shown. Figure 5 The region 123C corresponds to the region where the electrode 123 is formed. In practice, the electrode 123 may not be formed in the layer where the through hole 124 is formed.

[0069] exist Figure 7, a wiring 125 is shown. The wiring 125A is connected to the IQ conversion circuit 131 included in the response signal output circuit 13. The wiring 125B is connected to the AC signal generating unit 11. Note that, to help understanding, the wiring 125 is shown. Figure 6 The region 125c corresponds to the region where the through hole 124 is formed.

[0070] Will refer to Figure 8 and Figure 9 An example of the structure of the electrochemical sensor portion 12 will be further described. Figure 8 : is a schematic cross-sectional view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 9 1 is a schematic plan view showing a configuration example of the electrochemical sensor portion 12 according to an embodiment of the present technology. In more detail, Figure 8 It is along Figure 1 The cross-sectional view is taken along the second cutting line (a cutting line passing through the electrochemical sensor portions 12A, 12B, and 12C). Figure 9 is a plan view along the second cutting line.

[0071] Figure 8 and Figure 9 The sensitive films 121A, 121B, and 121C, the electrode 123B, the through hole 124, and the wiring 125B are shown. The wiring 125B is connected to the AC signal generating unit 11.

[0072] Will refer to Figures 10 to 12 An example of the structure of electrodes, through holes, and wiring is described. Figures 10 to 12 1 is a schematic plan view showing a configuration example of the electrochemical sensor portion 12 according to an embodiment of the present technology. Figure 10 yes Figure 8 A plan view of a layer in which electrode 123B is formed. Figure 11 yes Figure 8 A plan view of a layer in which a through hole 124 is formed. Figure 12 yes Figure 8 A plan view of a layer in which wiring 125B is formed.

[0073] exist Figure 10 , IQ electrodes 123A and AC electrodes 123B are shown. In addition, a region 126 corresponding to the periphery of the contact surface is shown.

[0074] exist Figure 11 , a through hole 124 is shown. The through hole 124 electrically connects the electrode 123 and the wiring 125 to each other. Note that, to help understanding, the through hole 124 is shown. Figure 10 The region 123C corresponds to the region where the electrode 123 is formed. In practice, the electrode 123 may not be formed in the layer where the through hole 124 is formed.

[0075] exist Figure 12 , a wiring 125 is shown. The wiring 125A is connected to the IQ conversion circuit 131 included in the response signal output circuit 13. The wiring 125B is connected to the AC signal generating unit 11. Note that, to help understanding, the wiring 125 is shown. Figure 11 The region 125C corresponds to the region where the through hole 124 is formed.

[0076] The above contents described with respect to the electrochemical sensor cell according to the first embodiment of the present technology can be applied to other embodiments of the present technology unless technically contradicted otherwise.

[0077] [2. Second embodiment of the present technology (Example 2 of electrochemical sensor unit)] Will refer to Figure 13 and Figure 14 Another configuration example of the electrochemical sensor portion 12 will be further described. Figure 13 : is a schematic cross-sectional view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 14 1 is a schematic plan view showing a configuration example of the electrochemical sensor portion 12 according to an embodiment of the present technology. In more detail, Figure 13 It is along Figure 1 The cross-sectional view shown is taken along a first cutting line (a cutting line passing through the electrochemical sensor portions 12A, 12D, and 12G). Figure 14 is a plan view along the first cutting line.

[0078] like Figure 13 and Figure 14 As shown, the electrochemical sensor portions 12A, 12D, and 12G respectively have sensitive films 121A, 121D, and 121G whose physical properties change in response to chemical substances in a sample.

[0079] Then, the sensitive films 121A, 121D, and 121G are separated from each other via the electrode 123 in a plan view. In other words, Figure 2 and Figure 3 In the illustrated configuration example, the sensitive films 121A, 121D, and 121G are separated from each other via the insulating film 122. Figure 13 and Figure 14 In the illustrated configuration example, the sensitive films 121A, 121D, and 121G are separated from each other via the electrode 123 .

[0080] As a result, the film type and the like can be changed for each sensitive film 121. Furthermore, since the distance between the sensitive films 121 can be shortened, the electrochemical sensor section 12 can be further miniaturized. Furthermore, for example, the size of the contact surface, the film thickness, the frequency of the AC signal, and the like can be changed depending on the type of sensitive film 121.

[0081] Will refer to Figure 15 An example of the configuration of the sensitive film 121 and the electrode 123 will be described. Figure 15 1 is a schematic plan view showing a configuration example of the electrochemical sensor portion 12 according to an embodiment of the present technology. Figure 15 yes Figure 13 FIG. 1 is a plan view of a layer in which an electrode 123 and a sensitive film 121 are formed.

[0082] exist Figure 15 , an IQ electrode 123A and an AC electrode 123B are shown. A sensitive film 121 is formed in each gap between the IQ electrode 123A and the AC electrode 123B.

[0083] Note that the configuration examples of the through hole 124 and the wiring 125 are similar to those of Figure 6 and Figure 7 , and therefore, its description will be omitted.

[0084] The arrangement of the sensitive film 121 and the electrode 123 is not limited thereto. Figure 16 A sensitive membrane 121 and an electrode 123 are arranged as shown. Figure 16 1 is a schematic plan view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology. Figure 16 As shown, a portion of an end portion of each of the sensitive films 121A, 121D, and 121G may be arranged to be surrounded by a portion of the electrode 123 .

[0085] The above contents described with respect to the electrochemical sensor cell according to the second embodiment of the present technology can be applied to other embodiments of the present technology unless otherwise technically contradictory.

[0086] [3. Third embodiment of the present technology (Example 3 of electrochemical sensor unit)] Will refer to Figure 17 Another configuration example of the electrochemical sensor portion 12 will be further described. Figure 17 1 is a schematic cross-sectional view showing an example of the configuration of the electrochemical sensor portion 12 according to an embodiment of the present technology. In more detail, Figure 17 It is along Figure 1 The cross-sectional view shown is taken along a first cutting line (a cutting line passing through the electrochemical sensor portions 12A, 12D, and 12G).

[0087] like Figure 17 As shown, the electrochemical sensor portions 12A, 12D, and 12G respectively have sensitive films 121A, 121D, and 121G whose physical properties change in response to chemical substances in a sample.

[0088] Then, the sensitive films 121A, 121D, and 121G are separated from each other in a plan view via the insulating film 122 and the electrode 123. In other words, Figure 2 In the illustrated configuration example, the sensitive films 121A, 121D, and 121G are separated from each other via the insulating film 122. Figure 13 In the illustrated configuration example, the sensitive films 121A, 121D, and 121G are separated from each other via the electrode 123. Figure 17 In the illustrated configuration example, the sensitive films 121A, 121D, and 121G are separated from one another via the insulating film 122 and the electrode 123 .

[0089] As a result, the film type and the like can be changed for each sensitive film 121. Furthermore, since the distance between the sensitive films 121 can be shortened, the electrochemical sensor section 12 can be further miniaturized. Furthermore, for example, the size of the contact surface, the film thickness, the frequency of the AC signal, and the like can be changed depending on the type of sensitive film 121.

[0090] The above contents described with respect to the electrochemical sensor cell according to the third embodiment of the present technology can be applied to other embodiments of the present technology unless otherwise technically contradicted.

[0091] [4. Fourth embodiment of the present technology (Example 4 of the electrochemical sensor unit)] Figure 18 1 is a block diagram showing a configuration example of a device 10 including an electrochemical sensor section 12 according to an embodiment of the present technology. Figure 18 As shown, the apparatus 10 includes a vertical driving unit 161, a system control unit 162, a pixel array unit 166, a response signal output circuit including an IQ conversion circuit 131 and an AD conversion circuit 132, a data storage unit 163, a horizontal driving unit 164, and a signal processing unit 165. Conventionally known techniques can be used for each component.

[0092] At least a portion of the electrochemical sensor portions 12 are arranged in an array in the pixel array unit 166. That is, in the pixel array unit 166, the electrochemical sensor portions 12 as pixels are arranged in a matrix (two-dimensional) along the row and column directions.

[0093] Here, the row direction is the X-axis direction and represents the arrangement direction of each pixel 12 in a pixel row (so-called horizontal direction). The column direction is the Y-axis direction and represents the arrangement direction of each pixel 12 in a pixel column (so-called vertical direction). Hereinafter, the row direction is sometimes described as the horizontal direction, and the column direction is sometimes described as the vertical direction.

[0094] In pixel array unit 166, pixel drive lines are wired for each pixel row along the row direction of the matrix pixel array. Furthermore, vertical signal lines are wired for each pixel column along the column direction. The pixel drive lines transmit drive signals for driving pixels 12 so that signals can be read from pixels 12. The number of pixel drive lines is not limited to one.

[0095] Each of the two or more electrochemical sensor portions 12 is connected to one IQ conversion circuit 131. With such a configuration, layout efficiency can be improved, and the overall area of the device 10 can be reduced.

[0096] Hereinafter, each circuit unit of the peripheral circuit unit of the pixel array unit 166 , ie, the vertical driving unit 161 , the AD conversion circuit 132 , the data storage unit 163 , the horizontal driving unit 164 , and the signal processing unit 165 will be described.

[0097] The vertical drive unit 161 is composed of a shift register, an address decoder, etc., and drives each pixel 12 of the pixel array unit 166 in units of rows, etc. The vertical drive unit 161 selects each pixel 12 of the pixel array unit 166 in units of pixel rows, thereby reading a response signal from each pixel 12 of the selected pixel row.

[0098] Bias current is supplied through each vertical signal line from a current source (not shown) including a metal oxide semiconductor (MOS) field effect transistor connected to each vertical signal line for each pixel column to each pixel 12 of the pixel row selectively scanned by the vertical drive unit 161. Pixel signals read from each pixel 12 of the pixel array unit 166 in units of pixel rows are supplied to the AD conversion circuit 132 through each vertical signal line.

[0099] The AD conversion circuit 132 includes a set of multiple analog-to-digital converters (ADCs) arranged corresponding to each vertical signal line, and converts analog pixel signals output in units of pixel rows into digital signals for each pixel column. In other words, the AD conversion circuit 132 is a column-parallel analog-to-digital conversion unit formed by arranging multiple analog-to-digital converters in parallel corresponding to the pixel columns.

[0100] As the analog-to-digital converter, a well-known analog-to-digital converter can be used. Specifically, as the analog-to-digital converter, a single-slope analog-to-digital converter, a successive approximation analog-to-digital converter, or a delta-sigma modulation type (Δ∑ modulation type) analog-to-digital converter, which is a reference signal comparison type analog-to-digital converter, can be exemplified. However, the analog-to-digital converter is not limited to these.

[0101] In the AD conversion circuit 132 , analog-to-digital converters may be arranged in a one-to-one relationship with respect to pixel columns (that is, for each pixel column) in one configuration, or one analog-to-digital converter may be arranged for a plurality of pixel columns in another configuration.

[0102] The data storage unit 163 is arranged at the next stage of the AD conversion circuit 132. The data storage unit 163 includes a set of a plurality of latch circuits provided corresponding to the respective vertical signal lines, and latches the response signal after analog-to-digital conversion during a period of reading the response signal of each pixel 12 from the pixel array unit 166.

[0103] The response signals of one row latched in the respective latch circuits of the data storage unit 163 are supplied to the signal processing unit 165 , and predetermined processing is performed in the signal processing unit 165 .

[0104] The device 10 having the above-described configuration example may have a flat structure or a stacked structure as a chip structure including a single chip.

[0105] The flat structure is a chip structure in which the peripheral circuit units of the pixel array unit 166 are formed on the same semiconductor substrate (semiconductor chip) as the pixel array unit 166. That is, in the flat structure, the vertical drive unit 161, the AD conversion circuit 132, the data storage unit 163, the horizontal drive unit 164, the signal processing unit 165, and the like are formed on the same semiconductor substrate as the pixel array unit 166.

[0106] The stacked structure is a chip structure in which the peripheral circuit unit of the pixel array unit 166 is formed on at least one semiconductor substrate different from the semiconductor substrate on which the pixel array unit 166 is formed. In the device 10 having this stacked structure, the size (area) of the first semiconductor substrate only needs to be sufficient to form the pixel array unit 166, so the size (area) of the first semiconductor substrate can be reduced and ultimately the size of the entire chip can be reduced. In addition, the process suitable for producing pixels 12 can be applied to the first semiconductor substrate, and the process suitable for producing the circuit portion can be applied to other semiconductor substrates. Therefore, it is possible to optimize the process when manufacturing the device 10.

[0107] Will refer to Figure 19 and Figure 20An example of the structure of the electrochemical sensor section 12 in this case will be described. Figure 19 and Figure 20 : is a schematic cross-sectional view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology.

[0108] like Figure 19 As shown, electrochemical sensor portions 12A, 12B, and 12C are formed on one surface of a semiconductor substrate 173. For example, the semiconductor substrate 173 may be a first conductivity type (eg, n-type) semiconductor substrate formed of silicon or the like.

[0109] The sensitive films 121A, 121B, and 121C included in the electrochemical sensor portions 12A, 12B, and 12C are connected to wirings 125 via electrodes 123 and through-holes 124. These wirings 125 are connected to the vertical driving unit 161.

[0110] In addition, if Figure 20 As shown, a transistor 172 is formed along one surface of a semiconductor substrate 173 , and the transistor 172 may be a region of the first conductivity type.

[0111] The gate electrode 171 may be formed on one surface of the semiconductor substrate 173 via an insulating protective film (not shown). The gate electrode 171 is connected to the vertical driving unit 161. As the protective film, for example, SiO2 or the like may be used.

[0112] Furthermore, the sensitive films 121A, 121B, and 121C included in the electrochemical sensor portions 12A, 12B, and 12C are connected to the transistor 172 via the electrode 123, the through-hole 124, and the wiring 125. The wiring 125A may be connected to the IQ conversion circuit 131.

[0113] The above contents described with respect to the electrochemical sensor cell according to the fourth embodiment of the present technology can be applied to other embodiments of the present technology unless otherwise technically contradictory.

[0114] [5. Fifth embodiment of the present technology (Example 5 of the electrochemical sensor unit)] exist Figure 1 and Figure 18 In the illustrated configuration example, each of two or more electrochemical sensor sections 12 is connected to one IQ conversion circuit 131. At the same time, one electrochemical sensor section 12 may be connected to one IQ conversion circuit 131. Figure 21 Explain this point. Figure 21 is a circuit diagram showing a configuration example of a circuit including the electrochemical sensor cell 1 according to an embodiment of the present technology.

[0115] like Figure 21As shown, one electrochemical sensor portion 12 is connected to one IQ conversion circuit 131. For example, the electrochemical sensor portion 12A is connected to the IQ conversion circuit 131A.

[0116] Will refer to Figure 22 Such a configuration example of the device 10 including the electrochemical sensor portion 12 is described. Figure 22 1 is a block diagram showing a configuration example of a device 10 including an electrochemical sensor section 12 according to an embodiment of the present technology. Figure 22 As shown, the apparatus 10 includes a vertical driving unit 161, a system control unit 162, a pixel array unit 166 including an IQ conversion circuit 131, a response signal output circuit including an AD conversion circuit 132, a data storage unit 163, a horizontal driving unit 164, and a signal processing unit 165. Conventionally known techniques can be used for each component.

[0117] At least a part of the electrochemical sensor portion 12 is arranged in an array form in the pixel array unit 166. One electrochemical sensor portion 12 and one IQ conversion circuit 131 are connected to each other to constitute one pixel.

[0118] Will refer to Figure 23 and Figure 24 An example of the structure of the electrochemical sensor section 12 in this case will be described. Figure 23 and Figure 24 : is a schematic cross-sectional view showing a configuration example of the electrochemical sensor section 12 according to an embodiment of the present technology.

[0119] like Figure 23 As shown, electrochemical sensor portions 12A, 12B, and 12C are formed on one surface of a semiconductor substrate 173. For example, the semiconductor substrate 173 may be a first conductivity type (eg, n-type) semiconductor substrate formed of silicon or the like.

[0120] The sensitive films 121A, 121B, and 121C included in the electrochemical sensor portions 12A, 12B, and 12C are connected to wirings 125 via electrodes 123 and through-holes 124. These wirings 125 may be connected to the vertical driving unit 161.

[0121] In addition, if Figure 24 As shown, a transistor 172 is formed along one surface of a semiconductor substrate 173 , and the transistor 172 may be a region of the first conductivity type.

[0122] The sensitive films 121A, 121B, and 121C included in the electrochemical sensor portions 12A, 12B, and 12C are connected to the semiconductor substrate 173 via the electrodes 123, the through holes 124, and the wiring 125. The alternating current i outputted from the sensitive films 121A, 121B, and 121C via the electrodes 123, the through holes 124, and the wiring 125 is in Output to the IQ conversion circuit 131.

[0123] The IQ conversion circuit 131 may include, for example, a transimpedance amplifier (TIA) 13111 and an analog multiplier 1312 .

[0124] The TIA 1311 receives the AC current output from the electrochemical sensor unit 12. in The converted voltage signal is calculated at high speed by the analog multiplier 1312. The analog multiplier 1312 is not particularly limited, and a conventionally known analog multiplier can be used. Specific examples of the analog multiplier include a commonly used Gilbert cell analog multiplier.

[0125] Although not shown, the IQ conversion circuit 131 may further include a low-pass filter (LPF). The LPF extracts a direct current (DC) component from the calculation result of the analog multiplier. The DC components of the I and Q signals are related to the real and imaginary components of the input signal. Therefore, the amplitude and phase of the electrochemical sensor section 12 can be calculated, which makes it possible to calculate the impedance at the measurement point. Specific examples of the LPF include a repetitive current (RC) low-pass filter.

[0126] The signal output from the IQ conversion circuit 131 is supplied to the AD conversion circuit 132 via the wiring 125 .

[0127] The above contents described with respect to the electrochemical sensor cell according to the fifth embodiment of the present technology can be applied to other embodiments of the present technology unless otherwise technically contradicted.

[0128] [6. Sixth embodiment of the present technology (Example 6 of the electrochemical sensor unit)] The shape of each of the IQ electrode 123A and the AC electrode 123B is not limited to the above embodiment. Each of the IQ electrode 123A and the AC electrode 123B may be in contact with the sensitive film 121. Figure 25 An example of the shape of each of the IQ electrode 123A and the AC electrode 123B is described. Figure 25 : is a schematic plan view showing an example of the shape of the electrode 123 according to an embodiment of the present technology.

[0129] exist Figure 25, an area 126 corresponding to the periphery of the contact surface of the sensitive film 121 that contacts the chemical substances is shown.

[0130] like Figure 25 As shown in FIG. 1A , each of the IQ electrode 123A and the AC electrode 123B may be shaped like a letter C in a plan view, and an end portion thereof may be in contact with the sensitive film 121 .

[0131] like Figure 25 As shown in FIG. 8 , each of the IQ electrode 123A and the AC electrode 123B may be shaped like a letter P in a plan view, with an end thereof contacting the sensitive film 121 .

[0132] like Figure 25 As shown in FIG. 3C , the shape of each of the IQ electrode 123A and the AC electrode 123B may be rectangular in a plan view, and almost the entire surface thereof may be in contact with the sensitive film 121. For example, the rectangular shape includes a square, a rectangle, a square with rounded corners, and a rectangle with rounded corners.

[0133] The shape of each of the IQ electrode 123A and the AC electrode 123B is not limited to Figure 25 The shape of each of the IQ electrode 123A and the AC electrode 123B may be, for example, a polygon such as a triangle, a pentagon, or a hexagon. In addition, the shapes of the IQ electrode 123A and the AC electrode 123B may be different from each other.

[0134] However, it is preferable that the contact area between the IQ electrode 123A and the sensitive film 121 and the contact area between the AC electrode 123B and the sensitive film 121 are substantially the same. As a result, the AC signal applied to the electrochemical sensor portion 12 and the response signal generated by the electrochemical sensor portion 12 can be suppressed from being offset.

[0135] The above contents described with respect to the electrochemical sensor cell according to the sixth embodiment of the present technology can be applied to other embodiments of the present technology unless otherwise technically contradictory.

[0136] [7. Seventh embodiment of the present technology (Example of an electrochemical sensor unit for odor components)] The present technology provides an electrochemical sensor cell for odor components including two or more electrochemical sensor sections 12, each connected to one AC signal generating unit 11, wherein each electrochemical sensor section 12 includes a sensitive film 121 whose physical properties change in response to an odor component in a sample, and the sensitive films 121 are separated from each other in a plan view by at least one of an insulating film 122 and an electrode 123.

[0137] That is, the electrochemical sensor cell described above is applied to odor component recognition. The configuration of the electrochemical sensor cell used for odor component recognition is similar to the configuration described above, and therefore, its description will not be given here.

[0138] In this specification, "odor component" can include any component of the above-mentioned chemical substances that stimulates some or all of the receptors present in the nasal cavity. For example, in the nasal cavity, in addition to olfactory receptors, there are also receptors of the trigeminal nerve that control stimuli such as cold, heat, and pain, and the odor component in this technology is a broad concept that includes all components that stimulate some or all of these receptors. Specifically, for example, in the case of using menthol as an odor component, menthol can act as a stimulant via olfactory receptors and a cold stimulant via trigeminal nerve receptors (TRPA1 channel).

[0139] Note that in addition to components that can be detected by humans as odors, odor components also include components that cannot be detected by humans but have a certain effect on humans when inhaled. For example, inhaled medical sedatives and odorless gases (such as oxygen and carbon dioxide) that affect the human body when inhaled are also included in odor components.

[0140] The above contents described with respect to the electrochemical sensor unit for odor components according to the seventh embodiment of the present technology can be applied to other embodiments of the present technology unless there is a technical contradiction.

[0141] [8. Eighth embodiment of the present technology (Example 1 of the manufacturing method of the electrochemical sensor cell) The present technology provides a method for manufacturing an electrochemical sensor cell, including: forming a sensitive film whose physical properties change in response to a chemical substance in a sample; and separating the sensitive films from each other via at least one of an insulating film and an electrode in a plan view.

[0142] In the manufacture of the electric sensor unit according to the embodiment of the present technology, for example, a conventionally known photolithography technique and a conventionally known dry etching technique or wet etching technique can be combined.

[0143] Will refer to Figures 26A to 26K illustrate Figure 2 An example of a method for manufacturing an electrical sensor unit is shown. Figures 26A to 26K It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology.

[0144] First, if Figure 26A As shown, a photoresist 127 is applied to one surface of the layer formed with the wiring 125. The photoresist is a composition whose physical properties such as solubility change in response to light, electron beams, or the like.

[0145] Then, if Figure 26B As shown, the photomask 15 is placed and light is irradiated from above in the figure. Therefore, the portion where the photomask 15 is not placed is irradiated with light. The solubility of the photoresist 127 changes only in the portion irradiated with light.

[0146] Then, if Figure 26C As shown, the photoresist in the portion where the solubility has changed is removed, and, for example, dry etching is performed. As a result, openings 128 are formed. Note that through-holes are formed in these openings 128 in a later step.

[0147] Then, if Figure 26D As shown, the photomask 15 is placed and light is irradiated from above in the figure. Therefore, the portion where the photomask 15 is not placed is irradiated with light. The solubility of the photoresist 127 changes only in the portion irradiated with light.

[0148] Then, if Figure 26E As shown, the photoresist in the portion where the solubility has changed is removed, and, for example, dry etching is performed. As a result, openings 129 are formed. Note that electrodes are formed in these openings 129 in a later step.

[0149] Then, if Figure 26F As shown, a metal material 130 is deposited as a film. Note that this metal material will become electrodes and vias in later steps.

[0150] Then, if Figure 26G As shown, the surface is polished by, for example, chemical mechanical polishing (CMP). As a result, the electrode 123 is formed.

[0151] Then, if Figure 26H As shown, an insulating film 122 is formed.

[0152] Then, if Figure 26I As shown, the photomask 15 is placed and light is irradiated from above in the figure. Therefore, the portion where the photomask 15 is not placed is irradiated with light. The solubility of the insulating film 122 changes only in the portion irradiated with light.

[0153] Then, if Figure 26J As shown, the insulating film in the portion where the solubility has changed is removed, and, for example, dry etching is performed. As a result, openings 151 are formed. Note that a sensitive film is formed in these openings 151 in a later step.

[0154] Finally, if Figure 26KAs shown, sensitive films 121A, 121D, and 121G whose physical properties change in response to chemical substances in a sample are applied to the opening 151. The sensitive films 121A, 121D, and 121G are separated from each other by an insulating film 122. In order to make the types of the sensitive films 121A, 121D, and 121G different from each other, for example, the sensitive films can be applied by a technique such as inkjet or dispenser.

[0155] The above contents described with respect to the method for manufacturing the electrochemical sensor cell according to the eighth embodiment of the present technology can be applied to other embodiments of the present technology unless there is a technical contradiction.

[0156] [9. Ninth embodiment of the present technology (Example 2 of the manufacturing method of the electrochemical sensor cell)] Will refer to Figures 27A to 27J illustrate Figure 13 An example of a method for manufacturing an electrical sensor unit is shown. Figures 27A to 27J It is a schematic cross-sectional view for explaining a method of manufacturing an electrical sensor unit according to an embodiment of the present technology.

[0157] First, if Figure 27A As shown, a photoresist 127 is applied to one surface of the layer where the wiring 125 is formed.

[0158] Then, if Figure 27B As shown, the photomask 15 is placed and light is irradiated from above in the figure. Therefore, the portion where the photomask 15 is not placed is irradiated with light. The solubility of the photoresist 127 changes only in the portion irradiated with light.

[0159] Then, if Figure 27C As shown, the photoresist in the portion where the solubility has changed is removed, and, for example, dry etching is performed. As a result, openings 128 are formed. Note that through holes are formed in these openings 128 in a later step.

[0160] Then, if Figure 27D As shown, the photomask 15 is placed and light is irradiated from above in the figure. Therefore, the portion where the photomask 15 is not placed is irradiated with light. The solubility of the photoresist 127 changes only in the portion irradiated with light.

[0161] Then, if Figure 27E As shown, the photoresist in the portion where the solubility has changed is removed, and, for example, dry etching is performed. As a result, openings 129 are formed. Note that electrodes and vias are formed in these openings 129 in a later step.

[0162] Then, if Figure 27F As shown, a metal material 130 is deposited as a film. Note that this metal material will become electrodes and vias in later steps.

[0163] Then, if Figure 27G As shown, the surface is polished by, for example, chemical mechanical polishing (CMP). As a result, electrodes 123 and through holes are formed.

[0164] Then, if Figure 27H As shown, the photomask 15 is placed and light is irradiated from above in the figure. Therefore, the portion where the photomask 15 is not placed is irradiated with light. The solubility of the photoresist 127 changes only in the portion irradiated with light.

[0165] Then, if Figure 27I As shown, the photoresist in the portion where the solubility has changed is removed, and, for example, dry etching is performed. At this time, preferably, conditions are employed in which the selectivity ratio of the insulating film to the metal material is high and the insulating film is preferentially etched. As a result, openings 151 are formed. Note that a sensitive film will be formed in these openings 151 in a later step.

[0166] Finally, if Figure 27J As shown, sensitive films 121 whose physical properties change in response to chemicals in a sample are formed in openings 151. The sensitive films 121 are separated from each other via electrodes 123. To make the types of the sensitive films 121 different from each other, for example, the sensitive films can be coated by techniques such as inkjet or dispenser.

[0167] The above contents described with respect to the method for manufacturing the electrochemical sensor cell according to the ninth embodiment of the present technology can be applied to other embodiments of the present technology unless there is a technical contradiction.

[0168] Note that the present technology can also adopt the following configurations. [1] An electrochemical sensor unit comprising: Two or more electrochemical sensor sections, each of which is connected to an alternating current (AC) signal generating unit, wherein Each of the electrochemical sensor portions includes a sensitive membrane whose physical properties change in response to a chemical substance in a sample, and The sensitive films are separated from each other via at least one of an insulating film and an electrode in a plan view. [2] The electrochemical sensor cell according to [1], wherein At least a portion of the electrochemical sensor portions are arranged in an array. [3] The electrochemical sensor cell according to [1] or [2], wherein The sensitive films included in two or more of the electrochemical sensor portions are of different types. [4] The electrochemical sensor cell according to any one of [1] to [3], wherein The sensitive film has a contact surface that contacts the chemical substance, and The contact surfaces included in the two or more electrochemical sensor portions have different sizes. [5] The electrochemical sensor cell according to [4], wherein The size of the contact surface varies depending on the type of the sensitive membrane. [6] The electrochemical sensor cell according to any one of [1] to [5], wherein Frequencies input to the AC signal generating units of the two or more electrochemical sensor portions are different from each other. [7] The electrochemical sensor cell according to any one of [3] to [6], wherein The frequency of the AC signal generating unit input to the two or more electrochemical sensor portions is different depending on at least one of the type and size of the sensitive film. [8] The electrochemical sensor cell according to any one of [1] to [7], further comprising: One or more response signal output circuits that output response signals from the electrochemical sensor portion, wherein At least a portion of the response signal output circuit includes an in-phase / quadrature-phase (IQ) conversion circuit, and At least a portion of the electrodes include an IQ electrode connected to the IQ conversion circuit and an AC electrode connected to the AC signal generating unit. [9] The electrochemical sensor cell according to [8], wherein The sensitive film has a contact surface that contacts the chemical substance, and The IQ electrodes and the AC electrodes are arranged on opposite sides of the contact surface.

[10] The electrochemical sensor cell according to [8] or [9], wherein An area where the IQ electrode and the sensitive film are in contact with each other is substantially the same as an area where the AC electrode and the sensitive film are in contact with each other.

[11] The electrochemical sensor cell according to any one of [8] to

[10] , wherein One of the electrochemical sensor sections is connected to one of the IQ conversion circuits.

[12] The electrochemical sensor cell according to any one of [8] to

[11] , wherein The two or more electrochemical sensor sections are respectively connected to one IQ conversion circuit.

[13] The electrochemical sensor cell according to any one of [8] to

[12] , further comprising: An identification system unit identifies the chemical substance based on the output from the response signal output circuit.

[14] The electrochemical sensor cell according to any one of [1] to

[13] , wherein The sensitive film comprises an organic polymer.

[15] The electrochemical sensor cell according to any one of [1] to

[14] , wherein The sensitive film comprises an inorganic material.

[16] The electrochemical sensor cell according to any one of [1] to

[15] , wherein The sensitive membrane contains olfactory cells.

[17] The electrochemical sensor cell according to any one of [1] to

[16] , wherein The sample is in any one of a gaseous state, a liquid state, a semi-solid state, and a solid state.

[18] An electrochemical sensor unit for odor components, comprising: Two or more electrochemical sensor sections, each of which is connected to one AC signal generating unit, wherein Each of the electrochemical sensor portions includes a sensitive membrane whose physical properties change in response to an odor component in a sample, and The sensitive films are separated from each other via at least one of an insulating film and an electrode in a plan view.

[19] A method for manufacturing an electrochemical sensor unit, the method comprising: forming a sensitive film whose physical properties change in response to chemicals in the sample; and The sensitive films are separated from each other via at least one of an insulating film and an electrode in a plan view. Reference Signs List

[0169] 1 electrochemical sensor unit 11 AC signal generation unit 12 Electrochemical sensor unit 121 sensitive film 122 Insulation Film 123 electrodes 123A IQ Electrode 123B AC electrode 124 through holes 125 Wiring 13 Response signal output circuit 131 IQ conversion circuit 132 AD conversion circuit 14 Identification system unit

Claims

1. An electrochemical sensor unit comprising: Two or more electrochemical sensor sections, each of which is connected to an alternating current (AC) signal generating unit, wherein Each of the electrochemical sensor portions includes a sensitive membrane whose physical properties change in response to a chemical substance in a sample, and The sensitive films are separated from each other via at least one of an insulating film and an electrode in a plan view.

2. The electrochemical sensor cell according to claim 1, wherein At least a portion of the electrochemical sensor portions are arranged in an array.

3. The electrochemical sensor cell according to claim 1, wherein The sensitive films included in two or more of the electrochemical sensor portions are of different types.

4. The electrochemical sensor cell according to claim 1, wherein The sensitive film has a contact surface that contacts the chemical substance, and The contact surfaces included in the two or more electrochemical sensor portions have different sizes.

5. The electrochemical sensor cell according to claim 4, wherein The size of the contact surface varies depending on the type of the sensitive membrane.

6. The electrochemical sensor cell according to claim 1, wherein Frequencies input to the AC signal generating units of the two or more electrochemical sensor portions are different from each other.

7. The electrochemical sensor cell according to claim 3, wherein The frequency of the AC signal generating unit input to the two or more electrochemical sensor portions is different depending on at least one of the type and size of the sensitive film.

8. The electrochemical sensor unit according to claim 1, further comprising: One or more response signal output circuits that output response signals from the electrochemical sensor portion, wherein At least a portion of the response signal output circuit includes an in-phase / quadrature-phase (IQ) conversion circuit, and At least a portion of the electrodes include an IQ electrode connected to the IQ conversion circuit and an AC electrode connected to the AC signal generating unit.

9. The electrochemical sensor cell according to claim 8, wherein The sensitive film has a contact surface that contacts the chemical substance, and The IQ electrodes and the AC electrodes are arranged on opposite sides of the contact surface.

10. The electrochemical sensor cell according to claim 8, wherein An area where the IQ electrode and the sensitive film are in contact with each other is substantially the same as an area where the AC electrode and the sensitive film are in contact with each other.

11. The electrochemical sensor cell according to claim 8, wherein One of the electrochemical sensor sections is connected to one of the IQ conversion circuits.

12. The electrochemical sensor cell according to claim 8, wherein The two or more electrochemical sensor sections are respectively connected to one IQ conversion circuit.

13. The electrochemical sensor cell according to claim 8, further comprising: An identification system unit identifies the chemical substance based on the output from the response signal output circuit.

14. The electrochemical sensor cell according to claim 1, wherein The sensitive film comprises an organic polymer.

15. The electrochemical sensor cell according to claim 1, wherein The sensitive film comprises an inorganic material.

16. The electrochemical sensor cell according to claim 1, wherein The sensitive membrane contains olfactory cells.

17. The electrochemical sensor cell according to claim 1, wherein The sample is in any one of a gaseous state, a liquid state, a semi-solid state, and a solid state.

18. An electrochemical sensor unit for an odor component, comprising: Two or more electrochemical sensor sections, each of which is connected to one AC signal generating unit, wherein Each of the electrochemical sensor portions includes a sensitive membrane whose physical properties change in response to an odor component in a sample, and The sensitive films are separated from each other via at least one of an insulating film and an electrode in a plan view.

19. A method for manufacturing an electrochemical sensor unit, the method comprising: forming a sensitive film whose physical properties change in response to chemicals in the sample; and The sensitive films are separated from each other via at least one of an insulating film and an electrode in a plan view.

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