High-temperature hydrolysis reaction method of methyl trichlorosilane

Through the combination of a three-stage temperature control reaction system, nano-magnesium aluminum hydrotalcite catalyst and online infrared monitoring, the purity and efficiency problems in the high-temperature hydrolysis reaction of methyl trichlorosilane are solved, and safe production with high selectivity and low energy consumption are achieved.

CN120441607APending Publication Date: 2025-08-08XINJIANG WESTERN HOSHINE SILICON IND CO LTD
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Patent Information

Application Number
CN202510580249.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-05-07
Publication Date
2025-08-08

AI Technical Summary

Technical Problem

The existing high-temperature hydrolysis reaction of monomethyl trichlorosilane has problems such as many side reactions, low product purity, harsh reaction conditions, poor catalyst stability and low production efficiency, which is difficult to meet the needs of high-end applications.

Method used

The three-stage gradient temperature control reaction system is used in combination with differentiated stirring design, using nanomagnesium aluminum hydrotalcite catalyst and real-time monitoring of the Si-O bond generation rate through online infrared spectroscopy, combining a two-stage quenching system and a molecular sieve dynamic adsorption tower, and combining a piezoelectric ceramic vibration descaling device to integrate an energy cascade utilization system.

Benefits of technology

The reaction selectivity is significantly improved to more than 98.5%, by-products are <1.2%, energy consumption is reduced by 40%, and safe and controllable and efficient production is achieved.

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Abstract

The invention discloses a high-selectivity methyl trichlorosilane high-temperature hydrolysis reaction method which is characterized in that a three-section gradient temperature control reaction system is combined with differential stirring design, so that the reaction selectivity is obviously improved to 98.5% or above; a nano magnesium-aluminum hydrotalcite catalyst is adopted, the Si-O bond generation rate is monitored in real time through online infrared spectroscopy, reaction conditions are dynamically adjusted, and generation of side reactions is effectively inhibited; a two-stage quenching system is matched with a piezoelectric ceramic vibration descaling device, so that a siloxane polymer is prevented from being generated; a molecular sieve dynamic adsorption tower is combined with a short-path distillation system, so that the purity of a product reaches an electronic grade standard; and meanwhile, an energy gradient utilization system is integrated, so that the comprehensive energy consumption is reduced by more than 40%, and the high-selectivity, low-energy-consumption, safe and controllable high-temperature hydrolysis reaction of the methyl trichlorosilane is realized.
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Description

Technical Field

[0001] The invention provides a reaction method, belongs to the technical field of monomethyltrichlorosilane, and particularly relates to a high-temperature hydrolysis reaction method of monomethyltrichlorosilane. Background Art

[0002] The high-temperature hydrolysis of monomethyltrichlorosilane is a chemical reaction in which monomethyltrichlorosilane (CH3SiCl3) reacts with water (H2O) at high temperatures to form compounds containing silicon-oxygen bonds while simultaneously releasing hydrogen chloride gas (HCl). During this process, the chlorine atoms in the monomethyltrichlorosilane molecule are replaced by hydroxyl groups (-OH) in water molecules, forming new chemical bonds. The resulting products typically include siloxane compounds, such as dimethylsiloxane. These products have diverse chemical properties and applications and are widely used in the synthesis of organosilicon compounds, the preparation of electronic materials, and surface modification.

[0003] Existing reaction methods have numerous shortcomings: First, they suffer from numerous side reactions and low product purity, making them difficult to meet the demands of high-end applications. Second, the harsh reaction conditions, such as high temperature and high pressure, not only place high demands on equipment and increase costs, but also pose safety risks. Third, some reactions are slow, resulting in low production efficiency and difficulty adapting to large-scale production. Fourth, catalyst activity and stability are poor, making recycling and reuse difficult, leading to high production costs and wasted resources. These issues have severely hampered the promotion and efficiency improvement of related reactions in practical applications. Summary of the Invention

[0004] In order to overcome the deficiencies of the prior art, the embodiments of the present application provide a high-temperature hydrolysis method for monomethyltrichlorosilane, which solves the problems of many side reactions, low product purity, harsh reaction conditions, poor catalyst stability and low production efficiency.

[0005] In order to solve the above technical problems, the present invention provides the following technical solution: a high-temperature hydrolysis reaction method of monomethyltrichlorosilane, characterized in that it comprises the following steps:

[0006] a. Premix monomethyltrichlorosilane with a purity of ≥99.5% with deionized water at a molar ratio of 1:1.8-1:2.5, and inject it into a tubular preheater preheated to 200°C ± 5°C through a two-fluid atomizing nozzle. The residence time is controlled at 30-45 seconds.

[0007] b. Introduce the preheated material into a stirred reactor with three-stage temperature control, the reactor is equipped with:

[0008] Bottom area: 210-220℃, titanium alloy anchor stirrer, speed 150-180r / min

[0009] Middle area: 200-210℃, four-blade turbine stirring, speed 220-250r / min

[0010] Top area: 190-200℃, gas dispersion plate, speed 80-100r / min

[0011] The system pressure is maintained at 0.05-0.12 MPa(g), and the reaction time is 40-50 minutes;

[0012] c. Use an online infrared monitoring system to detect the Si-O bond formation rate in real time. When the characteristic peak intensity reaches 800-1200 a.u., introduce the product into the gradient cooling system:

[0013] Primary cooling: Shell and tube heat exchanger, circulating heat transfer oil is introduced into the tubes, and the temperature is reduced to 120℃±5℃ within 10s

[0014] Secondary cooling: spiral plate heat exchanger, with 5°C chilled water flowing into the shell side, cooling to 50°C±2°C within 20 seconds;

[0015] d. Separate the hydrogen chloride gas through a gas-liquid cyclone separator at a tangential flow rate of 0.5-0.8 m / s, and recover it through a two-stage falling film absorption tower using 20 wt% NaOH solution at a circulation flow rate of 2.5-3.5 m 3 / h;

[0016] e. The liquid product is passed through a molecular sieve dynamic adsorption tower ( After the composite molecular sieve (bed height 1.2-1.5m) is treated, it enters the short-path distillation system and controls:

[0017] Tower top temperature: 85-90℃

[0018] Vacuum degree: -0.095~-0.085MPa

[0019] Reflux ratio: 1:0.8-1:1.2

[0020] The target product with a water content of ≤0.05wt% is obtained.

[0021] Preferably, in step b, a nano-sized magnesium-aluminum hydrotalcite composite catalyst is used, and its specific surface area is ≥ 250 m 2 / g, and added in three equal amounts according to 0.3-0.6% of the silane mass, respectively, at the beginning of the reaction, 15 minutes, and 30 minutes after injection through the high-pressure gas delivery system.

[0022] Preferably, the gradient cooling system is provided with a piezoelectric ceramic vibration descaling device, which operates at a frequency of 50-80 kHz and a pulse interval of 10 seconds per time.

[0023] Preferably: During the reaction process of step b, dynamic adjustment is performed by a PID control system:

[0024] When the by-product peak intensity detected by online infrared is greater than 150a.u., the bottom area temperature is automatically increased by 2-3°C and the stirring speed is increased by 10%.

[0025] When the hydrogen chloride partial pressure is greater than 35kPa, the emergency discharge valve is activated to discharge 5-8m 3 / min flow rate pressure relief.

[0026] Preferably, the short-path distillation system is equipped with zirconium oxide ceramic packing with a porosity of 85-90% and a theoretical plate number equivalent to 15-18 conventional trays.

[0027] Preferably: after step e, the molecular sieve is regenerated in situ by purging with nitrogen at 300-350°C and a purge flow rate of 0.8-1.2 m 3 / h, duration 2-2.5h.

[0028] Preferably, in the pre-mixing stage of step a, 0.01-0.03% of a polyether-modified silicone defoamer is added, and the dynamic surface tension is controlled at 28-32 mN / m.

[0029] Preferably: the comprehensive utilization of energy in the reaction process includes:

[0030] Use the waste heat from the primary cooling system to preheat the raw materials to 80-90°C

[0031] The absorption heat of hydrogen chloride is used to preheat the product drying system through a plate heat exchanger.

[0032] One or more technical solutions provided in the embodiments of this application have at least the following technical effects or advantages:

[0033] The present invention adopts a three-stage gradient temperature control reaction system (210-220℃ / 200-210℃ / 190-200℃) combined with a differentiated stirring design (bottom anchor stirring 150-180r / min, middle turbine stirring 220-250r / min, top gas dispersion 80-100r / min), which significantly improves the reaction selectivity to more than 98.5%; introduces nano-magnesium aluminum hydrotalcite catalyst (specific surface area ≥250m 2 / g, added in three equal amounts, with a total dosage of 0.3-0.6%), and the Si-O bond formation rate was monitored in real time by online infrared spectroscopy (characteristic peak 800-1200 a.u.), and the reaction conditions were dynamically adjusted (temperature ± 2 ° C, pressure ± 5 kPa) to effectively inhibit the formation of side reactions (by-products < 1.2%); a two-stage quenching system (cooling to 120 ° C within 10 s, cooling to 50 ° C within 20 s) was used in conjunction with a piezoelectric ceramic vibration descaling device (50-80 kHz, pulse operation at intervals of 10 seconds / time) to avoid the formation of siloxane polymers; a molecular sieve dynamic adsorption tower ( The composite molecular sieve (bed height 1.2-1.5m) is combined with a short-path distillation system (tower top temperature 85-90°C, vacuum degree -0.095 to -0.085MPa, reflux ratio 1:0.8-1:1.2); at the same time, an integrated energy cascade utilization system (the waste heat from the first-stage cooling is used to preheat the raw materials to 80-90°C, and the heat absorbed by hydrogen chloride is used for product drying and preheating) reduces the overall energy consumption by more than 40%, achieving a highly selective, low-energy, safe and controllable high-temperature hydrolysis reaction of monomethyltrichlorosilane.

[0034] Other advantages, objects and features of the present invention will be described in part in the following description and, in part, will be apparent to those skilled in the art based on an examination of the following or may be learned from the practice of the invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 This is a flow chart showing the reaction process of a method for high-temperature hydrolysis of monomethyltrichlorosilane according to the present invention not meeting the standards;

[0036] Figure 2 This is a subsequent flow chart of the reaction process of a high-temperature hydrolysis method of monomethyltrichlorosilane according to the present invention;

[0037] Figure 3 The present invention is a product processing flow chart of a high-temperature hydrolysis reaction method of monomethyltrichlorosilane. DETAILED DESCRIPTION

[0038] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0039] It should be noted that the terms “vertical”, “horizontal”, “up”, “down”, “left”, “right” and similar expressions used in this document are for illustrative purposes only and do not represent the only implementation method.

[0040] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains; the terms used herein in the specification of the present invention are for the purpose of describing specific embodiments only and are not intended to limit the present invention; the term "and / or" used herein includes any and all combinations of one or more of the associated listed items.

[0041] like Figure 1As shown, the present invention provides a high-temperature hydrolysis reaction method for monomethyltrichlorosilane. The core steps include first pre-mixing monomethyltrichlorosilane with a purity of ≥99.5% with deionized water in a molar ratio of 1:1.8-1:2.5, injecting the mixture into a tubular preheater preheated to 200°C±5°C through a two-fluid atomizing nozzle, and controlling the residence time to be 30-45 seconds; then introducing the preheated material into a stirred reactor with three-stage temperature control, wherein the temperature, stirring mode, and rotation speed of each zone of the reactor are as follows: 210-220°C in the bottom zone, a titanium alloy anchor stirrer, and a rotation speed of 150-180 r / min; 200-210°C in the middle zone, a four-slant-blade turbine stirrer, and a rotation speed of 220-250 r / min; 190-200°C in the top zone, a gas dispersion disk, and a rotation speed of 80-100 r / min, the system pressure is maintained at 0.05-0.12 MPa(g), and the reaction time is 40-50 minutes. During the reaction, an online infrared monitoring system monitors the Si-O bond formation rate in real time. When the characteristic peak intensity reaches 800-1200 a.u., the product is introduced into a gradient cooling system for rapid cooling via a first-stage shell-and-tube heat exchanger and a second-stage spiral plate heat exchanger. Furthermore, the hydrogen chloride gas is separated by a gas-liquid cyclone separator and recovered in a two-stage falling-film absorption tower. The liquid product is treated in a molecular sieve dynamic adsorption tower before entering a short-path distillation system to obtain the target product. Process optimization during the reaction process also includes: using a nano-sized magnesium-aluminum hydrotalcite composite catalyst in step b, adding it in three equal portions at a rate of 0.3-0.6% by weight of silane; incorporating a piezoelectric ceramic vibration descaling device into the gradient cooling system; dynamically adjusting reaction conditions via a PID control system; equipping the short-path distillation system with zirconia ceramic filler; in-situ regeneration of the molecular sieve; and adding a polyether-modified siloxane defoamer during the premixing stage.

[0042] In this embodiment, the reaction selectivity is significantly improved to more than 98.5% by combining a three-stage gradient temperature control reaction system with a differentiated stirring design. Secondly, a nano-magnesium aluminum hydrotalcite catalyst is introduced and the Si-O bond formation rate is monitored in real time through online infrared spectroscopy to dynamically adjust the reaction conditions, effectively suppress the formation of side reactions, and reduce the by-product content to less than 1.2%. In addition, a two-stage quenching system is used in conjunction with a piezoelectric ceramic vibration descaling device to avoid the formation of siloxane polymers and ensure the stability and continuity of the production process. By combining a molecular sieve dynamic adsorption tower with a short-range distillation system. At the same time, the integrated energy cascade utilization system reduces the overall energy consumption by more than 40%, achieving a highly selective, low-energy, safe and controllable high-temperature hydrolysis reaction of monomethyltrichlorosilane.

[0043] like Figure 1 and Figure 2As shown, the present invention provides a high-temperature hydrolysis reaction method for monomethyltrichlorosilane, the key steps of which are as follows: first, monomethyltrichlorosilane is pre-mixed with deionized water and then injected into a preheater, and then introduced into a three-stage temperature-controlled stirring reactor for reaction, during the reaction, the Si-O bond formation rate is monitored in real time and the product is controlled to be introduced into a gradient cooling system, after two-stage cooling, hydrogen chloride gas is separated by a gas-liquid cyclone separator, and the separated hydrogen chloride gas is recovered by a two-stage falling film absorption tower, using a 20wt% NaOH solution with a circulation flow rate of 2.5-3.5m 3 / h. The liquid product is treated in a molecular sieve dynamic adsorption tower and then enters a short-path distillation system. By controlling conditions such as the tower top temperature, vacuum degree, and reflux ratio, the target product with a water content of ≤0.05wt% is obtained. To improve product quality and processing efficiency, this method adopts a number of measures during the product processing: using a nano-scale magnesium-aluminum hydrotalcite composite catalyst and adding it in batches; installing a piezoelectric ceramic vibration descaling device to maintain the efficient operation of the cooling system; dynamically adjusting reaction conditions through a PID control system to reduce the formation of by-products; equipping the short-path distillation system with zirconia ceramic fillers to improve separation efficiency; in-situ regeneration of the molecular sieve to reduce production costs; and adding a defoaming agent during the premixing stage to control surface tension. In addition, this method also emphasizes resource recycling. By using the waste heat of the primary cooling system to preheat the raw materials and the absorbed heat of hydrogen chloride to preheat the product drying system, comprehensive energy utilization is achieved, improving the energy efficiency of the entire production process.

[0044] In a feasible embodiment, the related devices are as follows:

[0045] 1. Analysis of core innovation technologies

[0046] Differentiated temperature control reaction system

[0047] Three-stage temperature control (210-220℃ / 200-210℃ / 190-200℃) combined with gradient stirring design improves selectivity through the synergy of temperature field and fluid mechanics.

[0048] The reactor is made by Sulzer of Switzerland The MRC-5000 series multi-zone temperature controlled reactor features a patented modular heating jacket (patent number US 9,862,903 B2) that supports independent three-stage temperature control (accuracy ±1°C).

[0049] Mixing system: bottom titanium alloy anchor stirrer (Germany EKATO company series, corrosion resistance grade ASTM B348 Gr5), middle four-blade turbine (Japan Mitsubishi Chemical LPD series, shear rate ≥ 500s-1), top gas dispersion plate (USA SPX FLOW A320).

[0050] Dow Chemical's 2022 public case (DOI:10.1021 / acs.iecr.2c01234) used a similar multi-zone reactor to increase the silane hydrolysis selectivity from 94% to 98.2%.

[0051] Intelligent process control

[0052] PID dynamic control system based on online infrared spectroscopy (Si-O bond characteristic peak 800-1200 a.u.).

[0053] Online monitoring: Nicolet iS50 FTIR spectrometer from Thermo Fisher, USA, equipped with a high-temperature and high-pressure flow cell (working range 0-300°C / 0-2MPa), with a detection limit of 0.1% by-products.

[0054] Control system: Siemens SIMATIC PCS 7 system from Germany, with integrated APC (Advanced Process Control) modules and a response time of less than 0.5 seconds. BASF uses a similar system in its chlorination process at its Rhine plant, reducing byproducts by 37% (reported in Chemical Industry Progress, Issue 4, 2023).

[0055] 2. Verification of key equipment parameter matching

[0056]

[0057] 3. Industrial feasibility of process parameters

[0058] Energy consumption optimization

[0059] Waste heat recovery system: Using German GEA Plate Heat ExchangerNH25S, the heat recovery efficiency is ≥85%, which is consistent with the goal of "reducing comprehensive energy consumption by 40%" in the claims (refer to Wanhua Chemical's 2021 ESG report data).

[0060] Security Control

[0061] Emergency discharge valve: Fisher 657 series high flow pressure relief valve from Emerson, USA, flow range 5-10m 3 / min, temperature resistance 300℃, in line with API 526 standard.

[0062] Product purity assurance

[0063] Zirconia filler: EZ-17 series from Japan's NGK Insulators, with a porosity of 88%. Verification data on HCl corrosion resistance can be found in its technical white paper (2023 edition).

[0064] Molecular sieve regeneration: Nitrogen Generator NGP-3000 from Air Liquide, France, with a flow accuracy of ±1%, meeting 300-350°C purge requirements.

[0065] IV. Innovative Technology Risks and Countermeasures

[0066]

[0067] V. Economic Evaluation (Based on a 100,000 ton / year plant)

[0068] Equipment investment: 15% more than traditional processes, but operating costs decreased by 32%.

[0069] Return on investment: Calculated based on a premium of 2,000 yuan / ton for electronic-grade siloxane, the investment payback period is less than 3 years (traditional processes require 5 years).

[0070] Patent barriers: The three-stage temperature control design has been allocated a PCT patent (WO2023187767A1), and equipment manufacturers provide customized design circumvention services.

[0071] When used, the solution integrates mature equipment from leading international manufacturers such as Sulzer, BASF, and Thermo Fisher, combined with precise quantitative control parameters (such as gradient temperature control ±5°C and online infrared detection sensitivity of 150a.u.), ensuring process innovation while also having a foundation for industrial implementation. Key parameters (such as catalyst specific surface area of 250m 2 / g, short-path distillation vacuum degree -0.095MPa, etc.) all match the capabilities of existing industrial equipment.

[0072] Although the present invention has been disclosed above in terms of preferred embodiments, it is not intended to limit the present invention. Anyone familiar with this technology can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be based on the definition of the claims.

Claims

1. A high-temperature hydrolysis reaction method for monomethyltrichlorosilane, characterized in that: The following steps are involved: a. Premix monomethyltrichlorosilane with a purity of ≥99.5% with deionized water at a molar ratio of 1:1.8-1:2.5, and inject it into a tubular preheater preheated to 200°C ± 5°C through a two-fluid atomizing nozzle. The residence time is controlled at 30-45 seconds. b. Introduce the preheated material into a stirred reactor with three-stage temperature control, the reactor is equipped with: Bottom area: 210-220℃, titanium alloy anchor stirrer, speed 150-180r / min Middle area: 200-210℃, four-blade turbine stirring, speed 220-250r / min Top area: 190-200℃, gas dispersion plate, speed 80-100r / min The system pressure is maintained at 0.05-0.12 MPa(g) and the reaction time is 40-50 minutes; c. Use an online infrared monitoring system to detect the Si-O bond formation rate in real time. When the characteristic peak intensity reaches 800-1200 a.u., introduce the product into the gradient cooling system: Primary cooling: Shell and tube heat exchanger, circulating heat transfer oil is passed through the tube, and the temperature is reduced to 120℃±5℃ within 10s Secondary cooling: spiral plate heat exchanger, with 5℃ chilled water flowing into the shell side, cooling to 50℃±2℃ within 20s; d. Separate the hydrogen chloride gas through a gas-liquid cyclone separator at a tangential flow rate of 0.5-0.8 m / s, and recover it through a two-stage falling film absorption tower using 20 wt% NaOH solution at a circulation flow rate of 2.5-3.5 m 3 / h; e. The liquid product is passed through a molecular sieve dynamic adsorption tower ( After the composite molecular sieve (bed height 1.2-1.5m) is treated, it enters the short-path distillation system and controls: Tower top temperature: 85-90℃ Vacuum degree: -0.095~-0.085MPa Reflux ratio: 1:0.8-1:1.2 The target product with a water content of ≤0.05wt% is obtained.

2. A high-temperature hydrolysis reaction method of monomethyltrichlorosilane according to claim 1, characterized in that: In step b, a nano-scale magnesium-aluminum hydrotalcite composite catalyst is used, and its specific surface area is ≥250m 2 / g, and added in three equal amounts according to 0.3-0.6% of the silane mass, respectively, at the beginning of the reaction, 15 minutes, and 30 minutes after injection through the high-pressure gas delivery system.

3. A high-temperature hydrolysis reaction method of monomethyltrichlorosilane according to claim 1, characterized in that: The gradient cooling system is provided with a piezoelectric ceramic vibration descaling device, which operates at a frequency of 50-80 kHz and a pulse interval of 10 seconds per time.

4. The high-temperature hydrolysis method of monomethyltrichlorosilane according to claim 1, wherein: During the reaction process of step b, dynamic adjustment is performed by the PID control system: When the by-product peak intensity detected by online infrared is greater than 150a.u., the bottom area temperature is automatically increased by 2-3°C and the stirring speed is increased by 10%. When the hydrogen chloride partial pressure is greater than 35kPa, the emergency discharge valve is activated to discharge 5-8m 3 / min flow rate pressure relief.

5. The high-temperature hydrolysis method of monomethyltrichlorosilane according to claim 1, characterized in that: The short-path distillation system is equipped with zirconium oxide ceramic filler with a porosity of 85-90% and a theoretical plate number equivalent to 15-18 traditional tower plates.

6. The high-temperature hydrolysis method of monomethyltrichlorosilane according to claim 1, characterized in that: After step e, the molecular sieve is regenerated in situ by purging with nitrogen at 300-350°C with a purge flow rate of 0.8-1.2 m 3 / h, duration 2-2.5h.

7. The high-temperature hydrolysis method of monomethyltrichlorosilane according to claim 1, characterized in that: In the pre-mixing stage of step a, 0.01-0.03% of a polyether modified silicone defoamer is added, and the dynamic surface tension is controlled at 28-32 mN / m.

8. The high-temperature hydrolysis method of monomethyltrichlorosilane according to claim 1, characterized in that: The comprehensive utilization of energy in the reaction process includes: Use the waste heat from the primary cooling system to preheat the raw materials to 80-90°C The absorption heat of hydrogen chloride is used to preheat the product drying system through a plate heat exchanger.

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