Electronic-grade hydrogen peroxide production equipment

Abstract

The electronic-grade hydrogen peroxide production equipment comprises a pretreatment box, a cover body, a filtering assembly, a purifying cylinder and an adjusting assembly, an opening is formed in the top end of the pretreatment box, an operation platform is arranged on one side of the pretreatment box, the cover body is connected with the pretreatment box through a lifting assembly, and the cover body can cover the opening to form isolation; the filtering assembly comprises a first filtering part and a second filtering part, the first filtering part and the second filtering part are distributed in the pretreatment box through the supporting assembly and used for filtering hydrogen peroxide raw materials step by step, the purifying cylinder is connected with the liquid outlet end of the pretreatment box, and high-selectivity resin is arranged in the purifying cylinder; the adjusting assembly is used for adjusting the first filtering part and the second filtering part to be vertically distributed at intervals or transversely distributed at intervals; when the filter plate needs to be replaced or cleaned, the first filter part and the second filter part are transversely distributed at an interval, and the filter plate does not need to be disassembled from top to bottom, so that the convenience is effectively improved, and the influence on the efficiency of producing the electronic-grade hydrogen peroxide is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of cleaning devices, in particular to electronic-grade hydrogen peroxide production equipment. Background Art

[0002] Electronic-grade hydrogen peroxide is a high-purity oxidant, mainly used in the manufacturing and processing of semiconductor and electronics industries. It has extremely strong oxidizing properties and can oxidize many organic and inorganic substances. Its purity has a very important impact on the yield, electrical performance and reliability of integrated circuits.

[0003] Electronic-grade hydrogen peroxide undergoes multi-stage filtration during production. To reduce space occupation, the multi-stage filter plates are generally arranged vertically. This results in a gradual decrease in the amount of particulate matter filtered from the filter plates distributed from top to bottom, resulting in different frequencies for replacing or cleaning filter plates at different heights. In particular, when replacing the lower filter plate, all filter plates need to be removed in sequence. Therefore, the present invention proposes an electronic-grade hydrogen peroxide production device that can solve the above-mentioned problem. Summary of the Invention

[0004] The object of the present invention is to provide an electronic grade hydrogen peroxide production device to solve the problems raised in the above background technology.

[0005] To achieve the above object, the present invention provides the following technical solution: an electronic grade hydrogen peroxide production device, comprising:

[0006] A pretreatment box has an opening at the top and an operating platform is provided on one side of the pretreatment box;

[0007] A cover body is connected to the pretreatment box through a lifting assembly, the cover body can cover the opening to form an isolation, and a liquid pipe for conveying hydrogen peroxide raw material is provided on the top of the cover body;

[0008] A filter assembly includes a first filter portion and a second filter portion, wherein the first filter portion and the second filter portion are distributed in the pretreatment box via a support assembly and are used to filter the hydrogen peroxide raw material step by step. The first filter portion and the second filter portion each include a frame, and a plurality of filter plates are vertically spaced and inserted into the frame;

[0009] A purification cartridge connected to the liquid outlet of the pretreatment tank, wherein a highly selective resin is provided in the purification cartridge;

[0010] The adjustment component is used to adjust the first filter part and the second filter part to be distributed in a vertical interval or a horizontal interval.

[0011] As a preferred technical solution, the operating platform has a guide plate extending obliquely downward, and a guardrail is provided on the outer side of the guide plate, and the guardrail is flush with the top of the pretreatment box.

[0012] As a preferred technical solution, a drainage groove is provided on the guide plate, and the drainage groove is connected to a drainage pipe.

[0013] As a preferred technical solution, the lifting assembly includes an electric cylinder body and a guide rod, the movable rod of the electric cylinder body is connected to the cover body, and the guide rod is passed through the cover body.

[0014] As a preferred technical solution, there are two groups of support components, each group of support components includes a horizontal rail, a vertical rail and a movable frame, the horizontal rail is connected to the vertical rail, one end of the movable frame is rotatably connected to a vertical slider, and the other end is rotatably connected to a horizontal slider, the vertical slider is slidably connected to the vertical rail, and the horizontal slider is slidably connected to the horizontal rail.

[0015] As a preferred technical solution, the adjustment component includes a motor body, an output end of the motor body is connected to a main gear, a slave gear is provided on the movable frame, and the main gear is meshed with the slave gear.

[0016] As a preferred technical solution, the two groups of horizontal sliding blocks are connected to the frame of the first filter part, the two groups of vertical sliding blocks are respectively provided with guide rails, and the frame of the second filter is slidably connected to the two groups of guide rails.

[0017] As a preferred technical solution, when the first filter portion is located above the second filter portion and is distributed vertically at intervals, it is used to filter the hydrogen peroxide raw material; when the first filter portion is located in front of the second filter portion and is distributed laterally at intervals, the first filter portion is used above the operating platform for filter plate replacement or cleaning; when the first filter portion is located behind the second filter portion and is distributed laterally at intervals, the second filter portion can be pulled above the operating platform for filter plate replacement or cleaning.

[0018] As a preferred technical solution, each set of the guide rails is provided with bolts, and the bolts are used to lock the frame on the second filter part.

[0019] A method for producing electronic-grade hydrogen peroxide is also provided, which is used in any of the above technical solutions and specifically comprises the following steps:

[0020] S1. Control the adjustment component to adjust the first filter portion and the second filter portion to be spaced apart in a horizontal direction so that the first filter portion is located in front of or behind the second filter portion, and replace or clean the filter plate on the first filter portion or the second filter portion;

[0021] S2, controlling the adjustment component to adjust the first filter portion and the second filter portion to be vertically spaced apart, and to position the first filter portion above the second filter portion;

[0022] S3, controlling the lifting assembly to drive the cover to cover the opening to form an isolation, opening the liquid pipe, allowing the hydrogen peroxide raw material to enter the pretreatment box and pass through the multiple groups of filter plates on the first filter part and the second filter part for filtering treatment;

[0023] S4. The hydrogen peroxide raw material that has been filtered step by step enters the purification cylinder and is purified by a highly selective resin.

[0024] Compared with the prior art, the present invention has the following beneficial effects:

[0025] The hydrogen peroxide raw material passes through the multiple groups of filter plates on the first filter section and the second filter section in the pretreatment box to filter out particulate matter step by step, and then enters the purification cylinder where the chloride ions and sulfate ions in the hydrogen peroxide raw material are adsorbed by the highly selective resin, so that the electronic grade hydrogen peroxide produced has less impurities and higher purity;

[0026] When the filter plate needs to be replaced or cleaned, the first filter part and the second filter part are arranged in a horizontal interval, and there is no need to remove the filter plate from top to bottom, which effectively improves convenience and reduces the impact on the efficiency of producing electronic-grade hydrogen peroxide;

[0027] The first filter portion and the second filter plate can be replaced or cleaned above the operating platform, so that the filtered particles are not easily dropped into the pretreatment box, thereby improving the quality of the produced electronic grade hydrogen peroxide. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0029] Figure 2 This is a schematic diagram of the connection between the cover body and the pretreatment box of the present invention;

[0030] Figure 3 This is a schematic diagram of the internal structure of the pretreatment box of the present invention;

[0031] Figure 4 This is a schematic diagram of the operating platform structure of the present invention;

[0032] Figure 5 This is a schematic diagram of the driving relationship between the adjustment component and the first filter part and the second filter part of the present invention;

[0033] Figure 6 This is a schematic diagram of the connection between the first filter portion, the second filter portion and the support assembly of the present invention;

[0034] In the figure: 10, pretreatment box; 20, operating platform; 21, guide plate; 22, guardrail; 23, drainage trough; 24, drainage pipe; 30, cover body; 31, liquid pipe; 40, lifting assembly; 41, electric cylinder body; 42, guide rod; 50, filter assembly; 51, first filter part; 52, second filter part; 53, frame; 54, filter plate; 60, support assembly; 61, horizontal rail; 62, vertical rail; 63, movable frame; 64, vertical slider; 65, horizontal slider; 66, guide rail; 67, bolt; 70, purification cylinder; 80, adjustment assembly; 81, motor body; 82, main gear; 83, slave gear. DETAILED DESCRIPTION

[0035] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0036] See also Figure 1-6

[0037] Example 1: Provided is an electronic grade hydrogen peroxide production device:

[0038] The pretreatment box 10 has an opening at the top, and a liquid pipe 31 for conveying hydrogen peroxide raw materials is provided on the top of the cover body 30. A valve body is installed on the liquid pipe 31. The liquid pipe 31 is connected to the tank storing the hydrogen peroxide raw materials through a hose. The hydrogen peroxide raw materials enter the pretreatment box 10 through the liquid pipe 31 for filtration treatment. The outlet end of the liquid pipe 31 is provided with a liquid outlet pipe 31. The liquid outlet pipe 31 has multiple liquid outlet heads, so that the hydrogen peroxide raw materials can be discharged in a dispersed manner through the multiple liquid outlet heads.

[0039] The filter assembly 50 includes a first filter portion 51 and a second filter portion 52. The first filter portion 51 and the second filter portion 52 both include a frame 53. A plurality of filter plates 54 are vertically spaced apart and inserted into the frame 53. The frame 53 has slots for inserting the filter plates 54. The inner walls of the slots are provided with rubber strips for tightening the filter plates 54. The filter plates 54 have a certain degree of concavity from the outside to the center, so that the hydrogen peroxide raw material is not easily leaked along the outside of the filter plates 54 and is not filtered.

[0040] The first filter section 51 and the second filter section 52 are distributed in the pretreatment box 10 through the support assembly 60. When filtering the hydrogen peroxide raw material, the first filter section 51 is located above the second filter section 52 and is vertically spaced apart. The pore sizes of the multiple groups of filter plates 54 on the first filter section 51 and the second filter section 52 gradually decrease from top to bottom, such as 5 μm, 3 μm, 1 μm, and 0.5 μm, thereby achieving step-by-step filtration of the hydrogen peroxide raw material, and particulate matter in the hydrogen peroxide raw material can be retained on the filter plates 54.

[0041] The purification cylinder 70 is connected to the liquid outlet of the pretreatment tank 10. The hydrogen peroxide raw material filtered step by step can be pumped into the purification cylinder 70 through a corrosion-resistant pump. The purification cylinder 70 is provided with a highly selective resin. The highly selective resin is used to adsorb chloride ions and sulfate ions in the hydrogen peroxide raw material, so that the produced electronic-grade hydrogen peroxide has less impurities and higher purity.

[0042] An operating platform 20 is provided on one side of the pretreatment box 10, and the adjustment component 80 is used to adjust the first filter part 51 and the second filter part 52 to be distributed vertically or horizontally, that is, the positions of the first filter part 51 and the second filter part 52 can be changed as needed.

[0043] During the filtration process, the first filter section 51 is located above the second filter section 52 and is distributed vertically at intervals. The particulate matter filtered by the multiple groups of filter plates 54 on the first filter section 51 and the second filter section 52 gradually decreases from top to bottom. When the filter plates 54 need to be replaced or cleaned, the first filter section 51 and the second filter section 52 are distributed horizontally at intervals, and there is no need to remove the filter plates 54 from top to bottom, which effectively improves convenience, thereby reducing the impact on the efficiency of producing electronic-grade hydrogen peroxide, and the filter plates 54 can be replaced or cleaned on the operating platform 20.

[0044] Example 2: Provided is an electronic grade hydrogen peroxide production device:

[0045] The cover body 30 is connected to the pretreatment box 10 through a lifting assembly 40. The lifting assembly 40 includes an electric cylinder body 41 and a guide rod 42. The movable rod of the electric cylinder body 41 is connected to the cover body 30, and the guide rod 42 is passed through the cover body 30. When producing electronic-grade hydrogen peroxide, the lifting assembly 40 drives the cover body 30 to cover the opening to form an isolation, so that external dust and other impurities will not enter the pretreatment box 10.

[0046] The operating platform 20 has a guide plate 21 extending obliquely downward, and a guardrail 22 is provided on the outside of the guide plate 21. The guardrail 22 is flush with the top of the pretreatment box 10. A discharge groove 23 is opened on the guide plate 21, and the discharge groove 23 is connected to a discharge pipe 24, so that the fallen particles can be discharged from the discharge groove 23 along the guide plate 21.

[0047] Example 3: Provide an electronic grade hydrogen peroxide production device:

[0048] There are two groups of support assemblies 60, each group of support assemblies 60 includes a horizontal rail 61, a vertical rail 62 and a movable frame 63. The horizontal rail 61 and the vertical rail 62 are connected. One end of the movable frame 63 is rotatably connected to a vertical slider 64, and the other end is rotatably connected to a horizontal slider 65. The vertical slider 64 is slidably connected to the vertical rail 62, and the horizontal slider 65 is slidably connected to the horizontal rail 61. The two groups of horizontal sliders 65 are connected to the frame 53 of the first filter part 51. The two groups of vertical sliders 64 are respectively provided with guide rails 66. The frame 53 of the second filter is slidably connected to the two groups of guide rails 66.

[0049] The first filter portion 51 can be adjusted in position by moving laterally along the horizontal rail 61, and the second filter portion 52 can be adjusted in position by moving vertically along the vertical rail 62, so that when the first filter portion 51 is located above the second filter portion 52 and is distributed in a vertical interval, the hydrogen peroxide raw material can be filtered. When the first filter portion 51 is located in front of the second filter portion 52 and is distributed in a horizontal interval, the filter plate 54 of the first filter portion 51 is replaced or cleaned above the operating platform 20. When the first filter portion 51 is located behind the second filter portion 52 and is distributed in a horizontal interval, the second filter portion 52 can be pulled and moved along the guide rail 66 to the top of the operating platform 20 to replace or clean the filter plate 54, so that the filtered particulate matter is not easily dropped into the pretreatment box 10, thereby driving the horizontal slider 65 to slide along the horizontal rail 61 and the vertical slider 64 to slide along the vertical rail 62.

[0050] The adjustment assembly 80 includes a motor body 81, the output end of the motor body 81 is connected to a main gear 82, and a slave gear 83 is provided on the movable frame 63. The main gear 82 is meshed with the slave gear 83. The motor body 81 drives the main gear 82 to rotate, so that the slave gear 83 rotates around the main gear 82.

[0051] Each set of guide rails 66 is provided with bolts 67, which are used to lock the frame 53 of the second filter part 52. The provided bolts 67 can prevent the second filter part 52 from sliding out of the guide rails 66 during vertical movement. When the filter plate 54 on the second filter part 52 needs to be replaced or cleaned, the bolts 67 can be loosened.

[0052] Example 4 provides a method for producing electronic grade hydrogen peroxide, which specifically includes the following steps:

[0053] S1. Control the adjustment assembly 80 to adjust the first filter portion 51 and the second filter portion 52 to be spaced apart in a horizontal direction so that the first filter portion 51 is located in front of or behind the second filter portion 52. Replace or clean the filter plate 54 on the first filter portion 51 or the second filter portion 52.

[0054] S2. Control the adjustment component 80 to adjust the first filter portion 51 and the second filter portion 52 to be vertically spaced apart, and to position the first filter portion 51 above the second filter portion 52;

[0055] S3: Control the lifting assembly 40 to drive the cover 30 to cover the opening to form an isolation, open the liquid pipe 31, and allow the hydrogen peroxide raw material to enter the pretreatment box 10 and pass through the multiple groups of filter plates 54 on the first filter part 51 and the second filter part 52 for filtering treatment;

[0056] S4. The hydrogen peroxide raw material that has been filtered step by step enters the purification cylinder 70 and is purified by a highly selective resin.

[0057] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. An electronic grade hydrogen peroxide production equipment, characterized in that, include: A pretreatment box (10) has an opening at the top, and an operating platform (20) is provided on one side of the pretreatment box (10); A cover (30) is connected to the pretreatment box (10) via a lifting assembly (40), the cover (30) can cover the opening to form an isolation, and a liquid pipe (31) for conveying hydrogen peroxide raw material is provided on the top of the cover (30); A filter assembly (50) includes a first filter portion (51) and a second filter portion (52). The first filter portion (51) and the second filter portion (52) are distributed in the pretreatment box (10) through a support assembly (60) and are used to filter the hydrogen peroxide raw material step by step. The first filter portion (51) and the second filter portion (52) both include a frame (53). A plurality of filter plates (54) are vertically spaced and inserted into the frame (53). A purification cylinder (70) is connected to the liquid outlet of the pretreatment box (10), and a high-selectivity resin is arranged in the purification cylinder (70); The adjustment component (80) is used to adjust the first filter portion (51) and the second filter portion (52) to be distributed in a vertical interval or a horizontal interval.

2. An electronic grade hydrogen peroxide production equipment according to claim 1, characterized in that, The operating platform (20) has a guide plate (21) extending obliquely downward, and a guardrail (22) is provided on the outer side of the guide plate (21), and the guardrail (22) is flush with the top of the pretreatment box (10).

3. An electronic grade hydrogen peroxide production equipment according to claim 2, characterized in that, The guide plate (21) is provided with a waste removal groove (23), and the waste removal groove (23) is connected to a waste removal pipe (24).

4. An electronic grade hydrogen peroxide production equipment according to claim 1, characterized in that, The lifting assembly (40) comprises an electric cylinder body (41) and a guide rod (42); the movable rod of the electric cylinder body (41) is connected to the cover body (30); and the guide rod (42) is passed through the cover body (30).

5. An electronic grade hydrogen peroxide production equipment according to claim 1, characterized in that, There are two groups of support assemblies (60), and each group of support assemblies (60) includes a transverse rail (61), a vertical rail (62) and a movable frame (63). The transverse rail (61) and the vertical rail (62) are connected. One end of the movable frame (63) is rotatably connected to a vertical slider (64), and the other end is rotatably connected to a transverse slider (65). The vertical slider (64) is in sliding contact with the vertical rail (62), and the transverse slider (65) is in sliding contact with the transverse rail (61).

6. An electronic grade hydrogen peroxide production equipment according to claim 5, characterized in that, The adjustment assembly (80) includes a motor body (81), the output end of the motor body (81) is connected to a main gear (82), a slave gear (83) is provided on the movable frame (63), and the main gear (82) is meshed with the slave gear (83).

7. An electronic grade hydrogen peroxide production equipment according to claim 6, characterized in that, The two groups of horizontal sliders (65) are connected to the frame (53) of the first filter part (51), and the two groups of vertical sliders (64) are respectively provided with guide rails (66), and the frame (53) of the second filter is slidably connected to the two groups of guide rails (66).

8. An electronic grade hydrogen peroxide production equipment according to claim 7, characterized in that, When the first filter portion (51) is located above the second filter portion (52) and is distributed in a vertically spaced manner, it is used to filter the hydrogen peroxide raw material; when the first filter portion (51) is located in front of the second filter portion (52) and is distributed in a horizontally spaced manner, the first filter portion (51) is located above the operating platform (20) for replacing or cleaning the filter plate (54); when the first filter portion (51) is located behind the second filter portion (52) and is distributed in a horizontally spaced manner, the second filter portion (52) can be pulled above the operating platform (20) for replacing or cleaning the filter plate (54).

9. An electronic grade hydrogen peroxide production equipment according to claim 7 or 8, characterized in that, Each set of the guide rails (66) is provided with a bolt (67), and the bolt (67) is used to lock the frame (53) on the second filter part (52).

10. A method for producing electronic-grade hydrogen peroxide, used in the electronic-grade hydrogen peroxide production equipment according to any one of claims 1 to 9, comprising the following steps: S1, controlling the adjustment component (80) to adjust the first filter portion (51) and the second filter portion (52) to be arranged in a transversely spaced distribution so that the first filter portion (51) is located in front of or behind the second filter portion (52), and replacing or cleaning the filter plate (54) on the first filter portion (51) or the second filter portion (52); S2, controlling the adjustment component (80) to adjust the first filter portion (51) and the second filter portion (52) to be vertically spaced apart, and to position the first filter portion (51) above the second filter portion (52); S3, controlling the lifting assembly (40) to drive the cover (30) to cover the opening to form an isolation, and opening the liquid pipe (31), so that the hydrogen peroxide raw material enters the pretreatment box (10) and passes through the multiple groups of filter plates (54) on the first filter part (51) and the second filter part (52) step by step for filtering treatment; S4. The hydrogen peroxide raw material after step-by-step filtration enters the purification cylinder (70) and is purified by a highly selective resin.

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